CN112935994B - Special-shaped surface polishing device and polishing method - Google Patents
Special-shaped surface polishing device and polishing method Download PDFInfo
- Publication number
- CN112935994B CN112935994B CN202110128566.2A CN202110128566A CN112935994B CN 112935994 B CN112935994 B CN 112935994B CN 202110128566 A CN202110128566 A CN 202110128566A CN 112935994 B CN112935994 B CN 112935994B
- Authority
- CN
- China
- Prior art keywords
- polishing
- layer
- polished
- liquid
- groove
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D36/00—Filter circuits or combinations of filters with other separating devices
- B01D36/02—Combinations of filters of different kinds
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
- B24B13/005—Blocking means, chucks or the like; Alignment devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B47/00—Drives or gearings; Equipment therefor
- B24B47/10—Drives or gearings; Equipment therefor for rotating or reciprocating working-spindles carrying grinding wheels or workpieces
- B24B47/12—Drives or gearings; Equipment therefor for rotating or reciprocating working-spindles carrying grinding wheels or workpieces by mechanical gearing or electric power
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
- B24B49/14—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation taking regard of the temperature during grinding
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
- B24B49/16—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation taking regard of the load
- B24B49/165—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation taking regard of the load for grinding tyres
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B51/00—Arrangements for automatic control of a series of individual steps in grinding a workpiece
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B57/00—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B57/00—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents
- B24B57/02—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents for feeding of fluid, sprayed, pulverised, or liquefied grinding, polishing or lapping agents
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/10—Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
Abstract
本发明是关于一种异型表面抛光装置及抛光方法,其包括:抛光介质、六轴机械手、抛光液喷射设备、抛光液体喷淋设备和工件夹持旋转平台,抛光介质包括层叠设置的置入层和抛光层,所述置入层的上表面设有第一凹槽,所述抛光层与所述置入层接触的一面设有第二凹槽,所述置入层内设置有压力传感器和温度传感器,所述抛光层的抛光结构与待抛光面相适配;所述抛光介质的材质为微孔聚氨酯。本发明选用微孔聚氨酯材质的抛光介质,微孔聚氨酯的发泡孔有利于抛光粉的流动性,抛光介质包括层叠设置的置入层和抛光层,每层都设置有凹槽,增加抛光液的流动性,提高抛光效率,并且使用六轴机械手抓取抛光介质,方便更换抛光介质。
The invention relates to a special-shaped surface polishing device and polishing method, which includes: a polishing medium, a six-axis manipulator, a polishing liquid spraying device, a polishing liquid spraying device, and a workpiece clamping rotary platform, and the polishing medium includes a stacked insertion layer and a polishing layer, the upper surface of the insertion layer is provided with a first groove, the surface of the polishing layer in contact with the insertion layer is provided with a second groove, and the insertion layer is provided with a pressure sensor and A temperature sensor, the polishing structure of the polishing layer is adapted to the surface to be polished; the material of the polishing medium is microporous polyurethane. The present invention selects the polishing medium of microporous polyurethane material, and the foaming hole of microporous polyurethane is beneficial to the fluidity of polishing powder, and polishing medium comprises the insertion layer and polishing layer that are stacked, each layer is all provided with groove, increases polishing liquid The fluidity improves the polishing efficiency, and the six-axis manipulator is used to grab the polishing medium, which is convenient for replacing the polishing medium.
Description
技术领域technical field
本发明涉及机械精密加工技术领域,特别是涉及一种异型表面抛光装置及抛光方法。The invention relates to the technical field of mechanical precision machining, in particular to a special-shaped surface polishing device and a polishing method.
背景技术Background technique
当前,超二代和三代微光夜视技术向4G发展,对微光夜视仪用光纤传像元件的表面抛光质量及外形尺寸精度提出了更高的要求,高表面质量确保光电子量子转换效率,精密装配确保实现高分辨性能。在微光夜视仪的制备过程中,当所用光纤传像元件表面的研磨抛光质量越高,尺寸精度越高,尺寸的一致性越好,批次间的稳定性越高,对于整管的性能提升起到关键的作用。目前,越来越多的用户和光纤传像元件的生产者都意识到这个问题的重要性。研磨抛光是光纤传像元件生产加工制造过程中的关键工序。通过研磨抛光使元件表面质量达到光学级表面质量和外形尺寸,是元件应用最为根本的质量要求。At present, the ultra-second-generation and third-generation low-light night vision technology is developing towards 4G, which puts forward higher requirements for the surface polishing quality and shape and dimension accuracy of optical fiber image transmission components used in low-light night vision devices. High surface quality ensures photoelectron quantum conversion efficiency. , Precision assembly ensures high resolution performance. In the preparation process of the low-light night vision device, when the grinding and polishing quality of the surface of the optical fiber image transmission component used is higher, the dimensional accuracy is higher, the dimensional consistency is better, and the stability between batches is higher. For the whole tube Performance improvement plays a key role. At present, more and more users and producers of optical fiber image transmission components are aware of the importance of this problem. Grinding and polishing is a key process in the production, processing and manufacturing of optical fiber image transmission components. The most fundamental quality requirement for component applications is to make the surface quality of components reach optical-grade surface quality and external dimensions through grinding and polishing.
在当前应用背景条件下,光纤传像元件表面研磨抛光的位置较多,大体可以分为三类,按研磨抛光位置来分,最大是元件的两个端面,也是光学质量要求最为苛刻的位置;其次是台阶面和柱面或斜面,该位置一般要求较高,需达到精抛效果,要求无麻点和划伤;最后是圆角位置,该位置与端面相连,光学加工质量要求同端面,要求无麻点和划伤。对于端面平面,其抛光方法与技术已非常成熟,有古典抛光法、双面抛光法、离子抛光法等,而对于异型面的抛光,如圆柱面、斜面和非球面,目前没有相应的自动化机械设备进行抛光,一般采用手工抛光,通过人工灵活的手动作可以抛到机械不能抛光的位置点,如台阶与柱面或斜面相连的根部位置,以及不同角度的斜面和不同曲率半径的圆角。但是手工方法有一个最大的弊端就是抛光效率极低,抛光的平面度、平行度难以达到使用要求,即抛光质量的一致性较差,影响抛光质量,从而导致光纤传像元件的良品率下降,甚至可以致使产品的报废,提高了生产制造的成本。Under the current application background conditions, there are many positions for grinding and polishing on the surface of optical fiber image transmission components, which can be roughly divided into three categories. According to the grinding and polishing position, the largest is the two end faces of the component, which is also the most demanding position for optical quality; The second is the step surface and the cylindrical or inclined surface. This position generally has higher requirements, and it needs to achieve a fine polishing effect without pitting and scratches; the last is the fillet position, which is connected to the end face. The optical processing quality requirements are the same as the end face. No pitting and scratches are required. For the end plane, the polishing methods and technologies are very mature, including classical polishing, double-sided polishing, ion polishing, etc., but for the polishing of special-shaped surfaces, such as cylindrical surfaces, inclined surfaces and aspherical surfaces, there is no corresponding automatic machinery at present. The polishing of the equipment is generally done by hand. Through manual and flexible hand movements, it can be thrown to the position that cannot be polished by the machine, such as the root position where the step connects to the cylinder or slope, as well as slopes with different angles and rounded corners with different curvature radii. However, one of the biggest disadvantages of the manual method is that the polishing efficiency is extremely low, and the flatness and parallelism of the polishing are difficult to meet the requirements of use, that is, the consistency of the polishing quality is poor, which affects the polishing quality, resulting in a decline in the yield of optical fiber image transmission components. It can even lead to the scrapping of the product, which increases the cost of manufacturing.
发明内容Contents of the invention
本发明的主要目的在于,提供一种异型表面抛光装置及抛光方法,以解决现有异型表面存在抛光困难、效率低、抛光质量差等技术问题。The main purpose of the present invention is to provide a special-shaped surface polishing device and polishing method to solve the existing technical problems such as difficult polishing, low efficiency, and poor polishing quality of the existing special-shaped surface.
