CN112160013B

CN112160013B - Anode box, anode box assembly and horizontal electroplating device

Info

Publication number: CN112160013B
Application number: CN202011033281.2A
Authority: CN
Inventors: 李建中; 尚庆雷; 肖体红
Original assignee: Kunshan Dongwei Technology Co Ltd
Current assignee: Kunshan Dongwei Technology Co Ltd
Priority date: 2020-09-27
Filing date: 2020-09-27
Publication date: 2025-07-08
Anticipated expiration: 2040-09-27
Also published as: CN112160013A

Abstract

The invention provides an anode box, an anode box assembly and a horizontal electroplating device, which comprise a main body and a diaphragm, wherein the main body is of a frame structure, a containing cavity is formed by enclosing the frame, an anode piece is suitable for being placed in the containing cavity, a plurality of first through holes are densely distributed on the diaphragm, the diaphragm is arranged on one side of the frame structure of the main body, and at least one side surface of the diaphragm, which is opposite to the anode piece, is a curved surface which is concave towards the anode piece. The anode box is placed below a workpiece to be treated in the electroplating bath body, the diaphragm is positioned between the lower surface of the workpiece to be treated and the anode piece, and as the surface of one side of the diaphragm, which faces the lower surface of the workpiece to be treated, is a curved surface, bubbles generated by the reaction of the anode piece in the electroplating solution are transferred from a concave area of the curved surface to the highest point of the curved surface along the surface of the diaphragm after rising to the surface of the diaphragm, no bubbles exist in the concave area of the curved surface, the workpiece to be treated, which faces the concave area, cannot be influenced by the bubbles, and the uniformity and stability of electroplating are ensured.

Description

Anode box, anode box assembly and horizontal electroplating device

Technical Field

The invention relates to the technical field of electroplating, in particular to an anode box, an anode box assembly and a horizontal electroplating device.

Background

In the existing horizontal electroplating line, a plate to be plated horizontally moves in an electroplating bath, anode pieces are respectively arranged at the upper side and the lower side of the plate at intervals, in order to ensure that the interval distance between the anode pieces and the plate surface of the plate to be plated is the same, the anode pieces are titanium mesh plates, the titanium mesh plates are horizontally placed in an anode box, anode diaphragms are arranged between the titanium mesh plates and the plate to be plated, through holes are densely distributed on the anode diaphragms, and current and positive ions can pass through conveniently.

In the electroplating process, hydrogen gas is separated out from the surface of the titanium mesh plate below the plate to be plated, hydrogen bubbles are formed in the electroplating liquid, float upwards and are attached to the surface of the anode diaphragm, the bubbles slowly become large along with the time, the current in the electroplating liquid is easily dispersed due to the existence of the hydrogen bubbles, and the electric lines are uneven, so that the electroplating is uneven.

In addition, the bubbles become larger gradually, the buoyancy of the bubbles is also increased, so that the bubbles are separated from the surface of the anode diaphragm to float upwards, the floating hydrogen bubbles easily strike the plate to be plated, the plate shakes, the bubbles are collected on the lower surface of the plate, and the uniformity of electroplating is affected.

When bubbles are broken, hydrogen enters the surface of the plate to be plated in the electroplating process, hydrogen embrittlement is easy to cause, namely, trace hydrogen entering the surface of the plate to be plated causes embrittlement and even cracking of the material under the action of internal residual or external stress, and the electroplating quality of the plate is seriously affected.

Disclosure of Invention

Therefore, the technical problem to be solved by the invention is to overcome the defect that bubbles generated in the electroplating process of the lower anode piece in the prior art affect the electroplating quality.

To this end, the invention proposes an anode cartridge comprising:

The main body is in a frame structure, and the frame is enclosed to form a containing cavity, wherein the containing cavity is suitable for containing the anode piece;

And the diaphragm is densely provided with a plurality of first through holes and is arranged on one side of the frame structure of the main body, and at least one side surface of the diaphragm, which is opposite to the anode piece, is in a curved surface recessed towards the anode piece.

The projection of the surface of one side of the diaphragm, which is opposite to the anode piece, on a plane perpendicular to the running direction of the workpiece to be processed is a flat curve which is in a C shape as a whole.

The projection of the main body on a plane perpendicular to the running direction of the workpiece to be processed is an axisymmetric graph;

The surface of one side of the diaphragm, which is opposite to the anode piece, is in a minor arc shape which is recessed from two symmetrical ends of the frame structure of the main body to the middle.

The whole thickness of the diaphragm is uniform.

Further comprises:

At least one reinforcing rib is arranged along the surface of the diaphragm and fixedly connected to the main body and the diaphragm.

Further comprises:

the runner pipe is arranged in the accommodating cavity;

one end of the flow pipe is communicated with the infusion device and is suitable for introducing turbulent flow liquid into the flow pipe.

And a plurality of second through holes are densely distributed on the pipe wall of the flow pipe.

The other end of the flow pipe is communicated with the suction device.

The flow pipe extends along the direction perpendicular to the running direction of the workpiece to be processed, and two ends of the flow pipe are respectively fixed at two ends of the main body.

The wall of the flow tube is abutted against the lower surface of the diaphragm.

The flow pipe is arranged at the middle position of the diaphragm.

The side wall of the flow pipe is provided with a notch towards the diaphragm, and the edge of the notch is propped against the surface of one side of the diaphragm towards the anode part;

the other end of the flow pipe is communicated with the suction device.

Further comprises:

And the defoaming structure is formed on the surface of the diaphragm, which is opposite to the accommodating cavity, and is positioned at two ends of the diaphragm in the running direction perpendicular to the workpiece to be treated.

The defoaming structure is a plurality of pieces or thorns convexly arranged on the diaphragm.

The anode part is arranged in the accommodating cavity, and the anode part is arranged in the accommodating cavity.

The invention provides an anode box assembly, which comprises at least one anode box and at least one anode piece, wherein the anode piece is placed in a containing cavity of the anode box.

The invention provides a horizontal electroplating device which comprises at least one anode box.

The technical scheme of the invention has the following advantages:

1. The invention provides an anode box, which comprises a main body and a diaphragm, wherein the main body is of a frame structure, a containing cavity is formed by enclosing the frame, an anode piece is suitable for being placed in the containing cavity, a plurality of first through holes are densely distributed on the diaphragm, the diaphragm is arranged on one side of the frame structure of the main body, and at least one side surface of the diaphragm, which is opposite to the anode piece, is a curved surface which is concave towards the anode piece. The anode box is placed below a workpiece to be treated in the electroplating bath body, the diaphragm is positioned between the lower surface of the workpiece to be treated and the anode piece, and as the surface of one side of the diaphragm, which faces the lower surface of the workpiece to be treated, is a curved surface, bubbles generated by the reaction of the anode piece in the electroplating solution are transferred from a concave area of the curved surface to the highest point of the curved surface along the surface of the diaphragm after rising to the surface of the diaphragm, no bubbles exist in the concave area of the curved surface, the workpiece to be treated, which faces the concave area, cannot be influenced by the bubbles, and the uniformity and stability of electroplating are ensured.

2. According to the anode box provided by the invention, the projection of the surface of one side of the diaphragm, which is opposite to the anode piece, on the plane perpendicular to the running direction of the workpiece to be processed is a flat curve which is integrally C-shaped, namely, each part of the curved surface of the side of the diaphragm is smoothly transited, and the situation that peaks and valleys alternate does not exist, so that bubbles in the curved surface are transferred to one end or two ends of the C shape along the surface of the diaphragm.

3. According to the anode box provided by the invention, the main body is in an axisymmetric structure, the curved surface of the diaphragm is in a bad arc shape recessed from the two symmetrical ends of the frame structure to the middle, in the electroplating process, the workpiece to be treated is horizontally placed, and the symmetric structure enables the anode box to be symmetrically distributed relative to the position of the workpiece to be treated, so that the anode box is more beneficial to controlling local changes such as current and the like.

4. According to the anode box provided by the invention, the thickness of the whole diaphragm is uniform, so that the effect of enabling bubbles to climb and transfer along a curved surface can be generated on the upper surface and the lower surface of the diaphragm.

