CN112658271B - Efficient combined type gas atomization powder preparation device and method - Google Patents

Abstract

The present invention relates to the technical field of gas atomization powder making, in particular to a high-efficiency composite gas atomization powder making device and method, comprising a vacuum smelting system, an atomization system and a powder collection chamber connected in sequence; the vacuum smelting system includes a vacuum Melting chamber, high-frequency melting coil, melting crucible, first vacuum system, first protective atmosphere gas path and first cooling system; the atomization system includes atomization chamber, high-pressure non-oxidizing gas path, gas atomization nozzle, electrode A gun, a second vacuum system, a second protective atmosphere gas path, an Ar gas path and a second cooling system; the gas atomization nozzle is provided with a central hole, and the central hole is equipped with a guide device. The present invention integrates the two technologies of gas atomization and arc discharge into one continuous pulverizing process; through the arc discharge technology, the common problems of gas atomization technology, such as clogged nozzles, insufficient fineness of particles, and particle size Technical issues such as wide distribution, high-pressure gas path outlet, and metal droplet angle design.

Description

A high-efficiency compound gas atomization powder making device and method

technical field

The invention relates to the technical field of gas atomization powder making, in particular to an efficient composite gas atomization powder making device and method.

Background technique

The history of gas atomization pulverization technology originated in the 10th century. The principle of pulverization is to use high-speed airflow to act on the molten liquid flow, so that the kinetic energy of the gas is converted into the surface energy of the melt, and then small droplets are formed and solidified into powder particles. . Gas atomization powder making technology has the advantages of less environmental pollution, high powder sphericity, low oxygen content and high cooling rate, and has become the main method for producing metal and alloy powders. With the application of powder materials in chemical industry, electronic device preparation, surface engineering and military industries, the requirements for powder purity, size and sphericity are constantly increasing, which promotes the further development of gas atomization preparation devices.

In the traditional atomization process, the molten metal enters the nozzle through the leakage nozzle for atomization, but because the supersonic gas bombards the molten metal, the gas field in the whole atomization process is relatively chaotic, and after the bombardment is completed, particles of different sizes will be formed. Metal particles, among them, the heat dissipation rate of large particles is slow, and it takes a long time to complete the curing process, while the curing time of small particles with larger sizes will be much shorter. In the high-speed turbulent air flow, it will occur The small particles that have completely solidified impinge on the surface of the large particles that have not completely solidified, causing surface defects. At the same time, the nozzles are easy to block, causing the production process to fail to proceed normally.

At present, the traditional gas atomization equipment is separated from the smelting and flow-limiting pouring system, and there will be some contact with oxygen during the powder preparation process, resulting in high oxygen content in the powder and affecting the performance of the powder. Some gas atomization powder making equipment integrates smelting and pouring, but the structure is too complicated, the operation is troublesome, the price is expensive, and the maintenance is difficult, which limits its large-scale application. At the same time, non-restrictive atomizing nozzles are widely used in China, which makes it difficult to prepare powder refinement. Although there are some special nozzle designs, the structure is relatively complicated.

The Chinese patent literature discloses "an integrated induction melting gas atomization powder making device and a method for gas atomization powder making". , to avoid clogging at the nozzle. But this design cannot form sustainable industrial production.

"A device and method for preparing spherical titanium powder and titanium alloy powder by gas atomization" is disclosed in the Chinese patent literature, and its application publication number is CN104475744A. The two processes are combined into a continuous powder preparation process to realize continuous production of titanium and titanium alloy powder. However, this device is only suitable for the continuous production of titanium and titanium alloy powders, and for alloys containing low melting point metals such as Al, it is easy to cause nozzle blockage.

The Chinese patent literature discloses "a combination device for preparing spherical metal powder by gas atomization method", and its application publication number is CN109848429A. This invention includes more than two different types of gas atomization melting furnaces. Due to the limitation of the production conditions of the atomization furnace and the atomization tower, various types of powder can be produced in the same production system, which improves the production efficiency. The powder prepared by this device has a large size and a large distribution range, and the powder surface is not clean.

Contents of the invention

In order to overcome the above-mentioned problems in the prior art, the present invention provides a high-efficiency compound gas atomization powder making device which can continuously make powder by gas atomization and arc discharge, and effectively avoid clogging of the nozzle at the nozzle.

