CN112082652B

CN112082652B - An integrated array polarization imaging detector stacked with multilayer transparent black phosphorus sheets and a corresponding polarization information calculation method

Info

Publication number: CN112082652B
Application number: CN202010963096.7A
Authority: CN
Inventors: 张然; 段斌; 褚金奎; 樊元义; 金仁成; 崔岩
Original assignee: Dalian University of Technology
Current assignee: Dalian University of Technology
Priority date: 2020-09-14
Filing date: 2020-09-14
Publication date: 2021-06-22
Anticipated expiration: 2040-09-14
Also published as: CN112082652A

Abstract

The invention discloses an integrated array polarization imaging detector stacked with multilayer transparent black phosphorus sheets and a corresponding polarization information calculation method. The polarization imaging detector is composed of a plurality of detector units. Each detector unit is composed of three functional layers and a substrate support layer. The functional layer structure uses a transparent black phosphorus sheet as a photosensitive layer and a conductive channel layer, supplemented by electrodes. And protective insulating medium, and add peripheral circuits. Taking the functional layer as the structural unit, stacking multiple layers along the direction of the optical path can realize real-time high-resolution polarization detection. When polarized light illuminates the device, due to the characteristics of the black phosphorus sheet itself, only the polarized light along the AC direction (Armchair) of the black phosphorus sheet is absorbed the most, and there will be transmission in other directions, so the stacking structure of black phosphorus sheets with multiple angles , the light intensity information in multiple directions can be obtained by real-time measurement at the same position. The carriers in the black phosphorus sheet move unidirectionally under the driving of an applied potential, generate a response signal and realize the detection of the intensity of polarized light, and solve the target beam information through a specific algorithm. The detector solves the problem of inconsistency in the existing polarization detection space, and has the characteristics of high integration, no resolution loss, and good real-time performance, and is suitable for polarization detection imaging, navigation and other fields.

Description

Integrated array type polarization imaging detector with multilayer transparent black phosphorus sheet stacking and corresponding polarization information calculation method

Technical Field

The invention relates to the technical field of polarization measurement, in particular to an integrated array type polarization imaging detector with stacked multilayer transparent black phosphorus sheets and a corresponding polarization information calculation method, which are designed by utilizing the polarization sensitivity, the light transmittance and the dichroism of the black phosphorus sheets.

Background

With the great development of industrialization, the photoelectric detection technology is more and more widely applied in the military and industrial fields of modern society, the photoelectric detection process is a process of acquiring light wave information, the light wave is an electromagnetic wave, and the utilization degree of information carried by the light wave determines whether a more accurate result can be obtained. The traditional detection means focuses on the detection of light intensity and wavelength, and ignores the polarization of another important inherent property of the light wave. Compared with most adopted intensity detection, the realization of polarization detection can expand information from an information set of light intensity, spectrum and space to a more comprehensive information set of light intensity, spectrum, space, polarization degree and polarization azimuth angle, and can obtain more accurate and effective results, thereby improving the precision of target detection and geographic substance identification. Currently, polarization detection is widely applied to a plurality of key fields such as meteorological detection, biological tissue detection, integrated navigation, underwater detection, geological exploration, soil analysis and the like.

The existing polarized light imaging detector mostly adopts an integrated array structure of a sub-focal plane, the sub-focal plane polarization detection means that a polarization element array is integrated on a focal plane of the detector, and a single unit of the array corresponds to a single pixel of the focal plane. The minimum period unit of the polarization element array is composed of 2 multiplied by 2 polarization units, and a super pixel is formed. In the polarization element array, one super pixel is composed of a plurality of polarizing plates, wave plates or polarization rotators, wherein the polarization direction, the angle of the wave plates, the retardation of the wave plates and the angle of polarization rotation of the polarizing plates are different. Therefore, a plurality of units in one super pixel can form measurement of different polarization states of incident light, the Stokes vector of the measured light can be reconstructed, and polarization imaging can be further realized. However, the polarization detection system of the sub-focal plane performs simultaneous polarization detection through grating structures of different focal planes at different angles in a two-dimensional plane, interpolation calculation needs to be performed by using an algorithm, the real-time performance is good, but the spatial resolution of the measured information is low, and the problem of spatial inconsistency exists.

