CN111721215B - A dispersive confocal sensor for glass measurement - Google Patents
A dispersive confocal sensor for glass measurement Download PDFInfo
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- CN111721215B CN111721215B CN202010771472.2A CN202010771472A CN111721215B CN 111721215 B CN111721215 B CN 111721215B CN 202010771472 A CN202010771472 A CN 202010771472A CN 111721215 B CN111721215 B CN 111721215B
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- 239000011521 glass Substances 0.000 title claims abstract description 44
- 238000005259 measurement Methods 0.000 title claims abstract description 23
- 230000004075 alteration Effects 0.000 claims abstract description 44
- 239000013307 optical fiber Substances 0.000 claims abstract description 23
- 238000010183 spectrum analysis Methods 0.000 claims abstract description 11
- 238000012545 processing Methods 0.000 claims abstract description 4
- 238000001228 spectrum Methods 0.000 claims description 32
- 230000003287 optical effect Effects 0.000 claims description 15
- 230000001154 acute effect Effects 0.000 claims description 6
- 230000001678 irradiating effect Effects 0.000 description 4
- 238000001514 detection method Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 239000006185 dispersion Substances 0.000 description 3
- 238000004364 calculation method Methods 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000003384 imaging method Methods 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000002310 reflectometry Methods 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000001356 surgical procedure Methods 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
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Abstract
本发明公开了一种用于玻璃量测的色散式共焦传感器，包括光源设备、色差镜组和光谱测量仪；其中，光源设备通过光纤与色差镜组连接，用于制备光源并将光源通过光纤传输到色差镜组，从而使得色差镜组对光源进行分光处理后照射到待测物体的表面，并将待测物体反射回的反射光线传送至光谱测量仪；光谱测量仪通过光纤与色差镜组连接，用于接收反射光线，并将反射光线发送至远程的光谱分析仪进行光谱分析得出待测玻璃的厚度。本发明解决了现有技术中存在的共焦传感器无法实现玻璃厚度量测的问题。
The present invention discloses a dispersive confocal sensor for glass measurement, comprising a light source device, a chromatic aberration mirror group and a spectrometer; wherein the light source device is connected to the chromatic aberration mirror group through an optical fiber, and is used to prepare a light source and transmit the light source to the chromatic aberration mirror group through the optical fiber, so that the chromatic aberration mirror group performs light splitting processing on the light source and then irradiates the surface of the object to be measured, and transmits the reflected light reflected by the object to be measured to the spectrometer; the spectrometer is connected to the chromatic aberration mirror group through an optical fiber, and is used to receive the reflected light, and send the reflected light to a remote spectrometer for spectral analysis to obtain the thickness of the glass to be measured. The present invention solves the problem that the confocal sensor in the prior art cannot measure the thickness of glass.
Description
Technical Field
The present invention relates to glass measurement, and more particularly, to a dispersive confocal sensor for glass measurement.
Background
Confocal fiber surgery has been developed for many years and is commonly used in ultra-precise detection applications, and can be largely classified into laser confocal and dispersive confocal. Laser confocal provides high resolution, but is slow, and often requires several hours to 1 day to complete 3D imaging in high resolution mode, which is not suitable for production line detection. Although the chromatic dispersion confocal cannot achieve the similar confocal precision, the imaging speed is higher, and the method is more suitable for the application detection of a production line and is more suitable for glass measurement.
Therefore, the measurement of the glass is generally realized by adopting a dispersive confocal sensor, after the dispersive confocal sensor is used for carrying out the light splitting treatment on the light source light, the light source light is irradiated to the surface of the glass, and the reflected light reflected by the glass is collected. However, most of the existing dispersive confocal sensors focus on a small working distance and a small measurement range, such as a micron level, and are not suitable for glass measurement from the aspects of application and system, and meanwhile, the existing dispersive confocal sensors have the defects of complex structure, high operation difficulty, general incapacity of non-professional staff and high use threshold.
Disclosure of Invention
In order to overcome the defects of the prior art, the invention aims to provide a dispersive confocal sensor for glass measurement, which can solve the problems that the confocal sensor in the prior art cannot measure the thickness of glass and the like.
