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CN112764243A - Hyperbolic broken line differential electrode structure for modulator - Google Patents

Hyperbolic broken line differential electrode structure for modulator Download PDF

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CN112764243A
CN112764243A CN202110115995.6A CN202110115995A CN112764243A CN 112764243 A CN112764243 A CN 112764243A CN 202110115995 A CN202110115995 A CN 202110115995A CN 112764243 A CN112764243 A CN 112764243A
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transmission line
microstrip
horizontal segment
segment transmission
line
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柏宁丰
吕艺
孙小菡
王俊嘉
沈长圣
樊鹤红
刘旭
董纳
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Southeast University
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    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/03Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
    • G02F1/0305Constructional arrangements
    • G02F1/0316Electrodes
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/03Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
    • G02F1/0305Constructional arrangements
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/03Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
    • G02F1/0327Operation of the cell; Circuit arrangements

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  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)

Abstract

本发明公开了一种调制器用双曲折线差分电极结构,包括两条互相平行设置的信号线,两条信号线分别为第一曲折微带传输线和第二曲折微带传输线;第一曲折微带传输线和第二曲折微带传输线长度相等。使其在确保高速调制信号具有良好传输性能的条件下还可以降低微波信号的相速度,从而与光波相速进行匹配,此外差分信号的采用可以有效降低系统的驱动电压,保证信号的完整性,大大降低系统整体的功耗。

Figure 202110115995

The invention discloses a double zigzag line differential electrode structure for a modulator, which comprises two signal lines arranged in parallel with each other, and the two signal lines are respectively a first zigzag microstrip transmission line and a second zigzag microstrip transmission line; the first zigzag microstrip The transmission line and the second meandering microstrip transmission line are of equal length. It can also reduce the phase velocity of the microwave signal under the condition that the high-speed modulated signal has good transmission performance, so as to match the phase velocity of the light wave. In addition, the use of differential signals can effectively reduce the driving voltage of the system and ensure the integrity of the signal. Greatly reduce the overall power consumption of the system.

