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CN111590772A - Workpiece positioning tool and method for multi-wire cutting machine - Google Patents

Workpiece positioning tool and method for multi-wire cutting machine Download PDF

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Publication number
CN111590772A
CN111590772A CN202010506991.6A CN202010506991A CN111590772A CN 111590772 A CN111590772 A CN 111590772A CN 202010506991 A CN202010506991 A CN 202010506991A CN 111590772 A CN111590772 A CN 111590772A
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positioning
turnover
bottom plate
workpiece
pressing
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CN111590772B (en
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杨福占
刘磊
齐乃生
刘永柱
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TANGSHAN JINGYU TECHNOLOGY CO LTD
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TANGSHAN JINGYU TECHNOLOGY CO LTD
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • B28D5/0082Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work
    • B28D5/0094Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work the supporting or holding device being of the vacuum type
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00Component parts such as frames, beds, carriages, headstocks
    • B24B41/005Feeding or manipulating devices specially adapted to grinding machines
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00Component parts such as frames, beds, carriages, headstocks
    • B24B41/06Work supports, e.g. adjustable steadies
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • B28D5/0082Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)

Abstract

A workpiece positioning tool and a positioning method of a multi-wire cutting machine are provided with a moving seat, a turnover mechanism, a positioning material pressing mechanism and a vacuum adsorption mechanism; the movable seat is of a frame structure, and the turnover mechanism is assembled on the movable seat; the turnover mechanism comprises a turnover cylinder and a turnover workbench, the bottom of the turnover cylinder is hinged and assembled on the moving seat, the tail end of a telescopic arm of the turnover cylinder is hinged and assembled with the turnover workbench, and the turnover workbench is a square plate and is assembled with the moving seat through a hinge seat arranged on the bottom surface of the turnover workbench; the vacuum adsorption mechanism is provided with a vacuum base and a group of control valves arranged on a gas circuit communicated with the vacuum base, the vacuum base is a rectangular base fixed on the turnover worktable, the central axis of the length direction of the vacuum base is superposed with the diagonal line of the turnover worktable, and a positioning material pressing mechanism is arranged on the vacuum base; the invention avoids the harm to the body of an operator caused by the volatilization of the binder, reduces the workload of cleaning subsequent tablets, and achieves the purposes of improving the working efficiency and reducing the production cost.

Description

一种多线切割机工件定位工装及定位方法A kind of multi-wire cutting machine workpiece positioning tool and positioning method

技术领域technical field

本发明涉及一种工件定位工装及定位方法,尤其是一种适于多线切割机工件免粘接的定位工装及定位方法。The invention relates to a workpiece positioning tool and a positioning method, in particular to a positioning tool and a positioning method suitable for multi-wire cutting machine workpieces without bonding.

背景技术Background technique

多线切割是通过金属丝的高速往复运动,把磨料带入半导体加工区域进行研磨,将半导体等硬脆材料一次同时切割为数百片薄片的一种新型切割加工方法。在多线切割机切割材料之前,需根据待切割料块的外形尺寸,每块料块能被切割出来料片的厚度及数量,预先进行排版,然后人工利用测量工具和简易的辅助工装在料板上进行料块的摆放和定位,再借助粘接剂将料块固定在多线切割机的料板上,待粘接剂完全固化后将粘有料块的料板放入多线切割机中进行切割作业。Multi-wire cutting is a new type of cutting method in which hard and brittle materials such as semiconductors are cut into hundreds of thin slices at the same time through the high-speed reciprocating motion of metal wires to bring abrasives into the semiconductor processing area for grinding. Before the multi-wire cutting machine cuts the material, it is necessary to pre-type according to the external dimensions of the material block to be cut, the thickness and quantity of each material block that can be cut out, and then manually use measuring tools and simple auxiliary tooling to install the material. The material blocks are placed and positioned on the plate, and then the material blocks are fixed on the material plate of the multi-wire cutting machine with the help of adhesive. After the adhesive is completely cured, the material plate with the material blocks is put into the multi-wire cutting machine. in the cutting operation.

上述多线切割机料块工件的定位方法,在切割作业完成后卸料时,为避免切割料片被损坏,一般采用对料板加热或水煮的方式使胶层软化,然后再将料片轻轻取下,由于取下来的料片在粘接面处会有粘接剂残留,因此还需用刀片小心地将残留物清理下来,特别是在一些特殊材料料块粘接过程中,为避免切割作业时因料块脱落导致的设备断线停机问题,还需借助碱面、薄板等材料粘附在料块四周,由此加大了后期料片清理工作的难度;在料块粘接时需要人工涂抹胶水,因专用胶水具有挥发性,会对人体健康造成一定的危害,而根据待切割料块材料性质不同还需选择不同种类的粘接剂,因其固化和软化时间存在差异,难以保证生产节拍的一致性;另外,在实际操作过程中,料块的定位不仅需配备模拟布局图、测量工具和简易辅助工装,还需通过在料板上方粘接的大理石板上切割浅浅的线痕作为参考基准,由于操作人员长时间视力高度集中,导致过度疲劳,存在安全隐患。The positioning method of the above-mentioned multi-wire cutting machine material block workpiece is generally used to soften the glue layer by heating or boiling the material plate to avoid damage to the cutting material when the material is unloaded after the cutting operation is completed, and then remove the material. Gently remove it, because the removed material will have adhesive residue on the bonding surface, so it is necessary to carefully clean the residue with a blade, especially in the process of bonding some special material blocks, in order to avoid During the cutting operation, the equipment is disconnected and shut down due to the falling off of the material block. It is also necessary to use alkali surface, sheet and other materials to adhere to the surrounding of the material block, which increases the difficulty of cleaning the material in the later stage; when the material block is bonded It is necessary to manually apply glue. Because the special glue is volatile, it will cause certain harm to human health. According to the different properties of the material to be cut, different types of adhesives need to be selected. Because of the difference in curing and softening time, it is difficult to To ensure the consistency of the production rhythm; in addition, in the actual operation process, the positioning of the material block not only needs to be equipped with simulated layout diagrams, measuring tools and simple auxiliary tooling, but also needs to be cut shallow by cutting the marble plate above the material plate. Line marks are used as a reference benchmark. Due to the highly concentrated vision of the operator for a long time, it leads to excessive fatigue and a potential safety hazard.