本发明的目的及解决其技术问题是采用以下技术方案来实现的。依据本发明提出的一种异型表面抛光装置,其包括:The purpose of the present invention and the solution to its technical problems are achieved by adopting the following technical solutions. According to a special-shaped surface polishing device proposed by the present invention, it comprises:
抛光介质,其包括层叠设置的置入层和抛光层,所述置入层的上表面设有第一凹槽,所述抛光层与所述置入层接触的一面设有第二凹槽,所述置入层内设置有压力传感器和温度传感器,所述抛光层的抛光结构与待抛光面相适配;所述抛光介质的材质为微孔聚氨酯;A polishing medium, which includes a stacked insertion layer and a polishing layer, the upper surface of the insertion layer is provided with a first groove, and the surface of the polishing layer in contact with the insertion layer is provided with a second groove, The insertion layer is provided with a pressure sensor and a temperature sensor, and the polishing structure of the polishing layer is adapted to the surface to be polished; the material of the polishing medium is microporous polyurethane;
六轴机械手,其包括机械臂、用于固定所述机械臂的基座和位于所述机械臂端部的夹持部,所述夹持部用于夹持所述抛光介质;A six-axis manipulator, which includes a manipulator, a base for fixing the manipulator, and a clamping portion at the end of the manipulator, the clamping portion being used to clamp the polishing medium;
抛光液喷射设备,其包括第一抛光液箱和第一喷管,所述第一喷管的一端连接有第一喷头,用于将抛光液喷射到第一凹槽内;Polishing fluid injection equipment, which includes a first polishing fluid tank and a first nozzle, one end of the first nozzle is connected to a first nozzle for injecting the polishing fluid into the first groove;
抛光液体喷淋设备,其包括第二抛光液箱和第二喷管,所述第二喷管的一端连接有第二喷头,用于为抛光部位提供抛光液;Polishing liquid spraying equipment, which includes a second polishing liquid tank and a second spray pipe, one end of the second spray pipe is connected to a second spray head for providing polishing liquid to the polishing site;
工件夹持旋转平台,其包括旋转平台和设置在所述旋转平台上气动夹具,所述气动夹具用于夹持待抛光工件。The workpiece clamping rotary platform includes a rotary platform and a pneumatic clamp arranged on the rotary platform, and the pneumatic clamp is used for clamping a workpiece to be polished.
本发明的目的及解决其技术问题还可采用以下技术措施进一步实现。The purpose of the present invention and its technical problems can also be further realized by adopting the following technical measures.
优选的,前述的异型表面抛光装置,其中所述置入层的厚度为10mm-20mm;所述抛光层的厚度为5mm-10mm;Preferably, the aforementioned special-shaped surface polishing device, wherein the thickness of the embedded layer is 10mm-20mm; the thickness of the polishing layer is 5mm-10mm;
所述置入层和抛光层之间通过胶粘结。The inserting layer and the polishing layer are bonded by glue.
所述置入层的厚度为10mm-20mm;所述抛光层的厚度为5mm-10mm;The thickness of the embedded layer is 10mm-20mm; the thickness of the polishing layer is 5mm-10mm;
所述聚氨酯材料内含有填充物;所述的填充物包括氧化铈或氧化锆。The polyurethane material contains fillers; the fillers include cerium oxide or zirconium oxide.
优选的,前述的异型表面抛光装置,其中所述第一凹槽纵横相间排列,槽宽为1-3mm,槽深为1-3mm,相邻两平行槽之间的间距为10-20mm;Preferably, the aforementioned special-shaped surface polishing device, wherein the first grooves are arranged vertically and horizontally alternately, the groove width is 1-3 mm, the groove depth is 1-3 mm, and the distance between two adjacent parallel grooves is 10-20 mm;
所述第二凹槽纵横相间排列,槽宽为1-3mm,槽深为1-3mm,相邻两平行槽之间的间距为10-20mm。The second grooves are arranged vertically and horizontally alternately, the groove width is 1-3mm, the groove depth is 1-3mm, and the distance between two adjacent parallel grooves is 10-20mm.
优选的,前述的异型表面抛光装置,其中在所述第一凹槽内设置有若干上下贯穿的通孔,所述通孔的孔径为1-3mm;和/或,Preferably, in the aforementioned special-shaped surface polishing device, a plurality of through holes penetrating up and down are arranged in the first groove, and the diameter of the through holes is 1-3 mm; and/or,
在所述第二凹槽内设置有若干上下贯穿的通孔,所述通孔的孔径为1-3mm。A plurality of through holes penetrating up and down are arranged in the second groove, and the diameter of the through holes is 1-3 mm.
优选的,前述的异型表面抛光装置,其中在所述第一喷管上设有第一液压泵,所述第一喷管的另一端通向所述第一抛光液箱;Preferably, the aforementioned special-shaped surface polishing device, wherein a first hydraulic pump is provided on the first nozzle, and the other end of the first nozzle leads to the first polishing liquid tank;
在所述第二喷管上设有第二液压泵,所述第二喷管的另一端通向第二抛光液箱。A second hydraulic pump is arranged on the second spray pipe, and the other end of the second spray pipe leads to the second polishing solution tank.
优选的,前述的异型表面抛光装置,其中所述抛光层的抛光结构与待抛光面相适配包括:Preferably, the aforementioned special-shaped surface polishing device, wherein the polishing structure of the polishing layer is adapted to the surface to be polished includes:
待抛光面为平面时,选择平面抛光结构;When the surface to be polished is flat, choose a flat polishing structure;
待抛光面为球面时,选择相应的圆面抛光结构;When the surface to be polished is a spherical surface, select the corresponding circular surface polishing structure;
待抛光面为异型面时,选择相应的异型抛光结构。When the surface to be polished is a special-shaped surface, select the corresponding special-shaped polishing structure.
优选的,前述的异型表面抛光装置,其中所述压力传感器和温度传感器均位于所述置入层与所述抛光层接触的一面上。Preferably, in the aforementioned special-shaped surface polishing device, both the pressure sensor and the temperature sensor are located on the side of the embedding layer in contact with the polishing layer.
优选的,前述的异型表面抛光装置,其中还包括:Preferably, the aforementioned special-shaped surface polishing device also includes:
抛光容器,所述工件夹持旋转平台设在所述抛光容器内;a polishing container, the workpiece clamping rotary platform is set in the polishing container;
抛光液回收设备,设在所述研磨抛光容器的底端,用于回收抛光液,重复使用。The polishing liquid recovery equipment is arranged at the bottom of the grinding and polishing container, and is used for recovering the polishing liquid for repeated use.
优选的,前述的异型表面抛光装置,其中所述抛光液回收设备包括过滤器和储液器,所述过滤器为离心过滤器,包括抛光液回收室和玻璃废渣溢出室,所述过滤器的抛光液回收室与所述抛光容器之间通过第一管道连接,所述第一管道连接所述抛光容器的一端设有粗过滤网,所述第一管道连接所述过滤器的抛光液回收室的一端设有细过滤网;Preferably, the aforementioned special-shaped surface polishing device, wherein the polishing liquid recovery device includes a filter and a liquid reservoir, the filter is a centrifugal filter, including a polishing liquid recovery chamber and a glass waste overflow chamber, the filter The polishing liquid recovery chamber is connected with the polishing container through a first pipeline, and one end of the first pipeline connected to the polishing container is provided with a coarse filter, and the first pipeline is connected to the polishing liquid recovery chamber of the filter one end of which is provided with a fine filter;
所述储液器内设有搅拌器、加热棒和温度传感器,所述储液器通过第二管道与所述第一抛光液箱连接,所述储液器通过第三管道与所述第二抛光液箱连接,所述第二管道和第三管道上分别设有回流电机。A stirrer, a heating rod and a temperature sensor are arranged in the liquid reservoir, the liquid reservoir is connected with the first polishing solution tank through a second pipeline, and the liquid reservoir is connected with the second polishing liquid tank through a third pipeline. The polishing solution tank is connected, and the second pipeline and the third pipeline are respectively provided with return motors.
本发明的目的及解决其技术问题还采用以下的技术方案来实现。依据本发明提出的一种异型表面抛光方法,其包括:The purpose of the present invention and the solution to its technical problems are also achieved by the following technical solutions. According to a kind of special-shaped surface polishing method that the present invention proposes, it comprises:
抛光前,用清水超声波清净待抛光工件,超声10-15min,取出,用清水冲洗干净;将冲洗干净的待抛光工件装入气动夹具中;Before polishing, use clean water to ultrasonically clean the workpiece to be polished, ultrasonic for 10-15 minutes, take it out, and rinse it with clean water; put the rinsed workpiece to be polished into a pneumatic fixture;
根据待抛光工件的待抛光面的形状和尺寸,选择相适配的抛光介质,用六轴机械手抓取抛光介质;According to the shape and size of the surface to be polished of the workpiece to be polished, select the appropriate polishing medium, and use the six-axis manipulator to grab the polishing medium;
设定抛光压力与抛光液温度,打开旋转平台、抛光液喷射设备、抛光液体喷淋设备和抛光液回收设备;启动控制系统,对待抛光工件的待抛光面进行抛光;Set the polishing pressure and polishing liquid temperature, turn on the rotating platform, polishing liquid spraying equipment, polishing liquid spraying equipment and polishing liquid recovery equipment; start the control system to polish the surface of the workpiece to be polished;
在抛光过程中,使用后的抛光液进入抛光液回收设备中,经离心分离后,返回到抛光液喷射设备和抛光液体喷淋设备中。During the polishing process, the used polishing liquid enters the polishing liquid recovery equipment, and after being centrifuged, returns to the polishing liquid spraying equipment and the polishing liquid spraying equipment.
借由上述技术方案,本发明提出的异型表面抛光装置及抛光方法至少具有下列优点:By virtue of the above technical solutions, the special-shaped surface polishing device and polishing method proposed by the present invention have at least the following advantages:
1、本发明的异型表面抛光装置包括抛光介质、六轴机械手、抛光液喷射设备、抛光液体喷淋设备和工件夹持旋转平台,选用微孔聚氨酯材质的抛光介质,微孔聚氨酯的发泡孔有利于抛光粉的流动性,抛光介质包括层叠设置的置入层和抛光层,每层都设置有凹槽,增加抛光液的流动性,提高抛光效率。现场可以根据被抛光面的形状和大小来设计抛光介质的外形和尺寸,并使用六轴机械手抓取抛光介质,方便更换抛光介质。1. The special-shaped surface polishing device of the present invention includes a polishing medium, a six-axis manipulator, a polishing liquid spraying device, a polishing liquid spraying device, and a workpiece clamping rotary platform. The polishing medium made of microporous polyurethane and the foaming holes of microporous polyurethane are selected. It is beneficial to the fluidity of the polishing powder, and the polishing medium includes a laminated layer and a polishing layer, and each layer is provided with grooves to increase the fluidity of the polishing liquid and improve the polishing efficiency. The shape and size of the polishing medium can be designed on site according to the shape and size of the surface to be polished, and the six-axis manipulator can be used to grab the polishing medium to facilitate the replacement of the polishing medium.
2、本发明的装置基于机械手的自动程序控制、多自由度运动,以及其易于模仿手工的抛光动作的特性,通过程序控制实现对面积小且要求质量高的位置的自动化仿手工抛光,可显著提高研磨抛光效率、表面质量和加工尺寸精度,从而提升产品的一致性和稳定性。2. The device of the present invention is based on the automatic program control of the manipulator, multi-degree-of-freedom movement, and its characteristics of being easy to imitate manual polishing actions. Through program control, the automatic imitation manual polishing of positions with small areas and high quality requirements can be achieved significantly. Improve grinding and polishing efficiency, surface quality and processing dimensional accuracy, thereby improving product consistency and stability.
3、抛光过程实现对压力与温度的监测,通过传感器反馈信号对抛光动作进行控制。通过将压力传感器、温度传感器置入聚氨酯抛光材料中,在实际抛光过程中,通过对压力和温度的监测,分析判断抛光的效率,并建立压力、温度与抛光质量和效率的关系。3. The polishing process realizes the monitoring of pressure and temperature, and controls the polishing action through the sensor feedback signal. By putting the pressure sensor and temperature sensor into the polyurethane polishing material, in the actual polishing process, through the monitoring of pressure and temperature, the efficiency of polishing can be analyzed and judged, and the relationship between pressure, temperature and polishing quality and efficiency can be established.
4、本发明中采用喷、淋/渗结合的方式确保抛光液连续均匀地流到抛光面上,以提高抛光效率,避免由于抛光不适导致的残次品。抛光液首先通过抛光液喷射设备进入机械手的连接层,通过表面凹槽进行流动,由于聚氨酯是多孔的材料,抛光液经过材料中的微孔进行渗透,穿过置入层,直到抛光层;同时,采用抛光液体喷淋设备直接将抛光液喷到抛光位置。4. In the present invention, the combination of spraying and showering/infiltration is adopted to ensure that the polishing liquid flows continuously and evenly on the polishing surface, so as to improve the polishing efficiency and avoid defective products caused by polishing discomfort. The polishing liquid first enters the connecting layer of the manipulator through the polishing liquid injection equipment, and flows through the surface groove. Since polyurethane is a porous material, the polishing liquid penetrates through the micropores in the material, passes through the embedded layer, and reaches the polishing layer; at the same time , using polishing liquid spray equipment to directly spray the polishing liquid to the polishing position.
5、本发明利用离心分离技术,实现抛光液中玻璃粉与抛光粉的分离,密度小的玻璃粉通过离心分离从上层溢出,而抛光粉从装置的底层流出,实现了抛光粉的循环使用,降低抛光的成本。同时,辅助精细过滤技术,确保离心分离的效率。5. The present invention utilizes centrifugal separation technology to realize the separation of glass powder and polishing powder in the polishing liquid. The glass powder with low density overflows from the upper layer through centrifugal separation, while the polishing powder flows out from the bottom of the device, realizing the recycling of the polishing powder. Reduce the cost of polishing. At the same time, the auxiliary fine filtration technology ensures the efficiency of centrifugal separation.
6、本发明的异型表面抛光装置为自动化抛光装置,实现了硬质光纤传像元件异型表面的自动化抛光,主要针对光纤传像元件的圆角、柱面、斜面和台面等位置的抛光,这些位置的面积小,且抛光质量要求高。经检验,使用本发明的异型表面抛光装置可以显著提升光纤传像元件的加工效率和质量。目前因为加工抛光质量问题导致的不合格率近2%~5%,如果采用本发明的抛光装置,将表面质量不合格率降至0.5%以下,其经济效益非常可观。提高研磨抛光效率50%以上。此外,可以完善光纤传像元件的表面质量标准。6. The special-shaped surface polishing device of the present invention is an automatic polishing device, which realizes the automatic polishing of the special-shaped surface of the hard optical fiber image transmission element, mainly for the polishing of the fillet, cylinder, inclined surface and table top of the optical fiber image transmission element. The area of the location is small, and the polishing quality requirements are high. It has been verified that the processing efficiency and quality of optical fiber image transmission components can be significantly improved by using the special-shaped surface polishing device of the present invention. At present, the unqualified rate caused by processing and polishing quality problems is nearly 2% to 5%. If the polishing device of the present invention is used to reduce the surface quality unqualified rate to less than 0.5%, its economic benefits are very considerable. Improve grinding and polishing efficiency by more than 50%. In addition, surface quality standards for fiber optic imaging components can be refined.
7、本发明的异型表面抛光装置除了用于硬质光纤传像元件异型表面的自动化抛光,还可用于光学玻璃、陶瓷等材料的异型表面的自动化抛光,实现异型表面的自动化抛光。7. The special-shaped surface polishing device of the present invention is not only used for automatic polishing of special-shaped surfaces of hard optical fiber image transmission components, but also can be used for automatic polishing of special-shaped surfaces of optical glass, ceramics and other materials to realize automatic polishing of special-shaped surfaces.
8、本发明的异型表面抛光方法简单、快捷,能够实现自动化抛光,提高抛光效率、表面质量和加工尺寸精度,且抛光液经经离心分离返回到抛光液喷射设备和抛光液体喷淋设备中,减少环境污染,降低成本。8. The special-shaped surface polishing method of the present invention is simple and fast, can realize automatic polishing, improve polishing efficiency, surface quality and processing dimensional accuracy, and the polishing liquid is returned to the polishing liquid spraying equipment and polishing liquid spraying equipment through centrifugal separation, Reduce environmental pollution and reduce costs.
上述说明仅是本发明技术方案的概述,为了能够更清楚了解本发明的技术手段,并可依照说明书的内容予以实施,以下以本发明的较佳实施例并配合附图详细说明如后。The above description is only an overview of the technical solution of the present invention. In order to understand the technical means of the present invention more clearly and implement it according to the contents of the description, the preferred embodiments of the present invention and accompanying drawings are described in detail below.
附图说明Description of drawings
图1为本发明的一个实施例提出的一种异型表面抛光装置的结构示意图;Fig. 1 is a schematic structural view of a special-shaped surface polishing device proposed by an embodiment of the present invention;
图2为本发明的一个实施例提出的一种抛光介质的结构示意图;Fig. 2 is a schematic structural view of a polishing medium proposed by an embodiment of the present invention;
图3为本发明的另一个实施例提出的一种抛光介质的结构示意图;Fig. 3 is a schematic structural view of a polishing medium proposed in another embodiment of the present invention;
图4a为内圆形抛光面的结构示意图;Fig. 4a is a schematic structural view of the inner circular polishing surface;
图4b为三角形抛光面的结构示意图;Figure 4b is a schematic structural view of a triangular polished surface;
图4c为台阶形抛光面的结构示意图;Figure 4c is a schematic structural view of a stepped polished surface;
图4d为外圆形抛光面的结构示意图;Figure 4d is a schematic structural view of the outer circular polished surface;
图5为本发明的一个实施例提出的一种抛光介质的开槽结构示意图;Fig. 5 is a schematic diagram of a grooved structure of a polishing medium proposed by an embodiment of the present invention;
图6为本发明的另一个实施例提出的一种异型表面抛光装置的结构示意图;Fig. 6 is a structural schematic diagram of a special-shaped surface polishing device proposed by another embodiment of the present invention;
图7为本发明的一个实施例提出的一种异型表面抛光装置的所述抛光液回收设备的结构示意图。Fig. 7 is a schematic structural diagram of the polishing liquid recovery equipment of a special-shaped surface polishing device proposed by an embodiment of the present invention.
