CN111561844B - A low acceleration delay MEMS security device - Google Patents
A low acceleration delay MEMS security device Download PDFInfo
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- CN111561844B CN111561844B CN202010511964.8A CN202010511964A CN111561844B CN 111561844 B CN111561844 B CN 111561844B CN 202010511964 A CN202010511964 A CN 202010511964A CN 111561844 B CN111561844 B CN 111561844B
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- 230000001133 acceleration Effects 0.000 title claims abstract description 85
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 99
- 239000010703 silicon Substances 0.000 claims abstract description 99
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 92
- 239000000758 substrate Substances 0.000 claims abstract description 65
- 238000000034 method Methods 0.000 claims abstract description 10
- 230000008569 process Effects 0.000 claims abstract description 10
- 238000005530 etching Methods 0.000 claims abstract description 3
- 230000009467 reduction Effects 0.000 claims description 64
- 230000033001 locomotion Effects 0.000 claims description 21
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 14
- 229910052759 nickel Inorganic materials 0.000 claims description 7
- 238000011084 recovery Methods 0.000 claims description 3
- 230000003993 interaction Effects 0.000 claims description 2
- 230000002787 reinforcement Effects 0.000 claims 2
- 230000009471 action Effects 0.000 abstract description 29
- 238000005192 partition Methods 0.000 abstract description 22
- 230000007246 mechanism Effects 0.000 abstract description 12
- 230000000694 effects Effects 0.000 abstract description 5
- 238000001914 filtration Methods 0.000 abstract description 2
- 238000010586 diagram Methods 0.000 description 27
- 238000006073 displacement reaction Methods 0.000 description 12
- 230000003111 delayed effect Effects 0.000 description 3
- 238000003754 machining Methods 0.000 description 3
- 230000003014 reinforcing effect Effects 0.000 description 3
- 238000004880 explosion Methods 0.000 description 2
- 230000036540 impulse transmission Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000003638 chemical reducing agent Substances 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000005474 detonation Methods 0.000 description 1
- 238000011031 large-scale manufacturing process Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000001052 transient effect Effects 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F42—AMMUNITION; BLASTING
- F42C—AMMUNITION FUZES; ARMING OR SAFETY MEANS THEREFOR
- F42C15/00—Arming-means in fuzes; Safety means for preventing premature detonation of fuzes or charges
- F42C15/24—Arming-means in fuzes; Safety means for preventing premature detonation of fuzes or charges wherein the safety or arming action is effected by inertia means
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Abstract
一种低加速度延时MEMS安保装置，包括通过键合方式结合到一起的盖板层和器件层，器件层为SOI硅片分为顶硅和衬底，二者通过腐蚀工艺分离，利用硅齿条、硅齿轮及硅卡摆等机构，对硅隔板进行惯性驱动，实现装置的延时性能，提高了安全距离控制精度；利用质量块、硅弹簧及硅卡摆等机构，使加速度锁对卡摆在单一方向不同的加速度值作用下产生不同的控制效果，提高了器件对外界加速度的识别性；利用非对称齿轮的力臂效果，硅弹簧的回复力及一对卡齿机构，使装置具有复位及锁死的功能，本发明具有机械滤波、高强度、可靠性高、抗过载等特点。
A low-acceleration time-delay MEMS security device, comprising a cover plate layer and a device layer that are joined together by bonding, the device layer is an SOI silicon wafer and is divided into a top silicon and a substrate, and the two are separated by an etching process, using silicon teeth The silicon partition plate is inertialy driven by means of bars, silicon gears and silicon clip pendulums to realize the delay performance of the device and improve the control accuracy of the safety distance; The card pendulum produces different control effects under the action of different acceleration values in a single direction, which improves the device's recognition of the external acceleration; the use of the force arm effect of the asymmetric gear, the restoring force of the silicon spring and a pair of card gear mechanisms make the device It has the functions of resetting and locking, and the invention has the characteristics of mechanical filtering, high strength, high reliability, and overload resistance.
