CN112430802B - Method and device for cleaning fluorine ions of blades with complex inner cavities and preparing aluminide coatings - Google Patents

Abstract

The invention discloses a method and device for fluoride ion cleaning and aluminide coating preparation of a complex inner cavity blade. The blade inner cavity is cleaned by fluoride ion and aluminide coating is prepared by CVD. The purpose of fluoride ion cleaning in the blade inner cavity is as follows: The oxide layer remaining on the inner cavity wall is removed to provide conditions for the subsequent preparation of the aluminized coating by chemical vapor deposition. The two processes are integrated in the CVD equipment, and there is no need to open the CVD equipment or take out the blades, which not only saves processing time, but also avoids secondary pollution to the blades caused by taking out the blades in the middle. The above method is flexible and controllable, and the prepared aluminum The cleanliness of the chemical coating is high and does not damage the leaves. The above method is especially suitable for chemical vapor deposition of nickel-based single crystal superalloy guide vanes and high-pressure turbine blades with complex inner cavity structures for the preparation of high temperature protective coatings on the inner cavity and surface, and is also suitable for protective coatings for other superalloy parts. layer preparation.

Description

Method and device for fluoride ion cleaning and aluminide coating preparation of complex inner cavity blade

technical field

The invention relates to the technical field of superalloy coatings and their preparation, in particular to a method and a device for fluoride ion cleaning of complex inner cavity blades and preparation of aluminide coatings.

Background technique

Nickel-based high temperature single crystal alloys have excellent high temperature mechanical properties and are currently the main materials for manufacturing advanced aircraft engines and gas turbine blades. Due to the extremely harsh working environment of the engine, the alloy is required not only to have good high temperature mechanical properties, but also to have excellent high temperature oxidation resistance and hot corrosion resistance. However, in practical applications, it is difficult for the same alloy to satisfy multiple properties at the same time. To solve this contradiction, the most effective way is to use high temperature protective coating technology.

In the blade production process, when the ceramic mold shell is removed and the ceramic core is removed from the inner cavity, an oxide film will be formed on the outer surface of the blade and the surface of the inner cavity respectively. The existence of the oxide film will hinder the chemical vapor deposition infiltration. The internal diffusion of aluminum elements in the aluminum process inhibits the formation of aluminide coatings. By blasting the outer surface of the blade, a clean metal surface can be obtained, which meets the requirements of chemical vapor deposition aluminizing pretreatment. The patent with publication number CN104923520A proposes abrasive flow technology, which uses the latest machining process of abrasive medium flowing under pressure to deburr and fillet the surface of the workpiece to be processed, which can reduce surface ripple and roughness and achieve precise processing purpose. For blades with a simple cavity structure, the inner cavity of the blade can be cleaned by abrasive flow technology. However, for blades with complex inner cavity structure (such as double-walled structure), due to the narrow channel and small pores of the turbine blade, the inner cavity cannot be thoroughly cleaned, which will cause the viscous abrasive to remain in it, making it difficult to form the inner cavity. The vapor infiltration layer makes cleaning difficult.

At present, the commonly used aluminizing methods mainly include embedded aluminizing, vapor-phase aluminizing (VPA) and chemical vapor deposition (CVD). The disadvantage of embedded aluminizing is that the embedded powder is easy to sinter at high temperature, blocking the cooling holes, and it is difficult to accurately guide the micro-channel of the blade during aluminizing, and it is difficult to prepare an ideal protective coating in the inner cavity. The disadvantage of gas-phase aluminizing is that although the separation of powder and infiltrated parts is achieved, there are limitations in parameter control. CVD aluminizing can aluminize the inner cavity with complex structure in the blade, and does not require powder, and the growth rate, structure and performance of the coating can be controlled by simultaneously controlling the gas flow under a certain temperature and pressure. Therefore, CVD aluminizing is the cleanest process among the three processes, and is currently the most widely used process.

The patent publication number CN105695929A discloses a preparation method suitable for a protective coating of a blade with a high Mo content and a complex inner cavity structure. The disadvantage of this method is that the blade needs to be taken out of the muffle furnace for reprocessing, and a solid penetration agent is added. The cleaning and coating preparation cannot be integrated, and the muffle furnace needs to be heated and cooled several times. , which increases the overall processing time.

SUMMARY OF THE INVENTION

In view of this, the present invention provides a method and device for fluoride ion cleaning and aluminide coating preparation of complex inner cavity blades, so as to realize the integrated completion of oxide film layer cleaning treatment and aluminide protective coating of complex inner cavity blades preparation.

The invention provides a method for fluoride ion cleaning and aluminide coating preparation of a complex inner cavity blade, comprising the following steps:

S1: place the blade after degreasing cleaning or sandblast cleaning in the reaction chamber of the CVD equipment, and put aluminum blocks of preset quality into the graphite labyrinth in the reaction chamber;

S2: After the reaction chamber is evacuated to a vacuum state, the reaction chamber is filled with argon to atmospheric pressure to complete one cleaning of the blades; repeated cleaning several times;

S3: stop feeding argon gas, continuously fill the reaction chamber with hydrogen gas, keep the air pressure at a preset pressure, heat the reaction chamber from room temperature to a first preset temperature at a preset heating rate, and maintain the temperature for a first preset time period;

S4: After the heat preservation is completed, hydrogen and hydrogen fluoride gas are continuously introduced into the reaction chamber, or hydrogen and freon gas are continuously introduced into the reaction chamber to keep the air pressure at the preset pressure, and the heat preservation is continued for a second preset time period; wherein, the hydrogen and hydrogen fluoride gases are , or hydrogen and freon gas, enter the inner cavity of the blade through the air inlet of the tenon of the blade and flow out from the air film cooling hole, and then flow out from the outlet of the reaction chamber and then pass through the alkaline solution pool and then discharge into the atmosphere;

S5: After the heat preservation is over, stop feeding hydrogen fluoride gas or freon gas to complete the cleaning of fluoride ions in the inner cavity of the blade;

S6: continue to fill the reaction chamber with hydrogen, so that the residual hydrogen fluoride gas or freon gas is discharged from the reaction chamber;

S7: in the state of being continuously charged with hydrogen, the air pressure is maintained at a preset pressure, and the reaction chamber is heated from the first preset temperature to a second preset temperature at a preset heating rate, and maintained for a first preset time period;

S8: After the heat preservation is completed, the hydrogen chloride gas, hydrogen gas and argon gas passing through the preheating pipeline are continuously fed into the reaction chamber, the air pressure is maintained at the preset pressure, and the heat preservation is continued for a third preset time period; wherein, the temperature of the preheating pipeline is the third preheating pipeline. Set the temperature; hydrogen chloride gas, hydrogen gas and argon gas enter the inner cavity of the blade through the air inlet of the tenon of the blade and flow out from the air film cooling hole, and then flow out from the outlet of the reaction chamber and then pass through the alkaline solution pool and then discharge into the atmosphere;

S9: After the heat preservation is completed, stop feeding hydrogen chloride gas and hydrogen gas, and continue feeding argon gas. After the blade is cooled to room temperature with the reaction chamber, stop vacuuming. After the pressure in the reaction chamber rises to atmospheric pressure, stop feeding argon gas and turn on The leaves are taken out and the preparation of the aluminide coating is completed.