发明内容SUMMARY OF THE INVENTION

本发明提供一种多线切割机工件定位工装及定位方法,旨在通过多线切割机料块的无粘接定位方式,避免粘结剂挥发给操作人员身体造成伤害、减少后序料片清理工作量,达到提高工作效率、降低生产成本的目的。The invention provides a multi-wire cutting machine workpiece positioning tool and a positioning method, which aims to avoid the volatilization of the binder causing damage to the operator's body and reduce the subsequent cleaning of the material through the non-adhesive positioning method of the multi-wire cutting machine material block. workload to achieve the purpose of improving work efficiency and reducing production costs.

为实现上述目的,本发明采用如下技术方案:To achieve the above object, the present invention adopts the following technical solutions:

一种多线切割机工件定位工装,设有移动座、翻转机构、定位压料机构和真空吸附机构;所述移动座为框架结构,在移动座上配装翻转机构;所述翻转机构包括翻转气缸和翻转工作台,所述翻转气缸底部铰接装配在移动座框架底部横梁上,翻转气缸伸缩臂末端与翻转工作台铰接装配,所述翻转工作台为置于移动座上面的方形板,通过安装在其底面的铰接座与移动座装配,在翻转气缸驱动下翻转工作台可绕铰接座在0~45º范围内向上翻转;所述真空吸附机构设有真空底座和一组布置在连通真空底座气路上的控制阀,所述真空底座为固定在翻转工作台上的矩形座,其长度方向中心轴线与翻转工作台对角线重合,在所述真空底座上面布置定位压料机构;所述定位压料机构设有定位组件和压料组件,所述定位组件与翻转机构配合实现待切割料块的定位摆放,在待切割料块定位摆放完成后,由真空吸附机构将料块吸附定位,再通过压料组件将待切割料块压紧固定。A workpiece positioning tool for a multi-wire cutting machine is provided with a moving seat, a turning mechanism, a positioning pressing mechanism and a vacuum adsorption mechanism; the moving seat is a frame structure, and a turning mechanism is equipped on the moving seat; the turning mechanism includes a turning A cylinder and an overturning table, the bottom of the overturning cylinder is hingedly assembled on the bottom beam of the frame of the moving base, and the end of the telescopic arm of the overturning cylinder is hingedly assembled with the overturning worktable. The hinge seat on the bottom surface is assembled with the movable seat, and the turning table can be turned upward around the hinge seat in the range of 0 to 45° under the drive of the turning cylinder; The control valve on the road, the vacuum base is a rectangular seat fixed on the turning table, the central axis of its length direction coincides with the diagonal line of the turning table, and a positioning and pressing mechanism is arranged on the vacuum base; the positioning pressure The feeding mechanism is provided with a positioning component and a pressing component. The positioning component cooperates with the turning mechanism to realize the positioning and placement of the material blocks to be cut. After the positioning and placement of the material blocks to be cut is completed, the vacuum adsorption mechanism will adsorb and position the material blocks. Then, the block to be cut is pressed and fixed by the pressing component.

上述多线切割机工件定位工装,所述定位组件包括定位底板、定位底板侧挡柱、定位底板前挡柱和料块定位销,所述定位底板放置于真空底座上,在定位底板上设有一组横向挡料凸台,并在定位底板上安装若干组料块定位销;所述定位底板侧挡柱布置在底板一侧,通过侧挡柱安装座固定在翻转工作台上;所述定位底板前挡柱固定在真空底座上。The above-mentioned multi-wire cutting machine workpiece positioning tooling, the positioning assembly includes a positioning bottom plate, a positioning bottom plate side block, a positioning bottom plate front blocking column and a material block positioning pin, the positioning bottom plate is placed on the vacuum base, and a positioning bottom plate is provided on the positioning bottom plate. A set of lateral blocking bosses, and a number of positioning pins for groups of material blocks are installed on the positioning bottom plate; the positioning bottom plate side blocking column is arranged on one side of the bottom plate, and is fixed on the turning table through the side blocking column mounting seat; the positioning bottom plate The front stop is fixed on the vacuum base.

上述多线切割机工件定位工装,所述定位底板上设有与真空底座连通的吸附孔,所述吸附孔在横向相邻的两组料块定位销之间至少设置两组;在所述定位底板上还设有横向布置的切割线线弓适配槽。In the above-mentioned multi-wire cutting machine workpiece positioning tool, the positioning bottom plate is provided with adsorption holes that communicate with the vacuum base, and at least two groups of the adsorption holes are arranged between the two sets of laterally adjacent material block positioning pins; The bottom plate is also provided with transversely arranged cutting wire bow fitting grooves.

上述多线切割机工件定位工装,所述压料组件包括一组压梁、压梁夹具和左右布置的两个夹具底座;所述压梁为横向布置的矩形拱门形状,其顶横梁内壁为压紧工作面,压梁两端分别通过压梁夹具压紧在左右两个夹具底座中;所述夹具底座纵向布置,在夹具底座上设有与压梁两端配合的矩形长槽,在矩形长槽的内侧设有一组压梁导向柱,在矩形长槽的外侧设有夹具装配孔;所述压梁夹具为置于夹具装配孔中的钩型夹具,在每一个钩型夹具的侧边设置夹具挡块。The above-mentioned multi-wire cutting machine workpiece positioning tooling, the pressure material assembly includes a set of pressure beams, a pressure beam clamp and two clamp bases arranged left and right; the pressure beam is a rectangular arch shape arranged horizontally, and the inner wall of the top beam is a pressure beam. Tighten the working surface, the two ends of the pressure beam are respectively pressed into the left and right clamp bases by the pressure beam clamps; the clamp bases are arranged longitudinally, and the clamp base is provided with a rectangular long groove that matches the two ends of the pressure beam. The inner side of the groove is provided with a set of pressure beam guide columns, and the outer side of the rectangular long groove is provided with a clamp assembly hole; the pressure beam clamp is a hook type clamp placed in the clamp assembly hole, and is provided on the side of each hook type clamp. Clamp stop.

上述多线切割机工件定位工装,在所述压梁的压紧工作面上设置弹性衬垫。In the above-mentioned multi-wire cutting machine workpiece positioning tool, elastic pads are arranged on the pressing working surface of the pressing beam.

上述多线切割机工件定位工装,在所述压梁上设有切割线避让横槽。In the above-mentioned multi-wire cutting machine workpiece positioning tool, a cutting line avoidance transverse groove is provided on the pressure beam.

上述多线切割机工件定位工装,在所述压梁导向柱上端面设有对称布置的两个楔形导向面。In the above-mentioned multi-wire cutting machine workpiece positioning tool, two wedge-shaped guide surfaces arranged symmetrically are arranged on the upper end surface of the pressure beam guide column.

上述多线切割机工件定位工装,在所述夹具底座的矩形长槽底面设置垫片。In the above-mentioned multi-wire cutting machine workpiece positioning tool, a gasket is arranged on the bottom surface of the rectangular long groove of the fixture base.

一种多线切割机工件定位方法,采用上述多线切割机工件定位工装完成工件无粘接定位操作,具体操作步骤如下:A multi-wire cutting machine workpiece positioning method, using the above-mentioned multi-wire cutting machine workpiece positioning tooling to complete the non-bonding positioning operation of the workpiece, and the specific operation steps are as follows:

a、工件摆放,将料块摆放在定位底板上,相邻两组挡料凸台之间摆放一排料块,相邻两组料块定位销之间摆放一个料块;a. The workpiece is placed, the material block is placed on the positioning base plate, a row of material blocks is placed between the adjacent two groups of material block bosses, and a material block is placed between the adjacent two groups of material block positioning pins;

b、工件翻转定位,翻转气缸的伸缩臂伸出,驱动翻转工作台翻转一定角度,定位底板及摆放在定位底板上的料块在其自身重力作用下向真空底座低处顶角方向滑动,在此过程中首先由定位底板侧挡柱、定位底板前挡柱限制定位底板的位置,再由定位底板上横向挡料凸台限定每一排料块的前后位置,通过料块定位销限定每一列料块的左右位置;b. The workpiece is flipped and positioned, the telescopic arm of the flipping cylinder is extended, and the flipping table is driven to flip to a certain angle. The positioning bottom plate and the material block placed on the positioning bottom plate slide to the lower corner of the vacuum base under the action of its own gravity. In this process, the position of the positioning bottom plate is first limited by the positioning bottom plate side stopper and the positioning bottom plate front stopper column, and then the front and rear positions of each discharge block are defined by the lateral stopper bosses on the positioning bottom plate, and each discharge block is limited by the material block positioning pins. The left and right positions of a column of blocks;

c、料块吸附固定,真空吸附机构动作,将定位后的料块吸附固定在定位底板上;c. The material block is adsorbed and fixed, and the vacuum adsorption mechanism acts to adsorb and fix the positioned material block on the positioning base plate;

d、翻转工作台复位,翻转气缸伸缩臂缩回,翻转工作台复位至水平位置,定位底板及料块工件处于水平状态;d. The turning table is reset, the telescopic arm of the turning cylinder is retracted, the turning table is reset to the horizontal position, and the positioning bottom plate and the material block workpiece are in a horizontal state;

e、工件夹紧固定,通过压梁将每一排料块压紧固定在定位底板上,通过控制阀解除真空吸附机构对料块的真空吸附作用;e. The workpiece is clamped and fixed, and each discharge block is pressed and fixed on the positioning base plate by the pressing beam, and the vacuum adsorption effect of the vacuum adsorption mechanism on the material block is released through the control valve;

f、定位底板及工件进入多线切割区域,通过移动座将本定位工件整体已送至多线切割机进料口处,将定位底板移送至多线切割机的工作台上并固定安装,完成工件定位作业。f. The positioning base plate and the workpiece enter the multi-wire cutting area, and the entire positioning workpiece has been sent to the feed port of the multi-wire cutting machine through the moving base, and the positioning base plate is transferred to the worktable of the multi-wire cutting machine and fixedly installed to complete the positioning of the workpiece. Operation.

