CN120110347B - Impedance matcher, matching method, radio frequency power supply system and plasma source system - Google Patents
Impedance matcher, matching method, radio frequency power supply system and plasma source systemInfo
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- CN120110347B CN120110347B CN202510594442.1A CN202510594442A CN120110347B CN 120110347 B CN120110347 B CN 120110347B CN 202510594442 A CN202510594442 A CN 202510594442A CN 120110347 B CN120110347 B CN 120110347B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H01J37/32174—Circuits specially adapted for controlling the RF discharge
- H01J37/32183—Matching circuits
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H7/00—Multiple-port networks comprising only passive electrical elements as network components
- H03H7/38—Impedance-matching networks
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- Plasma & Fusion (AREA)
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Abstract
本发明公开了一种阻抗匹配器及匹配方法、射频电源系统和等离子体源系统。该阻抗匹配器包括：阻抗匹配模块、控制模块、可调电容模块和开关模块；可调电容模块包括多个串联连接的可调电容单元；可调电容单元与其对应的开关单元并联连接；控制模块用于在负载处于当前阻抗时，控制至少一个开关单元断开同时控制至少一个开关单元导通，并根据负载的下一阻抗调节至少一个导通的开关单元对应的可调电容单元的电容值，以使电容值被调节后的可调电容单元形成的总电容值与负载的下一阻抗相匹配。本发明可以在负载的阻抗发生变化的同时实现射频电源模块与负载之间的阻抗匹配，可快速实现阻抗匹配。
The present invention discloses an impedance matcher and a matching method, a radio frequency power supply system and a plasma source system. The impedance matcher includes: an impedance matching module, a control module, an adjustable capacitor module and a switch module; the adjustable capacitor module includes a plurality of adjustable capacitor units connected in series; the adjustable capacitor unit is connected in parallel with its corresponding switch unit; the control module is used to control at least one switch unit to be disconnected and at least one switch unit to be turned on when the load is at the current impedance, and adjust the capacitance value of the adjustable capacitor unit corresponding to at least one turned-on switch unit according to the next impedance of the load, so that the total capacitance value formed by the adjustable capacitor unit after the capacitance value is adjusted matches the next impedance of the load. The present invention can achieve impedance matching between the radio frequency power supply module and the load while the impedance of the load changes, and can quickly achieve impedance matching.
Description
Technical Field
The present invention relates to the field of radio frequency technologies, and in particular, to an impedance matcher, a matching method, a radio frequency power supply system, and a plasma source system.
Background
At present, with the development of radio frequency power supply technology, the requirement for impedance matching between a radio frequency power supply module and a load is also higher and higher.
The impedance matcher is usually installed between the rf power module and the load, and at present, a common way is to perform impedance matching on the rf power module and the load by adjusting a capacitance value of an adjustable capacitor in the impedance matcher.
However, the current impedance matcher has the problem that the adjustment speed of the capacitance value is slow after the impedance of the load is changed, so that the impedance matching time between the radio frequency power supply module and the load is long.
Disclosure of Invention
The invention provides an impedance matcher, a matching method, a radio frequency power supply system and a plasma source system, which can realize impedance matching between a radio frequency power supply module and a load when the impedance of the load changes, and can quickly realize impedance matching.
According to an aspect of the present invention, there is provided an impedance matcher including an impedance matching module, a control module, an adjustable capacitance module, and a switching module;
the first end of the impedance matching module is electrically connected with the output end of the radio frequency power supply module, and the second end of the impedance matching module is electrically connected with the input end of the load;
the first end of the adjustable capacitance module is electrically connected with the first end of the impedance matching module, and the second end of the adjustable capacitance module is grounded;
The adjustable capacitance module comprises a plurality of adjustable capacitance units which are connected in series;
The switch module comprises switch units with the same quantity as the adjustable capacitance units;
The adjustable capacitance units are in one-to-one correspondence with the switch units, and are connected in parallel with the switch units corresponding to the adjustable capacitance units;
The control module is used for controlling at least one switch unit to be disconnected and at least one switch unit to be connected when the load is in the current impedance, adjusting the capacitance value of an adjustable capacitance unit corresponding to at least one connected switch unit according to the next impedance of the load so that the total capacitance value formed by the adjustable capacitance units after the capacitance value is adjusted is matched with the next impedance, and controlling the switch units corresponding to the next impedance to be disconnected and controlling the switch units corresponding to all the switch units except the switch units corresponding to the next impedance to be connected when the impedance of the load is changed from the current impedance to the next impedance, wherein the switch units corresponding to the next impedance are the switch units corresponding to the adjustable capacitance units corresponding to the switch units which are adjusted to be connected by the control module when the load is in the current impedance.
