CN112818628B

CN112818628B - Automatic developing method and system for design rule of integrated circuit manufacturing process

Info

Publication number: CN112818628B
Application number: CN202011627532.XA
Authority: CN
Inventors: 黄国勳; 黄艳
Original assignee: Individual
Current assignee: Individual
Priority date: 2020-12-30
Filing date: 2020-12-30
Publication date: 2024-08-06
Anticipated expiration: 2040-12-30
Also published as: CN112818628A

Abstract

The application discloses an automatic development method and system of design rules of integrated circuit manufacturing process, comprising the following steps: acquiring information related to an integrated circuit manufacturing process; establishing a plurality of tabs representing process design rules, wherein the tabs are controlled by a progress bar, and entering the next tab when the progress bar of the previous tab is completed, wherein in the first tab, device information and process physical information are defined; defining process parameters of a physical layer in a second tab; in the third tab, developing process rules; in the fourth tab, reliability rule definition is performed; defining basic information of a process design rule in the last option card; compiling and generating a process manual file. The application can realize the automatic development of the process design rule.

Description

Automatic developing method and system for design rule of integrated circuit manufacturing process

Technical Field

The invention belongs to the technical field of integrated circuit manufacturing, and relates to an automatic development method and system for design rules of an integrated circuit manufacturing process.

Background

The integrated circuit process rule (DRM, design Rule Manual) is a bridge for communication between integrated circuit manufacturers and design companies, and when the design companies need to use a manufacturing process to design circuit layout, a complete process Design Rule (DRM) is needed first, and in most cases, DRM is the basis of chip design and is also a key factor in success or failure of chip design. An accurate and complete process design rule is particularly critical.

The process manual established by DRM contains the following:

(1) The process physical information is a physical section view (cross section) supported by the process provided by the manufacturing enterprise

(2) Art physical layer definition (LAYER MAPPING)

(3) Process device information, the device types supported by the process (Device truth) are provided by the manufacturing enterprise, and the hierarchy that different devices need to invoke in design is defined at the same time.

(4) Process physical layer stack information (Metal option).

(5) Process layer rule definition (rule) comprising definition layer object, corresponding rule type, rule condition and corresponding value, and collocation diagram and related description

In order to develop DRM and ensure that rules match the actual process development content, a large amount of data needs to be collected for data analysis, content collation, and content input inspection. This process takes up significant development time for the designer and process developer. At present, the whole development process is carried out by adopting a manual word document editing mode, the efficiency is low, and the mistakes are often considered to different degrees, so that a great deal of manpower waste and time loss are caused for design and manufacture.

The process rules need a large amount of modification work, when the manufacturing process is required to carry out a large amount of modification and correction on the process manual due to the application requirement and the limitation of the process technology in the research and development process, according to the method of manually developing DRM by the current designer, a large amount of time is required to carry out the arrangement and the correction of manual data, the correction work is particularly important, and meanwhile, it is difficult to know manually whether other rules are influenced while a certain rule is modified or not while a certain rule is manually changed. The problem of associative influence is particularly remarkable.

The existing DRM method has the following defects:

(1) The technological rules relate to more technical contents, and for new people, compiling of the technological manual can not be independently completed

(2) Aiming at the problem that the output formats of different versions cannot be unified, the conflict between the content modification and the conflict error is more, and the output quality cannot be ensured

(3) The manual development efficiency is low, the content modification cannot be automatically identified, and the modification progress is slow

(4) The research and development time from the process rule to the process rule verification realization link is longer

Therefore, automatic development is needed, repeated development resources are greatly reduced, development efficiency is improved, real-time synchronous verification is performed in the development process, the development efficiency is accurately controlled, the full-transparent development process is realized, and automatic management is facilitated.

Disclosure of Invention

The invention aims to provide an automatic development method and system for design rules of integrated circuit manufacturing process, which realize automatic development of DRM.

An embodiment of the present application provides an automated development method for design rules of an integrated circuit manufacturing process, including:

Acquiring information related to an integrated circuit manufacturing process;

A number of tabs representing process design rules are established, controlled by a progress bar, and when the progress bar of the last tab is completed, the next tab is entered, wherein,

Defining device information and process physical information in a first tab;

Defining process parameters of a physical layer in a second tab;

In the third tab, developing process rules;

In the fourth tab, reliability rule definition is performed;

Defining basic information of a process design rule in the last option card;

Compiling and generating a process manual file.