The invention adopts the following technical scheme:
The chromatic dispersion type confocal sensor for glass measurement comprises a light source device, a chromatic aberration lens group and a spectrum measuring instrument, wherein the light source device is connected with the chromatic aberration lens group through an optical fiber and used for transmitting a prepared light source to the chromatic aberration lens group through the optical fiber, the chromatic aberration lens group is used for carrying out spectroscopic treatment on the light source and irradiating the light source to the surface of an object to be measured and transmitting reflected light returned by the object to be measured to the spectrum measuring instrument through the optical fiber, and the spectrum measuring instrument is used for receiving the reflected light and transmitting the reflected light to an external spectrum analyzer so that the external spectrum analyzer can carry out spectrum analysis on the reflected light to obtain the thickness of the object to be measured.
The chromatic aberration lens group comprises a mounting seat, an adjusting seat and a lens, wherein the mounting seat comprises a bottom plate and a side plate fixedly arranged on one side of the bottom plate, the lens is arranged on the side plate, one end of the adjusting seat is provided with a light source input end and is used for being communicated with light source equipment through an optical fiber and inputting the light source, the adjusting seat is arranged on the bottom plate, a first light path is arranged in the adjusting seat, the input end of the first light path is connected with the light source input end, the output end of the first light path is arranged on the other end of the adjusting seat, the center line of the first light path and the center line of the lens are on the same horizontal line, the light source enters the first light path through the light source input end and is output to the lens through the output end of the first light path, then the light source is subjected to light splitting treatment through the lens and then irradiates the surface of an object to be detected, after the light source irradiates the surface of the object to be detected, reflected light is generated through the surface of the object to be detected, and the light path enters the first optical fiber to be transmitted to the spectrum measuring instrument.
Further, the lens is a cylindrical lens.
Further, the bottom plate is provided with a mounting groove, and the bottom of the adjusting seat is mounted in the mounting groove.
Further, the spectrum measuring instrument comprises a module seat, an incidence assembly and a reflection assembly;
The module seat comprises a first side wall, a second side wall, a third side wall, a fourth side wall, a bottom wall, a first top plate, a second top plate and a fifth side plate, wherein the first side wall, the second side wall, the third side wall and the fourth side wall are all arranged on the bottom wall, the first side wall and the second side wall are symmetrically arranged, the third side wall and the fourth side wall are symmetrically arranged, the first top plate is arranged above the third side wall and forms an acute angle with the third side wall, the second top plate is arranged above the fourth side wall and forms an angle of 90 degrees with the fourth side wall, one side edge of the fifth side plate forms an angle of 90 degrees with the second top plate, and the other side edge forms an acute angle with the first top plate, so that a cavity of the module seat is formed;
The fifth side plate is provided with a first opening; the incidence assembly comprises a connector, an adapter seat and a second light path arranged in the adapter seat, wherein one end of the connector is connected with the chromatic aberration lens group and used for receiving reflected light returned by the chromatic aberration lens group, and the other end of the connector is communicated with the second light path and used for transmitting the incident light to the first opening through the second light path and then to the cavity of the module seat through the first opening;
the first side wall is provided with a first opening, the reflecting assembly comprises a reflecting mirror mounting assembly and a reflecting mirror, one end of the reflecting mirror mounting assembly is arranged outside the module seat, the other end of the reflecting mirror mounting assembly is provided with the reflecting mirror and extends into a cavity of the module seat through the first opening;
The first top plate is provided with a control plate, and a fourth opening is arranged on the first top plate, and the reflected light is received by the control plate through the fourth opening after being reflected by the reflection type grating component, so that the control plate sends the reflected light to an external spectrum analyzer.
Further, a mounting plate is arranged on the first top plate, the control plate is arranged above the mounting plate, a third opening is formed in the mounting plate, the third opening and the fourth opening are opposite to each other, the mounting plate is fixedly connected with the first top plate through screws, and the reflected light is received by the control plate after passing through the third opening and the fourth opening in sequence.
Further, a control board mounting frame is further arranged on the mounting plate, the control board is mounted on the control board mounting frame, and the control board mounting frame is fixedly connected with the mounting plate through screws.