In a possible implementation manner, in the above-mentioned method for fluorine ion cleaning and aluminide coating preparation of a complex inner cavity blade provided by the present invention, step S3, stopping the introduction of argon gas, continuously filling the reaction chamber with hydrogen gas, and the pressure Maintaining the preset pressure, heating the reaction chamber from room temperature to a first preset temperature at a preset heating rate, and maintaining the temperature for a first preset time period, specifically including the following steps:

S30: Stop feeding argon gas, continue to charge hydrogen into the reaction chamber, keep the air pressure at 15kPa to 30kPa, heat the reaction chamber from room temperature to 950°C to 1000°C at a heating rate of 10°C/min, and keep the temperature for 1 hour.

In a possible implementation manner, in the above-mentioned method for fluorine ion cleaning and aluminide coating preparation of a complex inner cavity blade provided by the present invention, in step S4, after the heat preservation is completed, hydrogen and hydrogen fluoride gas are continuously introduced into the reaction chamber, Or continuously feed hydrogen and freon gas into the reaction chamber, keep the air pressure at a preset pressure, and continue to keep the temperature for a second preset time, which specifically includes the following steps:

S40: After the heat preservation is completed, hydrogen and hydrogen fluoride gas are continuously introduced into the reaction chamber, or hydrogen and freon gas are continuously introduced into the reaction chamber, so that the air pressure is maintained at 15kPa to 30kPa, and the heat preservation is continued for 1 hour.

In a possible implementation manner, in the above-mentioned method for fluoride ion cleaning and aluminide coating preparation of a complex inner cavity blade provided by the present invention, in step S7, the air pressure is maintained at a preset pressure in the state of continuous filling of hydrogen gas, Heating the reaction chamber from the first preset temperature to a second preset temperature at a preset heating rate, and maintaining the temperature for a first preset time period, specifically includes the following steps:

S70: Under the state of continuous charging of hydrogen, the air pressure is maintained at 15kPa～30kPa, and the reaction chamber is heated from the first preset temperature to 1000°C～1100°C at a heating rate of 10°C/min, and kept for 1 hour.

In a possible implementation manner, in the above-mentioned method for fluoride ion cleaning and aluminide coating preparation of complex inner cavity blades provided by the present invention, in step S8, after the heat preservation is completed, the reaction chamber is continuously fed into the reaction chamber through the preheating pipeline. Hydrogen chloride gas, hydrogen gas and argon gas, the air pressure is maintained at the preset pressure, and the temperature is kept for a third preset time period; wherein, the temperature of the preheating pipeline is the third preset temperature, which specifically includes the following steps:

S80: After the heat preservation is completed, the hydrogen chloride gas, hydrogen gas and argon gas passing through the preheating pipeline are continuously introduced into the reaction chamber, the pressure is maintained at 15kPa～30kPa, and the heat preservation is continued for 1h～3h; wherein, the temperature of the preheating pipeline is 200℃～300℃ .

In a possible implementation manner, in the above-mentioned method for fluorine ion cleaning and aluminide coating preparation of complex inner cavity blades provided by the present invention, the purity of hydrogen gas, argon gas and hydrogen chloride gas are all 99.9%, and the purity of hydrogen fluoride gas or Freon gas is 99.9%. The purity of the gas is 99.9%.

In a possible implementation manner, in the above-mentioned method for fluorine ion cleaning and aluminide coating preparation of complex inner cavity blades provided by the present invention, the flow rate of hydrogen fluoride gas is 0.5L/min～1L/min, and the flow rate of hydrogen gas is the same as that of hydrogen fluoride gas. The ratio of flow is 10:1; or,

The freon gas flow is 0.5L/min～1L/min, and the ratio of hydrogen flow to freon gas flow is 10:1.

In a possible implementation manner, in the above-mentioned method for fluoride ion cleaning and aluminide coating preparation of complex inner cavity blades provided by the present invention, the flow rate of hydrogen chloride gas is 0.5L/min～1L/min;

The ratio of argon flow, hydrogen flow and hydrogen chloride gas flow is 10:10:1.

In a possible implementation manner, in the above-mentioned method for fluoride ion cleaning and aluminide coating preparation of a complex inner cavity blade provided by the present invention, the thickness of the aluminide coating is 20 μm˜50 μm.

The invention also provides a device for fluoride ion cleaning and aluminide coating preparation of a complex inner cavity blade, comprising: a reaction chamber, a graphite labyrinth, a blade tooling, an aluminizing channel, a fluoride ion cleaning channel, a gas generating chamber, a thermocouple and metal mesh; of which,

The graphite labyrinth and the blade tooling are located in the reaction chamber, the blade tooling is used for installing a blade, the blade is installed above the blade tooling, and the blade tooling is located above the graphite labyrinth; the graphite labyrinth There is a labyrinth channel, the labyrinth channel is used to place the aluminum block, the air outlet of the labyrinth channel is aligned with the tenon of the blade installed on the blade tool, and the air inlet of the labyrinth channel is located outside the reaction chamber. The aluminizing channel is connected, the gas generating chamber is located on the aluminizing channel, the gas generating chamber is used for placing the aluminum block, the aluminizing channel is used for introducing hydrogen chloride gas, hydrogen gas and argon gas, and the aluminizing channel is The gas in the channel passes through the labyrinth channel after passing through the gas generating chamber, and enters the blade from the air outlet of the labyrinth channel;

The fluoride ion cleaning channel is nested into the aluminizing channel at the position between the gas generating chamber and the inlet of the labyrinth channel, and passes through the center of the graphite labyrinth until the outlet of the labyrinth channel. At the gas port; the fluoride ion cleaning channel is used for feeding hydrogen fluoride gas, hydrogen gas and argon gas, or feeding Freon gas, hydrogen gas and argon gas;

The metal mesh is located at the air outlet of the fluoride ion cleaning channel, and is used to prevent the carbon generated by the reaction of the Freon gas and the hydrogen from entering the blade at a high temperature;

The thermocouple is located on the inner wall of the reaction chamber for measuring the temperature in the reaction chamber;

The bottom of the reaction chamber is provided with an exhaust port for discharging reaction exhaust gas.

The method and device for fluoride ion cleaning and aluminide coating preparation of the above-mentioned complex inner cavity blade provided by the present invention, the blade inner cavity is cleaned by fluoride ion and aluminide coating is prepared by chemical vapor deposition (CVD), and the blade inner cavity fluorine The purpose of ion cleaning is to remove the residual oxide layer on the inner cavity wall and provide conditions for the subsequent preparation of aluminized coating by chemical vapor deposition. The two processes of fluoride ion cleaning and aluminide coating preparation are both completed by CVD equipment, and there is no need to open the CVD equipment or take out the blades between the two processes. The two processes are integrated in the CVD equipment, which not only saves money The processing time can also avoid secondary pollution of the leaves due to the removal of the leaves in the middle. The above method is flexible and controllable, and the prepared aluminide coating has high cleanliness and will not damage the leaves. The method for fluoride ion cleaning and aluminide coating preparation of the above-mentioned complex inner cavity blade provided by the present invention is especially suitable for nickel-based single crystal superalloy guide blades with complex inner cavity structure and high-pressure turbine blade inner cavity and surface high temperature protective coating It is also suitable for the preparation of protective coatings for other superalloy parts.

Description of drawings

1 is a flow chart of a method for fluoride ion cleaning and aluminide coating preparation of a complex inner cavity blade provided by the present invention;

Figure 2 is a cross-sectional view of a blade with a complex cavity structure;

3 is one of the structural schematic diagrams of a device for fluoride ion cleaning and aluminide coating preparation of a complex inner cavity blade provided by the present invention;

FIG. 4 is a second schematic structural diagram of a device for cleaning fluoride ions and preparing aluminide coating for a complex inner cavity blade provided by the present invention.

Description of drawings: inner wall 1, impact cooling hole 2, outer wall 3, gas film cooling hole 4, intermediate layer 5, blade interior 6, reaction chamber 7, graphite labyrinth 8, blade tooling 9, aluminizing channel 10, fluoride ion cleaning channel 11. Gas generating chamber 12, thermocouple 13, metal mesh 14, vane 15, tenon 16, exhaust port 17.

Detailed ways

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are merely illustrative and not intended to limit the present invention.

A method for fluoride ion cleaning and aluminide coating preparation of complex inner cavity blades provided by the present invention, as shown in FIG. 1 , includes the following steps:

S1: place the blade after degreasing cleaning or sandblast cleaning in the reaction chamber of the CVD equipment, and put aluminum blocks of preset quality into the graphite labyrinth in the reaction chamber;

S2: After the reaction chamber is evacuated to a vacuum state, the reaction chamber is filled with argon to atmospheric pressure to complete one cleaning of the blades; repeated cleaning several times;

S3: stop feeding argon gas, continuously fill the reaction chamber with hydrogen gas, keep the air pressure at a preset pressure, heat the reaction chamber from room temperature to a first preset temperature at a preset heating rate, and maintain the temperature for a first preset time period;

S4: After the heat preservation is completed, hydrogen and hydrogen fluoride gas are continuously introduced into the reaction chamber, or hydrogen and freon gas are continuously introduced into the reaction chamber to keep the air pressure at the preset pressure, and the heat preservation is continued for a second preset time period; wherein, the hydrogen and hydrogen fluoride gases are , or hydrogen and freon gas, enter the inner cavity of the blade through the air inlet of the tenon of the blade and flow out from the air film cooling hole, and then flow out from the outlet of the reaction chamber and then pass through the alkaline solution pool and then discharge into the atmosphere;

S5: After the heat preservation is over, stop feeding hydrogen fluoride gas or freon gas to complete the cleaning of fluoride ions in the inner cavity of the blade;

S6: continue to fill the reaction chamber with hydrogen, so that the residual hydrogen fluoride gas or freon gas is discharged from the reaction chamber;

S7: in the state of being continuously charged with hydrogen, the air pressure is maintained at the preset pressure, the reaction chamber is heated from the first preset temperature to the second preset temperature at the preset heating rate, and the temperature is maintained for the first preset time period;

S8: After the heat preservation is completed, the hydrogen chloride gas, hydrogen gas and argon gas passing through the preheating pipeline are continuously fed into the reaction chamber, the air pressure is maintained at the preset pressure, and the heat preservation is continued for a third preset time period; wherein, the temperature of the preheating pipeline is the third preheating pipeline. Set the temperature; hydrogen chloride gas, hydrogen gas and argon gas enter the inner cavity of the blade through the air inlet of the tenon of the blade and flow out from the air film cooling hole, and then flow out from the outlet of the reaction chamber and then pass through the alkaline solution pool and then discharge into the atmosphere;

S9: After the heat preservation is completed, stop feeding hydrogen chloride gas and hydrogen gas, and continue feeding argon gas. After the blade is cooled to room temperature with the reaction chamber, stop vacuuming. After the pressure in the reaction chamber rises to atmospheric pressure, stop feeding argon gas and turn on The leaves are taken out and the preparation of the aluminide coating is completed.

In the specific implementation, in the above-mentioned method for fluoride ion cleaning and aluminide coating preparation of a complex inner cavity blade provided by the present invention, steps S1 to S5 are the fluoride ion cleaning process of the blade inner cavity by chemical vapor deposition (CVD). , The purpose of fluoride ion cleaning in the inner cavity of the blade is to remove the residual oxide layer on the inner cavity wall and provide conditions for the subsequent chemical vapor deposition method to prepare the aluminized coating. Steps S6 to S9 are a process of preparing the aluminide coating of the inner cavity of the blade by chemical vapor deposition aluminizing. The above two processes are completed by CVD equipment, and there is no need to open the CVD equipment or take out the blades between the two processes. The two processes are integrated in the CVD equipment, which not only saves the processing time, but also avoids taking out the blades midway. As for secondary pollution to the blade, the above method is flexible and controllable, the prepared aluminide coating has high cleanliness and will not damage the blade. The method for fluoride ion cleaning and aluminide coating preparation of the above-mentioned complex inner cavity blade provided by the present invention is especially suitable for nickel-based single crystal superalloy guide blades with complex inner cavity structure and high-pressure turbine blade inner cavity and surface high temperature protective coating It is also suitable for the preparation of protective coatings for other superalloy parts.

Figure 2 is a cross-sectional view of a blade with a complex cavity structure. Different from ordinary hollow blades, the complex inner cavity blade is double-walled. The inner wall 1 is formed by casting to form a plurality of impact cooling holes 2, and the outer wall 3 is formed by EDM to form a plurality of film cooling holes 4. The thickness of the middle interlayer 5 is about 1mm. . Due to the complex structure of this type of blade, the oxides on the surface of the inner cavity cannot be removed by processing methods such as abrasive flow, and the abrasive medium is difficult to clean, which brings difficulties to the subsequent preparation of the inner cavity chemical vapor deposition infiltration layer. The invention uses fluoride ion cleaning to clean the inner cavity surface of the blade to remove the oxide film layer, so as to provide conditions for the subsequent chemical vapor deposition method to prepare the aluminide coating. The fluoride ion cleaning in the blade cavity is realized by a specific tooling design (for details, please refer to the device section below), so that the fluoride ion cleaning atmosphere enters the blade interior 6 through the cover plates at both ends of the guide blade or the tenon of the turbine blade, and then passes through the impact cooling in turn. The hole 2 and the interlayer 5 are discharged from the gas film cooling hole 4. At high temperature of 950°C to 1000°C, the fluoride ion cleaning atmosphere reacts with the oxide layer to form gas-phase products to achieve fluoride ion cleaning of the blade inner cavity (blade interior 6 and intermediate interlayer 5 ). Specifically, the introduced hydrogen fluoride will fully react with the oxides (mainly aluminum, titanium, chromium oxides and their composite oxides) attached to the inner cavity of the blade, and the reaction formula is as follows:

6HF+Al ₂ O ₃ →2AlF ₃ +3H ₂ O

4HF+TiO ₂ →TiF ₄ +2H ₂ O

6HF _{+ Cr2O3 → 2CrF3} +F2+ _3H2O .

