CN113791521A - 高压放电灯 - Google Patents
高压放电灯 Download PDFInfo
- Publication number
- CN113791521A CN113791521A CN202110935321.0A CN202110935321A CN113791521A CN 113791521 A CN113791521 A CN 113791521A CN 202110935321 A CN202110935321 A CN 202110935321A CN 113791521 A CN113791521 A CN 113791521A
- Authority
- CN
- China
- Prior art keywords
- reflector
- lamp
- long axis
- side tube
- discharge lamp
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012212 insulator Substances 0.000 claims abstract description 23
- 238000003780 insertion Methods 0.000 claims abstract description 11
- 230000037431 insertion Effects 0.000 claims abstract description 11
- 239000011521 glass Substances 0.000 claims description 4
- 238000001816 cooling Methods 0.000 abstract description 16
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 238000005286 illumination Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000009826 distribution Methods 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 238000007599 discharging Methods 0.000 description 2
- 229910052736 halogen Inorganic materials 0.000 description 2
- 150000002367 halogens Chemical class 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 2
- 229910052753 mercury Inorganic materials 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 230000004308 accommodation Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000000191 radiation effect Effects 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2002—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/36—Seals between parts of vessels; Seals for leading-in conductors; Leading-in conductors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/52—Cooling arrangements; Heating arrangements; Means for circulating gas or vapour within the discharge space
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/84—Lamps with discharge constricted by high pressure
- H01J61/86—Lamps with discharge constricted by high pressure with discharge additionally constricted by close spacing of electrodes, e.g. for optical projection
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Non-Portable Lighting Devices Or Systems Thereof (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Vessels And Coating Films For Discharge Lamps (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2017017856 | 2017-02-02 | ||
| JP2017-017856 | 2017-02-02 | ||
| CN201880009946.0A CN110249267B (zh) | 2017-02-02 | 2018-01-31 | 高压放电灯 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201880009946.0A Division CN110249267B (zh) | 2017-02-02 | 2018-01-31 | 高压放电灯 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN113791521A true CN113791521A (zh) | 2021-12-14 |
Family
ID=63040732
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110935321.0A Pending CN113791521A (zh) | 2017-02-02 | 2018-01-31 | 高压放电灯 |
| CN201880009946.0A Active CN110249267B (zh) | 2017-02-02 | 2018-01-31 | 高压放电灯 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201880009946.0A Active CN110249267B (zh) | 2017-02-02 | 2018-01-31 | 高压放电灯 |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP6457162B2 (ja) |
| KR (1) | KR102483865B1 (ja) |
| CN (2) | CN113791521A (ja) |
| TW (1) | TWI765960B (ja) |
| WO (1) | WO2018143300A1 (ja) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2019039427A1 (ja) * | 2017-08-23 | 2019-02-28 | フェニックス電機株式会社 | 光源装置、露光装置、および光源装置の判定方法 |
