CN111083185A - Photoetching machine data communication system and communication method thereof - Google Patents
Photoetching machine data communication system and communication method thereof Download PDFInfo
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- 230000006854 communication Effects 0.000 title claims abstract description 49
- 238000004891 communication Methods 0.000 title claims abstract description 49
- 238000000034 method Methods 0.000 title claims abstract description 14
- 238000001259 photo etching Methods 0.000 title claims abstract description 11
- 230000005540 biological transmission Effects 0.000 claims abstract description 27
- 230000007175 bidirectional communication Effects 0.000 claims description 21
- 238000001459 lithography Methods 0.000 claims description 10
- 238000012795 verification Methods 0.000 claims description 3
- 238000012545 processing Methods 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 2
- 238000010200 validation analysis Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04L—TRANSMISSION OF DIGITAL INFORMATION, e.g. TELEGRAPHIC COMMUNICATION
- H04L67/00—Network arrangements or protocols for supporting network services or applications
- H04L67/01—Protocols
- H04L67/10—Protocols in which an application is distributed across nodes in the network
- H04L67/104—Peer-to-peer [P2P] networks
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04L—TRANSMISSION OF DIGITAL INFORMATION, e.g. TELEGRAPHIC COMMUNICATION
- H04L67/00—Network arrangements or protocols for supporting network services or applications
- H04L67/50—Network services
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Abstract
The invention provides a photoetching machine data communication system and a communication method thereof, wherein the whole system distributes a card arranging end and an intelligent terminal, wherein the intelligent terminal sends image data to a data receiving and sending adapter, the image data of the data receiving and sending adapter is converted into an image data packet and sent to a data receiving and sending unit in a point-to-point transmission protocol mode; the invention adopts simpler data packet format to realize data point-to-point communication transmission protocol, reduces traditional network control MAC chip on hardware, greatly reduces cost, simultaneously software completely abandons network protocol, and adopts point-to-point communication transmission protocol, and simultaneously the invention jumps out of network structure for communication control, completely abandons network influence, is not limited by network data format, and does not use various data of compatible shape and color, eliminates a large amount of redundant data, greatly improves effective transmission efficiency of data, and improves system performance.
Description
Technical Field
The present invention relates to the field of data communication systems, and more particularly, to a data communication system and a communication method thereof for a lithography machine.
Background
In the data communication system of the photoetching machine in the prior art, a kilomega network card is adopted at a terminal to control chip receiving and a network PHY layer receiving and sending component to be responsible for receiving and sending image data, a photoetching equipment end adopts the PHY layer receiving and sending component to receive the image data and send the image data to an MAC layer chip, the MAC layer chip is responsible for packing and outputting upper layer data and unpacking the received data packet and then sending the data packet to the upper layer, a CPU analyzes a network protocol, namely TCP/IP, and then controls and processes the image data receiving and sending through an application layer and finally outputs the data packet to the photoetching equipment end;
because too much gigabit network redundant data causes too high communication baud rate, too high product electrical property specification, great design difficulty, high element performance requirement, high cost, high and expensive test instrument configuration, complex software and low actual communication efficiency; although the circuit uses a network PHY layer transceiving component, and directly utilizes a channel and a carrier modulation and demodulation mode of a network, a data packet in the whole communication line does not need to adopt a data transmission protocol of the network, a target connection point is searched and filtered in thousands of connection points in the network, and meanwhile, a network protocol set for being compatible with a plurality of different communications is a good strategy for effectively solving the problem in a complicated environment and a thousands of network space environment.
Disclosure of Invention
In order to solve the problems, the invention provides a data communication system of a photoetching machine and a communication method thereof, which adopt a simpler data packet format to realize a data point-to-point communication transmission protocol, reduce the traditional network control MAC chip on hardware, greatly reduce the cost, and simultaneously adopt the point-to-point communication transmission protocol, thereby greatly improving the effective transmission efficiency of data and improving the system performance except a large amount of redundant data.