The present invention also provides a method for making powder by gas atomization using the above-mentioned device. The powder particles produced by the method have high spheroidization rate, good sphericity, small particle diameter and good surface quality, and can be realized in airtight, high vacuum, Production under industrial conditions is conducive to large-scale industrial production.

In order to achieve the above object, the present invention adopts the following technical solutions:

A high-efficiency compound gas atomization powder making device, including a vacuum smelting system, an atomization system, and a powder collection chamber connected in sequence; the vacuum smelting system includes a vacuum smelting chamber, a high-frequency melting coil located in the vacuum smelting chamber, The melting crucible, the first vacuum system, the first protective atmosphere gas path and the first cooling system; the melting crucible is located directly below the high-frequency melting coil and the centerline is on the same axis; the atomization system includes an atomization chamber, The high-pressure non-oxidizing gas path, gas atomization nozzle, electrode gun, second vacuum system, second protective atmosphere gas path, Ar gas path and second cooling system located in the atomization chamber; the gas atomization nozzle is provided with A central hole, the central hole is equipped with a guide; the electrode gun is located below the gas atomization nozzle.

The invention creatively adds an electrode gun under the metal or alloy droplet, and relieves the impact of the high-pressure non-oxidizing gas outlet on the metal or alloy droplet through a high-temperature plasma arc. The composite gas atomization powder making device of the present invention integrates the two technologies of gas atomization and arc discharge, and combines the two processes into one continuous powder making process. The arc discharge technology is used to make up for the common technical problems of gas atomization technology, such as clogged nozzles, insufficient particle size, wide particle size distribution, high-pressure gas outlet and metal droplet angle design.

Preferably, the gas outlet of the high-pressure non-oxidizing gas path is at an angle of 0-90 ^° to the metal or alloy liquid flow. Due to the even-numbered high-energy arc support function under the droplet, the molten metal can stay in the gas atomization nozzle for a period of time. Therefore, there is not much restriction on the angle between the outlet of the high-pressure non-oxidizing gas path and the droplet, 0~90 ^o Both are available, so the creative design can promote the finer particle size and uniform distribution of the aerosolized powder.

Preferably, the gas atomization nozzle, the central hole, the guiding device, the high-frequency melting coil and the central point of the electrode gun are on the same axis.

Preferably, the electrode gun is located at 3-5 mm from the lower edge of the gas atomization nozzle.

Preferably, there are at least two electrode guns arranged symmetrically with the center of the circle, the electrode guns include electrodes, the distance between the electrodes is 3-5mm from the center of the circle, and the material of the electrodes is tungsten, graphite or niobium.

A method for aerosolized powder production using any of the above-mentioned devices, comprising the following steps:

(1) Put the metal or alloy to be pulverized into the high-frequency melting coil, seal the vacuum melting chamber, vacuumize the whole device through the first vacuum system and the second vacuum system, and pass the first protective gas through the first protective atmosphere The gas path is led into the vacuum melting chamber, and the second protective gas is passed into the atomization chamber and the powder collection chamber through the second protective atmosphere gas path; the high-purity Ar gas is recoiled into the atomization chamber through the Ar gas path;

(2) Use a high-frequency melting coil to melt the metal or alloy to be powdered, and after melting, the melt temperature exceeds the melting point of the metal or alloy to be powdered by 100~300 ^o C, forming a stable and continuous metal or alloy liquid flow;

(3) The metal or alloy liquid flow obtained in step (2) falls freely under the action of gravity. At the same time, a voltage is applied to the electrode gun for arc discharge. When the liquid flow leaves the gas atomization nozzle, it is simultaneously charged by high-energy plasma arc and The inert airflow generated by the nozzle is broken into fine metal droplets; this step obtains thousands of degrees of high-temperature plasma by ionizing Ar gas, which realizes continuous heating of the metal or alloy liquid, subverting the traditional induction coil to heat the nozzle at a temperature only higher than The melting point is 100-300°C, so as to avoid the clogging of the nozzle at the nozzle;

(4) The metal or alloy droplets are cooled and solidified by the second cooling system during the descent process, and aerosolized powder is obtained, which falls into the powder collection chamber at the lower end of the equipment;

(5) After the aerosolized powder is fully cooled to room temperature, it can be screened and packaged.

