CN112478783A - Substrate glass separator and separation method - Google Patents
Substrate glass separator and separation method Download PDFInfo
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- CN112478783A CN112478783A CN202011451834.6A CN202011451834A CN112478783A CN 112478783 A CN112478783 A CN 112478783A CN 202011451834 A CN202011451834 A CN 202011451834A CN 112478783 A CN112478783 A CN 112478783A
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- substrate glass
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- carrier
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/068—Stacking or destacking devices; Means for preventing damage to stacked sheets, e.g. spaces
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
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Abstract
本公开涉及一种基板玻璃分离机及分离方法，该分离机包括：承载平台，用于承载相互贴合的基板玻璃和承载基板，且该承载平台用于与基板玻璃和承载基板中的一者选择性地固定贴合；顶分机构，包括分离刀片，分离刀片用于在基板玻璃和承载基板的尖端处插入至该两者之间，以使该尖端处产生间隙；分离机构，用于与基板玻璃和承载基板中的另一者选择性地固定贴合；在承载平台和分离机构均用于与基板玻璃和承载基板处于固定贴合状态时，分离机构能够带动基板玻璃和承载基板中的另一者向上运动，以用于使间隙变大直至该两者发生分离。该分离机可实现对基板玻璃和承载基板的自动化分离，无需人工手动进行分离、分离效率和分离质量高。
The present disclosure relates to a substrate glass separator and a separating method. The separator includes: a carrying platform for carrying a substrate glass and a carrying substrate that are attached to each other, and the carrying platform is used for connecting with one of the substrate glass and the carrying substrate Selectively fix and fit; top separation mechanism, including separation blade, the separation blade is used to insert between the substrate glass and the tip of the carrier substrate, so that a gap is generated at the tip; separation mechanism is used to connect with The other one of the substrate glass and the carrier substrate is selectively fixed and bonded; when both the carrier platform and the separation mechanism are used to be in a fixed bonding state with the substrate glass and the carrier substrate, the separation mechanism can drive the substrate glass and the carrier substrate. The other is moved upwards for widening the gap until the two separate. The separator can realize the automatic separation of the substrate glass and the carrier substrate, without manual separation, and has high separation efficiency and separation quality.
Description
Technical Field
The disclosure relates to the technical field of glass manufacturing, in particular to a substrate glass separator and a separation method.
Background
The liquid crystal substrate glass is an important component of the liquid crystal display panel, and along with the demand of the market for the liquid crystal display panel, the demand of a panel manufacturer for the liquid crystal substrate glass in the liquid crystal display panel is getting lighter and lighter.
At present, a display panel is directly manufactured by a manufacturer generally by using substrate glass with the thickness of more than 0.4mm, and the display panel with the thickness of less than 0.3mm is required by the substrate glass, and the substrate glass is too thin and has insufficient strength, so that the manufacturer can not directly input glass substrates with the thickness of 0.3mm and less for production.
In the prior art, two methods are generally adopted for manufacturing: one method is to reduce the chemical thinning of a display panel made of a glass substrate with the thickness of more than 0.4mm to below 0.3mm, but the method has higher cost and has larger influence on environmental protection; in another method, a piece of substrate glass with the thickness of 0.3mm or less and a piece of bearing substrate are bonded together to improve the strength for production, and the substrate glass and the bearing substrate are separated after the display panel is processed, so that the chemical thinning is omitted and the required thickness is achieved. However, at present, no automatic separation equipment related to glass separation exists, the automatic separation equipment mainly depends on manual operation, and the automatic separation equipment is low in efficiency and poor in quality.
Disclosure of Invention
The invention aims to provide a substrate glass separator and a separation method, wherein the substrate glass separator can realize automatic separation of substrate glass and a bearing substrate, manual separation is not needed, and the separation efficiency and the separation quality are high.
In order to achieve the above object, the present disclosure provides a substrate glass separator including: the bearing platform is used for bearing the substrate glass and the bearing substrate which are mutually attached, and the bearing platform is selectively fixedly attached to one of the substrate glass and the bearing substrate; a separation mechanism including a separation blade for being inserted between the substrate glass and the carrier substrate at a tip thereof to create a gap at the tip; the separation mechanism is used for selectively and fixedly attaching to the other one of the substrate glass and the bearing substrate; when the bearing platform and the separating mechanism are both used for being fixedly attached to the substrate glass and the bearing substrate, the separating mechanism can drive the other one of the substrate glass and the bearing substrate to move upwards so as to enlarge the gap until the two are separated.
Optionally, the bearing platform is used for selectively and fixedly attaching to the substrate glass, the substrate glass separator further comprises a positioning mechanism, the positioning mechanism comprises a plurality of positioning pieces arranged on the bearing platform and a jacking unit arranged below the bearing platform, the plurality of positioning pieces are arranged at intervals along the circumferential direction of the bearing platform, the jacking unit comprises a driving piece and a plurality of jacking rods extending along the vertical direction, and the bearing platform is provided with a plurality of through holes for the jacking rods to correspondingly penetrate through; when the bearing platform is used for being in an unfixed attaching state with the substrate glass, the driving piece can drive the plurality of jacking rods to penetrate through the through holes so as to be used for jacking the substrate glass and the bearing substrate to a positioning state on the bearing platform, and the positioning pieces are used for positioning the substrate glass and the bearing substrate in the positioning state.
Optionally, one end of the lifting rod, which is used for abutting against the substrate glass, is provided with a rolling piece for forming rolling contact with the substrate glass.
Optionally, load-bearing platform includes the bottom plate and set up in vacuum platform on the bottom plate, vacuum platform be used for with the laminating is fixed selectively to base plate glass, and is a plurality of the setting element centers on vacuum platform's periphery interval set up in the bottom plate, the wear to establish the hole includes the first wear to establish the hole and the second wear to establish the hole that correspond the setting in upper and lower direction, first wear to establish the hole set up in vacuum platform, the second wear to establish the hole set up in the bottom plate.
Optionally, the substrate glass separator further comprises a housing, wherein the bearing platform extends in the horizontal direction and is arranged in the housing so as to divide the interior of the housing into an upper chamber and a lower chamber in the vertical direction; the shell is provided with a feed inlet communicated with the upper cavity, so that the substrate glass and the bearing substrate can pass through the feed inlet and can be placed on the bearing platform, the top separation mechanism is connected with the separation mechanism, and the top separation mechanism and the separation mechanism are both arranged in the upper cavity.