In order to achieve the above object, the technical solution adopted by the present invention is to provide a data communication system for a lithography machine, comprising an intelligent terminal, a card issuing and arranging end, and a data transceiving adapter, wherein the card issuing and arranging end comprises a dual-port cache and a data transceiving unit corresponding to the data transceiving adapter; the data receiving and sending adapter is in bidirectional communication connection with the intelligent terminal, and the data receiving and sending adapter is in bidirectional communication connection with the data receiving and sending unit; the output end of the data receiving and transmitting unit is connected with the input end of the double-port cache; the intelligent terminal sends image data to the data receiving and sending adapter, the data receiving and sending adapter converts the image data into an image data packet and sends the image data packet to the data receiving and sending unit in a point-to-point transmission protocol mode, the data receiving and sending unit sends the image data packet to the dual-port cache, and the dual-port cache outputs the image data.
Further, the data transceiving adapter comprises a first data transceiving control unit and a first PHY layer chip, wherein the intelligent terminal is in bidirectional communication connection with the first data transceiving control unit, and the first data transceiving control unit is in bidirectional communication connection with the first PHY layer chip.
Further, the data transceiving unit comprises a second data transceiving control unit and a second PHY layer chip, wherein the second PHY layer chip is in bidirectional communication connection with the first PHY layer chip, and the second data transceiving control unit is in bidirectional communication connection with the second PHY layer chip; and the output end of the second data transceiving control unit is connected with the input end of the double-port cache.
Further, the data transceiver adapter further includes a first RJ45 interface, and the data transceiver unit further includes a second RJ45 interface, wherein the first layer PHY layer chip is respectively communicated with the first RJ45 interface and the second RJ45 interface through a network cable, and bidirectional communication connection with the second PHY layer chip is achieved.
Further, the specific model of the first PHY layer chip is 88E1111 or MP1556DJ, and the specific model of the second PHY layer chip is 88E1111 or MP1556 DJ.
Further, the first data receiving and transmitting control unit is an MCU control chip or a DSP control chip, and the second data receiving and transmitting control unit is an MCU control chip or a DSP control chip.
Furthermore, the intelligent terminal is a PC, an intelligent mobile phone or a tablet computer.
In order to achieve the second objective, the invention provides a communication method of a data communication system of a lithography machine, which comprises the following steps:
step S1: the card issuing and arranging end sends a request data packet to the intelligent terminal through the data receiving and sending unit;
step S2: the intelligent terminal receives the request data packet through the data receiving and transmitting adapter and transmits the image data packet to the card issuing and arranging end through the data receiving and transmitting adapter;
step S3: the card issuing and arranging end receives the image data packet through the data receiving and sending unit and sends the image data packet to the double-port cache for caching;
step S4: the dual-port cache converts the image data packet into light spot data and transmits the light spot data to the photoetching machine equipment.
Further, the method also includes a step S31 performed simultaneously with the step S3, where the specific steps of the step S31 are:
step S31a, the data receiving and sending unit of the card issuing end verifies the received image data packet and returns a corresponding response data packet to the intelligent terminal according to the verification result of the image data packet;
step S31 b: the intelligent terminal determines whether to retransmit the previous image data packet or normally transmit the next image data packet according to the validity of the response data packet, and counts the number of the image data packets which are transmitted effectively;
step S31 c: and after the numerical value of the effective image data packet reaches a set value, the intelligent terminal stops data transmission.
The invention has the beneficial effects that: the system comprises a card arranging end and an intelligent terminal, wherein the intelligent terminal sends image data to a data receiving and sending adapter, the image data of the data receiving and sending adapter is converted into an image data packet and sent to a data receiving and sending unit in a point-to-point transmission protocol mode, the data receiving and sending unit sends the image data packet to a double-port cache, and the double-port cache outputs the image data; the invention adopts simpler data packet format to realize data point-to-point communication transmission protocol, reduces traditional network control MAC chip on hardware, greatly reduces cost, simultaneously software completely abandons network protocol, adopts completely independent, transparent and simple point-to-point communication transmission protocol suitable for itself, simultaneously the invention jumps out of network structure for communication control, completely eliminates network influence, is not limited by network data format, does not need to be compatible with various data of shape and color, eliminates a large amount of redundant data, greatly improves effective transmission efficiency of data, and improves system performance.