Under the condition of ensuring the integration level, the key technology of the polarized light detection detector capable of simultaneously ensuring the time resolution and the space resolution is to realize that the light intensity information of multiple angles can be simultaneously measured at one point in the space, so that the design and development of a new polarized detection detector structure are required. However, the traditional photoelectric detection method relying on the metal nano-grating relies on the high light transmittance TM and the high extinction ratio of the grating, and does not have the basis for realizing new idea. Therefore, it is urgent to search for new semiconductor materials and new functional structures to realize polarization detection with higher accuracy. In the aspect of new materials, the black phosphorus is found to have strong intrinsic plane anisotropy, and can be used for polarized light detection in multiple wave bands such as ultraviolet, terahertz, visible light, infrared and the like; compared with other materials, the black phosphor plate has considerable advantage of light transmittance in a visible light band. Based on the advantages, the integrated array type polarization real-time imaging detector with the multilayer transparent black phosphorus plate stack is provided and designed for solving the problem of space inconsistency of the existing polarization detector, the time resolution can be guaranteed, the detection space resolution can be guaranteed, and the integration level is higher than that of the traditional imaging detector.

Disclosure of Invention

In view of the defects of the prior art, the invention provides an integrated array type polarization imaging detector with stacked multilayer transparent black phosphorus sheets and a corresponding polarization information calculation method, which solve the problem of inconsistent space of the traditional polarization detector, can ensure the time resolution and the space resolution simultaneously, and provide a polarized light detection scheme with higher precision.

The invention provides an integrated array type polarization real-time imaging detector with stacked multilayer transparent black phosphorus sheets, wherein a detection unit of the polarization light detector sequentially comprises a top protective layer, a top metal electrode pair, a top 0-degree black phosphorus sheet, a first dielectric layer, a middle layer metal electrode pair, a middle layer 60-degree black phosphorus sheet, a second dielectric layer, a bottom metal electrode pair, a bottom 120-degree black phosphorus sheet and a bottom supporting layer from top to bottom, wherein the top protective layer, the top metal electrode pair, the top 0-degree black phosphorus sheet and the first dielectric layer are manufactured on the top 0-degree black phosphorus sheet, the middle layer metal electrode pair, the middle layer 60-degree black phosphorus sheet and the second.

In some embodiments, the top protective layer, the first dielectric layer, the second dielectric layer, and the bottom supporting layer may be optical thin film layers of silicon dioxide, zinc sulfide selenide, zinc oxide, yttrium oxide, cerium oxide, niobium oxide, titanium dioxide, titanium trioxide, titanium monoxide, tantalum pentoxide, silicon carbide, silicon nitride, or the like; further, the combination of the above-described optional optical material thin film layers may be used.

In some embodiments, the top, middle, and bottom metal electrode pairs are gold, titanium, or chromium electrodes.

In some embodiments, the top 0 ° black phosphor, the middle 60 ° black phosphor and the bottom 120 ° black phosphor refer to 0 ° directions of the XY plane of the spatial coordinate system with the AC direction of the top black phosphor as the space coordinate system, and the middle and bottom black phosphors correspond to black phosphors placed in 60 ° and 120 ° directions of the XY plane of the AC direction spatial coordinate system, and further, the above angles are not fixed to 0 °, 60 ° and 120 °, and may be any different angles.

In some embodiments, the black phosphorus sheet has a thickness of 5 to 60 nanometers.

In some embodiments, the detector unit is composed of three functional layers and a substrate support layer, the functional layer structure takes transparent black phosphorus sheets as a photosensitive layer and a conductive channel layer, is supplemented with electrodes and protective insulating media, and is added with peripheral circuits, and pixels of the polarization imaging detector of the detector unit array correspond to pixels of the polarization imaging detector one by one.

The invention provides a corresponding polarization information calculation method of an integrated array type polarization imaging detector stacked by multilayer transparent black phosphorus sheets, which is characterized in that the information measured by the detector is calculated by the following steps:

assume that the Stokes vector of the incident light is S₀＝(I,Q,U,V)^TWherein I is unpolarized light intensity, Q and U respectively represent linearly polarized light in two directions, V represents circularly polarized light, circularly polarized light component can be ignored in the detectable range of the instrument, so it is 0 to take V here, that is S₀＝(I,Q,U,0)^T。

The AC (X) direction of the black phosphorus of the first layer is set to be a 0-degree direction in an XY plane in a space coordinate system, the AC (X) direction of the black phosphorus of the second layer is set to be a 60-degree direction in the XY plane, and the AC (X) direction of the black phosphorus of the third layer is set to be a 120-degree direction in the XY plane.