In the specific implementation, in the above-mentioned method for fluoride ion cleaning and aluminide coating preparation of a complex inner cavity blade provided by the present invention, for the preparation process of the aluminide coating, the substrate (ie, the inner cavity surface and the outer surface of the blade) is as follows: In nickel-based superalloys, the outermost/surface layer of the aluminide coating is β-NiAl phase, and the interdiffusion zone is between the surface layer and the substrate. In a high temperature environment, the NiAl phase will be oxidized, thereby forming a dense layer of alumina on the surface of the surface phase of the aluminide coating, which can improve the high temperature oxidation resistance of the blade. After the aluminide coating is prepared by chemical vapor deposition, the MCrAlY cladding coating and the ceramic-based thermal barrier coating can be further prepared on the surface of the aluminide coating.

The specific parameters and specific conditions in the specific embodiments of the method for fluoride ion cleaning and aluminide coating preparation of the complex inner cavity blade provided by the present invention are described in detail below through two specific embodiments.

Example 1:

When performing step S4 in the method for fluoride ion cleaning and aluminide coating preparation of the complex inner cavity blade provided by the present invention, the gases continuously fed into the reaction chamber for fluoride ion cleaning are hydrogen fluoride gas and hydrogen gas.

In specific implementation, when performing step S1 in the above-mentioned method for fluoride ion cleaning and aluminide coating preparation of complex inner cavity blades provided by the present invention, 50g-100g aluminum blocks may be placed in the graphite labyrinth in the reaction chamber. Specifically, the throwing amount of the aluminum block can be determined according to the length of the labyrinth channel of the graphite labyrinth.

In specific implementation, in the above-mentioned method for cleaning fluoride ions and preparing aluminide coating for complex inner cavity blades provided by the present invention, in step S3, the supply of argon gas is stopped, and hydrogen gas is continuously filled into the reaction chamber, and the gas pressure is maintained at a preset pressure , heating the reaction chamber from room temperature to a first preset temperature at a preset heating rate, and maintaining the temperature for a first preset time period, which may specifically include the following steps:

S30: Stop feeding argon gas, continue to charge hydrogen into the reaction chamber, keep the air pressure at 15kPa to 30kPa, heat the reaction chamber from room temperature to 950°C to 1000°C at a heating rate of 10°C/min, and keep the temperature for 1 hour.

In specific implementation, in the above-mentioned method for fluoride ion cleaning and aluminide coating preparation of a complex inner cavity blade provided by the present invention, in step S4, after the heat preservation is completed, hydrogen and hydrogen fluoride gas are continuously introduced into the reaction chamber, and the gas pressure is maintained at a preset value pressure, and continue to keep warm for a second preset time period, which may specifically include the following steps:

S40: After the heat preservation is completed, hydrogen and hydrogen fluoride gas are continuously introduced into the reaction chamber, the air pressure is maintained at 15 kPa to 30 kPa, and the heat preservation is continued for 1 hour.

In specific implementation, in the above-mentioned method for cleaning fluoride ions and preparing an aluminide coating for a complex inner cavity blade provided by the present invention, in step S4, the flow rate of the hydrogen fluoride gas introduced into the reaction chamber can be controlled at 0.5L/min～ In the range of 1 L/min, the ratio of the hydrogen flow to the hydrogen fluoride gas flow can be 10:1, and thus, the flow rate of the hydrogen gas introduced into the reaction chamber can also be determined.

In specific implementation, in the above-mentioned method for fluoride ion cleaning and aluminide coating preparation of a complex inner cavity blade provided by the present invention, in step S6, hydrogen is continuously charged into the reaction chamber, so that the residual hydrogen fluoride gas is discharged from the reaction chamber. Avoid the influence of residual hydrogen fluoride gas on the subsequent preparation of aluminide coatings.

In specific implementation, in the above-mentioned method for fluoride ion cleaning and aluminide coating preparation of complex inner cavity blades provided by the present invention, in step S7, in the state of continuous filling of hydrogen, the air pressure is maintained at a preset pressure, and the reaction chamber is changed from The first preset temperature is heated to the second preset temperature at a preset heating rate, and the temperature is maintained for a first preset time period, which may specifically include the following steps:

S70: Under the state of continuous charging of hydrogen, the air pressure is maintained at 15kPa～30kPa, and the reaction chamber is heated from the first preset temperature to 1000°C～1100°C at a heating rate of 10°C/min, and kept for 1 hour.

In specific implementation, in the above-mentioned method for cleaning fluoride ions and preparing aluminide coating of complex inner cavity blades provided by the present invention, in step S8, after the heat preservation is completed, hydrogen chloride gas and hydrogen gas passing through the preheating pipeline are continuously fed into the reaction chamber and argon gas, the air pressure is maintained at the preset pressure, and the temperature is maintained for a third preset time period; wherein, the temperature of the preheating pipeline is the third preset temperature, which may specifically include the following steps:

S80: After the heat preservation is completed, the hydrogen chloride gas, hydrogen gas and argon gas passing through the preheating pipeline are continuously introduced into the reaction chamber, the pressure is maintained at 15kPa～30kPa, and the heat preservation is continued for 1h～3h; wherein, the temperature of the preheating pipeline is 200℃～300℃ .

In the specific implementation, in the above-mentioned method for cleaning fluoride ions and preparing aluminide coating of complex inner cavity blades provided by the present invention, in step S8, the flow rate of hydrogen chloride gas introduced into the reaction chamber can be controlled at 0.5L/min～ In the range of 1L/min, the ratio of argon gas flow, hydrogen gas flow and hydrogen chloride gas flow can be 10:10:1, thus, the flow rates of hydrogen and argon introduced into the reaction chamber can also be determined.

In specific implementation, in the above-mentioned method for fluoride ion cleaning and aluminide coating preparation for a complex inner cavity blade provided by the present invention, the thickness of the aluminide coating is mainly determined by the third heat preservation during the chemical vapor deposition aluminizing process in step S8. The thickness of the aluminide coating can be controlled in the range of 20 μm to 50 μm.

In specific implementation, in the above-mentioned method for fluoride ion cleaning and aluminide coating preparation of complex inner cavity blades provided by the present invention, the pH of the alkaline solution used in steps S4 and S8 for treating the tail gas after the reaction is preferably 12 ~13, the alkaline solution of this pH can avoid damage to the water ring pump or pipeline caused by excessive alkalinity, and can also ensure a good absorption effect on the acid gas in the tail gas.

In specific implementation, in the above-mentioned method for fluoride ion cleaning and aluminide coating preparation of complex inner cavity blades provided by the present invention, the purity of hydrogen gas, argon gas, hydrogen fluoride gas and hydrogen chloride gas are all 99.9%, and the gas with high purity is used. The incorporation of other types of interfering gases can be avoided, thus ensuring that the preparation of the coating is not affected.