Figure 202110115995

Description

Hyperbolic broken line differential electrode structure for modulator
Technical Field
The invention relates to the field of microwave electronic devices, in particular to a hyperbolic broken line differential electrode structure for a modulator.
Background
In the future, with the increasing popularity of fiber access networks and the increasing spread of 5G services, data traffic growth will continue to evolve, posing a very severe challenge to current communication networks.
With the advent of semiconductor lasers and the development of low-loss optical fibers in the last century, optical networks based on optical fiber communication technology have had a dramatic development, bearing ninety percent of the data traffic. In the process of continuous technological advancement and rapid development of optical fiber communication networks, various new optical devices and transmission systems drive the continuous advancement and development of optical fiber communication networks. Further breakthrough in capacity requires research and compromise on various multiplexing and photonic integration. Silicon-based photonic integrated platforms have received great attention in a number of integrated platforms, primarily due to their powerful potential for monolithically integrating electrical and photonic chips while also being able to take advantage of the current state of the art low cost, large scale CMOS integrated circuit fabrication processes. The silicon photonics technology includes key components: passive waveguide, coupler, branching and combining device, polarization multiplexing and demultiplexing device, wavelength division multiplexing and demultiplexing device, light source, amplifier, attenuator, modulator, detector and the like.
In optical communication systems, optical modulators play an indispensable role in modulating a specific optical signal onto an optical carrier. The electro-optical modulator is used as an important device for converting an electric signal into an optical signal, and besides the need of designing an optical waveguide structure, the electro-optical modulator is used as a microwave electrode structure for transmitting a high-frequency microwave signal to an electro-optical interaction region, and has an important influence on the modulation performance of the electro-optical modulator, so that in order to ensure good electro-optical interaction of the electro-optical modulator, the microwave electrode needs to meet the requirements of impedance matching at a microwave input end, low microwave transmission loss, the same microwave phase velocity and light wave phase velocity and the like.
As shown in fig. 1, a schematic diagram of a conventional GS (ground-signal) type electrode structure includes a signal line 4 and a ground line 3. The microwave electric field on the cross section of the GS-type transmission line structure is distributed between the signal line and the ground line, but the portion of the electric field radiated into the substrate is large, resulting in high loss. In addition, in order to satisfy the condition of matching the phase speed of the microwave and the optical wave signal, the signal line width is usually increased, however, the transmission frequency is often reduced by this method, and the high-speed modulation signal cannot be transmitted, so that the high-speed modulation is realized.
Disclosure of Invention
The purpose of the invention is as follows: aiming at the prior art, the hyperbolic curve line differential electrode for the modulator is provided, so that the performance of a GS-type electrode structure is improved, the microwave loss is reduced, and the problem of contradiction between high-speed transmission and phase speed matching is solved.
The technical scheme is as follows: a hyperbolic differential electrode structure for a modulator comprises two signal lines which are arranged in parallel, wherein the two signal lines are a first zigzag microstrip transmission line and a second zigzag microstrip transmission line respectively; the lengths of the first zigzag microstrip transmission line and the second zigzag microstrip transmission line are equal;
the first zigzag microstrip transmission line is a microstrip zigzag line with a periodic structure, and comprises first microstrip transmission line units which are connected in sequence;
the second zigzag microstrip transmission line is a microstrip zigzag line with a periodic structure, and comprises second microstrip transmission line units connected in sequence.
Furthermore, the first microstrip transmission line unit comprises a first vertical section transmission line, a second vertical section transmission line, a first horizontal section transmission line, a second horizontal section transmission line and a third horizontal section transmission line, the first vertical section transmission line and the second vertical section transmission line are parallel to each other and have the same length, the third horizontal section transmission line is parallel to the first horizontal section transmission line and the second horizontal section transmission line respectively, one end of the first horizontal section transmission line is vertically connected with one end of the first vertical section transmission line, the other end of the first vertical section transmission line is connected with one end of the second vertical section transmission line through the second horizontal section transmission line, and one end of the second vertical section transmission line is vertically connected with one end of the third horizontal section transmission line;
the second microstrip transmission line unit comprises a third vertical section transmission line, a fourth horizontal section transmission line, a fifth horizontal section transmission line and a sixth horizontal section transmission line, the third vertical section transmission line and the fourth vertical section transmission line are parallel to each other and have the same length, the sixth horizontal section transmission line is parallel to the fourth horizontal section transmission line and the fifth horizontal section transmission line respectively, one end of the fourth horizontal section transmission line is vertically connected with one end of the third vertical section transmission line, the other end of the third vertical section transmission line is connected with one end of the fourth vertical section transmission line through the fifth horizontal section transmission line, and one end of the fourth vertical section transmission line is vertically connected with one end of the sixth horizontal section transmission line;
the lengths of the first horizontal transmission line and the third horizontal transmission line are equal, the sum of the lengths is equal to the length of the fifth horizontal transmission line, the lengths of the fourth horizontal transmission line and the sixth horizontal transmission line are equal, the sum of the lengths is equal to the length of the second horizontal transmission line, and the length of the second horizontal transmission line is greater than the length of the fifth horizontal transmission line.
Furthermore, the parameters of the microstrip transmission lines adopted by the first zigzag microstrip transmission line and the second zigzag microstrip transmission line are the same, and the parameters of the microstrip transmission lines refer to the material, the line width, the thickness and the inner diameter of the microstrip transmission lines.
Furthermore, the phase velocity of the microwave signal is changed by adjusting the parameters of the line width, the thickness, the inner diameter and the space size of the two signal lines, so that the phase velocity of the microwave signal is matched with the phase velocity of the optical wave in the optical waveguide; the distance refers to the distance between the first zigzag microstrip transmission line and the second zigzag microstrip transmission line.
Has the advantages that: the electromagnetic wave of the electrode structure is mainly transmitted between two signal lines in a concentrated mode, namely the electromagnetic wave is mainly transmitted in vacuum, and therefore loss can be reduced. The hyperbolic curve line can increase the microwave phase velocity by increasing the line width, and simultaneously ensures that the transmission frequency is still in a higher frequency band by properly reducing the size parameters such as the inner diameter, the interval and the like, thereby solving the problem that the contradiction of high-frequency band transmission and phase velocity matching cannot be simultaneously met.