具体实施方式Detailed ways
为更进一步阐述本发明为达成预定发明目的所采取的技术手段及功效,以下结合附图及较佳实施例,对依据本发明提出的异型表面抛光装置及抛光方法其具体实施方式、结构、特征及其功效,详细说明如后。在下述说明中,不同的“一实施例”或“实施例”指的不一定是同一实施例。此外,一或多个实施例中的特定特征、结构或特点可由任何合适形式组合。In order to further explain the technical means and effects of the present invention to achieve the intended purpose of the invention, the specific implementation, structure and characteristics of the special-shaped surface polishing device and polishing method proposed according to the present invention will be described below in conjunction with the accompanying drawings and preferred embodiments. And its effect, detailed description is as follows. In the following description, different "one embodiment" or "embodiment" do not necessarily refer to the same embodiment. Furthermore, the particular features, structures or characteristics of one or more embodiments may be combined in any suitable manner.
如图1-5所示,本发明的一个实施例提出的一种异型表面抛光装置,其包括:抛光介质1、六轴机械手3、抛光液喷射设备2、抛光液体喷淋设备4和工件夹持旋转平台。As shown in Figures 1-5, an embodiment of the present invention proposes a special-shaped surface polishing device, which includes: a polishing medium 1, a six-axis manipulator 3, a polishing liquid spraying device 2, a polishing liquid spraying device 4 and a workpiece holder Hold the rotating platform.
抛光介质1包括层叠设置的置入层12和抛光层11,所述置入层12的上表面设有第一凹槽121,所述抛光层11与所述置入层12接触的一面设有第二凹槽111,所述置入层12内设置有压力传感器15和温度传感器16,所述抛光层11的抛光结构与待抛光面相适配;所述抛光介质1的材质为微孔聚氨酯。The polishing medium 1 includes a stacked insertion layer 12 and a polishing layer 11, the upper surface of the insertion layer 12 is provided with a first groove 121, and the surface of the polishing layer 11 in contact with the insertion layer 12 is provided with The second groove 111, the embedded layer 12 is provided with a pressure sensor 15 and a temperature sensor 16, the polishing structure of the polishing layer 11 is adapted to the surface to be polished; the material of the polishing medium 1 is microporous polyurethane.
在本实施例中,选用微孔聚氨酯材料作为抛光介质,其中的发泡孔有利于抛光粉的流动性。In this embodiment, a microporous polyurethane material is selected as the polishing medium, and the foam holes in it are beneficial to the fluidity of the polishing powder.
进一步的,所述压力传感器和温度传感器均位于所述置入层与所述抛光层接触的一面上。Further, both the pressure sensor and the temperature sensor are located on the side of the embedding layer in contact with the polishing layer.
通过在聚氨酯抛光材料中置入压力传感器和温度传感器,优选压力传感器和温度传感器置入位置靠近抛光位置点的上方5mm-10mm处,并设置在植入层中,实现对抛光过程中压力与温度的监测,通过传感器反馈信号对抛光动作进行控制。实际抛光过程中,通过对压力和温度的监测,分析判断抛光的效率,并建立压力、温度与抛光质量和效率的关系。置入层中压力与温度传感器放置位置结构示意如图2所示。By inserting pressure sensors and temperature sensors into the polyurethane polishing material, it is preferable that the pressure sensors and temperature sensors are placed close to the position 5mm-10mm above the polishing point and placed in the implant layer to realize the pressure and temperature during the polishing process. The monitoring, the polishing action is controlled through the sensor feedback signal. In the actual polishing process, through the monitoring of pressure and temperature, the efficiency of polishing is analyzed and judged, and the relationship between pressure, temperature and polishing quality and efficiency is established. The structure diagram of the placement position of the pressure and temperature sensors in the embedded layer is shown in Figure 2.
在一些优选实施例中,所述聚氨酯材料内含有填充物;所述的填充物包括氧化铈或氧化锆。In some preferred embodiments, the polyurethane material contains fillers; the fillers include cerium oxide or zirconium oxide.
聚氨酯材料内添加微量的填充物,含有氧化铈的聚氨酯材料主要用于提高抛光效率,含有氧化锆的聚氨酯材料主要用于提高光洁度,不含填充剂的聚氨酯材料表现为抛光过程中的稳定。根据被抛光物的不同,选择相应的肖氏硬度的聚氨酯。A small amount of filler is added to the polyurethane material. The polyurethane material containing cerium oxide is mainly used to improve the polishing efficiency. The polyurethane material containing zirconia is mainly used to improve the finish. The polyurethane material without filler is stable during the polishing process. According to the different objects to be polished, choose the corresponding Shore hardness polyurethane.
进一步的,在聚氨酯材料中混入氧化铈的填料,颗粒度小于5微米,其作为抛光介质时可有效提高抛光效率。Further, the polyurethane material is mixed with cerium oxide filler, the particle size of which is less than 5 microns, which can effectively improve the polishing efficiency when used as a polishing medium.
在一些实施例中,如图2所示,所述置入层12的厚度为10mm-20mm;所述抛光层11的厚度为5mm-10mm;所述置入层12和抛光层11之间通过胶粘结。In some embodiments, as shown in FIG. 2 , the thickness of the insertion layer 12 is 10mm-20mm; the thickness of the polishing layer 11 is 5mm-10mm; the insertion layer 12 and the polishing layer 11 are passed through Adhesive bonding.
为了增加抛光液的流动性,提高抛光效率,可在聚氨酯材料表面开槽,选用流动型号的胶胶粘结,使胶层均匀。In order to increase the fluidity of the polishing liquid and improve the polishing efficiency, grooves can be made on the surface of the polyurethane material, and a flowable type of glue can be selected for bonding to make the glue layer uniform.
在一些实施例中,所述第一凹槽121纵横相间排列,槽宽为1-3mm,优选2mm,槽深为1-3mm,优选2mm,相邻两平行槽之间的间距为10-20mm,优选15mm;In some embodiments, the first grooves 121 are arranged vertically and horizontally alternately, the groove width is 1-3mm, preferably 2mm, the groove depth is 1-3mm, preferably 2mm, and the distance between two adjacent parallel grooves is 10-20mm , preferably 15mm;
所述第二凹槽111纵横相间排列,槽宽为1-3mm,优选2mm,槽深为1-3mm,优选2mm,相邻两平行槽之间的间距为10-20mm,优选15mm。The second grooves 111 are arranged vertically and horizontally alternately, the groove width is 1-3mm, preferably 2mm, the groove depth is 1-3mm, preferably 2mm, and the distance between two adjacent parallel grooves is 10-20mm, preferably 15mm.
第一凹槽和第二凹槽的排列方式可以相同或不同,如图5所示为第二凹槽111的其中一种凹槽的排列方式。The arrangement of the first groove and the second groove can be the same or different, as shown in FIG. 5 , one of the arrangement of the second groove 111 is shown.
在另一些实施例中,如图3所述,抛光介质1除了包括置入层12和抛光层11,还包括顶层13,在顶层13上也开有第三凹槽131,所述顶层13的厚度为10mm-20mm,所述置入层12的厚度为10mm-20mm;所述抛光层11的厚度为5mm-10mm。顶层13、置入层12和抛光层11依次层叠设置。各层之间通过胶粘结。In some other embodiments, as shown in FIG. 3 , the polishing medium 1 includes a top layer 13 in addition to the embedding layer 12 and the polishing layer 11, and a third groove 131 is also opened on the top layer 13, and the top layer 13 The thickness is 10mm-20mm, the thickness of the embedded layer 12 is 10mm-20mm; the thickness of the polishing layer 11 is 5mm-10mm. The top layer 13 , the embedding layer 12 and the polishing layer 11 are sequentially stacked. The layers are bonded by glue.
增加顶层可以增加机械手的抓握力,或者通过机械钻孔与六轴机械手连接。Adding the top layer can increase the grip force of the manipulator, or connect with the six-axis manipulator through mechanical drilling.