Example 2:

When performing step S4 in the method for fluoride ion cleaning and aluminide coating preparation of the complex inner cavity blade provided by the present invention, the gases continuously fed into the reaction chamber for fluoride ion cleaning are freon gas and hydrogen gas. The reason for using freon gas instead of hydrogen fluoride gas is: hydrogen fluoride gas has certain dangers in the daily production process. Using freon gas instead of hydrogen fluoride gas can improve safety while still achieving the effect of fluoride ion cleaning.

In specific implementation, when performing step S1 in the above-mentioned method for fluoride ion cleaning and aluminide coating preparation of complex inner cavity blades provided by the present invention, 50g-100g aluminum blocks may be placed in the graphite labyrinth in the reaction chamber. Specifically, the throwing amount of the aluminum block can be determined according to the length of the labyrinth channel of the graphite labyrinth.

In specific implementation, in the above-mentioned method for cleaning fluoride ions and preparing aluminide coating for complex inner cavity blades provided by the present invention, in step S3, the supply of argon gas is stopped, and hydrogen gas is continuously filled into the reaction chamber, and the gas pressure is maintained at a preset pressure , heating the reaction chamber from room temperature to a first preset temperature at a preset heating rate, and maintaining the temperature for a first preset time period, which may specifically include the following steps:

S30: Stop feeding argon gas, continue to charge hydrogen into the reaction chamber, keep the air pressure at 15kPa to 30kPa, heat the reaction chamber from room temperature to 950°C to 1000°C at a heating rate of 10°C/min, and keep the temperature for 1 hour.

In the specific implementation, in the above-mentioned method for cleaning fluoride ions and preparing aluminide coating for a complex inner cavity blade provided by the present invention, in step S4, after the heat preservation is completed, hydrogen and freon gas are continuously introduced into the reaction chamber, and the gas pressure is maintained at a preset value pressure, and continue to keep warm for a second preset time period, which may specifically include the following steps:

S40: After the heat preservation is completed, hydrogen and freon gas are continuously introduced into the reaction chamber, the air pressure is maintained at 15 kPa to 30 kPa, and the heat preservation is continued for 1 hour.

In the specific implementation, in the above-mentioned method for fluoride ion cleaning and aluminide coating preparation of complex inner cavity blades provided by the present invention, in step S4, the flow rate of Freon gas introduced into the reaction chamber can be controlled at 0.5L/min～ In the range of 1L/min, the ratio of the hydrogen flow rate to the freon gas flow rate can be 10:1, and thus, the flow rate of hydrogen gas introduced into the reaction chamber can also be determined.

In the specific implementation, in the above-mentioned method for cleaning fluoride ions and preparing aluminide coating for a complex inner cavity blade provided by the present invention, in step S6, hydrogen is continuously filled into the reaction chamber, so that the residual Freon gas is discharged from the reaction chamber, so that the Avoid residual Freon gas from affecting the subsequent preparation of aluminide coatings.

In specific implementation, in the above-mentioned method for fluoride ion cleaning and aluminide coating preparation of complex inner cavity blades provided by the present invention, in step S7, in the state of continuous filling of hydrogen, the air pressure is maintained at a preset pressure, and the reaction chamber is changed from The first preset temperature is heated to the second preset temperature at a preset heating rate, and the temperature is maintained for a first preset time period, which may specifically include the following steps:

S70: Under the state of continuous charging of hydrogen, the air pressure is maintained at 15kPa～30kPa, and the reaction chamber is heated from the first preset temperature to 1000°C～1100°C at a heating rate of 10°C/min, and kept for 1 hour.

In specific implementation, in the above-mentioned method for cleaning fluoride ions and preparing aluminide coating of complex inner cavity blades provided by the present invention, in step S8, after the heat preservation is completed, hydrogen chloride gas and hydrogen gas passing through the preheating pipeline are continuously fed into the reaction chamber and argon gas, the air pressure is maintained at the preset pressure, and the temperature is maintained for a third preset time period; wherein, the temperature of the preheating pipeline is the third preset temperature, which may specifically include the following steps:

S80: After the heat preservation is completed, the hydrogen chloride gas, hydrogen gas and argon gas passing through the preheating pipeline are continuously introduced into the reaction chamber, the pressure is maintained at 15kPa～30kPa, and the heat preservation is continued for 1h～3h; wherein, the temperature of the preheating pipeline is 200℃～300℃ .

In the specific implementation, in the above-mentioned method for cleaning fluoride ions and preparing aluminide coating of complex inner cavity blades provided by the present invention, in step S8, the flow rate of hydrogen chloride gas introduced into the reaction chamber can be controlled at 0.5L/min～ In the range of 1L/min, the ratio of argon gas flow, hydrogen gas flow and hydrogen chloride gas flow can be 10:10:1, thus, the flow rates of hydrogen and argon introduced into the reaction chamber can also be determined.

In specific implementation, in the above-mentioned method for fluoride ion cleaning and aluminide coating preparation for a complex inner cavity blade provided by the present invention, the thickness of the aluminide coating is mainly determined by the third heat preservation during the chemical vapor deposition aluminizing process in step S8. The thickness of the aluminide coating can be controlled in the range of 20 μm to 50 μm.

In specific implementation, in the above-mentioned method for fluoride ion cleaning and aluminide coating preparation of complex inner cavity blades provided by the present invention, the pH of the alkaline solution used in steps S4 and S8 for treating the tail gas after the reaction is preferably 12 ~13, the alkaline solution of this pH can avoid damage to the water ring pump or pipeline caused by excessive alkalinity, and can also ensure a good absorption effect on the acid gas in the tail gas.

In specific implementation, in the above-mentioned method for fluoride ion cleaning and aluminide coating preparation of complex inner cavity blades provided by the present invention, the purity of hydrogen gas, argon gas, freon gas and hydrogen chloride gas are all 99.9%, and high-purity gas is used. The incorporation of other types of interfering gases can be avoided, thus ensuring that the preparation of the coating is not affected.

