CN112216581A - A radio frequency ion energizing device using a hot cathode to generate neutralizing electrons - Google Patents
A radio frequency ion energizing device using a hot cathode to generate neutralizing electrons Download PDFInfo
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- CN112216581A CN112216581A CN202011204368.1A CN202011204368A CN112216581A CN 112216581 A CN112216581 A CN 112216581A CN 202011204368 A CN202011204368 A CN 202011204368A CN 112216581 A CN112216581 A CN 112216581A
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- 230000003472 neutralizing effect Effects 0.000 title claims abstract description 15
- 239000002184 metal Substances 0.000 claims abstract description 16
- 230000005611 electricity Effects 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 abstract description 4
- 238000010884 ion-beam technique Methods 0.000 abstract description 3
- 230000000977 initiatory effect Effects 0.000 abstract 1
- 150000002500 ions Chemical class 0.000 description 13
- 230000005540 biological transmission Effects 0.000 description 4
- 238000006386 neutralization reaction Methods 0.000 description 4
- 239000004020 conductor Substances 0.000 description 3
- 230000005684 electric field Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005672 electromagnetic field Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000005433 ionosphere Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J27/00—Ion beam tubes
- H01J27/02—Ion sources; Ion guns
- H01J27/16—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J27/00—Ion beam tubes
- H01J27/02—Ion sources; Ion guns
- H01J27/022—Details
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- Chemical & Material Sciences (AREA)
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- Combustion & Propulsion (AREA)
- Electron Sources, Ion Sources (AREA)
Abstract
本发明公开了一种利用热阴极产生中和电子的射频离子赋能装置，包括栅极系统、气体隔离器、放电室、金属外壳、交流电源、偏置电源和阴极灯丝，放电室的外侧安装有第一线圈，放电室的一侧底部安装有气体隔离器，放电室的底部安装有第二线圈，第一线圈和第二线圈可根据不同设计情况进行调整，放电室的外侧安装有金属外壳，第二电源通过导线将正电压加载在第一栅极上，第一电源通过导线将负电压加载在第二栅极上，偏置电源将负电压加载在阴极灯丝，通过交流电源供电加热灯丝。该装置可以快速的获得本初启辉电子和中和电子流，提高设备的生产效率；并且可以以比较低的设备成本达到相同性能的离子束输出。
The invention discloses a radio frequency ion energizing device which utilizes a hot cathode to generate neutralizing electrons. There is a first coil, a gas isolator is installed at the bottom of one side of the discharge chamber, and a second coil is installed at the bottom of the discharge chamber. The first coil and the second coil can be adjusted according to different design conditions, and a metal shell is installed on the outside of the discharge chamber. , the second power supply loads the positive voltage on the first grid through the wire, the first power supply loads the negative voltage on the second grid through the wire, the bias power supply loads the negative voltage on the cathode filament, and the filament is heated by the AC power supply . The device can quickly obtain the initial initiation electrons and neutralizing electron currents, thereby improving the production efficiency of the equipment; and can achieve the same performance of the ion beam output at a relatively low equipment cost.
Description
Technical Field
The invention relates to the technical field of radio frequency ionization, in particular to a radio frequency ion energizing device for generating neutralizing electrons by utilizing a hot cathode.
Background
In the theory of electronics, current flows through a conductor, and a magnetic field is formed around the conductor; an alternating current passes through a conductor, around which an alternating electromagnetic field, called an electromagnetic wave, is formed. When the frequency of the electromagnetic waves is lower than 100kHz, the electromagnetic waves can be absorbed by the ground surface and cannot form effective transmission, but when the frequency of the electromagnetic waves is higher than 100kHz, the electromagnetic waves can be transmitted in the air and reflected by an ionosphere at the outer edge of the atmosphere to form long-distance transmission capability. We refer to high frequency electromagnetic waves with long range transmission capabilities as radio frequencies. Radio frequency technology is widely used in the field of wireless communication, and cable television systems adopt a radio frequency transmission mode. In the prior art, neutralizing electrons are generated by a radio frequency ionization technology, and the production efficiency is influenced because the radio frequency ionization technology has the problems of difficult glow starting, long glow starting time and the like in the ionization ignition process; and the cost of the radio frequency neutralization system is high.
