CN113363178B - A gas-liquid extraction and separation device - Google Patents
A gas-liquid extraction and separation deviceInfo
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- CN113363178B CN113363178B CN202011450195.1A CN202011450195A CN113363178B CN 113363178 B CN113363178 B CN 113363178B CN 202011450195 A CN202011450195 A CN 202011450195A CN 113363178 B CN113363178 B CN 113363178B
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- extraction
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2041—Exposure; Apparatus therefor in the presence of a fluid, e.g. immersion; using fluid cooling means
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
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- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Degasification And Air Bubble Elimination (AREA)
Abstract
The invention provides a gas-liquid extraction and separation device and a photoetching machine, relates to the field of semiconductor processing equipment, and is designed for solving the problem that the existing gas-liquid extraction and separation device cannot meet the gas-liquid extraction and separation requirements of the photoetching machine under different working conditions. The gas-liquid extraction and separation device is used for a photoetching machine and comprises a control module and a plurality of groups of gas-liquid extraction and separation modules, wherein the groups of gas-liquid extraction and separation modules are respectively configured to extract and separate different gas-liquid mixtures, the gas-liquid extraction and separation modules comprise a vacuum adsorption head, an on-off valve and a gas-liquid separation box which are sequentially connected through pipelines, the vacuum adsorption head is configured to extract the gas-liquid mixtures, the control module is configured to control the gas-liquid extraction and separation modules to work, and the gas-liquid separation box is configured to perform gas-liquid separation on the gas-liquid mixtures. The photoetching machine comprises the gas-liquid extraction and separation device. The gas-liquid extraction and separation device and the photoetching machine provided by the invention meet the gas-liquid separation requirements under different working conditions.
Description
Technical Field
The invention relates to the field of semiconductor processing equipment, in particular to a gas-liquid extraction and separation device and a photoetching machine.
Background
The development of the semiconductor industry has increasingly required the precision of the photolithography machine. In the new generation of immersion lithography machines, a gas-liquid extraction and separation device is usually provided for extracting and separating the immersion liquid and bubbles remaining in the work table.
However, in different working periods and different working procedures of the photoetching machine, different gas-liquid mixtures need to be extracted and separated respectively, and extraction and separation of the different gas-liquid mixtures also need to be switched at any time and stopped at any time according to the working process of the photoetching machine, so that the existing gas-liquid extraction and separation device cannot meet the gas-liquid extraction and separation requirements of the new generation of immersed photoetching machines.
Disclosure of Invention
The first object of the present invention is to provide a gas-liquid extraction and separation device, so as to solve the technical problem that the existing gas-liquid extraction and separation device cannot meet the gas-liquid extraction and separation requirements under different working conditions of a lithography machine.
The gas-liquid extraction and separation device is used for a photoetching machine and comprises a control module and a plurality of groups of gas-liquid extraction and separation modules, wherein the groups of gas-liquid extraction and separation modules are respectively configured to extract and separate different gas-liquid mixtures, the gas-liquid extraction and separation modules comprise a vacuum adsorption head, an on-off valve and a gas-liquid separation box which are sequentially connected through pipelines, the vacuum adsorption head is configured to extract the gas-liquid mixtures, the control module is configured to control the gas-liquid extraction and separation modules of each group to work, and the gas-liquid separation box is configured to perform gas-liquid separation on the gas-liquid mixtures.
Further, the gas-liquid extraction separation module also includes a throttle valve configured to control flow through the conduit.
Further, the gas-liquid extraction separation module further includes a pressure sensor configured to detect line pressure.
Further, the gas-liquid extraction and separation module further comprises a pilot valve, the pilot valve is connected with the control module, and in each group of gas-liquid extraction and separation modules, the pilot valve is configured to control the corresponding on-off valve.
Further, each group of the gas-liquid extraction and separation modules shares the gas-liquid separation tank.