Based on the same inventive concept, the present invention also provides a device for fluoride ion cleaning and aluminide coating preparation of a complex inner cavity blade, as shown in Figure 3, including: a reaction chamber 7, a graphite labyrinth 8, a blade tooling 9, aluminized channel 10, fluoride ion cleaning channel 11, gas generating chamber 12, thermocouple 13 and metal mesh 14; wherein,

The graphite labyrinth 8 and the blade tooling 9 are located in the reaction chamber 7, the blade tooling 9 is used to install the blade 15, the blade 15 is installed above the blade tooling 9, and the blade tooling 9 is located above the graphite labyrinth 8; the graphite labyrinth 8 has a labyrinth channel, and the labyrinth The channel is used to place aluminum blocks, the air outlet of the labyrinth channel is aligned with the tenon 16 of the blade 15 installed on the blade tooling 9, the air inlet of the labyrinth channel is communicated with the aluminizing channel 10 located outside the reaction chamber 7, and the gas generating chamber 12 Located on the aluminizing channel 10, the gas generation chamber 12 is used for placing aluminum blocks, the aluminizing channel 10 is used for introducing hydrogen chloride gas, hydrogen gas and argon gas, and the gas in the aluminizing channel 10 passes through the gas generating chamber 12 and then passes through the labyrinth channel, Enter the blade 15 from the air outlet of the labyrinth passage;

The fluoride ion cleaning channel 11 is nested into the aluminizing channel 10 at the position between the gas generating chamber 12 and the air inlet of the labyrinth channel, passing through the center of the graphite labyrinth 8 to the air outlet of the labyrinth channel; the fluoride ion cleaning channel 11 For feeding hydrogen fluoride gas, hydrogen and argon, or feeding Freon gas, hydrogen and argon;

The metal mesh 14 is located at the air outlet of the fluoride ion cleaning channel 11 and can be disassembled and cleaned. The metal mesh 14 is used to block the carbon generated by the reaction of Freon gas and hydrogen gas from entering the blade 15 at high temperature, so as to avoid the reaction of Freon gas and hydrogen gas at high temperature. The generated carbon is deposited on the surface of the blade 15;

The thermocouple 13 is located on the inner wall of the reaction chamber 7, and is used to measure the temperature in the reaction chamber 7. As shown in FIG. 3, the thermocouple 13 can be respectively set at the upper, middle and lower positions of the inner wall of the reaction chamber 7, so that, It can ensure that the temperature in the entire reaction chamber 7 is consistent;

The bottom of the reaction chamber 7 is provided with an exhaust port 17 for discharging the reaction exhaust gas.

It should be noted that, in the device for fluoride ion cleaning and aluminide coating preparation of the complex inner cavity blade provided by the present invention, for the above embodiment 1, the above complex inner cavity blade fluoride ion cleaning and aluminum compound coating provided by the present invention are performed. In step S4 in the method for preparing the compound coating, in the case that the gases continuously fed into the reaction chamber for fluoride ion cleaning are hydrogen fluoride gas and hydrogen gas, the setting of the metal mesh can be omitted, as shown in FIG. 4 , which is Since hydrogen fluoride gas and hydrogen do not react to form carbon at high temperatures, there is no need to install a wire mesh for filtration.

The device for fluoride ion cleaning and aluminide coating preparation of the complex inner cavity blade provided by the present invention can realize fluoride ion cleaning and aluminide coating preparation. Specific embodiments of the fluoride ion cleaning process and the aluminide coating preparation process will be described in detail below with reference to the devices shown in FIG. 3 and FIG. 4 respectively.

Embodiment 1 illustrates the fluoride ion cleaning process of the inner cavity of the blade in conjunction with FIG. 4 . First, the blades 15 after degreasing cleaning or surface sandblasting are cleaned and dried, assembled with the blade tooling 9, and placed in the reaction chamber 7, and 50g-100g aluminum blocks are placed in the graphite labyrinth 8; then, using a vacuum pump Evacuate, and pass argon gas into the aluminizing channel 10 and the fluoride ion cleaning channel 11, repeatedly clean the atmosphere in the reaction chamber 7, and the gas is evacuated by the vacuum pump through the exhaust port 17; after the atmosphere in the reaction chamber 7 is cleaned , stop feeding argon gas to the aluminizing channel 10 and the fluoride ion cleaning channel 11, and pass hydrogen gas from the aluminizing channel 10 to the reaction chamber 7, and keep the preset pressure of 15kPa to 30kPa. The room temperature is raised to a first preset temperature of 950°C to 1000°C, and the heating rate is 10°C/min. The temperature at different positions of the reaction chamber is monitored by the thermocouples 13 in the upper, middle and lower positions, and the first preset temperature is reached. After that, the temperature of the graphite labyrinth 8 and the blade 15 reaches the first predetermined temperature, and the temperature of the graphite labyrinth 8 and the blade 15 reaches the first predetermined temperature. The aluminizing channel 10 is continuously fed with hydrogen gas into the reaction chamber 7, and in the state of maintaining a preset pressure of 15kPa to 30kPa, the temperature is continued for 1 hour, and the hydrogen fluoride gas passes through the central channel of the graphite labyrinth 8 instead of the labyrinth channel of the graphite labyrinth 8, During this period, a large flow of gas is used to make the fluoride ion cleaning atmosphere enter into the inner cavity of the blade 15 through the air inlet of the tenon 16 of the blade 15 to ensure that the oxide on the inner cavity surface of the blade 15 fully reacts with the fluoride ion cleaning atmosphere, and the gas The film cooling hole 4 flows out, and finally is discharged from the exhaust port 17, and the tail gas is discharged into the atmosphere after passing through the alkaline solution pool;

Embodiment 2 illustrates the fluoride ion cleaning process of the inner cavity of the blade in conjunction with FIG. 3 . First, the blades 15 after degreasing cleaning or surface sandblasting are cleaned and dried, assembled with the blade tooling 9, and placed in the reaction chamber 7, and 50g-100g aluminum blocks are placed in the graphite labyrinth 8; then, using a vacuum pump Evacuate, and pass argon gas into the aluminizing channel 10 and the fluoride ion cleaning channel 11, repeatedly clean the atmosphere in the reaction chamber 7, and the gas is evacuated by the vacuum pump through the exhaust port 17; after the atmosphere in the reaction chamber 7 is cleaned , stop feeding argon gas to the aluminizing channel 10 and the fluoride ion cleaning channel 11, and pass hydrogen gas from the aluminizing channel 10 to the reaction chamber 7, and keep the preset pressure of 15kPa to 30kPa. The room temperature is raised to a first preset temperature of 950°C to 1000°C, and the heating rate is 10°C/min. The temperature at different positions of the reaction chamber is monitored by the thermocouples 13 in the upper, middle and lower positions, and the first preset temperature is reached. After that, the temperature of the graphite labyrinth 8 and the blade 15 is maintained for 1 hour to ensure that the temperatures of the graphite labyrinth 8 and the blade 15 both reach the first predetermined temperature; then, after the heat preservation is completed, high-purity Freon gas and hydrogen gas are continuously introduced into the reaction chamber 7 from the fluoride ion cleaning channel 11, And from the aluminizing channel 10 to the reaction chamber 7, the hydrogen gas is also continuously introduced. Under the state of maintaining the preset pressure of 15kPa to 30kPa, the temperature is continued for 1h, and the freon gas passes through the central channel of the graphite labyrinth 8 instead of the graphite labyrinth 8. Labyrinth channel, during this period, a large flow of gas is used to make the fluoride ion cleaning atmosphere enter into the inner cavity of the blade 15 through the air inlet of the tenon 16 of the blade 15 to ensure that the oxide on the inner cavity surface of the blade 15 fully reacts with the fluoride ion cleaning atmosphere, It flows out from the air film cooling hole 4, and is finally discharged from the exhaust port 17. The tail gas is discharged into the atmosphere after passing through the alkaline solution pool; finally, after the heat preservation is completed, the introduction of Freon gas is stopped, and the fluoride ion in the inner cavity of the blade 15 is completed. cleaning.

