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CN113074663B - A beam vector deviation planning compensation method for spectral confocal on-machine measurement - Google Patents

A beam vector deviation planning compensation method for spectral confocal on-machine measurement Download PDF

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CN113074663B
CN113074663B CN202110332948.7A CN202110332948A CN113074663B CN 113074663 B CN113074663 B CN 113074663B CN 202110332948 A CN202110332948 A CN 202110332948A CN 113074663 B CN113074663 B CN 113074663B
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displacement sensor
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CN113074663A (en
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王永青
袭萌萌
刘海波
肖皓维
丁植
李旭
薄其乐
贾振元
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Dalian University of Technology
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    • G01—MEASURING; TESTING
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Abstract

本发明提供了一种光谱共焦在机测量的光束矢量偏差规划补偿方法，属于精密测量技术领域。将光学位移传感器集成在超精密四轴车床上，搭建光谱共焦在机测量系统，并选定测量参考点，建立初始坐标关系；再分别执行光束方向标定程序和测量原点偏置矢量标定程序；多次执行标定程序与粗调过程直至光束矢量偏差小于机械调整机构的调节分辨率；再依据复杂曲面轮廓计算初始扫描测量轨迹；最后根据最终标定结果规划测量运动，通过补偿直线轴运动，生成光束矢量偏差补偿测量程序。本发明减小了复杂曲面余弦测量误差，并确保测量参考点始终位于测量编程轨迹上，解决了光束方向偏差与测量原点偏置矢量引起的在机测量误差，提高了复杂曲面轮廓的在机测量精度。

Figure 202110332948

The invention provides a beam vector deviation planning compensation method for spectral confocal on-machine measurement, belonging to the technical field of precision measurement. Integrate the optical displacement sensor on the ultra-precision four-axis lathe, build a spectral confocal on-machine measurement system, select the measurement reference point, and establish the initial coordinate relationship; then execute the beam direction calibration procedure and the measurement origin offset vector calibration procedure respectively; Execute the calibration procedure and coarse adjustment process multiple times until the beam vector deviation is smaller than the adjustment resolution of the mechanical adjustment mechanism; then calculate the initial scanning measurement trajectory according to the complex surface contour; finally plan the measurement movement according to the final calibration result, and generate the beam by compensating the linear axis movement Vector deviation compensation measurement program. The invention reduces the cosine measurement error of complex curved surfaces, ensures that the measurement reference point is always located on the measurement programming track, solves the on-machine measurement error caused by the deviation of the beam direction and the offset vector of the measurement origin, and improves the on-machine measurement of the complex curved surface profile. precision.

Figure 202110332948

Description

Light beam vector deviation planning compensation method for spectrum confocal on-line measurement
Technical Field
The invention belongs to the technical field of precision measurement, and particularly relates to a light beam vector deviation planning compensation method for spectrum confocal on-line measurement.
Background
The complex curved surface part is a key part in core equipment in the fields of aerospace, space exploration, precise optics and other important engineering. The surface of the material often has geometric characteristics such as functional structures and the like and high-precision machining requirements. On-machine detection in the processing process is a key step for ensuring that the product meets the quality requirement. Optical sensors have been applied to the non-destructive, rapid measurement of free-form surfaces. The surface data of the part is extracted through the non-contact high-precision displacement sensor, and the relation among the machine tool coordinate, the measuring spot position and the light beam direction is accurately established, so that the actual profile of the complex curved surface is obtained on-machine.
However, in the non-contact precision coordinate detection of a complex curved surface, the deviation of the beam vector caused by the mounting error of the measurement system is not negligible. The beam vector deviation includes a beam direction deviation and a bias vector of the measurement origin with respect to the rotation axis. On one hand, cosine measurement errors caused by beam direction deviation cause distortion of measurement results of actual machining contours of complex curved surfaces; on the other hand, the concave-convex fluctuation characteristics of the complex curved surface require that the space attitude of the optical measuring head is changeable, namely, the rotation axis motion is introduced, the offset distance of the measuring origin relative to the rotation axis causes the actual measuring point to deviate from the planned measuring track, and the on-machine measuring precision is difficult to guarantee. Therefore, a non-contact on-machine measurement error compensation method is sought to solve the problem of measurement inaccuracy caused by the vector deviation of the light beam.
In 2020, the invention patent CN111745463A of shanguijiang et al discloses an error compensation planning method and system based on an on-machine measurement front file, which performs compensation planning according to a positioning error before part processing and an error in the part processing process, and outputs the result in the form of an on-machine measurement front file. The method mainly sets two compensation modes aiming at the positioning error and the processing error of the part, and does not relate to the measurement error caused by the non-contact measurement light beam vector deviation. In 2020, yao bin and the like disclose a screw rotor laser measurement track planning method under multi-factor constraint in patent invention CN111288893A, the method establishes a point laser sensor four-dimensional error model of an incident inclination angle, an incident rotation angle, an incident tilt angle measurement depth and a measurement error based on a built four-coordinate laser measurement system and an error correction experimental device, plans a measurement track of a screw rotor end face tooth profile according to the model, and performs error compensation on data points. The method considers the influence of parameters such as the measured incidence inclination angle and the incident rotation angle on the measurement precision of the point laser displacement sensor, and does not consider the complex curved surface measurement error caused by the relation among the machine tool coordinate, the measured light spot position and the light beam direction.
None of the above methods mention a spectral confocal on-line measured beam vector deviation planning compensation method.
Disclosure of Invention
The invention mainly solves the technical problem of overcoming the defects of the method, and provides a light beam vector deviation planning compensation method for spectrum confocal on-line measurement aiming at the requirements of high-precision and high-efficiency on-line measurement of a complex curved surface. The method adopts a compensation strategy of light beam vector deviation coarse adjustment and measurement track correction, reduces the cosine measurement error of the complex curved surface, ensures that a measurement reference point is always positioned on a measurement programming track, solves the on-machine measurement error caused by light beam direction deviation and measurement origin offset vector in non-contact coordinate detection, and improves the on-machine measurement precision of the complex curved surface profile.
