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CN113635304B - Robot-assisted laser real-time detection processing or etching integrated device and method - Google Patents

Robot-assisted laser real-time detection processing or etching integrated device and method Download PDF

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CN113635304B
CN113635304B CN202110933871.9A CN202110933871A CN113635304B CN 113635304 B CN113635304 B CN 113635304B CN 202110933871 A CN202110933871 A CN 202110933871A CN 113635304 B CN113635304 B CN 113635304B
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laser
unit
mechanical arm
processed
etched
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CN113635304A (en
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季凌飞
张犁天
曹丽杰
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Beijing University of Technology
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00Programme-controlled manipulators
    • B25J9/16Programme controls
    • B25J9/1612Programme controls characterised by the hand, wrist, grip control
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/14Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
    • B23K26/146Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor the fluid stream containing a liquid
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/20Bonding
    • B23K26/21Bonding by welding
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36Removing material
    • B23K26/362Laser etching
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J11/00Manipulators not otherwise provided for
    • B25J11/005Manipulators for mechanical processing tasks
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00Programme-controlled manipulators
    • B25J9/16Programme controls
    • B25J9/1656Programme controls characterised by programming, planning systems for manipulators
    • B25J9/1664Programme controls characterised by programming, planning systems for manipulators characterised by motion, path, trajectory planning
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00Programme-controlled manipulators
    • B25J9/16Programme controls
    • B25J9/1679Programme controls characterised by the tasks executed

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Robotics (AREA)
  • Plasma & Fusion (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Orthopedic Medicine & Surgery (AREA)
  • Laser Beam Processing (AREA)

Abstract

Robot-assisted laser real-time detection processing or etching integrated device and method relate to the technical field of laser processing. The device comprises a laser unit, a mechanical arm unit, a cooling unit and a locating unit. The laser unit acquires position information of an object to be processed or etched, measures the thickness of a liquid layer sprayed on the surface of the object by the cooling unit, feeds back the thickness to the mechanical arm unit in real time, and automatically searches a laser focal plane; then the cooling unit receives the liquid layer thickness measured by the laser unit, and adjusts and controls the cooling medium parameters in real time to adapt to the output parameters of the laser unit; and then the locating unit recognizes the position information and the material attribute information of the object to be processed or etched, and regulates and controls the motion feeding of the mechanical arm unit and the switching light of the laser unit in real time. According to the invention, the motion track and cooling input of the mechanical arm are regulated and controlled in real time by a non-contact method, and the machining or the erosion is detected while the laser machining or the erosion is performed, so that the accuracy and the digitalization of the laser machining or the erosion are ensured, the unplanned tissue wound is reduced, and the robot-assisted laser material machining or the operation can be widely applied to the fields of robot-assisted laser material machining or the operation and the like.

Description

机器人辅助激光实时探测加工或蚀除一体化装置和方法Robot-assisted laser real-time detection processing or erosion integrated device and method

技术领域technical field

本发明涉及激光加工技术领域,特别涉及一种机器人辅助激光实时探测加工或蚀除一体化装置和方法。The invention relates to the technical field of laser processing, in particular to a robot-assisted laser real-time detection processing or erosion integrated device and method.

背景技术Background technique

机器人辅助激光实时加工或蚀除,与机器人辅助机械加工或蚀除相较,具有精度高、自由度高、重复性好与非接触等独特优势,并且激光的扫描速度可以达到每秒数千毫米,其工作效率远高于传统机械加工或蚀除。然而,激光加工或蚀除过程中材料内部的处理深度与材料属性难以测量和识别,导致无法精确控制和判断激光作用过程,难以避免非计划性组织创伤,且在过程中还往往存在热积累严重、排屑困难等问题。Compared with robot-assisted mechanical processing or ablation, robot-assisted laser real-time processing or ablation has unique advantages such as high precision, high degree of freedom, good repeatability and non-contact, and the scanning speed of laser can reach thousands of millimeters per second , and its work efficiency is much higher than traditional machining or erosion. However, it is difficult to measure and identify the processing depth and material properties inside the material during laser processing or ablation, resulting in the inability to accurately control and judge the laser action process, it is difficult to avoid unplanned tissue trauma, and there is often serious heat accumulation during the process. , Chip removal difficulties and other issues.