The hyperbolic differential electrode structure ensures that the modulation rate is not limited while phase velocity is matched, reduces the power consumption of a system and ensures the integrity of signals. The invention can ensure the integrity of signals, reduce the error rate and meet the requirement of high-speed transmission.
In addition, the differential signal transmission mode is different from the traditional method of one signal wire and one ground wire, signals are transmitted on two wires of the structure, the amplitudes of the two signals are the same, the phases of the two signals are opposite, and the signals obtained by a receiving end are the difference value of the levels of the two signals, so that half of driving voltage can be reduced, and the power consumption of a system is effectively reduced.
Drawings
FIG. 1 is a schematic diagram of a conventional GS-type electrode structure;
FIG. 2 is a hyperbolic differential electrode for a modulator of the present invention;
FIG. 3 is a graph of transmission characteristic simulation results for the electrode structure of the present invention;
FIG. 4 is a graph of the dispersion characteristics simulation results for the electrode structure of the present invention;
FIG. 5 is a curve showing the variation of the electric field intensity with height at the central axis on the equal transmission distance cross section of the hyperbolic differential electrode structure of the present invention;
FIG. 6 is a comparison graph of the variation curve of the electric field intensity with the height at the central axis on the equal transmission distance cross section of the conventional GS-type electrode structure;
fig. 7 is a first microstrip transmission line element and a second microstrip transmission line element.
Detailed Description
The invention is further explained below with reference to the drawings.
As shown in fig. 2, a double-meander line differential electrode for a modulator adopts a double-meander microstrip transmission line to replace a conventional electrode structure, the double-meander microstrip transmission line includes a first meandering microstrip transmission line 1 and a second meandering microstrip transmission line 2 arranged in parallel, and the lengths of the first meandering microstrip transmission line 1 and the second meandering microstrip transmission line 2 are equal. The parameters of the microstrip transmission lines adopted by the first zigzag microstrip transmission line 1 and the second zigzag microstrip transmission line 2 are the same, and the parameters of the microstrip transmission lines refer to the line width, the thickness and the inner diameter of the microstrip transmission lines.
As shown in fig. 2, the first meandering microstrip transmission line 1 structure is a periodic microstrip meander line, the first meandering microstrip transmission line 1 includes a first microstrip transmission line unit connected in sequence, the first microstrip transmission line unit includes a first vertical section transmission line 102, a second vertical section transmission line 104, a first horizontal section transmission line 101, the first horizontal transmission line 102 and the second vertical transmission line 104 are parallel to each other and have the same length, the third horizontal transmission line 105 is parallel to the first horizontal transmission line 101 and the second horizontal transmission line 103, one end of the first horizontal transmission line 101 is vertically connected with one end of the first vertical transmission line 102, the other end of the first vertical transmission line 102 is connected with one end of the second vertical transmission line 104 through the second horizontal transmission line 103, and one end of the second vertical transmission line 104 is vertically connected with one end of the third horizontal transmission line 105.
The second meandering microstrip transmission line 2 includes a second microstrip transmission line unit connected in sequence, the second microstrip transmission line unit includes a third vertical transmission line 202, a fourth vertical transmission line 204, a fourth horizontal transmission line 201, a fifth horizontal transmission line 203 and a sixth horizontal transmission line 205, the third vertical transmission line 202 and the fourth vertical transmission line 204 are parallel to each other and have the same length, the sixth horizontal transmission line 205 is parallel to the fourth horizontal transmission line 201 and the fifth horizontal transmission line 203, respectively, one end of the fourth horizontal transmission line 201 is connected to one end of the third vertical transmission line 202 vertically, the other end of the third vertical transmission line 202 is connected to one end of the fourth vertical transmission line 204 through the fifth horizontal transmission line 203, and one end of the fourth vertical transmission line 204 is connected to one end of the sixth horizontal transmission line 205 vertically. The first horizontal transmission line 101 and the third horizontal transmission line 105 are equal in length, and the sum of the lengths is equal to the length of the fifth horizontal transmission line 203, the fourth horizontal transmission line 201 and the sixth horizontal transmission line 205 are equal in length, and the sum of the lengths is equal to the length of the second horizontal transmission line 103, and the length of the second horizontal transmission line 103 is greater than the length of the fifth horizontal transmission line 203.
The phase velocity matching of the microwave and the optical wave is realized by adjusting the size parameters such as the line width, the thickness, the distance, the inner diameter and the like of the first zigzag microstrip transmission line and the first zigzag microstrip transmission line. The phase velocity of the microwave is increased by increasing the structural parameters such as dimensional parameters such as line width, thickness, spacing and inner diameter, so that the phase velocity of the microwave is close to the phase velocity of the light wave near the transmission frequency to realize phase velocity matching.
The method of the present invention is simulated and verified by the following specific experiments, wherein the specific parameters adopted in the experiments are as follows: the line width w is 12 μm, the pitch s is 20 μm, the inner diameter d is 40 μm, and the thickness t is 1.2 μm. CST software is used for carrying out performance analysis on the electrode structure to obtain the transmission characteristic and the dispersion characteristic of the electrode structure, the traditional GS type electrode structure and the hyperbolic broken line differential electrode structure provided by the invention are compared and analyzed with the change of the electric field intensity along with the height at the central axis on the equal transmission distance section, and the simulation results are shown in figures 3, 4, 5 and 6.
As can be seen from FIG. 3, the hyperbolic differential electrode structure of the invention has good transmission characteristics and modulation bandwidth greater than 100 GHz.
As can be seen from fig. 4, the microwave phase velocity of the hyperbolic differential electrode structure of the present invention can be matched with the light wave phase velocity in the optical waveguide, thereby realizing effective modulation.
As can be seen from the comparison of fig. 5 and 6, the electric field portion radiated into the substrate by the conventional GS-type electrode structure is larger than that of the hyperbolic broken line differential electrode structure of the present invention, and the maximum field strength of the electrode structure of the present invention is larger than that of the conventional GS-type electrode.
As can be seen from fig. 3, 4 and 5, the hyperbolic differential electrode structure of the present invention has the advantages of low loss, low power consumption, and compatible phase-rate matching and high-speed modulation compared with the conventional GS-type electrode structure under the conditions of large bandwidth and good transmission characteristics.
The foregoing is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, various modifications and decorations can be made without departing from the principle of the present invention, and these modifications and decorations should also be regarded as the protection scope of the present invention.