Description
Technical Field
The invention relates to the technical field of security devices, in particular to a low-acceleration time-delay MEMS security device.
Background
The safety device is an important component in an explosion transfer sequence of an ammunition fuze system, and has the function of ensuring the safety and reliability of the explosion transfer sequence in the using process of ammunition. In order to prevent misleading and misexplosion of ammunition in the using process, the ammunition is required to normally ignite and explode after flying a certain safety distance, and therefore, when the design of related devices is developed, a partition mechanical mechanism needs to be introduced to realize the control of detonation energy transfer.
The safety device is a complete mechanical mechanism device driven by inertia force, and the basic principle is that under the action of acceleration in the ammunition flying process, the inertia force drives the partition mechanism to displace, so that the safety device is converted between a safety state and a relief state. In order to ensure the safety and reliability of the safety protection mechanism in the use process, in a fuse system of self-propelled ammunition such as a guided missile or a rocket projectile, the safety protection device is required to be capable of accurately identifying the low acceleration value generated by the ammunition in the cruising process, and the partition mechanism is delayed for a certain time and then displaced to a solution protection position under the continuous action of the low acceleration value, so that the judgment on the flying distance of the ammunition is realized through the delayed solution protection time length.
The self-propelled ammunition security device requires that the device can only carry out delay solution and lock the solution state within the action time within a specified small-range acceleration window value, and has certain resilience and self-sustaining property under the action of non-window value acceleration, and the traditional structural form obviously cannot meet the requirement.
Disclosure of Invention
In order to overcome the defects of the prior art, the invention aims to provide a low-acceleration delay MEMS security device, which performs delay solution protection and locks the solution protection state within the action time within a specified small-range window value of acceleration, has certain resilience and self-sustaining property under the action of non-window value acceleration, and has the characteristics of mechanical filtering, high strength, high reliability, overload resistance and the like.
In order to achieve the purpose, the invention adopts the technical scheme that:
a low acceleration time delay MEMS security device comprises a cover plate layer 100 and a device layer 200 which are bonded together;
an acceleration lock spring observation window 101, a high acceleration state observation window 102, an acceleration lock state observation window 111 and a gear shaft observation window 110 are arranged at the left side position of the cover plate layer 100, a gear rack meshing observation window 109, a rack observation window 103 and a reduction gear rack observation window 108 are arranged at the middle position of the cover plate layer 100, and a reduction gear shaft part observation window 107, a return rack spring observation window 106, a release state lock state observation window 104 and a release state lock spring state observation window 105 are arranged at the right side position of the cover plate layer 100;
the device layer 200 is made of an SOI silicon wafer, the SOI silicon wafer is divided into a top silicon 201 and a substrate 202, and the top silicon 201 and the substrate 202 are separated through a corrosion process; the device layer 200 comprises a rack I, the rack I is arranged in a rack slide way 204 and a rack substrate slide way 203, the left side of the rack I is meshed with and drives a gear II, the other side of the gear II is matched with a pendulum III and moves relatively, the other side of the pendulum III is matched with an acceleration lock IV, the acceleration lock IV is positioned in an acceleration lock slide way 207, and the movement of the pendulum III is controlled by the acceleration lock IV; the right side of the rack I is meshed with and drives a reduction gear V, the other side of the reduction gear V is meshed with and drives a return rack VI, the return rack VI is positioned in a return rack slideway 205, the upper part of the return rack VI is matched with an unlocking state lock VII, the unlocking state lock VII is positioned in an unlocking state lock slideway 206, a rack substrate slideway 203 is arranged on a substrate 202, and a rack slideway 204, a return rack slideway 205, an unlocking state lock slideway 206 and an acceleration lock slideway 207 are arranged on a top silicon 201;
part of the substrate 202 is fixedly connected with a movable device in the top silicon 201, a card pendulum substrate 223 is arranged in a card pendulum substrate cavity 252 in the substrate 202, an acceleration lock substrate 237 is arranged in an acceleration lock substrate cavity 254 in the substrate 202, and a rack substrate slide 203 in the substrate 202 is matched with a rack substrate 214.