除了开槽处理外,还可以打孔来提高抛光液的流动性,一般打孔的直径为2mm左右,实际口径的大小与排列形式根据加工面设置。In addition to slotting, holes can also be drilled to improve the fluidity of the polishing fluid. Generally, the diameter of the holes is about 2mm, and the actual size and arrangement of the holes are set according to the processing surface.
在一些实施例中,如图2所示,在所述第一凹槽121内设置有若干上下贯穿的通孔122,所述通孔122的孔径为1-3mm,优选2mm;和/或,In some embodiments, as shown in FIG. 2 , several through holes 122 penetrating up and down are provided in the first groove 121, and the diameter of the through holes 122 is 1-3 mm, preferably 2 mm; and/or,
在所述第二凹槽111内设置有若干上下贯穿的通孔112,所述通孔112的孔径为1-3mm,优选2mm。A plurality of through holes 112 penetrating up and down are provided in the second groove 111 , and the diameter of the through holes 112 is 1-3 mm, preferably 2 mm.
在一些实施例中,所述抛光层11的抛光结构与待抛光面相适配包括:In some embodiments, the polishing structure of the polishing layer 11 adapted to the surface to be polished includes:
待抛光面为平面时,选择平面抛光结构;When the surface to be polished is flat, choose a flat polishing structure;
待抛光面为球面时,选择相应的圆面抛光结构;When the surface to be polished is a spherical surface, select the corresponding circular surface polishing structure;
待抛光面为异型面时,选择相应的异型抛光结构。When the surface to be polished is a special-shaped surface, select the corresponding special-shaped polishing structure.
在本实施例中,抛光介质中抛光层的抛光结构可以按照常用的待抛光面的形状和尺寸提前做好多种型号,以供现场选择,而且使用机械手可以方便更换抛光介质,或者先做好平面抛光结构,现场现用现开相应的抛光结构。通常用W40的金刚石丸片对抛光面进行开刃,在使用过程中,可根据需要采用刷子对聚氨酯表面进行扫毛,有助于提高抛光效率。所述抛光层的抛光面根据被抛光面的形状进行相应的设计,可以采用平面或弧面或异型设计,平面适用于抛平面,圆面适用于抛球面如图4a和4d所示,其中图4a为内圆形,适用于抛圆角,图4d为外圆形,适用于凹面,而异型适用于异型面,如图4b和4c所示,其中图4b为三角形,适用于抛尖角;图4c为台阶形,适用抛台阶面。In this embodiment, the polishing structure of the polishing layer in the polishing medium can be prepared in advance according to the shape and size of the commonly used surface to be polished in a variety of models for on-site selection, and the use of manipulators can facilitate the replacement of the polishing medium, or make a flat surface first Polishing structure, the corresponding polishing structure is ready-to-use on site. Usually W40 diamond pellets are used to sharpen the polished surface. During use, brushes can be used to brush the polyurethane surface as needed, which helps to improve the polishing efficiency. The polishing surface of the polishing layer is designed correspondingly according to the shape of the polished surface, and can adopt a plane or an arc or a special-shaped design. The plane is suitable for a throwing plane, and the round surface is suitable for a throwing surface as shown in Figures 4a and 4d. 4a is an inner circle, which is suitable for throwing rounded corners. Figure 4d is an outer circle, which is suitable for concave surfaces, and the special shape is suitable for special-shaped surfaces, as shown in Figures 4b and 4c. Figure 4b is a triangle, which is suitable for throwing sharp corners; Figure 4c is a stepped shape, suitable for throwing a stepped surface.
六轴机械手3包括机械臂31、用于固定所述机械臂的基座32和位于所述机械臂端部的夹持部33,所述夹持部33用于夹持所述抛光介质1。The six-axis manipulator 3 includes a manipulator 31 , a base 32 for fixing the manipulator, and a clamping part 33 at the end of the manipulator, and the clamping part 33 is used for clamping the polishing medium 1 .
本实施例中,六轴机械手具体包括:基座、肩部、肘部、腕部等精密部件;所述六轴机械手由电机驱动;机械臂关节伺服驱动模块;关节无框电机;机械手:抛磨介质夹持装置,机械手的夹持部易开合,可以实现快速更换不同的抛光介质。In this embodiment, the six-axis manipulator specifically includes: precision components such as a base, shoulders, elbows, and wrists; the six-axis manipulator is driven by a motor; a servo drive module for the joints of the manipulator; Grinding medium clamping device, the clamping part of the manipulator is easy to open and close, which can realize rapid replacement of different polishing media.
本实施例的装置还包括1套控制系统,采用中央管理系统,可通过网口或wifi实现对N个加工终端的数据注入、改写、授时等管控操作。The device of this embodiment also includes a set of control system, adopts a central management system, and can realize data injection, rewriting, timing and other management and control operations for N processing terminals through network ports or wifi.
所述的控制系统与六轴机械手连接,用于控制六轴机械手进行抓取抛光介质并进行抛光操作;所述的控制系统与抛光介质中的压力传感器和温度传感器连接,用于控制抛光的压力和抛光液的温度;所述的控制系统与抛光液喷射设备和抛光液体喷淋设备连接,分别用于控制抛光液的喷射流量和喷淋流量;所述的控制系统与工件夹持旋转平台连接,用于控制旋转平台的旋转速度;所述的控制系统与抛光液回收设备连接,用于控制过滤器的离心过滤操作以及储液器内搅拌器的搅拌速度和加热棒的加热功率,并控制回流电机的功率。The control system is connected with the six-axis manipulator for controlling the six-axis manipulator to grab the polishing medium and perform polishing operations; the control system is connected with the pressure sensor and temperature sensor in the polishing medium for controlling the polishing pressure and the temperature of the polishing liquid; the control system is connected with the polishing liquid spraying equipment and the polishing liquid spraying equipment, and is respectively used to control the injection flow and the spraying flow of the polishing liquid; the control system is connected with the workpiece clamping rotary platform , used to control the rotation speed of the rotating platform; the control system is connected with the polishing liquid recovery equipment, used to control the centrifugal filtration operation of the filter and the stirring speed of the stirrer in the liquid reservoir and the heating power of the heating rod, and control Return the power of the motor.
本实施例的六轴机械手由6个自由度模拟人手臂的动作,如图1所示,控制精准,重复定位精度高。机械臂控制系统先进、稳定、安全、可靠。具有良好的拖动试教、高灵敏度碰撞的有优异特性。精巧的机械结构设计,外形紧凑,能够适应狭小的工作空间,及高精密的工作任务需求。The six-axis manipulator of this embodiment simulates the movement of a human arm with six degrees of freedom, as shown in Figure 1, with precise control and high repeat positioning accuracy. The robotic arm control system is advanced, stable, safe and reliable. It has excellent characteristics of good drag trial and high sensitivity collision. Exquisite mechanical structure design, compact shape, can adapt to the narrow working space and high-precision task requirements.
可通过可视化编程设置,手动拖拽机器人手臂,记录运行轨迹点进行编程,实现拖动示教;以及碰撞停止的功能,基于力觉的碰撞检测算法,通过关节电流、双编码器反馈,也可根据需求定制支持末端六维力传感器或六关节单维力传感器检测外力反馈,可以检测意外碰撞并停止运行,保障人机共处的安全性。Through visual programming settings, manually drag the robot arm, record the running track points for programming, and realize drag teaching; and the function of collision stop, collision detection algorithm based on force sense, through joint current and dual encoder feedback, can also be used According to the needs, it can be customized to support the terminal six-dimensional force sensor or six-joint single-dimensional force sensor to detect external force feedback, which can detect accidental collision and stop running, ensuring the safety of man-machine coexistence.
重复定位精度:±0.05mmRepeat positioning accuracy: ±0.05mm
额定寿命:30000hRated life: 30000h
协同操作:具备“安全适用的受监控停止”“拖动示教”以及“功率与力限制”等协作机器人安全功能。Collaborative operation: Collaborative robot safety functions such as "safe and applicable monitored stop", "drag teaching" and "power and force limitation".
自由度:6个Degrees of freedom: 6
最大臂展:666mmMaximum reach: 666mm
负载:≥3kgLoad: ≥3kg
编程:在工业平板显示器用户交互界面上进行Programming: on the industrial flat panel display user interface
安装方式:任意角度Installation method: any angle
防护等级:IP64Protection class: IP64
噪音:≤64dBNoise: ≤64dB
材料:铝合金。Material: Aluminum Alloy.