The reflector mounting assembly comprises a reflector mounting shaft and a reflector switching part, one end of the reflector mounting shaft is spirally mounted in the reflector switching part, the reflector is mounted on the reflector switching part, and the reflector mounting shaft is rotated to drive the reflector mounting part to rotate, so that the orientation of the reflector is adjusted, and the reflecting angle of reflected light passing through the reflector is realized.
Further, one end of the reflector installation shaft outside the cavity of the module seat is provided with a fixed knob, and the reflector installation shaft is driven to rotate by rotating the fixed knob.
Further, the spectrum measuring instrument comprises a grating base, the grating base is arranged at the bottom of the module seat and penetrates through the bottom plate of the module seat to the cavity of the module seat, and the reflection type grating component is arranged on the grating base.
Compared with the prior art, the invention has the beneficial effects that:
According to the invention, the self-made light source irradiates the surface of the object to be measured after passing through the chromatic aberration lens component light, reflected light is generated by reflection of the object to be measured on the light source after light splitting, the reflected light is received through the spectrum measuring instrument and then transmitted to the spectrum analyzer, so that spectrum analysis on the reflected light is realized, the thickness of the object to be measured is obtained according to the result of the spectrum analysis, and the problem that the confocal sensor in the prior art cannot measure the thickness of glass is solved.
Drawings
FIG. 1 is a schematic diagram of a chromatic confocal sensor according to the present invention;
FIG. 2 is a schematic diagram of a structure of a chromatic aberration lens group;
FIG. 3 is a schematic diagram of an exploded structure of a chromatic aberration lens group;
FIG. 4 is a schematic front view of a spectrometer;
FIG. 5 is a cross-sectional view taken along line AA in FIG. 4;
FIG. 6 is one of the exploded views of the structure of the spectrometer;
FIG. 7 is a second exploded view of the structure of the spectrometer.
In the figure, 11, a bottom plate, 12, a side plate, 13, a lens, 14, an adjusting seat, 15, a light source input end, 16, a mounting groove, 17, a first light path, 2, a module seat, 21, a mounting plate, 22, a control plate mounting frame, 23, a control plate, 24, a third hole, 3, a reflecting component, 31, a reflecting mirror, 32, a reflecting mirror switching part, 33, a reflecting mirror mounting shaft, 34, a fixed knob, 35, a second hole, 4, an incident component, 41, a joint, 42, a switching seat, 43, a first hole, 44, a second light path, 51, a grating type base, 52 and a reflecting grating component.
Detailed Description
The present invention will be further described with reference to the accompanying drawings and detailed description, wherein it is to be understood that, on the premise of no conflict, the following embodiments or technical features may be arbitrarily combined to form new embodiments.
Example 1
The invention provides a dispersive confocal sensor for glass measurement, which comprises a light source device, a chromatic aberration lens group and a spectrum measuring instrument, as shown in figures 1-7, wherein the measuring distance of the dispersive confocal sensor is increased by redesigning the structures of the light source, the chromatic aberration lens group and the spectrum measuring instrument generated by the light source device, and the dispersive confocal sensor is more suitable for measuring the thickness of glass.
Wherein, the light source equipment is used for preparing the light source. Preferably, the light source provided by the invention has stronger energy and higher surface reflectivity compared with the existing light source. For example, the intensity of the light source adopted in the embodiment is more than 30 times of that of the existing light source, and the surface reflectivity is higher.
The chromatic aberration lens group is used for carrying out light splitting treatment on the light source and irradiating the light source after light splitting to the surface of the object to be detected. According to the invention, the thickness of the object to be measured is measured through the relation between the spectrum and the thickness of the object to be measured under the condition that the light sources are made of the same material. The thickness of the object to be measured is calculated by pre-storing the corresponding relation between the simulated test light source and the thickness of different objects in the system, setting the light source, irradiating the light source to the surface of the object to obtain reflected light, analyzing the spectrum of the reflected light, and matching the spectrum with the corresponding relation stored in the system.
Since the light source is typically white light, the white light includes a plurality of different wavelengths of light. Therefore, when the surface of the object to be measured is irradiated, the light source is subjected to light splitting treatment through the chromatic aberration lens group, the light source is divided into light rays with different wavelengths, the light rays are irradiated to the surface of the object to be measured, reflected light rays reflected by the surface of the object to be measured are collected for spectral analysis, and finally the thickness of the object to be measured is obtained.