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Fig. 1 is a block diagram of the present invention.
The reference numbers illustrate: 1. an intelligent terminal; 2. a data transceiving adapter; 21. a first data transmission/reception control unit; 22. a first PHY layer chip; 23. a first RJ45 interface; 211. a network cable; 3. a data transmitting/receiving unit; 31. a second RJ45 interface; 32. a second PHY layer chip; 33. a second data transmission/reception control unit; 4. double-port caching; 5. a lithographic apparatus.
Detailed Description
The invention is described in detail below with reference to specific embodiments and the attached drawings.
Referring to fig. 1, the present invention relates to a data communication system of a lithography machine, which includes an intelligent terminal 1, a data transceiver adapter 2, and a card issuing end; the card issuing and arranging end comprises a double-port cache 4 and a data receiving and sending unit 3 corresponding to the data receiving and sending adapter 2; the data transceiving adapter 2 is in bidirectional communication connection with the intelligent terminal 1, and the data transceiving adapter 2 is in bidirectional communication connection with the data transceiving unit 3; the output end of the data transceiving unit 3 is connected with the input end of the dual-port cache 4; the intelligent terminal 1 sends image data to the data receiving and sending adapter 2, the data receiving and sending adapter 2 converts the image data into an image data packet and sends the image data packet to the data receiving and sending unit 3 in a point-to-point transmission protocol mode, the data receiving and sending unit 3 sends the image data packet to the dual-port cache 4, and the dual-port cache outputs the optical data; and when receiving the image data packet, the data transceiver unit 3 performs CRC validation on the image data packet, and feeds back a corresponding response data packet to the intelligent terminal 1.
The data receiving and sending adapter 2 (similar to a network card) is inserted into a mainboard of the intelligent terminal 1 through a universal PIC slot, the data receiving and sending adapter 2 completes a communication task with the card issuing end, is simultaneously connected with the intelligent terminal 1 through PIC communication, receives an image data packet of the intelligent terminal 1 and feeds back a response data packet and a request data packet of the card issuing end;
the data transceiving unit 3 is responsible for communication tasks with the intelligent terminal 1, receives image data packets of the intelligent terminal 1, outputs the received image data packets to the dual-port cache 4, completes CRC (cyclic redundancy check) of data transmission at the same time, and makes responses or requests to the intelligent terminal 1 according to check results.
The whole system is distributed with a card arranging end and an intelligent terminal 1, wherein the intelligent terminal 1 sends image data to a data receiving and sending adapter 2, the image data of the data receiving and sending adapter 2 is converted into an image data packet and sent to a data receiving and sending unit 3 in a point-to-point transmission protocol mode, the data receiving and sending unit 3 sends the image data packet to a double-port cache 4, and the double-port cache outputs the optical data; the invention adopts simpler data packet format to realize data communication transmission protocol, reduces traditional network control MAC chip on hardware, greatly reduces cost, simultaneously software completely abandons network protocol, adopts completely independent, transparent and simple point-to-point communication transmission protocol suitable for itself, and simultaneously the invention jumps out of network structure for communication control, completely abandons network influence, is not limited by network data format, does not need to be compatible with various data of shape and color, eliminates a large amount of redundant data, greatly improves effective transmission efficiency of data, and improves system performance.
Further, the data transceiving adapter 2 includes a first data transceiving control unit 21 and a first PHY layer chip 22, where the intelligent terminal 1 is connected to the first data transceiving control unit 21 in a bidirectional communication manner, and the first data transceiving control unit 21 is connected to the first PHY layer chip 22 in a bidirectional communication manner.
Further, the data transceiving unit 3 includes a second data transceiving control unit 33 and a second PHY layer chip 32, where the second PHY layer chip 32 is in bidirectional communication with the first PHY layer chip, and the second data transceiving control unit 33 and the second PHY layer chip 32 are in bidirectional communication via an MII bus; the output end of the second data transceiving control unit 33 is connected with the input end of the dual-port cache 4 through an 8-bit parallel data bus. Further, the data transceiver adaptor 2 further includes a first RJ45 interface 23, and the data transceiver unit 3 further includes a second RJ45 interface 31, wherein the first layer PHY layer chip is respectively communicated with the first RJ45 interface 23 and the second RJ45 interface 31 through a network cable 211, and is connected to the second PHY layer chip 32 in a bidirectional communication manner. Compared with a USB communication mode in the prior art, the communication distance can be greatly prolonged by adopting the matching of the network cable 211 and the RJ45 interface.