The technical scheme adopted by the invention is as follows:
a light beam vector deviation planning compensation method for spectrum confocal on-line measurement comprises the steps of firstly, integrating an optical displacement sensor on an ultra-precise four-axis lathe, building a spectrum confocal on-line measurement system, selecting a measurement reference point and establishing an initial coordinate relation; then, respectively executing a light beam direction calibration program and a measurement origin offset vector calibration program, and roughly adjusting the posture of the optical displacement sensor according to the calibration result; executing the calibration procedure and the coarse adjustment process for multiple times until the light beam vector deviation is smaller than the adjustment resolution of the mechanical adjustment mechanism; then, calculating an initial scanning measurement track according to the complex curved surface profile; and finally planning measurement movement according to the final calibration result, and generating a light beam vector deviation compensation measurement program by compensating linear axis movement. The method comprises the following specific steps:
step one, establishing an initial coordinate relationship
First, the optical displacement sensor 1 is mounted on the on-machine measuring apparatus 2 having a multi-degree-of-freedom attitude precision adjustment function. The on-machine measuring device 2 comprises an optical displacement sensor jacket 2a and an attitude adjuster which are connected in sequenceA joint mechanism 2b and a mounting base 2 c. The on-machine measuring device 2 is mounted on the rotary table 3 of the ultra-precision four-axis lathe through a mounting base 2 c. The posture adjusting mechanism 2b has an X-direction linear motion adjusting knob KXY-direction linear motion adjusting knob KYA direction angle swing adjusting knob KAAnd B direction angle swing adjusting knob KB. In the technical scheme, a rotary worktable 3 is arranged on a Z-direction linear motion shaft of an ultra-precise four-shaft lathe, a main shaft 5 of the ultra-precise four-shaft lathe is arranged on an X-direction linear motion shaft, and the Y direction is determined by a right-hand screw rule; the direction A is the direction of the rotary motion around the X axis, and the direction B is the direction of the rotary motion around the Y axis.
Then, the knob K is adjusted by adjusting the linear motion in the X directionXThe straight line l of the optical axis 4 of the optical displacement sensor 1 is made to pass through the rotation axis l of the rotary table 3 approximatelyB. Adjusting knob K for moving X axis of machine tool and adjusting linear motion in Y directionYA direction angle swing adjusting knob KAAnd B direction angle swing adjusting knob KBThe straight line l of the optical axis 4 of the optical displacement sensor 1 is made to approximate the rotation axis l of the main shaft 5 of the ultra-precise four-axis latheCAnd (4) overlapping.
And establishing a measurement coordinate system SCS, a machine tool coordinate system MCS and a workpiece coordinate system WCS. Machine tool coordinate system MCS origin O of ultra-precise four-axis latheMDefined at the mechanical null point of each axis of motion. WCS origin O of workpiece coordinate systemWIs defined on the measured curved surface. Measurement coordinate system SCS origin OSDefined at the beginning of the optical displacement sensor span range, i.e., the point where the measurement reading is zero.
And selecting any point in the measuring range of the optical displacement sensor as a measuring reference point P, wherein the point is the intersection point of the measuring beam and the measured curved surface. The light beam vector deviation in the technical scheme comprises light beam direction deviation and a measurement coordinate system SCS origin OSOffset vector with respect to the rotary table 3. The beam direction is expressed as a unit vector t (t)x,ty,tz) Represents; measurement coordinate system SCS origin OSThe offset vector with respect to the rotary table 3 is represented by L (L)x,Ly,Lz) And (4) showing.
Axis of rotation l of rotary table 3BAnd the measuring plane XSOSZSThe intersection point of (a) is O. Under the machine coordinate system MCS, the coordinate of the intersection point O is
Figure BDA0002996975580000031
Measurement coordinate system SCS origin OSCoordinates of (2)
Figure BDA0002996975580000032
Comprises the following steps:
Figure BDA0002996975580000033
wherein L isy0. Measuring the coordinates of the reference point P
Figure BDA0002996975580000034
Comprises the following steps:
Figure BDA0002996975580000035
wherein d is the reading of the optical displacement sensor, B is the rotation angle of the rotary worktable, alpha is the attitude pitching angle of the optical displacement sensor, and beta is the attitude deflection angle of the optical displacement sensor. The attitude pitch angle α and the attitude yaw angle β are calculated according to the following equations:
Figure BDA0002996975580000041
wherein, t1(tx,0,tz) Is a unit vector t (t)x,ty,tz) Is in the measurement plane XSOSZSThe resultant vector of (1), t2(0,0,tz) Is a unit vector t (t)x,ty,tz) Component in the Z direction.
Step two, calibrating vector deviation of light beams and roughly adjusting pose
On-machine scanning and measuring standard ball to complete unit vector t (t) of light beam directionx,ty,tz) And measuring coordinate system SCS origin OSOffset vector L (L) with respect to rotary table 3x,Ly,Lz) And (4) calibrating. The method comprises the following specific steps:
light beam direction unit vector t (t)x,ty,tz) The standard ball is obtained by scanning a plurality of section lines of the standard ball and performing fitting calculation according to actual measurement reading and machine tool coordinates. The method specifically comprises the following steps: on-machine scanning measurement of multiple section lines of the standard ball is realized by utilizing linear motion in the X direction and rotary motion of a main shaft 5 of the ultra-precision lathe, so that a calibration program is established. And synchronously reading the reading of the optical displacement sensor 1 and the coordinates of the machine tool in the measuring process, and storing the reading and the coordinates in the same calibration data file. Establishing a light beam direction unit vector solving program, adopting a nonlinear least square fitting method, and establishing an objective function according to a spherical equation:
Figure BDA0002996975580000042
wherein Xi、Zi、CiRespectively, measured reading diCoordinates of an X axis and a Z axis of the corresponding machine tool and a main shaft of the ultra-precision lathe; osphere_x、osphere_y、osphere_zIs the coordinate of the center of a standard sphere in the coordinate system of the machine tool, RsphereIs the standard sphere radius. Then using the calibration data file as the input of the light beam direction unit vector solving program, giving an initial value, and calculating to obtain a light beam direction unit vector t (t)x,ty,tz)。
Offset vector L (L)x,Ly,Lz) And scanning and measuring the standard ball to obtain the highest points of the standard ball in the X direction and the Z direction, and calculating the coordinate difference of the two points to obtain the highest point. The method specifically comprises the following steps: respectively scanning the standard ball along the X direction and the Z direction, wherein the measuring point when the reading of the optical displacement sensor is minimum is the highest point of the standard ball, the reading of the optical displacement sensor and the machine tool coordinate are stored, and the offset vector L (L) is solved by using the formula (5)x,Ly,Lz)：
Figure BDA0002996975580000051
Wherein d ismin_x、dmin_zRespectively scanning and measuring the minimum reading of the optical displacement sensor along the X direction and the Z direction when the standard ball is measured; x1、Z1The coordinate of the machine tool corresponding to the minimum reading of the optical displacement sensor when the standard ball is scanned and measured along the X direction; x2、Z2The coordinate of the machine tool corresponding to the minimum reading of the optical displacement sensor when the standard ball is scanned and measured along the Z direction is obtained.