3 and 4 to illustrate the process of preparing aluminide coating on the blade surface and inner cavity by chemical vapor deposition aluminizing. First, hydrogen is charged through the aluminizing channel 10 and the fluoride ion cleaning channel 11 to clean the atmosphere in the reaction chamber 7; The chamber 7 is heated from the first preset temperature to the second preset temperature of 1000°C to 1100°C, and the heating rate is 10°C/min. After reaching the second preset temperature, the temperature is maintained for 1 hour to ensure that the graphite labyrinth 8 and the blades 15 reach the second preset temperature. predetermined temperature; then, after the heat preservation is completed, the fluoride ion cleaning channel 11 stops filling with hydrogen, and the hydrogen chloride gas, hydrogen gas and argon gas passing through the preheating pipeline with a temperature of 300 ° C are continuously introduced into the reaction chamber 7 through the aluminizing channel 10 , in the state of maintaining the preset pressure of 15kPa ~ 30kPa, continue to keep the temperature for 1h ~ 3h, the aluminizing atmosphere passes through the labyrinth channel where the aluminum block is placed in the graphite labyrinth 8 instead of the central channel of the graphite labyrinth 8, during this period Keep the water ring pump Continue to work, let the aluminizing atmosphere fully flow through each structure of the blade 15, enter the inner cavity of the blade 15 through the air inlet of the tenon 16 of the blade 15, flow out through the film cooling hole 4, and finally discharge from the exhaust port 17 , the tail gas is discharged into the atmosphere after passing through the alkaline solution pool; finally, after the heat preservation is completed, stop feeding hydrogen chloride gas and hydrogen gas, keep feeding argon gas from the aluminizing channel 10 to the blade 15, and wait for the blade 15 to cool down with the reaction chamber 7 to After the room temperature, the vacuuming was stopped. After the pressure of the reaction chamber 7 was raised to the atmospheric pressure, the supply of argon was stopped. The hydrogen and hydrogen chloride gas introduced into the aluminizing channel 10 react with the aluminum block in the gas generating chamber 12 at 200°C to 300°C to generate aluminum trichloride gas, and the argon gas is used as a carrier gas to carry the aluminum trichloride into the graphite labyrinth 8 , at 1000℃～1100℃ The aluminum reaches the inner cavity surface and outer surface of the blade 15, and the highly active aluminum dichloride and the highly active aluminum monochloride react with the elements of the substrate (ie, the inner cavity surface and outer surface of the blade 15) to form an aluminized coating.

The method and device for fluoride ion cleaning and aluminide coating preparation of the above-mentioned complex inner cavity blade provided by the present invention, the blade inner cavity is cleaned by fluoride ion and aluminide coating is prepared by chemical vapor deposition (CVD), and the blade inner cavity fluorine The purpose of ion cleaning is to remove the residual oxide layer on the inner cavity wall and provide conditions for the subsequent preparation of aluminized coating by chemical vapor deposition. The two processes of fluoride ion cleaning and aluminide coating preparation are both completed by CVD equipment, and there is no need to open the CVD equipment or take out the blades between the two processes. The two processes are integrated in the CVD equipment, which not only saves money The processing time can also avoid secondary pollution of the leaves due to the removal of the leaves in the middle. The above method is flexible and controllable, and the prepared aluminide coating has high cleanliness and will not damage the leaves. The method for fluoride ion cleaning and aluminide coating preparation of the above-mentioned complex inner cavity blade provided by the present invention is especially suitable for nickel-based single crystal superalloy guide blades with complex inner cavity structure and high-pressure turbine blade inner cavity and surface high temperature protective coating It is also suitable for the preparation of protective coatings for other superalloy parts.

It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit and scope of the invention. Thus, provided that these modifications and variations of the present invention fall within the scope of the claims of the present invention and their equivalents, the present invention is also intended to include these modifications and variations.

Claims (6)