Optionally, the adjustable capacitance module includes two adjustable capacitance units connected in series;
The control module is used for controlling the switching unit corresponding to one adjustable capacitance unit to be switched off when the load is in the current impedance, controlling the switching unit corresponding to the other adjustable capacitance unit to be switched on at the same time, adjusting the capacitance value of the adjustable capacitance unit corresponding to the switched-on switching unit according to the next impedance of the load so that the adjusted capacitance value of the adjustable capacitance unit is matched with the next impedance, and controlling the switching unit to be switched on when the impedance of the load changes from the current impedance to the next impedance.
Optionally, the plurality of series-connected adjustable capacitance units includes an equal number of adjustable capacitance units as the impedance of the load;
each impedance of the load corresponds to one adjustable capacitance unit;
The control module is used for adjusting the capacitance value of the adjustable capacitance unit corresponding to each impedance of the load before each impedance of the load is formed, so that the capacitance value of each adjusted adjustable capacitance unit is matched with the impedance of the load corresponding to the adjusted capacitance value.
Optionally, the impedance matcher provided by the embodiment further comprises a detection module, wherein the detection module comprises an amplitude detection unit and a phase detection unit;
the amplitude detection unit is used for detecting the voltage amplitude and the current amplitude output by the radio frequency power supply module;
The phase detection unit is used for detecting the voltage phase and the current phase output by the radio frequency power supply module;
The control module is used for adjusting the output frequency of the radio frequency power supply module according to the voltage amplitude, the current amplitude, the voltage phase and the current phase.
Optionally, the impedance matcher provided in this embodiment further includes a directional coupling module;
the directional coupling module is used for detecting reverse power between the radio frequency power supply module and the load;
The control module is used for adjusting the output frequency of the radio frequency power supply module according to the reverse power.
Optionally, the impedance matcher provided in this embodiment further includes an alarm module;
the directional coupling module is also used for detecting forward power between the radio frequency power supply module and the load;
the control module is also used for controlling the alarm module to send out an alarm signal when the forward power is smaller than the set power.
Optionally, the impedance matching module includes at least one fixed inductor and at least one fixed capacitor;
the fixed inductor and the fixed capacitor are connected in series;
the adjustable capacitance unit comprises at least one adjustable capacitance.
According to another aspect of the present invention, there is provided an impedance matching method applied to the impedance matcher provided by any embodiment of the present invention;
the impedance matching method comprises the following steps:
When the load is in the current impedance, the control module controls at least one switch unit to be disconnected and at least one switch unit to be conducted, and adjusts the capacitance value of an adjustable capacitance unit corresponding to at least one conducted switch unit according to the next impedance of the load, so that the total capacitance value formed by the adjustable capacitance unit with the adjusted capacitance value is matched with the next impedance;
When the impedance of the load changes from the current impedance to the next impedance, the control module controls the switching units corresponding to the next impedance to be disconnected and controls the switching units except the switching units corresponding to the next impedance to be conducted in all the switching units, wherein the switching units corresponding to the next impedance are the switching units corresponding to the adjustable capacitance units corresponding to the switching units, which are conducted by the control module when the load is in the current impedance.
According to another aspect of the present invention, there is provided a radio frequency power supply system including a radio frequency power supply module and an impedance matcher provided by any embodiment of the present invention.
According to another aspect of the present invention, there is provided a plasma source system comprising a reaction chamber and a radio frequency power supply system as provided by any of the embodiments of the present invention.
