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CN111928798B - A method for evaluating the quality of photoelectric imaging in phase deflectometry - Google Patents

A method for evaluating the quality of photoelectric imaging in phase deflectometry Download PDF

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CN111928798B
CN111928798B CN202010976353.0A CN202010976353A CN111928798B CN 111928798 B CN111928798 B CN 111928798B CN 202010976353 A CN202010976353 A CN 202010976353A CN 111928798 B CN111928798 B CN 111928798B
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都卫东
王岩松
和江镇
吴健雄
王天翔
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Focusight Technology Co Ltd
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/24Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G01B11/254Projection of a pattern, viewing through a pattern, e.g. moiré
    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00Image analysis
    • G06T7/0002Inspection of images, e.g. flaw detection
    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00Image analysis
    • G06T7/70Determining position or orientation of objects or cameras
    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00Image analysis
    • G06T7/80Analysis of captured images to determine intrinsic or extrinsic camera parameters, i.e. camera calibration
    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00Indexing scheme for image analysis or image enhancement
    • G06T2207/30Subject of image; Context of image processing
    • G06T2207/30168Image quality inspection
    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00Indexing scheme for image analysis or image enhancement
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    • G06T2207/30244Camera pose

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Abstract

本发明涉及一种相位偏折术光电成像质量评价方法,利用相位偏折系统中的投影装置向标准被测物投射检测时使用的正弦条纹图像,然后相机拍摄带有投影条纹的标准被测物图像,然后将标准被测物图像经过算法处理,得到成像质量的得分,得分越高,成像质量越高,最终实际被测物的检测效果越好。本发明避免了光电系统搭建返工,减小了检测问题定位的维度,减少量相位偏折系统调试的耗时;在光电系统搭建的阶段,就通过成像质量评价标准来调节光电系统,直到成像质量符合标准,此时成像质量就有了保障,这样不仅使光电系统在搭建阶段就达到理想状态,且在后面检测阶段的问题(检测结果不理想)定位方面排除了成像质量的因素。

Figure 202010976353

The invention relates to a phase deflection photoelectric imaging quality evaluation method. A projection device in a phase deflection system is used to project a sinusoidal fringe image used in detection to a standard measured object, and then a camera shoots the standard measured object with projection fringes. The image of the standard object to be measured is then processed by an algorithm to obtain a score of imaging quality. The higher the score, the higher the imaging quality, and the better the final detection effect of the actual object to be measured. The invention avoids the rework of the construction of the optoelectronic system, reduces the dimension of detection problem location, and reduces the time-consuming debugging of the quantity and phase deflection system; in the stage of construction of the optoelectronic system, the optoelectronic system is adjusted through the imaging quality evaluation standard until the imaging quality is reached. If the standard is met, the imaging quality is guaranteed at this time, which not only makes the optoelectronic system reach the ideal state in the construction stage, but also eliminates the imaging quality factor in the positioning of problems in the later detection stage (unsatisfactory detection results).

Figure 202010976353

Description

相位偏折术光电成像质量评价方法A method for evaluating the quality of photoelectric imaging in phase deflectometry

技术领域technical field

本发明涉及视觉成像检测技术领域,尤其是一种相位偏折术光电成像质量评价方法。The invention relates to the technical field of visual imaging detection, in particular to a phase deflectophotoelectric imaging quality evaluation method.

背景技术Background technique

相位测量偏折术基于相位检测原理来实现物体信息的获取。投影装置依次向被测物投影N+8幅(N一般取18)结构光条纹,其中横竖格雷码条纹各N/2幅,横竖正弦条纹各4幅,结构光投射到待测物表面,待测物缺陷处的梯度变化引起结构光相位发生变化,导致条纹变形,CCD 相机记录下发生变形的结构光,之后从这26帧光强图中获取相位信息,相机拍照采图传输给电脑进行图像算法处理,最终得到缺陷与背景对比度较高的图像。Phase measurement deflectometry is based on the principle of phase detection to achieve object information acquisition. The projection device projects N+8 (N is generally 18) structured light fringes on the object to be measured in turn, including N/2 horizontal and vertical Gray code fringes and 4 horizontal and vertical sinusoidal fringes. The structured light is projected onto the surface of the object to be measured. The gradient change at the defect of the measured object causes the phase of the structured light to change, resulting in the deformation of the stripes. The CCD camera records the deformed structured light, and then obtains the phase information from the 26 frames of light intensity maps, and the camera takes pictures and transmits the images to the computer for images. After algorithm processing, an image with high contrast between defects and background is finally obtained.