The gas atomization pulverization method of the present invention has a simple process, and the prepared powder has finer particle size, narrower distribution, and higher sphericity, and there will be no phenomenon of liquid clogging the nozzle during the pulverization process, and at the same time, the flow rate of the gas can be changed. The pressure and the pressure on the electrode gun are used to change the particle size and particle size distribution ratio of the prepared powder.

Preferably, in step (3), the voltage applied to the electrode gun is 30-100 V, and the atomizing gas pressure is 0.5-20 MPa. The present invention can regulate the particle size and size distribution of the powder through the atomization gas pressure and the applied voltage of the electrode gun, and realize the large-scale industrial preparation of powder with small size (down to 0.1 μm) and uniform distribution.

Preferably, in step (4), the particle size of the gas-atomized powder is 0.1-50 μm, and the oxygen content is 100-1000 ppm.

Therefore, the present invention has following beneficial effect:

(1) The composite gas atomization pulverizing device of the present invention integrates the two technologies of gas atomization and arc discharge, and combines the two processes into one continuous pulverization process; Common technical problems such as blocked nozzles, insufficient particle size, wide particle size distribution, high-pressure gas outlet and metal droplet angle design;

(2) The process of using the device of the present invention to make powder by gas atomization is simple, and the obtained powder has finer particle size, narrower distribution, and higher sphericity, and there will be no phenomenon of liquid clogging the nozzle during the powder making process. At the same time, it can Change the pressure of the gas and the pressure on the electrode gun to change the particle size and particle size distribution ratio of the prepared powder.

Description of drawings

Fig. 1 is a schematic structural view of the high-efficiency composite gas atomization pulverizing device of Example 1.

Fig. 2 is a schematic diagram of the position of the electrode gun in Fig. 1 .

In the figure: vacuum melting chamber 1, high-frequency melting coil 2, melting crucible 3, guide device 4, high-pressure non-oxidizing gas circuit 5, gas atomization nozzle 6, electrode gun 7, atomization chamber 8, powder collection chamber 9, the first A vacuum system 10 , an observation window 11 , an Ar gas path 12 , a second protective atmosphere gas path 13 , a first cooling system 14 , a first protective atmosphere gas path 15 , a second vacuum system 16 , and a second cooling system 17 .

Detailed ways

The technical solutions of the present invention will be further specifically described below through specific embodiments and in conjunction with the accompanying drawings.

In the present invention, unless otherwise specified, all equipment and raw materials can be purchased from the market or commonly used in this industry. The methods in the following examples, unless otherwise specified, are conventional methods in this field.

Example 1

As shown in Figure 1, a high-efficiency composite gas atomization powder making device includes a vacuum smelting system, an atomization system and a powder collection chamber 9 connected in sequence.

The vacuum melting system includes a vacuum melting chamber 1, a high-frequency melting coil 2 located in the vacuum melting chamber, a melting crucible 3, a first vacuum system 10, a first protective atmosphere gas circuit 15 and a first cooling system 14; the melting crucible is in the high-frequency melting The coil is directly below and the center line is on the same axis; a ceramic protective cover made of yttrium oxide with a central hole is installed inside and outside the high-frequency melting coil.

The vacuum smelting chamber 1 is vacuumed through the first vacuum system 10 , and then the high-purity inert gas is recoiled into the vacuum smelting chamber 1 through the first protective atmosphere gas path 15 . The temperature of the entire vacuum melting chamber 1 is maintained by the first cooling system 14 to remove heat.

The atomization system includes an atomization chamber 8 with an observation window 11 on the outer wall, a high-pressure non-oxidizing gas circuit 5 located in the atomization chamber, a gas atomization nozzle 6, an electrode gun 7, a second vacuum system 16, and a second protective atmosphere Gas path 13, Ar gas path 12 and second cooling system 17; the gas atomization nozzle is provided with a central hole, the center hole is equipped with a guide device 4, and the electrode gun is located 4mm below the gas atomization nozzle. The gas outlet of the high-pressure non-oxidizing gas path is at 0 ^o to the metal or alloy liquid flow, and the gas atomization nozzle, central hole, guide device, high-frequency melting coil and the center point of the electrode gun are on the same axis.