上述多线切割机工件定位方法,在所述步骤a中,翻转工作台翻转角度为45 º。In the above-mentioned method for positioning the workpiece of the multi-wire cutting machine, in the step a, the turning angle of the turning table is 45°.

本发明提供了一种多线切割机工件定位工装及定位方法,其有益效果是:可通过翻转机构带动定位压料机构和真空吸附机构实现0~45 º范围内向上翻转,由于真空吸附机构中真空底座为固定在翻转工作台上的矩形座,且其长度方向中心轴线与翻转工作台对角线重合,而定位压料机构中的定位底板放置于真空底座上面,因此随着翻转机构动作,定位底板及摆放在定位底板上的料块在其自身重力作用下向真空底座低处顶角方向滑动,在此过程中首先通过定位底板侧挡柱、定位底板前挡柱限制定位底板的位置,再通过定位底板上横向挡料凸台限定每一排料块的前后位置,通过料块定位销限定每一列料块的左右位置;本发明还可通过真空吸附机构动作将料块吸附在定位底板上,在翻转机构带动定位压料机构和真空吸附机构复位后,再通过压梁将每一排料块压紧固定,完成料块工件的夹紧定位。由此可见,本发明不仅有效地避免了因粘接剂的挥发对操作人员身体健康造成的危害、减少了后序料片清理的工作量,而且通过翻转机构和真空吸附机构的配合,减少了人工操作环节,从而大大提高了生产效率、降低了生产成本。The invention provides a workpiece positioning tool and a positioning method for a multi-wire cutting machine. The vacuum base is a rectangular seat fixed on the turning table, and its longitudinal center axis coincides with the diagonal line of the turning table, and the positioning bottom plate in the positioning and pressing mechanism is placed on the vacuum base, so with the action of the turning mechanism, The positioning bottom plate and the material blocks placed on the positioning bottom plate slide to the lower corner of the vacuum base under the action of its own gravity. During this process, the position of the positioning bottom plate is first limited by the positioning bottom plate side stopper and the positioning bottom plate front stopper. , and then the front and rear positions of each discharge block are defined by the lateral blocking bosses on the positioning bottom plate, and the left and right positions of each row of material blocks are defined by the material block positioning pins; On the bottom plate, after the turning mechanism drives the positioning pressing mechanism and the vacuum adsorption mechanism to reset, each discharge block is pressed and fixed by the pressing beam to complete the clamping and positioning of the block workpiece. It can be seen that the present invention not only effectively avoids the harm to the health of the operator caused by the volatilization of the adhesive, but also reduces the workload of subsequent material cleaning, and through the cooperation of the turning mechanism and the vacuum adsorption mechanism, reduces the The manual operation link greatly improves the production efficiency and reduces the production cost.

附图说明Description of drawings

图1是本发明所述多线切割机工件定位工装结构示意图;1 is a schematic structural diagram of a workpiece positioning tool for a multi-wire cutting machine according to the present invention;

图2是图1的A向视图;Fig. 2 is the A-direction view of Fig. 1;

图3是定位压料机构示意图;Figure 3 is a schematic diagram of the positioning and pressing mechanism;

图4是图3的B向视图;Fig. 4 is the B-direction view of Fig. 3;

图5是图4的俯视图;Fig. 5 is the top view of Fig. 4;

图6是定位底板结构示意图;6 is a schematic diagram of a positioning base plate structure;

图7是夹具底座结构示意图;7 is a schematic diagram of the structure of the fixture base;

图8是压梁结构示意图;Figure 8 is a schematic diagram of the structure of the pressure beam;

图9是翻转机构工作状态示意图;Fig. 9 is the schematic diagram of the working state of the turning mechanism;

图10是定位压料机构在多线切割工作状态示意图。Figure 10 is a schematic diagram of the positioning and pressing mechanism in the working state of multi-wire cutting.

图中各标号清单为:The list of labels in the figure is:

1、移动座,1-1、滚轮;1. Mobile seat, 1-1, roller;

2、翻转气缸;2. Turn the cylinder over;

3、翻转工作台;3. Turn the worktable;

4、定位压料机构,4-1、定位底板,4-1-1、吸附孔,4-1-2、切割线线弓适配槽,4-3、横向挡料凸台,4-2、料块定位销,4-3、压梁,4-3-1、切割线避让横槽,4-4、夹具底座,4-4-1、压梁导向柱,4-4-2、楔形导向面,4-4-3、夹具装配孔,4-4-4、矩形长槽,4-5、定位底板侧挡柱,4-6、侧挡柱安装座,4-7、夹具挡块,4-8、压紧夹具,4-9、弹性衬垫 ,4-10、垫片,4-11、定位底板前挡柱;4. Positioning and pressing mechanism, 4-1, Positioning bottom plate, 4-1-1, Adsorption hole, 4-1-2, Cutting line bow adapter groove, 4-3, Horizontal stopper boss, 4-2 , Block positioning pin, 4-3, pressure beam, 4-3-1, cutting line avoidance horizontal groove, 4-4, fixture base, 4-4-1, pressure beam guide column, 4-4-2, wedge Guide surface, 4-4-3, Fixture mounting hole, 4-4-4, Rectangular long slot, 4-5, Positioning bottom plate side stopper, 4-6, Side stopper mounting seat, 4-7, Fixture stopper , 4-8, pressing fixture, 4-9, elastic gasket, 4-10, gasket, 4-11, positioning the front stopper of the bottom plate;

5、真空吸附机构,5-1、真空底座,5-2、控制阀;5. Vacuum adsorption mechanism, 5-1, vacuum base, 5-2, control valve;

6、料块。6, material block.