Further, the gas-liquid separation box comprises a box body with a containing cavity and a partition board arranged in the containing cavity, the containing cavity is divided into a first cavity and a second cavity which are communicated with each other by the partition board, pipeline outlets of the gas-liquid extraction separation modules of each group are directly communicated with the first cavity, the partition board is positioned on a flow path of a gas-liquid mixture flowing out from the pipeline outlets, and the second cavity is communicated with an air outlet and a liquid outlet, and the air outlet is positioned above the liquid outlet.
Further, the liquid outlet is communicated with a recovery pipeline, the recovery pipeline is provided with an on-off valve, the on-off valve is electrically connected with the control module, the gas-liquid extraction separation device further comprises a liquid level switch, the liquid level switch is configured to detect the liquid level in the box body, and the liquid level switch is electrically connected with the control module.
Further, the number of the air outlets is multiple, and the air outlets have different air outlet flow rates.
Further, the gas-liquid extraction and separation device further comprises a shell, and the control module and the plurality of groups of gas-liquid extraction and separation modules are arranged in the shell.
Further, the gas-liquid extraction and separation modules are provided with two groups, namely a first gas-liquid extraction and separation module and a second gas-liquid extraction and separation module, wherein the first gas-liquid extraction and separation module is configured to extract and separate residual immersion liquid and bubbles of a sucker of the photoetching machine, and the second gas-liquid extraction and separation module is configured to extract and separate residual immersion liquid and bubbles of a bridge table of the photoetching machine.
The gas-liquid extraction and separation device has the beneficial effects that:
the gas-liquid extraction and separation apparatus is described by taking as an example that the gas-liquid extraction and separation apparatus includes two sets of gas-liquid extraction and separation modules (a first gas-liquid extraction and separation module and a second gas-liquid extraction and separation module). In the use process of the photoetching machine, the first gas-liquid extraction and separation module can be used for extracting residual immersion liquid and bubbles of a sucker of the photoetching machine, the second gas-liquid extraction and separation module is used for extracting residual immersion liquid and bubbles of a bridging table of the photoetching machine, and the control module is used for respectively controlling the first gas-liquid extraction and separation module and the second gas-liquid extraction and separation module.
The control module can control different on-off valves according to different working periods and different working procedures of the photoetching machine, so that corresponding pipelines are in an on-off state, for example, when residual immersion liquid and bubbles of a sucker are extracted and separated, the on-off valve of the first gas-liquid extraction and separation module is in an on-state, so that the corresponding vacuum adsorption head adsorbs the residual immersion liquid and the bubbles at the sucker into the pipeline and enters the gas-liquid separation box to perform gas-liquid separation, and similarly, when the residual immersion liquid and the bubbles of the bridging platform are extracted and separated, the on-off valve of the second gas-liquid extraction and separation module is in an on-state, so that the corresponding vacuum adsorption head adsorbs the residual immersion liquid and the bubbles at the bridging platform into the pipeline and enters the gas-liquid separation box to perform gas-liquid separation. When the extraction and separation of the gas-liquid mixture are not needed, the corresponding on-off valve is in a cut-off state.
This gas-liquid extraction separator is through setting up control module and multiunit gas-liquid extraction separation module for can utilize the electricity to control different gas-liquid extraction separation pipeline respectively, thereby realize the real-time extraction and the separation to different gas-liquid mixture, the extraction separation is abundant, has satisfied the gas-liquid separation demand under the different operating modes of photoetching machine, and the gas-liquid separation process can be switched at any time, stop at any time according to the working process of photoetching machine.
The second object of the present invention is to provide a lithography machine, so as to solve the technical problem that the existing gas-liquid extraction and separation device cannot meet the gas-liquid extraction and separation requirements of the lithography machine under different working conditions.
The photoetching machine comprises a workpiece table and the gas-liquid extraction and separation device, wherein the gas-liquid extraction and separation device is arranged on the workpiece table through a shell.