Preferably, the progress bar displays the completion progress of the tab according to the completion degree of the input content of the corresponding tab.

Preferably, the integrated circuit manufacturing process related information includes process physical information, physical layer definition, device information, and physical layer stack information.

Preferably, in the first tab, the step of defining device information and process physical information further includes: defining lattice point specifications of the process design rule, selecting device information corresponding to the process design rule, defining layers of the cross-sectional diagram, inputting relevant physical information of each layer, performing conflict detection on process characteristics of each layer, and re-inputting metal layer information of each layer when conflict exists.

Preferably, in the second tab, the step of defining a process parameter of the physical layer further includes: and automatically reading in each layer, inputting process parameters of each layer, displaying corresponding layers according to functions and characteristics of the device, and automatically generating metal layer composition data according to the sectional view.

Preferably, in the third tab, the step of developing a process rule further includes: and automatically importing and displaying the physical layers, and selecting the process rules of each physical layer.

Preferably, the method further comprises: when the process design rule is modified or updated, conflict information of association information of the modified or updated rule is displayed.

In another embodiment of the present application, an automated development system for design rules of integrated circuit manufacturing processes is provided, comprising:

the process related information acquisition module is used for acquiring the integrated circuit manufacturing process related information;

A process design rule establishing module for establishing a plurality of tabs representing process design rules, the tabs being controlled by a progress bar, entering the next tab when the progress bar of the previous tab is completed, wherein,

Defining device information and process physical information in a first tab;

Defining process parameters of a physical layer in a second tab;

In the third tab, developing process rules;

In the fourth tab, reliability rule definition is performed;

Defining basic information of a process design rule in the last option card;

and the output module is used for compiling and generating a process manual file.

The application also discloses a computer readable storage medium having stored therein computer executable instructions which when executed by a processor implement the steps in the method as described hereinbefore.

Compared with the prior art, the method has the following beneficial effects:

the invention discloses a method for realizing DRM automatic development interface, which completes the data collection, data analysis, rule linking, rule matching schematic diagram generation, rule basic information detection, complete manual integration and generation, automatically generates a large amount of process rule information through the whole set of interface operation, ensures the correctness of final output content through the arrangement and induction of the process rule, and further provides an automatic interface for the linking of other subsequent functions to complete the joint call and direct transfer between different processes.

The DRM process rules have a large amount of reform work, when the integrated circuit manufacturing end discovers that the related rules need to be adjusted in the process of process development, the rules need to be reform and corrected in a large amount, automatic association information confirmation needs to be provided in time during correction, and error correction of the rules is prevented and automatic conflict checking is completed during association confirmation. The whole DRM modification correction process is clear, no omission and no conflict are caused, and the correct process is accurately carried out.

Drawings

FIG. 1 is a flow chart of a method for automated development of design rules for integrated circuit manufacturing processes in accordance with one embodiment of the present invention.

Detailed Description

For the purpose of making the objects, technical solutions and advantages of the present invention more apparent, embodiments of the present invention will be described in further detail below with reference to the accompanying drawings.

In a first embodiment of the present application, an automated development method of design rules of an integrated circuit manufacturing process is disclosed, and fig. 1 is a flowchart of the automated development method, the method comprising:

Step 101, information related to integrated circuit manufacturing process is obtained. The integrated circuit manufacturing process related information includes process physical information, physical layer definitions, device information, and physical layer stack information.

Step 102, a plurality of tabs representing the process design rule are established, the tabs are controlled by a progress bar, and when the progress bar of the previous tab is completed, the next tab is entered. And the progress bar displays the completion progress of the tab according to the completion degree of the input content of the corresponding tab.

In the first tab, device information and process physical information are defined. In one embodiment, in the first tab, the step of defining device information and process physical information further comprises: defining lattice point specifications of the process design rule, selecting device information corresponding to the process design rule, defining layers of the cross-sectional diagram, inputting relevant physical information of each layer, performing conflict detection on process characteristics of each layer, and re-inputting metal layer information of each layer when conflict exists.

In the second tab, process parameters of the physical layer are defined. In one embodiment, in the second tab, the step of defining the process parameters of the physical layer further includes: and automatically reading in each layer, inputting process parameters of each layer, displaying corresponding layers according to functions and characteristics of the device, and automatically generating metal layer composition data according to the sectional view.

In the third tab, process rule development is performed. In one embodiment, in the third tab, the step of developing a process rule further includes: and automatically importing and displaying the physical layers, and selecting the process rules of each physical layer.

In the fourth tab, reliability rule definition is performed;

Defining basic information of a process design rule in the last option card;

And step 103, compiling and generating a process manual file.

The method further comprises the steps of: when the process design rule is modified or updated, conflict information of association information of the modified or updated rule is displayed.

The automation of the process Design Rules (DRM) of the present invention is described below in a specific example.

The DRM automatic development tool interface is used for collecting, analyzing, calculating and processing data through the interface, and finally completing the whole manual.

Firstly, the selection of the process type and the node is completed, and the tool is automatically matched with the corresponding process module

Then electrical parameter input is carried out according to interface prompt to complete automatic generation of process basic level information

Automatic guiding input is carried out according to the content of the module device, and related output of the process device is automatically generated

Automatic output of process metal combination according to process profile output by technical information interface

According to the data acquisition and verification of the basic information of the process, the basic information of the process manual is integrated in the background, and Rules are defined and selected on the Layout Rules interface

Performing rule conflict and rationality checking

Final automatic compilation of rule content

Finally, selecting and completing the output of all achievements on the interface

The specific operation steps are as follows:

1) Firstly, starting an initial interface, clicking a first pull-down menu of the initial interface to create new engineering, selecting various process nodes and types of inputs in DRM, automatically completing the selection of process modules, and automatically matching module data required by corresponding processes.

2) Entering a new engineering initial interface, wherein the interface comprises 5 tab menus, the sequence is the development sequence of DRM, the initial data is remained in the first tab before being filled, and the progress bar is used for controlling the flow. When the data input is completed, the progress bar is filled, the mouse can click to enter the next tab, and the selected tab is highlighted at the same time.

3) DRM is formally developed, lattice specification allowed by a process rule is selected in Technology Information tabs, and then device information contained in the corresponding process rule is checked. The blank area on the right is used for carrying out the hierarchical definition of the section according to the type of the process rule to be carried out, the physical information of the relevant layer can be input by double clicking the hierarchical layer by a mouse, meanwhile, the tool is used for carrying out conflict detection according to the actual process characteristics of the section, and when a conflict dialog box is popped up, the information of the relevant metal layer is required to be re-input.

4) In the Basic Information tab Layer Information module, the related process layers are automatically read in according to the section chart information in the step 3) and automatically classified for selection, the corresponding process layer types are clicked by a mouse, and the process data are sequentially filled in according to the prompt content of the pop-up dialog box after the mouse is double-clicked by the corresponding information fields.

5) After Basic Information tab layer Information is selected, content development of Device truth is directly performed, device related layer information is automatically generated according to layer Information related information in step 4) for selection, corresponding layer information is clicked by a mouse according to functions and characteristics of different devices, and different graphic modes are used for display.

6) The tool automatically imports the profile information in step 3) after Basic Information tab device truth is selected, and automatically generates Metal Combination combined data, which is not multiple options, and can click corresponding Metal Combination with a mouse according to the needs of the process support module.

7) In the Layout Rules tab, the data generated in steps 4), 5), 6) is automatically read. And (3) displaying the results in the steps 4), 5) and 6) on an interface, selecting the selected object through mouse clicking, developing rules for the selected object, selecting contents in the middle of the interface through mouse clicking and drop-down menu selection modes, and simultaneously displaying corresponding graphic contents according to the selection of the actual condition rules by a right graphic frame in the selection process. And finally, clicking an Apply button by a direct mouse to confirm the content, and confirming the content serial number. The synchronization is at the lowest side of the interface, and the synchronization automatically displays the corresponding related rule serial numbers, rule content description, rule data and other information

8) After the relevant contents of the layout Rules are filled out, the definition is carried out Reliability Rules, the interface development information is still according to the steps 4), 5), 6) the corresponding result is automatically displayed on the interface, the selection of the drop-down menu is carried out according to the requirement of the rule contents, and the corresponding illustration of the reliability rule is synchronously displayed.

9) When the progress bar moves to the last tab Design Guideline, it indicates that the rule automatic development has entered the final manual editing band export state, fills in the relevant manual editing basic information, and selects the corresponding Writer editor to prepare before the content is automatically exported.

10 When the entry bar is completely filled with 5 content selection cards, the menu can be directly pulled down through the uppermost row Delivery Products of the interface, and the content needing to be automatically output is clicked by a mouse, including DRM, technology files and DISPLAY FILE. When clicking is completed, a dialog box can be automatically popped up, a relevant automatic lead-out version number needs to be input, and finally clicking is completed.

11 After all content is automatically exported, the closing button is clicked to close the tool

12 When the user selects to correct and reform the manual content of the existing version, clicking Rule Update Link in the Options drop-down menu, selecting the Rule to be modified, automatically deriving related Rule association information and conflict information content, and editing and deleting the content by double clicking a mouse. And finally, finishing the plate changing and the content correcting.

In another embodiment of the present application, an automated development system for design rules of integrated circuit manufacturing processes is disclosed, the system comprising: the device comprises a process related information acquisition module, a process design rule establishment module and an output module, wherein:

the process design rule building module is used for building a plurality of tabs representing process design rules, the tabs are controlled by a progress bar, when the progress bar of the previous tab is completed, the next tab is entered, wherein,

Defining device information and process physical information in a first tab;

Defining process parameters of a physical layer in a second tab;

In the third tab, developing process rules;

In the fourth tab, reliability rule definition is performed;

Defining basic information of a process design rule in the last option card;

The output module is used for compiling and generating a process manual file.

The system in this embodiment corresponds to the method embodiment described above, and the technical details described above can be applied to this embodiment.

Accordingly, other embodiments of the application may also provide a computer-readable storage medium having stored therein computer-executable instructions which, when executed by a processor, implement the method embodiments of the application. Computer-readable storage media, including both non-transitory and non-transitory, removable and non-removable media, may implement information storage by any method or technology. The information may be computer readable instructions, data structures, modules of a program, or other data. Examples of storage media for a computer include, but are not limited to, phase change memory (PRAM), static Random Access Memory (SRAM), dynamic Random Access Memory (DRAM), other types of Random Access Memory (RAM), read Only Memory (ROM), electrically Erasable Programmable Read Only Memory (EEPROM), flash memory or other memory technology, compact disc read only memory (CD-ROM), digital Versatile Discs (DVD) or other optical storage, magnetic cassettes, magnetic tape magnetic disk storage or other magnetic storage devices, or any other non-transmission medium, which can be used to store information that can be accessed by a computing device.

In the context of this patent, relational terms such as first and second, and the like are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Moreover, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising" does not exclude the presence of other like elements in a process, method, article, or apparatus that comprises the element.

In some cases, the actions or steps recited in the claims can be performed in a different order than in the embodiments and still achieve desirable results. In addition, the processes depicted in the accompanying figures do not necessarily require the particular order shown, or sequential order, to achieve desirable results. In some embodiments, multitasking and parallel processing are also possible or may be advantageous.

Claims

1. An automated development method of design rules for integrated circuit manufacturing processes, comprising:

Acquiring information related to an integrated circuit manufacturing process;

Defining device information and process physical information in a first tab; further comprises: defining lattice point specifications of the process design rule, selecting device information corresponding to the process design rule, defining layers of the profile, inputting relevant physical information of each layer, performing conflict detection on process characteristics of each layer, and re-inputting metal layer information of each layer when conflict exists;

Defining process parameters of a physical layer in a second tab;

In the third tab, developing process rules;

In the fourth tab, reliability rule definition is performed;

Defining basic information of a process design rule in the last option card;

Compiling and generating a process manual file.

2. The automated development method of claim 1, wherein the progress bar displays completion progress of the tab according to the completion of the corresponding tab input content.

3. The automated development method of claim 1, wherein the integrated circuit manufacturing process related information includes process physical information, physical layer definitions, device information, and physical layer stack information.

4. The automated development method of claim 1, wherein in the second tab, the step of defining process parameters of a physical layer further comprises: and automatically reading in each layer, inputting process parameters of each layer, displaying corresponding layers according to functions and characteristics of the device, and automatically generating metal layer composition data according to the sectional view.

5. The automated development method of claim 4, wherein in the third tab, the step of developing process rules further comprises: and automatically importing and displaying the physical layers, and selecting the process rules of each physical layer.

6. The automated development method of claim 1, further comprising: when the process design rule is modified or updated, conflict information of association information of the modified or updated rule is displayed.

7. An automated development system for design rules of an integrated circuit manufacturing process, comprising:

Defining process parameters of a physical layer in a second tab;

In the third tab, developing process rules;

In the fourth tab, reliability rule definition is performed;

Defining basic information of a process design rule in the last option card;

8. A computer readable storage medium having stored therein computer executable instructions which when executed by a processor implement the steps in the method of any one of claims 1 to 6.