CN113825295B - Acceleration structure and radiation processing device - Google Patents

Abstract

An acceleration structure provided by the present invention includes an input coupling member, a beam focusing member, an accelerating member and an output coupling member, wherein the input coupling member has a hollow input coupling cavity and two first beam holes communicating with the input coupling cavity and a first coupling port that communicates with the input coupling cavity; the bunching piece has a hollow bunching cavity and two second beam holes communicated with the bunching cavity; the accelerating piece has a hollow accelerating cavity and is connected to the bunching cavity two third beam flow holes communicated; the output coupling member has a hollow output coupling cavity, two fourth beam flow holes communicated with the output coupling cavity, and a second coupling port communicated with the output coupling cavity. In the present invention, the cross-sections of the first beam hole, the second beam hole, the third beam hole and the fourth beam hole are all the same elongated shape, so that a ribbon-shaped or filament-shaped particle beam can be formed, The structure of the acceleration structure has been simplified.

Description

An accelerating structure and radiation processing device

technical field

The invention relates to the technical field of accelerators, in particular to an acceleration structure and an irradiation processing device.

Background technique

The accelerating structure is a device for electron beam acceleration. The low-energy electron beam is input into the accelerating structure for acceleration to form a high-energy electron beam output accelerating structure. The high-energy electron beam can be applied to material modification, sewage treatment, disinfection, Coating curing, etc. The accelerating structure can accelerate low-energy electron beams to high-energy electron beams with corresponding energies according to different application fields. The electron beam current of the relevant acceleration structure is relatively concentrated, and scanning magnets are needed to diffuse the electron beam current, and the diffused electron beam is deflected again in different degrees to obtain a parallel outgoing electron beam current, which increases the complexity of the equipment.

Contents of the invention

In view of this, embodiments of the present invention provide an accelerating structure to solve the technical problem of how to obtain electron beams emerging in parallel while simplifying the structure of the device.

The technical scheme of the embodiment of the present invention is realized like this:

An embodiment of the present invention provides an acceleration structure, including: an input coupling,

It has a hollow input coupling cavity, and the input coupling member is provided with two first beam holes arranged at intervals along the first direction for particles to pass through, and the two first beam holes communicate along the first direction The input coupling cavity; the input coupling member is provided with a first coupling port for power feeding that is spaced apart from the two first beam holes, and the first coupling port communicates with the input coupling cavity;

The focusing element has a hollow focusing cavity, and the focusing element is provided with two second beam holes arranged at intervals along the first direction for particles to pass through, and the two second beam holes are arranged along the The first direction communicates with the beamforming cavity;

An acceleration element has a hollow acceleration cavity, and the acceleration element is provided with two third beam holes arranged at intervals along the first direction for particles to pass through, and the two third beam holes are arranged along the first direction. The direction communicates with the acceleration cavity;

The output coupling has a hollow output coupling cavity, and the output coupling is provided with two fourth beam holes arranged at intervals along the first direction for particles to pass through, and the two fourth beam holes are arranged along the first direction. The first direction communicates with the output coupling cavity; the output coupling member is provided with a second coupling port for power feed-out that is spaced apart from the two fourth beam holes, and the second coupling port is connected to the output The coupling cavity is connected;

Wherein, the first coupling cavity, the beam focusing cavity, the accelerating cavity, and the output coupling cavity pass through the first beam hole, the second beam hole, the third beam hole, The fourth beam holes are sequentially connected along the first direction, and the first beam hole, the second beam hole, the third beam hole, and the fourth beam hole are transversely connected to each other. The cross sections are the same, the cross section is perpendicular to the first direction, and the cross section is strip-shaped.

Further, both ends of the cross-section in the length direction are arcs.

Further, the aspect ratio of the cross section is greater than 15.

Further, there are a plurality of the focusing elements, and the plurality of the focusing elements are sequentially connected along the first direction.

Further, there are multiple acceleration elements, and the multiple acceleration elements are sequentially connected along the first direction.

Further, the accelerating structure further includes a cooling element, and the cooling element surrounds the focusing element and the accelerating element around the first direction.

Further, the cooling element has a water injection port and a water outlet, and the water injection port is spaced apart from the water outlet.

An embodiment of the present invention also provides a radiation processing device, including: the accelerating structure described in any one of the above; an electron gun, which is placed close to the first beam hole away from the focusing member; a titanium film, located on the The end of the output coupling part in the acceleration structure away from the acceleration part is used to close one of the fourth beam holes; the radio frequency power component is connected to the first coupling port.