The rack I comprises a silicon partition plate 213, the left side of the silicon partition plate 213 is rack left involute teeth 208, the right side of the silicon partition plate 213 is rack right involute teeth 209, the upper side of the silicon partition plate 213 is provided with a silicon through hole 211, the lower side of the silicon partition plate 213 is provided with a slide way matching bevel 210, the top of the silicon partition plate 213 is electroformed with a nickel enhancement layer 212, the bottom of the silicon partition plate 213 is fixedly connected with a rack substrate 214, and the bonded nickel enhancement layer 212 is positioned in a rack observation window 103 of the cover plate layer 100.
An escapement gear 215 is arranged on one side of the gear II, the escapement gear 215 is matched with the clamping pendulum III, a gear involute gear 217 is arranged on the other side of the gear II, the gear involute gear 217 is meshed with the rack left involute gear 208, the gear II adopts a spoke type gear 216, a gear shaft 220 of the gear II is fixedly connected with the substrate 202, a gear shaft edge 219 on the gear shaft 220 is matched with a gear inner ring 218 on the gear II, and the gear shaft edge 219 has a wave shape.
The card pendulum III comprises a card pendulum arm 224, two ends of the card pendulum arm 224 are connected with a card pendulum mass block 222, the bottom of the card pendulum mass block 222 is fixedly connected with a card pendulum substrate 223, an upper card pendulum locking latch 221 is arranged on the card pendulum mass block 222 at the upper end, a card pendulum locking latch 225 is arranged on the card pendulum arm 224, a card pendulum inner ring 228 and a card pendulum shaft 227 are arranged in the middle of the card pendulum arm 224, the card pendulum shaft 227 is fixedly connected with the substrate 202, an upper card pendulum shaft edge 230 of the card pendulum shaft 227 is matched with the card pendulum inner ring 228, the card pendulum shaft edge 230 has a wave shape, an upper card pendulum latch 229 and a lower card pendulum latch 231 are arranged in the middle of the card pendulum arm 224, and the upper card pendulum latch 229 and the lower card pendulum latch 231 are used for interacting with an escapement mechanism.
The acceleration lock IV comprises a silicon connecting plate 232, the lower ends of the silicon connecting plate 232 and an acceleration lock spring 233 are connected, the upper end of the acceleration lock spring 233 is connected with a top silicon 201, the bottom end of the lower portion of the silicon connecting plate 232 is connected with an acceleration lock substrate 237, an upper locking latch 236 is arranged on the upper right portion of the silicon connecting plate 232, a locking latch 234 is arranged in the middle of the right side of the silicon connecting plate 232, and the upper locking latch 236, the locking latch 234 and an upper pendulum locking latch 221 and a pendulum locking latch 225 of a pendulum III are matched with each other to control the pendulum III by the acceleration lock IV.
The reduction gear V is a spoke type half gear 239, the upper side of the spoke type half gear 239 is provided with reduction gear high-speed involute teeth 238, the reduction gear high-speed involute teeth 238 are meshed with rack right involute teeth 209, the lower side of the spoke type half gear 239 is provided with reduction gear low-speed involute teeth 242, a reduction gear shaft 243 arranged at the rotating center of the spoke type half gear 239 is fixedly connected with the substrate 202, a reduction gear shaft edge 241 on the reduction gear shaft 243 is matched with a reduction gear inner ring 240, and the reduction gear shaft edge 241 is in a wave shape.
The restoring rack VI comprises a restoring rack silicon connecting plate 246, restoring rack involute teeth 245 are arranged on the left side of the restoring rack silicon connecting plate 246, the restoring rack involute teeth 245 are meshed with the low-speed involute teeth 242 of the reduction gear V, the reducing rack clamping teeth 244 are arranged on the right side of the restoring rack silicon connecting plate 246, a restoring rack spring 247 is connected to the lower side of the restoring rack silicon connecting plate 246, and the lower end of the restoring rack spring 247 is fixedly connected with the top silicon 201.