目前国内外报道的机械臂辅助激光加工的实时位置探测主要通过摄像测量装置(如CCD相机)解决。公开在2019年1月4日的授权号为ZL201811229793.9的中国专利,提出了一种基于小同轴激光加工系统的成像定位加工方法,该方法通过图像采集器调节激光光路与影像系统光路二者同轴,然而此方法受影像系统视野影像较大,每加工完一个区域都需要移动视野,不但操作复杂、精度低,还难以保证激光加工全过程完全位于激光焦平面上,直接影响激光加工的效率和效果。公开在2019年8月6日的公开号为CN110090075A的中国专利中,提供了一种基于光信号监测的飞秒激光骨手术方法通过监测溅射物的激光激发信号调节激光参数,然而,此方法无法获知待手术部位的位置和材料属性信息,无法避免由于不适当的去除进给轨迹导致的超出计划手术深度、烧蚀阈值所引起的光烧蚀损伤。At present, the real-time position detection of manipulator-assisted laser processing reported at home and abroad is mainly solved by camera measurement devices (such as CCD cameras). The Chinese patent with the authorization number ZL201811229793.9 published on January 4, 2019 proposes an imaging positioning processing method based on a small coaxial laser processing system. However, this method is affected by the large field of view of the imaging system, and the field of view needs to be moved every time an area is processed. Not only is the operation complicated and the precision is low, but it is also difficult to ensure that the whole process of laser processing is completely on the laser focal plane, which directly affects laser processing. efficiency and effectiveness. In the Chinese patent with the publication number CN110090075A published on August 6, 2019, a femtosecond laser bone surgery method based on optical signal monitoring is provided to adjust the laser parameters by monitoring the laser excitation signal of the sputtered material. However, this method The position and material property information of the site to be operated cannot be known, and photoablation damage caused by exceeding the planned operation depth and ablation threshold due to improper removal feed trajectory cannot be avoided.

激光与物体的相互作用以热烧蚀机制为主,液体介质辅助激光加工或蚀除能够降低激光对物体造成的热损伤。中国专利201410331680.5(公开日2014年11月5日)与201910909131.4(公开日2019年12月13日)分别公开了液体介质辅助激光手术和加工的装置和方法,但是外部液体介质的引入主要用于冷却,忽视了液体介质层对入射激光的干扰影响。目前国内外关于液体辅助激光加工或蚀除的报道局限于形成较好冷却效果的液体介质调整,而未从激光与液体介质耦合作用效应的角度考虑,形成一种能够实时监测和调控激光加工或蚀除中液层厚度的装置或方法,克服液体对激光能量存在的吸收或空化屏蔽而获得最好的激光加工/蚀除效果,现有冷却装置和方法的缺陷直接影响激光加工或蚀除的安全性和工作效果。The interaction between the laser and the object is mainly based on the thermal ablation mechanism, and the liquid medium-assisted laser processing or ablation can reduce the thermal damage caused by the laser to the object. Chinese patents 201410331680.5 (published on November 5, 2014) and 201910909131.4 (published on December 13, 2019) respectively disclose devices and methods for liquid medium-assisted laser surgery and processing, but the introduction of an external liquid medium is mainly used for cooling , ignoring the interference effect of the liquid medium layer on the incident laser light. At present, domestic and foreign reports on liquid-assisted laser processing or ablation are limited to the adjustment of liquid medium with better cooling effect, but do not consider the coupling effect of laser and liquid medium to form a real-time monitoring and control of laser processing or ablation. A device or method for removing the thickness of the liquid layer, which overcomes the absorption of laser energy by the liquid or cavitation shielding to obtain the best laser processing/ablation effect. The defects of existing cooling devices and methods directly affect laser processing or ablation safety and performance.

为了克服上述问题,本发明提出一种机器人辅助激光实时探测加工或蚀除一体化装置和方法,其探测和控制均通过非接触方式实施,实现激光加工或蚀除实时的数字化测量和自动化控制,突破现有机器人辅助激光加工或蚀除装置和方法的精度和效率瓶颈。In order to overcome the above problems, the present invention proposes a robot-assisted laser real-time detection and processing or erosion integrated device and method, the detection and control of which are implemented in a non-contact manner, to achieve real-time digital measurement and automatic control of laser processing or erosion, Break through the accuracy and efficiency bottlenecks of existing robot-assisted laser processing or ablation devices and methods.