According to the calibrated unit vector t (t)x,ty,tz) Calculating the attitude pitch angle alpha and the attitude yaw angle beta of the optical displacement sensor 1 by the formula (3), and adjusting the A direction angle swing adjusting knob KAAnd B direction angle swing adjusting knob KBAnd the coarse posture adjustment of the optical displacement sensor 1 is realized. According to a calibrated bias vector L (L)x,Ly,Lz) Adjusting knob K for adjusting linear motion in X directionXThe adjustment quantity is delta x, and the measurement of the origin O of the coordinate system SCS is realizedSCoarse adjustment with respect to the position of the rotary table 3.
And executing the calibration program and the pose rough adjustment process for multiple times until the light beam vector deviation is smaller than the adjustment resolution of the mechanical adjustment mechanism. Recording the offset vector L (L)x,Ly,Lz) And the final calibration result is used as an input value of a light beam vector deviation compensation measurement motion program to realize accurate compensation in the measurement motion.
Step three, generating an initial scanning measurement track
Firstly, an in-situ measurement planning method for a high-gradient complex curved surface in patent CN110500969B is adopted, and simultaneously, the motion form of an ultra-precise four-axis lathe is combined, and a full-surface latticed scanning measurement path and a local encrypted scanning contour line of the complex curved surface are calculated under a workpiece coordinate system WCS and are used as an initial scanning measurement track. The whole surface latticed scanning measurement path and the local encryption scanning contour line of the complex curved surface are both section lines of the complex curved surface. Then, according to the obtained initial scanning measurement track, a nominal curved surface is generated through fitting, and then deviation distribution between the nominal curved surface and a design curved surface is calculated and used for controlling the density of section line distribution so as to ensure that the initial scanning measurement track can completely express the actual contour of the complex curved surface. And finally, calculating an optical axis vector n corresponding to each sampling point on the initial scanning measurement track according to the maximum allowable inclination angle of the optical displacement sensor 1, and ensuring that the normal included angle between the optical axis 4 of the optical displacement sensor 1 and the complex curved surface at each sampling point does not exceed the maximum allowable inclination angle of the optical displacement sensor 1.
Step four planning compensation
And generating a measurement motion program considering the light beam vector deviation according to each sampling point on the planned initial scanning measurement track and the optical axis vector n so as to compensate the measurement error caused by the light beam vector deviation. The method comprises the following specific steps:
firstly, establishing a measuring movement program, and deviating the light beam vector in the step two and a unit vector t (t) of the light beam directionx,ty,tz) And measuring coordinate system SCS origin OSOffset vector L (L) with respect to rotary table 3x,Ly,Lz) As input to the measuring movement program;
then, according to the motion form of the ultra-precise four-axis lathe, sampling points p on the initial scanning measurement track planned under the workpiece coordinate system WCSi(xi,yi,zi) Sampling point converted into cylindrical coordinate system
Figure BDA0002996975580000061
Figure BDA0002996975580000062
The device is used for guiding the movement of the ultra-precise four-axis lathe, and specifically comprises the following steps:
Figure BDA0002996975580000063
then, planConverts the optical axis vector n of (a) into a rotation angle of the rotary table. According to the initial coordinate relationship established in the step one, the rotary axis l of the rotary worktable 3BAnd the measuring plane XSOSZSCross point of (A) O (C)O,BO,XO,ZO) The instruction positions of the corresponding motion axes under the machine tool coordinate system MCS are as follows:
Figure BDA0002996975580000064
wherein n' is an initial optical axis vector, and the rotation angle of the initial optical axis vector corresponding to the rotary worktable is zero; l isxzFor the intersection O and the origin O of the measurement coordinate system SCSSIn the measuring plane XSOSZSA distance of, in particular
Figure BDA0002996975580000065
Gamma is a straight line OOSThe angle with the positive direction of the X axis can be based on the bias vector L (L)x,Ly,Lz) And (4) calculating. Therefore, the axial motion of the machine tool, which is corresponding to all the sampling points planned under the workpiece coordinate system WCS and takes the beam vector deviation into consideration, is obtained, and the measurement reference point is ensured to be always positioned on the measurement programming track by compensating X, Z the motion of two linear axes.
And finally, according to the minimum curvature radius of each point on different measured section lines, giving different on-machine scanning measuring speeds and command positions of each motion axis, creating a G command file measured on the machine, and storing the G command file as a txt file.
The invention has the beneficial effects that: the invention establishes an on-machine measurement motion compensation method considering the light beam direction of the optical sensor and the offset of the measurement origin, reduces the cosine measurement error of a complex curved surface, and avoids the actual measurement point offset caused by the offset of the measurement origin relative to the rotating shaft; the compensation strategy of light beam vector deviation rough adjustment and measurement track correction reduces the requirements on an optical sensor posture mechanical adjustment mechanism in an on-machine measurement device, realizes measurement motion track compensation through an on-machine measurement program, and can realize compensation on a software level; the method has strong universality, and can realize non-contact contour detection of the complex curved surface part on a multi-axis numerical control machine tool or a coordinate measuring machine; the method has important significance for improving the detection precision and efficiency of the complex curved surface.
Drawings
FIG. 1 is a basic flow diagram of the process of the present invention;
FIG. 2 is a schematic view of an initial coordinate relationship;
FIG. 3 is a schematic view of beam vector deviation;
fig. 4 is a schematic diagram of on-machine measurement motion compensation.
In the figure: 1 an optical displacement sensor; 2 on-machine measuring device; 3, rotating the working table; 4 optical axis; 5 ultra-precise four-axis lathe spindle.
Detailed Description
Specific embodiments of the present invention will be described in detail with reference to the accompanying drawings.
FIG. 1 is a basic flow diagram of the present invention. The embodiment adopts a high-gradient aspheric surface as a measured object, the expression of the curved surface is as follows,
Figure BDA0002996975580000071
a spectrum confocal displacement sensor is integrated on an ultra-precise four-axis lathe to perform on-machine measurement of the actual profile of the complex curved surface. The range of the sensor is 1mm, the resolution is 28nm, the working distance is 10mm, and the measurement error is +/-0.25 mu m. The on-machine measurement motion compensation method for the beam vector deviation of the spectral confocal displacement sensor comprises the following specific steps of:
step one, establishing an initial coordinate relationship
First, the optical displacement sensor 1 is mounted in the on-machine measuring apparatus 2 having a multi-degree-of-freedom attitude precision adjustment function. The on-machine measuring device 2 comprises an optical displacement sensor jacket 2a, an attitude adjusting mechanism 2b and a mounting base 2c which are connected in sequence. The on-machine measuring device 2 is arranged on a rotary worktable 3 of the ultra-precise four-axis lathe. The on-machine measuring device 2 is provided with an X-direction linear motion adjusting knob KXY-direction linear motion adjusting knob KYA direction angle swing adjusting knob KAAnd B direction angle swing adjusting knob KB. In the embodiment, the rotary table 3 is mounted on a Z-direction linear motion shaft of the ultra-precise four-shaft lathe, the main shaft 5 of the ultra-precise four-shaft lathe is mounted on an X-direction linear motion shaft, and the Y direction is determined by a right-hand screw rule; the direction A is the direction of the rotary motion around the X axis, and the direction B is the direction of the rotary motion around the Y axis.
Then, the knob K is adjusted by adjusting the linear motion in the X directionXThe straight line l of the optical axis 4 of the optical displacement sensor 1 is made to pass through the rotation axis l of the rotary table 3 approximatelyB. Adjusting knob K for moving X axis of machine tool and adjusting linear motion in Y directionYA direction angle swing adjusting knob KAAnd B direction angle swing adjusting knob KBThe straight line l of the optical axis 4 of the optical displacement sensor 1 is made to approximate the rotation axis l of the main shaft 5 of the ultra-precise four-axis latheCAnd (4) overlapping.
And establishing a measurement coordinate system SCS, a machine tool coordinate system MCS and a workpiece coordinate system WCS. Machine tool coordinate system MCS origin O of ultra-precise four-axis latheMDefined at the mechanical null point of each axis of motion. WCS origin O of workpiece coordinate systemWDefined on the measured curved surface and has the coordinate OW(0,0,0). Measurement coordinate system SCS origin OSA point at the beginning of the range of the measuring range of the optical displacement sensor 1, i.e. a point at which the measurement reading d is 0, is defined. The axes of the measurement coordinate system SCS, the machine coordinate system MCS and the workpiece coordinate system WCS are aligned in the forward direction.
The middle point of the measuring range of the optical displacement sensor 1, i.e. the point where the reading d is 0.5, is selected as the measuring reference point P, which is the intersection point of the measuring beam and the measured curved surface. The beam vector deviations described in this embodiment include beam direction deviations and measurement coordinate system SCS origin OSOffset vector with respect to the rotary table 3. The beam direction is expressed as a unit vector t (t)x,ty,tz) Represents; measurement coordinate system SCS origin OSThe offset vector with respect to the rotary table 3 is represented by L (L)x,Ly,Lz) And (4) showing. Axis of rotation l of rotary table 3BAnd the measuring plane XSOSZSThe intersection point of (a) is O.Under the machine coordinate system MCS, the coordinate of the intersection point O is
Figure BDA0002996975580000081
Calculating the origin O of the measurement coordinate system SCS according to the formulas (1) and (2)SCoordinates of (2)
Figure BDA0002996975580000082
And measuring the coordinates of the reference point P
Figure BDA0002996975580000083
Step two, calibrating vector deviation of light beams and roughly adjusting pose
Calibrating unit vector t (t) of light beam direction by using standard ballx,ty,tz) And measuring coordinate system SCS origin OSOffset vector L (L) with respect to rotary table 3x,Ly,Lz)。
Light beam direction unit vector t (t)x,ty,tz) Obtained by scanning the section lines of a standard sphere. Scanning measurement was performed on 3 cross-sectional lines of a standard sphere using a spectral confocal sensor. The measuring process is realized through linear motion in the X direction and rotary motion of the main shaft 5 of the ultra-precision lathe, meanwhile, a data acquisition system synchronously acquires coordinates of the lathe and readings of the sensor, a spherical equation is constructed according to measured point data, and a unit vector in the beam direction is obtained through solution. In this embodiment, 3 section lines of the standard ball are distributed on the top of the ball, the range of linear motion in the X direction is 4mm, and the rotation angles of the spindle 5 of the ultra-precision lathe are 0 °, 60 °, and 120 °, respectively. From a scaled unit vector t (t)x,ty,tz) Calculating the attitude pitch angle alpha and the attitude yaw angle beta of the optical displacement sensor 1, and adjusting the A direction angle swing adjusting knob KAAnd B direction angle swing adjusting knob KBAnd the coarse posture adjustment of the optical displacement sensor 1 is realized. Table 1 shows the unit vectors t (t) for 3 beam direction indicesx,ty,tz) The calculation result is compared with the attitude pitch angle alpha and the attitude yaw angle beta of the optical displacement sensor 1.
TABLE 13 calibration results of beam direction and attitude angle
Figure BDA0002996975580000091
Offset vector L (L)x,Ly,Lz) The method is obtained by scanning the highest points of the standard ball in the X direction and the Z direction and calculating according to the coordinate values of the machine tool. According to a calibrated bias vector L (L)x,Ly,Lz) Adjusting knob K for adjusting linear motion in X directionXRealizing measurement of origin O of coordinate system SCSSCoarse adjustment with respect to the position of the rotary table 3. Table 2 lists the 3 offset vectors L (L)x,Ly,Lz) The calibration result and the adjustment amount δ x.
Table 23 times beam direction calibration result and attitude angle
Figure BDA0002996975580000092
And executing the calibration program and the pose rough adjustment process for multiple times until the light beam vector deviation is smaller than the adjustment resolution of the mechanical adjustment mechanism. In this embodiment, the linear motion adjustment resolution of the mechanical adjustment mechanism is 5 μm, and the angle adjustment resolution is 0.5 °. Record unit vector t (t)x,ty,tz) And an offset vector L (L)x,Ly,Lz) And as an input value to the beam vector deviation compensation measurement motion program.
Step three, generating an initial scanning measurement track
Firstly, an in-situ measurement planning method for a high-gradient complex curved surface in patent CN110500969B is adopted, and simultaneously, the motion form of an ultra-precise four-axis lathe is combined, and a full-surface latticed scanning measurement path and a local encrypted scanning contour line of the complex curved surface are calculated under a workpiece coordinate system WCS and are used as an initial scanning measurement track. The whole surface latticed scanning measurement path and the local encryption scanning contour line of the complex curved surface are both section lines of the complex curved surface. And then, fitting to generate a nominal curved surface according to the obtained initial scanning measurement track, and then calculating the deviation distribution between the nominal curved surface and the designed curved surface for controlling the density of the section line distribution so as to ensure that the initial scanning measurement track can completely express the actual profile of the complex curved surface. And finally, calculating an optical axis vector n corresponding to each sampling point on the initial scanning measurement track according to the maximum allowable inclination angle of the optical displacement sensor 1, and ensuring that the normal included angle between the optical axis 4 of the optical displacement sensor 1 and the complex curved surface at each sampling point does not exceed the maximum allowable inclination angle of the optical displacement sensor 1.
Step four planning compensation
And generating a measurement motion program considering the vector deviation of the light beam according to each sampling point on the planned initial scanning measurement track and the optical axis vector n.
Firstly, establishing a measuring movement program, and setting a unit vector t (t) of the beam direction in the beam vector deviation in the step twox,ty,tz) And measuring coordinate system SCS origin OSOffset vector L (L) with respect to rotary table 3x,Ly,Lz) As input to the measuring movement program; then, according to the motion form of the ultra-precise four-axis lathe, sampling points p on the initial scanning measurement track planned under the workpiece coordinate system WCSi(xi,yi,zi) Sampling point converted into cylindrical coordinate system
Figure BDA0002996975580000103
Next, the planned optical axis vector n is converted into a rotation angle of the rotating table 3. According to the formula (7), the rotation axis l of the table 3 is calculatedBAnd the measuring plane XSOSZSCross point of (A) O (C)O,BO,XO,ZO) The command positions of the corresponding motion axes are as follows:
Figure BDA0002996975580000101
wherein n' is an initial optical axis vector, and the rotation angle of the initial optical axis vector corresponding to the rotary table 3 is zero; l isxzIs the intersection point O and the measurement coordinate systemSCS origin OSIn the measuring plane XSOSZSA distance of, in particular
Figure BDA0002996975580000102
Gamma is a straight line OOSThe angle with the positive direction of the X axis can be based on the bias vector L (L)x,Ly,Lz) And (4) calculating. Therefore, the axial motion of the machine tool, which is corresponding to all the sampling points planned under the workpiece coordinate system WCS and takes the beam vector deviation into consideration, is obtained, and the measurement reference point is ensured to be always positioned on the measurement programming track by compensating X, Z the motion of two linear axes.
And finally, according to the minimum curvature radius of each point on different measured section lines, setting different on-machine scanning measurement speeds, and establishing a curvature-sampling frequency-scanning speed sampling model for guiding the rotating speed of the main shaft 5 of the ultra-precise four-shaft lathe and the movement speed of the X/Z shaft. Rotating speed V of main shaft 5 of ultra-precise four-shaft latheCMinimum radius of curvature epsilon from section lineiAnd the sampling frequency f is as follows,
Figure BDA0002996975580000111
where δ h is a given chord height. The moving speed V of the X/Z axis and the minimum curvature radius epsilon of the section lineiAnd the relation between the sampling frequencies is as follows,
Figure BDA0002996975580000112
where l is VT and T is the movement time. And finally, creating a G instruction file measured on the machine and storing the G instruction file as a txt file.
The invention realizes the light beam vector deviation planning compensation in the spectrum confocal on-line measurement and improves the non-contact on-line measurement precision of the complex curved surface.

Claims (3)

1.一种光谱共焦在机测量的光束矢量偏差规划补偿方法，其特征在于，该方法包括以下步骤：1. a beam vector deviation planning compensation method of spectral confocal on-machine measurement, is characterized in that, this method comprises the following steps: 步骤一 建立初始坐标关系Step 1 Establish the initial coordinate relationship 首先，将光学位移传感器(1)安装在在机测量装置(2)上；在机测量装置(2)安装于超精密四轴车床回转工作台(3)上；回转工作台(3)安装于超精密四轴车床的Z方向直线运动轴上；超精密四轴车床主轴(5)安装于X方向直线运动轴上；Y方向由右手螺旋定则确定；A方向为绕X轴的回转运动方向，B方向为绕Y轴的回转运动方向；所述的在机测量装置(2)具有X方向直线运动调节旋钮KX、Y方向直线运动调节旋钮KY，A方向角度摆动调节旋钮KA和B方向角度摆动调节旋钮KB；First, the optical displacement sensor (1) is installed on the on-machine measuring device (2); the on-machine measuring device (2) is installed on the ultra-precision four-axis lathe rotary table (3); the rotary table (3) is mounted on the On the Z-direction linear motion axis of the ultra-precision four-axis lathe; the ultra-precision four-axis lathe spindle (5) is installed on the X-direction linear motion axis; the Y direction is determined by the right-hand screw rule; the A direction is the rotational motion direction around the X axis , the B direction is the rotational movement direction around the Y axis; the on-machine measuring device (2) has an X-direction linear motion adjustment knob K X , a Y-direction linear motion adjustment knob K Y , and the A-direction angle swing adjustment knob K A and B direction angle swing adjustment knob K B ; 然后，通过调整X方向直线运动调节旋钮KX，使光学位移传感器(1)的光轴(4)所在直线l通过回转工作台(3)的回转轴线lB；移动机床X轴，并调整Y方向直线运动调节旋钮KY、A方向角度摆动调节旋钮KA和B方向角度摆动调节旋钮KB，使光学位移传感器(1)的光轴(4)所在直线l与超精密四轴车床主轴(5)的回转轴线lC重合；Then, by adjusting the linear motion adjustment knob K X in the X direction, the straight line l where the optical axis (4) of the optical displacement sensor (1) is located passes through the rotation axis l B of the rotary table (3); move the X axis of the machine tool, and adjust the Y axis Direction linear movement adjustment knob K Y , A direction angle swing adjustment knob K A and B direction angle swing adjustment knob K B , so that the optical axis (4) of the optical displacement sensor (1) is located on the straight line l and the ultra-precision four-axis lathe spindle ( 5) The axis of rotation l C coincides; 建立测量坐标系SCS、机床坐标系MCS和工件坐标系WCS；其中，超精密四轴车床的机床坐标系MCS原点OM定义在各运动轴的机械零位点处；工件坐标系WCS原点OW定义在被测曲面上；测量坐标系SCS原点OS定义在光学位移传感器量程范围的起始点处，即测量读数为零的点；Establish the measurement coordinate system SCS, the machine tool coordinate system MCS and the workpiece coordinate system WCS; among them, the machine tool coordinate system MCS origin O M of the ultra-precision four-axis lathe is defined at the mechanical zero point of each motion axis; the workpiece coordinate system WCS origin O W Defined on the surface to be measured; the origin of the measurement coordinate system SCS is defined at the starting point of the optical displacement sensor range, that is, the point where the measurement reading is zero; 选择光学位移传感器量程范围内任意一点作为测量参考点P，该点为测量光束与被测曲面的交点；所述的光束矢量偏差包括光束方向偏差和测量坐标系SCS原点OS相对于回转工作台(3)的偏置矢量；光束方向以单位向量t(tx,ty,tz)表示；测量坐标系SCS原点OS相对于回转工作台(3)的偏置矢量以L(Lx,Ly,Lz)表示；Select any point within the range of the optical displacement sensor as the measurement reference point P, which is the intersection of the measurement beam and the measured surface; the beam vector deviation includes the beam direction deviation and the measurement coordinate system SCS origin O S relative to the rotary table The offset vector of (3); the beam direction is represented by the unit vector t(t x , ty , t z ); the offset vector of the measuring coordinate system SCS origin OS relative to the rotary table (3) is represented by L (L x ,L y ,L z ) represents; 回转工作台(3)的回转轴线lB与测量平面XSOSZS的交点为O；在机床坐标系MCS下，交点O的坐标为
Figure FDA0003316024780000011
测量坐标系SCS原点OS的坐标
Figure FDA0003316024780000012
为：The intersection of the rotary axis l B of the rotary table (3) and the measurement plane X S O S Z S is O; in the machine tool coordinate system MCS, the coordinates of the intersection O are
Figure FDA0003316024780000011
Measure the coordinates of the origin of the SCS coordinate system O S
Figure FDA0003316024780000012
for:
Figure FDA0003316024780000013
Figure FDA0003316024780000013
 其中，Ly＝0，测量参考点P的坐标PM(Px M,Py M,Pz M)为：Wherein, Ly =0, the coordinates P M (P x M , P y M , P z M ) of the measurement reference point P are:
Figure FDA0003316024780000021
Figure FDA0003316024780000021
 其中，d为光学位移传感器的读数，B为回转工作台的回转角度，α为光学位移传感器的姿态俯仰角度，β为光学位移传感器的姿态偏摆角度；姿态俯仰角α和姿态偏摆角β根据下式计算：Among them, d is the reading of the optical displacement sensor, B is the rotation angle of the rotary table, α is the attitude pitch angle of the optical displacement sensor, β is the attitude yaw angle of the optical displacement sensor; attitude pitch angle α and attitude yaw angle β Calculate according to the following formula:
Figure FDA0003316024780000022
Figure FDA0003316024780000022
 其中，t1(tx,0,tz)为单位向量t(tx,ty,tz)的分量在测量平面XSOSZS中的合成向量，t2(0,0,tz)为单位向量t(tx,ty,tz)在Z方向的分量；Among them, t 1 (t x , 0, t z ) is the composite vector of the components of the unit vector t (t x , t y , t z ) in the measurement plane X S O S Z S , t 2 (0,0, t z ) is the component of the unit vector t (t x , t y , t z ) in the Z direction; 步骤二 光束矢量偏差标定与位姿粗调Step 2 Beam vector deviation calibration and coarse adjustment of pose 在机扫描测量标准球，完成光束方向单位向量t(tx,ty,tz)和测量坐标系SCS原点OS相对于回转工作台的偏置矢量L(Lx,Ly,Lz)的标定：光束方向单位向量t(tx,ty,tz)通过扫描标准球的多条截面线，根据实际的测量读数与机床坐标，拟合计算获得；偏置矢量L(Lx,Ly,Lz)通过扫描测量标准球，获得标准球在X方向和Z方向的最高点，由两点的坐标差值计算获得；Scan the measuring standard sphere on the machine to complete the beam direction unit vector t(t x , ty , t z ) and the offset vector L(L x ,L y , L z of the measuring coordinate system SCS origin OS relative to the rotary table) ) calibration: the unit vector t(t x , t y , t z ) of the beam direction is obtained by scanning multiple cross-section lines of the standard sphere, and fitting and calculating according to the actual measurement reading and machine tool coordinates; the offset vector L(L x ,L y ,L z ) By scanning and measuring the standard sphere, the highest point of the standard sphere in the X direction and the Z direction is obtained, which is calculated from the coordinate difference of the two points; 根据标定的单位向量t(tx,ty,tz)，由式(3)计算光学位移传感器的姿态俯仰角α和姿态偏摆角β，调节A方向角度摆动调节旋钮KA和B方向角度摆动调节旋钮KB，实现光学位移传感器的姿态粗调；根据标定的偏置矢量L(Lx,Ly,Lz)，调节X方向直线运动调节旋钮KX，调整量为δx，实现测量坐标系SCS原点OS相对于回转工作台的位置粗调；According to the calibrated unit vector t (t x , t y , t z ), calculate the attitude pitch angle α and attitude yaw angle β of the optical displacement sensor by formula (3), adjust the angle of the A direction and swing the adjustment knob K A and B directions The angle swing adjustment knob K B , realizes the rough adjustment of the attitude of the optical displacement sensor; according to the calibrated offset vector L (L x , L y , L z ), adjust the X-direction linear motion adjustment knob K X , and the adjustment amount is δx to achieve Coarse adjustment of the position of the measuring coordinate system SCS origin O S relative to the rotary table; 多次执行标定程序与位姿粗调过程，直至光束矢量偏差小于机械调整机构的调节分辨率；记录偏置矢量L(Lx,Ly,Lz)的最终标定结果，并将其作为光束矢量偏差补偿测量运动程序的输入值，以实现在测量运动中进行精确补偿；Execute the calibration procedure and the coarse adjustment process of the pose several times until the beam vector deviation is less than the adjustment resolution of the mechanical adjustment mechanism; record the final calibration result of the offset vector L (L x ,L y ,L z ) and use it as the beam Vector deviation compensates the input value of the measuring motion program to achieve precise compensation in the measuring motion; 步骤三 生成初始扫描测量轨迹Step 3 Generate the initial scan measurement track 首先，采用高陡度复杂曲面在位测量规划方法，同时结合超精密四轴车床的运动形式，在工件坐标系WCS下计算复杂曲面的全表面网格状扫描测量路径和局部加密扫描轮廓线，作为初始扫描测量轨迹；复杂曲面的全表面网格状扫描测量路径和局部加密扫描轮廓线均为复杂曲面的截面线；First, using the in-situ measurement planning method for high-steep complex surfaces, combined with the motion form of an ultra-precision four-axis lathe, the full-surface grid scanning measurement path and local encrypted scanning contours of complex surfaces are calculated in the workpiece coordinate system WCS. As the initial scanning measurement track; the full-surface grid-like scanning measurement path and the local encrypted scanning contour line of the complex surface are the section lines of the complex surface; 然后，根据获得的初始扫描测量轨迹，拟合生成名义曲面，接着计算名义曲面与设计曲面之间的偏差分布；Then, according to the obtained initial scanning measurement trajectory, a nominal surface is generated by fitting, and then the deviation distribution between the nominal surface and the design surface is calculated; 最后，根据光学位移传感器(1)的最大允许倾角，计算初始扫描测量轨迹上各采样点对应的光轴矢量n，保证光学位移传感器(1)的光轴(4)与复杂曲面在各个采样点处的法向夹角不超过光学位移传感器(1)的最大允许倾角；Finally, according to the maximum allowable inclination angle of the optical displacement sensor (1), the optical axis vector n corresponding to each sampling point on the initial scanning measurement track is calculated to ensure that the optical axis (4) of the optical displacement sensor (1) and the complex surface are at each sampling point. The normal included angle at the position does not exceed the maximum allowable inclination angle of the optical displacement sensor (1); 步骤四 规划补偿Step 4 Planning for compensation 依据规划的初始扫描测量轨迹上各采样点及光轴矢量n，生成光束矢量偏差的测量运动程序；According to each sampling point on the planned initial scanning measurement track and the optical axis vector n, the measurement motion program of the beam vector deviation is generated; 首先，建立测量运动程序，将步骤二中的光束矢量偏差，光束方向的单位向量t(tx,ty,tz)和测量坐标系SCS原点OS相对于回转工作台的偏置矢量L(Lx,Ly,Lz)的最终标定结果，作为测量运动程序的输入；First, establish a measurement motion program, and compare the beam vector deviation in step 2, the unit vector t (t x , t y , t z ) of the beam direction and the measurement coordinate system SCS origin OS relative to the offset vector L of the rotary table (L x ,L y ,L z ) final calibration result, as the input of the measurement motion program; 然后，根据超精密四轴车床的运动形式，将工件坐标系WCS下规划的初始扫描测量轨迹上的各采样点pi(xi,yi,zi)转换为柱坐标系下的采样点pi
Figure FDA0003316024780000031
Then, according to the motion form of the ultra-precision four-axis lathe, each sampling point p i (x i , y i , z i ) on the initial scanning measurement trajectory planned under the workpiece coordinate system WCS is converted into the sampling point under the cylindrical coordinate system p i
Figure FDA0003316024780000031
Figure FDA0003316024780000032
Figure FDA0003316024780000032
 接着，将规划的光轴矢量n转换为回转工作台的回转角度；根据步骤一中建立的初始坐标关系，回转工作台的回转轴线lB与测量平面XSOSZS的交点O(CO,BO,XO,ZO)在机床坐标系MCS下对应的各运动轴的指令位置为：Next, convert the planned optical axis vector n into the rotation angle of the rotary table; according to the initial coordinate relationship established in step 1, the intersection point O(C of the rotary axis l B of the rotary table and the measurement plane X S O S Z S O , B O , X O , Z O ) in the machine tool coordinate system MCS corresponding to the command position of each motion axis is:
Figure FDA0003316024780000041
Figure FDA0003316024780000041
 其中，n’为初始光轴矢量；Lxz为交点O与测量坐标系SCS原点OS在测量平面XSOSZS中的距离，具体为
Figure FDA0003316024780000042
γ为直线OOS与X轴正向的夹角，根据偏置矢量L(Lx,Ly,Lz)计算得到；由此，获得在工件坐标系WCS下规划的所有采样点对应的虑及了光束矢量偏差的机床各轴运动，通过补偿X、Z两直线轴运动，确保了测量参考点始终位于测量编程轨迹上；Among them, n' is the initial optical axis vector; L xz is the distance between the intersection O and the origin O S of the measurement coordinate system SCS in the measurement plane X S O S Z S , specifically:
Figure FDA0003316024780000042
γ is the angle between the straight line OO S and the positive direction of the X axis, which is calculated according to the offset vector L (L x , Ly , L z ); thus, the corresponding considerations for all sampling points planned in the workpiece coordinate system WCS are obtained. The motion of each axis of the machine tool which is compatible with the beam vector deviation, by compensating the motion of the X and Z linear axes, ensures that the measurement reference point is always located on the measurement programming track; 最后，根据不同被测截面线上各点的最小曲率半径，给定不同的在机扫描测量速度与各运动轴的指令位置，创建在机测量的G指令文件，并保存为.txt文件。Finally, according to the minimum curvature radius of each point on the different measured section lines, given different on-machine scanning measurement speeds and command positions of each motion axis, create a G command file for on-machine measurement and save it as a .txt file. 2.根据权利要求1所述的一种光谱共焦在机测量的光束矢量偏差规划补偿方法，其特征在于，所述步骤二中，光束方向单位向量t(tx,ty,tz)的标定过程为：2. a kind of spectral confocal on-machine measurement beam vector deviation planning compensation method according to claim 1, is characterized in that, in described step 2, beam direction unit vector t (t x , ty , t z ) The calibration process is: 利用X方向的直线运动与超精密车床主轴(5)的回转运动完成标准球多条截面线的在机扫描测量，由此建立标定程序；测量过程中同步读取光学位移传感器的读数与机床坐标，并保存在同一标定数据文件中；建立光束方向单位向量求解程序，采用非线性最小二乘拟合方法，根据球面方程建立目标函数：Using the linear motion in the X direction and the rotary motion of the ultra-precision lathe spindle (5) to complete the on-machine scanning measurement of multiple cross-section lines of the standard ball, the calibration program is established; the readings of the optical displacement sensor and the machine tool coordinates are simultaneously read during the measurement process. , and save it in the same calibration data file; establish a program for solving the unit vector of the beam direction, adopt the nonlinear least square fitting method, and establish the objective function according to the spherical equation:
Figure FDA0003316024780000043
Figure FDA0003316024780000043
 其中Xi、Zi、Ci分别为测量读数为di时对应的机床X轴、Z轴和超精密车床主轴的坐标；osphere_x、osphere_y、osphere_z为标准球球心在机床坐标系中的坐标，Rsphere为标准球半径；Wherein X i , Z i , C i are the coordinates of the X-axis, Z-axis and the spindle of the ultra-precision lathe corresponding to the measurement reading of d i respectively; o sphere_x , o sphere_y , o sphere_z are the standard ball center in the machine tool coordinate system The coordinates in , R sphere is the standard sphere radius; 然后将标定数据文件作为光束方向单位向量求解程序的输入，并给定初值，计算获得光束方向单位向量t(tx,ty,tz)。Then, the calibration data file is used as the input of the beam direction unit vector solver, and the initial value is given, and the beam direction unit vector t(t x , t y , t z ) is obtained by calculation. 3.根据权利要求1或2所述的一种光谱共焦在机测量的光束矢量偏差规划补偿方法，其特征在于，所述步骤二中，偏置矢量L(Lx,Ly,Lz)的标定过程为：3. The beam vector deviation planning compensation method for spectral confocal on-machine measurement according to claim 1 or 2, wherein in the step 2, the bias vector L( Lx , Ly , Lz ), the calibration process is: 分别沿X方向和Z方向扫描标准球，光学位移传感器的读数最小时的测点即为标准球的最高点，保存光学位移传感器的读数与机床坐标，利用式(7)求解偏置矢量L(Lx,Ly,Lz)：Scan the standard sphere along the X and Z directions respectively, the measuring point when the reading of the optical displacement sensor is the smallest is the highest point of the standard sphere, save the reading of the optical displacement sensor and the coordinates of the machine tool, and use the formula (7) to solve the offset vector L ( L x ,L y ,L z ):
Figure FDA0003316024780000051
Figure FDA0003316024780000051
 其中，dmin_x、dmin_z分别为沿X方向和Z方向扫描测量标准球时光学位移传感器的最小读数；X1、Z1为沿X方向扫描测量标准球时，光学位移传感器读数最小时对应的机床坐标；X2、Z2为沿Z方向扫描测量标准球时，光学位移传感器读数最小时对应的机床坐标。Among them, d min_x and d min_z are the minimum readings of the optical displacement sensor when the standard sphere is scanned along the X and Z directions, respectively; X 1 and Z 1 are the minimum readings of the optical displacement sensor when the standard sphere is scanned along the X direction. Machine tool coordinates; X 2 and Z 2 are the machine coordinates corresponding to the minimum reading of the optical displacement sensor when the standard sphere is scanned and measured along the Z direction.
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On-machine noncontact scanning of high-gradient freeform surface using;Yongqing Wang等;《Optics and Laser Technology》;20210228;全文 *
面向精密制造的测量加工一体化系统设计与实现;刘学术;《组合机床与自动化加工技术》;20210715;全文 *

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