而在实际应用中,由于环境光等干扰,或者相机位姿、参数等设置的不合理,会使相机拍摄到的被测物上的条纹质量不理想,导致最终检测结果不理想。In practical applications, due to the interference of ambient light, or the unreasonable settings of the camera pose and parameters, the quality of the fringes on the measured object captured by the camera will be unsatisfactory, resulting in unsatisfactory final detection results.

传统的成像质量调试,都是以最终检测结果为评价标准,但决定最终检测结果的因素太多,检测结果不理想,不能确定是由成像质量不高还是由算法等其他因素导致的。The traditional imaging quality debugging is based on the final test result as the evaluation standard, but there are too many factors that determine the final test result, and the test result is not ideal.

现有技术只能在光电系统、算法等都设计完成后,以最终检测结果作为唯一评价标准来调节相位偏折系统,但由于对最终结果造成影响的因素太多,无法确定需要调整方面因素,导致调整无方向性,从而调整工作冗余且耗时。In the prior art, the phase deflection system can only be adjusted with the final detection result as the only evaluation criterion after the optoelectronic system, algorithm, etc. are all designed. This results in the adjustment being non-directional, making the adjustment work redundant and time-consuming.

发明内容SUMMARY OF THE INVENTION

本发明要解决的技术问题是:提供一种相位偏折术光电成像质量评价方法,解决相位偏折术在成像阶段,没有一种定量的、有效的成像质量评估方法,导致必须要以最终检测结果为评价标准的问题。The technical problem to be solved by the present invention is: to provide a photoelectric imaging quality evaluation method for phase deflectometry, so as to solve the problem that there is no quantitative and effective imaging quality evaluation method for phase deflectometry in the imaging stage, resulting in the necessity of final detection The result is a question of evaluation criteria.

本发明解决其技术问题所采用的技术方案是:一种相位偏折术光电成像质量评价方法,包括以下步骤,The technical solution adopted by the present invention to solve the technical problem is: a method for evaluating the quality of photoelectric imaging by phase deflection, comprising the following steps:

A、利用相位偏折系统中的投影装置向标准被测物投射检测时使用的正弦条纹;A. Use the projection device in the phase deflection system to project the sinusoidal fringes used for detection to the standard measured object;

B、相机拍摄带有投影条纹的标准被测物图像;B. The camera shoots a standard object image with projected fringes;

C、将标准被测物图像经过算法处理,得到成像质量的得分;C. The image of the standard object to be measured is processed by the algorithm to obtain the score of the imaging quality;

D、判断得分是否达到标准;若得分达到标准,则进行后续检测工作;若得分没有达到标准,则调节成像系统参数,并循环步骤1)~4)。D. Judging whether the score meets the standard; if the score meets the standard, follow-up detection work; if the score does not meet the standard, adjust the parameters of the imaging system, and repeat steps 1) to 4).

进一步的说,本发明所述的标准被测物的表面参数与实际被测物的表面参数的比例为1:1~1:1.2。Further, the ratio of the surface parameters of the standard object to be measured and the surface parameters of the actual object to be measured according to the present invention is 1:1~1:1.2.

再进一步的说,本发明所述的标准被测物的表面参数包括标准被测物的表面平整度、长度、宽度和反射率等。Still further, the surface parameters of the standard measured object described in the present invention include the surface flatness, length, width and reflectivity of the standard measured object.

更进一步的说,本发明所述步骤C中,得分越高,成像质量越高,最终实际被测物的检测效果越好。Furthermore, in the step C of the present invention, the higher the score, the higher the imaging quality, and the better the final detection effect of the actual measured object.

本发明利用标准被测物的条纹图像来通过设计好的评价算法对成像效果进行评价,当评价得分低时,则调节相机的位姿和参数以及投影装置的位姿,直到得到较高的评价得分,此时,成像质量变得较为理想,即成像质量已经得到了保障;接下来若检测结果仍然不理想,则问题不在成像质量方面,可以在算法等方面找原因了。The invention uses the stripe image of the standard object to be tested to evaluate the imaging effect through the designed evaluation algorithm. When the evaluation score is low, the pose and parameters of the camera and the pose of the projection device are adjusted until a higher evaluation is obtained. Score, at this time, the imaging quality has become more ideal, that is, the imaging quality has been guaranteed; if the detection result is still unsatisfactory, the problem is not in the imaging quality, and the reason can be found in the algorithm and other aspects.