The phase delay caused by the black phosphor can be expressed as

Here, d denotes a black phosphor sheet thickness, n denotes a real part of a complex refractive index, and λ denotes an incident light wavelength.

Let P₁And P₂Amplitude transmittances in the AC (X) and ZZ (Y) directions, respectively, the Mueller matrix of the black phosphor sheet can be expressed as

Further, the black phosphor patch rotated by the angle θ can be expressed as a black phosphor patch using a Mueller matrix

And further can show the conversion process of the Stokes vectors of incidence and emergence of each layer, namely the incident light S₀＝(I,Q,U,0)^TThe transformation through the first layer of black phosphorus can be expressed as

S₁＝M_Δ,0S₀＝(I',Q',U',0)^T

Wherein, I ' is the unpolarized light intensity after passing through the first layer of black phosphorus, and Q ' and U ' are linearly polarized light respectively representing two directions after passing through the first layer of black phosphorus; similarly, the transformation of the second layer may be expressed as

S₂＝M_Δ,60S₁＝M_Δ,60M_Δ,0S₀＝(I”,Q”,U”,0)^T

Wherein, I ' is the unpolarized light intensity after passing through the second layer of black phosphorus, and Q ' and U ' are respectively linearly polarized light in two directions after passing through the second layer of black phosphorus;

the light intensity values corresponding to the black phosphorus sheets at different angles can be calculated according to the current variation collected by each layer of the detector

Four parameters I, Q and U of the Stokes vector of the incident light can be obtained, and the degree of linear polarization (DoLP) and the polarization angle (AoP) of the polarized light can be obtained

The invention has the following advantages:

the multi-directional polarization information acquisition device has the advantages that the multi-layer detection structure is adopted, multi-directional polarization information can be measured in real time according to the anisotropic light transmittance and anisotropic polarization absorption of the detection material, the time resolution can be guaranteed, and the detection spatial resolution can be guaranteed.

And the black phosphorus which is a novel low-dimensional material is used as a detection core, has stronger intrinsic plane anisotropy and has the advantages of high carrier mobility, quick response and the like.

The polarized light high-precision detector adopting the black phosphorus plate can directly detect the polarized light by utilizing the intrinsic anisotropy of the material and can detect the polarized light in multiple wave bands such as ultraviolet, terahertz, visible light, infrared and the like.

Based on the reasons, the invention solves the problem of inconsistent space of the existing detector, can ensure the time resolution and the detection spatial resolution at the same time, and has higher integration level than the prior detector.

Drawings

FIG. 1 is a schematic perspective view of the detector of the present invention;

FIG. 2 is a perspective view of a detector detection unit of the present invention;

FIG. 3 is a graph of the intensity of absorbed light versus incident light for example 1.

Wherein: 1 top metal electrode pair, 2 top protective layer, 3 top 0 degree black phosphorus sheet, 4 medium layer I, 5 middle layer metal electrode pair, 6 middle layer 60 degree black phosphorus sheet, 7 medium layer II, 8 bottom metal electrode pair, 9 bottom 120 degree black phosphorus sheet, 10 bottom supporting layer.

Detailed Description

The following detailed description of embodiments of the present patent refers to the accompanying drawings.

As shown in fig. 1-3, the detection unit of the polarized light detector is sequentially, as viewed from top to bottom, a top protective layer 2, a top metal electrode pair 1, a top 0 ° black phosphor sheet 3, a first dielectric layer 4, a middle metal electrode pair 5, a middle 60 ° black phosphor sheet 6, a second dielectric layer 7, a bottom metal electrode pair 8, a bottom 120 ° black phosphor sheet 9 and a bottom support layer 10, which are fabricated on the top 0 ° black phosphor sheet.

In some embodiments, the top protective layer 2, the dielectric layer one 4, the dielectric layer two 7, and the bottom support layer 10 may be optical thin film layers of silicon dioxide, zinc sulfide selenide, zinc oxide, yttrium oxide, cerium oxide, niobium oxide, titanium dioxide, titanium oxide, titanium sesquioxide, titanium oxide, titanium monoxide, tantalum pentoxide, silicon carbide, silicon nitride, or the like; further, the combination of the above-described optional optical material thin film layers may be used.

In some embodiments, the top layer metal electrode pair 1, the middle layer metal electrode pair 5, and the bottom layer metal electrode pair 8 are gold, titanium, or chromium electrodes.