具体实施方式Detailed ways

下面结合附图及具体实施例对本发明作进一步说明。The present invention will be further described below with reference to the accompanying drawings and specific embodiments.

参看图 1、图2,本发明提供一种多线切割机工件定位工装,它设有移动座1、翻转机构、定位压料机构4和真空吸附机构5;所述移动座1为框架结构,在移动座1上配装翻转机构,在移动座框架的底部四角位置处设有滚轮1-1;所述翻转机构包括翻转气缸2和翻转工作台3,所述翻转气缸2底部铰接装配在移动座1框架底部横梁上,翻转气缸伸缩臂末端与翻转工作台3铰接装配,所述翻转工作台3为置于移动座1上面的方形板,通过安装在其底面的铰接座与移动座1装配,在翻转气缸2驱动下翻转工作台3可绕铰接座在0~45º范围内向上翻转;所述真空吸附机构5设有真空底座5-1和一组布置在连通真空底座气路上的控制阀5-2,所述真空底座5-1为固定在翻转工作台3上的矩形座,其长度方向中心轴线与翻转工作台对角线重合,在所述真空底座5-1上面布置定位压料机构4,所述控制阀5-2为二位三通手动阀。1 and 2, the present invention provides a multi-wire cutting machine workpiece positioning tooling, which is provided with a moving seat 1, a turning mechanism, a positioning and pressing mechanism 4 and a vacuum adsorption mechanism 5; the moving seat 1 is a frame structure, The moving base 1 is equipped with an overturning mechanism, and rollers 1-1 are provided at the bottom four corners of the frame of the moving base; the overturning mechanism includes an overturning cylinder 2 and an overturning table 3, and the bottom of the overturning cylinder 2 is hingedly assembled on the moving base On the bottom beam of the frame of seat 1, the end of the telescopic arm of the overturning cylinder is hingedly assembled with the overturning table 3. The overturning table 3 is a square plate placed on the moving seat 1, and is assembled with the moving seat 1 through the hinge seat installed on its bottom surface. , under the drive of the turning cylinder 2, the turning table 3 can be turned upward around the hinge seat within the range of 0 to 45°; the vacuum adsorption mechanism 5 is provided with a vacuum base 5-1 and a set of control valves arranged on the air path connecting the vacuum base 5-2, the vacuum base 5-1 is a rectangular seat fixed on the turning table 3, the central axis of its length direction coincides with the diagonal line of the turning table, and the positioning pressing material is arranged on the vacuum base 5-1 Mechanism 4, the control valve 5-2 is a two-position three-way manual valve.

参看图3、图4、图5、图9,本发明所述的多线切割机工件定位工装,其定位压料机构4设有定位组件和压料组件,所述定位组件与翻转机构配合实现待切割料块6的定位摆放,在待切割料块定位摆放完成后,由真空吸附机构5将料块6吸附定位,翻转机构复位后再通过压料组件将待切割料块6压紧固定。Referring to Figure 3, Figure 4, Figure 5, Figure 9, the multi-wire cutting machine workpiece positioning tooling according to the present invention, its positioning and pressing mechanism 4 is provided with a positioning component and a pressing component, and the positioning component cooperates with the turning mechanism to realize The positioning and placement of the material block 6 to be cut is completed. After the positioning and placement of the material block to be cut is completed, the material block 6 is adsorbed and positioned by the vacuum adsorption mechanism 5. After the reversing mechanism is reset, the material block 6 to be cut is pressed by the pressing component. fixed.

参看图3、图4、图5、图6,本发明所述的多线切割机工件定位工装,其定位压料机构4中定位组件包括定位底板4-1、定位底板侧挡柱4-5、定位底板前挡柱4-11和料块定位销4-2;所述定位底板4-1放置于真空底座5-1上,在定位底板4-1上设有一组横向挡料凸台4-1-3,通过横向挡料凸台4-1-3限定每一排料块的前后位置,并在定位底板4-1上安装若干组料块定位销4-2,通过料块定位销4-2限定每一列料块的左右位置,在定位底板4-1上还设有与真空底座5-1连通的吸附孔4-1-1及横向布置的切割线线弓适配槽4-1-2,所述吸附孔4-1-1在横向相邻的两组料块定位销4-2之间至少设置两组;所述定位底板侧挡柱4-5布置在定位底板4-1一侧,通过侧挡柱安装座4-6固定在翻转工作台3上;所述定位底板前挡柱4-11固定在真空底座5-1上;在翻转工作台3翻转过程中通过定位底板侧挡柱4-5、定位底板前挡柱4-11来限定定位底板4-1的位置。Referring to Figure 3, Figure 4, Figure 5, Figure 6, the multi-wire cutting machine workpiece positioning tooling according to the present invention, the positioning assembly in the positioning and pressing mechanism 4 includes a positioning base plate 4-1, and a positioning base plate side stop column 4-5. , the front stop column 4-11 of the positioning base plate and the material block positioning pin 4-2; the positioning base plate 4-1 is placed on the vacuum base 5-1, and a set of transverse blocking bosses 4 are arranged on the positioning base plate 4-1 -1-3, the front and rear positions of each discharge block are defined by the lateral stopper boss 4-1-3, and several grouping block positioning pins 4-2 are installed on the positioning base plate 4-1, 4-2 defines the left and right positions of each column of material blocks, and the positioning base plate 4-1 is also provided with an adsorption hole 4-1-1 communicating with the vacuum base 5-1 and a horizontally arranged cutting line bow adapter groove 4- 1-2, at least two sets of the adsorption holes 4-1-1 are arranged between two sets of laterally adjacent two sets of material block positioning pins 4-2; the positioning bottom plate side stop columns 4-5 are arranged on the positioning bottom plate 4- 1 On one side, it is fixed on the turning table 3 through the side stop column mounting seat 4-6; the front stop column 4-11 of the positioning bottom plate is fixed on the vacuum base 5-1; The bottom plate side blocking column 4-5 and the positioning bottom plate front blocking column 4-11 are used to define the position of the positioning bottom plate 4-1.