本发明的有益效果是:The beneficial effects of the present invention are:

1、解决了相位偏折系统在光电系统搭建阶段没有一个定量的、有效的评价标准,要在搭建完成后,以最终检测结果为标准,来调整光电系统以及算法,从而导致光电系统搭建的返工,且检测结果不理想的原因究竟是在光电上还是在算法上,无法确定这一问题;避免了光电系统搭建返工,减小了检测问题定位的维度,减少量相位偏折系统调试的耗时。1. Solve the problem that the phase deflection system does not have a quantitative and effective evaluation standard in the construction stage of the optoelectronic system. After the construction is completed, the optoelectronic system and algorithm should be adjusted based on the final inspection result, which will lead to the rework of the construction of the optoelectronic system. , and the reason for the unsatisfactory detection results is photoelectric or algorithm, it is impossible to determine this problem; it avoids the rework of photoelectric system construction, reduces the dimension of detection problem positioning, and reduces the time-consuming debugging of the phase deflection system. .

2、针对传统的单一使用最终检测结果作为评判标准的局限性,在光电系统搭建的阶段,就通过成像质量评价标准来调节光电系统,直到成像质量符合标准,此时成像质量就有了保障,这样不仅使光电系统在搭建阶段就达到理想状态,且在后面检测阶段的问题(检测结果不理想)定位方面排除了成像质量的因素。2. In view of the limitation of the traditional single use of the final inspection result as the evaluation standard, in the stage of building the optoelectronic system, the optoelectronic system is adjusted through the imaging quality evaluation standard until the imaging quality meets the standard, then the imaging quality is guaranteed. This not only makes the optoelectronic system reach an ideal state in the construction stage, but also eliminates the factor of imaging quality in the positioning of problems (unsatisfactory detection results) in the later detection stage.

附图说明Description of drawings

图1是本发明方法流程图。Fig. 1 is the flow chart of the method of the present invention.

具体实施方式Detailed ways

现在结合附图和优选实施例对本发明作进一步详细的说明。这些附图均为简化的示意图,仅以示意方式说明本发明的基本结构,因此其仅显示与本发明有关的构成。The present invention will now be described in further detail with reference to the accompanying drawings and preferred embodiments. These drawings are all simplified schematic diagrams, and only illustrate the basic structure of the present invention in a schematic manner, so they only show the structures related to the present invention.

如图1所示,一种相位偏折术光电成像质量评价方法,成像结构包括面阵相机、投影装置以及标准被测物。As shown in Figure 1, a phase deflectophotoelectric imaging quality evaluation method, the imaging structure includes an area array camera, a projection device and a standard measured object.

方法包括:利用相位偏折系统中的投影装置向标准被测物投射检测时使用的正弦条纹图像,然后相机拍摄带有投影条纹的标准被测物图像,其中,标准被测物表面水平,长、宽、反射率都与实际被测物接近;然后将标准被测物图像经过算法处理,得到成像质量的得分,得分越高,成像质量越高,最终实际被测物的检测效果越好。The method includes: using the projection device in the phase deflection system to project the sinusoidal fringe image used in the detection to the standard measured object, and then the camera shoots the standard measured object image with the projected fringes, wherein the standard measured object surface is horizontal, and the length is long. , width and reflectivity are all close to the actual measured object; then the standard measured object image is processed by an algorithm to obtain an imaging quality score. The higher the score, the higher the imaging quality, and the better the final detection effect of the actual measured object.