Claims (4)

1.一种用于调制器的双曲折线差分电极结构,其特征在于,包括两条互相平行设置的信号线,两条信号线分别为第一曲折微带传输线和第二曲折微带传输线;所述第一曲折微带传输线和第二曲折微带传输线的长度相等;1. a double zigzag line differential electrode structure for modulator, is characterized in that, comprises two signal lines that are arranged in parallel with each other, and two signal lines are respectively the first zigzag microstrip transmission line and the second zigzag microstrip transmission line; The lengths of the first meandering microstrip transmission line and the second meandering microstrip transmission line are equal; 所述第一曲折微带传输线是周期性结构的微带曲折线,第一曲折微带传输线包括依次连接的第一微带传输线单元;The first zigzag microstrip transmission line is a microstrip zigzag line with a periodic structure, and the first zigzag microstrip transmission line includes first microstrip transmission line units connected in sequence; 所述第二曲折微带传输线是周期性结构的微带曲折线,第二曲折微带传输线包括依次连接的第二微带传输线单元。The second meandering microstrip transmission line is a microstrip meandering line with periodic structure, and the second meandering microstrip transmission line includes second microstrip transmission line units connected in sequence. 2.根据权利要求1所述的一种用于调制器的双曲折线差分电极结构,其特征在于,所述第一微带传输线单元包括第一垂直段传输线、第二垂直段传输线、第一水平段传输线、第二水平段传输线和第三水平段传输线,第一垂直段传输线与第二垂直段传输线互相平行且长度相等,第三水平段传输线与第一水平段传输线、第二水平段传输线分别平行,第一水平段传输线的一端与第一垂直段传输线的一端垂直连接,第一垂直段传输线的另一端与第二垂直段传输线的一端通第二水平段传输线连接,第二垂直段传输线的一端垂直连接第三水平段传输线的一端;2 . The double meander line differential electrode structure for a modulator according to claim 1 , wherein the first microstrip transmission line unit comprises a first vertical segment transmission line, a second vertical segment transmission line, a first The horizontal segment transmission line, the second horizontal segment transmission line and the third horizontal segment transmission line, the first vertical segment transmission line and the second vertical segment transmission line are parallel to each other and have the same length, the third horizontal segment transmission line and the first horizontal segment transmission line, the second horizontal segment transmission line are respectively parallel, one end of the first horizontal segment transmission line is vertically connected with one end of the first vertical segment transmission line, the other end of the first vertical segment transmission line is connected with one end of the second vertical segment transmission line through the second horizontal segment transmission line, and the second vertical segment transmission line One end of the transmission line is vertically connected to one end of the third horizontal segment transmission line; 所述第二微带传输线单元包括第三垂直段传输线、第四垂直段传输线、第四水平段传输线、第五水平段传输线和第六水平段传输线,第三垂直段传输线与第四垂直段传输线互相平行且长度相等,第六水平段传输线与第四水平段传输线、第五水平段传输线分别平行,第四水平段传输线的一端与第三垂直段传输线的一端垂直连接,第三垂直段传输线的另一端与第四垂直段传输线的一端通第五水平段传输线连接,第四垂直段传输线的一端垂直连接第六水平段传输线的一端;The second microstrip transmission line unit includes a third vertical segment transmission line, a fourth vertical segment transmission line, a fourth horizontal segment transmission line, a fifth horizontal segment transmission line and a sixth horizontal segment transmission line, a third vertical segment transmission line and a fourth vertical segment transmission line. They are parallel to each other and have the same length. The sixth horizontal segment transmission line is parallel to the fourth horizontal segment transmission line and the fifth horizontal segment transmission line. One end of the fourth horizontal segment transmission line is vertically connected to one end of the third vertical segment transmission line. The other end is connected to one end of the fourth vertical segment transmission line through the fifth horizontal segment transmission line, and one end of the fourth vertical segment transmission line is vertically connected to one end of the sixth horizontal segment transmission line; 其中,第一水平段传输线和第三水平段传输线长度相等,且长度之和等于第五水平段传输线长度,第四水平段传输线和第六水平段传输线长度相等,且长度之和等于第二水平段传输线长度,第二水平段传输线的长度大于第五水平段传输线长度。Among them, the length of the first horizontal segment transmission line and the third horizontal segment transmission line are equal, and the sum of the lengths is equal to the length of the fifth horizontal segment transmission line, the fourth horizontal segment transmission line and the sixth horizontal segment transmission line are equal in length, and the sum of the lengths is equal to the second horizontal segment transmission line. The length of the transmission line of the second horizontal segment is greater than the length of the transmission line of the fifth horizontal segment. 3.根据权利要求1所述的一种用于调制器的双曲折线差分电极结构,其特征在于,第一曲折微带传输线和第二曲折微带传输线所采用的微带传输线参数均相同,所述微带传输线参数是指微带传输线的材料、线宽、厚度、内径。3. a kind of double meander line differential electrode structure for modulator according to claim 1 is characterized in that, the microstrip transmission line parameters adopted by the first meander microstrip transmission line and the second meander microstrip transmission line are all the same, The microstrip transmission line parameters refer to the material, line width, thickness, and inner diameter of the microstrip transmission line. 4.根据权利要求3所述的一种用于调制器的双曲折线差分电极结构,其特征在于,通过调整两条信号线的线宽、厚度、内径以及间距尺寸参数来改变微波信号的相速度,从而与光波导中光波的相速进行匹配;所述间距是指第一曲折微带传输线和第二曲折微带传输线之间的距离。4 . The double-zigzag line differential electrode structure for modulator according to claim 3 , wherein the phase of the microwave signal is changed by adjusting the line width, thickness, inner diameter and spacing dimension parameters of the two signal lines. 5 . The speed is matched with the phase speed of the light wave in the optical waveguide; the spacing refers to the distance between the first meandering microstrip transmission line and the second meandering microstrip transmission line.
CN202110115995.6A 2021-01-28 2021-01-28 Hyperbolic broken line differential electrode structure for modulator Pending CN112764243A (en)