参看图3、图4、图5、图7、图8,本发明所述的多线切割机工件定位工装,其定位压料机构4中压料组件包括一组压梁4-3、压梁夹具4-8和左右布置的两个夹具底座4-4;所述压梁4-3为横向布置的矩形拱门形状,在压梁4-3上设有切割线避让横槽4-3-1,压梁4-3矩形拱门的顶横梁内壁为压紧工作面,在压紧工作面上设置弹性衬垫4-9,压梁4-3两端分别通过压梁夹具4-8压紧在左右两个夹具底座4-4中;所述夹具底座4-4纵向布置,在夹具底座4-4上设有与压梁4-3两端配合的矩形长槽4-4-4,在矩形长槽4-4-4底面设置垫片4-10,在矩形长槽4-4-4的内侧设有一组压梁导向柱4-4-1,所述压梁导向柱4-4-1上端面设有对称布置的两个楔形导向面4-4-2,在矩形长槽4-4-4的外侧设有夹具装配孔4-4-3;所述压梁夹具4-8为置于夹具装配孔4-4-3中的钩型夹具,在每一个钩型夹具的侧边设置夹具挡块4-7。Referring to Figure 3, Figure 4, Figure 5, Figure 7, Figure 8, the multi-wire cutting machine workpiece positioning tooling according to the present invention, the pressing material assembly in the positioning pressing material mechanism 4 includes a set of pressing beams 4-3, pressing beams The clamp 4-8 and the two clamp bases 4-4 arranged on the left and right; the pressure beam 4-3 is in the shape of a horizontally arranged rectangular arch, and the pressure beam 4-3 is provided with a cutting line avoiding transverse groove 4-3-1 , the inner wall of the top beam of the rectangular arch of the compression beam 4-3 is the compression working surface, and elastic pads 4-9 are arranged on the compression working surface. In the left and right clamp bases 4-4; the clamp bases 4-4 are arranged longitudinally, and the clamp base 4-4 is provided with a rectangular long groove 4-4-4 matched with both ends of the pressure beam 4-3. A gasket 4-10 is arranged on the bottom surface of the long groove 4-4-4, and a set of pressure beam guide columns 4-4-1 are arranged on the inner side of the rectangular long groove 4-4-4. The pressure beam guide columns 4-4-1 The upper end surface is provided with two wedge-shaped guide surfaces 4-4-2 symmetrically arranged, and a clamp mounting hole 4-4-3 is provided on the outer side of the rectangular long groove 4-4-4; For the hook-type clamps in the clamp mounting holes 4-4-3, clamp stoppers 4-7 are provided on the sides of each hook-type clamp.

参看图9、图10,本发明所述的多线切割机工件定位方法,采用上述多线切割机工件定位工装完成工件无粘接定位操作,具体操作步骤如下:Referring to Fig. 9 and Fig. 10 , the method for positioning the workpiece of the multi-wire cutting machine according to the present invention adopts the above-mentioned multi-wire cutting machine workpiece positioning tooling to complete the non-bonding positioning operation of the workpiece, and the specific operation steps are as follows:

a、工件摆放,将料块6摆放在定位底板上,相邻两组挡料凸台之间摆放一排料块,相邻两组料块定位销之间摆放一个料块;a. Place the workpiece, place the material block 6 on the positioning base plate, place a row of material blocks between the adjacent two groups of material blocking bosses, and place a material block between the adjacent two groups of material block positioning pins;

b、工件翻转定位,翻转气缸2的伸缩臂伸出,驱动翻转工作台3向上翻转45 º角度,定位底板4-1及摆放在定位底板4-1上的料块6在其自身重力作用下向真空底座5-1低处顶角方向滑动,在此过程中首先由定位底板侧挡柱4-5、定位底板前挡柱4-11限制定位底板4-1的位置,再由定位底板4-1上横向挡料凸台4-1-3限定每一排料块的前后位置,通过料块定位销限4-2定每一列料块的左右位置;b. The workpiece is turned over and positioned, the telescopic arm of the turning cylinder 2 is stretched out, and the turning table 3 is driven to turn upward at an angle of 45 º. The positioning base plate 4-1 and the material block 6 placed on the positioning base plate 4-1 are under the action of its own gravity Slide down to the top corner of the lower part of the vacuum base 5-1. During this process, the position of the positioning base plate 4-1 is first limited by the positioning base plate side stop column 4-5 and the positioning base plate front stop column 4-11, and then the positioning base plate 4-1 The upper horizontal stopper boss 4-1-3 defines the front and rear positions of each discharge block, and the left and right positions of each row of material blocks are determined by the block positioning pin limit 4-2;

c、料块吸附固定,真空吸附机构5动作,将定位后的料块6吸附固定在定位底板4-1上;c. The material block is adsorbed and fixed, and the vacuum adsorption mechanism 5 moves to adsorb and fix the positioned material block 6 on the positioning base plate 4-1;

d、翻转工作台复位,翻转气缸2伸缩臂缩回,翻转工作台3复位至水平位置,定位底板4-1及料块6工件处于水平状态;d. The turning table is reset, the telescopic arm of the turning cylinder 2 is retracted, the turning table 3 is reset to the horizontal position, and the positioning bottom plate 4-1 and the workpiece of the material block 6 are in a horizontal state;

e、工件夹紧固定,通过压梁4-3将每一排料块压紧固定在定位底板4-1上,通过控制阀5-2解除真空吸附机构5对料块6的真空吸附作用;e. The workpiece is clamped and fixed, and each discharge block is pressed and fixed on the positioning base plate 4-1 by the pressing beam 4-3, and the vacuum adsorption effect of the vacuum adsorption mechanism 5 on the material block 6 is released by the control valve 5-2;

f、定位底板及工件进入多线切割区域,通过移动座(1)将本定位工件整体已送至多线切割机进料口处,将定位底板4-1移送至多线切割机的工作台上并固定安装,完成工件定位作业。f. The positioning base plate and the workpiece enter the multi-wire cutting area, and the entire positioning workpiece has been sent to the feed port of the multi-wire cutting machine through the moving seat (1), and the positioning base plate 4-1 is transferred to the multi-wire cutting machine. Fixed installation to complete the workpiece positioning operation.

Claims (10)

1. A workpiece positioning tool of a multi-wire cutting machine is characterized by comprising a moving seat (1), a turnover mechanism, a positioning material pressing mechanism (4) and a vacuum adsorption mechanism (5); the moving seat (1) is of a frame structure, and the moving seat (1) is provided with a turnover mechanism; the turnover mechanism comprises a turnover cylinder (2) and a turnover workbench (3), the bottom of the turnover cylinder (2) is hinged to a bottom cross beam of a frame of the moving seat (1), the tail end of a telescopic arm of the turnover cylinder is hinged to the turnover workbench (3), the turnover workbench (3) is a square plate arranged on the moving seat (1), and is assembled with the moving seat (1) through a hinge seat arranged on the bottom surface of the turnover workbench, and the turnover workbench (3) can be upwards turned around the hinge seat within the range of 0-45 degrees under the driving of the turnover cylinder (2); the vacuum adsorption mechanism (5) is provided with a vacuum base (5-1) and a group of control valves (5-2) arranged on a gas path communicated with the vacuum base, the vacuum base (5-1) is a rectangular base fixed on the turnover worktable (3), the central axis of the length direction of the vacuum base coincides with the diagonal line of the turnover worktable, and a positioning material pressing mechanism (4) is arranged on the vacuum base (5-1); the positioning and material pressing mechanism (4) is provided with a positioning assembly and a material pressing assembly, the positioning assembly is matched with the turnover mechanism to realize positioning and placing of a material block (6) to be cut, after the material block to be cut is positioned and placed, the material block (6) is adsorbed and positioned by the vacuum adsorption mechanism (5), and the material block (6) to be cut is pressed and fixed by the material pressing assembly after the turnover mechanism is reset.
2. The workpiece positioning tool of the multi-wire cutting machine as claimed in claim 1, wherein the positioning assembly comprises a positioning bottom plate (4-1), a positioning bottom plate side baffle column (4-5), a positioning bottom plate front baffle column (4-11) and a material block positioning pin (4-2); the positioning bottom plate (4-1) is placed on the vacuum base (5-1), a group of transverse material blocking bosses (4-1-3) are arranged on the positioning bottom plate (4-1), and a plurality of group material block positioning pins (4-2) are arranged on the positioning bottom plate (4-1); the side baffle post (4-5) of the positioning bottom plate is arranged on one side of the positioning bottom plate (4-1) and is fixed on the turnover workbench (3) through a side baffle post mounting seat (4-6); the front retaining column (4-11) of the positioning bottom plate is fixed on the vacuum base (5-1).
3. The multi-wire cutting machine workpiece positioning tool according to claim 2, characterized in that the positioning bottom plate (4-1) is provided with adsorption holes (4-1-1) communicated with the vacuum base (5-1), and at least two groups of the adsorption holes (4-1-1) are arranged between two groups of laterally adjacent material block positioning pins (4-2); the positioning bottom plate (4-1) is also provided with a transversely arranged cutting wire arch adapting groove (4-1-2).
4. The multi-wire cutting machine workpiece positioning tool as claimed in claim 1, 2 or 3, wherein the swaging assembly comprises a group of pressing beams (4-3), pressing beam clamps (4-8) and two clamp bases (4-4) arranged left and right; the pressing beam (4-3) is in a shape of a rectangular arch door which is transversely arranged, the inner wall of a top beam of the pressing beam is a pressing working surface, and two ends of the pressing beam (4-3) are respectively pressed in the left clamp base (4-4) and the right clamp base (4-4) through pressing beam clamps (4-8); the clamp bases (4-4) are longitudinally arranged, rectangular long grooves (4-4-4) matched with the two ends of the pressing beams (4-3) are formed in the clamp bases (4-4), a group of pressing beam guide columns (4-4-1) are arranged on the inner sides of the rectangular long grooves (4-4-4), and clamp assembling holes (4-4-3) are formed in the outer sides of the rectangular long grooves (4-4-4); the beam pressing clamps (4-8) are hook-shaped clamps arranged in the clamp assembling holes (4-4-3), and a clamp stop block (4-7) is arranged on the side edge of each hook-shaped clamp.
5. The multi-wire saw workpiece positioning tool as claimed in claim 4, wherein elastic gaskets (4-9) are arranged on the pressing working surfaces of the pressing beams (4-3).
6. The multi-wire saw workpiece positioning tool as claimed in claim 4, wherein the pressing beam (4-3) is provided with a cutting wire avoiding transverse groove (4-3-1).
7. The multi-wire saw workpiece positioning tool as claimed in claim 4, wherein two wedge-shaped guide surfaces (4-4-2) are symmetrically arranged on the upper end surface of the pressing beam guide column (4-4-1).
8. The multi-wire saw workpiece positioning tool as claimed in claim 4, wherein a gasket (4-10) is arranged on the bottom surface of the rectangular long groove (4-4-4) of the clamp base (4-4).
9. The workpiece positioning method of the multi-wire cutting machine is characterized in that the workpiece positioning tool of the multi-wire cutting machine is adopted to complete the non-bonding positioning operation of the workpiece, and the specific operation steps are as follows:
a. placing a workpiece, namely placing material blocks (6) on a positioning bottom plate, placing a row of material blocks between two adjacent material blocking bosses, and placing a material block between two adjacent material block positioning pins;
b. a workpiece is overturned and positioned, a telescopic arm of an overturning cylinder (2) extends out to drive an overturning worktable (3) to overturn for a certain angle, a positioning bottom plate (4-1) and a material block (6) placed on the positioning bottom plate (4-1) slide towards the direction of a lower vertex angle of a vacuum base (5-1) under the action of self gravity, the position of the positioning bottom plate (4-1) is limited by a positioning bottom plate side baffle column (4-5) and a positioning bottom plate front baffle column (4-11), the front and back positions of each row of material blocks are limited by a transverse material blocking boss (4-1-3) on the positioning bottom plate (4-1), and the left and right positions of each row of material blocks are limited by a material block positioning pin (4-2);
c. the material block is adsorbed and fixed, the vacuum adsorption mechanism (5) acts, and the positioned material block (6) is adsorbed and fixed on the positioning bottom plate (4-1);
d. the turnover worktable resets, the telescopic arm of the turnover cylinder (2) retracts, the turnover worktable (3) resets to a horizontal position, and workpieces of the positioning bottom plate (4-1) and the material block (6) are in a horizontal state;
e. clamping and fixing a workpiece, tightly pressing and fixing each discharging block on a positioning bottom plate (4-1) through a pressing beam (4-3), and releasing the vacuum adsorption effect of a vacuum adsorption mechanism (5) on the discharging block (6) through a control valve (5-2);
f. the positioning bottom plate and the workpiece enter a multi-wire cutting area, the positioning workpiece is integrally conveyed to a feed inlet of the multi-wire cutting machine through the movable seat (1), and the positioning bottom plate (4-1) is transferred to a workbench of the multi-wire cutting machine and fixedly installed to complete workpiece positioning operation.
10. The method for positioning the workpieces of the multi-wire cutting machine as claimed in claim 9, wherein in the step a, the overturning angle of the overturning worktable (3) is 45 degrees.
CN202010506991.6A 2020-06-05 2020-06-05 A multi-wire cutting machine workpiece positioning tool and positioning method Active CN111590772B (en)