Optionally, the discharge port is disposed on a side wall of the housing extending in an up-down direction, and a feeding door for closing or opening the discharge port is disposed at the discharge port.
Optionally, the substrate glass separator further comprises a blowing assembly, wherein the blowing assembly comprises a gas source and a plurality of nozzles, the gas source is used for conveying high-pressure gas to the plurality of nozzles, the plurality of nozzles are arranged on the bearing platform, and the plurality of nozzles are used for being arranged on two sides adjacent to the tip ends of the substrate glass and the bearing substrate so as to blow gas to the gap.
Optionally, the separating mechanism includes a plurality of independent lifters, a mounting bracket, a plurality of flexible members, and a plurality of sucker assemblies, the lifters are movably connected to the inner wall of the upper chamber in the up-down direction, the plurality of lifters are connected to the mounting bracket through a plurality of corresponding flexible members and are used for being arranged corresponding to the plurality of tips of the substrate glass and the carrying substrate, the plurality of sucker assemblies are parallel to each other and are arranged at intervals on the mounting bracket along the length direction of the substrate glass separator, and each sucker assembly includes a plurality of vacuum suckers arranged at intervals along the width direction of the substrate glass separator.
Optionally, the upper surface of the load-bearing platform is provided with a layer of flexible material.
The present disclosure also provides a substrate glass separating method applied to the substrate glass separator, including: placing the substrate glass and the bearing substrate which are mutually attached on the bearing platform; the bearing platform is fixedly attached to one of the substrate glass and the bearing substrate, and the separating mechanism is fixedly attached to the other one of the substrate glass and the bearing substrate; the separation blade of the ejector mechanism is inserted between the substrate glass and the carrier substrate at the tip thereof to create a gap at the tip; the separation mechanism drives the other one of the substrate glass and the bearing substrate which are fixedly attached to the separation mechanism to move upwards so as to enlarge the gap until the two are separated.
In the technical scheme, the bearing platform is selectively fixedly attached to one of the substrate glass and the bearing substrate, and can support the substrate glass and the bearing substrate; the separation mechanism is selectively fixedly attached to the other one of the substrate glass and the bearing substrate; when separating this base plate glass and load-bearing substrate, the separation blade of top minute mechanism can insert and make this point department produce the clearance from base plate glass and load-bearing substrate's point department, secondly, another upward movement in separation mechanism drive base plate glass and the load-bearing substrate to make clearance between the two crescent until both take place to separate, thereby realize the separation between this base plate glass and the load-bearing substrate, degree of automation is high, need not artifical manual separation, separation efficiency and separation quality are high.
Additional features and advantages of the disclosure will be set forth in the detailed description which follows.
Drawings
The accompanying drawings, which are included to provide a further understanding of the disclosure and are incorporated in and constitute a part of this specification, illustrate embodiments of the disclosure and together with the description serve to explain the disclosure without limiting the disclosure. In the drawings:
FIG. 1 is a cross-sectional view of a substrate glass separator according to an embodiment of the present disclosure;
FIG. 2 is a top view of a load-bearing platform of a substrate glass separator according to an embodiment of the present disclosure, and further illustrates a positioning member, a sensor assembly, a nozzle of a blower assembly, and a monitor disposed thereon;
FIG. 3 is a schematic structural view of a separating mechanism of a substrate glass separator according to an embodiment of the present disclosure;
FIG. 4 is a schematic structural view of a jacking unit of a substrate glass separator according to an embodiment of the present disclosure;
FIG. 5 is a schematic structural view of a top separation mechanism of a substrate glass separator according to an embodiment of the present disclosure;
FIG. 6 is a schematic structural view of the mounting block of the top release mechanism of FIG. 5, further illustrating the release blade and positioning structure provided thereon;
fig. 7 is a block flow diagram of a substrate glass separation method according to an embodiment of the present disclosure.
Description of the reference numerals
101 bearing platform 1011 through hole
1012 backplane 10121 monitor
1013 vacuum platform
102 separation mechanism 1021 lifting piece
1022 mounting bracket 1023 Flexible part
1024 suction cup subassembly 1025 vacuum chuck
103 positioning mechanism 1031 positioning member
1032 jacking unit 1033 driving piece
1034 jacking rod 1035 rolling member
1036 guide structure 1037 first mounting plate
1038 second mounting plate
104 housing 1041 upper chamber
1042 lower chamber 1043 feed gate
1044 middle cross beam
105 blowing assembly 1051 nozzle
10 top separating mechanism for separating blade 1000
1 first drive mechanism 11 first fixed bolster
110 first rotating hole 12 first lead screw
121 first screw head 122 first screw body
123 first nut 13 first slide
132 chute
2 second drive mechanism 21 alignment Unit
211 second fixing bracket 2110 second rotating hole
212 second lead screw 2121 second lead screw head
2122 second screw body 213 second slide block
214 thrust unit of second nut 22
221 cylinder body 222 piston rod
3 mounting seat 31 mounting groove
4 positioning structure 41 positioning rod
411 cambered surface 100 mounting plate
Detailed Description
The following detailed description of specific embodiments of the present disclosure is provided in connection with the accompanying drawings. It should be understood that the detailed description and specific examples, while indicating the present disclosure, are given by way of illustration and explanation only, not limitation.
In the present disclosure, unless otherwise stated, the use of the directional words such as "up and down" refers to the upper and lower defined in the normal use state of the substrate glass separator of the present disclosure, and specifically can refer to fig. 1; additionally, use of directional terms such as "inner and outer" refers to the inner and outer of a particular structural contour; the use of the orientation words such as "first direction" refers to the thickness direction of the substrate glass and the carrier substrate; "second direction" means any direction parallel to the plane of the substrate glass and carrier substrate interface, which is not limiting of the present disclosure; furthermore, the use of directional terms such as "first" and "second" is intended only to distinguish one element from another, and is not intended to be sequential or important.
