CN113310947A - Air refractive index detection device and method based on laser self-mixing interference - Google Patents
Air refractive index detection device and method based on laser self-mixing interference Download PDFInfo
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Abstract
基于激光自混合干涉的空气折射率检测装置及方法，包括电性连接的调制模块和半导体激光器；所述半导体激光器内置有光电二极管、激光二极管；所述调制模块的一个输出端连接至激光二极管的输入端，所述调制模块的另一个输出端连接至锁相放大器的输入端，所述激光二极管的输出端通过光信号连接至光电二极管的输入端，所述光电二极管的输出端连接至锁相放大器的输入端，所述锁相放大器的输出端连接频率计，所述半导体激光器的一侧安装有气体池，所述气体池的一侧安装有反射器件；本发明利用激光器内置光电二极管检测激光自混合干涉信号，半导体激光器既是光源又是探测器，具有无需外置探测器，降低测量成本等优点。
An air refractive index detection device and method based on laser self-mixing interference includes a modulation module and a semiconductor laser that are electrically connected; the semiconductor laser has a built-in photodiode and a laser diode; one output end of the modulation module is connected to the laser diode input end, the other output end of the modulation module is connected to the input end of the lock-in amplifier, the output end of the laser diode is connected to the input end of the photodiode through the optical signal, and the output end of the photodiode is connected to the lock-in end The input end of the amplifier, the output end of the lock-in amplifier is connected to a frequency meter, a gas cell is installed on one side of the semiconductor laser, and a reflection device is installed on one side of the gas cell; the present invention utilizes the built-in photodiode of the laser to detect laser light The self-mixing interference signal, the semiconductor laser is both a light source and a detector, which has the advantages of eliminating the need for an external detector and reducing the measurement cost.
Description
Technical Field
The invention belongs to the technical field of laser precision measurement, and particularly relates to an air refractive index detection device and method based on laser self-mixing interference.
Background
With the development of productivity, the detection of the processing precision of components in the manufacturing and processing field is increasingly important. In a high-precision detection environment, fluctuation and uneven distribution of the air refractive index are one of important factors for restricting the measurement precision. Laser interference is a common measurement method for the refractive index of air, and the basic structure of the measurement system comprises two optical channels for measurement and reference. Adding a gas cell into the measuring channel, changing the effective refractive index in the gas cell through vacuum treatment when light waves meet to form interference fringes, so as to cause optical path change to change the interference fringes, analyzing the change of the interference fringes to obtain the optical path change amount caused by the air refractive index, and further obtaining the air refractive index by combining the relation between the laser wavelength, the air refractive index and the optical path;
for example, CN201310004167 discloses a method and an apparatus for measuring air refractive index by laser interference, wherein during measurement, a reference channel is manufactured by reflection of a reference pyramid prism, and a reference signal is generated by driving the reference pyramid prism to move by a linear displacement workbench, so that the measurement channel and the reference channel are separated, the structure of a dual-channel measurement system is complex and bulky, the number of optical elements is too large, which easily causes energy loss, light intensity drift, and the extraction and processing of signals are relatively difficult.
Disclosure of Invention
Aiming at the defects in the prior art, the invention provides a method and a device for detecting the air refractive index based on laser self-mixing interference, and the specific technical scheme is as follows:
the air refractive index detection device based on laser self-mixing interference comprises a modulation module and a semiconductor laser which are electrically connected; a photodiode and a laser diode are arranged in the semiconductor laser; one output end of the modulation module is connected to the input end of the laser diode, and the modulation module is used for generating a triangular wave modulation signal to modulate the injection current of the laser diode; the other output end of the modulation module is connected to the input end of the phase-locked amplifier, and the modulation module is used for outputting the triangular wave to the phase-locked amplifier as a reference signal; the output end of the laser diode is connected to the input end of a photodiode through an optical signal, and the photodiode is used for detecting the output power of the laser diode;
the output end of the photodiode is connected to the input end of a phase-locked amplifier, and the phase-locked amplifier is used for demodulating a laser self-mixing interference signal; the output end of the phase-locked amplifier is connected with a frequency meter, and the frequency meter is used for displaying the frequency value of the laser self-mixing interference signal; the laser device comprises a semiconductor laser, a laser diode, a gas cell, a reflecting device and a reflecting device, wherein the gas cell is installed on one side of the semiconductor laser, the transmitting and receiving ends of the laser diode are aligned to the gas cell, and the reflecting device is installed on one side of the gas cell.
Furthermore, the reflection device is a piezoelectric ceramic crystal, and an input end of the piezoelectric ceramic crystal is connected with an input end of the control module.
Further, the output end of the air pump is connected with the input end of the air pool.
Further, the axis of the gas cell is coaxial with the laser emitted and received by the laser diode.
The air refractive index detection method based on laser self-mixing interference comprises the following steps:
s1, the modulation module generates a continuous triangular wave modulation signal, and the continuous triangular wave modulation signal is output to the laser diode and the phase-locked amplifier;
s2, modulating the injection current of the laser diode by the continuous triangular wave modulation signal from the modulation module, and then emitting modulated laser by the laser diode;
s3, allowing the modulated laser to pass through a gas cell and then irradiate the surface of the piezoelectric ceramic crystal;
s4, enabling the laser reflected by the piezoelectric ceramic crystal to pass through the gas pool again and then return to the laser diode to generate laser self-mixing interference;
s5, detecting an optical signal output by the laser diode by the photodiode, and acquiring a laser self-mixing interference signal; the photodiode converts the laser self-mixing interference signal into an electric signal;
s6, the photodiode transmits the laser self-mixing interference electric signal to a phase-locked amplifier, and the phase-locked amplifier demodulates the amplified laser self-mixing interference signal according to the continuous triangular wave signal;
s7, detecting the signal frequency of the amplified laser self-mixing interference signal by a frequency meter;
s8, recording the signal frequency f of the frequency meter at the moment;
s9, performing vacuum treatment on the gas cell by using an air pump, repeating S1-S7, and recording the signal frequency f' of the frequency meter at the moment;
and S10, calculating the air refractive index n according to f and f'.
Further, the relation between the air refractive index n and the signal frequencies f and f' before and after vacuum processing is as follows:
wherein l is the length of the gas cell, c is the speed of light, gamma is the modulation coefficient of the laser diode, and omega is the slope of the triangular wave of the modulation signal.
The invention has the beneficial effects that:
1. the invention adopts laser self-mixing interference to carry out high-precision measurement on the air refractive index, and the measurement channel and the reference channel are overlapped, so that the high-precision measurement on the air refractive index can be realized only by a single-channel system, and the structure is simple.
2. The invention adopts the semiconductor laser as the light source, utilizes the built-in photodiode of the laser to detect the laser self-mixing interference signal, the semiconductor laser is both the light source and the detector, and has the advantages of no need of an external detector, reduction of the measurement cost and the like.
3. The laser adopted by the invention is a single longitudinal mode semiconductor laser, internal modulation can be carried out by changing the mode of injected current, an external modulation element is not needed, and the measurement cost is favorably reduced.
Drawings
Fig. 1 shows a schematic diagram of the air refractive index detection principle based on laser self-mixing interference of the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Examples
As shown in fig. 1, the air refractive index detection method and apparatus based on laser self-mixing interference includes a modulation module and a semiconductor laser electrically connected; a photodiode and a laser diode are arranged in the semiconductor laser; one output end of the modulation module is connected to the input end of the laser diode, and the modulation module is used for modulating the injection current of the laser diode; the other output end of the modulation module is connected to the input end of the phase-locked amplifier, and the modulation module is used for outputting the triangular wave reference signal to the phase-locked amplifier; the output end of the laser diode is connected to the input end of a photodiode through an optical signal, and the photodiode is used for detecting the output power of the laser diode;
through the design, the photodiode and the laser diode can be integrated in the semiconductor laser, the laser diode is a laser emission source, the photodiode is a detector, the semiconductor laser is a light source and a detector, and the semiconductor laser has the advantages of no need of an external detector, reduction of measurement cost and the like; meanwhile, the receiving channel is also a detection channel, the laser transmission can realize high-precision measurement of the air refractive index only by a single-channel system, and the structure is simple;
the output end of the photodiode is connected to the input end of a phase-locked amplifier, and the phase-locked amplifier is used for demodulating a laser self-mixing interference signal; the output end of the phase-locked amplifier is connected with a frequency meter, and the frequency meter is used for displaying the frequency value of the laser self-mixing interference signal; a gas cell is arranged on one side of the semiconductor laser, the receiving and transmitting ends of the laser diode are aligned to the gas cell, and a reflecting device is arranged on one side of the gas cell; the frequency meter can directly display the frequency value of the self-mixing interference signal, so that an operator can record the frequency value visually;
as an improvement of the above technical solution, the reflection device is a piezoelectric ceramic crystal, and an input end of the piezoelectric ceramic crystal is connected with an input end of the control module; the piezoelectric ceramic crystal is installed on the pneumatic slide rail, and control module can control the displacement of piezoelectric ceramic crystal on the pneumatic slide rail, and then finely tunes the distance between piezoelectric ceramic crystal and the gas cell, satisfies different experiment needs.
As an improvement of the above technical scheme, the output end of the air pump is connected with the input end of the air pool; the gas pump is designed to change the gas pressure (including vacuum treatment) within the gas cell, thereby changing the refractive index of the air.
As an improvement of the technical scheme, the axis of the gas cell is coaxial with the laser emitted and received by the laser diode; the coaxial is used for ensuring the signal transmission precision.
An air refractive index detection method based on laser self-mixing interference,
the method is based on the following principle: the laser intensity changes periodically, the period of the laser intensity is related to the modulation signal, the optical path difference and the internal parameters of the laser, the change of the refractive index of the air in the gas pool causes the change of the optical path, and further causes the change of the reading of the frequency of the laser self-mixing interference signal on the frequency meter, so the refractive index of the air can be obtained through the change of the reading f and f' of the frequency meter before and after vacuum treatment.
The detection method comprises the following steps:
s1, the modulation module generates a continuous triangular wave modulation signal, and the continuous triangular wave modulation signal is output to the laser diode and the phase-locked amplifier; an exemplary modulation module employs a signal generator, where the modulation module is configured to generate a continuous triangular wave, a frequency of the continuous triangular wave is fixed, and a slope of the triangular wave is Ω; all parameters of the continuous triangular wave are transmitted into the phase-locked amplifier, and the parameters are used as reference values so that the phase-locked amplifier extracts and amplifies the required signal frequency;
the invention can be realized by a signal generator, the action of a modulation module can be completed by connecting an electric signal with a laser emitter, so that a reference channel of a light path does not need to be arranged, only one semiconductor laser is needed, only one light channel is needed, other numerical values are completed by bidirectional output of the modulation module, and thus, the measurement channel and the reference channel can be overlapped and the structure is simple;
s2, modulating the injection current of the laser diode by the continuous triangular wave modulation signal from the modulation module, and then emitting modulated laser by the laser diode; because the slope of the continuous triangular break is fixed, the injection current of the step also changes according to a fixed frequency, and the output power of the laser changes according to the fixed frequency; that is, the laser intensity varies at a fixed frequency;
s3, allowing the modulated laser to pass through a gas cell and then irradiate the surface of the piezoelectric ceramic crystal; when the laser passes through the gas cell, the laser can be refracted, and the intensity of the laser can be changed;
s4, enabling the laser reflected by the piezoelectric ceramic crystal to pass through the gas pool again and then return to the laser diode to generate laser self-mixing interference; the returned laser can generate laser self-mixing interference; the laser self-mixing interference means that output light of the laser is reflected or scattered by an external object part and then fed back to the resonant cavity of the laser again, the feedback light carrying external object information interferes with light in the cavity, and the output characteristic of the laser is modulated, so that the measurement of the external object information can be realized;
s5, the photodiode detects the optical signal output by the laser diode and converts the optical signal into an electric signal; the optical signal passes through the resonant cavity and reaches the photodiode, the photodiode detects the optical signal output by the laser diode and outputs the optical signal to the phase-locked amplifier through the electrical signal; in the detection process within a period of time, because the intensity of the laser changes according to the fixed frequency, the electric signal generated by the photodiode can be output according to the fixed frequency;
s6, the photodiode transmits the electric signal output by the laser diode to a phase-locked amplifier, and the phase-locked amplifier demodulates the amplified laser self-mixing interference signal according to the continuous triangular wave signal; the lock-in amplifier is an amplifier which can separate a signal with a specific carrier frequency from an environment with great interference; the laser self-mixing interference signal can be extracted and amplified for subsequent detection by a frequency meter;
s7, detecting the signal frequency of the amplified laser self-mixing interference signal by a frequency meter;
s8, recording the signal frequency f of the frequency meter at the moment;
s9, performing vacuum treatment on the gas cell by using an air pump, repeating S1-S7, and recording the signal frequency f' of the frequency meter at the moment; in S9, the internal environment of the gas cell changes, the modulation signal and the internal parameters of the laser do not change when compared with f detection, and the laser intensity frequency changes to obtain the frequency f';
and S10, calculating the air refractive index n according to f and f'.
The relationship between the air refractive index n and the signal frequencies f and f' before and after vacuum processing is as follows:
wherein l is the length of the gas cell, c is the speed of light, gamma is the modulation coefficient of the laser diode, and omega is the slope of the triangular wave of the modulation signal.
It is noted that, in this document, relational terms such as first and second, and the like, if any, are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of other identical elements in a process, method, article, or apparatus that comprises the element.
The above examples are only intended to illustrate the technical solution of the present invention, but not to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; and such modifications or substitutions do not depart from the spirit and scope of the corresponding technical solutions of the embodiments of the present invention.
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