The state lock VII that unlocks include state lock connecting plate 250 that unlocks, state lock latch 249 is provided with on the left of state lock connecting plate 250 that unlocks, state lock latch 249 and reduction rack latch 244 mutually support and realize the locking to the state of unloading, state lock spring 248 is connected on the right side of state lock connecting plate 250 that unlocks, state lock spring 248 lower extreme and top silicon 201 link firmly.
Compared with the traditional security device, the invention has the beneficial effects that:
the invention utilizes the existing mature IC process, can realize large-scale manufacture, and reduces the production cost; each layer of structure can be manufactured independently, so that the processing difficulty is reduced, and the yield of devices is improved; the silicon partition plate is driven by inertia by using mechanisms such as a silicon rack, a silicon gear, a silicon card pendulum and the like, so that the time delay performance of the device is realized, and the control precision of the safety distance is improved; the acceleration lock can generate different control effects on the clamping pendulum under the action of different acceleration values in a single direction by utilizing mechanisms such as the mass block, the silicon spring, the silicon clamping pendulum and the like, so that the identification of the device on the external acceleration is improved; the device has the functions of resetting and locking by utilizing the force arm effect of the asymmetric gear, the restoring force of the silicon spring and the pair of latch mechanisms.
Drawings
FIG. 1 is a schematic structural diagram of the present invention.
Fig. 2 is a schematic structural diagram of a cover plate layer according to the present invention.
Fig. 3 is a schematic structural diagram of a device layer of the present invention.
Fig. 4 is a cross-sectional view of the present invention.
Fig. 5 is a schematic structural diagram of a rack unit in the device layer of the present invention.
Fig. 6 is a schematic structural diagram of a gear unit in the device layer of the present invention.
Fig. 7 is a schematic structural diagram of a pendulum unit in a device layer according to the present invention.
Fig. 8 is a schematic structural diagram of a acceleration lock unit in a device layer according to the present invention.
Fig. 9 is a schematic view of the structure of a reduction gear unit in the device layer of the present invention.
Fig. 10 is a schematic structural diagram of a recovery rack unit in the device layer according to the present invention.
Fig. 11 is a schematic structural diagram of an unlock state lock unit in a device layer according to the present invention.
FIG. 12 is a diagram showing the relative movement between the movable units according to the present invention.
Fig. 13 is a schematic diagram of the speed reducer of the delay mechanism of the present invention, in which fig. (a) is a diagram showing a state of an impulse transmission motion of a lower swing pawl, fig. (b) is a diagram showing a state of an impact motion of an upper swing pawl, fig. (c) is a diagram showing a state of an impulse transmission motion of an upper swing pawl, and fig. (d) is a diagram showing a state of an impact motion of a lower swing pawl.
Fig. 14 is an acceleration recognition diagram of the present invention, in which (a) is a state diagram of a low acceleration environment device, (b) is a state diagram of a transient acceleration environment device, (c) is a state diagram of a predetermined acceleration environment device, and (d) is a state diagram of a high acceleration environment device.
Fig. 15 is a schematic diagram of the recovery and locking of the present invention, in which (a) is a diagram of an initial motion state, (b) is a diagram of a contact motion state, and (c) is a diagram of a reset motion state after the release.
Fig. 16 is a state diagram of the present invention, wherein (a) is a safety state diagram and (b) is an unlocking state diagram.
Detailed Description
The present invention will be described in detail with reference to the accompanying drawings.
Referring to fig. 1, a low acceleration delay MEMS security device includes a cover plate layer 100 and a device layer 200 bonded together.
Referring to fig. 2, an acceleration lock spring observation window 101, a high acceleration state observation window 102, an acceleration lock state observation window 111, and a gear shaft observation window 110 are provided at a left side position of the cover plate layer 100, a rack and pinion engagement observation window 109, a rack observation window 103, and a reduction rack and pinion observation window 108 are provided at a middle position of the cover plate layer 100, and a reduction gear shaft portion observation window 107, a return rack spring observation window 106, a release state lock state observation window 104, and a release state lock spring state observation window 105 are provided at a right side position of the cover plate layer 100.