The embodiment of the invention provides an impedance matcher, which is connected between a radio frequency power supply module and a load. When the load is in the current impedance, the control module in the impedance matcher obtains the total capacitance value according to the capacitance value of the adjustable capacitance unit corresponding to the switch unit conducted by the next impedance adjusting part of the load. When the impedance of the load changes from the current impedance to the next impedance, controlling the sum of capacitance values of the working adjustable capacitance units in the impedance matcher to be a total capacitance value, wherein the total capacitance value is matched with the next impedance, and therefore the impedance matcher is ensured to realize the matching of the impedance of the radio frequency power supply module and the impedance of the load while the impedance of the load changes. When the load is a reaction chamber, the type of gas, the flow rate of the gas, the pressure of the gas, the power of the pulse output by the radio frequency power supply module and the like in the reaction chamber can cause the change of the impedance of the load, and the control module in the embodiment of the invention can acquire the value of the impedance in the load and the moment of the change of the impedance in advance. The impedance matcher provided by the embodiment of the invention can adjust the total capacitance value corresponding to the load with the changed impedance before the impedance of the load is changed, so that the impedance of the load is changed, and meanwhile, the matching is realized by controlling the disconnection of the switch unit, and the capacitance value is not required to be adjusted for multiple times according to the changed impedance after the impedance of the load is changed. Therefore, the impedance matcher provided by the embodiment of the invention can basically realize impedance matching between the radio frequency power supply module and the load when the impedance of the load changes, and can quickly realize impedance matching.
It should be understood that the description in this section is not intended to identify key or critical features of the embodiments of the invention or to delineate the scope of the invention. Other features of the present invention will become apparent from the description that follows.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required for the description of the embodiments will be briefly described below, and it is apparent that the drawings in the following description are only some embodiments of the present invention, and other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic diagram of an impedance matcher in accordance with the teachings of the present invention;
fig. 2 is a schematic structural diagram of an impedance matcher according to an embodiment of the present invention when the impedance matcher is electrically connected to a radio frequency power module and a load;
FIG. 3 is a schematic diagram of an impedance matcher according to an embodiment of the present invention when electrically connected to a radio frequency power module and a load;
FIG. 4 is a schematic diagram of an impedance matcher according to an embodiment of the present invention when electrically connected to a radio frequency power module and a load;
FIG. 5 is a schematic diagram of an impedance matcher according to an embodiment of the present invention when electrically connected to a radio frequency power module and a load;
FIG. 6 is a schematic diagram of an impedance matcher electrically connected to a radio frequency power module and a load according to another embodiment of the present invention;
Fig. 7 is a flowchart of an impedance matching method according to an embodiment of the present invention.
Detailed Description
In order that those skilled in the art will better understand the present invention, a technical solution in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in which it is apparent that the described embodiments are only some embodiments of the present invention, not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the present invention without making any inventive effort, shall fall within the scope of the present invention.
It should be noted that the terms "first," "second," and the like in the description and the claims of the present invention and the above figures are used for distinguishing between similar objects and not necessarily for describing a particular sequential or chronological order. It is to be understood that the data so used may be interchanged where appropriate such that the embodiments of the invention described herein may be implemented in sequences other than those illustrated or otherwise described herein. Furthermore, the terms "comprises," "comprising," and "having," and any variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, system, article, or apparatus that comprises a list of steps or elements is not necessarily limited to those steps or elements expressly listed but may include other steps or elements not expressly listed or inherent to such process, method, article, or apparatus.
Fig. 1 is a schematic structural diagram of an impedance matcher according to the present technology, and referring to fig. 1, the impedance matcher is connected between a radio frequency power module and a load, and the impedance matcher includes a control module, a first tunable capacitor CL1 and a second tunable capacitor CT1. When the impedance of the load changes, the control module adjusts the capacitance value of the first adjustable capacitor CL1 and the capacitance value of the second adjustable capacitor CT1 according to the changed impedance to ensure impedance matching between the radio frequency power supply module and the load, however, the adjustment speed of the capacitance value is too slow, higher matching delay exists, and impedance matching cannot be realized rapidly.
In order to solve the problem of the impedance matching delay, the embodiment of the invention provides an impedance matcher which can realize impedance matching between a radio frequency power supply module and a load while the impedance of the load changes.
Fig. 2 is a schematic structural diagram of an impedance matcher electrically connected to a radio frequency power module and a load according to an embodiment of the present invention, referring to fig. 2, the impedance matcher 100 provided in this embodiment includes an impedance matching module 110, a control module 120, an adjustable capacitance module 130 and a switch module 140, a first end of the impedance matching module 110 is electrically connected to an output end of the radio frequency power module 200, a second end of the impedance matching module 110 is electrically connected to an input end of the load 300, a first end of the adjustable capacitance module 130 is electrically connected to a first end of the impedance matching module 110, a second end of the adjustable capacitance module 130 is grounded, the adjustable capacitance module 130 includes a plurality of adjustable capacitance units 131 connected in series, the switch module 140 includes switch units 141 equal in number to the adjustable capacitance units 131, the adjustable capacitance units 131 are in one-to-one correspondence with the switch units 141, and the switch units 141 corresponding to the adjustable capacitance units are connected in parallel, the control module 120 is used for controlling the at least one switch unit 141 to be turned off when the load 300 is at a current impedance, and for adjusting the next impedance of the at least one switch unit 141 to be turned on, the next value of the switch unit 141 is controlled to be turned off when the next impedance of the current impedance of the load 300 is changed, and the value of the switch unit 141 is turned off, and the current value of the switch unit 141 is controlled to be turned off, the switching unit 141 corresponding to the next impedance is the switching unit 141 corresponding to the adjustable capacitor unit 131 corresponding to the switching unit 141 that the control module 120 adjusts to be turned on when the load 300 is at the current impedance.
Specifically, the number of the tunable capacitance units 131 in the impedance matcher 100 provided in this embodiment may be 2, 3,4, 5, or the like. The number of the switching units 141 is equal to the number of the adjustable capacitance units 131. An adjustable capacitor 131 may include an adjustable capacitor, and may also include a plurality of adjustable capacitors connected in series or in parallel.
The working states of the switching unit 141 provided in this embodiment are 2, in which one working state is on and the other working state is off. In the process of the rf power module 200 outputting rf energy to the load 300, since current flows through the adjustable capacitance unit 131 corresponding to the opened switch unit 141, the capacitance value of the adjustable capacitance unit 131 corresponding to the opened switch unit 141 affects the impedance matching between the load 300 and the rf power module 200. Since the current does not flow through the adjustable capacitance unit 131 corresponding to the turned-on switch unit 141, the capacitance value of the adjustable capacitance unit 131 corresponding to the turned-on switch unit 141 does not affect the impedance matching between the load 300 and the rf power module 200. The impedance matching module 110 and the tunable capacitor unit 131 corresponding to the turned-off switch unit 141 in the present embodiment cooperate to match the impedance between the rf power module 200 and the load 300. The impedance matching module 110 may include a fixed inductor, a fixed inductor and a fixed capacitor connected in series, a fixed inductor and a tunable capacitor connected in series, and the like.
The control module 120 is electrically connected to the control terminal of each adjustable capacitor unit 131, and the control module 120 can adjust the capacitance value of each adjustable capacitor unit 131. The control module 120 is electrically connected to the control terminal of each switch unit 141, and the control module 120 can control each switch unit 141 to be turned on or turned off.
When the load 300 is at the current impedance, the control module 120 may control one of the switching units 141 to be turned off, and simultaneously control the remaining switching units 141 in the switching module 140 to be turned on, or may control two or more switching units 141 to be turned off, and simultaneously control the remaining switching units 141 except for the turning off to be turned on. The switching unit 141 may be a switching transistor.
The total capacitance value is a total capacitance value formed after the control module 120 adjusts the capacitance value of the adjustable capacitance unit 131 corresponding to the turned-on switch unit 141 when the load 300 is at the current impedance, and for example, if the load 300 is at the current impedance, the control module 120 adjusts the capacitance value of the adjustable capacitance unit 131 corresponding to the turned-on switch unit 141, and the adjusted capacitance value of the adjustable capacitance unit 131 is the total capacitance value. If the load 300 is at the current impedance, the control module 120 adjusts the capacitance values of the adjustable capacitance units 131 corresponding to the two turned-on switch units 141, and the adjusted capacitance values of the two adjustable capacitance units 131 after being connected in series are the total capacitance value. The matching of the total capacitance value with the next impedance of the load 300 means that when the impedance of the load 300 is the next impedance, the matching value corresponding to the impedance matching module 110 can match the impedance of the rf power module 200 with the impedance of the load 300. Different impedances correspond to different total capacitance values. The control module 120 is further configured to store total capacitance values corresponding to different impedances, and when the next impedance of the load 300 is obtained, the control module 120 is configured to determine the total capacitance value corresponding to the next impedance, and adjust the capacitance value of the adjustable capacitance unit 131 corresponding to the on switch unit 141 to adjust to the total capacitance value.