As shown in fig. 1 to 6, the present disclosure provides a substrate glass separator including a carrying platform 101, a top separation mechanism 1000, and a separation mechanism 102. The supporting platform 101 is used for supporting a substrate glass (not shown) and a supporting substrate (not shown) which are attached to each other, and the supporting platform 101 is used for selectively fixing and attaching to one of the substrate glass and the supporting substrate. The ejector mechanism 1000 includes a separation blade 10 for inserting between the substrate glass and the carrier substrate at the tip thereof such that a gap is created at the tip thereof, 10. The separation mechanism 102 is used for selectively and fixedly attaching with the other one of the substrate glass and the bearing substrate; when the supporting platform 101 and the separating mechanism 102 are both used to be in a fixed state with the substrate glass and the supporting substrate, the separating mechanism 102 can drive the other one of the substrate glass and the supporting substrate to move upwards, so as to enlarge the gap until the two are separated.
In the above technical solution, the carrying platform 101 is selectively fixed and attached to one of the substrate glass and the carrying substrate, and can support the substrate glass and the carrying substrate; the separation mechanism 102 is selectively fixedly attached to the other one of the substrate glass and the carrier substrate; when separating the substrate glass and the bearing substrate, the separation blade 10 of the top separation mechanism 1000 can be inserted from the tip ends of the substrate glass and the bearing substrate and enables the tip ends to generate a gap, secondly, the separation mechanism 102 drives the other one of the substrate glass and the bearing substrate to move upwards, so that the gap between the substrate glass and the bearing substrate is gradually increased until the substrate glass and the bearing substrate are separated, the separation between the substrate glass and the bearing substrate is realized, the automation degree is high, manual separation is not needed, the separation efficiency and the separation quality are high.
Referring to fig. 1, 2 and 4, the carrying platform 101 is used for selectively and fixedly attaching to a substrate glass, the substrate glass separator further includes a positioning mechanism 103, the positioning mechanism 103 includes a plurality of positioning members 1031 disposed on the carrying platform 101 and a lifting unit 1032 disposed below the carrying platform 101, the positioning members 1031 are circumferentially spaced along the carrying platform 101, the lifting unit 1032 includes a driving member 1033 and a plurality of lifting rods 1034 extending in an up-down direction, and the carrying platform 101 is provided with a plurality of through holes 1011 for the lifting rods 1034 to correspondingly pass through; when the supporting platform 101 is used to be in an unfixed state of being attached to the substrate glass, the driving member 1033 can drive the plurality of lifting rods 1034 to pass through the through holes 1011 for lifting the substrate glass and the supporting substrate from the supporting platform 101 to a positioning state, and in the positioning state, the plurality of positioning members 1031 are used to position the substrate glass and the supporting substrate.
In this embodiment, the driving unit 1033 drives the plurality of lifting rods 1034 to move upwards through the through holes 1011 on the supporting platform 101, so as to lift the substrate glass and the supporting substrate on the supporting platform 101 from the supporting platform 101 to a positioning state, in the positioning state, the plurality of positioning units 1031 are used for positioning the substrate glass and the supporting substrate, after the positioning is completed, the driving unit 1033 drives the lifting rods 1034 to move downwards, so as to place the positioned substrate glass and the positioned supporting substrate on the supporting platform 101, so as to accurately position the substrate glass and the supporting substrate on the supporting platform 101, the positioning is not required to be performed manually, the positioning accuracy is high, and the positioning efficiency is high.
In addition, the lifting rod 1034 vertically penetrating the loading platform 101 is provided to facilitate the positioning member 1031 provided on the loading platform 101 to accurately position the substrate glass and the loading substrate, so as to reduce the friction between the loading platform 101 and the substrate glass or the loading substrate, which may cause scratches on the surface of the substrate glass or the loading substrate.
The positioning member 1031 may be configured as a positioning cylinder structure, and a piston portion of the positioning cylinder is used to abut against the side surfaces of the substrate glass and the carrier substrate, so as to accurately position the substrate glass and the carrier substrate. However, the present disclosure does not limit the specific structure type of the positioning member 1031, and the substrate glass and the carrier substrate can be effectively positioned.
The driving member 1033 may be configured as any suitable driving structure, and may drive the lift bar 1034 to move in the up-down direction, which is not limited in the present disclosure. The drive element 1033 can be configured, for example, as a pneumatic cylinder, a linear motor or a hydraulic cylinder.
In one embodiment, referring to fig. 4, the jacking unit 1032 further comprises a guide structure 1036 for guiding the jacking bar 1034 to stably move in the up-and-down direction. For example, the guide structure 1036 may be configured as a plurality of lifters, and the jacking unit described above further includes a first mounting plate 1037 and a second mounting plate 1038. The plurality of lift bars 1034 are disposed on the upper surface of the first mounting plate 1037 and extend in the up-down direction, the second mounting plate 1038 is disposed below the first mounting plate 1037 and spaced from the first mounting plate 1037, the upper end of the lifter is connected to the lower surface of the first mounting plate 1037, the lower end of the lifter is connected to the upper surface of the second mounting plate 1038, the driving member 1033 may be configured as an air cylinder, the cylinder body of the air cylinder may be disposed on the second mounting plate 1038, the piston rod of the air cylinder is connected to the first mounting plate 1037, and the second mounting plate 1038 is mounted on the inner bottom wall of the lower chamber 1042.
Alternatively, during the process of extending the piston rod of the driving member 1033 configured as an air cylinder, the piston rod is connected to the first mounting plate 1037, and drives the first mounting plate 1037 to move upward and drives the lifting rod 1034 on the first mounting plate 1037 to move upward, so as to lift up the substrate glass and the carrier substrate on the carrier platform 101; in the process of retracting the piston rod of the driving member 1033 configured as an air cylinder, because the piston rod is connected to the first mounting plate 1037, the first mounting plate 1037 can be driven to move downwards and drive the lifting rod 1034 to move downwards, so that the substrate glass and the carrier substrate move downwards until the substrate glass and the carrier substrate are attached to the carrier platform 101.
In addition, the present disclosure does not limit the specific structure type of the above-mentioned guide structure 1036, and for example, the guide structure 1036 may be configured as a guide rail or a guide post to stably guide the lift bar 1034 to move in the up-down direction.