1. A method for fluoride ion cleaning and aluminide coating preparation of a complex inner cavity blade, prepared by using a device for fluoride ion cleaning and aluminide coating preparation of a complex inner cavity blade, It is characterized in that the device includes: a reaction chamber, a graphite labyrinth, a blade tooling, aluminizing channel, a fluoride ion cleaning channel, a gas generating chamber, a thermocouple and a metal mesh; wherein, The graphite labyrinth and the blade tooling are located in the reaction chamber, the blade tooling is used for installing a blade, the blade is installed above the blade tooling, and the blade tooling is located above the graphite labyrinth; the graphite labyrinth There is a labyrinth channel, the labyrinth channel is used to place the aluminum block, the air outlet of the labyrinth channel is aligned with the tenon of the blade installed on the blade tool, and the air inlet of the labyrinth channel is located outside the reaction chamber. The aluminizing channel is connected, the gas generating chamber is located on the aluminizing channel, the gas generating chamber is used for placing the aluminum block, the aluminizing channel is used for introducing hydrogen chloride gas, hydrogen gas and argon gas, and the aluminizing channel is The gas in the channel passes through the labyrinth channel after passing through the gas generating chamber, and enters the blade from the air outlet of the labyrinth channel; The fluoride ion cleaning channel is nested into the aluminizing channel at the position between the gas generating chamber and the inlet of the labyrinth channel, and passes through the center of the graphite labyrinth until the outlet of the labyrinth channel. At the gas port; the fluoride ion cleaning channel is used for feeding hydrogen fluoride gas, hydrogen gas and argon gas, or feeding Freon gas, hydrogen gas and argon gas; The metal mesh is located at the air outlet of the fluoride ion cleaning channel, and is used to prevent the carbon generated by the reaction of the Freon gas and the hydrogen from entering the blade at a high temperature; The thermocouple is located on the inner wall of the reaction chamber for measuring the temperature in the reaction chamber; The bottom of the reaction chamber is provided with an exhaust port for discharging the reaction tail gas; Wherein, the method for fluoride ion cleaning and aluminide coating preparation of the complex inner cavity blade includes the following steps: S1: place the blade after degreasing cleaning or sandblast cleaning in the reaction chamber of the CVD equipment, and put aluminum blocks of preset quality into the graphite labyrinth in the reaction chamber; S2: After the reaction chamber is evacuated to a vacuum state, the reaction chamber is filled with argon to atmospheric pressure to complete one cleaning of the blades; repeated cleaning several times; S3: stop feeding argon gas, continuously fill the reaction chamber with hydrogen gas, keep the air pressure at a preset pressure, heat the reaction chamber from room temperature to a first preset temperature at a preset heating rate, and maintain the temperature for a first preset time period; S4: After the heat preservation is completed, hydrogen and hydrogen fluoride gas are continuously introduced into the reaction chamber, or hydrogen and freon gas are continuously introduced into the reaction chamber to keep the air pressure at the preset pressure, and the heat preservation is continued for a second preset time period; wherein, the hydrogen and hydrogen fluoride gases are , or hydrogen and freon gas, enter the inner cavity of the blade through the air inlet of the tenon of the blade and flow out from the air film cooling hole, and then flow out from the outlet of the reaction chamber and then pass through the alkaline solution pool and then discharge into the atmosphere; Step S4 is specifically: Next, after the heat preservation, high-purity hydrogen fluoride gas is continuously introduced into the reaction chamber from the fluoride ion cleaning channel, and hydrogen gas is continuously introduced into the reaction chamber from the aluminizing channel, while maintaining the preset pressure of 15kPa to 30kPa. Continue to keep the temperature for 1h, the hydrogen fluoride gas passes through the central channel of the graphite labyrinth instead of the labyrinth channel of the graphite labyrinth. During this period, a large flow of gas is used to make the fluoride ion cleaning atmosphere enter the inner cavity of the blade through the air inlet of the blade tenon, Ensure that the oxides on the surface of the inner cavity of the blade fully react with the fluoride ion cleaning atmosphere, and flow out from the air film cooling hole, and finally discharge from the exhaust port, and the exhaust gas is discharged into the atmosphere after passing through the alkaline solution pool; Or: then, after the heat preservation is completed, continue to pass high-purity Freon gas and hydrogen gas from the fluoride ion cleaning channel into the reaction chamber, and continue to pass hydrogen gas from the aluminizing channel to the reaction chamber, while maintaining the preset value. Under the pressure of 15kPa ~ 30kPa, continue to keep the temperature for 1h, the freon gas passes through the central channel of the graphite labyrinth instead of the labyrinth channel of the graphite labyrinth. The inner cavity of the blade ensures that the oxides on the surface of the inner cavity of the blade fully react with the fluoride ion cleaning atmosphere, and flow out from the air film cooling hole, and finally discharge from the exhaust port, and the exhaust gas is discharged into the atmosphere after passing through the alkaline solution pool; S5: After the heat preservation is over, stop feeding hydrogen fluoride gas or freon gas to complete the cleaning of fluoride ions in the inner cavity of the blade; S6: continue to fill the reaction chamber with hydrogen, so that the residual hydrogen fluoride gas or freon gas is discharged from the reaction chamber; S7: in the state of being continuously charged with hydrogen, the air pressure is maintained at a preset pressure, and the reaction chamber is heated from the first preset temperature to a second preset temperature at a preset heating rate, and maintained for a first preset time period; Wherein step S7 is specifically: Hydrogen is charged through the aluminizing channel and the fluoride ion cleaning channel to clean the atmosphere in the reaction chamber; then, under the condition that hydrogen is continuously charged to maintain a preset pressure of 15kPa to 30kPa, the reaction chamber is heated from the first preset pressure by electric heating. The temperature is heated to the second preset temperature of 1000°C to 1100°C, and the heating rate is 10°C/min. After reaching the second preset temperature, the temperature is maintained for 1 hour to ensure that the graphite labyrinth and the blade reach the second preset temperature; S8: After the heat preservation is completed, the hydrogen chloride gas, hydrogen gas and argon gas passing through the preheating pipeline are continuously fed into the reaction chamber, the air pressure is maintained at the preset pressure, and the heat preservation is continued for a third preset time period; wherein, the temperature of the preheating pipeline is the third preheating pipeline. Set the temperature; hydrogen chloride gas, hydrogen gas and argon gas enter the inner cavity of the blade through the air inlet of the tenon of the blade and flow out from the air film cooling hole, and then flow out from the outlet of the reaction chamber and then pass through the alkaline solution pool and then discharge into the atmosphere; Wherein step S8 is specifically: Then, after the heat preservation, the fluoride ion cleaning channel stopped filling with hydrogen, and the hydrogen chloride gas, hydrogen gas and argon gas passing through the preheating pipeline with a temperature of 300°C were continuously fed into the reaction chamber through the aluminizing channel, while maintaining the preset pressure. In the state of 15kPa ~ 30kPa, continue to keep the temperature for 1h ~ 3h, the aluminizing atmosphere passes through the labyrinth channel where the aluminum block is placed in the graphite labyrinth instead of the central channel of the graphite labyrinth, during this period, keep the water ring pump working continuously to make the aluminizing atmosphere fully It flows through each structure of the blade, enters the inner cavity of the blade through the air inlet of the blade tenon and flows out through the air film cooling hole, and finally is discharged from the exhaust port, and the exhaust gas is discharged into the atmosphere after passing through the alkaline solution pool; S9: After the heat preservation is completed, stop feeding hydrogen chloride gas and hydrogen gas, and continue feeding argon gas. After the blade is cooled to room temperature with the reaction chamber, stop vacuuming. After the pressure in the reaction chamber rises to atmospheric pressure, stop feeding argon gas and turn on Take the leaves from the warehouse to complete the preparation of the aluminide coating; Wherein step S9 is specifically: Finally, after the heat preservation is over, stop feeding hydrogen chloride gas and hydrogen gas, keep feeding argon gas from the aluminizing channel to the blade, and stop vacuuming after the blade is cooled to room temperature with the reaction chamber, and after the pressure in the reaction chamber rises to atmospheric pressure, Stop feeding argon, open the warehouse to take the leaves, and complete the preparation of the aluminide coating on the leaves. 2. The method for cleaning fluorine ions and preparing aluminide coating for complex inner cavity blades as claimed in claim 1, characterized in that, in step S3, the feeding of argon gas is stopped, and the reaction chamber is continuously filled with hydrogen gas, and the gas pressure is kept preset pressure, heating the reaction chamber from room temperature to a first preset temperature at a preset heating rate, and maintaining the temperature for a first preset time period, which specifically includes the following steps: S30: Stop feeding argon gas, continue to charge hydrogen into the reaction chamber, keep the pressure at 15kPa-30kPa, heat the reaction chamber from room temperature to 950°C-1000°C at a heating rate of 10°C/min, and keep the temperature for 1 hour. 3. The method for cleaning complex inner cavity blades with fluoride ions and preparing an aluminide coating as claimed in claim 1, wherein the purity of hydrogen, argon and hydrogen chloride gas are all 99.9%, and the purity of hydrogen fluoride gas or freon gas is 99.9%. is 99.9%. 4. The method for cleaning complex inner cavity blades with fluoride ions and preparing an aluminide coating as claimed in claim 1, wherein the flow rate of hydrogen fluoride gas is 0.5L/min～1L/min, and the ratio of the flow rate of hydrogen gas to the flow rate of hydrogen fluoride gas is 10:1; or, The freon gas flow is 0.5L/min～1L/min, and the ratio of hydrogen flow to freon gas flow is 10:1. 5. The method for cleaning complex inner cavity blades with fluoride ions and preparing an aluminide coating as claimed in claim 1, wherein the hydrogen chloride gas flow rate is 0.5L/min～1L/min; The ratio of argon flow, hydrogen flow and hydrogen chloride gas flow is 10:10:1. 6 . The method for cleaning complex inner cavity blades with fluoride ions and preparing an aluminide coating according to claim 1 , wherein the thickness of the aluminide coating is 20 μm˜50 μm. 7 .

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