算法包括以下步骤:The algorithm includes the following steps:

(1)选一幅竖直正弦条纹图像,取一行数据,形成一个一维数组I;(1) Select a vertical sinusoidal fringe image, take a row of data, and form a one-dimensional array I;

(2)求数组I的一阶导数

Figure 100002_DEST_PATH_IMAGE001
w为图像宽度像素数;(2) Find the first derivative of the array I
Figure 100002_DEST_PATH_IMAGE001
w is the number of pixels of the image width;

(3)求数组I的二阶导数

Figure 881781DEST_PATH_IMAGE002
;(3) Find the second derivative of the array I
Figure 881781DEST_PATH_IMAGE002
;

(4)获得Id2中过零点的坐标,即为波峰与波谷的索引,将这些索引组成一维数组Id(4) Obtain the coordinates of the zero-crossing point in I d2 , which are the indices of the crest and the trough, and form these indices into a one-dimensional array I d ;

(5)求出Id的相邻元素之间差的绝对值,求差的绝对值的均值m_abs;(5) Find the absolute value of the difference between adjacent elements of I d , and find the mean m_abs of the absolute value of the difference;

(6)去除Id中相邻元素之间差的绝对值小于m_abs的元素,从而去掉由于噪声干扰造成的伪波峰与伪波谷;(6) Remove the elements whose absolute value of the difference between adjacent elements in I d is less than m_abs, so as to remove the false peaks and false valleys caused by noise interference;

(7)取Id所对应的Id2中的元素组成新数组Imax_min,求Imax_min的均值,记作A’;(7) Take the elements in I d2 corresponding to I d to form a new array I max_min , find the mean value of I max_min , and denote it as A';

(8)用Imax_min中所有大于A’的元素组成新数组Imax,并求其均值m_max;小于A’的元素组成新数组Imin,并求其均值m_min;计算(m_max-m_min)/2,记作B’;(8) Use all elements in I max_min greater than A' to form a new array I max , and calculate its mean m_max; elements smaller than A' form a new array I min , and calculate its mean m_min; calculate (m_max-m_min)/2 , denoted as B';

(9)将步骤(5)中求出Id的相邻元素之间差的绝对值的均值m_abs记作tmp1,计算3.14/tmp1,记作C’;(9) Denote the mean value m_abs of the absolute value of the difference between the adjacent elements of I d in step (5) as tmp1, calculate 3.14/tmp1, and denote it as C';

(10)求出数组I的前5个元素的均值,记作tmp2,计算

Figure 108101DEST_PATH_IMAGE003
,记作D’;(10) Find the mean of the first 5 elements of the array I, denoted as tmp2, and calculate
Figure 108101DEST_PATH_IMAGE003
, denoted as D';

(11)将I带入公式y=A+B*sin(C*x+D),并将A’, B’, C’,D’作为A,B,C,D的初始值带入,用最小二乘法求出A,B,C,D;(11) Bring I into the formula y=A+B*sin(C*x+D), and bring in A', B', C', D' as the initial values of A, B, C, D, Use the least squares method to find A, B, C, D;

(12)将I带入公式y=A+B*sin(C*x+D),求出新数组Y;(12) Bring I into the formula y=A+B*sin(C*x+D) to find the new array Y;

(13)求Y与I之间对应元素之间差值的平方,然后取平均,得到结果记为Stmp;(13) Calculate the square of the difference between the corresponding elements between Y and I, and then take the average, and the result is recorded as S tmp ;

(14)计算

Figure 3376DEST_PATH_IMAGE004
,结果记作s_1;(14) Calculation
Figure 3376DEST_PATH_IMAGE004
, the result is recorded as s_1;

(15)在当前用到的竖直正弦条纹图像上随机取5行数据按照以上步骤(1)到(14),将得到的5个结果取均值记作竖直成像得分s_v;(15) Randomly select 5 lines of data on the currently used vertical sinusoidal fringe image according to the above steps (1) to (14), and record the average of the 5 results obtained as the vertical imaging score s_v;

(16)同理,在水平正弦条纹上以行为单位取数据,处理步骤与在竖直正弦条纹一致,求得水平成像得分s_h;(16) In the same way, the data is taken in row units on the horizontal sinusoidal stripes, and the processing steps are the same as those on the vertical sinusoidal stripes, and the horizontal imaging score s_h is obtained;

(17)计算

Figure 943650DEST_PATH_IMAGE005
,得到最终成像质量得分s,范围为0到1之间,数值越高代表成像质量越好;(17) Calculation
Figure 943650DEST_PATH_IMAGE005
, get the final image quality score s, the range is between 0 and 1, the higher the value, the better the image quality;

根据评价得分对光电系统进行调节,包括调节相机位姿、参数,以及投影装置位姿、参数,直到得分达到预先设定的得分阈值(一般取0.8)。Adjust the photoelectric system according to the evaluation score, including adjusting the pose and parameters of the camera, as well as the pose and parameters of the projection device, until the score reaches a preset score threshold (usually 0.8).

以上说明书中描述的只是本发明的具体实施方式,各种举例说明不对本发明的实质内容构成限制,所属技术领域的普通技术人员在阅读了说明书后可以对以前所述的具体实施方式做修改或变形,而不背离发明的实质和范围。What is described in the above specification are only specific embodiments of the present invention, and various examples do not limit the essence of the present invention. Those of ordinary skill in the art can make modifications to the specific embodiments described above after reading the specification or variations without departing from the spirit and scope of the invention.

Claims (4)

1. A phase-shift-surgery photoelectric imaging quality evaluation method is characterized by comprising the following steps: comprises the following steps of (a) carrying out,
A. projecting sine stripes used in detection to a standard measured object by using a projection device in a phase deflection system;
B. shooting a standard measured object image with projection stripes by a camera;
C. processing the standard measured object image through an algorithm to obtain a score of imaging quality;
the algorithm comprises the following steps:
(1) selecting a vertical sine stripe image, and taking a line of data to form a one-dimensional array I;
(2) evaluating the first derivative of array I
Figure DEST_PATH_IMAGE001
w is the number of image width pixels;
(3) second derivative of array I
Figure 209286DEST_PATH_IMAGE002
(4) ObtainTo obtain Id2The coordinates of the middle zero crossing point are the indexes of the wave crest and the wave trough, and the indexes are combined into a one-dimensional array Id
(5) Finding IdThe absolute value of the difference between adjacent elements, and solving the mean value m _ abs of the absolute value of the difference;
(6) removal of IdElements with the absolute value of the difference between adjacent elements being smaller than m _ abs, so as to remove the pseudo wave crest and the pseudo wave trough caused by noise interference;
(7) get IdCorresponding to Id2The elements in (1) form a new array Imax_minTo find Imax_minThe mean value of (A) is denoted as A';
(8) by means of Imax_minAll elements greater than A' in the array form a new array ImaxAnd calculating the average value m _ max, wherein the elements smaller than A' form a new array IminAnd calculating the average value m _ min; calculating (m _ max-m _ min)/2, and recording as B';
(9) the value I obtained in step (5)dThe mean m _ abs of the absolute values of the differences between adjacent elements is denoted tmp1, calculated 3.14/tmp1, denoted C';
(10) the mean of the first 5 elements of array I is found, denoted as tmp2, and calculated
Figure DEST_PATH_IMAGE003
Denoted D';
(11) substituting the formula I into a formula y = A + B sin (C x + D), substituting A ', B', C ', D' as initial values of A, B, C and D, and solving A, B, C and D by using a least square method;
(12) substituting the formula I into the formula Y = a + B sin (C x + D) to find a new array Y;
(13) the square of the difference between the corresponding elements between Y and I is calculated, then the average is taken, and the obtained result is recorded as Stmp
(14) Computing
Figure 532951DEST_PATH_IMAGE004
The result is recorded as s _1;
(15) randomly selecting 5 rows of data on the currently used vertical sine stripe image according to the steps (1) to (14), and taking the average value of the obtained 5 results as a vertical imaging score s _ v;
(16) similarly, data is fetched on the horizontal sine stripe in a row unit, the processing steps are consistent with those on the vertical sine stripe, and a horizontal imaging score s _ h is obtained;
(17) computing
Figure DEST_PATH_IMAGE005
Obtaining a final imaging quality score s, wherein the range is 0 to 1, and the higher the numerical value is, the better the imaging quality is;
D. judging whether the score reaches the standard; if the score reaches the standard, performing subsequent detection work; and if the score does not reach the standard, adjusting the parameters of the imaging system, and circulating the steps A) -C).
2. The phase-bias-refraction-technique photoelectric imaging quality evaluation method as claimed in claim 1, characterized in that: the ratio of the surface parameter of the standard measured object to the surface parameter of the actual measured object is 1: 1-1: 1.2.
3. the phase-bias-technique photoelectric imaging quality evaluation method according to claim 2, characterized in that: the surface parameters of the standard measured object comprise the surface flatness, the length, the width and the reflectivity of the standard measured object.
4. The phase-bias-refraction-technique photoelectric imaging quality evaluation method as claimed in claim 1, characterized in that: in the step C, the higher the score is, the higher the imaging quality is, and the better the detection effect of the actual detected object is finally.
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