In some embodiments, the top 0 black phosphor patch 3, the middle 60 black phosphor patch and 6 and the bottom 120 black phosphor patch 9 refer to 0 directions in the XY plane of the spatial coordinate system with the AC direction of the top black phosphor patch as the 0 direction, and the middle and bottom black phosphor patches correspond to the black phosphor disposed in the 60 and 120 directions in the XY plane of the AC direction spatial coordinate system, and further the angles are not fixed at 0 °, 60 ° and 120 °, and can be any of various angles.

In some embodiments, the black phosphorus sheet has a thickness of 5-60 nanometers.

In some embodiments, each dielectric layer has a thickness of 1-90 microns.

In some embodiments, the detector unit is composed of three functional layers and a substrate supporting layer, the functional layer structure takes transparent black phosphorus sheets as a photosensitive layer and a conductive channel layer, is supplemented with electrodes and protective insulating media and is added with peripheral circuits, and pixels of the polarization imaging detector of the detector unit array correspond to pixels of the polarization imaging detector one by one

The phase delay caused by the black phosphor can be expressed as

Further, the incident and emergent Stokes of each layer can be shownProcess of conversion of the Gaussian vector, incident light S₀＝(I,Q,U,0)^TThe transformation through the first layer of black phosphorus can be expressed as

S₁＝M_Δ,0S₀＝(I',Q',U',0)^T

Wherein, I ' is the unpolarized light intensity after passing through the first layer of black phosphorus, and Q ' and U ' are linearly polarized light respectively representing two directions after passing through the first layer of black phosphorus;

similarly, the transformation of the second layer may be expressed as

S₂＝M_Δ,60S₁＝M_Δ,60M_Δ,0S₀＝(I”,Q”,U”,0)^T

As shown in fig. 1, the present invention integrates a plurality of polarization detection units in an array on a quartz glass substrate. As shown in FIG. 2, each detection unit has a structure of three layers of black phosphor polarization absorption structures with different angles, which are made by stacking multiple layers of transparent black phosphors. Three layers of 38-nanometer black phosphorus sheets with different angles are vertically arranged on the quartz glass substrate 10, the included angles of the black phosphorus sheets are respectively 0 degree, 60 degrees and 120 degrees, the detection wavelength is 400 nanometers, the dielectric layer is silicon dioxide, and the thicknesses of the black phosphorus sheets are 91 nanometers, 258 nanometers and 283 nanometers from top to bottom in sequence. On the basis, the current variation is obtained by combining a detection circuit, and then the light intensity value is calculated, and further the polarization information is solved. As shown in fig. 3, it is depicted that in this configuration, the absorption intensity values of the respective layers of the detection unit vary with the angle of the incident light. The curve described by the rectangle is the light intensity value absorbed by the first layer of black phosphorus, the curve described by the circular frame is the light intensity value absorbed by the second layer of black phosphorus, and the curve described by the triangular frame is the light intensity value absorbed by the third layer of black phosphorus.

The above description is only a preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and those skilled in the art can easily conceive of changes or substitutions within the technical scope of the present invention. The protection scope of the present invention shall be subject to the protection scope of the claims.

Claims

1. An integrated array polarization imaging detector stacked with multilayer transparent black phosphorus sheets, wherein the detector detection unit structure comprises a metal electrode pair (1), a top protective layer (2), a top 0° black phosphorus sheet (3), Dielectric layer one (4), intermediate layer metal electrode pair (5), intermediate layer 60° black phosphorus sheet (6), dielectric layer two (7), bottom metal electrode pair (8), bottom layer 120° black phosphorus sheet (9) ) and a bottom support layer (10), characterized in that:

The detection unit of the polarization imaging detector is observed from top to bottom, and the top protective layer (2), the top metal electrode pair (1), and the top 0° black phosphorus sheet (3) are formed on the top 0° black phosphorus sheet in order. , dielectric layer one (4), intermediate layer metal electrode pair (5) made on the intermediate layer 60° black phosphorus sheet, intermediate layer 60° black phosphorus sheet (6), dielectric layer two (7), made on the bottom layer 120° Bottom metal electrode pair (8), bottom 120° black phosphorus sheet (9) and bottom support layer (10) on the black phosphorus sheet.