发明内容Contents of the invention

本发明的目的在于提供一种机器人辅助激光实时探测加工或蚀除一体化装置和方法,以克服现有技术的不足。The purpose of the present invention is to provide a robot-assisted laser real-time detection and processing or erosion integrated device and method to overcome the shortcomings of the prior art.

一种机器人辅助激光实时探测加工或蚀除一体化装置和方法,包括激光单元(1)、机械臂单元(2)、冷却单元(3)和寻位单元(4),其中:A robot-assisted laser real-time detection and processing or erosion integrated device and method, including a laser unit (1), a mechanical arm unit (2), a cooling unit (3) and a positioning unit (4), wherein:

激光单元(1)包括激光发射器(1-1)、激光传输光路(1-2)和激光接收器(1-3),所述激光发射器(1-1)尾部设有激光接收器(1-3),激光发射器(1-1)中部与激光接收器(1-3)呈同轴心式配合。The laser unit (1) includes a laser transmitter (1-1), a laser transmission optical path (1-2) and a laser receiver (1-3), and the tail of the laser transmitter (1-1) is provided with a laser receiver ( 1-3), the middle part of the laser transmitter (1-1) is coaxially matched with the laser receiver (1-3).

机械臂单元(2)包括机械手臂(2-1)和运动数据传输线缆(2-2),其运动端通过连接架分别与激光单元(1)联动连接;在机械臂单元(2)的动力作动下,激光单元(1)能够按照规划路径完成待加工或蚀除部位的激光作用。The mechanical arm unit (2) includes a mechanical arm (2-1) and a motion data transmission cable (2-2), and its motion end is respectively linked with the laser unit (1) through a connecting frame; Under power action, the laser unit (1) can complete the laser action on the part to be processed or ablated according to the planned path.

冷却单元(3)包括喷水器(3-1)与液流调控器(3-2),液流调控器(3-2)与激光发射器(1-1)连接,通过激光接收器(1-3)测定液层厚度和流动参数,并将其反馈给水流调控器(3-2),对水冷介质的流量和流速进行实时调控。The cooling unit (3) includes a water sprayer (3-1) and a liquid flow regulator (3-2), and the liquid flow regulator (3-2) is connected with the laser transmitter (1-1), and the laser receiver ( 1-3) Measure the thickness of the liquid layer and flow parameters, and feed them back to the water flow controller (3-2), so as to regulate the flow and velocity of the water-cooling medium in real time.

寻位单元(4)包括探测光源(4-1)、信号处理器(4-2)与运动控制器(4-3),探测光源(4-1)发射探测光照射于待加工或蚀除物体表面,信号处理器(4-2)接收并加权物体表面反射光信号,并根据接收信号内的稳态误差计算出待加工或蚀除物质的位置信号和材料属性信息,将信号通过运动数据传输线缆(2-2)传输给机械手臂(2-1),精确调控激光作用过程中机械手臂(2-1)的末端的运动进给和激光发射器(1-1)的开关光。The positioning unit (4) includes a detection light source (4-1), a signal processor (4-2) and a motion controller (4-3). On the surface of the object, the signal processor (4-2) receives and weights the reflected light signal of the object surface, and calculates the position signal and material property information of the material to be processed or etched according to the steady-state error in the received signal, and passes the signal through the motion data The transmission cable (2-2) is transmitted to the mechanical arm (2-1), and the motion feed of the end of the mechanical arm (2-1) and the switching light of the laser transmitter (1-1) are precisely regulated during the laser action process.

进一步地,激光接收器(1-3)被固定安装在激光发射器(1-1)出口,激光接收器(1-3)内可配有发散角准直整形器与信号放大器;冷却单元(3)将冷却介质喷在待加工或蚀除的物体表面后,通过激光接收器(1-3)获得待加工或蚀除物体的位置信息反馈给机械臂单元(2)实现激光单元(1)的焦平面自动找寻。Further, the laser receiver (1-3) is fixedly installed at the laser transmitter (1-1) outlet, and the laser receiver (1-3) can be equipped with a divergence angle collimation shaper and a signal amplifier; the cooling unit ( 3) After spraying the cooling medium on the surface of the object to be processed or etched, the position information of the object to be processed or etched is obtained through the laser receiver (1-3) and fed back to the robotic arm unit (2) to realize the laser unit (1) The focal plane is automatically found.

进一步地,激光发射器(1-1)发射出脉冲能量为I、重频为τ的激光束并辐照在液体介质流速为v的待加工或蚀除物体表面上,通过激光接收器(1-3)所得的水层厚度h满足下式:式中ρ为液体介质的密度,并调节流动参数(雷诺数Re),Re≤2300,能够有效抑制光致空化,最大限度将激光的能量作用在材料上,提高加工效率。Further, the laser transmitter (1-1) emits a laser beam with a pulse energy of I and a repetition frequency of τ and irradiates it on the surface of the object to be processed or ablated at a liquid medium flow rate of v, and passes through the laser receiver (1 -3) The resulting water layer thickness h satisfies the following formula: In the formula, ρ is the density of the liquid medium, and adjusting the flow parameter (Reynolds number Re), Re≤2300, can effectively suppress photocavitation, maximize the energy of the laser on the material, and improve the processing efficiency.

进一步地,所述机械臂单元(2)的运动端能够实现激光单元(1)在物体部位内部的相对位置调整,使得激光单元(1)在每一次激光加工过程中始终位于激光发射器(1-1)的焦平面上。所述激光接收器(1-3)探测到附着有液体介质上表面距离为H1,水层厚度h,所述寻位单元(4)中信号处理器(4-2)测得已作用深度H2,所述机械臂单元(2)的运动端到待加工或蚀除位置的距离通过运动控制器(4-3)自动调节为H=H1+h-H2,将激光聚焦于流水层下待加工或蚀除的物体表面。Further, the moving end of the mechanical arm unit (2) can realize the relative position adjustment of the laser unit (1) inside the object site, so that the laser unit (1) is always positioned at the laser emitter (1) during each laser processing process. -1) on the focal plane. The laser receiver (1-3) detects that the upper surface of the liquid medium is attached at a distance of H 1 , the thickness of the water layer is h, and the signal processor (4-2) in the positioning unit (4) measures the depth of action H 2 , the distance from the moving end of the mechanical arm unit (2) to the position to be processed or etched is automatically adjusted to H=H 1 +hH 2 by the motion controller (4-3), and the laser is focused under the flowing water layer The surface of an object to be processed or etched away.

进一步地,寻位单元(4)的信号处理器(4-2)通过解耦光信号识别待加工或蚀除物体的密度、成分等材料属性。材料属性不变,激光发射器(1-1)持续出光;一旦材料属性发生改变,信号处理器(4-2)将信号反馈给激光发射器(1-1),并关闭激光。Further, the signal processor (4-2) of the positioning unit (4) identifies material properties such as density and composition of the object to be processed or etched by decoupling optical signals. The material property remains unchanged, and the laser transmitter (1-1) emits light continuously; once the material property changes, the signal processor (4-2) feeds back a signal to the laser transmitter (1-1), and turns off the laser.

基于上述的技术方案,本发明相对于现有装置和方法,具有如下的有益效果:Based on the above-mentioned technical scheme, the present invention has the following beneficial effects compared with existing devices and methods:

(1)本发明在加工过程中通过激光接收器(1-3)实时监测物体表面液层厚度,反馈给冷却单元(3)的液流调控器(3-2)调节液体介质流速和流量,能够抑制光致空化,促进激光能量在液体介质层中的传输,提高激光能量的利用率。(1) The present invention monitors the thickness of the liquid layer on the surface of the object in real time through the laser receiver (1-3) during processing, and feeds back to the liquid flow regulator (3-2) of the cooling unit (3) to adjust the flow rate and flow of the liquid medium, It can suppress photocavitation, promote the transmission of laser energy in the liquid medium layer, and improve the utilization rate of laser energy.

(2)本发明中,通过寻位单元(4)在激光加工过程中实时探测已加工或蚀除深度,并将其反馈给机械臂单元(2),对已经处理的材料内部进行测量,反馈给机械臂行进行位置标定及精度补偿;并通过对待加工或蚀除组织材料属性的识别,避免激光对非计划作用组织造成的损伤,通过待加工或蚀除材料属性的精确辨识提高激光加工的精度和安全性。(2) In the present invention, the processed or ablated depth is detected in real time by the positioning unit (4) during laser processing, and is fed back to the mechanical arm unit (2) to measure and feed back the processed material. Carry out position calibration and precision compensation for the robotic arm; and avoid damage to unplanned tissue caused by the laser through the identification of the material properties of the tissue to be processed or ablated, and improve the accuracy of laser processing through the accurate identification of the properties of the material to be processed or ablated precision and safety.

附图说明Description of drawings

图1为本发明所述机器人辅助激光实时探测加工或蚀除装置的组成示意图Fig. 1 is a schematic diagram of the composition of the robot-assisted laser real-time detection processing or erosion device of the present invention

图2为本发明所述机器人辅助激光实时探测加工或蚀除方法的流程示意图Fig. 2 is a schematic flow chart of the robot-assisted laser real-time detection processing or erosion method of the present invention

具体实施方式Detailed ways

下面结合具体实施例,对本发明作进一步说明。The present invention will be further described below in conjunction with specific embodiments.

本发明提供一种机器人辅助激光实时探测加工或蚀除一体化装置和方法,如图1所示,包括:激光单元(1)、机械臂单元(2)、冷却单元(3)和寻位单元(4)。The present invention provides a robot-assisted laser real-time detection processing or erosion integrated device and method, as shown in Figure 1, comprising: a laser unit (1), a mechanical arm unit (2), a cooling unit (3) and a positioning unit (4).

所述激光单元(1)通过机械臂单元(2)的运动被带动到目标物体上方,通过激光传输光路(1-2)将光信号传输给激光接收器(1-3)获得待加工或蚀除物体的位置信息反馈给机械臂单元(2)实现激光发射器(1-1)的焦平面自动找寻。The laser unit (1) is driven above the target object through the movement of the mechanical arm unit (2), and the optical signal is transmitted to the laser receiver (1-3) through the laser transmission optical path (1-2) to obtain the object to be processed or etched The position information of the removed object is fed back to the mechanical arm unit (2) to realize the automatic search of the focal plane of the laser transmitter (1-1).

所述冷却单元(3)开启后,通过激光接收器(1-3)测定液层厚度和流动参数,据此调整液流控器(3-2)的液体参数从喷液器(3-1)输出以配适激光发射器(1-1)所设置的激光参数,液层厚度满足最大限度降低光致空化发生的可能性。After the cooling unit (3) is turned on, the thickness of the liquid layer and the flow parameters are measured by the laser receiver (1-3), and accordingly the liquid parameters of the liquid flow controller (3-2) are adjusted from the liquid sprayer (3-1 ) output to match the laser parameters set by the laser transmitter (1-1), the thickness of the liquid layer satisfies Minimize the possibility of photocavitation occurring.

所述寻位单元(4)将探测光源(4-1)发射出的探测光照射于待加工或蚀除物体表面,信号处理器(4-2)接收并加权物体表面反射光信号,并根据接收信号内的稳态误差计算出待加工或蚀除物质的位置信号和材料属性信息,将信号通过运动控制器(4-3)传输给机械臂单元(2)和激光单元(1),精确调控激光作用过程中机械手臂的末端的运动进给和激光的开关。The positioning unit (4) irradiates the detection light emitted by the detection light source (4-1) on the surface of the object to be processed or etched, and the signal processor (4-2) receives and weights the reflected light signal of the object surface, and according to The steady-state error in the received signal calculates the position signal and material property information of the material to be processed or etched, and transmits the signal to the robotic arm unit (2) and laser unit (1) through the motion controller (4-3), precisely Regulate the movement feed of the end of the mechanical arm and the switch of the laser during the laser action.

实施例1:Example 1:

本发明用于离体骨的激光去除,具体实施装置如图1所示。The present invention is used for laser removal of isolated bone, and the specific implementation device is shown in FIG. 1 .

如图1所示,此装置包括:激光单元(1)、机械臂单元(2)、冷却单元(3)和寻位单元(4)。As shown in Fig. 1, the device includes: a laser unit (1), a mechanical arm unit (2), a cooling unit (3) and a positioning unit (4).

所述激光单元(1)通过机械臂单元(2)的运动被带动到目标物体上方,通过激光传输光路(1-2)将光信号传输给激光接收器(1-3)获得待加工物体的位置信息反馈给机械臂单元(2)实现激光发射器(1-1)的焦平面自动找寻,此时激光发射器(1-1)位于待手术离体猪胫骨上方10mm。The laser unit (1) is driven above the target object through the movement of the mechanical arm unit (2), and the optical signal is transmitted to the laser receiver (1-3) through the laser transmission optical path (1-2) to obtain the image of the object to be processed. The position information is fed back to the mechanical arm unit (2) to realize the automatic search of the focal plane of the laser emitter (1-1). At this time, the laser emitter (1-1) is located 10 mm above the isolated pig tibia to be operated.

所述冷却单元(3)开启后,通过激光接收器(1-3)测定液层厚度和流动参数,据此调整液流控器(3-2)的液体参数从喷液器(3-1)输出以配适激光发射器(1-1)所设置的激光参数,在激光单元(1)中输入激光参数脉冲能量I=3.0J、重频τ=30Hz,调控水流调控器(3-2),水流速v=4m/s。After the cooling unit (3) is turned on, the thickness of the liquid layer and the flow parameters are measured by the laser receiver (1-3), and accordingly the liquid parameters of the liquid flow controller (3-2) are adjusted from the liquid sprayer (3-1 ) output to match the laser parameters set by the laser transmitter (1-1), input the laser parameters pulse energy I=3.0J, repetition frequency τ=30Hz in the laser unit (1), and regulate the water flow regulator (3-2 ), water velocity v=4m/s.

调节液流控制器(3-2),使水层厚度h=1mm<6.5mm,水层厚度h=1mm<6.5mm,液层厚度满足流动参数Re=1000。Adjust liquid flow controller (3-2), make water layer thickness h=1mm<6.5mm, water layer thickness h=1mm<6.5mm, liquid layer thickness meets Flow parameter Re=1000.

所述寻位单元(4)将探测光源(4-1)发射出的探测光照射于待加工物体表面,信号处理器(4-2)接收并加权物体表面反射光信号,并根据接收信号内的稳态误差计算出待加工物质的位置信号和材料属性信息,并将信号通过运动控制器(4-3)传输给机械臂单元(2)和激光单元(1),精确调控激光作用过程中机械手臂的末端的运动进给和激光的开关,直至完成。The positioning unit (4) irradiates the detection light emitted by the detection light source (4-1) on the surface of the object to be processed, and the signal processor (4-2) receives and weights the reflected light signal of the object surface, and according to the received signal The steady-state error calculates the position signal and material property information of the material to be processed, and transmits the signal to the manipulator unit (2) and laser unit (1) through the motion controller (4-3) to precisely control the process of laser action The movement of the end of the robotic arm feeds and switches the laser until complete.

实施例2:Example 2:

本发明用于复合金属板材的激光钻切,具体实施方式如图2所示。The present invention is used for laser drilling and cutting of composite metal sheets, and the specific implementation is shown in FIG. 2 .

步骤100,开启本发明所述机器人辅助激光实时探测加工或蚀除一体化装置和方法。Step 100, start the robot-assisted laser real-time detection and processing or erosion integrated device and method of the present invention.

步骤105,通过机械臂单元(2)的运动将激光单元(1)带动到复合板材上方,开启冷却单元(3),通过激光接收器(1-3)测得液层厚度h=3mm。Step 105, the laser unit (1) is driven above the composite plate by the movement of the mechanical arm unit (2), the cooling unit (3) is turned on, and the liquid layer thickness h=3mm is measured by the laser receiver (1-3).

步骤110,通过激光接收器(1-3)获得待钻切复合板材的位置信息反馈给机械臂单元(2)实现激光发射器(1-1)的焦平面自动找寻,此时激光发射器(1-1)位于待钻切复合金属板材上方20mm。Step 110, obtain the position information of the composite plate to be drilled and cut through the laser receiver (1-3) and feed it back to the mechanical arm unit (2) to realize the automatic search of the focal plane of the laser transmitter (1-1). At this time, the laser transmitter ( 1-1) Located 20mm above the composite metal sheet to be drilled and cut.

步骤115,在激光单元(1)中输入激光参数脉冲能量I=2.0J、重频τ=30Hz,调控水流调控器(3-2),水流速v=5m/s。Step 115, input laser parameters pulse energy I=2.0J, repetition frequency τ=30Hz in the laser unit (1), adjust the water flow regulator (3-2), and the water flow velocity v=5m/s.

步骤120,比较参数,检测激光参数与液层厚度是否适配,如不适配,转到步骤125,调节液流控制器(3-2);按照步骤115的参数设置,水层厚度h=1.6mm<3.6mm,液层厚度满足流动参数Re=2150。Step 120, compare the parameters, and detect whether the laser parameters are compatible with the thickness of the liquid layer, if not, go to step 125, and adjust the liquid flow controller (3-2); according to the parameter setting in step 115, the thickness of the water layer h= 1.6mm<3.6mm, liquid layer thickness meets Flow parameter Re=2150.

步骤130,寻位单元(4)中的探测光源辐照在待钻切复合金属板材上,通过信号处理器(4-2)记录和处理探测光源(4-1)与待加工材料表面相互作用所产生的光信号,光信号由采样率为330kHz的模拟数字转换器处理。滤波放大每个激光脉冲的信号,每个脉冲采样128个数据位。利用小波能量谱衡量光信号中的谐波分量,采集材料属性信号。Step 130, the detection light source in the positioning unit (4) is irradiated on the composite metal sheet to be drilled and cut, and the interaction between the detection light source (4-1) and the surface of the material to be processed is recorded and processed by the signal processor (4-2) The resulting optical signal is processed by an analog-to-digital converter with a sampling rate of 330kHz. The signal is filtered and amplified for each laser pulse, sampling 128 data bits per pulse. The wavelet energy spectrum is used to measure the harmonic components in the optical signal, and the material property signal is collected.

步骤135,实时监测待去除的复合金属板材材料属性是否为计划加工的材料。如不是,转到步骤140,终止激光单元(1)和机械臂单元(2)工作;如是,继续步骤145,机械臂单元(2)按照预设轨迹带动激光单元工作。Step 135, monitor in real time whether the material property of the composite metal sheet to be removed is the material to be processed. If not, go to step 140, terminate the work of the laser unit (1) and the mechanical arm unit (2); if so, continue to step 145, and the mechanical arm unit (2) drives the laser unit to work according to the preset track.

步骤150,信号处理器(4-2)根据小波能量谱的变化识别待加工复合金属板材的边界,解耦光信号与深度相关的预估模型。Step 150, the signal processor (4-2) identifies the boundary of the composite metal plate to be processed according to the change of the wavelet energy spectrum, and decouples the predictive model of the correlation between the optical signal and the depth.

步骤155,激光接收器(1-3)探测到附着有液体层上表面距离H1=22mm,水层厚度h=1.6mm,所述寻位单元(4)中信号处理器(4-2)测得已去除深度H2=3.6mm,所述机械臂单元(2)的运动端到待加工位置的距离通过运动控制器(4-3)自动调节为H=H1+h-H2=20mm,将激光聚焦于流水层下待去除的复合金属板材表面。Step 155, the laser receiver (1-3) detects that the upper surface distance H 1 =22mm attached to the liquid layer, the thickness of the water layer h=1.6mm, the signal processor (4-2) in the positioning unit (4) The measured removed depth H 2 =3.6mm, the distance from the moving end of the mechanical arm unit (2) to the position to be processed is automatically adjusted to H=H 1 +hH 2 =20mm by the motion controller (4-3), Focus the laser on the surface of the composite metal sheet to be removed under the flowing water layer.

步骤160,每次激光钻切完毕后,寻位单元(4)通过反射光信号解析出材料密度等属性,当探测到的复合板材属性不变,机械臂单元(2)的运动端根据寻位单元(2)反馈的位置信息在在去除部位内部的相对位置调整,使得激光单元(1)在每一次激光钻切过程中始终准确聚焦于激光发射器(1-1)的焦平面上。Step 160, after each laser drilling and cutting is completed, the location-seeking unit (4) analyzes the properties such as material density through the reflected light signal. The position information fed back by the unit (2) is adjusted relative to the inside of the removal site, so that the laser unit (1) is always accurately focused on the focal plane of the laser emitter (1-1) during each laser drilling process.

步骤165,实时监测待去除的复合金属板材材料属性是否为计划加工的材料。如不是,转到步骤170,终止激光单元(1)和机械臂单元(2)工作;如是,继续步骤160,机械臂单元(2)按照预设轨迹带动激光单元工作,直至计划加工的材料完全去除。Step 165, monitor in real time whether the material property of the composite metal sheet to be removed is the material to be processed. If not, go to step 170, terminate the work of the laser unit (1) and the mechanical arm unit (2); if yes, continue to step 160, the mechanical arm unit (2) drives the laser unit to work according to the preset trajectory, until the material to be processed is completely remove.

至此,本领域技术人员应认识到,虽然本文已详尽示出和描述了本发明的多个示例性实施例,但是,在不脱离本发明精神和范围的情况下,仍可根据本发明公开的内容直接确定或推导出符合本发明原理的许多其他变型或修改。因此,本发明的范围应被理解和认定为覆盖了所有这些其他变型或修改。So far, those skilled in the art should appreciate that, although a number of exemplary embodiments of the present invention have been shown and described in detail herein, without departing from the spirit and scope of the present invention, the disclosed embodiments of the present invention can still be used. Many other variations or modifications consistent with the principles of the invention are directly identified or derived from the content. Accordingly, the scope of the present invention should be understood and deemed to cover all such other variations or modifications.

Claims (2)

1. A method for detecting processing or etching integrated device in real time by using robot-assisted laser is characterized in that: the device comprises a laser unit, a mechanical arm unit, a cooling unit and a locating unit, wherein:
the laser unit comprises a laser emitter, a laser transmission light path and a laser receiver, wherein the laser receiver is arranged at the tail part of the laser emitter, and the middle part of the laser emitter is coaxially matched with the laser receiver;
the mechanical arm unit comprises a mechanical arm and a motion data transmission cable, and the motion end of the mechanical arm unit is connected with the laser unit in a linkage way; under the power action of the mechanical arm unit, the laser unit can complete the laser action of the part to be processed or etched according to the planned path;
the cooling unit comprises a liquid sprayer and a liquid flow regulator, the liquid flow regulator is connected with the laser transmitter, the thickness and the flow parameters of the liquid layer are measured through the laser receiver, and the liquid flow parameters are fed back to the liquid flow regulator to regulate and control the parameters of the water-cooling medium in real time;
the locating unit comprises a detection light source, a signal processor and a motion controller, wherein the detection light source emits detection light to irradiate the surface of an object to be processed or etched, the signal processor receives and weights reflected light signals of the surface of the object, calculates position information and material attribute information of the object to be processed or etched according to steady-state errors in the received signals, transmits the signals to the mechanical arm through a data transmission line, and regulates and controls motion feeding of the tail end of the mechanical arm and switching of a laser transmitter in the laser action process;
the method comprises the following steps:
(1) The laser unit moves to the upper part of the target object through the mechanical arm unit, and starts the cooling unit, and the laser receiver obtains the position information of the object to be processed or etched and removed and feeds the position information back to the mechanical arm unit to realize the automatic searching of the focal plane of the laser unit;
(2) The laser transmitter emits a laser beam with pulse energy of I and repetition frequency of tau and irradiates the surface of an object to be processed or etched with the flow velocity of liquid medium of v, and the liquid layer thickness h obtained by the laser receiver meets the following formula:wherein ρ is the density of the liquid medium; adjusting the liquid flow regulator to enable the liquid layer flow parameter, namely Reynolds number Re, to be less than or equal to 2300;
(3) The laser unit and the locating unit are driven to process the part to be processed or etched away along the planned path through the mechanical arm unit; after each laser action is finished, the motion end of the mechanical arm unit adjusts the relative position inside the laser action object according to the position information fed back by the locating unit, so that the laser unit is always and accurately focused on the focal plane of the laser transmitter in each laser action process; the laser receiver detects that the distance H between the upper surface of the liquid medium is attached 1 The thickness of the water layer is H, and the processed or etched depth measured by the signal processor in the locating unit is H 2 The distance from the moving end of the mechanical arm unit to the position to be laser acted on is automatically adjusted to be H=H through a motion controller 1 +h-H 2 Focusing laser on the surface of an object to be processed or etched away under the liquid layer;
(4) Identifying material properties of the object to be processed or etched by the locating unit, wherein the material properties at least comprise density and components of the object; when the material property is detected to be unchanged, completing laser processing or etching according to a planned path, and circulating until all laser processing or etching tasks are completed; when a change in a material property is detected, the processing or etching is stopped.
2. The method for real-time detection of machining or ablation by using a robot-assisted laser integrated device according to claim 1, wherein a laser receiver is fixedly installed at an outlet of a laser transmitter, and a divergence angle collimating shaper and an echo signal are arranged in the laser receiver; and after the cooling unit sprays cooling medium on the surface of the object to be processed or etched, the laser receiver obtains the position information of the object to be processed or etched and feeds the position information back to the mechanical arm unit to realize the automatic searching of the focal plane of the laser unit.
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