Further, the specific model of the first PHY layer chip is 88E1111 or MP1556DJ, and the specific model of the second PHY layer chip 32 is 88E1111 or MP1556 DJ.
Further, the first data transceiving control unit 21 is an MCU control chip or a DSP control chip, and the second data transceiving control unit 33 is an MCU control chip or a DSP control chip. Compared with the communication mode of adopting USB in the prior art, the MCU control chip or the DSP control chip is adopted to realize the processing of the data packet, and compared with the prior art, the network control MAC chip is reduced on hardware, and the cost is greatly reduced.
Further, the intelligent terminal 1 is a PC, an intelligent mobile phone or a tablet computer. Because the photoetching machine has large demand on image data amount and needs to be timely, a PC is generally used, but if the data processing speed is high, other equipment such as a smart phone can be used; the PC is universal and has strong performance, and can be used as a special device for specially customizing the image data processing.
In order to achieve the second objective, the invention provides a communication method of a data communication system of a lithography machine, which comprises the following steps:
step S1: the card issuing and arranging end sends a request data packet to the intelligent terminal 1 through the data transceiving unit 3;
step S2: the intelligent terminal 1 receives the request data packet through the data receiving and transmitting adapter 2 and transmits the image data packet to the card issuing and arranging end through the data receiving and transmitting adapter 2;
step S3: the card issuing and arranging end receives the image data packet through the data receiving and sending unit 3 and sends the image data packet to the dual-port cache 4 for caching;
step S4: the dual port buffer 4 converts the image data packets into light spot data and transmits the light spot data to the lithographic apparatus 5.
Further, the method also includes a step S31 performed simultaneously with the step S3 (step S31 corresponds to a branch of step S3), where the specific steps of step S31 are:
step S31a, the data receiving and sending unit 3 of the card issuing end verifies the received image data packet and returns a corresponding response data packet to the intelligent terminal 1 according to the verification result of the image data packet;
step S31 b: the intelligent terminal 1 determines whether to retransmit the previous image data packet or normally transmit the next image data packet according to the validity of the response data packet, and counts the number of the image data packets which are transmitted effectively;
step S31 c: and after the value of the effective image data packet reaches a set value, the intelligent terminal 1 stops sending the image data packet.
In this embodiment, the data packets are all set to a uniform format (the data frame adopts a fixed-length transmission mode that only includes a start code, an end code and a check code), and are serially transmitted in time; the above-described image data packet format: a 1byte start flag, N byte data, 1byte crc validation data, and a 1byte end flag. The above-mentioned response packet format: a 1byte start flag, a 1byte present/invalid flag, and a 1byte end flag. The request packet format described above: a 1byte start flag, a 1byte request flag, and a 1byte end flag.
After the transmitting and arranging card confirms that a complete data packet is received through the start code and the end code each time, CRC check is carried out, a check result is correct, 'OK' is responded to the transmitting end, if the check result is wrong, 'NG' is replied to the transmitting end, and the transmitting end determines whether to continue to transmit the next packet of data or repeat to transmit the previous packet of data according to the response result of the receiving end.
The invention adopts simpler data packet format to realize data communication transmission protocol, reduces traditional network control MAC chip on hardware, greatly reduces cost, abandons network protocol completely, adopts completely independent, transparent and simple point-to-point communication transmission protocol suitable for the invention, and simultaneously the invention jumps out of network structure for communication control, completely abandons network influence, is not limited by network data format, does not need various data compatible with shapes and colors, eliminates a large amount of redundant data, greatly improves effective transmission efficiency of data, and improves system performance.