The current impedance of the load 300 is the impedance of the load 300 at the current stage, the next impedance of the load 300 refers to the impedance of the load 300 at the next stage, the current impedance is not equal to the next impedance, and the next impedance of the load 300 is adjacent to the current impedance of the load 300 and is generated after the current impedance. The different power of the pulses output by the rf power module 200 may cause the impedance of the load 300 to be different. When the load 300 is a reaction chamber that can generate plasma, the impedance of the reaction chamber (i.e., the impedance of the load 300) is related to the kind of gas input into the reaction chamber, the gas pressure (also understood as the pressure of the reaction chamber), and the flow rate of the gas. When at least one of the kind of gas, the gas pressure of the gas, and the flow rate of the gas in the reaction chamber is changed, the impedance of the reaction chamber is changed. The power of the pulse output by the rf power module 200 can be set in advance when it is changed, and the type, pressure and flow rate of the gas input into the load 300 can be set in advance when it is changed, so that the impedance of the load 300 can be changed when it is changed, and the impedance after the change can be set in advance. The control module 120 may also store the impedance of the load 300 at different time periods.
The control module 120 may also determine the impedance of the load 300 and the moment of the impedance change by acquiring the power of the pulse output by the rf power module 200 and the moment of the change in the pulse power, acquiring the air pressure of the air input into the load 300 and the moment of the change in the air flow rate and the flow rate of the air input into the load 300, and determining the impedance of the load 300 and the moment of the change in the impedance.
The power of each pulse, each gas pressure, each flow rate of the gas, and the total capacitance value corresponding to each type of the gas can be obtained in advance. When the load 300 is at the current impedance, the control module 120 may determine the next impedance of the load 300 and the total capacitance corresponding to the next impedance by acquiring the power of the pulse output by the rf power module 200 at the next stage, the type, the flow rate and the air pressure of the air input into the load 300 at the next stage, and adjust the capacitance of the adjustable capacitance unit 131 corresponding to the at least one on switch unit 141 to obtain the total capacitance corresponding to the next impedance, so that when the impedance of the load 300 changes from the current impedance to the next impedance, the switch unit 141 corresponding to the adjustable capacitance unit 131 with the adjusted capacitance is turned off, so that the capacitance corresponding to the working adjustable capacitance unit 131 in the impedance matcher 100 is the total capacitance. Namely, when the impedance of the load 300 changes to the next impedance, the impedance matcher 100 provided in this embodiment can immediately output the total capacitance value and the matching value corresponding to the impedance matching module 110, and only the switching unit 141 needs to be turned off, so that impedance matching between the load 300 and the rf power module 200 after the impedance of the load 300 changes can be achieved, and the matching speed can reach microsecond magnitude.
The impedance matcher 100 provided in this embodiment is applicable to the rf power module 200 outputting single-stage pulses, or to the rf power module 200 outputting multi-stage pulses. Illustratively, when the power of the pulse output by the rf power module 200 changes, the impedance of the load 300 will change. The control module 120 in this embodiment may obtain the power of the rf power module 200 outputting the next pulse when the rf power module 200 outputs the current pulse, thereby obtaining the next impedance of the load 300, and obtain the total capacitance according to the capacitance value of the adjustable capacitance unit 131 corresponding to the switch unit 141 turned on by the next impedance adjusting portion, and turn off the switch unit 141 corresponding to the adjustable capacitance unit 131 whose capacitance value is adjusted when the output pulse of the rf power module 200 is switched from the current pulse to the next pulse.
The embodiment provides an impedance matcher, which is connected between a radio frequency power supply module and a load. When the load is in the current impedance, the control module in the impedance matcher obtains the total capacitance value according to the capacitance value of the adjustable capacitance unit corresponding to the switch unit conducted by the next impedance adjusting part of the load. When the impedance of the load changes from the current impedance to the next impedance, controlling the sum of capacitance values of the working adjustable capacitance units in the impedance matcher to be a total capacitance value, wherein the total capacitance value is matched with the next impedance, and therefore the impedance matcher is ensured to realize the matching of the impedance of the radio frequency power supply module and the impedance of the load while the impedance of the load changes. When the load is a reaction chamber, the type of gas in the reaction chamber, the flow rate of the gas, the pressure of the gas, the power of the pulse output by the radio frequency power supply module and the like can cause the change of the impedance of the load, and the control module in the embodiment can acquire the value of the impedance in the load and the moment of the change of the impedance in advance. The impedance matcher provided by the embodiment can adjust the total capacitance value corresponding to the load with the changed impedance before the impedance of the load is changed, so that the impedance of the load is changed, and meanwhile, the matching is realized by controlling the disconnection of the switch unit, and the capacitance value is not required to be adjusted for multiple times according to the changed impedance after the impedance of the load is changed. Therefore, the impedance matcher provided by the embodiment can basically realize impedance matching between the radio frequency power supply module and the load when the impedance of the load changes, and can quickly realize impedance matching.