Further, the radio frequency power component includes: a power source to provide power; a transmission waveguide connected to the power source; an input waveguide, one end of the input waveguide is connected to an end of the transmission waveguide away from the power source, The other end of the input waveguide is connected to the first coupling port.

Further, the radiation processing device further includes an output waveguide and a load, one end of the output waveguide is connected to the second coupling port, and the other end of the output waveguide is connected to the load.

An accelerating structure provided by an embodiment of the present invention includes an input coupling, a beamforming element, an accelerating element, and an output coupling, wherein the input coupling has a hollow input coupling cavity and two first beams communicating with the input coupling cavity. The flow hole and the first coupling port communicated with the input coupling cavity, the particles enter and exit the input coupling cavity through the two first beam holes, and the first coupling port is used for power feeding; the bunching part has a hollow bunching cavity and a The two second beam holes connected to the beam cavity, through which the particles enter and leave the beam cavity; the acceleration member has a hollow acceleration cavity and two third beam holes connected to the beam cavity, Particles enter and leave the accelerating cavity through the two third beam holes; the output coupling has a hollow output coupling cavity, two fourth beam holes communicating with the output coupling cavity, and a second coupling port communicating with the output coupling cavity, and the particles pass through Two fourth beam holes enter and exit the output coupling cavity, and the second coupling port is used for power feed-out. The input coupling cavity, the beamforming cavity, the accelerating cavity and the output coupling cavity are sequentially connected in the first direction through the first beam hole, the second beam hole, the third beam hole and the fourth beam hole, and the first beam The cross-sections of the flow hole, the second flow hole, the third flow hole and the fourth flow hole are all in the same elongated shape. In the embodiment of the present invention, the cross-sections of the first beam hole, the second beam hole, the third beam hole, and the fourth beam hole are all the same elongated shape, so that the input coupling cavity, the beam focusing cavity, The acceleration cavity and the output coupling cavity form a flat channel, and when the particles pass through the flat channel, they will form a cross-section of the first beam hole, the second beam hole, the third beam hole, and the fourth beam hole. Ribbon-like or filament-like particle beams with roughly the same shape eliminate the need to use scanning magnets to spread the electron beams and deflect the electron beams to different degrees, simplifying the structure of the accelerating structure.

Description of drawings

Fig. 1 is a sectional view of an acceleration structure provided by an embodiment of the present invention;

FIG. 2 is a schematic structural diagram of an input coupling provided by an embodiment of the present invention;

Fig. 3 is a structural schematic diagram of a bunching member provided by an embodiment of the present invention;

Fig. 4 is a schematic structural diagram of an acceleration member provided by an embodiment of the present invention;

Fig. 5 is a schematic structural diagram of an output coupling provided by an embodiment of the present invention;

FIG. 6 is a schematic cross-sectional view provided by an embodiment of the present invention;

FIG. 7 is a schematic structural diagram of an acceleration structure provided by an embodiment of the present invention;

Fig. 8 is a schematic structural diagram of a radiation processing device provided by an embodiment of the present invention.

Explanation of reference signs:

1. Acceleration structure; 10. Input coupling member; 11. Input coupling cavity; 12. First beam hole; 13. First coupling port; 20. Beaming member; 21. Beaming cavity; 22. Second beam Hole; 30. Accelerator; 31. Acceleration cavity; 32. The third beam hole; 40. Output coupling; 41. Output coupling cavity; 42. The fourth beam hole; 43. The second coupling port; 44. Titanium Membrane; 45, output waveguide; 46, load; 50, cooling member; 51, water injection port; 52, water outlet; 53, accommodation cavity; 60, electron gun; 70, radio frequency power component; 71, power source; 72, transmission waveguide ; 73. Input waveguide.

Detailed ways

In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention.

The specific technical features in each embodiment described in the specific implementation modes can be combined in various ways if there is no contradiction. For example, different implementation modes can be formed by combining different specific technical features. Necessary repetition, various possible combinations of specific technical features in this application will not be further described.

In the following description, the terms "first\second\third\fourth..." are only used to distinguish different objects, and do not mean that there are similarities or connections among the objects. It should be understood that the orientation descriptions "above", "below", "left" and "right" are all orientations in normal use.

It should be noted that the term "comprising", "comprising" or any other variation thereof is intended to cover a non-exclusive inclusion such that a process, method, article or apparatus comprising a set of elements includes not only those elements, but also includes none other elements specifically listed, or also include elements inherent in such a process, method, article, or device. Without further limitations, an element defined by the phrase "comprising a ..." does not preclude the presence of additional identical elements in the process, method, article, or apparatus comprising that element. The term "connection" includes both direct connection and indirect connection unless otherwise specified.

An accelerating structure provided by an embodiment of the present invention can be used as a device for accelerating electrons. The electrons are output into the accelerating structure through the electron gun, and the accelerating structure is connected with the radio frequency power component to obtain energy to form an accelerating electric field, so that the electrons can be continuously accelerated in the accelerating structure until they are output from the accelerating structure. The output electrons form high-energy electron beams, which can be used to irradiate items for disinfection and sterilization. It should be noted that the acceleration structure provided by the embodiment of the present invention does not limit the application field, that is, in addition to the field of radiation acceleration technology, the acceleration structure provided by the embodiment of the present invention can also be applied to other fields that require accelerated electrons, for example, Applied to gold foil experiments, etc.

An embodiment of the present invention provides an acceleration structure 1, as shown in FIG.

As shown in conjunction with FIGS. 1 and 2 , the input coupling element 10 has a hollow input coupling cavity 11 . The input coupling piece 10 can be a strip-shaped part with a certain thickness, and its thickness direction is the up-down direction in Fig. 1, for example, the thickness of the input coupling piece 10 can be 16mm, 20mm, etc., and the thickness of the input coupling piece 10 can be according to the particle Need to achieve the speed to determine. The input coupling cavity 11 is arranged in the input coupling part 10, and the input coupling part 10 surrounds the cavity wall forming the input coupling cavity 11, so that the formed input coupling cavity 11 is a hollow space, so that the particle beam can be accommodated. The input coupling member 10 is provided with two first beam holes 12 spaced along the first direction for particles to pass through. The first direction is the thickness direction of the input coupling 10 , that is, the up-down direction shown in FIG. 1 . Interval setting means that the two parts are not in close contact, but at a certain distance in space. Two ends of the input coupling member 10 in the first direction are respectively provided with a first beam hole 12 , and a line connecting the two first beam holes 12 is parallel to the first direction. The two first beam holes 12 communicate with the input coupling cavity 11 along the first direction. Two first beam holes 12 pass through the cavity wall of the input coupling cavity 11, thereby communicating with the input coupling cavity 11, so that particles can enter and exit the input coupling cavity 11 through the two first beam holes 12, wherein one first beam Flow hole 12 is used for inputting particle in input coupling cavity 11, for example, this first beam flow hole 12 can be connected with electron gun, to receive the electron that electron gun emits, and another first beam flow hole 12 is used for input coupling cavity 11 middle particle output. The input coupler 10 is provided with a first coupling port 13 for power feeding, which is spaced apart from the two first beam holes 12. Both the first coupling port 13 and the first beam holes 12 are disposed on the input coupling member 10 , and there is a certain distance between the first coupling port 13 and the two first beam holes 12 in space. The first coupling port 13 communicates with the input coupling cavity 11 . The first coupling port 13 can be used to connect an external power source to input power into the input coupling cavity 11, so that the particles in the accelerating structure can absorb energy and accelerate. The unabsorbed power energy in the input coupling cavity 11 can also be output to the input coupling cavity 11 along the first beam hole.

As shown in FIG. 1 and FIG. 3 , the focusing element 20 has a hollow focusing cavity 21 . Bundle member 20 can be the elongated shape with certain thickness, and its thickness direction is the up-down direction among Fig. 1, for example, the thickness of bundle member 20 can be 20mm, 25mm, 35mm etc., and the thickness of bundle member 20 can be according to The velocity that the particle beam needs to achieve is determined. The converging cavity 21 is disposed in the converging member 20, and the converging member 20 surrounds the cavity wall forming the converging cavity 21, so that the formed converging cavity 21 is a hollow space that can accommodate particles. The focusing element 20 is provided with two second beam holes 22 spaced apart along the first direction for particles to pass through. The first direction is the thickness direction of the bundler 20 , that is, the up-down direction shown in FIG. 1 . Interval setting means that the two parts are not in close contact, but at a certain distance in space. Two ends of the beam converging member 20 in the first direction are respectively provided with a second beam hole 22 , and the line connecting the two second beam holes 22 is parallel to the first direction. The two second beam holes 22 communicate with the beam focusing cavity 21 along the first direction. Two second beam holes 22 pass through the cavity wall of the beam cavity 21, thereby communicating with the beam cavity 21, so that particles can enter and exit the beam cavity 21 through the two second beam holes 22, wherein one second beam The flow hole 22 is used to input particles into the beam focusing cavity 21, for example, the second beam hole 22 can be connected with a first beam hole 12 to receive the particles output by the input coupling cavity 11, and another second beam flow The hole 22 is used for outputting the particles in the beamforming chamber 21 .

As shown in FIG. 1 and FIG. 4 , the acceleration member 30 has a hollow acceleration cavity 31 . Accelerator 30 can be strip shape with certain thickness, and its thickness direction is the up-down direction in Fig. 1, for example, the thickness of accelerator 30 can be 30mm, 35mm etc., and the thickness of accelerator 30 can be according to the speed that particle needs to reach. to make sure. The acceleration chamber 31 can be arranged in the acceleration member 30, and the acceleration member 30 surrounds the cavity wall forming the acceleration chamber 31, so that the formed acceleration chamber 31 is a hollow space, so as to accommodate particles. The accelerator 30 is provided with two third beam holes 32 spaced apart along the first direction for particles to pass through. The first direction is the thickness direction of the acceleration member 30 , that is, the up-down direction shown in FIG. 1 . Interval setting means that the two parts are not in close contact, but at a certain distance in space. The two ends of the accelerating member 30 in the first direction are respectively provided with a third beam hole 32 , and the line connecting the two third beam holes 32 is parallel to the first direction. The two third beam holes 32 communicate with the acceleration cavity 31 along the first direction. Two third beam holes 32 pass through the cavity wall of the acceleration chamber 31, thereby communicating with the acceleration chamber 31, so that particles can enter and exit the acceleration chamber 31 through the two third beam holes 32, wherein one third beam hole 32 For inputting particles into the accelerating cavity 31, for example, the third beam hole 32 can be connected with a second beam hole 22 to receive the particles output by the focusing cavity 21, and another third beam hole 32 is used for Output the particles in the acceleration chamber 31.

As shown in conjunction with FIG. 1 and FIG. 5 , the output coupling member 40 has a hollow output coupling cavity 41 . The output coupling 40 has a hollow output coupling cavity 41 . The output coupling piece 40 can be a long strip with a certain thickness, and its thickness direction is the up and down direction in Fig. 1, for example, the thickness of the output coupling piece 40 can be 30mm, 35mm, etc. Determined by the speed achieved. The output coupling cavity 41 can be arranged in the output coupling member 40, and the output coupling cavity 41 surrounds the cavity wall forming the output coupling cavity 41, so that the formed output coupling cavity 41 is a hollow space, so as to accommodate particles. The output coupling member 40 is provided with two fourth beam holes 42 arranged at intervals along the first direction for particles to pass through. The first direction is the thickness direction of the output coupling 40 , that is, the up-down direction shown in FIG. 1 . Interval setting means that the two parts are not in close contact, but at a certain distance in space. A fourth beam hole 42 is respectively provided at both ends of the output coupling member 40 in the first direction, and a line connecting the two fourth beam holes 42 is parallel to the first direction. The two fourth beam holes 42 communicate with the output coupling cavity 41 along the first direction. Two fourth beam holes 42 pass through the cavity wall of the output coupling cavity 41, thereby communicating with the output coupling cavity 41, so that particles can enter and exit the output coupling cavity 41 through the two fourth beam holes 42, wherein one fourth beam The flow hole 42 is used to input particles into the output coupling cavity 41, for example, the fourth beam hole 42 can be connected with a third beam hole 32 to receive the particles output by the acceleration cavity 31, and another fourth beam hole 42 is used to output the particles in the output coupling cavity 41. The output coupling member 40 is provided with a second coupling port 43 for power feed-out, which is spaced apart from the two fourth beam holes 42 . Both the second coupling port 43 and the fourth beam hole 42 are disposed on the output coupling member 40 , and there is a certain distance between the second coupling port 43 and the two fourth beam holes 42 in space. The second coupling port 43 communicates with the output coupling cavity 41 . The second coupling port 43 can be used to connect an external load to output the power in the output coupling cavity 41 to the load, so that only accelerated particles are output from a fourth beam hole.

As shown in Figures 1-5, the input coupling cavity 11, the beamforming cavity 21, the accelerating cavity 31, and the output coupling cavity 41 pass through the first beam hole 12, the second beam hole 22, the third beam hole 32, the fourth The beam holes 42 communicate in sequence along the first direction. Wherein, one first beam hole 12 is connected with one second beam hole 22 so that the input coupling cavity 11 communicates with the beam focusing cavity 21 . Another second beam hole 22 is connected to a third beam hole 32 so that the beam focusing cavity 21 communicates with the accelerating cavity 31 . Another third beam hole 32 is connected to a fourth beam hole 42 so that the accelerating cavity 31 communicates with the output coupling cavity 41 . The cross sections of the first beam hole 12 , the second beam hole 22 , the third beam hole 32 and the fourth beam hole 42 are the same. It can be understood that the first beam hole 12 and the second beam hole 22 can be completely connected, so that the particles in the input coupling cavity 11 can completely enter the beam focusing cavity 21, the second beam hole 22 and the third beam hole The flow hole 32 is fully connected, so that the particles in the bunching chamber 21 can fully enter the acceleration chamber 31, and the third beam hole 32 is completely connected with the fourth beam hole 42, so that the particles in the acceleration chamber 31 can completely enter the acceleration chamber 31. Output coupling cavity 41. The cross section is perpendicular to the first direction, and the cross section is strip-shaped. The particles move along the first direction (the up and down direction as shown in Figure 1), passing through the first beam hole 12, the second beam hole 22, the third beam hole 32, and the fourth beam hole 42 in turn, and the first beam hole 42 A beam hole 12, the second beam hole 22, the third beam hole 32, the cross section of the fourth beam hole 42 are the same, thus the cross section of the particle flow formed is also the same as the first beam hole 12, the second beam hole The beam hole 22, the third beam hole 32, and the fourth beam hole 42 have the same elongated cross-section, that is, the particles are in the input coupling cavity 11, the focusing cavity 21, the accelerating cavity 31, and the output coupling cavity 41. The direction will not be changed during the transmission, and the directional transmission of the particles is realized, and the particle beam is formed into a ribbon or filament.

An accelerating structure provided by an embodiment of the present invention includes an input coupling, a beamforming element, an accelerating element, and an output coupling, wherein the input coupling has a hollow input coupling cavity and two first beams communicating with the input coupling cavity. The flow hole and the first coupling port communicated with the input coupling cavity, the particles enter and exit the input coupling cavity through the two first beam holes, and the first coupling port is used for power feeding; the bunching part has a hollow bunching cavity and a The two second beam holes connected to the beam cavity, through which the particles enter and leave the beam cavity; the acceleration member has a hollow acceleration cavity and two third beam holes connected to the beam cavity, Particles enter and leave the accelerating cavity through the two third beam holes; the output coupling has a hollow output coupling cavity, two fourth beam holes communicating with the output coupling cavity, and a second coupling port communicating with the output coupling cavity, and the particles pass through Two fourth beam holes enter and exit the output coupling cavity, and the second coupling port is used for power feed-out. The input coupling cavity, the beamforming cavity, the accelerating cavity and the output coupling cavity are sequentially connected in the first direction through the first beam hole, the second beam hole, the third beam hole and the fourth beam hole, and the first beam The cross-sections of the flow hole, the second flow hole, the third flow hole and the fourth flow hole are all in the same elongated shape. In the embodiment of the present invention, the cross-sections of the first beam hole, the second beam hole, the third beam hole, and the fourth beam hole are all the same elongated shape, so that the input coupling cavity, the beam focusing cavity, The acceleration cavity and the output coupling cavity form a flat channel, and when the particles pass through the flat channel, they will form a cross-section of the first beam hole, the second beam hole, the third beam hole, and the fourth beam hole. Ribbon-like or filament-like particle beams with roughly the same shape eliminate the need to use scanning magnets to spread the electron beams and deflect the electron beams to different degrees, simplifying the structure of the accelerating structure.

In some embodiments, as shown in FIG. 6 , both ends of the cross section in the length direction are arcs. The length direction is the direction with the largest size in the cross section. Figure 6 shows the left and right directions in the figure. The shape of the raceway, so that the hole walls of the first beam hole 12, the second beam hole 22, the third beam hole 32, and the fourth beam hole 42 are smoothly transitioned, and the first beam hole 12 and the second beam hole are enlarged. The hole spaces of the beam hole 22, the third beam hole 32, and the fourth beam hole 42 allow more particles to pass through.

In some embodiments, as shown in FIG. 6 , the aspect ratio of the cross-section is greater than 15. The length direction of the cross-section is the direction with the largest size in the cross-section, and the width direction is perpendicular to the length direction, as shown in Figure 6. The length of the cross-section is the length in the left-right direction in Figure 6, and the width of the cross-section is the upper and lower directions in Figure 6. length in the direction. The aspect ratio of the cross section is greater than 15 so that the shapes of the first beam hole 12, the second beam hole 22, the third beam hole 32, and the fourth beam hole 42 are flatter, so that the width of the particle beam formed Wider, for example, the length of the cross section can be selected as 400mm, and the width can be selected as 20mm, so as to increase the width range occupied by the particle beam.

In some embodiments, as shown in FIG. 1 , there are multiple focusing elements 20 , and the plurality of focusing elements 20 are sequentially connected along a first direction (the up-and-down direction as shown in FIG. 1 ). A plurality of focusing elements 20 are connected so that a plurality of focusing cavities 21 are also connected in sequence to form a particle focusing channel with a longer length, so that more particles can be accommodated. After the particles enter the converging channels connected together by multiple converging cavities 21, there will be enough space to form multiple parallel particle beams and accelerate to a certain extent, so that the particle beams can be output uninterrupted.

In some embodiments, as shown in FIG. 1 , there are multiple accelerators 30 , and the multiple accelerators 30 are sequentially connected along a first direction (a vertical direction as shown in FIG. 1 ). Multiple acceleration elements 30 are connected so that multiple acceleration chambers 31 are also connected in sequence to form a longer particle acceleration channel. After entering the acceleration channel formed by multiple acceleration chambers 31 , particles will be accelerated until they are transported out of the acceleration chamber 31 . The number of acceleration chambers 31 can be selected according to the target velocity that the particles need to be accelerated to. For example, the number of accelerators 30 can be 5. If the speed of the particles is to be further increased, the number of accelerators 30 can also be set to 8. The arrangement of multiple accelerators 30 can further increase the velocity of the particles, so that the number of accelerators 30 can be selected according to the application field of the acceleration structure to accelerate the particles to the target velocity.

In some embodiments, as shown in FIG. 7 , the acceleration structure 1 further includes a cooling element 50 . When the acceleration structure 1 accelerates electrons, a large amount of heat is generated, and the heat needs to be discharged in time to avoid overheating and damage to the device. The cooling member 50 can be made of heat-conducting material, which can promptly diffuse the heat generated by the accelerating structure 1 into the air, and reduce the temperature of the accelerating structure 1 . The cooling element 50 can also be a cooling fan, which takes away heat through the generated air flow. The cooling element 50 is arranged around the focusing element 20 and the accelerating element 30 in a first direction (up and down direction as shown in FIG. It occupies more space and generates more heat, so the cooling element 50 is arranged around the bunching element 20 and the accelerating element 30 to effectively dissipate heat and make the accelerating structure 1 compact.

In some embodiments, as shown in FIG. 1 and FIG. 7 , the cooling element 50 has a water injection port 51 and a water outlet port 52 . The cooling element 50 may be a liquid cooling device having a hollow cavity 53 for containing cooling liquid, which may be cold water. The water injection port 51 of the cooling element 50 is used to inject cooling liquid into the housing cavity 53, and the water outlet 52 is used to discharge the cooling liquid. The heat of the accelerating structure will heat up, and the heated water will reduce the cooling effect of the cooling element 50 on the accelerating structure 1 , so the heated water can be discharged from the cooling element 50 through the water outlet 52 . The water injection port 51 and the water outlet 52 are arranged at intervals, which can help the cooling liquid to be injected into the housing chamber 53 to fully absorb heat and then be discharged, thereby improving the utilization rate of the cooling liquid. For example, the water injection port 51 can be arranged above the first direction, and the outlet The water port 52 may be arranged below the first direction, so that the water injection port 51 and the water outlet 52 are separated by a relatively long distance, so that the cooling liquid flows downward in the first direction for a certain distance after entering the water injection port 51 before flowing out from the water outlet 52 , enhance the cooling effect.

The embodiment of the present invention also provides a radiation acceleration structure, as shown in Figure 8, including:

The acceleration structure 1 , the electron gun 60 , the titanium film 44 , and the radio frequency power assembly 70 according to any one of the above.

As shown in FIG. 1 and FIG. 8 , the electron gun 60 is disposed close to the first beam hole 12 away from the beam focusing member 20 . The electron gun 60 is a strip electron injection gun, and can also be a filamentary electron gun, which is roughly the same shape as the cross-section of the first beam hole 12, so that the electron gun 60 and the first beam hole 12 can be completely close to each other, so that the ejection of the electron gun 60 The electrons can all enter the input coupling cavity 11 through the first beam hole 12 . The electron gun 60 can eject multiple electrons at the same time, and the multiple electrons are arranged in a flat shape, so that the electrons can enter the input coupling cavity 11 in parallel, which is helpful for subsequent formation of multiple parallel electron beams.

As shown in FIG. 8 , a titanium film 44 is located at the end of the output coupling member 40 in the accelerating structure 1 away from the accelerating member 30 to close a fourth beam hole 42 . The output coupling cavity 41 communicates with two fourth beam holes 42 , wherein one fourth beam hole 42 is used to receive the particles output from the acceleration cavity 31 , and the other is used to output the particles in the output coupling cavity 41 . The titanium film 44 is arranged at the fourth beam opening 42 for outputting particles, so that the fourth beam opening 42 can be closed. Both the titanium film 44 and the electron gun 60 respectively seal the first beam hole 12 and the fourth beam hole 42 that the acceleration structure 1 communicates with the outside world, so that the input coupling cavity 11, the bunching cavity 21, the accelerating cavity 31, and the output coupling cavity 41 forms a fully enclosed vacuum channel, electrons are accelerated in the vacuum channel and emitted through the titanium film 44, but the power energy will not pass through the titanium film 44, so that the accelerating structure 1 can only output accelerated electron beams. The output electron beams are strip-shaped or filamentary electron beams exiting in parallel, so that the items can be irradiated in parallel, so that the items can be irradiated evenly. If the length of the article is approximately the same as the opening of the fourth beam hole 42, the ribbon-shaped or filamentary electron beams emitted by the accelerating structure 1 can be completely radiated to the articles, thereby improving the radiation utilization rate of the electron beams and making full use of them. the electron beam.

The radio frequency power component 70 is connected to the first coupling port 13 . The input coupling part 10 can start to communicate with the first coupling port 13 with the input coupling cavity 11, and the first coupling port 13 is communicated with the radio frequency power component 70, so that power energy can be loaded into the input coupling cavity 11, and can be connected along the input coupling cavity 11. The cavity 11 is transmitted to the beamforming cavity 21, the accelerating cavity 31, and the output coupling cavity 41, so that the electrons can continuously absorb energy during the transmission process of the input coupling cavity 11, the focusing cavity 21, the accelerating cavity 31, and the output coupling cavity 41. accelerate.

The radiation processing device provided by the embodiment of the present invention includes an accelerating structure, an electron gun, a titanium membrane, and a radio frequency power assembly, wherein the electron gun and the titanium membrane seal the accelerating structure so that the input coupling cavity, the beamforming cavity, the accelerating cavity, and the output coupling cavity form a vacuum channel so that electrons are accelerated in this vacuum channel. The radio frequency power component is connected with the first coupling port in the accelerating structure, and is used to provide the accelerating structure with power required by the accelerating electric field. In the embodiment of the present invention, by setting up the acceleration structure, the first coupling port is connected with the radio frequency power component, and the acceleration electric field is provided to the input coupling cavity, the beamforming cavity, the accelerating cavity, and the output coupling cavity, so as to obtain a strip-shaped or filamentary output in parallel. The electron beam current facilitates uniform radiation and improves the utilization rate of the electron beam current.

In some embodiments, as shown in FIG. 8 , the radio frequency power component 70 includes a power source 71 , a transmission waveguide 72 , and an input waveguide 73 . The power source 71 is used to provide power. The transmission waveguide 72 is connected to the power source 71 for transmitting power out of the power source. One end of the input waveguide 73 is connected with the end of the transmission waveguide 72 away from the power source 71, and the other end of the input waveguide 73 is connected with the first coupling port 13, that is, one end of the transmission waveguide 72 is connected with the power source, and the other end is connected with the input waveguide 73 , so that the power of the power source 71 is transmitted to the input waveguide 73, and the input waveguide 73 inputs the power into the input coupling cavity 11 through the first coupling port 13, so as to provide the acceleration structure 1 with the required power for the accelerating electric field.

In some embodiments, as shown in FIG. 1 and FIG. 8 , the radiation processing device further includes an output waveguide 45 and a load 46, one end of the output waveguide 45 is connected to the second coupling port 43, and the other end of the output waveguide 45 is connected to the load 46 . The output coupler 40 is provided with a second coupling port 43 communicating with the output coupling cavity 41, and the second coupling port 43 is communicated with the output waveguide 45 to output the remaining power energy in the output coupling cavity 41 to the output coupling cavity 41. The load 46 absorbs the remaining power energy through the output waveguide 45 .

The above descriptions are only preferred embodiments of the present invention, and are not intended to limit the protection scope of the present invention.

Claims (10)

1. An accelerating structure for accelerating electrons emitted by an electron gun, characterized in that it comprises: The input coupling part has a hollow input coupling cavity, the input coupling part is provided with two first beam holes arranged at intervals along the first direction for particles to pass through, and the two first beam holes are arranged along the first direction. The first direction communicates with the input coupling cavity; the input coupling member is provided with a first coupling port for power feeding that is spaced apart from the two first beam holes, and the first coupling port is coupled to the input Cavity connected; The focusing element has a hollow focusing cavity, and the focusing element is provided with two second beam holes arranged at intervals along the first direction for particles to pass through, and the two second beam holes are arranged along the The first direction communicates with the beamforming cavity; An acceleration element has a hollow acceleration cavity, and the acceleration element is provided with two third beam holes arranged at intervals along the first direction for particles to pass through, and the two third beam holes are arranged along the first direction. The direction communicates with the acceleration cavity; The output coupling has a hollow output coupling cavity, and the output coupling is provided with two fourth beam holes arranged at intervals along the first direction for particles to pass through, and the two fourth beam holes are arranged along the first direction. The first direction communicates with the output coupling cavity; the output coupling member is provided with a second coupling port for power feed-out that is spaced apart from the two fourth beam holes, and the second coupling port is connected to the output The coupling cavity is connected; Wherein, the input coupling cavity, the beam focusing cavity, the accelerating cavity, and the output coupling cavity pass through the first beam hole, the second beam hole, the third beam hole, the The fourth beam hole is sequentially connected along the first direction, and the cross sections of the first beam hole, the second beam hole, the third beam hole, and the fourth beam hole Similarly, the cross-section is perpendicular to the first direction, the cross-section is strip-shaped, and the first beam hole is used to be in close contact with the electron gun so that all electrons emitted by the electron gun pass through the The first beam holes all enter the input coupling cavity. 2. The acceleration structure according to claim 1, characterized in that, both ends of the cross-section in the longitudinal direction are arcs. 3. The acceleration structure according to claim 2, characterized in that the aspect ratio of the cross section is greater than 15. 4. The acceleration structure according to claim 3, wherein there are a plurality of said converging elements, and the plurality of said converging elements are sequentially connected along the first direction. 5 . The acceleration structure according to claim 3 , wherein there are multiple acceleration elements, and the plurality of acceleration elements are sequentially connected along the first direction. 6 . 6. The acceleration structure according to claim 1, characterized in that, the acceleration structure further comprises a cooling element, and the cooling element surrounds the bunching element and the acceleration element around the first direction. 7. The acceleration structure according to claim 6, wherein the cooling element has a water injection port and a water outlet, and the water injection port and the water outlet are arranged at intervals. 8. A radiation processing device, characterized in that it comprises: The acceleration structure according to any one of claims 1-7; an electron gun disposed close to the first beam orifice away from the focusing member; a titanium film, located at one end of the output coupling member away from the accelerating member in the accelerating structure, so as to close one of the fourth beam holes; A radio frequency power component is connected to the first coupling port. 9. The radiation processing device according to claim 8, wherein the radio frequency power assembly comprises: a power source to provide power; a transmission waveguide connected to the power source; An input waveguide, one end of the input waveguide is connected to an end of the transmission waveguide away from the power source, and the other end of the input waveguide is connected to the first coupling port. 10. The radiation processing device according to claim 9, characterized in that, the radiation processing device further comprises an output waveguide and a load, one end of the output waveguide is connected to the second coupling port, and the other end of the output waveguide One end is connected to the load.

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