本实施例,使用机械臂对光纤传像元件异型抛光位置进行自动抛光处理。采用多轴协作机械臂,其特点:满足大负载、臂展宽、高精度、耐低温-20°、IP64防护等级。灵活模拟人工抛光动作,并实现抛光位置精准控制,避免人工操作时因授力大小及位置、角度偏差而导致的加工缺陷,提升成品合格率、可实现作业员单人同时操作多台设备,为用户单位减员增效提供保障。In this embodiment, a mechanical arm is used to perform automatic polishing on the shaped polishing position of the optical fiber image transmission element. It adopts multi-axis cooperative robotic arm, and its characteristics: meet the requirements of large load, wide arm, high precision, low temperature resistance -20°, IP64 protection level. It flexibly simulates the manual polishing action, and realizes precise control of the polishing position, avoids processing defects caused by force application, position, and angle deviation during manual operation, improves the qualified rate of finished products, and enables a single operator to operate multiple devices at the same time. Provide guarantee for user units to reduce staff and increase efficiency.
抛光液喷射设备2包括第一抛光液箱和第一喷管,所述第一喷管的一端连接有第一喷头,用于将抛光液喷射到第一凹槽121内。The polishing liquid spraying device 2 includes a first polishing liquid tank and a first spray pipe, one end of the first spray pipe is connected with a first spray head for spraying the polishing liquid into the first groove 121 .
进一步的,在所述第一喷管上设有第一液压泵,所述第一喷管的另一端通向所述第一抛光液箱。Further, a first hydraulic pump is provided on the first nozzle, and the other end of the first nozzle leads to the first polishing solution tank.
抛光液喷射设备采用液体喷射装置,抛光液喷射设备采取微孔喷射,实现抛光液小流量连续、等量喷射,喷射口位置可调。The polishing liquid injection equipment adopts a liquid injection device, and the polishing liquid injection equipment adopts micro-hole injection to realize continuous and equal injection of small flow of polishing liquid, and the position of the injection port is adjustable.
在一些优选实施例中,所述抛光介质的截面为圆形,喷管喷出的抛光液的落点位于抛光介质的凹槽上,相距抛光介质圆心四分之三半径长度处。In some preferred embodiments, the cross-section of the polishing medium is circular, and the landing point of the polishing liquid ejected from the nozzle is located on the groove of the polishing medium, three quarters of the radius away from the center of the polishing medium.
抛光液体喷淋设备4包括第二抛光液箱和第二喷管,所述第二喷管的一端连接有第二喷头,用于为抛光部位提供抛光液。The polishing liquid spraying device 4 includes a second polishing liquid tank and a second spray pipe. One end of the second spray pipe is connected with a second spray head for providing polishing liquid to the polishing site.
进一步的,在所述第二喷管上设有第二液压泵,所述第二喷管的另一端通向第二抛光液箱。Further, a second hydraulic pump is provided on the second nozzle, and the other end of the second nozzle leads to the second polishing solution tank.
本实施例中,抛光液采取喷射、淋/渗的设计。抛光过程中抛光液能否均匀流到抛光面上至关重要。本发明中采用喷、淋/渗结合的方式确保抛光液连续均匀地流到抛光面上,以提高抛光效率,避免由于抛光不适导致的残次品。抛光液首先通过抛光液喷射设备进入机械手的连接层,通过表面凹槽进行流动,由于聚氨酯是多孔的材料,抛光液经过材料中的微孔进行渗透,穿过置入层,直到抛光层;同时,采用抛光液体喷淋设备直接将抛光液喷到抛光位置。In this embodiment, the polishing liquid adopts the design of spraying and dripping/seeping. Whether the polishing liquid can evenly flow to the polishing surface during the polishing process is very important. In the present invention, the combination of spraying and showering/infiltration is adopted to ensure that the polishing liquid flows continuously and evenly on the polishing surface, so as to improve the polishing efficiency and avoid defective products caused by polishing discomfort. The polishing liquid first enters the connecting layer of the manipulator through the polishing liquid injection equipment, and flows through the surface groove. Since polyurethane is a porous material, the polishing liquid penetrates through the micropores in the material, passes through the embedded layer, and reaches the polishing layer; at the same time , using polishing liquid spray equipment to directly spray the polishing liquid to the polishing position.
工件夹持旋转平台,其包括旋转平台5和设置在所述旋转平台5上气动夹具6,所述气动夹具6用于夹持待抛光工件9。The workpiece clamping rotary platform includes a rotary platform 5 and a pneumatic clamp 6 arranged on the rotary platform 5, and the pneumatic clamp 6 is used for clamping a workpiece 9 to be polished.
所述旋转平台的下方设有旋转驱动装置,所述旋转驱动装置为旋转驱动电机。气动夹具采用高精度气动式三爪夹持方式,选择内置式气缸模式,具有上下料方便快捷、夹紧力大、密封性好、精度高、安全可靠、确保加工件装载到位,不产生角度倾斜,适合多种尺寸的样品加载。工件夹持旋转平台转速可控。A rotary drive device is provided below the rotary platform, and the rotary drive device is a rotary drive motor. Pneumatic fixture adopts high-precision pneumatic three-jaw clamping method, and chooses built-in cylinder mode, which has the advantages of convenient loading and unloading, large clamping force, good sealing, high precision, safety and reliability, and ensures that the workpiece is loaded in place without angle inclination , suitable for sample loading of various sizes. The rotation speed of the workpiece clamping rotary platform is controllable.
进一步的,如图6所示,所述的异型表面抛光装置还包括:Further, as shown in Figure 6, the special-shaped surface polishing device also includes:
抛光容器7,所述工件夹持旋转平台设在所述抛光容器7内;A polishing container 7, the workpiece holding rotating platform is arranged in the polishing container 7;
抛光液回收设备8,设在所述研磨抛光容器7的底端,用于回收抛光液,重复使用。The polishing liquid recovery device 8 is arranged at the bottom of the grinding and polishing container 7, and is used for recovering the polishing liquid for repeated use.
流回的抛光液经过离心分离,实现抛光粉与玻璃粉分离,回收抛光液。The returned polishing liquid is centrifuged to separate the polishing powder from the glass powder and recover the polishing liquid.
在一些实施例中,如图7所示,所述抛光液回收设备8包括过滤器81和储液器82,所述过滤器为离心过滤器,包括抛光液回收室和玻璃废渣溢出室,所述过滤器81的抛光液回收室与所述抛光容器7之间通过第一管道连接,所述第一管道连接所述抛光容器7的一端设有粗过滤网83,所述第一管道连接所述过滤器的抛光液回收室的一端设有细过滤网84;In some embodiments, as shown in FIG. 7, the polishing liquid recovery device 8 includes a filter 81 and a liquid reservoir 82, the filter is a centrifugal filter, including a polishing liquid recovery chamber and a glass waste overflow chamber, so The polishing liquid recovery chamber of the filter 81 is connected with the polishing container 7 through a first pipeline, and one end of the first pipeline connected to the polishing container 7 is provided with a coarse filter screen 83, and the first pipeline is connected to the polishing container 7. One end of the polishing solution recovery chamber of the filter is provided with a fine filter screen 84;
所述储液器82内设有搅拌器821、加热棒822和温度传感器(图中未示出),所述储液器82通过第二管道与所述第一抛光液箱连接,所述储液器82通过第三管道与所述第二抛光液箱连接,所述第二管道和第三管道上分别设有回流电机。The liquid reservoir 82 is provided with a stirrer 821, a heating rod 822 and a temperature sensor (not shown in the figure), and the liquid reservoir 82 is connected with the first polishing solution tank through a second pipeline. The liquid container 82 is connected to the second polishing liquid tank through a third pipeline, and the second pipeline and the third pipeline are respectively provided with return motors.
在抛光液为抛光粉的悬浮液,抛光液中抛光粉的密度是玻璃废渣(抛光时从待抛光工件的待抛光面上抛光下来的玻璃粉)的两倍,利用离心分离技术,实现抛光液中抛光粉与玻璃废渣的分离。在本装置中,使用后的抛光液先进入抛光液回收室中,密度小的玻璃废渣漂浮在抛光液的上层,通过离心分离从抛光液回收室的上开口溢出到玻璃废渣溢出室内,从系统中排出,而带有抛光粉的抛光液从抛光液回收室的下开口流出,实现了抛光液的循环使用,降低抛光的成本。同时,辅助精细过滤技术,确保离心分离的效率。The polishing liquid is a suspension of polishing powder, and the density of the polishing powder in the polishing liquid is twice that of the glass waste (glass powder polished from the surface of the workpiece to be polished during polishing). The centrifugal separation technology is used to realize the polishing liquid Separation of medium polishing powder and glass waste. In this device, the used polishing liquid enters the polishing liquid recovery chamber first, and the glass waste slag with low density floats on the upper layer of the polishing liquid, and overflows from the upper opening of the polishing liquid recovery chamber to the glass waste slag overflow chamber through centrifugal separation, and is discharged from the system. The polishing liquid with polishing powder flows out from the lower opening of the polishing liquid recovery chamber, which realizes the recycling of the polishing liquid and reduces the cost of polishing. At the same time, the auxiliary fine filtration technology ensures the efficiency of centrifugal separation.