Disclosure of Invention
The present invention is directed to overcoming the above-mentioned problems in the art by providing an rf ion energizer that utilizes a hot cathode to generate neutralizing electrons.
In order to achieve the purpose, the invention provides the following technical scheme: the utility model provides an utilize hot cathode to produce radio frequency ion energizing device of neutralization electron, includes grid system, first coil, second coil, gas isolator, discharge chamber, metal casing, first power, second power, alternating current power supply, bias power supply and negative pole filament, first coil is installed in the outside of discharge chamber, gas isolator is installed to one side bottom of discharge chamber, the second coil is installed to the bottom of discharge chamber, metal casing is installed in the outside of discharge chamber, and the second power passes through the wire and loads the positive voltage on first grid, and the first power passes through the wire and loads negative voltage on the second grid, and third grid ground connection, bias power supply load the negative voltage on the negative pole filament, alternating current power supply passes through the wire and loads the electric energy to the filament.
As a preferable technical solution of the present invention, the discharge chamber, the first coil and the second coil are all installed inside a metal housing.
As a preferred embodiment of the present invention, the first coil and the second coil may be separately installed to form a radio frequency coil, the discharge chamber is connected to the metal housing through a gas isolator, and the working gas is supplied into the discharge chamber through the gas isolator.
As a preferred technical solution of the present invention, the first power supply, the second power supply, and the bias power supply are all connected to a ground line.
The invention has the beneficial effects that: the device can rapidly obtain the initial starting electron and the neutralizing electron flow, and improve the production efficiency of equipment; and ion beam output of the same performance can be achieved at a relatively low equipment cost.
Drawings
FIG. 1 is a block diagram of the present invention.
In the figure: 1. grid system, 101, first grid, 102, second grid, 103, third grid, 2, first coil, 3, second coil, 4, gas isolator, 5, discharge chamber, 6, metal casing, 701, first power supply, 702, second power supply, 8, alternating current power supply, 9, bias power supply, 10, cathode filament.
Detailed Description
The following detailed description of the preferred embodiments of the present invention, taken in conjunction with the accompanying drawings, will make the advantages and features of the invention more readily understood by those skilled in the art, and thus will more clearly and distinctly define the scope of the invention.
Example (b): referring to fig. 1, the present invention provides a technical solution: a radio frequency ion energizing device for generating neutralizing electrons by utilizing a hot cathode comprises a grid system 1, a first coil 2, a second coil 3, a gas isolator 4, a discharge chamber 5, a metal shell 6, a first power supply 701, a second power supply 702, an alternating current power supply 8, a bias power supply 9 and a cathode filament 10, wherein the first coil 2 is installed on the outer side of the discharge chamber 5, the gas isolator 4 is installed at the bottom of one side of the discharge chamber 5, the second coil 3 is installed at the bottom of the discharge chamber 5, the metal shell 6 is installed on the outer side of the discharge chamber 5, positive voltage is loaded on a first grid 101 by the second power supply 702 through a lead, negative voltage is loaded on a second grid 102 by the first power supply 701 through a lead, a third grid 103 is grounded, the negative voltage is loaded on the cathode filament 10 by the bias power supply 9, and electric energy is loaded on the filament by the alternating current power supply 8.
The discharge chamber 5, the first coil 2 and the second coil 3 are all mounted inside a metal housing 6.
The first coil 2 and the second coil 3 may be separately installed together to constitute a radio frequency coil, and the discharge chamber 5 is connected to the metal casing 6 through a gas separator 4 and a working gas is supplied into the discharge chamber through the gas separator.
The first power supply 701, the second power supply 702, and the bias power supply 9 are all connected to ground.
The working principle is as follows: a radio frequency ion energizing device for generating neutralizing electrons by utilizing a hot cathode comprises a grid system 1, a first coil 2, a second coil 3, a gas isolator 4, a discharge chamber 5, a metal shell 6, a first power supply 701, a second power supply 702, an alternating current power supply 8, a bias power supply 9 and a cathode filament 10, and the device is an ion emitting system for generating neutral high-energy particles; the system consists of a high-energy positive ion emission system and a neutralization electron emission system; the neutralization electron emission system heats the hot cathode filament 10 (heating current is 5-200A) through the alternating current power supply 8, so that the hot cathode filament 10 can reach a state of emitting electrons, and the hot cathode filament emits low-speed electron current outwards under the drive of the bias voltage of the bias power supply 9 (the electron current can be adjusted between 0-20A under the control of changing the alternating current power supply 8 and the bias power supply 9); in the radio-frequency high-energy positive ion emission system, radio-frequency power is modulated by a radio-frequency matcher and then loaded on an emission antenna formed by combining a first coil 2 and a second coil 3, so that working gas transmitted into a discharge chamber 5 through a gas isolator 4 is ionized to form discharge plasma;
the plasma leads out positive ions through an electric field under the action of a direct current electric field loaded on the grid system 1 to form a high-energy positive ion flow; the first power source 701 and the second power source 702 act simultaneously to form an electric field that is loaded on the gate system; the first coil 2 and the second coil 3 in the high-energy positive ion emission system can be used independently or simultaneously to act in a radio frequency system; the radio frequency high-energy positive ion emission system forms shielding and supports the system through the metal shell 6; the device can rapidly obtain the initial starting electron and the neutralizing electron flow, and improve the production efficiency of equipment; and ion beam output of the same performance can be achieved at a relatively low equipment cost.
The above examples only show some embodiments of the present invention, and the description thereof is more specific and detailed, but not construed as limiting the scope of the invention. It should be noted that, for a person skilled in the art, several variations and modifications can be made without departing from the inventive concept, which falls within the scope of the present invention.
Claims (4)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011204368.1A CN112216581A (en) | 2020-11-02 | 2020-11-02 | A radio frequency ion energizing device using a hot cathode to generate neutralizing electrons |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011204368.1A CN112216581A (en) | 2020-11-02 | 2020-11-02 | A radio frequency ion energizing device using a hot cathode to generate neutralizing electrons |
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| CN202011204368.1A Pending CN112216581A (en) | 2020-11-02 | 2020-11-02 | A radio frequency ion energizing device using a hot cathode to generate neutralizing electrons |
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20020025681A1 (en) * | 2000-08-30 | 2002-02-28 | Chi Kyeong-Koo | Semiconductor etching apparatus and method of etching semiconductor devices using same |
| RU2017115687A (en) * | 2017-05-04 | 2018-11-06 | Таэ Текнолоджиз, Инк. | NEUTRAL BEAM INJECTOR BASED ON NEGATIVE IONS |
| CN109979794A (en) * | 2017-12-27 | 2019-07-05 | 核工业西南物理研究院 | A kind of radio frequency induction coupled plasma averager |
| CN111385956A (en) * | 2020-03-09 | 2020-07-07 | 电子科技大学 | A radio frequency particle source |
| CN213026042U (en) * | 2020-11-02 | 2021-04-20 | 常州鑫立离子技术有限公司 | Radio frequency ion energizing device for generating neutralizing electrons by utilizing hot cathode |
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2020
- 2020-11-02 CN CN202011204368.1A patent/CN112216581A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20020025681A1 (en) * | 2000-08-30 | 2002-02-28 | Chi Kyeong-Koo | Semiconductor etching apparatus and method of etching semiconductor devices using same |
| RU2017115687A (en) * | 2017-05-04 | 2018-11-06 | Таэ Текнолоджиз, Инк. | NEUTRAL BEAM INJECTOR BASED ON NEGATIVE IONS |
| CN109979794A (en) * | 2017-12-27 | 2019-07-05 | 核工业西南物理研究院 | A kind of radio frequency induction coupled plasma averager |
| CN111385956A (en) * | 2020-03-09 | 2020-07-07 | 电子科技大学 | A radio frequency particle source |
| CN213026042U (en) * | 2020-11-02 | 2021-04-20 | 常州鑫立离子技术有限公司 | Radio frequency ion energizing device for generating neutralizing electrons by utilizing hot cathode |
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