In one embodiment, as shown with reference to fig. 4, one end of the lift lever 1034 for abutting against the substrate glass is provided with a rolling member 1035 for making rolling contact with the substrate glass. Therefore, the substrate glass and the jacking rod 1034 can be effectively prevented from being scraped in the process of positioning and moving the substrate glass and the bearing substrate by the positioning member 1031, and the substrate glass is prevented from being damaged. Alternatively, the rolling member 1035 may be configured as a gimbal ball that forms rolling friction with the substrate glass, reducing damage to the surface of the substrate glass as much as possible. In addition, in order to further protect the surface of the substrate glass, the universal ball may be made of a material that does not scratch the substrate glass, such as PEEK (polyether ether ketone), nylon, or rubber.
In one embodiment, referring to fig. 2, the supporting platform 101 includes a bottom plate 1012 and a vacuum platform 1013 disposed on the bottom plate 1012, the vacuum platform 1013 is used for selectively and fixedly attaching to the substrate glass, a plurality of positioning members 1031 are disposed on the bottom plate 1012 at intervals around the periphery of the vacuum platform 1013, the through holes 1011 include a first through hole and a second through hole correspondingly disposed in the vertical direction, the first through hole is disposed on the vacuum platform 1013, and the second through hole is disposed on the bottom plate 1012.
The vacuum platform 1013 may be fixed on the base plate 1012 by means of bolts, and a gas seal such as a rubber sealing ring is disposed between the base plate 1012 and the vacuum platform 1013 to realize gas seal between the two. After the substrate glass and the carrier substrate are placed on the vacuum platform 1013 and positioned, the vacuum platform 1013 is vacuumized, so that the lower surface of the substrate glass is closely attached to the vacuum platform 1013. The installation and positioning are firm, and the situation that the substrate glass and the bearing substrate shake on the vacuum platform 1013 can be effectively avoided. Of course, the present disclosure does not limit the specific structure type of the supporting platform 101, and the substrate glass can be stably adsorbed to ensure the firmness of placement.
Optionally, referring to fig. 1, the substrate glass separator further includes a housing 104, and the carrying platform 101 extends in a horizontal direction and is disposed in the housing 104 to divide the interior of the housing 104 into an upper chamber 1041 and a lower chamber 1042 in an up-down direction; a feed port communicating with the upper chamber 1041 is formed on the housing 104 for the substrate glass and the carrier substrate to pass through and be placed on the carrier platform 101, and the top-separation mechanism 1000 is connected to the separation mechanism 102 and both are disposed in the upper chamber 1041.
First, in this embodiment, the bottom plate 1012 of the load-bearing platform 101 may be mounted on the middle cross-beam 1044 inside the housing 104, which improves the stability of the mounting. This casing 104 can protect effectively in order to build comparatively clean environment to the base plate glass that needs to carry out the separation and the load-bearing substrate, prevents that pollutants such as the dust of external environment from causing the pollution to base plate glass. In addition, the supporting platform 101 divides the interior of the casing 104 into an upper chamber 1041 and a lower chamber 1042, both the top-dividing mechanism 1000 and the separating mechanism 102 can be disposed in the upper chamber 1041, and the lifting unit 1032 can be disposed in the lower chamber 1042, so that the structure arrangement is reasonable and the space utilization rate is high.
In addition, the above-mentioned top-separating mechanism 1000 may be connected to the separating mechanism 102, before the separating mechanism 102 is not moved upward, the separating blade 10 of the top-separating mechanism 1000 thereon is inserted to the tip of the substrate glass and the carrier substrate to make a gap at the tip, and after the separating blade 10 makes a gap at the tip of the substrate glass and the carrier substrate, the separating blade 10 is withdrawn from between them and moved upward with the separating mechanism 102, so as to avoid the interference of the top-separating mechanism 1000 on the separation of the substrate glass and the carrier substrate.
Referring to fig. 1, the inlet is disposed on a sidewall of the housing 104 extending in an up-down direction, and an inlet door 1043 for closing or opening the inlet is disposed at the inlet. When the external robot takes the attached substrate glass and the carrier substrate, the feeding gate 1043 may slide downward under the action of the cylinder to expose the feeding hole, the external robot places the attached substrate glass and the carrier substrate on the carrier platform 101, the external robot leaves the inside of the housing 104, and the cylinder drives the feeding gate 1043 to slide upward to close the feeding hole. That is to say, before the substrate glass of laminating and bear the weight of the base plate and do not put into casing 104, this feed inlet of feed door 1043 closure guarantees the inside cleanliness factor of casing 104, and after external robot left the inside of this casing 104, this feed inlet of feed door 1043 same closure avoids in external pollutant gets into casing 104 through this feed inlet, avoids causing the pollution to substrate glass.
The disclosure is not limited to the specific manner in which the inlet door 1043 is mounted to the housing 104, and in other embodiments, the inlet door 1043 may be rotatably disposed on the housing 104 to open and close the inlet.
Optionally, referring to fig. 2, the substrate glass separating machine further comprises a blowing assembly 105, the blowing assembly 105 comprises a gas source for supplying high-pressure gas to the plurality of nozzles 1051, and a plurality of nozzles 1051, the plurality of nozzles 1051 are disposed on the carrying platform 101, and the plurality of nozzles 1051 are disposed on both sides adjacent to the tips of the substrate glass and the carrying substrate for blowing gas to the gap. The blowing assembly 105 is arranged to blow air to the gap separated by the jacking mechanism 1000, so that the substrate glass and the bearing substrate are separated conveniently, and the phenomenon that the two are attached tightly and cannot be separated effectively is avoided.
In addition, in order to more accurately judge whether the top-separation mechanism 1000 effectively generates a gap between the substrate glass and the carrier substrate, a monitor 10121 may be provided on the base plate 1012 near the tip end, the monitor 10121 may be electrically connected to a display screen (not shown), and an operator may judge whether an effective gap is generated by observing the display screen. Alternatively, the monitor 10121 may be configured as an image capture camera or the like, which is not limited by the present disclosure.
Alternatively, referring to fig. 3, the separating mechanism 102 includes a plurality of independent lifters 1021, a mounting bracket 1022, a plurality of flexible members 1023, and a plurality of suction cup assemblies 1024, wherein the lifters 1021 are movably connected to the inner wall of the upper chamber 1041 in the up-and-down direction, the plurality of lifters 1021 are connected to the mounting bracket 1022 through the plurality of corresponding flexible members 1023 and are configured to correspond to a plurality of tips of the substrate glass and the carrier substrate, the plurality of suction cup assemblies 1024 are parallel to each other and are spaced apart from each other along the length direction of the substrate glass separator at the mounting bracket 1022, each suction cup assembly 1024 includes a plurality of vacuum suction cups 1025 spaced apart from each other along the width direction of the substrate glass separator, and the plurality of vacuum suction cups 1025 are configured to be attached to the carrier substrate.
In this embodiment, first, the plurality of lifting members 1021 can independently move in the up-and-down direction, and during the separation process, the plurality of lifting members 1021 slowly move upwards, and the lifting member 1021 opposite to the point where the gap is generated moves upwards at a speed higher than the lifting speed of the corresponding lifting member 1021 at the other point, so that the carrier substrate is gradually separated from the substrate glass from the point where the gap is generated at an inclined angle with the horizontal plane by the vacuum chuck 1025. After the separation of the substrate glass and the carrier substrate is completed, an infrared sensor (not shown) provided on the base plate 1012 sends a signal indicating that the substrate glass and the carrier substrate have been completely separated.
It should be emphasized that since the speeds of the upward movements of the lifting members 1021 are different, the carrier substrate is in an inclined state with respect to the horizontal plane, and the flexible members 1023 are arranged to allow the carrier substrate to be inclined with respect to the horizontal plane, so as to avoid the lifting members 1021 and the mounting brackets 1022 from interfering with each other structurally and failing to effectively incline the mounting brackets 1022.
The lifter 1021 may be configured as any suitable drive structure, and the disclosure is not limited thereto.
For example, the lifting member 1021 may be configured as a lead screw nut assembly, a lead screw (not shown) of which is circumferentially locked and axially movably connected to a nut (not shown) of the lead screw nut assembly, which may be fixedly disposed on the inner wall of the upper chamber 1041, the lead screw being connected to the mounting bracket 1022 through the flexible member 1023 described above. The driving is stable and the manufacturing cost is low.
In other embodiments, the lifting member 1021 may be configured as a cylinder, a hydraulic cylinder, a linear motor, and the like, which is not limited in the present disclosure.
In order to avoid the abrasion of the supporting substrate or the substrate glass attached to the supporting platform 101 caused by the supporting platform 101, a flexible material layer (not shown) is disposed on the upper surface of the supporting platform 101, so as to effectively protect the supporting substrate or the substrate glass from being scratched. For example, the flexible material layer may be configured as a rubber layer or the like, and the disclosure does not limit the specific material of the flexible material layer.
The roller 1045 and the support column 1046 may be further disposed at the outer bottom wall of the housing 104 of the substrate glass separator. When the separator is in a locked state, the support column 1046 abuts against the ground, and the roller 1045 abuts against the ground; the separator may be moved by rollers 1045 with the support column 1046 moved upward so that the support column 1046 is disengaged from the ground.
Referring to fig. 7, the present disclosure additionally provides a substrate glass separation method applied to the above substrate glass separator, including:
s11, placing the substrate glass and the bearing substrate which are mutually attached on the bearing platform 101;
s12, the bearing platform 101 is fixedly jointed with one of the substrate glass and the bearing substrate, and the separating mechanism 102 is fixedly jointed with the other one of the substrate glass and the bearing substrate;
s13, the separation blade 10 of the top separation mechanism 1000 is inserted between the tip ends of the substrate glass and the carrier substrate at the both so as to create a gap at the tip ends;
s14, the separating mechanism 102 drives the other one of the substrate glass and the carrier substrate fixedly attached to the separating mechanism to move upward, so as to enlarge the gap until the two are separated.
In the above technical solution, the carrying platform 101 is selectively fixed and attached to one of the substrate glass and the carrying substrate, and can support the substrate glass and the carrying substrate; the separation mechanism 102 is selectively fixedly attached to the other one of the substrate glass and the carrier substrate; when separating the substrate glass and the bearing substrate, the separation blade 10 of the top separation mechanism 1000 can be inserted from the tip ends of the substrate glass and the bearing substrate and enables the tip ends to generate a gap, secondly, the separation mechanism 102 drives the other one of the substrate glass and the bearing substrate to move upwards, so that the gap between the substrate glass and the bearing substrate is gradually increased until the substrate glass and the bearing substrate are separated, the separation between the substrate glass and the bearing substrate is realized, the automation degree is high, manual separation is not needed, the separation efficiency and the separation quality are high.
In one embodiment, the specific method steps are as follows: the external robot takes the attached substrate glass and the bearing substrate, meanwhile, the feeding gate 1043 is opened, the substrate glass and the bearing substrate are placed on the bearing platform 101, the external robot leaves, and the feeding gate 1043 is closed. The driving unit 1033 of the jacking unit 1032 drives the jacking rod 1034 to ascend, so as to jack the attached substrate glass and the bearing substrate away from the surface of the bearing platform 101, the positioning members 1031 sequentially act to precisely position the attached substrate glass and the bearing substrate, and then the driving unit 1033 drives the jacking rod 1034 to move downwards, so that the substrate glass and the substrate glass in the bearing substrate are attached to the bearing platform 101; the separation mechanism 102 moves downwards until the vacuum suction cups 1025 are completely attached to the surface of the bearing substrate, and the vacuum suction cups 1025 are vacuumized to adsorb and fix the upper surface of the bearing substrate; then, the top separation mechanism 1000 is actuated, and the separation blade 10 is inserted to the substrate glass and the carrier substrate tip end to generate a gap therebetween; at this time, the blowing assembly 105 blows high-pressure gas into the gap between the two; meanwhile, the lifting piece 1021 of the separating mechanism 102 moves upwards slowly and the lifting speed of the lifting piece 1021 at the tip of the gap is higher than that at the other tips, so that the bearing substrate is gradually separated from the substrate glass from the tip with the gap at a certain inclination angle with the horizontal plane under the driving of the vacuum chuck 1025; when the substrate glass and the carrier substrate are completely separated, the infrared sensor sends out a signal, the lifting piece 1021 quickly moves up to a designated position, then the feeding door 1043 is opened again, the external robot first takes away the carrier substrate on the vacuum chuck 1025, then the carrier platform 101 releases the vacuum, the jacking rod 1034 of the jacking unit 1032 ascends to jack up the substrate glass on the carrier platform 101, the external robot takes away the substrate glass again, at this time, the separation of the attached substrate glass and the carrier substrate is completed, and then the substrate glass separator can perform the next separation.
As shown in fig. 5 to 6, the top separation mechanism 1000 includes a first drive mechanism 1, a second drive mechanism 2, and a separation blade 10. The separation blade 10 is inserted between a substrate glass (not shown) and a carrier substrate (not shown) bonded to each other to generate a gap between the substrate glass and the carrier substrate. The first drive mechanism 1 is connected to the second drive mechanism 2, and the separation blade 10 is connected to the second drive mechanism 2. The first driving mechanism 1 is used for driving the second driving mechanism 2 and the separation blade 10 to move along a first direction A, so that the separation blade 10 can be flush with the joint of the substrate glass and the bearing substrate; the second driving mechanism 2 is for driving the separation blade 10 to move in a second direction B perpendicular to the first direction a and to be inserted between the substrate glass and the carrier substrate.
In the above technical scheme, through the motion of first actuating mechanism 1 drive second actuating mechanism 2 and separation blade 10 along first direction A, thereby make separation blade 10 flush with the laminating department of base plate glass and load-bearing substrate, and then through the motion of second actuating mechanism 2 drive separation blade 10 along the second direction B of perpendicular to first direction A and insert between base plate glass and the load-bearing substrate, so that produce the gap between base plate glass and the load-bearing substrate, thereby be convenient for further separation between base plate glass and the load-bearing substrate, need not the manual work and separate the operation in gap, reduce the cost of labor, improve the efficiency of separation and the quality of separation, avoid artifical maloperation and cause the damage to base plate glass.
It should be noted here that when selecting the position of the gap, the separation blade 10 is often inserted into a corner where the substrate glass and the carrier substrate are attached to each other, so that the substrate glass and the carrier substrate are more easily separated from each other by an external force. For example, when the substrate glass and the carrier substrate are configured in a rectangular shape, the separation blade 10 may be inserted at any one or more positions of four top corners, which is not limited by the present disclosure.
Referring to fig. 5 and 6, the top separation mechanism 1000 may further include a mounting seat 3 and a positioning structure 4, the separation blade 10 is connected to the second driving mechanism 2 through the mounting seat 3, and the positioning structure 4 is mounted on the mounting seat 3; the positioning structure 4 includes a positioning rod 41, the positioning rod 41 is configured to be capable of moving along a first direction a, the positioning rod 41 and the separation blade 10 are disposed opposite to each other along the first direction a, and a projection of the separation blade 10 on the positioning rod 41 along the first direction a at least partially coincides with the positioning rod 41, the ejection mechanism 1000 has a substrate glass separation state, in the substrate glass separation state, the surface of the positioning rod 41 and the substrate glass far away from the carrier substrate abuts against, or the surface of the positioning rod 41 and the carrier substrate far away from the substrate glass abuts against.
In this embodiment, the mounting seat 3 is provided to mainly serve three purposes: first, the mounting arrangement of the split blade 10 may be facilitated by the provision of the mounting socket 3. For example, the mount 3 may be provided with a mounting groove 31, and the separation blade 10 is mounted in the mounting groove 31. The separating blade 10 can also be mounted on the mounting seat 3 by other connecting methods, which are not limited in the present disclosure; secondly, the second driving mechanism 2 is indirectly connected with the separation blade 10 through the connection of the second driving mechanism 2 and the mounting seat 3, so that the separation blade 10 is driven to move along the second direction B. Thirdly, the installation of the positioning structure 4 is facilitated by providing the installation seat 3.
The positioning structure 4 includes a positioning rod 41 disposed on the mounting base 3, and an end of the positioning rod 41 is used for abutting against a surface of the substrate glass away from the carrier substrate or abutting against a surface of the carrier substrate away from the substrate glass. In the process that the second driving mechanism 2 drives the mounting seat 3 to move along the second direction B, the separation blade 10 is inserted between the substrate glass and the carrier substrate to generate a separation gap, and in the process that the separation blade 10 moves along the second direction B, the positioning rod 41 also moves along the second direction B along with the mounting seat 3, and because the end of the positioning rod 41 abuts against the surface of the substrate glass away from the carrier substrate glass or the surface of the carrier substrate away from the substrate glass, even if the surface of the substrate glass against the positioning rod 41 or the surface of the carrier substrate against the positioning rod 41 has uneven warping, the positioning rod 41 can flatten the warping portion to play a good guiding role, and avoid the situation that the substrate glass or the carrier substrate warps and the separation blade 10 is shifted in the inserting process. In addition, the positioning rod 41 is disposed on the mounting seat 3, and the positioning rod 41 is configured to be capable of moving along the first direction a, and an operator can adjust the distance between the end part of the positioning rod 41 for abutting and the separation blade 10 by adjusting the positioning rod 41, so as to meet the requirement of positioning and guiding of substrate glass or carrier substrates with different thicknesses.
The specific use process of the positioning rod 41 is as follows: taking the example of abutting of the positioning rod 41 against the surface of the substrate glass, firstly, the operator adjusts the position of the positioning rod 41 in the first direction a so that the distance between the abutting end of the positioning rod 41 and the separating blade 10 in the first direction a is equal to the thickness of the substrate glass; secondly, an operator drives the second driving mechanism 2 and the mounting seat 3 to move along the first direction A by adjusting the first driving mechanism 1, and enables the end part, used for abutting, of the positioning rod 41 to be flush with the flat surface of the substrate glass, and under the condition that the end part, used for abutting, of the positioning rod 41 is flush with the flat surface of the substrate glass, as the distance between the end part and the separation blade 10 in the first direction A is equal to the thickness of the substrate glass, the separation blade 10 is over against the joint surface of the substrate glass and the bearing substrate, which is equivalent to accurately positioning the separation blade 10 on the basis of the flat surface of the substrate glass; then, the operator adjusts the second driving mechanism 2 to drive the mounting base 3 to move along the second direction B, so that the separation blade 10 is inserted between the substrate glass and the carrier substrate, and a gap is further generated to facilitate the separation of the substrate glass and the carrier substrate, in the process of inserting the separation blade 10, even if the substrate glass is warped, because the distance between the end part of the positioning rod 41 for abutting against and the separation blade 10 is equal to the thickness of the substrate glass, the end part of the positioning rod 41 can effectively flatten the warped part of the substrate glass, the situation that the separation blade 10 generates vibration and deviation in the process of inserting due to the warp of the substrate glass is avoided, and the stability of the movement of the separation blade 10 in the second direction B is improved.
Alternatively, the end surface of the positioning rod 41 near the separation blade 10 is formed as an arc surface 411 that is convex toward the separation blade 10, the configuration is such that the end surface of the arc surface 411 is used to abut against the surface of the substrate glass or the carrier substrate, and the distance between the arc top of the arc surface 411 and the separation blade 10 is the thickness of the substrate glass or the thickness of the carrier substrate. As can be seen from the above, the surface of the substrate glass is warped, and the warped portion generally occurs at the corner of the substrate glass during the actual production manufacturing process. The arc surface 411 will abut against the warped portion of the substrate glass first when the second driving mechanism 2 drives the mounting base 3 to move along the second direction B, the arc surface 411 is in smooth contact with the warped portion when the positioning rod 41 follows the mounting base 3 to move along the second direction B, and the arc surface 411 can flatten the warped portion when the warped portion abuts against the arc top of the arc surface 411. The design of this cambered surface 411 can play when flattening the effect with base plate glass warpage part, and simple structure is convenient for make processing. In other embodiments, the arc 411 may be configured as a sphere, which is not limited by the present disclosure.
In one embodiment, the positioning structure 4 may be a differential head, and the positioning rod 41 is configured as a screw of the differential head. The sleeve of the differential head can be installed on the installation seat 3 in a threaded connection mode so as to be convenient to disassemble and assemble. The adjusting part of the differential head is adjusted to drive the screw rod to move in the first direction A, and then the distance between the end part of the screw rod close to one end of the separation blade 10 and the separation blade 10 can be adjusted, so that the distance between the end part and the separation blade 10 is equal to the thickness of the substrate glass or the thickness of the bearing substrate glass. The positioning structure 4 is designed as a differential head primarily for two reasons: firstly, the screw rod of the differential head has higher structural strength, is generally made of metal materials, can effectively support the substrate glass or the bearing substrate, and has enough strength to flatten the warped part under the condition that the substrate glass warps; secondly, the differential head has the function of accurately measuring the length, the distance between the end part of the screw rod close to one end of the separation blade 10 and the separation blade 10 can be measured by utilizing the measuring function of the differential head, other measuring tools are not needed for measurement, the practicability is strong, the operation is simple and convenient, in addition, the measuring precision of the differential head is high, and the positioning precision of the separation blade 10 is improved.
In one embodiment, referring to fig. 5, the first driving mechanism 1 may include a first fixing bracket 11, a first lead screw 12, and a first slider 13, the first lead screw 12 extends along the first direction a, the first lead screw 12 is mounted on the first fixing bracket 11 in a manner of being circumferentially rotatable and axially lockable, a first threaded hole is formed on the first slider 13, the first lead screw 12 is in threaded connection with the first threaded hole and forms a lead screw nut pair, and the first slider 13 is connected to the second driving mechanism 2.
For example, the first fixing bracket 11 may be opened with a first rotation hole 110, the first lead screw 12 includes a first lead screw head 121 disposed at an end portion far from the first slider 13 and a first lead screw body 122 connected to the first lead screw head 121, and the first driving mechanism 1 includes a first nut 123 engaged with the first lead screw 12. Specifically, during installation, the first lead screw body 122 passes through the first rotation hole 110 to be connected to the first slider 13, the first lead screw head 121 abuts against the outer periphery of the first rotation hole 110, and the first nut 123 is sleeved on the first lead screw body 122 and abuts against the inner periphery of the first rotation hole 110. During the rotation of the first lead screw 12 in the first rotation hole 110, the first lead screw 12 cannot move along the axial direction thereof due to the limit function of the first lead screw head 121 and the first nut 123.
In this embodiment, by providing the first drive mechanism 1 as a drive form of a screw nut assembly, the second drive mechanism 2 and the separation blade 10 provided on the mount base 3 can be driven smoothly and efficiently to move in the first direction a, and the first drive mechanism 1 is simple in structure and low in manufacturing cost; the first driving mechanism 1 configured as a lead screw nut assembly may be driven by a driving source such as a rotating motor to improve the degree of automation of the separation device, or may be driven by an operator manually rotating the first lead screw 12, and the disclosure is not limited thereto.
In addition, the first driving mechanism 1 may also be configured as other types of driving mechanisms to drive the second driving mechanism 2 and the mounting base 3 to move along the first direction a, for example, the first driving mechanism 1 may be configured as a linear motor, a hydraulic cylinder, a pneumatic cylinder, or the like, which is not limited by the present disclosure.
In one embodiment, as shown with reference to fig. 5, the second drive mechanism 2 comprises an alignment unit 21 and a thrust unit 22, the alignment unit 21 being connected between the first drive mechanism 1 and the thrust unit 22, the separation blade 10 being connected with the thrust unit 22; wherein, the aligning unit 21 is used for driving the thrust unit 22 and the separating blade 10 to move along the second direction B so as to enable the separating blade 10 to be close to the joint of the substrate glass and the bearing substrate, and the thrust unit 22 is used for applying a force which moves along the second direction B and is inserted between the substrate glass and the bearing substrate to the separating blade 10.
In this embodiment, the thrust unit 22 and the separation blade 10 are first driven by the alignment unit 21 to move in the second direction B, so that the separation blade 10 is close to the joint of the substrate glass and the carrier substrate; a force that moves in the second direction B and is interposed between the substrate glass and the carrier substrate is applied to the separation blade 10 by the thrust unit 22. By arranging the second driving mechanism 2 as two parts of the aligning unit 21 and the thrust unit 22, the action of the second driving mechanism 2 driving the separating blade 10 to move along the second direction B is divided into two actions of alignment and insertion, the alignment is to make the separating blade 10 close to the joint of the substrate glass and the bearing substrate, the distance between the separating blade 10 and the substrate glass and the bearing substrate in the second direction B is shortened as much as possible, so that the separation blade 10 can be accurately inserted between the substrate glass and the carrier substrate, and the separation blade 10 is prevented from being too far away from the carrier substrate in the second direction B and the substrate glass, which can not ensure the precise alignment of the separation blade 10 and the joint, so that there occurs a problem that the thrust unit 22 cannot effectively drive the separation blade 10 to be inserted between the substrate glass and the carrier substrate, resulting in breakage of the separation blade 10, etc.
