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CN110986792B - A high-precision detection device and detection method of a one-dimensional ball or cone-and-socket array - Google Patents

A high-precision detection device and detection method of a one-dimensional ball or cone-and-socket array Download PDF

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CN110986792B
CN110986792B CN201911289586.7A CN201911289586A CN110986792B CN 110986792 B CN110986792 B CN 110986792B CN 201911289586 A CN201911289586 A CN 201911289586A CN 110986792 B CN110986792 B CN 110986792B
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CN110986792A (en
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赵会宁
于连栋
丁雯静
蒲松
符晗
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Hefei University of Technology
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers

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Abstract

本发明公开一种一维球或锥窝阵列的高精度检测装置，包括L型基座、一维球或锥窝阵列，所述L型基座具有水平部和竖直部的L形结构，所述L型基座竖直部表面固定连接有一维球阵列或锥窝阵列，所述L型基座水平部固定连接有一维高精度位移台，在所述一维高精度位移台上固定有测头；所述测头包括固定底座，所述固定底座上按直线依次安装有透镜、分光镜以及激光器，所述分光镜一侧固定有四象限探测器，所述四象限探测器上设有电源接口及信号输出接口，所述信号输出接口连接数据采集模块相应的通道口。其方法通过几何运算可测量两标准球球心以及两锥窝之间距离。解决了锥窝精度校准问题，也使性能评价过程更加简单和方便，节省了测量成本。

Figure 201911289586

The invention discloses a high-precision detection device for a one-dimensional ball or cone-and-socket array, comprising an L-shaped base and a one-dimensional ball or cone-and-socket array, wherein the L-shaped base has an L-shaped structure of a horizontal part and a vertical part, The vertical surface of the L-shaped base is fixedly connected to a one-dimensional ball array or a cone-and-socket array, and the horizontal part of the L-shaped base is fixedly connected to a one-dimensional high-precision displacement table, and a one-dimensional high-precision displacement table is fixed on the one-dimensional high-precision displacement table. A measuring head; the measuring head includes a fixed base, on which a lens, a beam splitter and a laser are installed in sequence in a straight line, a four-quadrant detector is fixed on one side of the beam splitter, and the four-quadrant detector is provided with A power supply interface and a signal output interface, wherein the signal output interface is connected to the corresponding channel port of the data acquisition module. The method can measure the distance between the centers of two standard spheres and the two cones and sockets through geometric operations. The problem of precision calibration of the cone and socket is solved, the performance evaluation process is simpler and more convenient, and the measurement cost is saved.

Figure 201911289586

Description

High-precision detection device and detection method for one-dimensional ball or cone nest array
Technical Field
The invention belongs to the technical field of length verification, and relates to a high-precision detection device and a detection method for a one-dimensional ball or cone-nest array.
Background
Aiming at the problem of precision tracing of a one-dimensional ball or cone nest array adopted by the performance evaluation of an articulated arm type coordinate measuring machine or a laser tracker, a high-precision three-coordinate measuring machine or special measuring equipment is mainly adopted for calibration. However, when the method is used for calibrating the one-dimensional spherical array, the calibration accuracy reaches a higher level, but fitting errors exist. For the precision calibration of the cone pits, due to the special structural problem, no matter a three-coordinate measuring machine or a special measuring instrument can not solve the precision calibration problem, the invention adopts a non-contact measuring mode, can solve the precision calibration problem between two cone pits, and realizes the high-precision detection of a one-dimensional ball or cone pit array.
Disclosure of Invention
The invention aims to overcome the defects of the technology and provides a high-precision detection device and a detection method for a one-dimensional ball or cone array, so that the problem of precision traceability of the one-dimensional ball or cone array is solved, the performance evaluation process of an articulated arm type coordinate measuring machine and a laser tracker is simpler and more convenient, and the measurement cost is saved to a great extent.
In order to achieve the purpose, the technical scheme of the invention is as follows:
a high-precision detection device for a one-dimensional ball or cone nest array comprises an L-shaped base 4 and the one-dimensional ball or cone nest array 2, and is characterized in that the L-shaped base is provided with an L-shaped structure with a horizontal part and a vertical part, the surface of the vertical part of the L-shaped base 4 is fixedly connected with the one-dimensional ball array or cone nest array 2, the horizontal part of the L-shaped base 4 is fixedly connected with a one-dimensional high-precision displacement table 1, and a measuring head 3 is fixed on the one-dimensional high-precision displacement table 1; the measuring head comprises a fixed base 33 fixed on a one-dimensional high-precision displacement table, a lens 32, a spectroscope 31 and a laser 34 are sequentially installed on the fixed base 33 according to a straight line, a four-quadrant detector 35 is fixed on one side of the spectroscope 31, a power supply interface and a signal output interface are arranged on the four-quadrant detector 35, the signal output interface is connected with a channel port corresponding to a data acquisition module, and the signal output interface is connected with a channel port corresponding to the data acquisition module in the X-direction and the Y-direction displacement.
Preferably, the one-dimensional high-precision displacement table comprises a one-dimensional high-precision displacement table base 14 fixed on the L-shaped base, the upper surface of the one-dimensional high-precision displacement table base 14 is provided with two guide rails 12, the two guide rails 12 are slidably connected with a one-dimensional high-precision displacement table working table 11 driven by a motor 15, and the outer side of the one-dimensional high-precision displacement table base 14 is fixedly connected with a measuring reflecting mirror of a laser interferometer 13 through a support so as to be matched with the laser interferometer to position the displacement length of the one-dimensional high-precision displacement table.
Preferably, the one-dimensional ball array 2 comprises a standard ball 21 and a ball rod 22, wherein the ball rod 22 is fixed on the surface of the vertical part of the L-shaped base, a notch of the ball rod is provided with a magnet, and the standard ball 21 is partially embedded into the notch and is attracted and fixed by the magnet.
A detection method of a high-precision detection device of a one-dimensional ball or cone-fossa array is characterized by comprising the following steps:
(1) fixing the measuring head 3 on a one-dimensional high-precision displacement table working table 11, driving the one-dimensional high-precision displacement table 1 by a motor, so that the laser of a laser 34 on the measuring head 3 irradiates one standard ball surface of the one-dimensional ball array, moving the one-dimensional high-precision displacement table by the motor 15 until the laser of the laser 34 on the measuring head 3 irradiates the next standard ball surface of the one-dimensional ball array, and repeating the steps to measure;
(2)、yijindicates the displacement distance, Deltax, of the one-dimensional high-precision displacement stage 1 measured by the laser interferometer 13 when the probe moves from the ith reference sphere position to the jth reference sphere positioni、ΔziIs the offset distance of the center of the ith standard sphere in the X direction and the Z direction respectively, Deltaxj、ΔzjIs the offset distance of the center of the jth standard ball in the X direction and the Z direction respectively; the offset amount Deltax in the X direction and the Z direction from the center of the ith standard ball to the center of the jth standard ballij、ΔzijRespectively as follows:
Δxij＝Δxi-Δxj (1)
Δzij＝Δzi-Δzj (2)
the two standard ball centers O can be obtained from the formulas (1) and (2)i、OjActual distance between
Figure BDA0002316815760000021
The method comprises the following steps:
Figure BDA0002316815760000022
the measuring method of the one-dimensional conical pit array is consistent with the measuring method of the same-dimensional spherical array in the measuring principle.
Compared with the prior art, the invention has the following beneficial effects:
1) the measuring method adopted by the invention is non-contact measurement, the measuring precision is high, the measuring mode is flexible, and the problem of precision calibration between two conical pits can be solved.