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4468086A (en) * 1981-11-05 1984-08-28 At&T Bell Laboratories Traveling wave, velocity mismatched gate
CN1313961A (en) * 1999-05-11 2001-09-19 Jds尤尼费斯公司 External optical modulation using non-co-linear compensation networks
JP2009205154A (en) * 2008-02-01 2009-09-10 Anritsu Corp Light modulating device
JP2015129906A (en) * 2013-12-03 2015-07-16 日本電信電話株式会社 Semiconductor mach-zehnder modulator
CN108461367A (en) * 2018-03-28 2018-08-28 电子科技大学 A kind of microstrip line slow-wave structure

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4468086A (en) * 1981-11-05 1984-08-28 At&T Bell Laboratories Traveling wave, velocity mismatched gate
CN1313961A (en) * 1999-05-11 2001-09-19 Jds尤尼费斯公司 External optical modulation using non-co-linear compensation networks
JP2009205154A (en) * 2008-02-01 2009-09-10 Anritsu Corp Light modulating device
JP2015129906A (en) * 2013-12-03 2015-07-16 日本電信電話株式会社 Semiconductor mach-zehnder modulator
CN108461367A (en) * 2018-03-28 2018-08-28 电子科技大学 A kind of microstrip line slow-wave structure

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Application publication date: 20210507