In one embodiment, as shown in fig. 5, the alignment unit 21 includes a second fixing bracket 211, a second lead screw 212, and a second slider 213, the second fixing bracket 211 is connected to the first driving mechanism 1, the second lead screw 212 extends along the second direction B, the second lead screw 212 is circumferentially rotatably and axially lockingly mounted on the second fixing bracket 211, a second threaded hole is formed on the second slider 213, and the second lead screw 212 is threadedly connected to the second threaded hole and forms a lead screw nut pair; the thrust unit 22 includes a cylinder including a cylinder body 221 and a piston rod 222, the cylinder body 221 is connected to the second slider 213, the piston rod 222 extends in the second direction B, and one end of the piston rod 222 is inserted into the cylinder body 221, and the other end is connected to the separation blade 10.
In this embodiment, the second fixing bracket 211 may be formed with a second rotation hole 2110 thereon, the second lead screw 212 includes a second lead screw head 2121 and a second lead screw body 2122, and the alignment unit 21 further includes a second nut 214 engaged with the second lead screw 212. Specifically, during installation, the second lead screw body 2122 passes through the second rotation hole 2110 to be connected to the second slider 213, the second lead screw head 2121 abuts against the outer periphery of the second rotation hole 2110, and the second nut 241 is sleeved on the second lead screw body 2122 and abuts against the inner periphery of the second rotation hole 2110. During the rotation of the second lead screw 212 in the second rotation hole 2110, the second lead screw 212 cannot move along the axial direction thereof due to the limit function of the second lead screw head 2121 and the second nut 214.
By providing the alignment unit 21 as a driving form of a screw nut assembly, the thrust unit 22 and the separation blade 10 provided on the mount 3 can be driven smoothly and efficiently in the first direction a, and the alignment unit 21 is simple in structure and low in manufacturing cost; the alignment unit 21 configured as a lead screw nut assembly may be driven by a driving source such as a rotating motor to improve the degree of automation of the separation device, or may be driven by an operator manually rotating the second lead screw 212, which is not limited by the present disclosure.
In addition, by providing the thrust unit 22 as an air cylinder, the air cylinder can apply stability to the separation blade 10 provided on the mount base 3 to insert the separation blade 10 between the substrate glass and the carrier substrate to create a gap, facilitating separation of the two. In addition, the cylinder is operated quickly and efficiently to insert or remove the separation blade 10 between the substrate glass and the carrier substrate, and the separation efficiency can be improved effectively. However, the present disclosure is not limited to the type of the structure of the thrust unit 22, and the thrust unit may be configured as a driving structure such as a hydraulic cylinder or a linear motor
Referring to fig. 5, the first driving mechanism 1 includes a first fixing bracket 11, a first lead screw 12 and a first slider 13, the first lead screw 12 extends along a first direction a, the first lead screw 12 is installed on the first fixing bracket 11 in a manner that the first lead screw 12 can rotate circumferentially and be locked axially, a first threaded hole is formed on the first slider 13, one end of the first lead screw 12 is connected with the first threaded hole in a threaded manner to form a lead screw nut pair, a guide portion extending along the first direction a is formed on the first slider 13, and the guide portion is in sliding fit with the first fixing bracket 11; the second fixing bracket 211 is mounted on the first slider 13, the first slider 13 is formed with a slide groove 132 extending in the second direction B, and the second slider 213 is slidably connected to the slide groove 132.
In this embodiment, the guiding portion of the first slider 13 disposed along the first direction a may be configured as a guiding plane, and the first fixing bracket 11 is provided with a sliding plane slidably engaged with the guiding plane structure, so as to improve the smoothness of the movement of the first slider 13 in the first direction a.
In addition, since the sliding groove 132 extending in the second direction B is provided in the first slider 13 and the second slider 213 is slidably provided in the sliding groove 132, there is no need to separately provide an installation structure for the second slider 213, and the conventional first slider 13 is used as an installation base, thereby reducing the structural design and improving the compactness of the separation apparatus.
Alternatively, as shown in fig. 5, a mounting plate 100 is disposed on the first fixing bracket 11, the mounting plate 100 is used for connecting with a separating mechanism of a substrate glass separator, and the top separating mechanism 1000 can be connected with the substrate glass separator conveniently by disposing the mounting plate 100. In one embodiment, the mounting plate 100 may be configured as an L-shaped connecting plate, the end of which may be bolted to the frame of the substrate glass separator. However, the shape of the mounting plate 100 is not limited in the present disclosure, and the mounting plate may be designed as desired, and may be stably connected to the rack.
The preferred embodiments of the present disclosure are described in detail with reference to the accompanying drawings, however, the present disclosure is not limited to the specific details of the above embodiments, and various simple modifications may be made to the technical solution of the present disclosure within the technical idea of the present disclosure, and these simple modifications all belong to the protection scope of the present disclosure. It should be noted that, in the foregoing embodiments, various features described in the above embodiments may be combined in any suitable manner, and in order to avoid unnecessary repetition, various combinations that are possible in the present disclosure are not described again.
In addition, any combination of various embodiments of the present disclosure may be made, and the same should be considered as the disclosure of the present disclosure, as long as it does not depart from the spirit of the present disclosure.
Claims (10)
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Effective date of registration: 20250415 Address after: Room 606, 6th Floor, Building D and E, Commercial Center, Renmin Road Central Street, Taocheng District, Hengshui City, Hebei Province 053099 Patentee after: Hengshui Hengyin Enterprise Management Co.,Ltd. Country or region after: China Address before: 050035 No. 9, the Yellow River Avenue, hi tech Zone, Hebei, Shijiazhuang Patentee before: Hebei Guangxing Semiconductor Technology Co.,Ltd. Country or region before: China Patentee before: DONGXU OPTOELECTRONIC TECHNOLOGY Co.,Ltd. Patentee before: TUNGHSU TECHNOLOGY GROUP Co.,Ltd. |