[go: up one dir, main page]

CN111256584B - Phase measurement method, system and device of speckle interferogram and storage medium - Google Patents

Phase measurement method, system and device of speckle interferogram and storage medium Download PDF

Info

Publication number
CN111256584B
CN111256584B CN202010102221.5A CN202010102221A CN111256584B CN 111256584 B CN111256584 B CN 111256584B CN 202010102221 A CN202010102221 A CN 202010102221A CN 111256584 B CN111256584 B CN 111256584B
Authority
CN
China
Prior art keywords
phase
speckle
interferogram
speckle interferogram
formula
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN202010102221.5A
Other languages
Chinese (zh)
Other versions
CN111256584A (en
Inventor
蔡长青
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Guangzhou University
Original Assignee
Guangzhou University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Guangzhou University filed Critical Guangzhou University
Priority to CN202010102221.5A priority Critical patent/CN111256584B/en
Publication of CN111256584A publication Critical patent/CN111256584A/en
Application granted granted Critical
Publication of CN111256584B publication Critical patent/CN111256584B/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02094—Speckle interferometers, i.e. for detecting changes in speckle pattern
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02062—Active error reduction, i.e. varying with time

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)

Abstract

本发明公开了一种散斑干涉图的相位测量方法、系统、装置和存储介质，所述方法包括获取一组散斑干涉图以及一组相位步长，将散斑干涉图和相位步长代入公式中，从而确定对所述散斑干涉图测量所得的相位等步骤。在执行散斑干涉图的相位测量方法时，其所使用的相位步长可以是任意给定的，不再依赖“真实的相位步长而知”这一前提条件，因此避免了现有技术中由于不能使用真实的相位步长而导致的测量误差；在任意步长的情况下，能较好地减小相位噪声，从而取得较为准确的测量结果。本发明广泛应用于测量技术领域。

Figure 202010102221

The invention discloses a phase measurement method, system, device and storage medium for speckle interferogram. The method includes acquiring a set of speckle interferogram and a set of phase steps, and substituting the speckle interferogram and phase step into formula, so as to determine the phase and other steps obtained by measuring the speckle interferogram. When performing the phase measurement method of the speckle interferogram, the phase step size used can be given arbitrarily, and no longer depends on the premise of "knowing the real phase step size", thus avoiding the prior art. The measurement error caused by the inability to use the real phase step size; in the case of any step size, the phase noise can be better reduced, so as to obtain more accurate measurement results. The invention is widely used in the field of measurement technology.