Preferably, a light source prepared by the light source equipment is input into the chromatic aberration lens group through an optical fiber, and the chromatic aberration lens group is used for carrying out light splitting on the light source and then irradiating the light source onto the surface of the object to be detected.
As shown in fig. 2-3, the chromatic aberration lens group includes a mounting base, an adjusting base 14, and a lens 13. The mounting seat comprises a bottom plate 11 and a side plate 12 fixedly arranged on one side of the bottom plate 11. Preferably, the bottom panel 11 is disposed perpendicular to the side panels 12.
The lens 13 is mounted on the side plate 12. The lens 13 is used for processing the light source, so that the light in the light source generates axial chromatic aberration, the light source is converted into incident light, and then the incident light irradiates the surface of the object to be measured. The axial chromatic aberration of the light determines the axial distance detected by the dispersive confocal sensor in this embodiment, that is, the inverse range of the test thickness.
Preferably, the object to be measured is disposed directly opposite to the lens 13.
Preferably, one end of the adjustment seat 14 is provided with a light source input end 15. Wherein the light source input end 15 is connected with the light source device through an optical fiber for inputting the light source. Preferably, the first light path 17 is provided in the adjustment seat 14. The input end of the first light path 17 is communicated with the light source input end 15, and the output end is arranged opposite to the lens 13, so that the light source enters the first light path 17 through the light source input end 15 and is transmitted to the lens 13, and then irradiates the surface of the object to be measured through the lens 13.
When the adjusting seat 14 is mounted on the base plate 11, the center line of the first optical path 17 in the adjusting seat 14 and the center line of the lens 13 are on the same horizontal line. That is, the center line of the first optical path 17, the center line of the lens 13, and the object to be measured are all on the same horizontal line.
When the light source device is connected to the light source input 15 via an optical fiber, the preparation of the light source by the light source device is started. In this way, the light source enters the light source input end 15 through the optical fiber, then enters the first light path 17, and is output through the output end of the first light path 17, and the light source is subjected to light splitting treatment, namely, the light source generates axial chromatic aberration to generate incident light, and the incident light irradiates the surface of the object to be detected. When the chromatic confocal has an axial chromatic aberration condition, the spectral focusing characteristic is similar to that of an encoder board, reflection spectrum information can be obtained at different depths, and thus, the thickness measurement of glass can be realized according to the reflection information of each spectrum. The chromatic aberration lens group provided by the invention is equivalent to an encoder and is used for encoding the light source. That is, when the light source passes through the lens 13, the chromatic aberration lens group axially separates the light beams in the direction of the axis of the optical axis to form a series of axial focuses, which corresponds to an encoder of the spectrum.
Preferably, the lens 13 in this embodiment is a lenticular lens. Wherein, the columnar lens is a gradient-projection lens. The lens of the columnar lens is a small-aperture lens. The diameter of the small-aperture lens is 1mm, and the length of the lens is 10mm.
Preferably, the base plate 11 is provided with a mounting groove 16. The bottom of the adjusting seat 14 is disposed in the mounting groove 16, so that the adjusting seat 14 is fixed on the bottom plate 11.
The invention is that white light (full-band light) generated by a light source device is transmitted through a chromatic aberration lens group and passes through a lens 13 of the chromatic aberration lens group, so that focuses of various wavelengths are separated in the axial direction to form a column of axial focuses, like an encoder made of a spectrum. Therefore, when the glass to be measured has the height drop, the light source with the axial chromatic aberration distribution reflected by the chromatic aberration lens group irradiates the glass to be measured, different wave bands are measured due to the height difference of the glass to be measured, and further, the height profile value of the glass to be measured can be obtained according to spectral analysis, and the thickness of the glass to be measured is obtained.
When the incident light irradiates the surface of the object to be measured, the incident light is reflected by the object to be measured due to different reflection angles of different wavelengths on the same material, and returns to the optical fiber through the lens 13 and the first optical path 17, and finally is transmitted to the spectrum measuring instrument through the optical fiber.