使用循环泵过滤,采用连续过滤的方式,过滤掉较大玻璃碎屑及杂质,实现研磨抛光液的重复使用。研磨时,其研磨液颗粒度不大于W24级,抛光时,其抛光液粒度不大于W10。Use circulating pump to filter and adopt continuous filtration method to filter out large glass debris and impurities, so as to realize the repeated use of grinding and polishing liquid. When grinding, the particle size of the polishing liquid is not greater than W24 grade, and when polishing, the particle size of the polishing liquid is not greater than W10.
抽率:≥1.0m3/hPumping rate: ≥1.0m 3 /h
额定电压:220V/50HzRated voltage: 220V/50Hz
电机功率:≤150WMotor power: ≤150W
噪音:≤64dB。Noise: ≤64dB.
不锈钢主体结构配装重载型机座,确保设备运行稳定,防锈防腐、减震。六轴机械手的基座设在所述抛光容器外部。The stainless steel main structure is equipped with a heavy-duty machine base to ensure stable operation of the equipment, anti-rust, anti-corrosion, and shock absorption. The base of the six-axis manipulator is located outside the polishing container.
使用本实施例的异型表面抛光装置可以实现自动抛光,该抛光方法主要包括以下步骤:The special-shaped surface polishing device of this embodiment can be used to realize automatic polishing, and the polishing method mainly includes the following steps:
1)抛光前,用清水超声波清净待抛光工件9,超声10-15min,取出,用清水冲洗干净,以避免颗粒状异物的存在导致表面在加工过程中的损伤;1) Before polishing, use clear water to ultrasonically clean the workpiece 9 to be polished, ultrasonically for 10-15 minutes, take it out, and rinse it with clean water to avoid damage to the surface during processing caused by the presence of granular foreign matter;
2)检查六轴机械手3、抛光液喷射设备2、抛光液体喷淋设备4和工件夹持旋转平台是否运转正常;2) Check whether the six-axis manipulator 3, polishing liquid spraying equipment 2, polishing liquid spraying equipment 4 and workpiece clamping rotary platform are operating normally;
3)打开六轴机械手3,根据待抛光工件9的待抛光面的形状和尺寸,选择相适配的抛光介质1,调出适用程序,六轴机械手3抓取抛光介质1;3) Open the six-axis manipulator 3, select the matching polishing medium 1 according to the shape and size of the surface to be polished of the workpiece 9 to be polished, call out the applicable program, and the six-axis manipulator 3 grabs the polishing medium 1;
4)将冲洗干净的待抛光工件9装入特定位置的高精度气动夹具6中,同时确保中心定位且与工作面垂直;4) Put the rinsed workpiece 9 to be polished into the high-precision pneumatic clamp 6 at a specific position, while ensuring that the center is positioned and perpendicular to the working surface;
5)设定抛光压力与抛光液温度,打开高精度的旋转平台5、抛光液喷射设备2、抛光液体喷淋设备4和抛光液回收设备8,启动控制系统;5) Set the polishing pressure and the temperature of the polishing liquid, turn on the high-precision rotating platform 5, the polishing liquid injection equipment 2, the polishing liquid spraying equipment 4 and the polishing liquid recovery equipment 8, and start the control system;
6)通过六轴机械手紧压工件表面,同时根据设定的压力与温度自动调整回流电机压力与加热棒822的温度。同时,通过程序控制六轴机械手仿手工抛光的微摆动,对待抛光工件的待抛光面进行抛光,抛光时间作为是否抛好的主要标准;6) The surface of the workpiece is pressed tightly by the six-axis manipulator, and at the same time, the pressure of the reflow motor and the temperature of the heating rod 822 are automatically adjusted according to the set pressure and temperature. At the same time, the micro-oscillation of the six-axis manipulator imitating manual polishing is controlled by the program to polish the surface of the workpiece to be polished, and the polishing time is the main criterion for whether the polishing is good;
在抛光过程中,使用后的抛光液进入抛光液回收设备中,经离心分离后,返回到抛光液喷射设备和抛光液体喷淋设备中;During the polishing process, the used polishing liquid enters the polishing liquid recovery equipment, and after centrifugal separation, returns to the polishing liquid injection equipment and the polishing liquid spraying equipment;
7)将抛光后的工件用纯净水冲洗干净。7) Rinse the polished workpiece with pure water.
基于机械臂的多自由度灵活运动及其易于模仿手工的抛光动作的优点,通过程序控制实现对面积小且要求质量高的位置的自动化抛光。截止到目前,尚未见到基于机械手的光纤传像元件异型表面的自动抛光的方法。本发明使用机械手对光纤传像元件异型抛光位置进行自动研磨抛光处理。采用多轴协作机械臂,其特点:满足大负载、臂展宽、高精度、耐低温-20°、IP64防护等级。灵活模拟人工抛光动作,并实现抛光位置精准控制,避免人工操作时因授力大小及位置、角度偏差而导致的加工缺陷,提升成品合格率、可实现作业员单人同时操作多台设备,为用户单位减员增效提供保障。Based on the multi-degree-of-freedom flexible movement of the robotic arm and its advantages of being easy to imitate manual polishing actions, the automatic polishing of small-area and high-quality positions is realized through program control. Up to now, there is no automatic polishing method for the special-shaped surface of the optical fiber image transmission element based on the manipulator. The invention uses a manipulator to automatically grind and polish the special-shaped polishing position of the optical fiber image transmission element. It adopts multi-axis cooperative robotic arm, and its characteristics: meet the requirements of large load, wide arm, high precision, low temperature resistance -20°, IP64 protection level. It flexibly simulates the manual polishing action, and realizes precise control of the polishing position, avoids processing defects caused by force application, position, and angle deviation during manual operation, improves the qualified rate of finished products, and enables a single operator to operate multiple devices at the same time. Provide guarantee for user units to reduce staff and increase efficiency.
本发明的异型表面抛光装置为自动化抛光装置,实现了硬质光纤传像元件异型表面的自动化抛光,主要针对光纤传像元件的圆角、柱面、斜面和台面等位置的抛光,这些位置的面积小,且抛光质量要求高。The special-shaped surface polishing device of the present invention is an automatic polishing device, which realizes the automatic polishing of the special-shaped surface of the hard optical fiber image transmission element, and is mainly aimed at the polishing of the rounded corners, cylindrical surfaces, inclined surfaces and table tops of the optical fiber image transmission element. The area is small, and the polishing quality requirements are high.
经检验,使用本发明的异型表面抛光装置可以显著提升光纤传像元件的加工效率和质量。目前因为加工抛光质量问题导致的不合格率近2%~5%,如果采用本发明的抛光装置,将表面质量不合格率降至0.5%以下,其经济效益非常可观。提高研磨抛光效率50%以上。此外,可以完善光纤传像元件的表面质量标准。It has been verified that the processing efficiency and quality of optical fiber image transmission components can be significantly improved by using the special-shaped surface polishing device of the present invention. At present, the unqualified rate caused by processing and polishing quality problems is nearly 2% to 5%. If the polishing device of the present invention is used to reduce the surface quality unqualified rate to less than 0.5%, its economic benefits are very considerable. Improve grinding and polishing efficiency by more than 50%. In addition, surface quality standards for fiber optic imaging components can be refined.
在发明的描述中,需要说明的是,术语“上”、“下”、“水平”、“垂直”等指示的方位或位置关系为基于附图所示的方法或位置关系,仅是为了便于描述本发明和简化描述,而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作,因此,不能理解为对本发明的限制。In the description of the invention, it should be noted that the orientation or positional relationship indicated by the terms "upper", "lower", "horizontal", "vertical", etc. is based on the method or positional relationship shown in the drawings, and is only for convenience The present invention is described and simplified descriptions do not indicate or imply that the devices or elements referred to must have a specific orientation, be constructed and operate in a specific orientation, and therefore, should not be construed as limiting the present invention.
此外,在本发明的描述中,需要说明的是,除非另有明确的规定和限定,术语“相连”、“连接”应做广义理解,例如,可以是固定连接,也可以是可拆卸连接,或一体地连接;可以是机械连接,也可以是电连接;可以是直接连接,也可以通过中间媒介间接相连,可以是两个元件内部的连通。对于本领域的普通技术人员而言,可以具体情况理解上述术语在本发明中的具体含义。In addition, in the description of the present invention, it should be noted that unless otherwise specified and limited, the terms "connected" and "connected" should be understood in a broad sense, for example, it can be a fixed connection or a detachable connection, Or integrally connected; it may be mechanically connected or electrically connected; it may be directly connected or indirectly connected through an intermediary, and it may be the internal communication of two components. Those of ordinary skill in the art can understand the specific meanings of the above terms in the present invention in specific situations.