5. According to the anode box provided by the invention, the flow tube is arranged in the accommodating cavity, one end of the flow tube is communicated with the infusion device, the electroplating liquid or other turbulent liquid which does not affect the components of the electroplating liquid is conveyed into the flow tube through the infusion device, the flowing liquid enters the electroplating liquid which is almost static in the groove body, and the overall fluctuation of the electroplating liquid can be disturbed, so that bubbles transferred to the two ends of the diaphragm are carried away from the diaphragm to cause the diaphragm to be broken, or the bubbles are caused to be broken by viscous force between layers of the fluid.

6. According to the anode box provided by the invention, the defoaming structures are arranged at the two ends of the diaphragm and comprise the plurality of pieces or the thorns protruding on the surface of the diaphragm, so that the bubbles collide with the pieces or the thorns to be broken when climbing along a curved surface and transferring to the two ends.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings that are needed in the description of the embodiments or the prior art will be briefly described, and it is obvious that the drawings in the description below are some embodiments of the present invention, and other drawings can be obtained according to the drawings without inventive effort for a person skilled in the art.

FIG. 1 is a schematic view of the structure of an anode cartridge of the present invention;

FIG. 2 is a schematic exploded view of the anode cartridge of the present invention;

FIG. 3 is a side view of the anode cartridge of the present invention;

FIG. 4 is a schematic view of a part of the anode box according to the present invention;

Fig. 5 is a schematic diagram showing a partial structure of an anode cartridge according to the present invention.

Reference numerals illustrate:

1. a main body; 11 parts of accommodating cavity, 2 parts of diaphragm, 3 parts of reinforcing rib, 4 parts of runner pipe, 41 parts of opening, 5 parts of guide structure, 6 parts of anode part, 7 parts of copper strip.

Detailed Description

The following description of the embodiments of the present invention will be made apparent and fully in view of the accompanying drawings, in which some, but not all embodiments of the invention are shown. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.

In the description of the present invention, it should be noted that the directions or positional relationships indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. are based on the directions or positional relationships shown in the drawings, are merely for convenience of describing the present invention and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

In the description of the present invention, unless explicitly stated or limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected, mechanically connected, electrically connected, directly connected, indirectly connected via an intervening medium, or in communication between two elements. The specific meaning of the above terms in the present invention will be understood in specific cases by those of ordinary skill in the art.

In addition, the technical features of the different embodiments of the present invention described below may be combined with each other as long as they do not collide with each other.

Example 1

The present embodiment provides an anode box, as shown in fig. 1, including a main body 1 and a diaphragm 2, where the main body 1 is in a frame structure, and in this embodiment, the cross section of the frame structure is rectangular. The frame encloses and forms a containing cavity 11, and the anode member 6 is placed in the containing cavity 11, in this embodiment, as shown in fig. 2, the anode member 6 is in a square flat plate structure, and is adapted to the rectangular structure of the frame.

In the use process, the anode box is horizontally placed below a workpiece to be treated, the workpiece to be treated is in a plate shape, is horizontally placed in the electroplating tank body, and is driven by the driving device to linearly move in the horizontal direction. The workpiece to be treated and the anode box are immersed in the electroplating solution.

The diaphragm 2 is disposed between the anode member 6 and the workpiece to be processed, and a plurality of first through holes (not shown in the figure) are densely distributed on the diaphragm 2, as shown in fig. 3, the diaphragm 2 is disposed on one side of the frame structure of the main body 1, which faces the workpiece to be processed, in this embodiment, the overall thickness of the diaphragm 2 is uniform, and one side surface of the diaphragm 2, which faces the lower surface of the workpiece to be processed, is a curved surface, so that after the bubbles generated by the reaction of the anode member 6 in the electroplating solution rise to the upper surface of the diaphragm 2, the bubbles gradually increase along with the progress of the electroplating reaction and the time, and the buoyancy received at the same time gradually increases but is insufficient to make the bubbles instantaneously separate from the surface of the diaphragm 2, and in the process that the bubbles are transferred from the concave area of the curved surface to the highest point of the curved surface along the surface of the diaphragm 2, no bubbles exist in the concave area, and the workpiece to be processed, which faces the concave area, cannot be affected by the bubbles, thereby ensuring the uniformity and stability of electroplating.