2. The integrated array polarization imaging detector according to claim 1, wherein the top protective layer (2), the first dielectric layer (4), the second dielectric layer (7) and the bottom support layer (10) For silicon dioxide, zinc sulfide, zinc selenide, zinc oxide, yttrium oxide, cerium oxide, niobium oxide, titanium dioxide, titanium pentoxide, titanium dioxide, titanium monoxide, tantalum pentoxide, silicon carbide, silicon nitride An optical film layer; or, a combination of any of the above optical film layers.

3. The integrated array polarization imaging detector according to claim 1, wherein the top metal electrode pair (1), the middle layer metal electrode pair (5) and the bottom metal electrode pair (8) are made of gold, Titanium or chromium electrodes.

4. The integrated array polarization imaging detector according to claim 1, characterized in that the top layer 0° black phosphorus sheet (3), the middle layer 60° black phosphorus sheet (6) and the bottom layer 120° black phosphorus sheet (9) refers to the 0° direction of the XY plane of the space coordinate system with the AC direction of the top black phosphorus sheet as the 0° direction of the XY plane of the space coordinate system, and the middle layer and the bottom black phosphorus sheet are equivalent to placing the black phosphorus at 60° and 120° of the XY plane of the space coordinate system in the AC direction of the sheet direction.

5. The integrated array polarization imaging detector according to claim 1, wherein the top layer 0° black phosphorus sheet (3), the middle layer 60° black phosphorus sheet (6) and the bottom layer 120° black phosphorus sheet (9) The thickness is 5-60 nm.

6 . The integrated array polarization imaging detector according to claim 1 , wherein the detector unit is composed of three functional layers and a substrate support layer, and the functional layer structure uses a transparent black phosphorus sheet as the photosensitive layer and the conductive channel. 7 . layer, supplemented by electrodes and protective insulating medium, and with peripheral circuits, the pixels of the polarized imaging detector of the detector unit array correspond one by one.

7. A corresponding polarization information calculation method of the integrated array polarization imaging detector according to any one of claims 1-6, characterized in that, the information operation steps measured for the detector are as follows:

Assume that the Stokes vector of the incident light is S ₀ =(I,Q,U,V) ^T , where I is the unpolarized light intensity, Q and U represent the linearly polarized light in the two directions, and V represents the circularly polarized light Light, the circularly polarized component is ignored within the range that the instrument can detect, so take V=0 here, that is, S ₀ =(I,Q,U,0) ^T ;

The AC(X) direction of the first layer of black phosphorus is set to be the 0° direction in the XY plane in the spatial coordinate system, the AC(X) direction of the second layer of black phosphorus is set to the 60° direction in the XY plane, and the third layer of black phosphorus is set to the 0° direction in the XY plane. The AC(X) direction of phosphorus is set to the 120° direction in the XY plane;

The phase delay caused by the black phosphorus sheet can be expressed as

Here, d represents the thickness of the black phosphorus sheet, n represents the real part of the complex refractive index, and λ represents the wavelength of the incident light;

Assuming that P ₁ and P ₂ are the amplitude transmittances in the AC(X) and ZZ(Y) directions, respectively, the Miller matrix of the black phosphorus sheet can be expressed as

Furthermore, the black phosphorus sheet rotated by the angle θ can be expressed as M _{Δ, θ} =T _θ ·M _{Δ, 0} ·T _-θ using the Miller matrix

Furthermore, the transformation process of the incoming and outgoing Stokes vectors of each layer can be expressed. The transformation of the incident light S ₀ =(I,Q,U,0) ^T through the first layer of black phosphorus can be expressed as

S ₁ =M _Δ,0 S ₀ =(I',Q',U',0) ^T

Among them, I' is the unpolarized light intensity after passing through the first layer of black phosphorus, Q' and U' are the linearly polarized light in two directions after passing through the first layer of black phosphorus respectively;

Similarly, the transformation of the second layer can be expressed as

S ₂ =M _Δ,60 S ₁ =M _Δ,60 M _Δ,0 S ₀ =(I”,Q”,U”,0) ^T

Wherein, I" is the unpolarized light intensity after passing through the second layer of black phosphorus, and Q" and U" are the linearly polarized light in two directions after passing through the second layer of black phosphorus respectively;

The current variation collected by each layer of the detector can calculate the light intensity value corresponding to the black phosphorus sheet at different angles, and according to the

The four parameters I, Q and U of the Stokes vector of the incident light can be obtained, and the degree of linear polarization (DoLP) and the angle of polarization (AoP) of the polarized light can be obtained at the same time