Figure 202010102221

Description

Phase measurement method, system and device of speckle interferogram and storage medium
Technical Field
The invention relates to the technical field of measurement, in particular to a method, a system and a device for measuring the phase of a speckle interferogram and a storage medium.
Background
When the strength of stress and the like is measured through Phase Shift Interferometry (PSI), a speckle interference pattern obtained by shooting a measured object can be obtained, and then corresponding parameters are determined according to the speckle interference pattern to serve as a final measurement result.
In the prior art, in determining the final measurement result from the speckle interferogram, a given phase step is relied upon, which in fact implies a precondition that the phase step is known. However, in the practical application environment of phase-shift interferometry, the effective reference phase is determined not only by the phase shifter but also by any other influence of changing the relative optical path difference, and therefore the condition of "phase step known" is difficult to strictly hold.
In the practical application environment of phase-shift interferometry, the interference is also influenced by noise, wherein the main noise comprises additive noise and phase noise. Some prior art techniques have solved the problem of additive noise well, but the phase noise still cannot be suppressed well.
In summary, the main problems in the prior art are: the actual use environment is separated from the condition of known phase step, so that the deviation of the measurement result from the actual value is large; the influence of phase noise on the measurement results is relatively severe.
Disclosure of Invention
In view of at least one of the above technical problems, it is an object of the present invention to provide a method, system, device and storage medium for measuring the phase of a speckle pattern.
In one aspect, an embodiment of the present invention includes a method for measuring a phase of a speckle interferogram, including the following steps:
obtaining a set of speckle interferograms [ I ]1,I2,...,IM]And a set of phase steps [ delta ]1,δ2,...,δM]；
Determine such that formula
Figure BDA0002387246130000011
A parameter of establishment phi;
the parameter phi is the phase measured on the speckle interferogram.
On the other hand, the embodiment of the invention also comprises a phase measurement method of the speckle interferogram, which comprises the following steps:
obtaining a set of speckle interferograms [ I ]1,I2,...,IM]And a set of phase steps [ delta ]1,δ2,...,δM]；
According to the formula
Figure BDA0002387246130000021
Determining a parameter am；
According to the formula
Figure BDA0002387246130000022
Determination of the parameter bm；
Determine such that formula
Figure BDA0002387246130000023
A parameter of establishment phi;
the parameter phi is the phase measured on the speckle interferogram.
Further, the speckle interferogram is a two-dimensional image.
Further, the speckle interference map is represented as Im(x,y)＝I0(x,y)[1+K(x,y)cosφ(x,y)+δm+nm(x,y)](ii) a Wherein, I0(x, y) represents the average intensity of the speckle interferogram, K (x, y) represents the fringe contrast of the speckle interferogram, phi (x, y) represents the phase step included in the speckle interferogram, nm(x, y) represents phase noise contained in the speckle interferogram.
In another aspect, an embodiment of the present invention further includes a phase measurement system for speckle interferograms, including:
a data acquisition module for acquiring a set of speckle interferograms [ I ]1,I2,...,IM]And a set of phase steps [ delta ]1,δ2,...,δM]；
A calculation module for determining a formula
Figure BDA0002387246130000024
A parameter of establishment phi;
and the output module is used for outputting the parameter phi as the phase obtained by measuring the speckle interference pattern.
In another aspect, an embodiment of the present invention further includes a phase measurement system for speckle interferograms, including:
a data acquisition module for acquiring a set of speckle interferograms [ I ]1,I2,...,IM]And a set of phase steps [ delta ]1,δ2,…,δM]；
A calculation module for calculating according to a formula
Figure BDA0002387246130000031
Determining a parameter amAccording to the formula
Figure BDA0002387246130000032
Determination of the parameter bmAnd determining a formula
Figure BDA0002387246130000033
A parameter of establishment phi;
and the output module is used for outputting the parameter phi as the phase obtained by measuring the speckle interference pattern.
In another aspect, the embodiments of the present invention further include a phase measurement apparatus for speckle interferograms, including a memory for storing at least one program and a processor for loading the at least one program to perform a phase measurement method for the speckle interferograms.
In another aspect, the present invention also includes a storage medium having stored therein processor-executable instructions, which when executed by a processor, are configured to perform the method of the embodiments.
The invention has the beneficial effects that: when the phase measurement method of the speckle interferogram in the embodiment is executed, the used phase step can be arbitrarily given, and the precondition of 'knowing by the real phase step' is not relied on, so that the measurement error caused by the fact that the real phase step cannot be used in the prior art is avoided; in the case of any step length, the obtained measurement result has the smallest error among all possible results, and the influence of phase noise can be better reduced, so that a more accurate measurement result can be obtained.
Drawings
FIG. 1 is a diagram showing phasor representation of the complex plane of equation (20) in the example.
Detailed Description
When using phase shift interferometry, the measured object is shot to obtain M speckle interference patterns [ I1,I2,...,IM]In this embodiment, the speckle interferograms are two-dimensional images, and can be represented by two-dimensional pixel coordinates (x, y), and are denoted as Im(x, y); in this embodiment, a set of arbitrarily given phase steps [ δ ] is used1,δ2,...,δM]These speckle interferograms are denoted as deltamIn this case, the subscript parameter M may be equal to 1,2,3, …, M.
The speckle interferogram can be expressed as the following equation (1) without considering noise:
Im(x,y)＝I0(x,y)[1+K(x,y)cos(φ(x,y)+δm)]； (1)
in the formula (1), I0(x, y) is the speckle interferogram Im(x, y) and K (x, y) is the speckle interferogram ImContrast of the fringes in (x, y). Phi (x, y) is acquired, and the significance of phi is speckle interferenceThe phase information of the plot is taken as the final measurement obtained by applying phase-shifting interferometry. The final measurement result can be written as ImThe quotient of the linear combination of (a), i.e. the following formula (2):
Figure BDA0002387246130000041
to obtain phi (x, y), the coefficient a needs to be knownmAnd bm。
In consideration of additive noise and phase noise, the speckle interferogram can be expressed as the following formula (3):
Figure BDA0002387246130000042
wherein n ism(x, y) is the phase noise,
Figure BDA0002387246130000043
is additive noise. Since additive noise can be better cancelled by the prior art, in this embodiment, cancellation of phase noise is considered, that is, for what can be expressed as Im(x,y)＝I0(x,y)[1+K(x,y)cos(φ(x,y)+δm+nm(x,y))]The speckle interferogram of (1).
In this example, the coefficient a in the formula (2) is expressedmAnd bmViewed as a complex number cmThe real and imaginary parts of, i.e. a complex number c is constructedm＝am+ibmThen, formula (2) can be rewritten as the following formula (4):
Figure BDA0002387246130000044
where arg denotes a parametric function.
The following formula (5) can be obtained by the formula (1):
Figure BDA0002387246130000045
in this embodiment, the technical problem to be solved is: in a set of phase steps deltamNot known, i.e. phase step δmIn any given case, the value of φ is determined and output as a final result. This technical problem corresponds to the mathematical expression: given a set of values δmThe formula (4) has a solution. At this time, cmThe following conditions (6) to (8) need to be satisfied:
Figure BDA0002387246130000046
Figure BDA0002387246130000051
Figure BDA0002387246130000052
in the formula (8), α is an arbitrary positive real number. Then correspondingly by cm＝am+ibmThe formulae (6) to (8) may be rewritten as the following formulae (9) to (14):
Figure BDA0002387246130000053
Figure BDA0002387246130000054
Figure BDA0002387246130000055
Figure BDA0002387246130000056
Figure BDA0002387246130000057
Figure BDA0002387246130000058
as can be seen from equation (4), when performing measurement using M step phase shift, 2M real coefficients must be set (to determine a)mAnd bm) Six equations (9) - (14) are verified, so that there are actually 2M-6 free coefficients. For example, in a three-step phase shift (i.e., M-3), since 2M-6-0 means that no free parameters are available to choose from, δ is the set of phase steps for a given set of phasesmThere is a unique phase extraction method. For M>For each set of values δmDue to 2M-6>0, there is at least one free coefficient, and the resulting determined phase information phi is not unique. This suggests that an optimum value may be selected from a plurality of phi, which corresponds to the phase error caused by the phase noise being the smallest. To determine the method by which this optimum is selected, further analysis is performed below.
For the sake of simplicity, the representation of the coordinates (x, y) is omitted below, for example Im(x, y) will be represented as Im。
Speckle interferogram I when random phase noise is consideredmRepresented by the following formula (15):
Im＝I0[1+Kcos(φ+δm+nm)]； (15)
wherein n ismIs phase noise. If the phase φ in equation (15) is determined from equation (2), the following equation (16) can be obtained:
Figure BDA0002387246130000061
determining the phase phi in equation (15) according to equation (6) is equivalent to determining the phase phi in equation (15) according to equation (2); if the phase φ in equation (15) is determined from equation (6), the following equation (17) can be obtained:
Figure BDA0002387246130000062
since the phase noise is small, i.e. nm<<1, the formula (17) can be simplified. After simplification, at nmIs the first order noise of
Figure BDA0002387246130000063
Thus, the following formula (18) is obtained:
Figure BDA0002387246130000064
considering equations (7) and (8) for equation (18), there is the following equation (19):
Figure BDA0002387246130000065
by definition
Figure BDA0002387246130000066
And
Figure BDA0002387246130000067
to obtain the following formula (20):
S'＝S+N++N-； (20)
as is clear from the above definition, the actual phase is given by Φ ═ arg (S), while the phase obtained from the acquired speckle interferogram is given by Φ ' ═ arg (S '), the difference between Φ and Φ ' being caused by phase noise. The following formula (21) is also readily obtained:
Figure BDA0002387246130000068
fig. 1 is a phasor representation of equation (20) on the complex plane, and the circles in fig. 1 represent points where S' is more likely to be found. By calculating the radius of the circle, the maximum deviation of the calculated phase from its actual value can be obtained.
The circle radius in FIG. 1 is estimated as the square root of the expected value, and the maximum deviation of the extracted phase φ' from the actual phase φ is expressed as
Figure BDA0002387246130000071
As is clear from FIG. 1
Figure BDA0002387246130000072
Therefore, if σφVery small, the following formula (22) is obtained:
Figure BDA0002387246130000073
can use triangle inequality<|N++N-|2>≤<|N+|2>+<|N-|2>To sigmaφ(ii) treated to give the following formula (23):
Figure BDA0002387246130000074
by definition
Figure BDA0002387246130000075
To obtain the following formulae (24) and (25):
Figure BDA0002387246130000076
Figure BDA0002387246130000077
similarly, for<|N-|2>The following formula (26):
Figure BDA0002387246130000078
substituting formulae (21), (25) and (26) for formula (23) gives the following formula (27):
Figure BDA0002387246130000079
as can be seen from equation (27), the phase error σ caused by the phase noiseφThere is an upper bound, and the expression heuristic for this upper bound yields the following for parameter amAnd bmThe following formula (28):
Figure BDA00023872461300000710
equation (28) gives an objective function f (a)1,…,aM,b1,…,bMAnd) minimization is performed according to equations (9) - (14), for example by using lagrange multipliers and defining equation (29) below:
Figure BDA0002387246130000081
the constraint of equation (29) is the following equation (30):
gk(a1,…,aM,b1,…,bM,)＝0； (30)
wherein k is 1, 2.
Applying Lagrange multiplier method to equations (28) and (29), solving equations (31) and (32):
Figure BDA0002387246130000082
Figure BDA0002387246130000083
wherein M is 1, 2.
The following formula (33) is obtained from formula (28) and formula (31):
Figure BDA0002387246130000084
the following formula (34) is obtained from formula (28) and formula (32):
Figure BDA0002387246130000085
wherein M is 1, 2.
Substituting equation (33) and equation (34) for equation (30) yields a 6 × 6 linear system as shown in equation (35) below to calculate the lagrangian multiplier:
Figure BDA0002387246130000091
wherein:
Figure BDA0002387246130000092
the solution to equation set (35) is given by equation (37):
Figure BDA0002387246130000093
wherein:
Figure BDA0002387246130000094
thus, given a set of δmAnd
Figure BDA0002387246130000095
s can be calculated from the formula (36)1-S6Then, λ 1-6 is calculated from equation (37). Then, by substituting these values into equations (33) and (34), the optimal parameter set a can be calculatedmAnd bmThis parameter minimizes the phase extraction error. On all interferograms
Figure BDA0002387246130000096
In the same case, the obtained algorithm is the same algorithm, and the propagation of additive random noise can be reduced to the maximum extent. In this case, substituting (36) for (37) yields the following formula (39):
Figure BDA0002387246130000101
if formula (39) is substituted into formula (33) and formula (34), respectively, and the two substitution results differ by a global constant, then formulae (40) and (41) are obtained:
Figure BDA0002387246130000102
Figure BDA0002387246130000103
the combined type (2) of the formula (40) and the formula (41) is obtained:
Figure BDA0002387246130000104
formula (42) has the general meaning: allowing passage at arbitrary step size deltamM speckle interferograms I obtained by phase shiftingmThe method can minimize phase extraction error caused by phase noise when the variance of speckle interference pattern
Figure BDA0002387246130000105
When the same, the algorithm obtained is the same, thereby minimizing the random phase noise nmIs transmitted.
In this embodiment, when determining the final measurement result using equation (42), the following steps may be performed:
S1A. obtaining a group of speckle interferograms (I)1,I2,...,IM]And a set of phase steps [ delta ]1,δ2,...,δM]；
S2A. determining a formula
Figure BDA0002387246130000111
A parameter of establishment phi;
and S3A, the parameter phi is the phase obtained by measuring the speckle interference pattern.
The correctness of steps S1A-S3A has been discussed above in connection with the description of equations (1) - (42). Therefore, steps S1A-S3A are executed, and firstly, the phase step used by the method can be arbitrarily given, and the precondition of "knowing by the true phase step" is no longer relied on, so that the measurement error caused by the fact that the true phase step cannot be used in the prior art is avoided; in the case of any step size, the steps S1A-S3A are performed to reduce the phase noise better, so as to obtain more accurate measurement results.
To reduce the amount of calculation, a may be first calculated from equations (40) and (41)mAnd bmAnd then substituted into formula (2). At this time, the following steps may be performed:
S1B, acquiring a group of speckle interferograms (I)1,I2,...,IM]And a set of phase steps [ delta ]1,δ2,...,δM]；
S2B, according to a formula
Figure BDA0002387246130000112
Determining a parameter am；
S3B, according to a formula
Figure BDA0002387246130000113
Determination of the parameter bm；
S4B, determining a formula
Figure BDA0002387246130000114
A parameter of establishment phi;
and S5B, wherein the parameter phi is the phase obtained by measuring the speckle interference pattern.
From the above description of equations (1) - (42), it can be seen that the execution of steps S1B-S5B is equivalent to the execution of steps S1A-S3A, and the same advantageous effects can be obtained.
In this embodiment, a phase measurement system of the speckle interferogram may also be implemented.
A phase measurement system for performing the speckle interferogram of steps S1A-S3A, comprising:
a data acquisition module for acquiring a set of speckle interferograms [ I ]1,I2,...,IM]And a set of phase steps [ delta ]1,δ2,...,δM]；
A calculation module for determining a formula
Figure BDA0002387246130000121
A parameter of establishment phi;
and the output module is used for outputting the parameter phi as the phase obtained by measuring the speckle interference pattern.
A phase measurement system for performing the speckle interferogram of steps S1B-S5B, comprising:
a data acquisition module for acquiring a set of speckle interferograms [ I ]1,I2,...,IM]And a set of phase steps [ delta ]1,δ2,...,δM]；
A calculation module for calculating according to a formula
Figure BDA0002387246130000122
Determining a parameter amAccording to the formula
Figure BDA0002387246130000123
Determination of the parameter bmAnd determining a formula
Figure BDA0002387246130000124
A parameter of establishment phi;
and the output module is used for outputting the parameter phi as the phase obtained by measuring the speckle interference pattern.
The data acquisition module, the calculation module and the output module can be hardware modules, software modules or a combination of the hardware modules and the software modules with corresponding functions, and the modules can be combined together to implement a corresponding speckle interferogram phase measurement method, so that the same beneficial effects are achieved.
By writing instructions for controlling the computer device to perform steps S1A-S3A and/or S1B-S5B and then storing the instructions in the storage medium, the instructions stored in the storage medium can be read and executed by the computer device, so that the computer device can be the phase measurement system of the speckle interferogram described in embodiment 1.
It should be noted that, unless otherwise specified, when a feature is referred to as being "fixed" or "connected" to another feature, it may be directly fixed or connected to the other feature or indirectly fixed or connected to the other feature. Furthermore, the descriptions of upper, lower, left, right, etc. used in the present disclosure are only relative to the mutual positional relationship of the constituent parts of the present disclosure in the drawings. As used in this disclosure, the singular forms "a", "an", and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise. In addition, unless defined otherwise, all technical and scientific terms used in this example have the same meaning as commonly understood by one of ordinary skill in the art. The terminology used in the description of the embodiments herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used in this embodiment, the term "and/or" includes any combination of one or more of the associated listed items.
It will be understood that, although the terms first, second, third, etc. may be used herein to describe various elements, these elements should not be limited by these terms. These terms are only used to distinguish one element of the same type from another. For example, a first element could be termed a second element, and, similarly, a second element could be termed a first element, without departing from the scope of the present disclosure. The use of any and all examples, or exemplary language ("e.g.," such as "or the like") provided with this embodiment is intended merely to better illuminate embodiments of the invention and does not pose a limitation on the scope of the invention unless otherwise claimed.
It should be recognized that embodiments of the present invention can be realized and implemented by computer hardware, a combination of hardware and software, or by computer instructions stored in a non-transitory computer readable memory. The methods may be implemented in a computer program using standard programming techniques, including a non-transitory computer-readable storage medium configured with the computer program, where the storage medium so configured causes a computer to operate in a specific and predefined manner, according to the methods and figures described in the detailed description. Each program may be implemented in a high level procedural or object oriented programming language to communicate with a computer system. However, the program(s) can be implemented in assembly or machine language, if desired. In any case, the language may be a compiled or interpreted language. Furthermore, the program can be run on a programmed application specific integrated circuit for this purpose.
Further, operations of processes described in this embodiment can be performed in any suitable order unless otherwise indicated herein or otherwise clearly contradicted by context. The processes described in this embodiment (or variations and/or combinations thereof) may be performed under the control of one or more computer systems configured with executable instructions, and may be implemented as code (e.g., executable instructions, one or more computer programs, or one or more applications) collectively executed on one or more processors, by hardware, or combinations thereof. The computer program includes a plurality of instructions executable by one or more processors.
Further, the method may be implemented in any type of computing platform operatively connected to a suitable interface, including but not limited to a personal computer, mini computer, mainframe, workstation, networked or distributed computing environment, separate or integrated computer platform, or in communication with a charged particle tool or other imaging device, and the like. Aspects of the invention may be embodied in machine-readable code stored on a non-transitory storage medium or device, whether removable or integrated into a computing platform, such as a hard disk, optically read and/or write storage medium, RAM, ROM, or the like, such that it may be read by a programmable computer, which when read by the storage medium or device, is operative to configure and operate the computer to perform the procedures described herein. Further, the machine-readable code, or portions thereof, may be transmitted over a wired or wireless network. The invention described in this embodiment includes these and other different types of non-transitory computer-readable storage media when such media include instructions or programs that implement the steps described above in conjunction with a microprocessor or other data processor. The invention also includes the computer itself when programmed according to the methods and techniques described herein.
A computer program can be applied to input data to perform the functions described in the present embodiment to convert the input data to generate output data that is stored to a non-volatile memory. The output information may also be applied to one or more output devices, such as a display. In a preferred embodiment of the invention, the transformed data represents physical and tangible objects, including particular visual depictions of physical and tangible objects produced on a display.
The above description is only a preferred embodiment of the present invention, and the present invention is not limited to the above embodiment, and any modifications, equivalent substitutions, improvements, etc. within the spirit and principle of the present invention should be included in the protection scope of the present invention as long as the technical effects of the present invention are achieved by the same means. The invention is capable of other modifications and variations in its technical solution and/or its implementation, within the scope of protection of the invention.

Claims (6)

1.一种散斑干涉图的相位测量方法，其特征在于，包括以下步骤：1. a phase measurement method of speckle interferogram, is characterized in that, comprises the following steps: 获取一组散斑干涉图[I1,I2,...,IM]以及一组相位步长[δ1,δ2,...,δM]；Obtain a set of speckle interferograms [I 1 , I 2 ,...,I M ] and a set of phase steps [δ 1 ,δ 2 ,...,δ M ]; 确定使得公式make sure the formula
Figure FDA0003003342700000011
成立的参数φ；
Figure FDA0003003342700000011
established parameter φ; 所述参数φ为对所述散斑干涉图测量所得的相位。The parameter φ is the phase measured on the speckle interferogram. 2.根据权利要求1所述的方法，其特征在于，所述散斑干涉图为二维图像。2. The method according to claim 1, wherein the speckle interferogram is a two-dimensional image. 3.根据权利要求2所述的方法，其特征在于，所述散斑干涉图表示为Im(x,y)＝I0(x,y)[1+K(x,y)cosφ(x,y)+δm+nm(x,y)]；其中，I0(x,y)表示所述散斑干涉图的平均强度，K(x,y)表示所述散斑干涉图的条纹对比度，φ(x,y)表示所述散斑干涉图中包含的相位步长，nm(x,y)表示所述散斑干涉图中包含的相位噪声，δm表示相位步长。3. The method according to claim 2, wherein the speckle interferogram is expressed as Im (x,y)=I 0 (x,y)[1+K(x,y)cosφ(x ,y)+δ m +n m (x,y)]; wherein, I 0 (x, y) represents the average intensity of the speckle interferogram, and K(x, y) represents the intensity of the speckle interferogram The fringe contrast, φ(x, y) represents the phase step included in the speckle interferogram, n m (x, y) represents the phase noise included in the speckle interferogram, and δ m represents the phase step. 4.一种散斑干涉图的相位测量系统，其特征在于，包括：4. A phase measurement system for speckle interferogram, characterized in that, comprising: 数据获取模块，用于获取一组散斑干涉图[I1,I2,...,IM]以及一组相位步长[δ1,δ2,...,δM]；a data acquisition module for acquiring a set of speckle interferograms [I 1 , I 2 ,...,I M ] and a set of phase steps [δ 1 ,δ 2 ,...,δ M ]; 计算模块，用于确定使得公式Calculation module for determining the making formula
Figure FDA0003003342700000012
成立的参数φ；
Figure FDA0003003342700000012
established parameter φ; 输出模块，用于将所述参数φ作为对所述散斑干涉图测量所得的相位进行输出。An output module, configured to output the parameter φ as a phase obtained by measuring the speckle interferogram. 5.一种散斑干涉图的相位测量装置，其特征在于，包括存储器和处理器，所述存储器用于存储至少一个程序，所述处理器用于加载所述至少一个程序以执行权利要求1-3任一项所述方法。5. A speckle interferogram phase measurement device, characterized by comprising a memory and a processor, wherein the memory is used to store at least one program, and the processor is used to load the at least one program to execute claims 1- 3 any one of the methods. 6.一种存储介质，其中存储有处理器可执行的指令，其特征在于，所述处理器可执行的指令在由处理器执行时用于执行如权利要求1-3任一项所述方法。6. A storage medium storing processor-executable instructions, wherein the processor-executable instructions, when executed by the processor, are used to execute the method according to any one of claims 1-3 .
CN202010102221.5A 2020-02-19 2020-02-19 Phase measurement method, system and device of speckle interferogram and storage medium Expired - Fee Related CN111256584B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202010102221.5A CN111256584B (en) 2020-02-19 2020-02-19 Phase measurement method, system and device of speckle interferogram and storage medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202010102221.5A CN111256584B (en) 2020-02-19 2020-02-19 Phase measurement method, system and device of speckle interferogram and storage medium