As shown in Figure 2, there are four electrode guns arranged symmetrically with the center of the circle. The electrode material of the stun gun is tungsten, and the distance from the center of the circle is 3-5mm. The atomization chamber 8 is vacuumed by the second vacuum system 16 , and then the high-purity inert gas and Ar gas are backflushed into the atomization chamber 8 through the protective atmosphere 13 and the Ar gas path 12 respectively. The temperature of the whole atomization chamber 8 is maintained by the second cooling system 17 to take away heat. The situation in the atomization chamber 8 is observed through the observation window 11 . The metal or alloy droplets are cooled and solidified during the descent, and finally fall into the powder collection chamber 9 at the lower end of the device. After the powder is fully cooled to room temperature, the screening and packaging of the powder can be carried out.

A method for making powder by gas atomization using the above-mentioned device, comprising the following steps:

(1) Select Fe, Si, and Al into the high-frequency melting coil 2, seal the vacuum melting chamber 1, and vacuumize the entire device through the first vacuum system 10 and the second vacuum system 16. The vacuum degree in the device reaches at least 1×10 ^-3 Pa; the high-purity N ₂ gas is passed into the vacuum melting chamber 1 through the first protective atmosphere gas path 15, and the high-purity N ₂ gas is passed through the second protective atmosphere gas path 13 into the atomization chamber 8 and powder collection chamber 9, the gas pressure in the vacuum smelting chamber, atomization chamber and powder collection chamber is 0.10 MPa; the high-purity Ar gas recoils into the atomization chamber through the Ar gas path, and the atomization The pressure of high-purity Ar gas inside the chamber is 0.01 MPa;

(2) Use a high-frequency melting coil with a power of 10kW to melt Fe, Si, and Al. After melting, the melt temperature exceeds the melting point of FeSi alloy by 100 ^o C, forming a stable and continuous FeSi alloy liquid flow;

(3) The FeSiAl alloy liquid flow obtained in step (2) falls freely under the action of gravity, and the gas outlet of the high-pressure non-oxidizing gas circuit is 0 ^o to the FeSi alloy liquid flow. At the same time, a voltage is applied to the electrode gun 7 for arc discharge , when the liquid flow leaves the gas atomization nozzle, it is synchronously broken into fine metal droplets by the high-energy plasma arc and the inert gas flow generated by the nozzle; the applied voltage of the electrode gun is 30 V, and the atomization gas is high-purity _N2 gas. The gas pressure is 0.5MPa;

(4) The FeSi alloy liquid flow is cooled and solidified by the second cooling system during the descending process to obtain gas atomized powder, which falls into the powder collection chamber 9 at the lower end of the equipment. The particle size of the gas atomized powder is 21 μm, and the oxygen content is 350 ppm ;

(5) After the aerosolized powder is fully cooled to room temperature, it can be screened and packaged.

Example 2

The difference between the high-efficiency composite gas atomization powder making device of Example 2 and Example 1 is that: the gas outlet of the high-pressure non-oxidizing gas circuit is at 90 ^° to the metal or alloy liquid flow; there are 8 electrode guns arranged symmetrically with the center of the circle, The electrode material of the stun gun is tungsten, the distance from the center of the circle is 3mm, and the rest of the structure is exactly the same.

A method for making powder by gas atomization using the above-mentioned device, comprising the following steps:

(1) Put two kinds of metals, Fe and Si, into the high-frequency melting coil 2, seal the vacuum melting chamber 1, and vacuumize the whole device through the first vacuum system 10 and the second vacuum system 16, and the inside of the device after vacuuming The vacuum degree is at least 1×10 ^-4 Pa; the high-purity nitrogen gas is passed into the vacuum melting chamber 1 through the first protective atmosphere gas path 15, and the high-purity nitrogen gas is passed into the atomization chamber 1 through the second protective atmosphere gas path 13 In chamber 8 and powder collection chamber 9, the gas pressure in the vacuum smelting chamber, atomization chamber and powder collection chamber is 0.5 MPa; the high-purity Ar gas recoils into the atomization chamber through the Ar gas path, and the high-purity Ar gas inside the atomization chamber The pressure is 0.05 MPa;

(2) Use a high-frequency melting coil with a power of 300 kW to melt the two metals, Fe and Si, and after the melt temperature exceeds the melting point of the FeSi alloy by 300 ^o C, a stable and continuous FeSi alloy liquid flow is formed;

(3) The FeSi alloy liquid flow obtained in step (2) falls freely under the action of gravity, and the gas outlet of the high-pressure non-oxidizing gas circuit is at 90 ^° to the FeSi alloy liquid flow. At the same time, a voltage is applied to the electrode gun 7 to start the arc Discharge, when the liquid flow leaves the gas atomization nozzle, it is simultaneously broken into fine metal droplets by the high-energy plasma arc and the inert gas flow generated by the nozzle; the applied voltage of the electrode gun is 100 V, and the atomization gas pressure is 20 MPa;

(4) The Fe Si alloy liquid flow is cooled and solidified by the second cooling system during the descending process, and the gas atomized powder is obtained, which falls into the powder collection chamber 9 at the lower end of the equipment. The shape of the gas atomized powder is spherical and the particle size is 33 μm , the oxygen content is 660 ppm;

(5) After the aerosolized powder is fully cooled to room temperature, it can be screened and packaged.

Example 3

The difference between the high-efficiency compound gas atomization powder making device of Example 3 and Example 1 is that: the gas outlet of the high-pressure non-oxidizing gas circuit is at 45 ^° to the metal or alloy liquid flow; there are two electrode guns arranged symmetrically with the center of the circle, The electrode material of the stun gun is tungsten, the distance from the center of the circle is 5mm, and the rest of the structure is exactly the same.

A method for making powder by gas atomization using the above-mentioned device, comprising the following steps:

(1) Put Ti metal into the high-frequency melting coil 2, seal the vacuum melting chamber 1, and vacuumize the whole device through the first vacuum system 10 and the second vacuum system 16. The vacuum degree in the device after vacuuming is at least Reach 5×10 ^-4 Pa; pass high-purity nitrogen gas into the vacuum melting chamber 1 through the first protective atmosphere gas path 15, and pass high-purity nitrogen gas into the atomization chamber 8 and powder through the second protective atmosphere gas path 13 In the collection chamber 9, the gas pressure in the vacuum smelting chamber, the atomization chamber and the powder collection chamber is 0.3 MPa; the high-purity Ar gas recoils into the atomization chamber through the Ar gas path, and the pressure of the high-purity Ar gas inside the atomization chamber is 0.03 MPa. MPa;

(2) Melt Ti metal with a high-frequency melting coil with a power of 200 kW, and form a stable and continuous Ti metal liquid flow after the melt temperature exceeds the melting point of the metal or alloy to be powdered by 200 ^o C after melting;

(3) The Ti metal liquid flow obtained in step (2) falls freely under the action of gravity, and the gas outlet of the high-pressure non-oxidizing gas circuit is 45 ^o to the Ti metal liquid flow; at the same time, a voltage is applied to the electrode gun 7 for arc discharge , when the liquid flow leaves the gas atomization nozzle, it is simultaneously broken into fine metal droplets by the high-energy plasma arc and the inert gas flow generated by the nozzle; the applied voltage of the electrode gun is 80V, and the atomization gas pressure is 10MPa;

(4) The Ti metal liquid flow is cooled and solidified by the second cooling system during the descending process, and the gas atomized powder is obtained, which falls into the powder collection chamber 9 at the lower end of the equipment. The shape of the gas atomized powder is spherical, and the particle size is 29 μm. The oxygen content is 410ppm;

(5) After the aerosolized powder is fully cooled to room temperature, it can be screened and packaged.

Example 4

The difference between the high-efficiency composite gas atomization pulverizing device of Example 4 and Example 1 is that: the gas outlet of the high-pressure non-oxidizing gas circuit is at 60 ^° to the metal or alloy liquid flow; there are 6 electrode guns arranged symmetrically with the center of the circle, The electrode material of the stun gun is tungsten, the distance from the center of the circle is 3.5mm, and the rest of the structure is exactly the same.

A method for making powder by gas atomization using the above-mentioned device, comprising the following steps:

(1) Put Mo metal into the high-frequency melting coil 2, seal the vacuum melting chamber 1, and vacuumize the whole device through the first vacuum system 10 and the second vacuum system 16, and the vacuum degree in the device after vacuuming is at least Reach 7×10 ^-4 Pa; pass high-purity nitrogen gas into the vacuum melting chamber 1 through the first protective atmosphere gas path 15, and pass high-purity nitrogen gas into the atomization chamber 8 and powder through the second protective atmosphere gas path 13 In the collection chamber 9, the gas pressure in the vacuum smelting chamber, the atomization chamber and the powder collection chamber is 0.2 MPa; the high-purity Ar gas recoils into the atomization chamber through the Ar gas path, and the pressure of the high-purity Ar gas inside the atomization chamber is 0.02 MPa. MPa;

(2) Use a high-frequency melting coil with a power of 100kW to melt the Mo metal to be melted. After the melt temperature exceeds the melting point of the Mo metal by 150 ^o C, a stable and continuous Mo metal liquid flow is formed;

(3) The Mo metal liquid flow obtained in step (2) falls freely under the action of gravity, and the gas outlet of the high-pressure non-oxidizing gas circuit is at 60 ^° to the metal or alloy liquid flow; at the same time, a voltage is applied to the electrode gun 7 to start the arc Discharge, when the liquid flow leaves the gas atomization nozzle, it is simultaneously broken into fine metal droplets by the high-energy plasma arc and the inert gas flow generated by the nozzle; the applied voltage of the electrode gun is 70V, and the atomization gas pressure is 15 MPa;

(4) Mo metal droplets are cooled and solidified by the second cooling system during the descending process to obtain gas atomized powder, which falls into the powder collection chamber 9 at the lower end of the equipment. The particle size of the gas atomized powder is 28 μm, and the oxygen content is 380 ppm ;

(5) After the aerosolized powder is fully cooled to room temperature, it can be screened and packaged.

Example 5

The difference between the high-efficiency composite gas atomization powder making device of Example 5 and Example 1 is that: the gas outlet of the high-pressure non-oxidizing gas circuit is at 70 ^° to the metal or alloy liquid flow; there are 4 electrode guns arranged symmetrically with the center of the circle, The electrode material of the stun gun is tungsten, the distance from the center of the circle is 4.5mm, and the rest of the structure is exactly the same.

A method for making powder by gas atomization using the above-mentioned device, comprising the following steps:

(1) Put Fe, Si, and Cr into the high-frequency melting coil 2, seal the vacuum melting chamber 1, and vacuumize the whole device through the first vacuum system 10 and the second vacuum system 16. After vacuuming, The vacuum degree in the device reaches at least 2×10 ^-4 Pa; the high-purity nitrogen gas is passed into the vacuum melting chamber 1 through the first protective atmosphere gas path 15, and the high-purity nitrogen gas is passed into the vacuum melting chamber 1 through the second protective atmosphere gas path 13. In the atomization chamber 8 and the powder collection chamber 9, the gas pressure in the vacuum smelting chamber, the atomization chamber and the powder collection chamber is 0.3 MPa; the high-purity Ar gas recoils into the atomization chamber through the Ar gas path, and the high-purity Ar gas inside the atomization chamber The pressure of Ar gas is 0.04 MPa;

(2) Use a high-frequency melting coil with a power of 80kW to melt the three metals Fe, Si, and Cr. After the melt temperature exceeds the melting point of the FeSiCr alloy by 180 ^o C, a stable and continuous FeSiCr alloy liquid flow is formed;

(3) The FeSiCr alloy liquid flow obtained in step (2) falls freely under the action of gravity, and the gas outlet of the high-pressure non-oxidizing gas circuit is 70 ^o to the FeSiCr alloy liquid flow; at the same time, apply voltage to the electrode gun 7 for arc discharge , when the liquid flow leaves the gas atomization nozzle, it is simultaneously broken into fine metal droplets by the high-energy plasma arc and the inert gas flow generated by the nozzle; the applied voltage of the electrode gun is 60V, and the atomization gas pressure is 10 MPa;

(4) The FeSiCr alloy liquid flow is cooled and solidified by the second cooling system during the descending process to obtain gas atomized powder, which falls into the powder collection chamber 9 at the lower end of the equipment. The shape of the gas atomized powder is spherical and the particle size is 30 μm. The oxygen content is 340ppm;

(5) After the aerosolized powder is fully cooled to room temperature, it can be screened and packaged.

The above descriptions are only preferred embodiments of the present invention, and are not intended to limit the present invention in any form. There are other variations and modifications on the premise of not exceeding the technical solutions described in the claims.