The photoetching machine has the beneficial effects that:
By arranging the gas-liquid extraction and separation device in the photoetching machine, the photoetching machine has all the advantages of the gas-liquid extraction and separation device correspondingly, and the description is omitted herein.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings that are required to be used in the embodiments or the description of the prior art will be briefly described below, and it is obvious that the drawings in the following description are only embodiments of the present invention, and that other drawings can be obtained according to the provided drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic diagram of a gas-liquid extraction and separation device according to an embodiment of the present invention;
FIG. 2 is a top view of a gas-liquid extraction separator according to an embodiment of the present invention;
FIG. 3 is a front view of a structure of a gas-liquid extraction and separation device according to an embodiment of the present invention;
Fig. 4 is a schematic structural diagram of a gas-liquid separation tank of a gas-liquid extraction separation device according to an embodiment of the present invention;
fig. 5 is a schematic diagram of a gas-liquid separation tank of a gas-liquid extraction separation device according to a second embodiment of the present invention.
Reference numerals illustrate:
100-control module, 400-gas-liquid separation box, 500-first pilot valve, 600-shell and 700-second pilot valve;
210-a first vacuum adsorption head, 220-a first on-off valve, 230-a first throttle valve, 240-a first pressure sensor;
310-a second vacuum adsorption head, 320-a second break valve, 330-a second throttle valve, 340-a second pressure sensor;
410-box, 420-partition, 430-first chamber, 440-second chamber;
431-first inlet, 432-second inlet, 433-mounting port;
441-a first air outlet, 442-a second air outlet and 443-a liquid outlet;
610-pilot gas port.
Detailed Description
In order that the above objects, features and advantages of the invention will be readily understood, a more particular description of the invention will be rendered by reference to specific embodiments thereof which are illustrated in the appended drawings. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the invention.
Fig. 1 is a schematic structural view of a gas-liquid extraction separation device according to the present embodiment, fig. 2 is a top structural view of the gas-liquid extraction separation device according to the present embodiment, and fig. 3 is a front structural view of the gas-liquid extraction separation device according to the present embodiment. As shown in fig. 1 to 3, the present embodiment provides a gas-liquid extraction and separation device for a lithography machine, specifically, the gas-liquid extraction and separation device includes a control module 100 and two sets of gas-liquid extraction and separation modules, where the two sets of gas-liquid extraction and separation modules are a first gas-liquid extraction and separation module and a second gas-liquid extraction and separation module, the first gas-liquid extraction and separation module includes a first vacuum adsorption head 210, a first on-off valve 220, and a gas-liquid separation tank 400 that are sequentially connected through a pipeline, and the second gas-liquid extraction and separation module includes a second vacuum adsorption head 310, a second on-off valve 320, and a gas-liquid separation tank 400 that are sequentially connected through a pipeline. That is, the first gas-liquid extraction separation module and the second gas-liquid extraction separation module share the gas-liquid separation tank 400.
Wherein the first vacuum adsorption head 210 is configured to extract residual immersion liquid and bubbles of a chuck of the lithography machine, the second vacuum adsorption head 310 is configured to extract residual immersion liquid and bubbles of a bridge stage of the lithography machine, the control module 100 is configured to control the first gas-liquid extraction separation module and the second gas-liquid extraction separation module to operate, and the gas-liquid separation tank 400 is configured to perform gas-liquid separation on a gas-liquid mixture.
When the residual immersion liquid and the air bubbles of the sucking disc are extracted and separated, the first on-off valve 220 is in a conducting state, so that the first vacuum adsorption head 210 adsorbs the residual immersion liquid and the air bubbles at the sucking disc into the pipeline and enters the gas-liquid separation box 400 for gas-liquid separation, and similarly, when the residual immersion liquid and the air bubbles of the bridging table are extracted and separated, the second on-off valve 320 is in a conducting state, so that the second vacuum adsorption head 310 adsorbs the residual immersion liquid and the air bubbles at the bridging table into the pipeline and enters the gas-liquid separation box 400 for gas-liquid separation. When the suction cup or the bridge stage is not required to be separated from the gas-liquid mixture, the first on-off valve 220 or the second on-off valve 320 is in the off state.
This gas-liquid extraction separator is through setting up control module 100 and two sets of gas-liquid extraction separation module for can utilize the electricity to control different gas-liquid extraction separation pipeline respectively, thereby realize the real-time extraction and the separation to different gas-liquid mixture, the extraction separation is abundant, has satisfied the gas-liquid separation demand under the different operating modes of photoetching machine, and the gas-liquid separation process can be switched at any time, stop at any time according to the working process of photoetching machine.
In addition, the two groups of gas-liquid extraction and separation modules share the same arrangement form of the gas-liquid separation box 400, so that the space occupation of the gas-liquid extraction and separation device is reduced, and the structure of the gas-liquid extraction and separation device in the embodiment is more compact.
It should be noted that, in this embodiment, the gas-liquid extraction separation device includes two sets of gas-liquid extraction separation modules, and the two sets of gas-liquid extraction separation modules are used for respectively extracting and separating the residual immersion liquid and the air bubbles at the suction cup and the bridge stage, which is to be understood that the number of the gas-liquid extraction separation devices can be set according to the actual working condition of the lithography machine, and the embodiment is merely to illustrate that the gas-liquid extraction separation device includes the first gas-liquid extraction separation module and the second gas-liquid extraction separation module, which cannot be regarded as limiting the invention.
Specifically, in this embodiment, the control module 100 includes an electrical control box and a circuit board disposed in the electrical control box, where "electrically connected to the control module 100" refers to "electrically connected to the circuit board of the control module 100".
With continued reference to fig. 1 and 2, in the present embodiment, the first gas-liquid extraction separation module may further include a first throttle valve 230, the first throttle valve 230 is configured to control the flow rate flowing through the first gas-liquid extraction separation pipeline, and the second gas-liquid extraction separation module may further include a second throttle valve 330, the second throttle valve 330 is configured to control the flow rate flowing through the second gas-liquid extraction separation pipeline.
By arranging the first throttle valve 230 in the first gas-liquid extraction separation module and the second throttle valve 330 in the second gas-liquid extraction separation module, the control of fluid flow in the first gas-liquid extraction separation pipeline and the second gas-liquid extraction separation pipeline is realized, so that the gas-liquid extraction separation device of the embodiment can control the extraction speed of the gas-liquid mixture at each position according to actual working conditions, on one hand, the gas-liquid mixture at the corresponding position can be timely extracted, the aggregation of the gas-liquid mixture at the sucking disc and the bridging table is reduced, on the other hand, the situation that the pipeline pressure is overlarge due to overlarge fluid flow can be avoided, the safety in the working process of the gas-liquid extraction separation device of the embodiment is ensured, and meanwhile, the service life of the pipeline is prolonged.
Specifically, in this embodiment, the first throttle valve 230 and the second throttle valve 330 are manual throttle valves, that is, in the actual use process, the user can manually adjust the opening degrees of the first throttle valve 230 and the second throttle valve 330 to realize the control of the fluid flow in the first gas-liquid extraction separation pipeline and the second gas-liquid extraction separation pipeline.
In other embodiments, the first throttle valve 230 and the second throttle valve 330 may be electrically connected to the control module 100, and the opening degrees of the first throttle valve 230 and the second throttle valve 330 may be adjusted by the control module 100. By the arrangement, the automation degree of the gas-liquid extraction and separation device can be improved.
With continued reference to fig. 1 and 2, in the present embodiment, the first gas-liquid extraction separation module may further include a first pressure sensor 240, specifically, the first pressure sensor 240 is configured to detect a pressure of the first gas-liquid extraction separation line, and similarly, the second gas-liquid extraction separation module may further include a second pressure sensor 340, specifically, the second pressure sensor 340 is configured to detect a pressure of the second gas-liquid extraction separation line.
In the working process of the gas-liquid extraction separation device, the first pressure sensor 240 can detect the pressure of the first gas-liquid extraction separation pipeline in real time, the second pressure sensor 340 can detect the pressure of the second gas-liquid extraction separation pipeline in real time, a user can adjust the opening of the first throttle valve 230 according to the pressure displayed by the first pressure sensor 240, and the opening of the second throttle valve 330 according to the pressure displayed by the second pressure sensor 340.
In other embodiments, the first pressure sensor 240 and the second pressure sensor 340 may be electrically connected to the control module 100, so that during the operation of the gas-liquid extraction separation device, the first pressure sensor 240 and the second pressure sensor 340 can output the detected pressure signals to the control module 100 in real time, and the control module 100 is utilized to perform feedback adjustment on the opening degrees of the first throttle valve 230 and the second throttle valve 330.
By arranging the first pressure sensor 240 in the first gas-liquid extraction separation module and the second pressure sensor 340 in the second gas-liquid extraction separation module, real-time monitoring of the fluid pressure in the first gas-liquid extraction separation pipeline and the second gas-liquid extraction separation pipeline is realized, and the opening degrees of the first throttle valve 230 and the second throttle valve 330 can be fed back and regulated according to the detected pressure, so that pipeline rupture caused by overhigh pipeline fluid pressure is avoided, and safety and service life guarantee are provided for the gas-liquid extraction separation device of the embodiment.
Referring to fig. 1 to 3, in the present embodiment, the gas-liquid extraction separation device may further include a housing 600, and specifically, the control module 100, the first gas-liquid extraction separation module, and the second gas-liquid extraction separation module are all disposed inside the housing 600. By the arrangement, the modularization and integration of the gas-liquid extraction and separation device are realized, and the device is convenient to install in a photoetching machine.
With continued reference to fig. 1 and fig. 2, in this embodiment, the first gas-liquid extraction separation module may further include a first pilot valve 500, specifically, the first pilot valve 500 is connected to the control module 100, the first pilot valve 500 is configured to control the first on-off valve 220 to automatically control the on-off of the pipeline of the first gas-liquid extraction separation module, the second pilot valve 700 is connected to the control module 100, and the second pilot valve 700 is configured to control the second on-off valve 320 to automatically control the on-off of the pipeline of the second gas-liquid extraction separation module. The pilot ports 610 of the first pilot valve 500 and the second pilot valve 700 are provided in the housing 600, the first pilot valve 500 pneumatically controls the first on-off valve 220, and the second pilot valve 700 pneumatically controls the second on-off valve 320.
The first pilot valve 500 and the second pilot valve 700 are arranged, so that the control module 100 can conveniently control the first on-off valve 220 and the second on-off valve 320, and the control efficiency is high.
Fig. 4 is a schematic diagram of a gas-liquid separation tank 400 of a gas-liquid extraction separation device according to the first embodiment, and fig. 5 is a schematic diagram of a gas-liquid separation tank 400 of a gas-liquid extraction separation device according to the second embodiment. With continued reference to fig. 1 to 3, and with reference to fig. 4 and 5, in this embodiment, the gas-liquid separation tank 400 may include a tank body 410 having a receiving cavity and a partition 420 disposed in the receiving cavity, where the partition 420 divides the receiving cavity into a first chamber 430 and a second chamber 440 that are in communication, specifically, a pipeline outlet of both the first gas-liquid extraction separation module and the second gas-liquid extraction separation module is directly in communication with the first chamber 430, the partition 420 is located on a flow path of a gas-liquid mixture flowing out from the pipeline outlet, the second chamber 440 is in communication with an air outlet and a liquid outlet 443, and the air outlet is located above the liquid outlet 443.
In the working process of the gas-liquid extraction and separation device, under the blocking action of the partition 420, the gas-liquid mixture entering the first chamber 430 through the outlet of the pipe collides with the partition 420, so that the motion path of the gas-liquid mixture is changed, in the process, the separation of gas and liquid phases is realized, wherein the gas can be discharged from the gas outlet, and the liquid can bypass the partition 420 and be discharged from the liquid outlet 443.
By arranging the partition plate 420 in the box body 410 of the gas-liquid separation box 400, separation of the inlet of the gas-liquid mixture and the separated gas-liquid two-phase outlet is realized, and the situation that the gas-liquid mixture entering the first chamber 430 directly enters the second chamber 440 and is further discharged through the gas outlet which is directly communicated with the second chamber 440 can be effectively avoided, namely, the gas-liquid mixture is effectively prevented from entering a gas channel which is communicated with the gas outlet, the gas-liquid separation efficiency is improved, the reliability of gas-liquid separation is ensured, and the working stability of the gas-liquid extraction separation device of the embodiment is further ensured. And, through setting up the gas outlet in the top of liquid outlet 443, still well utilized the gas density less than the principle of liquid, realized the reliable separation of gas-liquid two-phase.
With continued reference to fig. 5, in the present embodiment, two sides of the partition 420 are spaced apart from two sidewalls of the case 410, respectively, such that the gas-liquid mixture in the first chamber 430 can flow into the second chamber 440 through two sides of the partition 420.
Referring to fig. 5, in the present embodiment, the case 410 is provided with a first inlet 431 and a second inlet 432, wherein the first inlet 431 is used for connecting with a pipeline outlet of the first gas-liquid extraction separation module, and the second inlet 432 is used for connecting with a pipeline outlet of the second gas-liquid extraction separation module.
Specifically, in this embodiment, the liquid outlet 443 of the tank 410 may be connected to a recovery pipe, where the recovery pipe is provided with an on-off valve, and the on-off valve is electrically connected to the control module 100, and the gas-liquid extraction separation device may further include a liquid level switch configured to detect a liquid level in the tank 410, and the liquid level switch is electrically connected to the control module 100.
In the working process of the gas-liquid extraction and separation device, the liquid level switch can detect the liquid level in the box body 410 in real time and output a detected liquid level signal to the control module 100, and when the control module 100 judges that the liquid level in the box body 410 reaches a set value (the liquid in the box body 410 reaches a set capacity), the opening and closing valve is controlled to be in an opening state, so that the liquid in the box body 410 can flow to the recovery pipeline through the liquid outlet 443 and be recycled.
This gas-liquid extraction separator has realized the real-time detection to the liquid level in the box 410 through setting up liquid level switch, on the one hand, avoided leading to the situation that liquid overflows because of the liquid level is too high, on the other hand, can also utilize liquid level switch to realize setting up in the feedback regulation of the start-stop valve of retrieving the passageway to realize in time retrieving and cyclic utilization of liquid.
Specifically, in this embodiment, the side wall of the case 410 is provided with a mounting opening 433, and the liquid level switch is mounted to the mounting opening 433.
With reference to fig. 1, 3, 4 and 5, in the present embodiment, the number of the air outlets is two, namely, a first air outlet 441 and a second air outlet 442, where the first air outlet 441 is used for discharging air in the first air-liquid extraction separation module, and the second air outlet 442 is used for discharging air in the second air-liquid extraction separation module, and the first air outlet 441 and the second air outlet 442 have different air outlet flow rates, specifically, the air outlet flow rate of the first air outlet 441 is greater than the air outlet flow rate of the second air outlet 442.
The embodiment also provides a lithography machine, which comprises a workpiece table and the gas-liquid extraction and separation device, wherein the gas-liquid extraction and separation device is installed on the workpiece table through the shell 600.
By arranging the gas-liquid extraction and separation device in the photoetching machine, the photoetching machine has all the advantages of the gas-liquid extraction and separation device correspondingly, and the description is omitted herein.
In the working process of the lithography machine, when the residual immersion liquid and bubbles at the suction cup are required to be extracted and separated, the first on-off valve 220 can be kept in a conducting state, the first gas-liquid extraction and separation module extracts the gas-liquid mixture at the suction cup, the gas-liquid mixture enters the pipeline through the first vacuum adsorption head 210, and enters the gas-liquid separation tank 400 after the flow rate is regulated through the first throttle valve 230, the partial gas-liquid mixture firstly enters the first chamber 430 of the tank 410, and flows from two sides of the partition 420 to the second chamber 440 after being blocked by the partition 420, wherein under the action of gravity, the separation of the gas phase and the liquid phase is realized, the gas is discharged through the first gas outlet 441, the liquid is temporarily stored in the tank 410, and when the liquid level in the tank 410 reaches the set height, the liquid is discharged through the liquid outlet 443 for recycling.
The first air outlet 441 is connected with a vacuum pumping device, when the residual immersion liquid and air bubbles at the suction cup need to be extracted and separated, the vacuum pumping device connected with the first air outlet 441 works to provide a vacuum air source for the first air-liquid extraction and separation module, so that the residual immersion liquid and air bubbles at the suction cup can enter a pipeline of the first air-liquid extraction and separation module through the first vacuum adsorption head 210 under the vacuum negative pressure effect of the vacuum pumping device, enter the air-liquid separation box 400 after passing through the first throttle valve 230, and are separated to obtain air to be directly discharged through the first air outlet 441.
When the residual immersion liquid and bubbles at the bridging stage need to be extracted and separated, the second on-off valve 320 can be kept at the on state, the second gas-liquid extracting and separating module extracts the gas-liquid mixture at the bridging stage, the gas-liquid mixture enters the pipeline through the second vacuum adsorption head 310 and enters the gas-liquid separation tank 400 after the flow rate is regulated through the second throttle valve 330, the gas-liquid mixture also firstly enters the first chamber 430 of the tank 410, and flows from two sides of the partition 420 to the second chamber 440 after being blocked by the partition 420, wherein the separation of gas-liquid phases is realized under the action of gravity, the gas is discharged through the second gas outlet 442, the liquid is temporarily stored in the tank 410, and when the liquid level in the tank 410 reaches the set height, the liquid is discharged through the liquid outlet 443 for recycling.
The second air outlet 442 is connected with a vacuum pumping device, when the residual immersion liquid and air bubbles at the suction cup need to be extracted and separated, the vacuum pumping device connected with the second air outlet 442 works to provide a vacuum air source for the second air-liquid extraction and separation module, so that the residual immersion liquid and air bubbles at the bridging stage can enter a pipeline of the second air-liquid extraction and separation module through the second vacuum adsorption head 310 under the vacuum negative pressure effect of the vacuum pumping device, enter the air-liquid separation box 400 through the second throttle valve 330, and are separated to obtain air to be directly discharged through the second air outlet 442.
Although the present invention is disclosed above, the present invention is not limited thereto. Various changes and modifications may be made by one skilled in the art without departing from the spirit and scope of the invention, and the scope of the invention should be assessed accordingly to that of the appended claims.
Finally, it is further noted that relational terms such as first and second, and the like are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Moreover, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising one does not exclude the presence of other like elements in a process, method, article, or apparatus that comprises an element.
In the above embodiments, descriptions of orientations such as "upper", "lower", "side", and the like are based on the drawings.
The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims (8)
1. The gas-liquid extraction and separation device is used for a photoetching machine and comprises a control module (100) and gas-liquid extraction and separation modules, wherein a plurality of groups of the gas-liquid extraction and separation modules are respectively configured to extract and separate different gas-liquid mixtures, each gas-liquid extraction and separation module comprises a vacuum adsorption head, an on-off valve and a gas-liquid separation tank (400) which are sequentially connected through pipelines, the vacuum adsorption head is configured to extract the gas-liquid mixtures, the control module (100) is configured to control each group of the gas-liquid extraction and separation modules to work, the gas-liquid separation tanks (400) are configured to perform gas-liquid separation on the gas-liquid mixtures, each group of the gas-liquid extraction and separation modules share the gas-liquid separation tank (400), the gas-liquid extraction and separation modules are respectively provided with two groups of first gas-liquid extraction and second gas-liquid extraction and separation modules, wherein the first gas-liquid extraction and separation modules are configured to separate residual liquid of suction cups of the photoetching machine and residual liquid of the gas bubbles of the photoetching machine, and the second gas-liquid extraction and separation modules are configured to bridge the residual liquid extraction and bubble immersion of the photoetching machine;
The gas-liquid separation box (400) comprises a box body (410) with a containing cavity and a partition board (420) arranged in the containing cavity, wherein the partition board (420) divides the containing cavity into a first cavity (430) and a second cavity (440) which are communicated with each other, a pipeline outlet of each group of gas-liquid extraction separation modules is directly communicated with the first cavity (430), the partition board (420) is positioned on a flow path of a gas-liquid mixture flowing out from the pipeline outlet, the second cavity (440) is communicated with an air outlet and a liquid outlet (443), and the air outlet is positioned above the liquid outlet (443);
The two sides of the partition board (420) are respectively spaced from the two side walls of the box body (410) and are used for enabling the gas-liquid mixture in the first chamber (430) to flow into the second chamber (440) through the two sides of the partition board (420), and the partition board (420) is configured to be impacted by the gas-liquid mixture entering the first chamber (430) so as to change the movement path of the gas-liquid mixture and realize separation of gas phases and liquid phases.
2. The gas-liquid extraction separation apparatus of claim 1, wherein the gas-liquid extraction separation module further comprises a throttle valve configured to control flow through the conduit.
3. The gas-liquid extraction separation apparatus of claim 2, wherein the gas-liquid extraction separation module further comprises a pressure sensor configured to detect line pressure.
4. The gas-liquid extraction separation apparatus according to claim 1, further comprising a pilot valve connected to the control module (100), wherein in each set of the gas-liquid extraction separation modules, the pilot valve is configured to control the respective on-off valve.
5. The gas-liquid extraction separation device according to claim 1, wherein the liquid outlet (443) is in communication with a recovery pipe, the recovery pipe is provided with an on-off valve, the on-off valve is electrically connected with the control module (100), the gas-liquid extraction separation device further comprises a liquid level switch configured to detect a liquid level in the tank (410), and the liquid level switch is electrically connected with the control module (100).
6. The gas-liquid extraction separation apparatus of claim 1, wherein the number of gas outlets is plural, and the plural gas outlets have different gas outlet flows.
7. The gas-liquid extraction separation apparatus according to any one of claims 1 to 4, further comprising a housing (600), wherein the control module (100) and the plurality of sets of gas-liquid extraction separation modules are each disposed inside the housing (600).
8. A lithographic apparatus comprising a workpiece stage and a gas-liquid extraction separation apparatus according to any one of claims 1 to 7, the gas-liquid extraction separation apparatus being mounted to the workpiece stage by a housing (600).
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| CN206577485U (en) * | 2017-03-20 | 2017-10-24 | 四川省银河化学股份有限公司 | Gas-liquid separation device |
| CN214043606U (en) * | 2020-12-11 | 2021-08-24 | 北京华卓精科科技股份有限公司 | Gas-liquid extraction and separation device and photoetching machine |
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| EP3163375B1 (en) * | 2003-08-29 | 2019-01-09 | Nikon Corporation | Exposure apparatus and exposure method |
| US7379155B2 (en) * | 2004-10-18 | 2008-05-27 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
| CN205957565U (en) * | 2016-08-22 | 2017-02-15 | 广东美的暖通设备有限公司 | Horizontal type gas -liquid separator and air conditioner of air conditioner |
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| CN206577485U (en) * | 2017-03-20 | 2017-10-24 | 四川省银河化学股份有限公司 | Gas-liquid separation device |
| CN214043606U (en) * | 2020-12-11 | 2021-08-24 | 北京华卓精科科技股份有限公司 | Gas-liquid extraction and separation device and photoetching machine |
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