Preferably, as shown in fig. 4-7, the spectrum measuring apparatus comprises a control board 23, a module holder 2, an incidence assembly 4 and a reflection assembly 3. The incident component 4 receives the reflected light sent by the chromatic aberration lens group through the optical fiber, so that the reflected light is reflected to the reflective grating component 52 in the module seat 2 through the reflective component 3, is received by the control board 23 arranged at the top of the module seat 2 after being reflected, and is transmitted to an external spectrum analyzer for spectrum analysis.
The module seat 2 includes a cavity formed by a first sidewall, a second sidewall, a third sidewall, a fourth sidewall, a bottom wall, a first top plate, a second top plate and a fifth sidewall. In order to ensure that reflected light is received, the invention collects the reflected light reflected back by the object to be detected through the spectrum measuring instrument.
The four side edges of the bottom wall are sequentially provided with a first side wall, a second side wall, a third side wall and a fourth side wall, the first side wall and the second side wall are symmetrically arranged, the third side wall and the fourth side wall are symmetrically arranged, the first top plate is arranged above the third side wall and forms an acute angle with the third side wall, the second top plate is arranged above the fourth side wall and forms a 90-degree angle with the fourth side wall, one side edge of the fifth side wall forms a 90-degree angle with the second top plate, and the other side edge forms an acute angle with the first top plate, so that a cavity of the module seat 2 is formed.
Preferably, the first top plate is an annular structure with a fourth opening in the middle, and the fourth opening corresponds to the cavity of the module seat 2.
Wherein, the grating base 51 is installed at the bottom of the module base 2. The grating base 51 extends into the cavity of the module base 2 and passes through the bottom wall of the module base 2. The grating base 51 is provided with a reflective grating assembly 52, and the reflective grating assembly 52 is configured to reflect the reflected light to transmit the reflected light to the control board 23 through the fourth opening of the first top board.
Preferably, the incidence assembly 4 comprises a joint 41 and a adaptor 42. Wherein, one end of the connector 41 is connected with the reflected light sent by the chromatic aberration lens group through an optical fiber. The other end of the connector 41 is in communication with a second optical path 44 in the adapter 42 for delivering the reflected light into the cavity of the module holder 2.
Preferably, the fifth side wall is provided with a first opening 43. The adapter 42 is fixed on the second top plate, and the center lines of the joint 41, the second light path 44 in the adapter 42 and the first opening 43 are on the same horizontal line. When the adapter 42 is mounted on the second top plate, the joint 41, the second light path 44 in the adapter 42 and the first opening 43 are disposed opposite to each other. That is, after the connector 41 receives the reflected light through the optical fiber, the reflected light enters the second optical path 44 through the connector 41 and is transmitted and enters the cavity of the module base 2 through the first opening 43.
Preferably, the first sidewall is provided with a second opening 35. The reflecting assembly 3 includes a mirror mounting assembly and a mirror 31. One end of the reflective mounting component is disposed outside the cavity of the module base 2, and the other end extends into the cavity of the module base 2 through the second opening 35. The mirror 31 is mounted on one end of a mirror mounting assembly within the cavity of the module base 2.
The reflecting mirror 31 is configured to reflect the reflected light beam incident into the cavity of the module base 2 and send the reflected light beam to the reflective grating assembly 52 in the module base 2, and then transmit the reflected light beam to the control board 23 for receiving after being reflected by the reflective grating assembly 52. When the mirror mounting assembly extends into the cavity of the module seat 2 through the second opening 35, the mirror 31 and the first opening 43 are disposed opposite to each other, so that the center point of the mirror 31 and the center point of the first opening 43 are located on the same horizontal line. In this way, the reflected light beam incident into the cavity of the module base 2 through the first opening 43 is reflected by the mirror 31 onto the reflective grating assembly 52 located in the cavity of the module base 2. As shown in fig. 5, the curved portion is a transmission path of the reflected light, that is, the reflected light reaches the reflecting mirror 31 through the incident component 4, reaches the reflective grating component 52 under the reflection of the reflecting mirror 31, and is collected by the control board 23 after being reflected by the reflective grating component 52.