| WO2020130090A1 (ja) * | 2018-12-21 | 2020-06-25 | 株式会社ブイ・テクノロジー | 露光装置用光照射装置 |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0574204A (ja) * | 1991-09-13 | 1993-03-26 | Koito Mfg Co Ltd | 自動車用ヘツドランプ |
| JPH05290716A (ja) * | 1992-04-14 | 1993-11-05 | Toshiba Corp | ヒューズ溶断検出回路 |
| JP2001035203A (ja) * | 1999-07-19 | 2001-02-09 | Iwasaki Electric Co Ltd | 光源装置 |
| CN1341233A (zh) * | 1999-12-02 | 2002-03-20 | 松下电器产业株式会社 | 放电灯和灯装置 |
| CN1725429A (zh) * | 2004-07-02 | 2006-01-25 | 电灯专利信托有限公司 | 设计放电灯的方法 |
| CN101082403A (zh) * | 2006-05-30 | 2007-12-05 | 优志旺电机株式会社 | 光源装置 |
| JP2012114390A (ja) * | 2010-11-29 | 2012-06-14 | Nsk Technology Co Ltd | 露光装置用光照射装置 |
| JP2013004503A (ja) * | 2011-06-22 | 2013-01-07 | Ushio Inc | 光源装置 |
Family Cites Families (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3481612B2 (ja) * | 1999-12-02 | 2003-12-22 | 松下電器産業株式会社 | 放電ランプおよびランプ装置 |
| JP2002075014A (ja) * | 2000-06-16 | 2002-03-15 | Matsushita Electric Ind Co Ltd | ランプユニットおよび画像投影装置 |
| JP3855955B2 (ja) * | 2003-03-28 | 2006-12-13 | セイコーエプソン株式会社 | 光源装置及びプロジェクタ |
| KR20040102301A (ko) * | 2003-05-27 | 2004-12-04 | 삼성전자주식회사 | 보조광원을 채용하는 조명 장치 및 프로젝션 시스템 |
| JP2006260891A (ja) * | 2005-03-16 | 2006-09-28 | Phoenix Denki Kk | 超高圧放電灯ユニット |
| CN1881522A (zh) * | 2005-06-15 | 2006-12-20 | 晶赞光电股份有限公司 | 一种具有辅助反射装置的高压气体放电灯 |
| WO2008135084A1 (de) * | 2007-05-04 | 2008-11-13 | Osram Gesellschaft mit beschränkter Haftung | Hochdruckentladungslampe mit zündhilfe |
| JP5243837B2 (ja) * | 2008-04-14 | 2013-07-24 | 三菱電機照明株式会社 | 反射鏡付放電ランプ |
| JP2010244821A (ja) * | 2009-04-06 | 2010-10-28 | Ushio Inc | 光照射装置 |
| DE202009011727U1 (de) * | 2009-08-28 | 2009-12-17 | Osram Gesellschaft mit beschränkter Haftung | Entladungslampe mit Reflektor |
| JP5376409B2 (ja) * | 2010-01-07 | 2013-12-25 | ウシオ電機株式会社 | 光源装置および光照射装置 |
| JP2012113269A (ja) | 2010-11-29 | 2012-06-14 | Nsk Technology Co Ltd | 露光装置用光照射装置 |
| JP2013012389A (ja) * | 2011-06-29 | 2013-01-17 | Ushio Inc | 光源素子 |
| JP5869713B1 (ja) | 2015-04-13 | 2016-02-24 | フェニックス電機株式会社 | 光源装置及び露光装置とその検査方法 |
-
2018
- 2018-01-31 KR KR1020197022306A patent/KR102483865B1/ko active Active
- 2018-01-31 CN CN202110935321.0A patent/CN113791521A/zh active Pending
- 2018-01-31 WO PCT/JP2018/003293 patent/WO2018143300A1/ja not_active Ceased
- 2018-01-31 CN CN201880009946.0A patent/CN110249267B/zh active Active
- 2018-01-31 JP JP2018552268A patent/JP6457162B2/ja active Active
- 2018-02-02 TW TW107103760A patent/TWI765960B/zh active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0574204A (ja) * | 1991-09-13 | 1993-03-26 | Koito Mfg Co Ltd | 自動車用ヘツドランプ |
| JPH05290716A (ja) * | 1992-04-14 | 1993-11-05 | Toshiba Corp | ヒューズ溶断検出回路 |
| JP2001035203A (ja) * | 1999-07-19 | 2001-02-09 | Iwasaki Electric Co Ltd | 光源装置 |
| CN1341233A (zh) * | 1999-12-02 | 2002-03-20 | 松下电器产业株式会社 | 放电灯和灯装置 |
| CN1725429A (zh) * | 2004-07-02 | 2006-01-25 | 电灯专利信托有限公司 | 设计放电灯的方法 |
| CN101082403A (zh) * | 2006-05-30 | 2007-12-05 | 优志旺电机株式会社 | 光源装置 |
| JP2012114390A (ja) * | 2010-11-29 | 2012-06-14 | Nsk Technology Co Ltd | 露光装置用光照射装置 |
| JP2013004503A (ja) * | 2011-06-22 | 2013-01-07 | Ushio Inc | 光源装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20190111045A (ko) | 2019-10-01 |
| CN110249267B (zh) | 2021-09-03 |
| JP6457162B2 (ja) | 2019-01-23 |
| CN110249267A (zh) | 2019-09-17 |
| WO2018143300A1 (ja) | 2018-08-09 |
| TWI765960B (zh) | 2022-06-01 |
| TW201832268A (zh) | 2018-09-01 |
| JPWO2018143300A1 (ja) | 2019-02-07 |
| KR102483865B1 (ko) | 2023-01-03 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |