CN111276451A - Chip packaging structure, packaging assembly and packaging method - Google Patents
Chip packaging structure, packaging assembly and packaging method Download PDFInfo
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- CN111276451A CN111276451A CN202010222645.5A CN202010222645A CN111276451A CN 111276451 A CN111276451 A CN 111276451A CN 202010222645 A CN202010222645 A CN 202010222645A CN 111276451 A CN111276451 A CN 111276451A
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- 238000004806 packaging method and process Methods 0.000 title claims abstract description 39
- 238000000034 method Methods 0.000 title claims abstract description 28
- 239000000758 substrate Substances 0.000 claims abstract description 71
- 239000012790 adhesive layer Substances 0.000 claims abstract description 56
- 239000010410 layer Substances 0.000 claims abstract description 36
- 239000003292 glue Substances 0.000 claims abstract description 5
- 239000011241 protective layer Substances 0.000 claims description 12
- 229910000679 solder Inorganic materials 0.000 claims description 10
- 239000008393 encapsulating agent Substances 0.000 claims description 9
- 238000003466 welding Methods 0.000 claims description 2
- 239000007943 implant Substances 0.000 claims 1
- 230000017525 heat dissipation Effects 0.000 abstract description 12
- 238000010586 diagram Methods 0.000 description 5
- 238000005476 soldering Methods 0.000 description 5
- 239000000243 solution Substances 0.000 description 4
- 239000002184 metal Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000001746 injection moulding Methods 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- 239000004413 injection moulding compound Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000013011 mating Effects 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
- H01L23/3107—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the groups H01L21/18 - H01L21/326 or H10D48/04 - H10D48/07 e.g. sealing of a cap to a base of a container
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the groups H01L21/18 - H01L21/326 or H10D48/04 - H10D48/07 e.g. sealing of a cap to a base of a container
- H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
- H01L21/561—Batch processing
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
- H01L23/3107—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
- H01L23/3135—Double encapsulation or coating and encapsulation
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
- H01L23/367—Cooling facilitated by shape of device
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
- H01L2224/161—Disposition
- H01L2224/16151—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/16221—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/16225—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
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Abstract
Description
技术领域technical field
本发明涉及芯片封装技术领域,尤其涉及一种芯片的封装结构、封装组件以及封装方法。The present invention relates to the technical field of chip packaging, in particular to a chip packaging structure, a packaging component and a packaging method.
背景技术Background technique
随着科学技术的不断发展,越来越多的电子设备被广泛的应用于人们的日常生活以及工作当中,为人们的日常生活以及工作带来了巨大的便利,成为当今人们不可或缺的重要工具。With the continuous development of science and technology, more and more electronic devices are widely used in people's daily life and work, which has brought great convenience to people's daily life and work, and has become an indispensable and important part of today's people. tool.
电子设备实现预设功能的主要部件是芯片,随着集成电路技术的不断进步,芯片的集成度越来越高,芯片的功能越来越强大,而芯片的尺寸越来越小,故芯片需要通过封装形成封装结构,以便于芯片与外部电路板电连接。The main component of electronic equipment to achieve preset functions is the chip. With the continuous advancement of integrated circuit technology, the integration of the chip is getting higher and higher, the function of the chip is getting more and more powerful, and the size of the chip is getting smaller and smaller, so the chip needs A package structure is formed by packaging, so that the chip is electrically connected to an external circuit board.
现有技术中,芯片与外部电路板电连接时通过两者之间的空气导热,散热性能较差。In the prior art, when the chip and the external circuit board are electrically connected, heat is conducted through the air between the two, and the heat dissipation performance is poor.
发明内容SUMMARY OF THE INVENTION
本发明的目的在于提供一种可提高散热性能的芯片的封装结构、封装组件以及封装方法。The purpose of the present invention is to provide a chip packaging structure, a packaging component and a packaging method which can improve the heat dissipation performance.
为实现上述发明目的之一,本发明一实施方式提供一种芯片的封装结构,包括:To achieve one of the above purposes of the invention, an embodiment of the present invention provides a chip packaging structure, including:
基板,所述基板包括相对设置的第一表面及第二表面,所述第一表面及所述第二表面均为连续面;a substrate, the substrate includes a first surface and a second surface disposed oppositely, and both the first surface and the second surface are continuous surfaces;
固定于所述第二表面的芯片,所述芯片包括相对设置的功能面及背面,所述功能面面对所述第二表面;a chip fixed on the second surface, the chip includes a functional surface and a back surface arranged oppositely, and the functional surface faces the second surface;
位于所述第二表面的植球;balls on the second surface;
覆盖所述第二表面及所述背面并暴露出所述植球的胶层。Covering the second surface and the back surface and exposing the glue layer of the ball-mounting.
作为本发明一实施方式的进一步改进,所述基板为透明基板。As a further improvement of an embodiment of the present invention, the substrate is a transparent substrate.
作为本发明一实施方式的进一步改进,所述第二表面设有透光区及第一连接区,所述功能面设有感应区及第二连接区,所述感应区对应所述透光区设置,所述第二连接区连接所述第一连接区。As a further improvement of an embodiment of the present invention, the second surface is provided with a light-transmitting area and a first connecting area, the functional surface is provided with a sensing area and a second connecting area, and the sensing area corresponds to the light-transmitting area It is arranged that the second connection area is connected to the first connection area.
作为本发明一实施方式的进一步改进,所述植球包括相对设置的第一端及第二端,所述第一端电性连接所述第一连接区,所述第二端相较于所述背面远离所述第二表面。As a further improvement of an embodiment of the present invention, the ball-mounting includes a first end and a second end disposed opposite to each other, the first end is electrically connected to the first connection region, and the second end is compared with the second end. The back surface is away from the second surface.
作为本发明一实施方式的进一步改进,所述胶层包覆所述芯片及所述植球,且所述第二端与所述胶层远离所述第二表面的端面相互齐平。As a further improvement of an embodiment of the present invention, the adhesive layer covers the chip and the ball placement, and the second end and the end surface of the adhesive layer away from the second surface are flush with each other.
作为本发明一实施方式的进一步改进,所述感应区与所述透光区之间具有空腔。As a further improvement of an embodiment of the present invention, there is a cavity between the sensing area and the light-transmitting area.
作为本发明一实施方式的进一步改进,所述透明基板包括对应所述透光区的第一部分及对应所述第一连接区的第二部分,所述第一部分的厚度等于所述第二部分的厚度。As a further improvement of an embodiment of the present invention, the transparent substrate includes a first portion corresponding to the light-transmitting region and a second portion corresponding to the first connecting region, and the thickness of the first portion is equal to the thickness of the second portion. thickness.
作为本发明一实施方式的进一步改进,所述第一连接区包括重布线层。As a further improvement of an embodiment of the present invention, the first connection region includes a redistribution layer.
作为本发明一实施方式的进一步改进,所述第二表面与所述重布线层之间具有保护层。As a further improvement of an embodiment of the present invention, a protective layer is provided between the second surface and the redistribution layer.
作为本发明一实施方式的进一步改进,所述封装结构还包括连接所述芯片的侧缘及所述第二表面的封装胶。As a further improvement of an embodiment of the present invention, the package structure further includes an encapsulant for connecting the side edge of the chip and the second surface.
作为本发明一实施方式的进一步改进,所述芯片为影像传感芯片。As a further improvement of an embodiment of the present invention, the chip is an image sensor chip.
为实现上述发明目的之一,本发明一实施方式提供一种封装组件,包括如上任意一项技术方案所述的封装结构以及电路板,所述植球电性连接所述电路板。In order to achieve one of the above objectives of the present invention, an embodiment of the present invention provides a package assembly, including the package structure described in any one of the above technical solutions and a circuit board, wherein the ball mount is electrically connected to the circuit board.
为实现上述发明目的之一,本发明一实施方式提供一种芯片的封装方法,包括步骤:To achieve one of the above purposes of the invention, an embodiment of the present invention provides a method for packaging a chip, comprising the steps of:
于基底上定义呈阵列分布的多个基板,相邻基板之间具有切割沟道;A plurality of substrates distributed in an array are defined on the base, and there are cutting channels between adjacent substrates;
固定芯片的功能面及所述基板的第二表面,所述第二表面为连续面;the functional surface of the fixed chip and the second surface of the substrate, and the second surface is a continuous surface;
于所述第二表面形成植球;forming balls on the second surface;
形成覆盖所述第二表面及所述芯片上远离所述功能面的背面并暴露出所述植球的胶层;forming an adhesive layer covering the second surface and the back surface of the chip away from the functional surface and exposing the ball-mounting;
基于所述切割沟道分割所述基底,形成多个单粒封装结构。The substrate is divided based on the dicing trenches to form a plurality of single-chip package structures.
作为本发明一实施方式的进一步改进,所述基板为透明基板,步骤:“固定芯片的功能面及所述基板的第二表面”具体包括:As a further improvement of an embodiment of the present invention, the substrate is a transparent substrate, and the step: "fixing the functional surface of the chip and the second surface of the substrate" specifically includes:
连接所述功能面处的第二连接区及所述第二表面处的第一连接区,并使得功能面处的感应区对应所述第二表面处的透光区;connecting the second connection area at the functional surface and the first connection area at the second surface, so that the sensing area at the functional surface corresponds to the light-transmitting area at the second surface;
形成连接所述芯片的侧缘及所述第二表面的封装胶。An encapsulant for connecting the side edge of the chip and the second surface is formed.
作为本发明一实施方式的进一步改进,“于所述第二表面形成植球;形成覆盖所述第二表面及所述芯片上远离所述功能面的背面并暴露出所述植球的胶层”具体包括:As a further improvement of an embodiment of the present invention, "form bumping on the second surface; form an adhesive layer covering the second surface and the back side of the chip away from the functional surface and exposing the bumping "Includes:
于所述第一连接区形成植球,且所述植球远离所述第一连接区的一端凸伸出所述背面;forming balls in the first connection area, and one end of the balls away from the first connection area protrudes out of the back surface;
形成覆盖所述第二表面及所述芯片上远离所述功能面的背面的胶层;forming an adhesive layer covering the second surface and the back surface of the chip away from the functional surface;
研磨所述胶层而暴露出所述植球,且所述胶层覆盖所述背面。The adhesive layer is ground to expose the ball mount, and the adhesive layer covers the backside.
作为本发明一实施方式的进一步改进,步骤“固定芯片的功能面及所述基板的第二表面”之前还包括步骤:As a further improvement of an embodiment of the present invention, before the step "fixing the functional surface of the chip and the second surface of the substrate", the step further includes:
于所述基板的第二表面处依次形成保护层和重布线层。A protective layer and a redistribution layer are sequentially formed on the second surface of the substrate.
为实现上述发明目的之一,本发明一实施方式提供一种封装组件的封装方法,包括步骤:In order to achieve one of the above purposes of the invention, an embodiment of the present invention provides a packaging method for packaging components, including the steps:
提供如上任意一项技术方案所述的封装方法得到的封装结构;Provide the packaging structure obtained by the packaging method described in any one of the above technical solutions;
焊接所述植球及电路板。Solder the ball mount and the circuit board.
与现有技术相比,本发明的有益效果在于:本发明一实施方式的芯片的背面覆盖有胶层,且植球暴露在胶层的外部,可便于实现植球与外部电路板的电性连接,同时,芯片背离基板的一侧表面处设置有胶层,当封装结构与外部电路板相互组装时,芯片的热量可以传导至胶层,通过胶层可加快芯片的散热,相较于现有技术中的空气导热方式,本实施方式通过胶层可大大提高封装结构的散热性能。Compared with the prior art, the beneficial effect of the present invention is that: the backside of the chip in an embodiment of the present invention is covered with an adhesive layer, and the mounting ball is exposed outside the adhesive layer, which can facilitate the realization of electrical properties between the mounting ball and the external circuit board At the same time, the surface of the chip away from the substrate is provided with an adhesive layer. When the package structure and the external circuit board are assembled with each other, the heat of the chip can be conducted to the adhesive layer, and the heat dissipation of the chip can be accelerated through the adhesive layer. There is an air heat conduction method in the art, and the heat dissipation performance of the package structure can be greatly improved by the adhesive layer in this embodiment.
附图说明Description of drawings
图1是本发明一实施方式的封装结构示意图;1 is a schematic diagram of a package structure according to an embodiment of the present invention;
图2是本发明一实施方式的封装组件示意图;2 is a schematic diagram of a package assembly according to an embodiment of the present invention;
图3是本发明一实施方式的封装方法步骤图;3 is a step diagram of a packaging method according to an embodiment of the present invention;
图4至图12是本发明一实施方式的封装方法各个步骤的示意图。4 to 12 are schematic diagrams of various steps of a packaging method according to an embodiment of the present invention.
具体实施方式Detailed ways
以下将结合附图所示的具体实施方式对本发明进行详细描述。但这些实施方式并不限制本发明,本领域的普通技术人员根据这些实施方式所做出的结构、方法、或功能上的变换均包含在本发明的保护范围内。The present invention will be described in detail below with reference to the specific embodiments shown in the accompanying drawings. However, these embodiments do not limit the present invention, and structural, method, or functional changes made by those skilled in the art according to these embodiments are all included in the protection scope of the present invention.
在本发明的各个图示中,为了便于图示,结构或部分的某些尺寸会相对于其它结构或部分夸大,因此,仅用于图示本发明的主题的基本结构。In various drawings of the present invention, some dimensions of structures or parts are exaggerated relative to other structures or parts for convenience of illustration, and thus, are only used to illustrate the basic structure of the subject matter of the present invention.
结合图1,为本发明一实施方式的芯片的封装结构100示意图。1 is a schematic diagram of a
封装结构100包括基板10、芯片11、植球12及胶层13。The
基板10包括相对设置的第一表面101及第二表面102,第一表面101及第二表面102均为连续面。The
这里,“第一表面101及第二表面102均为连续面”是指基板10上不存在贯穿第一表面101及第二表面102的空腔结构,第一表面101及第二表面102均为完整面。Here, "both the
芯片11固定于第二表面102,芯片11包括相对设置的功能面111及背面112,功能面111面对第二表面102。The
植球12位于第二表面102。The ball mount 12 is located on the
胶层13覆盖第二表面102及背面112并暴露出植球12。The
这里,胶层13可为通过注塑工艺形成的注塑料,或者,胶层13为导热胶,胶层13的材质可根据实际情况而定。Here, the
需要说明的是,“芯片11固定于第二表面102”是指芯片11位于基板10的第二表面102的一侧,芯片11与第二表面102之间可以是直接连接或者是间接连接,同样的,“植球12位于第二表面102”是指植球12位于基板10的第二表面102的一侧,植球12与第二表面102之间可以是直接连接或者是间接连接,换句话说,本实施方式所述的一个部件连接或固定于另一个部件,是指两个部件之间直接连接或者是间接连接。It should be noted that "the
本实施方式的芯片11的背面112覆盖有胶层13,且植球12暴露在胶层13的外部,可便于实现植球12与外部电路板(例如PCB板)的电性连接,同时,芯片11背离基板10的一侧表面(即背面112)处设置有胶层13,当封装结构100与外部电路板相互组装时,芯片11的热量可以传导至胶层13,通过胶层13可加快芯片11的散热,相较于现有技术中的空气导热方式,本实施方式通过胶层13可大大提高封装结构100的散热性能。The
在本实施方式中,基板10为透明基板10,芯片11为影像传感芯片,外部光线经由透明基板10而直接到达芯片11的功能面111处,而后芯片11将获取到的信号传输至外部电路板。In this embodiment, the
透明基板10的第二表面102设有透光区1021及第一连接区1022,透明基板10包括对应透光区1021的第一部分103及对应第一连接区1022的第二部分104,第一部分103的厚度等于第二部分104的厚度,也就是说,透明基板10为实心基板,透明基板10上不包括空腔结构。The
功能面111设有感应区111a及第二连接区111b,感应区111a对应透光区1021设置,第二连接区111b连接第一连接区1022,如此,可实现芯片11与透明基板10的固定。The
这里,第二连接区111b包括连接端子1111b,连接端子1111b与第一连接区1022相互连接,此时,感应区111a与透光区1021之间具有尺寸较小的空腔S,避免透光区1021与感应区111a直接接触而导致感应区111a受损,进而影响芯片11的传感效果。Here, the
本实施方式的芯片11直接设置于透明基板10的第二表面102,相对于一些现有技术中在基板上设置空腔及透明盖板的封装结构,本实施方式可大大降低整个封装结构100的整体厚度,实现封装结构100的小型化,同时,此时仅是芯片11的感应区111a与透明基板10的透光区1021之间具有尺寸较小的空腔S,空腔的占空比大大减小,避免空腔过大而对封装结构100整体刚性、可靠性产生影响。The
另外,封装结构100还包括连接芯片11的侧缘及第二表面102的封装胶14,如此,可提高芯片11与透明基板10配合的稳定性。In addition, the
继续结合图1,在本实施方式中,植球12包括相对设置的第一端121及第二端122,第一端121电性连接第一连接区1022,植球12为锡球。Continuing with reference to FIG. 1 , in this embodiment, the ball mounting 12 includes a
当封装结构100与外部电路板相互组装时,通过植球12与外部电路板的焊接固定而实现封装结构100与外部电路板的电性连接,由于植球12及芯片11的连接端子1111b均与第一连接区1022电性连接,植球12与连接端子1111b之间是相互导通的,此时,芯片11获取到的信号可传输至外部电路板。When the
这里,第一连接区1022包括重布线层1022,也就是说,本实施方式的封装结构100为扇出型(fan-out)封装结构。Here, the
具体的,第一连接区1022包括依次连接第二表面102的保护层1023、重布线层1022及阻焊层1024,芯片11的连接端子1111b电性连接重布线层1022,植球12的第一端121电性连接阻焊层1024,封装胶14连接重布线层1022。Specifically, the
保护层1023的热膨胀系数可介于透明基板10及重布线层1022之间,但不以此为限,保护层1023的设置可避免重布线层1022及透明基板10在应力拉扯下相互分离,且本实施方式的空腔S尺寸较小,封装结构100整体刚性较强,可进一步避免重布线层1022在应力作用下与透明基板10相互分离。The thermal expansion coefficient of the
另外,本实施方式的封装结构100还包括连接保护层1023及重布线层1022的金属层1025,金属层1025可避免封装胶14进入芯片11的感应区111a。In addition, the
在本实施方式中,植球12的第二端122相较于芯片11的背面112远离第二表面102,也就是说,于第一方向X上,植球12的高度大于芯片11的厚度,如此,可便于通过植球12实现封装结构100与外部电路板的电性连接,避免在焊接过程中芯片11受损,这里,第一方向X定义为基板10的第一表面101朝向第二表面102的方向(即竖直方向)。In this embodiment, the
另外,胶层13包覆芯片11及植球12,且第二端122与胶层13远离第二表面102的端面131相互齐平,这里,可预先使得胶层13完全覆盖芯片11及植球12,而后通过研磨工艺暴露出植球12并使得第二端122与端面131相互齐平,但不以此为限。In addition, the
本实施方式的胶层13不仅覆盖芯片11的背面112,还填充满植球12与芯片11之间的间隙,如此,芯片11的热量可通过芯片11侧缘的封装胶14、胶层13以及芯片11背面112的胶层13实现散热,可进一步提高芯片11的散热效果。The
结合图2,本发明一实施方式还提供一种封装组件200。Referring to FIG. 2 , an embodiment of the present invention further provides a
封装组件200包括如上所述的封装结构100及电路板300,植球12电性连接电路板300,电路板300例如可为PCB板。The
需要说明的是,由于封装结构100与电路板300之间通过焊接固定,胶层13远离第二表面102的端面131与电路板300之间可存在一定的间隙,当然,在其他实施方式中,焊接过程中胶层13也可发生些许变形而与电路板300接触。It should be noted that, since the
本发明一实施方式还提供一种芯片的封装方法,结合图3至图12,封装方法包括步骤:An embodiment of the present invention also provides a chip packaging method. With reference to FIGS. 3 to 12 , the packaging method includes the steps:
S1:结合图4,于基底上定义呈阵列分布的多个基板10,相邻基板10之间具有切割沟道;S1: Referring to FIG. 4, define a plurality of
这里,基底可为晶圆基底,可于基底上预先划分出呈阵列分布的多个基板10,基板10为透明基板,且基板10上不形成空腔结构。Here, the substrate may be a wafer substrate, and a plurality of
S3:结合图5至图9,固定芯片11的功能面111及基板10的第二表面102,第二表面102为连续面;S3: With reference to FIGS. 5 to 9, the
这里,步骤S3之前还包括步骤:Here, before step S3, it also includes steps:
结合图5及图6,于基板10的第二表面102处依次形成保护层1023和重布线层1022。Referring to FIG. 5 and FIG. 6 , a
具体的,可在基底上涂布一层保护层1023,而后通过电镀、光刻工艺等形成重布线层1022,而后,结合图7及图8,形成连接保护层1023和重布线层1022的金属层1025,以及位于重布线层1022下方的阻焊层1024。Specifically, a
步骤S3具体包括:Step S3 specifically includes:
结合图9,连接功能面111处的第二连接区111b及第二表面102处的第一连接区1022,并使得功能面111处的感应区111a对应第二表面102处的透光区1021;9, connect the
形成连接芯片11的侧缘及第二表面102的封装胶14。The
这里,芯片11以影像传感芯片为例,但不以此为限,可通过倒装方式实现芯片11与基板10的连接,第一连接区1022包括保护层1023、重布线层1022和阻焊层1024,第二连接区111b包括连接端子1111b,连接端子1111b与第二表面102的重布线层1022电性连接,另外,封装胶14连接重布线层1022,设置封装胶14可提高芯片11与基板10配合的稳定性。Here, the
S5:结合图10,于第二表面102形成植球12;S5: with reference to FIG. 10 , forming the
S7:结合图11及图12,形成覆盖第二表面102及芯片11上远离功能面111的背面112并暴露出植球12的胶层13;S7: In combination with FIG. 11 and FIG. 12 , form the
这里,步骤S5、S7具体包括:Here, steps S5 and S7 specifically include:
结合图10,于第一连接区1022形成植球12,且植球12远离第一连接区1022的一端凸伸出背面112;Referring to FIG. 10 , the ball mounting 12 is formed in the
结合图11,形成覆盖第二表面102及芯片11上远离功能面111的背面112的胶层13;Referring to FIG. 11 , an
结合图12,研磨胶层13而暴露出植球12,且胶层13覆盖背面112。Referring to FIG. 12 , the
其中,植球12连接阻焊层1024,胶层13可通过注塑工艺形成,胶层13不仅覆盖芯片11的背面112,还填充满植球12与芯片11之间的间隙,研磨过程中可同时研磨掉部分胶层13及植球12,如此,可暴露出植球12,并使得植球12远离第二表面102的一端与胶层13远离第二表面102的端面131相互齐平,同时,保证研磨之后芯片11的背面112仍有足够厚度的胶层13。The
S9:基于切割沟道分割基底,形成多个单粒封装结构100。S9: Divide the substrate based on the dicing trenches to form a plurality of single-
可以理解的是,当要形成如上所述的封装组件200时,步骤S9之后还包括步骤:It can be understood that, when the
焊接植球12及电路板300。Solder the
这里,可在电路板300的线路层上形成焊接垫,通过熔融焊接工艺实现植球12及电路板300的电性连接。Here, soldering pads may be formed on the circuit layer of the
综上所述,本实施方式的芯片11的背面112覆盖有胶层13,且植球12暴露在胶层13的外部,可便于实现植球12与外部电路板的电性连接,同时,芯片11背离基板10的一侧表面(即背面112)处设置有胶层13,当封装结构100与外部电路板相互组装时,芯片11的热量可以传导至胶层13,通过胶层13可加快芯片11的散热,相较于现有技术中的空气导热方式,本实施方式通过胶层13可大大提高封装结构100的散热性能。To sum up, the
本实施方式的封装方法的其他说明可以参考前述封装结构的说明,在此不再赘述。For other descriptions of the packaging method in this embodiment, reference may be made to the description of the packaging structure described above, which will not be repeated here.
应当理解,虽然本说明书按照实施方式加以描述,但并非每个实施方式仅包含一个独立的技术方案,说明书的这种叙述方式仅仅是为清楚起见,本领域技术人员应当将说明书作为一个整体,各实施方式中的技术方案也可以经适当组合,形成本领域技术人员可以理解的其他实施方式。It should be understood that although this specification is described in terms of embodiments, not each embodiment only includes an independent technical solution. This description in the specification is only for the sake of clarity, and those skilled in the art should take the specification as a whole, and each The technical solutions in the embodiments can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.
上文所列出的一系列的详细说明仅仅是针对本发明的可行性实施方式的具体说明,它们并非用以限制本发明的保护范围,凡未脱离本发明技艺精神所作的等效实施方式或变更均应包含在本发明的保护范围之内。The series of detailed descriptions listed above are only specific descriptions for the feasible embodiments of the present invention, and they are not used to limit the protection scope of the present invention. Changes should all be included within the protection scope of the present invention.
Claims (17)
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