在上述实施例中,对各个实施例的描述都各有侧重,某个实施例中没有详述的部分,可以参见其他实施例的相关描述。In the foregoing embodiments, the descriptions of each embodiment have their own emphases, and for parts not described in detail in a certain embodiment, reference may be made to relevant descriptions of other embodiments.
以上所述,仅是本发明的较佳实施例而已,并非对本发明作任何形式上的限制,虽然本发明已以较佳实施例揭露如上,然而并非用以限定本发明,任何熟悉本专业的技术人员,在不脱离本发明技术方案范围内,当可利用上述揭示的技术内容作出些许更动或修饰为等同变化的等效实施例,但凡是未脱离本发明技术方案的内容,依据本发明的技术实质对以上实施例所作的任何简单修改、等同变化与修饰,均仍属于本发明技术方案的范围内。The above description is only a preferred embodiment of the present invention, and does not limit the present invention in any form. Although the present invention has been disclosed as above with preferred embodiments, it is not intended to limit the present invention. Anyone familiar with this field Those skilled in the art, without departing from the scope of the technical solution of the present invention, can use the technical content disclosed above to make some changes or modify equivalent embodiments with equivalent changes. Any simple modifications, equivalent changes and modifications made to the above embodiments by the technical essence still belong to the scope of the technical solutions of the present invention.
Claims (8)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110128566.2A CN112935994B (en) | 2021-01-29 | 2021-01-29 | Special-shaped surface polishing device and polishing method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110128566.2A CN112935994B (en) | 2021-01-29 | 2021-01-29 | Special-shaped surface polishing device and polishing method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN112935994A CN112935994A (en) | 2021-06-11 |
| CN112935994B true CN112935994B (en) | 2023-08-01 |
Family
ID=76239977
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110128566.2A Active CN112935994B (en) | 2021-01-29 | 2021-01-29 | Special-shaped surface polishing device and polishing method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN112935994B (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114260815A (en) * | 2021-12-31 | 2022-04-01 | 华侨大学 | Robot-based high-generation line glass substrate polishing system and polishing method |
| CN115922453B (en) * | 2022-12-27 | 2025-07-15 | 深圳市摆渡微电子有限公司 | A machining and polishing method for tungsten steel nozzle |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL7607991A (en) * | 1975-07-31 | 1977-02-02 | Treibacher Chemische Werke Ag | GRAIN CARRIER FOR ABRASIVES. |
| GB9626830D0 (en) * | 1996-01-11 | 1997-02-12 | Jason Inc | Abrading tools and method of making |
| JPH11111656A (en) * | 1997-09-30 | 1999-04-23 | Nec Corp | Manufacture of semiconductor device |
| JP2004255467A (en) * | 2003-02-24 | 2004-09-16 | Central Glass Co Ltd | Continuous single-side polishing device for glass board |
| CN101367202A (en) * | 2007-08-16 | 2009-02-18 | 罗门哈斯电子材料Cmp控股股份有限公司 | Laminated Fibril Grids for Chemical Mechanical Polishing |
| CN105290990A (en) * | 2015-11-20 | 2016-02-03 | 台山市远鹏研磨科技有限公司 | Handheld porous sponge polishing wheel |
| CN105798789A (en) * | 2016-03-18 | 2016-07-27 | 扬中市博威磨具有限公司 | High-efficiency and low-cost grinding abrasive disc with flannelette back and production technology thereof |
| CN210819064U (en) * | 2019-08-05 | 2020-06-23 | 芜湖长信科技股份有限公司 | Polishing pad for thinning glass substrate |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH1094965A (en) * | 1996-09-24 | 1998-04-14 | Sony Corp | Chemical machine polishing device |
| US6599175B2 (en) * | 2001-08-06 | 2003-07-29 | Speedfam-Ipeca Corporation | Apparatus for distributing a fluid through a polishing pad |
| JP4754912B2 (en) * | 2005-09-15 | 2011-08-24 | 株式会社ディスコ | Cutting equipment |
| CN101983838B (en) * | 2010-10-14 | 2012-07-25 | 复旦大学 | Milling, grinding and polishing device based on intelligent numerically-controlled platform |
| TWI642772B (en) * | 2017-03-31 | 2018-12-01 | 智勝科技股份有限公司 | Polishing pad and polishing method |
| CN108527012A (en) * | 2018-05-21 | 2018-09-14 | 浙江工业大学 | A kind of device carrying out big plane polishing using liquid metal polishing fluid |
| CN209681874U (en) * | 2018-12-28 | 2019-11-26 | 南京鼎晋电子有限公司 | A kind of precise finiss polissoir |
| CN110682185B (en) * | 2019-09-09 | 2021-09-07 | 中国科学院上海光学精密机械研究所 | Processing method of high precision exposure lens |
| CN211220041U (en) * | 2019-12-11 | 2020-08-11 | 中国工程物理研究院激光聚变研究中心 | Polishing disk and polishing system |
| CN111070080B (en) * | 2019-12-31 | 2022-02-22 | 天津大学 | Surface series processing technology for sub-aperture center liquid supply optical element |
-
2021
- 2021-01-29 CN CN202110128566.2A patent/CN112935994B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL7607991A (en) * | 1975-07-31 | 1977-02-02 | Treibacher Chemische Werke Ag | GRAIN CARRIER FOR ABRASIVES. |
| GB9626830D0 (en) * | 1996-01-11 | 1997-02-12 | Jason Inc | Abrading tools and method of making |
| JPH11111656A (en) * | 1997-09-30 | 1999-04-23 | Nec Corp | Manufacture of semiconductor device |
| JP2004255467A (en) * | 2003-02-24 | 2004-09-16 | Central Glass Co Ltd | Continuous single-side polishing device for glass board |
| CN101367202A (en) * | 2007-08-16 | 2009-02-18 | 罗门哈斯电子材料Cmp控股股份有限公司 | Laminated Fibril Grids for Chemical Mechanical Polishing |
| CN105290990A (en) * | 2015-11-20 | 2016-02-03 | 台山市远鹏研磨科技有限公司 | Handheld porous sponge polishing wheel |
| CN105798789A (en) * | 2016-03-18 | 2016-07-27 | 扬中市博威磨具有限公司 | High-efficiency and low-cost grinding abrasive disc with flannelette back and production technology thereof |
| CN210819064U (en) * | 2019-08-05 | 2020-06-23 | 芜湖长信科技股份有限公司 | Polishing pad for thinning glass substrate |
Also Published As
| Publication number | Publication date |
|---|---|
| CN112935994A (en) | 2021-06-11 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN112935994B (en) | Special-shaped surface polishing device and polishing method | |
| CN105904311B (en) | One kind polishing combined machine and polishing method | |
| CN104816056B (en) | Method for electrolysis-magnetic abrasive finishing of composite finishing hard material and device for method | |
| CN111451937B (en) | Liquid metal grinding disc self-repairing device with automatic grasping function | |
| CN112388318B (en) | A welding equipment used in the production process of new energy batteries | |
| CN117817533A (en) | A rope polishing device for parts with fine inner holes | |
| CN116141335A (en) | A Direct Drive CNC Machining Robot | |
| TWI784584B (en) | Composite rotary electrode mechanism for electrochemical machining and brush grinding | |
| CN208246502U (en) | Concave surface edge precise polishing device | |
| CN105290946A (en) | Full-automatic plate making and polishing system and method for plate making and polishing | |
| CN212240315U (en) | High-speed internal grinding machine of high accuracy | |
| CN209793381U (en) | Cleaning device for preparing environment-friendly crystal glass | |
| CN207997188U (en) | A kind of optical mirror slip system of processing | |
| CN211992378U (en) | Polishing machine tool with dust removal function | |
| CN214186526U (en) | Positioning device for optical lens processing | |
| CN215881183U (en) | Metallographic specimen polishing machine convenient for fixing workpiece | |
| CN211708859U (en) | Concrete wall roughening device with dust removal function | |
| CN213054255U (en) | Grinding tool capable of carrying out annular polishing | |
| CN206662910U (en) | A kind of electronic shell grinding machine disk | |
| CN208246552U (en) | The online homogenizer of liquid metal polishing fluid | |
| CN108772764B (en) | Concave surface precision polishing device | |
| CN112872978A (en) | Polishing device convenient for dust removal for mobile phone glass screen | |
| CN220426097U (en) | Numerical control machine tool workbench cleaning device | |
| CN212470851U (en) | Automatic coping ware of robot | |
| CN220091676U (en) | Pumping and discharging device of pumping machine |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |