CN120063107A - Dynamic interferometry device based on biprism interferometer configuration - Google Patents
Dynamic interferometry device based on biprism interferometer configuration Download PDFInfo
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- CN120063107A CN120063107A CN202510221797.6A CN202510221797A CN120063107A CN 120063107 A CN120063107 A CN 120063107A CN 202510221797 A CN202510221797 A CN 202510221797A CN 120063107 A CN120063107 A CN 120063107A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02015—Interferometers characterised by the beam path configuration
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
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Abstract
The invention discloses a dynamic interferometry device based on a biprism interferometer configuration, which is characterized in that a narrow linewidth double-frequency heterodyne light source generates two paths of light beams, one light beam is optically coupled into a first single-mode polarization maintaining fiber as reference light and is reflected by a first beam splitter prism to reach an imaging mirror, the other light beam generated by the narrow linewidth double-frequency heterodyne light source is optically coupled into a second single-mode polarization maintaining fiber as measurement light and is reflected by the second beam splitter prism to reach a standard mirror, the standard mirror emits high-quality spherical waves, the spherical waves reach a mirror to be measured, the spherical waves return to the standard mirror, the second beam splitter prism, the first beam splitter prism and the imaging mirror after being collimated by the imaging mirror, the measurement light and the reference light are interfered in the detector, and the surface shapes of all elements are calibrated by an interferometry method. The device can be adapted to a plurality of light sources such as a narrow linewidth light source, a short coherent light source and the like, can directly calibrate the surface shape of each element through an interference method, and has strong applicability in absolute measurement.
Description
Technical Field
The invention relates to the technical field of interferometry, in particular to a dynamic interferometry device based on a biprism interferometer configuration.
Background
The interferometry has the characteristics of high precision, non-contact property and high response speed, is widely applied to the fields of element surface shape and transmission wavefront detection, provides important guarantee for processing high-precision optical elements, and has the existing interferometry base structures of Fidelity, tasman, mach-Zehnder structures and the like.
The full-view heterodyne phase shifting technology is widely applied to the interferometry fields of surface shapes, transmission wave fronts and the like, mainly adopts a short coherence technology, is complex in optical path matching, is not wide in measurement applicability, cannot be suitable for direct measurement of aspheric elements, large-radius large-caliber elements and the like, is applied to a Talman and Mach-Zehnder structure, has the influence of parasitic waves, mixed crosstalk and the like introduced by parallel light path parallel plates, has influence on measurement precision and repeatability, has influence of a reference mirror in the structure, can introduce influence of the surface shape of the reference mirror, has influence on measurement precision, and is limited in scheme in absolute measurement.
Disclosure of Invention
The invention aims to provide a dynamic interferometry device based on a biprism interferometer configuration, which can be adapted to a plurality of light sources such as a narrow linewidth light source, a short coherence light source and the like, has the advantages of both light sources, has no influence of a reference mirror surface shape on the accuracy of a measurement result, can directly calibrate the surface shape of each element through an interferometry, and has strong applicability in absolute measurement.
The invention aims at realizing the following technical scheme:
the utility model provides a dynamic interferometry device based on biprism interferometer configuration, the device includes narrow linewidth dual-frenquency heterodyne light source, first single mode polarization maintaining fiber, first beam splitter prism, imaging lens, detector, second single mode polarization maintaining fiber, second beam splitter prism, standard mirror, wherein:
The method comprises the steps that a narrow linewidth double-frequency heterodyne light source generates two paths of light beams, one beam of light is coupled into a first single-mode polarization maintaining fiber as reference light, and the reference light is reflected by a first beam splitter prism to reach an imaging lens;
the emergent end face of the second single-mode polarization maintaining optical fiber is positioned at the mirror image position of the design incident point of the standard mirror relative to the reflecting surface of the second beam splitting prism, so that the effective F number of the standard mirror is ensured;
The light beam transmitted by the second beam splitting prism is converged and diverged firstly, then reaches the first beam splitting prism, and then reaches the imaging lens after being transmitted by the first beam splitting prism, and finally reaches the detector after being collimated by the imaging lens, and the position of a convergence point is positioned at the focus of the imaging lens, so that the measuring light reaching the detector is collimated;
the measuring light and the reference light interfere at the detector, and the surface shape of each element is calibrated by an interference measurement method.
The utility model provides a dynamic interferometry device based on biprism interferometer configuration, the device includes narrow linewidth dual-frenquency heterodyne light source, first single mode polarization maintaining fiber, first beam splitter prism, imaging lens, detector, second single mode polarization maintaining fiber, second beam splitter prism, standard mirror, wherein:
The method comprises the steps that a narrow linewidth double-frequency heterodyne light source generates two paths of light beams, one beam of light is coupled into a first single-mode polarization maintaining fiber as reference light, and the reference light is reflected by a first beam splitter prism to reach an imaging lens;
the emergent end face of the second single-mode polarization maintaining optical fiber is positioned at the mirror image position of the design incident point of the standard mirror relative to the reflecting surface of the second beam splitting prism, so that the effective F number of the standard mirror is ensured;
The light beam transmitted by the second beam splitting prism is converged and diverged firstly, then reaches the first beam splitting prism, and then reaches the imaging lens after being transmitted by the first beam splitting prism, and finally reaches the detector after being collimated by the imaging lens, and the position of a convergence point is positioned at the focus of the imaging lens, so that the measuring light reaching the detector is collimated;
The device also comprises a quarter wave plate and a polaroid, wherein the polarization state of the measuring light is converted from the S polarization state to the P polarization state by matching the quarter wave plate through the beam splitting prism, the energy utilization rate is improved, and the interference of the measuring light and the reference light is completed by matching the polaroid, wherein:
The reference light is emitted by a first single-mode polarization maintaining optical fiber, reflected by a first beam splitter prism, and reaches a detector through a polaroid and an imaging mirror;
The measuring light is emitted by a second single-mode polarization maintaining optical fiber, reflected by a second beam splitter prism, reaches a mirror to be measured after passing through a quarter wave plate and a standard mirror, reflected by the mirror to be measured, passes through the standard mirror and the quarter wave plate again, converts the polarization state into the P polarization state, transmits through the second beam splitter prism and the first beam splitter prism, converts the polarization state into the same with the reference light through a polarizing plate, reaches a detector through an imaging mirror, generates interference with the reference light at the detector, and marks the surface shape of each element through an interferometry method.
According to the technical scheme provided by the invention, the device can be adapted to a plurality of light sources such as a narrow line width light source and a short coherent light source, the advantages of the two light sources are taken into consideration, meanwhile, the influence of the surface shape of the reference mirror on the accuracy of the measurement result is avoided, the surface shape of each element can be directly calibrated through an interferometry, and the device has strong applicability in absolute measurement.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings that are needed in the description of the embodiments will be briefly described below, it being obvious that the drawings in the following description are only some embodiments of the present invention, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic diagram of a dynamic interferometry device based on a dual prism interferometer configuration according to an embodiment of the present invention;
FIG. 2 is a schematic diagram of an internal structure of a narrow linewidth dual-frequency heterodyne light source according to an embodiment of the present invention;
FIG. 3 is a schematic diagram of an apparatus for replacing a cascade prism according to an embodiment of the present invention;
FIG. 4 is a schematic view of another apparatus for replacing a cascade prism according to an embodiment of the present invention;
FIG. 5 is a schematic view of another structure of the apparatus according to the embodiment of the present invention;
fig. 6 is a schematic diagram of an apparatus structure of the mirror to be tested according to an embodiment of the invention.
Detailed Description
The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is apparent that the described embodiments are only some embodiments of the present invention, not all embodiments of the present invention, and this is not limiting to the present invention. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to fall within the scope of the invention.
Fig. 1 is a schematic structural diagram of a dynamic interferometry device based on a configuration of a biprism interferometer according to an embodiment of the present invention, where the device includes a narrow linewidth dual-frequency heterodyne light source 1, a first single-mode polarization maintaining fiber 2, a first beam splitter prism 3, an imaging mirror 4, a detector 5, a second single-mode polarization maintaining fiber 6, a second beam splitter prism 7, and a standard mirror 8, where:
The narrow linewidth double-frequency heterodyne light source 1 generates two paths of light beams, wherein one beam of light is coupled into the first single-mode polarization maintaining optical fiber 2 to serve as reference light, and the reference light is reflected by the first beam splitter prism 3 to reach the imaging lens 4, and the emergent end of the first single-mode polarization maintaining optical fiber 2 is positioned at the mirror image position of the focal point of the imaging lens 4 relative to the beam splitting surface of the first beam splitter prism 3, so that the reference light reaching the detector 5 is collimated light;
The other beam generated by the narrow linewidth double-frequency heterodyne light source 1 is optically coupled into the second single-mode polarization maintaining optical fiber 6 to serve as measuring light, and the measuring light is reflected by the second beam splitting prism 7 to reach the standard mirror 8, wherein the emergent end face of the second single-mode polarization maintaining optical fiber 6 is positioned at the mirror image position of the design incident point of the standard mirror 8 relative to the reflecting surface of the second beam splitting prism 7, so that the effective F number of the standard mirror 8 is ensured;
The standard mirror 8 emits high-quality spherical waves, the spherical waves reach the mirror 9 to be detected, the original path of the spherical waves passes through the mirror 9 to be detected and returns to the standard mirror 8 and the second beam splitting prism 7, the transmitted light beams passing through the second beam splitting prism 7 are converged and then diverged, the transmitted light beams reach the first beam splitting prism 3, the transmitted light beams pass through the first beam splitting prism 3 and reach the imaging mirror 4, the collimated light beams pass through the imaging mirror 4 and reach the detector 5, the convergence point is positioned at the focus of the imaging mirror 4, and the measured light beams reaching the detector 5 are collimated light;
The measuring light and the reference light interfere at the detector 5, and the surface shapes of the elements are calibrated by an interference measurement method, wherein the surface shapes comprise a first beam splitting prism 3, a second beam splitting prism 7, and basic surface shapes of an imaging mirror 4 and a to-be-measured mirror 9.
Fig. 2 is a schematic diagram of an internal structure of a narrow-linewidth dual-frequency heterodyne light source according to an embodiment of the present invention, where the narrow-linewidth dual-frequency heterodyne light source 1 includes a laser 10, a polarization maintaining one-to-two optical fiber 11, a cascaded acousto-optic frequency shifter 12, and an electrically adjustable optical fiber attenuation sheet 13, where:
The laser 10 emits a narrow linewidth light beam, the light beam is divided into two paths after passing through the polarization maintaining one-to-two optical fibers 11, one path passes through the cascade acousto-optic frequency shifter 12, and the other path passes through the electrically adjustable optical fiber attenuation sheet 13;
the cascade acousto-optic frequency shifter 12 is formed by cascade packaging of two acousto-optic frequency shifters, difference frequency light is generated after frequency shifting, the frequency is between a few Hz and hundreds Hz, and the light beam after frequency shifting is coupled into the second single-mode polarization maintaining fiber 6 to form measuring light;
The electric adjustable optical fiber attenuation sheet 13 can adjust the light intensity of the light to be matched with the other light through an electric signal, so that the contrast ratio of interference fringes is ensured, and the emergent light of the electric adjustable optical fiber attenuation sheet 13 is coupled into the first single-mode polarization maintaining optical fiber 2 to form reference light.
In a specific implementation, the measuring light and the reference light interfere at the detector 5, and the signal relationship between the two beams of light on the detector 5 is expressed as:
Wherein, I 1 is background light intensity, I 2 is modulated light intensity, v is difference frequency, t is sampling time; phase information introduced for the surface shape at the image plane (x, y) position of the mirror 9 to be measured;
setting the sampling frame frequency and the difference frequency of the detector 5 to match to finish the acquisition of the N+1 step-shifted measurement image, wherein the following formula is shown:
wherein N is the number of phase shifting steps, I (x, y, t i) is the interference light intensity of the ith phase shifting step acquired by the detector 5, and t i is the sampling time of the detector 5 corresponding to the ith phase shifting step;
Resolved phase information The following formula is shown:
in a specific implementation, the method for resolving the phase information can also adopt other phase resolving methods such as N steps of phase shifting and the like.
The narrow linewidth double-frequency heterodyne light source 1 can be replaced by a short-coherence double-frequency heterodyne light source, a heterodyne phase shift mode can be adopted, mechanical phase shift, wavelength phase shift, polarization phase shift and the like can be adopted, and a heterodyne phase shift mode can also be adopted, wherein an electro-optic phase shift and the like frequency shift mode can be adopted.
In addition, in a specific implementation, the first beam splitter prism 3 and the second beam splitter prism 7 can be replaced by a cascade prism, and the convergence and divergence of the light beam are realized by the cascade prism, as shown in fig. 3, which is a schematic diagram of a device adopting the cascade prism replacement in the embodiment of the present invention, in fig. 3:
compared with the scheme of a separation prism, although the cascade prism light path is more difficult to calibrate the prism shunt transmission wavefront error, the cascade prism processing error control is more advantageous, the instrument system error can be directly reduced through precision machining, the basic measurement accuracy of the instrument is improved, meanwhile, the cascade prism does not need to control the relative position between the prisms, and the assembly and the adjustment are simpler and more convenient.
The two light beam incidence points 2 and 6 entering the cascade prism in fig. 3 are all incident from bottom to top below the cascade prism, so that the consistency of the incidence of the two light beams is easier to control, but the beam splitting surfaces of the cascade prism are not consistent, and the processing precision is not as high as that of the beam splitting surfaces.
Fig. 4 is a schematic diagram of another device using a cascade prism for replacing the cascade prism according to the embodiment of the invention, in fig. 4, the cascade prism has advantages of the scheme of the cascade prism relative to the split prism, the splitting plane of the cascade prism of fig. 4 is consistent, and the processing precision is more advantageous, but two light beam incident points 2 and 6 entering the cascade prism are respectively at the upper end and the lower end of the cascade prism, so that the consistency of the two light beams is relatively difficult to control.
In addition, as shown in fig. 5, another schematic structural diagram of the device according to the embodiment of the present invention may further include a quarter wave plate 14 and a polarizer 15, and the polarization state of the measurement light is changed from S polarization state to P polarization state by matching the splitting prism with the quarter wave plate 14, so as to improve the energy utilization rate, and complete the interference of the measurement light and the reference light by matching with the polarizer 15, referring to fig. 5:
the reference light is emitted by the first single-mode polarization maintaining optical fiber 2, reflected by the first beam splitting prism 3, passes through the polaroid 15 and the imaging lens 4 and reaches the detector 5;
The measuring light is emitted from the second single-mode polarization maintaining optical fiber 6, reflected by the second beam splitter prism 7, reaches the mirror 9 to be measured after passing through the quarter wave plate 14 and the standard mirror 8, reflected by the mirror 9 to be measured, passes through the standard mirror 8 and the quarter wave plate 14 again, converts the polarization state into the P polarization state, transmits through the second beam splitter prism 7 and the first beam splitter prism 3, converts the polarization state into the same with the reference light through the polarizing plate 15, reaches the detector 5 through the imaging mirror 4, and generates interference with the reference light at the detector 5.
In a specific implementation, the mirror 9 to be measured may be a spherical element or a planar element, and the corresponding standard mirror 8 is replaced according to the type of the mirror 9 to be measured, as shown in fig. 6, which is a schematic diagram of a device structure when the mirror to be measured is a planar element according to the embodiment of the present invention, and the measurement of the planar element is achieved by replacing the standard mirror 8.
The embodiment of the invention also provides another dynamic interferometry device based on a biprism interferometer configuration, as shown in fig. 5, the device comprises a narrow linewidth double-frequency heterodyne light source, a first single-mode polarization maintaining fiber, a first beam splitter prism, an imaging mirror, a detector, a second single-mode polarization maintaining fiber, a second beam splitter prism and a standard mirror, wherein:
The method comprises the steps that a narrow linewidth double-frequency heterodyne light source generates two paths of light beams, one beam of light is coupled into a first single-mode polarization maintaining fiber as reference light, and the reference light is reflected by a first beam splitter prism to reach an imaging lens;
the emergent end face of the second single-mode polarization maintaining optical fiber is positioned at the mirror image position of the design incident point of the standard mirror relative to the reflecting surface of the second beam splitting prism, so that the effective F number of the standard mirror is ensured;
The light beam transmitted by the second beam splitting prism is converged and diverged firstly, then reaches the first beam splitting prism, and then reaches the imaging lens after being transmitted by the first beam splitting prism, and finally reaches the detector after being collimated by the imaging lens, and the position of a convergence point is positioned at the focus of the imaging lens, so that the measuring light reaching the detector is collimated;
As shown in fig. 5, the device further includes a quarter wave plate and a polarizer, the polarization state of the measurement light is converted from S polarization state to P polarization state by matching the beam splitter prism with the quarter wave plate, so as to improve the energy utilization rate, and the interference of the measurement light and the reference light is completed by matching with the polarizer, wherein:
The reference light is emitted by a first single-mode polarization maintaining optical fiber, reflected by a first beam splitter prism, and reaches a detector through a polaroid and an imaging mirror;
The measuring light is emitted by a second single-mode polarization maintaining optical fiber, reflected by a second beam splitter prism, reaches a mirror to be measured after passing through a quarter wave plate and a standard mirror, reflected by the mirror to be measured, passes through the standard mirror and the quarter wave plate again, converts the polarization state into the P polarization state, transmits through the second beam splitter prism and the first beam splitter prism, converts the polarization state into the same with the reference light through a polarizing plate, reaches a detector through an imaging mirror, generates interference with the reference light at the detector, and marks the surface shape of each element through an interferometry method.
It is noted that what is not described in detail in the embodiments of the present invention belongs to the prior art known to those skilled in the art.
In summary, the device according to the embodiment of the invention has the following advantages:
1. the structure of the scheme can be adapted to a plurality of light sources such as a narrow-line-width light source, a short-coherence light source and the like, the influence of other light beams on a measurement result can be eliminated by using the short-coherence light source, the coherence length can be improved by using the narrow-line-width light source, and the structure is adapted to the measurement of a measured piece with a large optical path range and a long-focus large-caliber element;
2. the scheme mainly adopts a divergent light path, so that the influence of parasitic waves on a measurement result is further inhibited, and the influence of mixing crosstalk on the measurement result is avoided in principle;
3. The scheme adopts high-quality spherical waves generated by direct emergent light or point diffraction of the optical fibers as emergent references, so that the influence of the reference mirror surface shape on the accuracy of the measurement result is avoided;
4. in the scheme, the processing precision of the control prism or the cascade prism can reach higher measurement precision, and the system error is reduced;
5. The scheme can directly calibrate the surface shape of each element by utilizing high-quality spherical waves generated by direct emergent points or point diffraction interference of the optical fibers in the construction process, and has strong applicability in absolute measurement.
The foregoing is only a preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any changes or substitutions easily contemplated by those skilled in the art within the scope of the present invention should be included in the scope of the present invention. Therefore, the protection scope of the present invention should be subject to the protection scope of the claims. The information disclosed in the background section herein is only for enhancement of understanding of the general background of the invention and is not to be taken as an admission or any form of suggestion that this information forms the prior art already known to those of ordinary skill in the art.
Claims (7)
1. The utility model provides a dynamic interferometry device based on biprism interferometer configuration, its characterized in that, the device includes narrow linewidth dual-frenquency heterodyne light source, first single mode polarization maintaining fiber, first beam splitter prism, imaging mirror, detector, second single mode polarization maintaining fiber, second beam splitter prism, standard mirror, wherein:
The method comprises the steps that a narrow linewidth double-frequency heterodyne light source generates two paths of light beams, one beam of light is coupled into a first single-mode polarization maintaining fiber as reference light, and the reference light is reflected by a first beam splitter prism to reach an imaging lens;
the emergent end face of the second single-mode polarization maintaining optical fiber is positioned at the mirror image position of the design incident point of the standard mirror relative to the reflecting surface of the second beam splitting prism, so that the effective F number of the standard mirror is ensured;
The light beam transmitted by the second beam splitting prism is converged and diverged firstly, then reaches the first beam splitting prism, and then reaches the imaging lens after being transmitted by the first beam splitting prism, and finally reaches the detector after being collimated by the imaging lens, and the position of a convergence point is positioned at the focus of the imaging lens, so that the measuring light reaching the detector is collimated;
the measuring light and the reference light interfere at the detector, and the surface shape of each element is calibrated by an interference measurement method.
2. The dynamic interferometry device of claim 1, wherein the narrow linewidth dual-frequency heterodyne light source comprises a laser, a polarization maintaining one-to-two fiber, a cascaded acousto-optic frequency shifter, an electrically adjustable fiber attenuation sheet, wherein:
The laser emits a narrow linewidth light beam, the light beam is divided into two paths after passing through a polarization maintaining one-to-two optical fibers, one path passes through a cascading acousto-optic frequency shifter, and the other path passes through an electrically adjustable optical fiber attenuation sheet;
The cascade acousto-optic frequency shifter is formed by cascade packaging of two acousto-optic frequency shifters, difference frequency light is generated after frequency shifting, the frequency is between a few Hz and hundreds Hz, and the light beam after frequency shifting is coupled into a second single-mode polarization maintaining fiber to form measuring light;
the electric adjustable optical fiber attenuation sheet can adjust the light intensity of the light to be matched with the other light through an electric signal, so that the contrast ratio of interference fringes is ensured, and the emergent light of the electric adjustable optical fiber attenuation sheet is coupled into the first single-mode polarization maintaining optical fiber to form reference light.
3. The dynamic interferometry device of claim 1, wherein the measurement light interferes with the reference light at the detector and the signal relationship between the two light beams at the detector is expressed as:
Wherein, I 1 is background light intensity, I 2 is modulated light intensity, v is difference frequency, t is sampling time; phase information introduced for the surface shape at the position of an image plane (x, y) of the mirror to be detected;
Setting the sampling frame frequency and the difference frequency of the detector to match to finish the acquisition of the N+1 step-shifted measurement image, wherein the following formula is shown:
Wherein N is the number of phase shifting steps, I (x, y, t i) is the interference light intensity of the ith phase shifting step acquired by the detector, and t i is the sampling time of the detector corresponding to the ith phase shifting step;
Resolved phase information The following formula is shown:
4. The dynamic interferometry device of claim 1, wherein the first beam splitting prism and the second beam splitting prism are replaced by a cascade prism through which the convergence and divergence of the beam is achieved;
Wherein, two light beam incidence points entering the cascade prism are all arranged below the cascade prism and are incident from bottom to top;
or two light beam incident points entering the cascade prism are respectively arranged at the upper end and the lower end of the cascade prism.
5. The dynamic interferometry device of claim 1, further comprising a quarter wave plate and a polarizer, wherein the polarization state of the measurement light is changed from S-polarization state to P-polarization state by matching the splitting prism with the quarter wave plate, the energy utilization is improved, and the interference of the measurement light and the reference light is completed by matching the polarizing plate, wherein:
The reference light is emitted by a first single-mode polarization maintaining optical fiber, reflected by a first beam splitter prism, and reaches a detector through a polaroid and an imaging mirror;
the measuring light is emitted by a second single-mode polarization maintaining optical fiber, reflected by a second beam splitter prism, reaches a mirror to be measured after passing through a quarter wave plate and a standard mirror, reflected by the mirror to be measured, passes through the standard mirror and the quarter wave plate again, converts the polarization state into the P polarization state, transmits through the second beam splitter prism and the first beam splitter prism, converts the polarization state into the same with the reference light through a polarizing plate, reaches a detector through an imaging mirror, and generates interference with the reference light at the detector.
6. The dynamic interferometry device based on a biprism interferometer configuration according to claim 1,
The mirror to be measured is a spherical element or a plane element, and the corresponding standard mirror is replaced according to the type of the mirror to be measured.
7. The utility model provides a dynamic interferometry device based on biprism interferometer configuration, its characterized in that, the device includes narrow linewidth dual-frenquency heterodyne light source, first single mode polarization maintaining fiber, first beam splitter prism, imaging mirror, detector, second single mode polarization maintaining fiber, second beam splitter prism, standard mirror, wherein:
The method comprises the steps that a narrow linewidth double-frequency heterodyne light source generates two paths of light beams, one beam of light is coupled into a first single-mode polarization maintaining fiber as reference light, and the reference light is reflected by a first beam splitter prism to reach an imaging lens;
the emergent end face of the second single-mode polarization maintaining optical fiber is positioned at the mirror image position of the design incident point of the standard mirror relative to the reflecting surface of the second beam splitting prism, so that the effective F number of the standard mirror is ensured;
The light beam transmitted by the second beam splitting prism is converged and diverged firstly, then reaches the first beam splitting prism, and then reaches the imaging lens after being transmitted by the first beam splitting prism, and finally reaches the detector after being collimated by the imaging lens, and the position of a convergence point is positioned at the focus of the imaging lens, so that the measuring light reaching the detector is collimated;
The device also comprises a quarter wave plate and a polaroid, wherein the polarization state of the measuring light is converted from the S polarization state to the P polarization state by matching the quarter wave plate through the beam splitting prism, the energy utilization rate is improved, and the interference of the measuring light and the reference light is completed by matching the polaroid, wherein:
The reference light is emitted by a first single-mode polarization maintaining optical fiber, reflected by a first beam splitter prism, and reaches a detector through a polaroid and an imaging mirror;
The measuring light is emitted by a second single-mode polarization maintaining optical fiber, reflected by a second beam splitter prism, reaches a mirror to be measured after passing through a quarter wave plate and a standard mirror, reflected by the mirror to be measured, passes through the standard mirror and the quarter wave plate again, converts the polarization state into the P polarization state, transmits through the second beam splitter prism and the first beam splitter prism, converts the polarization state into the same with the reference light through a polarizing plate, reaches a detector through an imaging mirror, generates interference with the reference light at the detector, and marks the surface shape of each element through an interferometry method.
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