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Publication number Priority date Publication date Assignee Title
US6325059B1 (en) * 1998-09-18 2001-12-04 Intercon Tools, Inc. Techniques for dicing substrates during integrated circuit fabrication
JP2014042975A (en) * 2012-08-28 2014-03-13 Iwasaki Electric Co Ltd Cermet bar cutting device
CN204487857U (en) * 2015-03-11 2015-07-22 唐山晶玉科技有限公司 A kind of multi-line cutting machine adjustable bed
CN204772055U (en) * 2015-05-29 2015-11-18 芜湖东旭光电装备技术有限公司 Glass grinds slope locate mode air supporting platform that machine was suitable for
CN209257251U (en) * 2018-08-01 2019-08-16 东旭集团有限公司 Positioning system
CN212653668U (en) * 2020-06-05 2021-03-05 唐山晶玉科技股份有限公司 A multi-wire cutting machine workpiece positioning tool

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6325059B1 (en) * 1998-09-18 2001-12-04 Intercon Tools, Inc. Techniques for dicing substrates during integrated circuit fabrication
JP2014042975A (en) * 2012-08-28 2014-03-13 Iwasaki Electric Co Ltd Cermet bar cutting device
CN204487857U (en) * 2015-03-11 2015-07-22 唐山晶玉科技有限公司 A kind of multi-line cutting machine adjustable bed
CN204772055U (en) * 2015-05-29 2015-11-18 芜湖东旭光电装备技术有限公司 Glass grinds slope locate mode air supporting platform that machine was suitable for
CN209257251U (en) * 2018-08-01 2019-08-16 东旭集团有限公司 Positioning system
CN212653668U (en) * 2020-06-05 2021-03-05 唐山晶玉科技股份有限公司 A multi-wire cutting machine workpiece positioning tool

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