Referring to fig. 3, the device layer 200 is an SOI silicon wafer, the SOI silicon wafer is divided into a top silicon 201 and a substrate 202, and the top silicon 201 and the substrate 202 are separated by an etching process;
the device layer 200 comprises a rack I, the rack I is arranged in a rack slide way 204 and a rack substrate slide way 203, the left side of the rack I is meshed with and drives a gear II, the other side of the gear II is matched with a pendulum III and moves relatively, the other side of the pendulum III is matched with an acceleration lock IV, the acceleration lock IV is positioned in an acceleration lock slide way 207, and the movement of the pendulum III is controlled by the acceleration lock IV; the right side of the rack I is meshed with and drives a reduction gear V, the other side of the reduction gear V is meshed with and drives a return rack VI, the return rack VI is located in a return rack slide way 205, the upper portion of the return rack VI is matched with an unlocking state lock VII, the unlocking state lock VII is located in an unlocking state lock slide way 206, a rack substrate slide way 203 is arranged on a substrate 202, and a rack slide way 204, the return rack slide way 205, the unlocking state lock slide way 206 and an acceleration lock slide way 207 are arranged on a top silicon 201.
Referring to fig. 4, a portion of the substrate 202 is attached to the movable devices in the top silicon 201, a card pendulum substrate 223 is disposed in a card pendulum substrate cavity 252 in the substrate 202, an accelerometer lock substrate 237 is disposed in an accelerometer lock substrate cavity 254 in the substrate 202, and a rack substrate slide 203 in the substrate 202 mates with the rack substrate 214.
Referring to fig. 5, the rack i includes a silicon partition plate 213, rack left involute teeth 208 are arranged on the left side of the silicon partition plate 213, rack right involute teeth 209 are arranged on the right side of the silicon partition plate 213, a silicon through hole 211 is formed in the upper side of the silicon partition plate 213, a slide way matching bevel 210 is arranged on the lower side of the silicon partition plate 213, a nickel reinforcing layer 212 is electroformed on the top of the silicon partition plate 213, a rack substrate 214 is fixedly connected to the bottom of the silicon partition plate 213, the nickel reinforcing layer 212 and the rack substrate 214 increase the driving force of the rack i and the strength of the silicon partition plate 213, and the bonded nickel reinforcing layer 212 is located in the rack observation window 103 of.
Referring to fig. 6, one side of the gear ii is provided with an escapement gear 215, the escapement gear 215 is matched with the pendulum iii, the other side of the gear ii is provided with an involute gear 217, the involute gear 217 is meshed with the rack left involute gear 208, the gear ii adopts a spoke gear 216, a gear shaft 220 of the gear ii is fixedly connected with the substrate 202, a gear shaft edge 219 on the gear shaft 220 is matched with a gear inner ring 218 on the gear ii, and the gear shaft edge 219 has a wave shape to improve the machining precision of a gap between the gear shaft edge 219 and the gear inner ring 218.
Referring to fig. 7, the pendulum clip iii includes a pendulum clip arm 224, two ends of the pendulum clip arm 224 are connected to a pendulum clip mass 222, the bottom of the pendulum clip mass 222 is fixedly connected to a pendulum clip substrate 223, an upper pendulum clip locking latch 221 is disposed on the pendulum clip mass 222 at the upper end, a pendulum clip locking latch 225 is disposed on the pendulum clip arm 224, a pendulum clip inner ring 228 and a pendulum clip shaft 227 are disposed in the middle of the pendulum clip arm 224, the pendulum clip shaft 227 is fixedly connected to the substrate 202, an upper pendulum clip shaft edge 230 of the pendulum clip shaft 227 is matched with the pendulum clip inner ring 228, the pendulum clip shaft edge 230 has a wavy shape to improve the machining accuracy of a gap between the pendulum clip shaft edge 230 and the pendulum clip inner ring 228, an upper pendulum clip latch 229 and a lower pendulum latch 231 are disposed in the middle of the pendulum clip arm 224, and the upper clip latch 229 and the lower pendulum latch 231 are used for interacting with an escape.
Referring to fig. 8, the acceleration lock iv includes a silicon connecting plate 232, the silicon connecting plate 232 is connected with the lower end of an acceleration lock spring 233, the upper end of the acceleration lock spring 233 is connected with a top silicon 201, the bottom end of the lower portion of the silicon connecting plate 232 is connected with an acceleration lock substrate 237, an upper locking latch 236 is arranged on the upper right portion of the silicon connecting plate 232, a locking latch 234 is arranged in the middle of the right side of the silicon connecting plate 232, and the upper locking latch 236 and the locking latch 234 are matched with an upper pendulum locking latch 221 and a pendulum locking latch 225 of a pendulum iii to control the pendulum iii by the acceleration lock iv.
Referring to fig. 9, the reduction gear v is a radial type half gear 239, the upper side of the radial type half gear 239 is provided with reduction gear high-speed involute teeth 238, the reduction gear high-speed involute teeth 238 are meshed with the rack right involute teeth 209, the lower side of the radial type half gear 239 is provided with reduction gear low-speed involute teeth 242, a reduction gear shaft 243 arranged at the rotation center of the radial type half gear 239 is fixedly connected with the substrate 202, a reduction gear shaft edge 241 on the reduction gear shaft 243 is matched with a reduction gear inner ring 240, and the reduction gear shaft edge 241 has a wavy shape to improve the machining accuracy of a gap between the reduction gear shaft edge 241 and the reduction gear inner ring 240.
Referring to fig. 10, the return rack vi includes a return rack silicon connecting plate 246, return rack involute teeth 245 are disposed on the left side of the return rack silicon connecting plate 246, the return rack involute teeth 245 are meshed with the reduction gear low-speed involute teeth 242 of the reduction gear v, reduction rack snap teeth 244 are disposed on the right side of the return rack silicon connecting plate 246, a return rack spring 247 is connected to the lower side of the return rack silicon connecting plate 246, and the lower end of the return rack spring 247 is fixedly connected to the top silicon 201.
Referring to fig. 11, the release state lock vii includes a release state lock connection plate 250, the left side of the release state lock connection plate 250 is provided with a release state lock latch 249, the release state lock latch 249 and the reduction rack latch 244 are matched with each other to lock the release state, the right side of the release state lock connection plate 250 is connected with a release state lock spring 248, and the lower end of the release state lock spring 248 is fixedly connected with the top silicon 201.
The working principle of the invention is as follows:
referring to fig. 12, under the action of an external acceleration environment, a rack i generates an inertial driving force F1 and moves downwards to generate a displacement x1, and the rack i and a gear ii drive a gear ii to rotate through the mutual meshing of rack left involute teeth 208 and gear involute teeth 217 and generate a gear driving moment M1; the gear II and the pendulum III enable the pendulum III to swing back and forth within a certain angle range theta to achieve a delay deceleration effect through the interaction of the escapement gear 215, the upper pendulum clamping teeth 229 and the lower pendulum clamping teeth 231; the acceleration lock IV generates an inertia force F2 under the action of an external acceleration environment, the inertia force F2 and an acceleration lock spring 233 enable the inertia lock IV to generate a small displacement x2 under the condition of force balance, and the small displacement x2 enables the inertia lock IV and the pendulum III to complete the control of pendulum swinging through different states of meshing and disengaging of the upper locking latch 236, the locking latch 234, the upper pendulum locking latch 221 and the pendulum locking latch 225 under different acceleration environments, so that the function of identifying the acceleration value is realized; on the other side, the rack I and the reduction gear V drive the reduction gear V to rotate through the mutual meshing of the rack right involute teeth 209 and the reduction gear high-speed involute teeth 238 and generate a driving moment M2, the reduction gear V and the return rack VI enable the return rack VI to generate a driving force F3 under the action of the driving moment M2 through the mutual meshing of the reduction gear low-speed involute teeth 242 and the return rack involute teeth 245, and the return rack VI generates a displacement x3 under the combined action of the driving force F3 and the elastic force generated by the deformation of the return rack spring 247; the restoring rack VI and the unlocking state lock VII generate a driving force F4 under the action of a driving force F3 through the mutual matching of the unlocking state lock latch 249 and the reduction rack latch 244, the unlocking state lock generates a displacement x4 under the combined action of the driving force F4 and the unlocking state lock spring 248, and the functions of resetting the device and unlocking and self-locking are realized through the mutual matching of the reduction gear V, the restoring rack VI and the unlocking state lock VII.
Referring to fig. 13(a), the pendulum iii swings back and forth in a certain angle range θ under the action of a driving moment M1 of the gear ii, and the gear ii transfers a moment to the lower pendulum latch 231 of the pendulum iii through the escapement gear 215 under the action of the driving moment M1, so that the pendulum iii performs accelerated rotation in the clockwise direction until the escapement gear 215 is disengaged from the lower pendulum latch 231; referring to fig. 13(b), under the action of the driving moment M1, the escapement gear 215 of the gear ii collides with the upper pendulum tooth 229 of the pendulum iii in the opposite direction, so that the gear ii and the pendulum iii are decelerated until the relative speed between the escapement gear 215 and the upper pendulum tooth 229 is zero; referring to fig. 13(c), under the action of the driving torque M1, the gear ii transfers torque to the upper pendulum tooth 229 of the pendulum iii through the escapement tooth 215, so that the pendulum iii performs accelerated rotation in the counterclockwise direction until the escapement tooth 215 is disengaged from the upper pendulum tooth 229; referring to fig. 13(d), when the escapement gear 215 of the gear ii collides with the lower pendulum tooth 231 of the pendulum iii in the opposite direction of the movement direction under the action of the driving moment M1, the gear ii and the pendulum iii are decelerated until the relative speed between the escapement gear 215 and the lower pendulum tooth 231 is zero; the four motion states of the above-mentioned fig. 13(a), (b), (c) and (d) constitute a motion cycle, and the deceleration delay control of the motion speed of the gear ii is realized by the reciprocating of the motion cycle.
Referring to fig. 14(a), the acceleration lock iv generates an inertia force F2 under the action of an external acceleration environment, the inertia force F2 and the acceleration lock spring 233 make the inertia lock iv generate a small displacement x2 under the condition of force balance, when the acceleration is small, the upper locking latch 236 and the upper pendulum locking latch 221 are in a disengaged state, the locking latch 234 and the pendulum locking latch 225 do not interfere with each other, the pendulum iii rotates freely, and the device can perform a reset motion; referring to fig. 14(b), when the acceleration value is in the transition range, the upper locking latch 236 and the upper pendulum locking latch 221 are in the disengaged state, the locking latch 234 and the pendulum locking latch 225 interfere with each other, the pendulum iii cannot rotate freely, and the device is in the locked state; referring to fig. 14(c), when the acceleration value is within the identification range, the upper locking latch 236 and the upper pendulum locking latch 221 are in a disengaged state, the locking latch 234 and the pendulum locking latch 225 do not interfere with each other, the pendulum iii rotates freely, and the device can perform a delayed relief movement; referring to fig. 14(d), when the acceleration is large, the upper locking latch 236 and the upper pendulum locking latch 221 are in an engaged state, the locking latch 234 and the pendulum locking latch 225 do not interfere with each other, the pendulum iii cannot rotate freely, the device is in a locked state, and the inertial lock iv and the pendulum iii perform different engaged and disengaged states under different acceleration environments through the upper locking latch 236 and the locking latch 234, the upper pendulum locking latch 221 and the pendulum locking latch 225 to complete control of pendulum swinging motion so as to realize the function of identifying the acceleration value.
Referring to fig. 15(a), under the action of an external acceleration environment, a rack i generates an inertial driving force F1 and moves downwards to generate a displacement x1, the rack i drives a reduction gear v to rotate and generate a driving moment M2, a return rack vi generates a driving force F3 under the action of the driving moment M2 of the reduction gear v, the return rack vi generates a displacement x3 under the combined action of the elastic force generated by the deformation of a driving force F3 and a return rack spring 247, the x3 is far smaller than the x1 and the F3 is far larger than the F1 under the action of a moment arm of the reduction gear v, so that the requirement on the spring stiffness of the return rack spring 247 is reduced, when the external acceleration is small, the return rack spring 247 provides a return force to reset the device, and the return rack vi at the initial stage of motion is not contacted with the lock vii in the unlocking state; referring to fig. 15(b), the restoring rack vi and the unlocking state lock vii generate a driving force F4 under the action of the driving force F3 through the mutual matching of the unlocking state lock latch 249 and the reduction rack latch 244, and the unlocking state lock generates a displacement x4 under the combined action of the driving force F4 and the unlocking state lock spring 248; referring to fig. 15(c), when the device is in the release position, the release state lock vii is reset, the return rack vi generates reverse driving force F3 and displacement x3 under the action of the elastic force of the return rack spring 247, the meshing state between the release state lock latch 249 and the reduction rack latch 244 is changed, the generated driving force F4 cannot drive the release state lock vii to displace, and the device is locked in the release state.
Referring to fig. 16(a), the rack i is located at the upper position, the through-silicon via 211 on the silicon partition plate 213 is not aligned with the release position, the silicon partition plate 213 plays a role of shielding, and the device is in a safe state at this time; referring to fig. 16(b), the rack i is in the lower position, the through-silicon via 211 on the silicon spacer 213 is aligned with the release position, the silicon spacer 228 does not perform the shielding function, and the device is in the release state.
The invention utilizes the inertial driving force generated by the external acceleration environment on the mass block to drive the gear II by the rack I under the driving of the inertial force, and the gear II and the pendulum III form an escapement mechanism to make the pendulum III perform reciprocating swinging motion, thereby realizing the function of delaying speed reduction; the inertial lock IV generates corresponding displacement under the driving of corresponding inertial force, and only in a specified acceleration environment, the inertial lock IV generates specified displacement, and the pendulum III can freely swing; the reduction gear V and the return rack VI provide restoring force to enable the device to reset, and the device can be locked at a release position after release by combining with the release state lock VII; the low-acceleration delay MEMS security device has the advantages that the low-acceleration delay MEMS security device can carry out delay and release within action time within a specified small-range window value of acceleration and lock a release state, and has reset and self-sustaining functions under the action of non-window value acceleration.
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| CN202010511964.8A CN111561844B (en) | 2020-06-08 | 2020-06-08 | A low acceleration delay MEMS security device |
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| FR2971050B1 (en) * | 2011-01-31 | 2013-01-18 | Nexter Munitions | SECURITY AND ARMING DEVICE FOR A PYROTECHNIC CHAIN OF A PROJECTILE |
| CN102882307B (en) * | 2012-09-06 | 2015-07-01 | 上海大学 | Output displacement adjustable linear micro-motor based on cam mechanism |
| EP3339976A1 (en) * | 2016-12-23 | 2018-06-27 | Blancpain SA | Mechanical watch with repeater |
| CN106907962A (en) * | 2017-01-18 | 2017-06-30 | 沈阳理工大学 | Low overload MEMS detonations actuator |
| CN109696094B (en) * | 2019-01-15 | 2020-08-04 | 西安交通大学 | Silicon-based MEMS (micro-electromechanical systems) recoil safety mechanism |
| CN110411291B (en) * | 2019-09-09 | 2020-06-16 | 西安交通大学 | Acceleration screening time delay MEMS security device |
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Effective date of registration: 20240304 Address after: No. 99, Hewen West Road, Baihe Town, Longquanyi District, Chengdu City, Sichuan Province, 610100 Patentee after: Sichuan Huachuan Industry Co.,Ltd. Country or region after: China Address before: Beilin District Xianning West Road 710049, Shaanxi city of Xi'an province No. 28 Patentee before: XI'AN JIAOTONG University Country or region before: China |