The projection of the surface of one side of the diaphragm 2 facing the workpiece to be processed on the plane perpendicular to the running direction of the workpiece to be processed is a flat curve which is in a C shape as a whole, namely, the parts of the curved surface of the side of the diaphragm 2 are in smooth transition, and the situation that peaks and valleys alternate does not exist, so that bubbles in the curved surface are all transferred to one end or two ends of the C shape along the surface of the diaphragm 2. In this embodiment, as shown in fig. 3, the main body 1 has an axisymmetric structure, and the curved surface of the diaphragm 2 has a bad arc shape recessed from two symmetrical ends to the middle of the frame structure, in the electroplating process, the workpiece to be processed is horizontally placed, and the symmetric structure enables the anode box to be symmetrically distributed relative to the position of the workpiece to be processed, which is more beneficial to controlling local changes such as current. The whole thickness of the diaphragm 2 is uniform, so that bubbles can climb and transfer to two ends along the curved surface on the upper surface and the lower surface of the diaphragm 2. In this embodiment, as shown in fig. 1, two reinforcing ribs 3 are provided on the upper surface of the diaphragm 2 at uniform intervals, the reinforcing ribs 3 are provided along the surface of the diaphragm 2, and the main body 1 and the diaphragm 2 are fixedly connected.

As shown in fig. 1 or fig. 2, a flow tube 4 is disposed in the accommodating cavity 11, one end of the flow tube 4 is connected with a transfusion device (not shown in the drawings), the flow tube 4 is used for conveying electroplating solution or other turbulent liquid which does not affect the composition of the electroplating solution, the flowing liquid enters the electroplating solution in a tank body and is almost static, and the overall fluctuation of the electroplating solution can be disturbed, so that bubbles transferred to two ends of the diaphragm 2 are carried away from the diaphragm 2 to be broken, or the bubbles are subjected to viscous force between layers of the fluid to be broken. Further, a plurality of second through holes may be densely arranged on the pipe wall of the flow pipe 4, so that part of turbulent liquid entering the flow pipe 4 flows out of the second through holes, thereby achieving the purpose of disturbing the plating solution.

In this embodiment, as shown in fig. 2, the flow tube 4 is disposed in the middle of the diaphragm 2, and extends from one end of the main body 1 to the other end along the direction perpendicular to the running direction of the workpiece to be processed, as shown in fig. 4, a notch 41 is formed on the side wall of the flow tube 4, and the edge of the notch 41 abuts against the lower surface of the diaphragm 2, one end of the flow tube 4 is communicated with the infusion device, and the other end is communicated with the suction device.

In this embodiment, as shown in fig. 2, three anode pieces 6 are disposed in parallel in the accommodating cavity 11 in a horizontal direction, and correspond to the middle section and two ends of the diaphragm 2 respectively, the anode pieces 6 are titanium nets, as shown in fig. 2, three rectifying areas A, B and C are disposed in parallel in a direction perpendicular to the running direction of the workpiece to be processed in the anode box, each titanium net corresponds to one rectifying area, each titanium net is connected to the copper bar 7 through a metal connecting piece and is connected with electricity through the copper bar 7, the current sizes of the rectifying areas a and C at the two ends are the same, and the current sizes of the rectifying areas B at the middle are different from the two ends so as to adapt to the wide large-width workpiece to be processed.

As shown in fig. 5, correspondingly, the accommodating cavity 11 of the main body 1 is provided with guide structures 5 corresponding to three titanium nets, the guide structures 5 are conventional groove guide structures 5, namely two opposite sides of each titanium net are respectively inserted into corresponding guide grooves, and each titanium net slides into the accommodating cavity 11 along the guide grooves on two sides.

As a first alternative embodiment of example 1, the thickness of the diaphragm 2 may be uneven, ensuring that the surface facing the workpiece to be treated is curved.

Example 2

Compared with the technical scheme in the embodiment 1, the anode box is different in that defoaming structures are respectively arranged at the two ends of the diaphragm 2, each defoaming structure comprises a plurality of sheets or thorns protruding on the surface of the diaphragm 2, so that bubbles collide with the sheets or thorns to be broken when climbing along a curved surface to be transferred to the two ends, and furthermore, a flow pipe 4 can be omitted, namely, no extra disturbance is performed on electroplating liquid.

Example 3

The present embodiment provides an anode cartridge assembly including at least one anode cartridge of embodiment 1 or embodiment 2 and at least one anode member 6, the anode member 6 being placed in the housing chamber 11 of the anode cartridge.

Example 4

The present embodiment provides a horizontal plating apparatus including at least one anode cartridge of embodiment 1 or embodiment 2.

It is apparent that the above examples are given by way of illustration only and are not limiting of the embodiments. Other variations or modifications of the above teachings will be apparent to those of ordinary skill in the art. It is not necessary here nor is it exhaustive of all embodiments. While still being apparent from variations or modifications that may be made by those skilled in the art are within the scope of the invention.

Claims

1. An anode box, comprising:

The main body (1) is in a frame structure, and the frame encloses a receiving cavity (11); the receiving cavity (11) is suitable for placing the anode component (6);

A diaphragm (2) having a plurality of first through holes densely distributed thereon and arranged on one side of the frame structure of the main body (1); at least one side of the diaphragm (2) facing away from the anode member (6) is a curved surface that is concave toward the anode member (6);

A circulation pipe (4) is arranged in the accommodating chamber (11);

One end of the circulation tube (4) is connected to the infusion device and is suitable for introducing turbulent liquid into the circulation tube (4);

A notch (41) is provided on the side wall of the flow tube (4) towards the diaphragm (2); the edge of the notch (41) abuts against a surface of one side of the diaphragm (2) facing the anode member (6);

The other end of the circulation pipe (4) is connected to the suction device;

The circulation pipe (4) is extended in a direction perpendicular to the running direction of the workpiece to be processed, and two ends thereof are respectively fixed to two ends of the main body (1);

The defoaming structure is formed on the surface of the diaphragm (2) facing away from the accommodating cavity (11), and is located at two ends of the diaphragm (2) perpendicular to the running direction of the workpiece to be processed.

2. The anode box according to claim 1 is characterized in that the projection of the surface of the side of the diaphragm (2) facing away from the anode member (6) on a plane perpendicular to the running direction of the workpiece to be processed is a flat curve that is overall C-shaped.

3. The anode box according to claim 2, characterized in that the projection of the main body (1) on a plane perpendicular to the running direction of the workpiece to be processed is an axisymmetric figure;

The surface of one side of the diaphragm (2) facing away from the anode member (6) is in the shape of a minor arc that is concave from two symmetrical ends on the frame structure of the main body (1) toward the middle.

4. The anode box according to claim 3, characterized in that the entire thickness of the diaphragm (2) is uniform.

5. The anode box according to claim 1, further comprising:

At least one reinforcing rib (3) is arranged along the surface of the diaphragm (2) and is fixedly connected to the main body (1) and the diaphragm (2).

6. The anode box according to claim 1, characterized in that a plurality of second through holes are densely distributed on the tube wall of the flow tube (4).

7. The anode box according to claim 6, characterized in that the other end of the flow tube (4) is connected to a suction device.

8. The anode box according to claim 1, characterized in that the tube wall of the flow tube (4) abuts against the lower surface of the diaphragm (2).

9. The anode box according to claim 8, characterized in that the flow tube (4) is arranged in the middle position of the diaphragm (2).

10. The anode box according to claim 1, characterized in that the defoaming structure is a plurality of sheets or thorns protruding on the diaphragm (2).

11. The anode box according to any one of claims 1 to 5, characterized in that it also comprises a guiding structure (5) disposed in the accommodating cavity (11) and suitable for guiding the anode member (6) into the accommodating cavity (11).

12. An anode box assembly, characterized in that it comprises at least one anode box according to any one of claims 1 to 11 and at least one anode member (6); the anode member (6) is placed in a receiving cavity (11) of the anode box.

13. A horizontal electroplating device, characterized in that it comprises at least one anode box according to any one of claims 1-11.