Publications (2)

Publication Number Publication Date
CN111256584A CN111256584A (en) 2020-06-09
CN111256584B true CN111256584B (en) 2021-06-01

Family

ID=70951108

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202010102221.5A Expired - Fee Related CN111256584B (en) 2020-02-19 2020-02-19 Phase measurement method, system and device of speckle interferogram and storage medium

Country Status (1)

Country Link
CN (1) CN111256584B (en)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5404222A (en) * 1994-01-14 1995-04-04 Sparta, Inc. Interferametric measuring system with air turbulence compensation
US6995847B2 (en) * 2002-05-24 2006-02-07 Honeywell International Inc. Methods and systems for substrate surface evaluation
CN101739668A (en) * 2009-11-12 2010-06-16 天津大学 Electronic speckle interference fringe pattern filtering method
CN102645174B (en) * 2012-03-29 2014-10-01 上海大学 A real-time phase-shifting method for speckle interferometry with high signal-to-noise ratio
CN104268837B (en) * 2014-09-26 2018-08-21 天津工业大学 Electronic speckle interference fringe pattern phase information extracting method

Also Published As

Publication number Publication date
CN111256584A (en) 2020-06-09

Similar Documents

Publication Publication Date Title
Pan Bias error reduction of digital image correlation using Gaussian pre-filtering
US9523571B2 (en) Depth sensing with depth-adaptive illumination
Coggrave et al. High-speed surface profilometer based on a spatial light modulator and pipeline image processor
EP3594618B1 (en) Three-dimensional shape measurement device, three-dimensional shape measurement method, and program
US10997738B2 (en) Three-dimensional-shape measurement device, three-dimensional-shape measurement method, and program
Akca Matching of 3D surfaces and their intensities
CN106802137B (en) A kind of phase developing method and system
EP3047456B1 (en) 3d reconstruction from photometric stereo with shadows
WO2014138511A1 (en) System and method for estimating uncertainty for geophysical gridding routines lacking inherent uncertainty estimation
CN111256584B (en) Phase measurement method, system and device of speckle interferogram and storage medium
US20150207959A1 (en) Spectral image processing method, spectral image processing device, and program
JP7345685B2 (en) Detection using inverse multiple scattering with phaseless measurements
Ayubi et al. Optimal phase-shifting algorithm for interferograms with arbitrary steps and phase noise
Pitard et al. Robust anomaly detection using reflectance transformation imaging for surface quality inspection
US20100049441A1 (en) Method of locating a magnetic object, and the corresponding computer program product, storage means and location device
Gabriele et al. Laser scanner data processing and 3D modeling using a free and open source software
Lieberwirth et al. Applying low budget equipment and open source software for high resolution documentation of archaeological stratigraphy and features
Bräuer-Burchardt et al. Improvement of measurement accuracy of optical 3D scanners by discrete systematic error estimation
CN116518880A (en) A regularized unwrapping method and system based on Fourier contouring
Osten Active optical metrology: a definition with examples
Parashar et al. Self-calibrating isometric non-rigid structure-from-motion
JP2009077051A (en) Imaging apparatus and imaging method thereof
FR3038729A1 (en) METHOD FOR LOCATING A MAGNETIC OBJECT
Wan et al. Online nonlinearity elimination for fringe projection profilometry using slope intensity coding
CN113254870B (en) Parameter identification method and computer readable storage medium

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20210601