The above embodiments are merely illustrative of the preferred embodiments of the present invention, and not restrictive, and various changes and modifications to the technical solutions of the present invention may be made by those skilled in the art without departing from the spirit of the present invention, and the technical solutions of the present invention are intended to fall within the scope of the present invention defined by the appended claims.
Claims (9)
1. A photoetching machine data communication system comprises an intelligent terminal, a card issuing end and a data receiving and transmitting adapter, wherein the card issuing end comprises a double-port cache and a data receiving and transmitting unit corresponding to the data receiving and transmitting adapter; the data receiving and sending adapter is in bidirectional communication connection with the intelligent terminal, and the data receiving and sending adapter is in bidirectional communication connection with the data receiving and sending unit; the output end of the data receiving and transmitting unit is connected with the input end of the double-port cache; the intelligent terminal sends image data to the data receiving and sending adapter, the data receiving and sending adapter converts the image data into an image data packet and sends the image data packet to the data receiving and sending unit through a point-to-point transmission protocol, the data receiving and sending unit sends the image data packet to the double-port cache, and the double-port cache outputs the image data.
2. The system of claim 1, wherein: the data receiving and transmitting adapter comprises a first data receiving and transmitting control unit and a first PHY layer chip, wherein the intelligent terminal is in bidirectional communication connection with the first data receiving and transmitting control unit, and the first data receiving and transmitting control unit is in bidirectional communication connection with the first PHY layer chip.
3. A lithography machine data communication system according to claim 2, wherein: the data receiving and transmitting unit comprises a second data receiving and transmitting control unit and a second PHY layer chip, wherein the second PHY layer chip is in bidirectional communication connection with the first PHY layer chip, and the second data receiving and transmitting control unit is in bidirectional communication connection with the second PHY layer chip; and the output end of the second data transceiving control unit is connected with the input end of the double-port cache.
4. A lithography machine data communication system according to claim 3, wherein: the data transceiving adapter further comprises a first RJ45 interface, the data transceiving unit further comprises a second RJ45 interface, wherein the first layer PHY layer chip is respectively communicated with the first RJ45 interface and the second RJ45 interface through network cables, and bidirectional communication connection with the second PHY layer chip is achieved.
5. A lithography machine data communication system according to claim 3, wherein: the specific model of the first layer of PHY layer chip is 88E1111 or MP1556DJ, and the specific model of the second layer of PHY layer chip is 88E1111 or MP1556 DJ.
6. A lithography machine data communication system according to claim 3, wherein: the first data receiving and transmitting control unit is an MCU control chip or a DSP control chip, and the second data receiving and transmitting control unit is an MCU control chip or a DSP control chip.
7. The method of claim 1, wherein: the intelligent terminal is a PC, an intelligent mobile phone or a tablet computer.
8. A communication method using the data communication system of the lithography machine according to claim 1, characterized in that: the method comprises the following steps:
step S1: the card issuing and arranging end sends a request data packet to the intelligent terminal through the data receiving and sending unit;
step S2: the intelligent terminal receives the request data packet through the data receiving and transmitting adapter and transmits the image data packet to the card issuing and arranging end through the data receiving and transmitting adapter;
step S3: the card issuing and arranging end receives the image data packet through the data receiving and sending unit and sends the image data packet to the double-port cache for caching;
step S4: the dual-port cache converts the image data packet into light spot data and transmits the light spot data to the photoetching machine equipment.
9. The method of claim 8, wherein: further comprising a step S31 performed simultaneously with the step S3, wherein the specific steps of the step S31 are:
step S31a, the data receiving and sending unit of the card issuing end verifies the received image data packet and returns a corresponding response data packet to the intelligent terminal according to the verification result of the image data packet;
step S31 b: the intelligent terminal determines whether to retransmit the previous image data packet or normally transmit the next image data packet according to the validity of the response data packet, and counts the number of the image data packets which are transmitted effectively;
step S31 c: and after the numerical value of the effective image data packet reaches a set value, the intelligent terminal stops sending the image data packet.
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| CN201811232064.9A CN111083185A (en) | 2018-10-22 | 2018-10-22 | Photoetching machine data communication system and communication method thereof |
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Application publication date: 20200428 |