2) The cost of the materials and the device adopted by the invention is lower than the price of the traditional calibrated instrument and equipment, and the measurement cost is saved to a great extent.
3) The components and small parts of the one-dimensional ball or cone array high-precision detection device have relatively low installation and debugging requirements in the measurement process, so that the calibration process is simpler and more convenient.
Drawings
FIG. 1 is a schematic diagram of the high-precision detection device of the one-dimensional ball or cone-and-socket array according to the present invention.
Fig. 2 is a schematic diagram of a high-precision one-dimensional displacement table of the one-dimensional ball or cone array high-precision detection device of the invention.
Fig. 3 is a schematic diagram of a measuring head of the one-dimensional ball or cone-and-socket array high-precision detection device of the present invention.
Fig. 4 is a schematic diagram of one-dimensional ball array measurement of the one-dimensional ball or cone-and-socket array high-precision detection device of the invention.
Fig. 5 is a schematic diagram of one-dimensional cone-pit array measurement of the one-dimensional ball or cone-pit array high-precision detection device of the invention.
FIG. 6 is a schematic diagram of the measurement of a four-quadrant detector of the one-dimensional ball or cone-and-socket array high-precision detection device of the present invention.
The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the invention and together with the description, serve to explain the principles of the invention.
Detailed Description
The technical solution in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings.
As shown in fig. 1 and 5, a high-precision detection device for a one-dimensional ball or cone array comprises an L-shaped base 4 and a one-dimensional ball or cone array 2, wherein the L-shaped base has an L-shaped structure with a horizontal part and a vertical part, the surface of the vertical part of the L-shaped base 4 is fixedly connected with the one-dimensional ball array or cone array 2, the horizontal part of the L-shaped base 4 is fixedly connected with a one-dimensional high-precision displacement table 1, and a measuring head 3 is fixed on the one-dimensional high-precision displacement table 1; as shown in fig. 3 and 6, the measuring head includes a fixed base 33 fixed on the one-dimensional high-precision displacement table, a lens 32, a spectroscope 31 and a laser 34 are sequentially installed on the fixed base 33 in a straight line, a four-quadrant detector 35 is fixed on one side of the spectroscope 31, a power supply interface and a signal output interface are arranged on the four-quadrant detector 35, and the signal output interface is connected with a corresponding channel port of the data acquisition module. Wherein, the X, Y direction displacement signal output interface is respectively connected with the corresponding channel ports of the data acquisition module.
As shown in fig. 2, the one-dimensional high-precision displacement table includes a one-dimensional high-precision displacement table base 14 fixed to an L-shaped base, two guide rails 12 are arranged on the upper surface of the one-dimensional high-precision displacement table base 14, a one-dimensional high-precision displacement table working table 11 driven by a motor 15 is connected to the two guide rails 12 in a sliding manner, and a measuring reflecting mirror of a laser interferometer 13 is fixedly connected to the outer side of the one-dimensional high-precision displacement table base 14 through a support so as to cooperate with the laser interferometer to position the displacement length of the one-dimensional high-precision displacement table.
As shown in fig. 4, the one-dimensional ball array 2 comprises a standard ball 21 and a ball rod 22, wherein the ball rod 22 is fixed on the surface of the vertical part of the L-shaped base, a notch of the ball rod is provided with a magnet, and the standard ball 21 is partially embedded into the notch and is attracted and fixed by the magnet.
A detection method of a high-precision detection device of a one-dimensional ball or cone-fossa array comprises the following steps:
(1) fixing the measuring head 3 on a one-dimensional high-precision displacement table working table 11, driving the one-dimensional high-precision displacement table 1 by a motor, so that the laser of a laser 34 on the measuring head 3 irradiates one standard ball surface of the one-dimensional ball array, moving the one-dimensional high-precision displacement table by the motor 15 until the laser of the laser 34 on the measuring head 3 irradiates the next standard ball surface of the one-dimensional ball array, and repeating the steps to measure;
(2)、yijindicating that the measuring head is positioned by the ith standard ballWhen the displacement is moved to the j-th reference sphere position, the displacement distance, Deltax, of the one-dimensional high-precision displacement stage 1 is measured by the laser interferometer 13i、ΔziIs the offset distance of the center of the ith standard sphere in the X direction and the Z direction respectively, Deltaxj、ΔzjIs the offset distance of the center of the jth standard ball in the X direction and the Z direction respectively; the offset amount Deltax in the X direction and the Z direction from the center of the ith standard ball to the center of the jth standard ballij、ΔzijRespectively as follows:
Δxij＝Δxi-Δxj (1)
Δzij＝Δzi-Δzj (2)
the two standard ball centers O can be obtained from the formulas (1) and (2)i、OjActual distance between
Figure BDA0002316815760000041
The method comprises the following steps:
Figure BDA0002316815760000042
the measuring method of the one-dimensional conical pit array is consistent with the measuring method of the same-dimensional spherical array in the measuring principle.
The described embodiments are only some embodiments of the invention, not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

Claims (3)

1.一种一维球或锥窝阵列的高精度检测装置，包括L型基座(4)、一维球或锥窝阵列(2)，其特征在于，所述L型基座具有水平部和竖直部的L形结构，所述L型基座(4)竖直部表面固定连接有一维球阵列或锥窝阵列(2)，所述L型基座(4)水平部固定连接有一维高精度位移台(1)，在所述一维高精度位移台(1)上固定有测头(3)；所述测头包括固定底座(33)，所述固定底座上按直线依次安装有透镜(32)、分光镜(31)以及激光器(34)，所述分光镜(31)一侧固定有四象限探测器(35)，所述四象限探测器(35)上设有电源接口及信号输出接口，所述信号输出接口连接数据采集模块的通道口；1. A high-precision detection device of a one-dimensional ball or cone array, comprising an L-shaped base (4), a one-dimensional ball or cone array (2), wherein the L-shaped base has a horizontal portion and the L-shaped structure of the vertical part, the vertical surface of the L-shaped base (4) is fixedly connected with a one-dimensional ball array or cone-and-socket array (2), and the horizontal part of the L-shaped base (4) is fixedly connected with a A three-dimensional high-precision displacement table (1), a measuring head (3) is fixed on the one-dimensional high-precision displacement platform (1); the measuring head includes a fixed base (33), and the fixed base is installed on the fixed base in sequence in a straight line A lens (32), a beam splitter (31) and a laser (34) are provided, a four-quadrant detector (35) is fixed on one side of the beam splitter (31), and a power interface is provided on the four-quadrant detector (35) and a signal output interface, the signal output interface is connected to the channel port of the data acquisition module; 所述一维高精度位移台1，包括固定于L型基座(4)的一维高精度位移台底座(14)，所述一维高精度位移台底座(14)上表面设有两根导轨(12)，两根所述导轨(12)上滑动连接有由电机(15)驱动的一维高精度位移台工作台(11)，所述一维高精度位移台底座(14)外侧通过支架固定连接有激光干涉仪(13)的测量反射镜，以配合激光干涉仪定位一维高精度位移台位移长度。The one-dimensional high-precision displacement stage 1 includes a one-dimensional high-precision displacement stage base (14) fixed on an L-shaped base (4), and two high-precision displacement stage bases (14) are provided on the upper surface thereof. Guide rails (12), two of the guide rails (12) are slidably connected with a one-dimensional high-precision displacement stage table (11) driven by a motor (15), and the outer side of the one-dimensional high-precision displacement stage base (14) passes through The bracket is fixedly connected with the measuring mirror of the laser interferometer (13), so as to cooperate with the laser interferometer to locate the displacement length of the one-dimensional high-precision displacement stage. 2.根据权利要求1所述一种一维球或锥窝阵列的高精度检测装置，其特征在于，所述一维球阵列(2)，包括标准球(21)和球杆(22)，所述球杆(22)固定于L型基座竖直部表面，所述球杆(22)的凹口设有磁铁，所述标准球(21)部分嵌入凹口中并被磁铁吸附固定。2. The high-precision detection device of a one-dimensional ball or cone-and-socket array according to claim 1, wherein the one-dimensional ball array (2) comprises a standard ball (21) and a ball bar (22), The ball bar (22) is fixed on the surface of the vertical part of the L-shaped base, the recess of the ball bar (22) is provided with a magnet, and the standard ball (21) is partially embedded in the recess and is adsorbed and fixed by the magnet. 3.根据权利要求1-2任一所述一种一维球或锥窝阵列的高精度检测装置的检测方法，其特征在于，包括以下步骤：3. according to the detection method of the high-precision detection device of a kind of one-dimensional ball or cone-and-socket array described in any one of claim 1-2, it is characterized in that, comprising the following steps: (1)、将测头(3)固定在一维高精度位移台工作台(11)上，电机15驱动一维高精度位移台(1)，使得测头(3)上激光器(34)的激光照射在一维球阵列其中一个标准球表面，电机15移动一维高精度位移台(1)，直到测头(3)上激光器(34)的激光照射到一维球阵列的下一个标准球表面，然后重复上述步骤，进行测量；(1) Fix the probe (3) on the one-dimensional high-precision displacement stage table (11), and the motor 15 drives the one-dimensional high-precision displacement stage (1), so that the laser (34) on the probe (3) is The laser irradiates the surface of one standard sphere in the one-dimensional ball array, and the motor 15 moves the one-dimensional high-precision stage (1) until the laser light of the laser (34) on the probe (3) irradiates the next standard ball of the one-dimensional ball array surface, and then repeat the above steps to measure; (2)、yij表示测头由第i个标准球(21)位置移动到第j个标准球位置时，由激光干涉仪(13)测得的一维高精度位移台(1)的位移距离，Δxi、Δzi是第i个标准球分别在X方向和Z方向上球心的偏移距离，Δxj、Δzj是第j个标准球分别在X方向和Z方向上球心的偏移距离；则由第i个标准球球心到第j个标准球的球心在X方向和Z方向上的偏移量Δxij、Δzij分别为：(2), y ij represents the displacement of the one-dimensional high-precision stage (1) measured by the laser interferometer (13) when the probe moves from the position of the ith standard sphere (21) to the position of the jth standard sphere Distance, Δx i and Δzi are the offset distances of the i-th standard sphere in the X and Z directions respectively, Δx j and Δz j are the j- th standard spheres in the X and Z directions respectively. offset distance; then the offsets Δx ij and Δz ij in the X and Z directions from the center of the i-th standard sphere to the center of the j-th standard sphere are: Δxij＝Δxi-Δxj (1)Δx ij =Δx i -Δx j (1) Δzij＝Δzi-Δzj (2)Δz ij =Δz i -Δz j (2) 由公式(1)(2)可得两个标准球球心Oi、Oj之间实际距离
Figure FDA0002973819960000021
是：From the formula (1) (2), the actual distance between the centers O i and O j of the two standard spheres can be obtained
Figure FDA0002973819960000021
Yes:
Figure FDA0002973819960000022
Figure FDA0002973819960000022
 一维锥窝阵列的测量方法及测量原理同一维球阵列的测量方法一致。The measurement method and measurement principle of the one-dimensional cone-and-socket array are the same as the measurement method of the same-dimensional ball array.
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