Claims (9)

1. The efficient combined type gas atomization powder preparation device is characterized by comprising a vacuum smelting system, an atomization system and a powder collection chamber which are connected in sequence; the vacuum smelting system comprises a vacuum smelting chamber, a high-frequency smelting coil, a smelting crucible, a first vacuum system, a first protective atmosphere gas circuit and a first cooling system, wherein the high-frequency smelting coil is positioned in the vacuum smelting chamber; the smelting crucible is positioned right below the high-frequency smelting coil, and the central lines of the smelting crucible and the high-frequency smelting coil are positioned on the same axis; the atomization system comprises an atomization chamber, a high-pressure non-oxidation gas circuit, an air atomization nozzle, an electrode gun, a second vacuum system, a second protective atmosphere gas circuit, an Ar gas circuit and a second cooling system, wherein the high-pressure non-oxidation gas circuit, the air atomization nozzle, the electrode gun, the second vacuum system, the second protective atmosphere gas circuit, the Ar gas circuit and the second cooling system are arranged in the atomization chamber; the air atomizing nozzle is provided with a central hole, and the central hole is provided with a guide device; the electrode gun is located at the position 3-5 mm below the lower edge of the gas atomization nozzle.

2. The efficient composite aerosolizing and pulverizing device according to claim 1, wherein the high-frequency smelting coil is internally and externally provided with a ceramic protective cover with a central hole, and the ceramic protective cover is made of yttrium oxide, zirconium oxide, boron nitride or aluminum oxide.

3. The efficient composite gas atomization powder making device according to claim 1, wherein the gas outlet of the high-pressure non-oxidation gas circuit is 0-90% of the metal or alloy liquid flow ^o 。

4. The efficient composite aerosolized powder process apparatus of claim 1 wherein the aerosolized nozzle, center bore, guide, high-frequency melting coil, and electrode gun center point are on the same axis.

5. The efficient composite aerosolized powder process device of claim 4, wherein at least two of the electrode guns are symmetrically arranged in an even number at the same center, the electrode guns comprise electrodes, the electrodes are 3-5 mm away from the center, and the electrodes are made of tungsten, graphite or niobium.

6. A method of aerosolizing a powder using the apparatus of any one of claims 1-5, comprising the steps of:

(1) Putting metal or alloy to be pulverized into a high-frequency smelting coil, sealing a vacuum smelting chamber, vacuumizing the whole device through a first vacuum system and a second vacuum system, introducing a first protective gas into the vacuum smelting chamber through a first protective atmosphere gas circuit, and introducing a second protective gas into an atomizing chamber and a powder collecting chamber through a second protective atmosphere gas circuit; high-purity Ar gas is backflushed into the atomizing chamber through an Ar gas circuit;

(2) Melting the metal or alloy to be milled by using a high-frequency melting coil, wherein the melting temperature of the melted metal or alloy to be milled exceeds the melting point of the metal or alloy to be milled by 100-300 ^o After C, forming a stable continuous metal or alloy stream;

(3) The metal or alloy liquid flow obtained in the step (2) freely falls under the action of gravity, and simultaneously, voltage is applied to an electrode gun to perform arcing discharge, and when the liquid flow leaves a gas atomization nozzle, the liquid flow is synchronously broken into tiny metal liquid drops by a high-energy plasma arc and inert gas flow generated by the nozzle;

(4) The metal or alloy liquid drops are cooled and solidified through a second cooling system in the descending process, so that atomized powder falls into a powder collecting chamber at the lower end of the device.

7. The method for preparing powder by aerosolization according to claim 6, wherein,

in the step (1), the vacuum degree in the vacuumized device is at least 1 multiplied by 10 ^-3 Pa；

The gas pressure of the vacuum melting chamber, the atomizing chamber and the powder collecting chamber is 0.10-0.5 MPa;

the pressure of high-purity Ar gas in the atomization chamber is 0.01-0.05 MPa;

in the step (2), the power of the high-frequency smelting coil is 10-300 kW.

8. The method of atomizing powder according to claim 6, wherein in the step (3), the electrode gun is applied at a voltage of 30 to 100V, and the atomizing gas pressure is 0.5 to 20 MPa.

9. The method of aerosolizing a powder according to claim 6, wherein in the step (4), the particle size of the aerosolized powder is 0.1 to 50 μm and the oxygen content is 100 to 1000 ppm.

Images