Preferably, the mirror mounting assembly includes a mirror mounting shaft 33 and a mirror adapter 32. One end of the mirror mounting shaft 33 is screwed into the mirror adapter 32. The mirror adapter 32 extends into the cavity of the module base 2 through the second opening 35, and the mirror 31 is mounted on the mirror adapter 32. By rotating the mirror mounting shaft 33, the mirror switching portion 32 is driven to rotate, that is, the mirror 31 is driven to rotate, so that the orientation of the mirror 31 is adjusted, and the reflection angle of the reflected light passing through the mirror 31 is adjusted.
Preferably, a fixing knob 34 is provided at one end of the mirror mounting shaft 33 located outside the cavity of the module base 2, and the mirror mounting shaft 33 is rotated by rotating the fixing knob 34.
Preferably, the first top plate is provided with a mounting plate 21. The control board 23 is provided above the mounting plate 21. Wherein, the mounting plate 21 is provided with a third opening 24, and the third opening 24 is opposite to the fourth opening of the first top plate. Preferably, the fourth aperture has a larger aperture diameter than the third aperture 24. In this way, the reflected light can completely pass through the fourth opening, and the reflected light is not collected by the control board 29 because the aperture of the fourth opening is small, so that the calculation result is inaccurate. Preferably, the mounting plate 21 is fixedly mounted to the first top plate by screws. The mounting plate 21 is fixedly connected with the first top plate through screws.
Further, a control board mounting frame 22 is also mounted on the mounting plate 21. The control board mounting frame 22 is fixedly connected with the mounting plate 21 through screws. The control board 23 is mounted on the control board mounting frame 22.
When the reflected light reflected by the reflecting mirror 31 is reflected again by the reflecting grating assembly 52 and then sequentially passes through the fourth opening and the third opening 24 to be collected by the control board 23 arranged on the control board mounting frame 22, the control board 23 sends the collected reflected light reflected by the glass to be measured to a remote spectrum analyzer, so that the spectrum analyzer performs spectrum analysis on the light reflected by the glass to obtain the thickness of the glass, and the measurement of the thickness of the glass is realized. Because the wavelengths of the light rays after light splitting are different, the reflection angles of the light rays after being reflected by the glass to be detected are different, and therefore the spectrum analyzer can obtain the thickness of the glass to be detected by carrying out spectrum analysis according to the reflected light rays with different wavelengths. The present invention focuses on how to irradiate a light source onto a glass to be measured, and how to calculate the thickness of the glass according to the light reflected back from the glass to be measured is not an important research point of the present invention, and the calculation process is a technology well known to those skilled in the art, and the present invention is not specifically described.
The spectrum measuring instrument provided by the invention has the advantages of simple structure and convenience in operation. The user only needs to insert the reflected light through the optical fiber through the connector 41, then adjusts the angle of the reflecting mirror 31 through rotating the fixing knob 34, so that the reflected light can be transmitted to the reflective grating assembly 52 positioned at the bottom of the cavity of the module seat 2 through the reflection of the reflecting mirror 31, after being reflected again by the reflective grating assembly 52, the reflected light is transmitted to the receiving plate 23 to be received through the fourth opening and the third opening 24 in sequence, and therefore the light reflected by an object to be detected is realized, and the difficulty of user operation is greatly reduced.
According to the invention, the light source irradiates the surface of the object to be measured after being split by the lens 13 of the chromatic aberration lens group, and then the reflected light reflected by the object to be measured is transmitted to the spectrum measuring instrument by the chromatic aberration lens group, so that the incident component 4 and the reflection component 3 in the spectrum measuring instrument transmit the reflected light to the control board 23 for receiving, and finally the control board 23 transmits the received light to the spectrum analyzer for realizing spectrum analysis, finally the thickness of the glass to be measured is obtained, and the thickness measurement of the glass is realized.
The chromatic aberration confocal sensor provided by the invention can be applied to measurement of glass with the thickness of 5-10 mm, has a simple structure and is convenient to operate, and the problems that the confocal sensor in the prior art cannot measure the thickness of the glass are solved.
The above embodiments are only preferred embodiments of the present invention, and the scope of the present invention is not limited thereto, but any insubstantial changes and substitutions made by those skilled in the art on the basis of the present invention are intended to be within the scope of the present invention as claimed.
Claims (7)
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| CN110260799B (en) * | 2019-07-29 | 2024-07-23 | 海伯森技术（深圳）有限公司 | Spectrum confocal displacement sensor |
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