Optionally, fig. 3 is a schematic structural diagram of an impedance matcher electrically connected to a radio frequency power module and a load according to an embodiment of the present invention, referring to fig. 3, the adjustable capacitance module 130 includes two series-connected adjustable capacitance units 131, and the control module 120 is configured to control, when the load 300 is at a current impedance, the switch unit 141 corresponding to one adjustable capacitance unit 131 to be turned off, and simultaneously control the switch unit 141 corresponding to the other adjustable capacitance unit 131 to be turned on, and adjust the capacitance value of the adjustable capacitance unit 131 corresponding to the turned-on switch unit 141 according to the next impedance of the load 300, so that the capacitance value of the adjusted adjustable capacitance unit 131 matches the next impedance of the load 300, and is further configured to control, when the impedance of the load 300 changes from the current impedance to the next impedance, the switch unit 141 that is turned off at the same time as the switch unit 141 that is turned on at the current.
Specifically, the matching of the capacitance value of the adjusted adjustable capacitance unit 131 with the next impedance of the load 300 means that when the impedance of the load 300 is the next impedance, the matching value corresponding to the impedance matching module 110 and the capacitance value of the adjusted adjustable capacitance unit 131 can match the impedance of the rf power module 200 with the impedance of the load 300.
The two switching units 141 in this embodiment are not simultaneously turned on, nor are they simultaneously turned off. The control module 120 is configured to control one switch unit 141 to be turned on and the other switch unit 141 to be turned off when the load 300 is at the current impedance, and adjust the capacitance value of the adjustable capacitance unit 131 corresponding to the turned-on switch unit 141 to the capacitance value corresponding to the next impedance of the load 300 according to the next impedance of the load 300, so as to ensure that the impedance of the load 300 is matched with the impedance of the load 300 immediately when the impedance of the load 300 changes from the current impedance to the next impedance. For example, the two switch units 141 are denoted as a first switch unit and a second switch unit, the impedance change sequence of the load 300 sequentially includes 100Ω, 200Ω, 300Ω, 400Ω, and during the impedance of the load 300 is 100deg.Ω, the control module 120 controls the first switch unit to be turned off and the second switch unit to be turned on, and adjusts the capacitance value of the adjustable capacitance unit 131 corresponding to the second switch unit according to 200Ω. When the impedance of the load 300 is switched from 100deg.C to 200Ω, the control module 120 controls the first switch unit to be turned on, and controls the second switch unit to be turned off, and in the process that the impedance of the load 300 is 200Ω, the control module 120 adjusts the capacitance value of the adjustable capacitance unit 131 corresponding to the first switch unit according to 300Ω. When the impedance of the load 300 is switched from 200Ω to 300Ω, the control module 120 controls the second switching unit to be turned on, and simultaneously controls the first switching unit to be turned off, and when the impedance of the load 300 is 300Ω, the control module 120 adjusts the capacitance value of the adjustable capacitance unit 131 corresponding to the second switching unit according to 400Ω, and when the impedance of the load 300 is switched from 300Ω to 400Ω, the control module 120 controls the first switching unit to be turned on, and simultaneously controls the second switching unit to be turned off.
The impedance matcher 100 provided in this embodiment is provided with two adjustable capacitance units 131 and two switch units 141, and by controlling the two switch units 141 to be alternately turned on, impedance matching between the radio frequency power module 200 and the load 300 can be still ensured when the impedance of the load 300 changes, the number of devices in the impedance matcher 100 is reduced, and the cost of the impedance matcher 100 is reduced.
Optionally, with continued reference to fig. 2 or fig. 3, the plurality of adjustable capacitor units 131 connected in series include adjustable capacitor units 131 equal to the impedance of the load 300, each impedance of the load 300 corresponds to an adjustable capacitor unit 131, and the control module 120 is configured to adjust the capacitance value of the adjustable capacitor unit 131 corresponding to each impedance of the load 300 before each impedance of the load 300 is formed, so that the capacitance value of each adjusted adjustable capacitor unit 131 matches the impedance of the corresponding load 300.
For example, the rf power module 200 may output multiple pulses, and the power of each pulse is different, and the same power is the same pulse. Each pulse output by the rf power module 200 corresponds to an adjustable capacitor unit 131, and before each pulse is output, the control module 120 adjusts the capacitance value of the adjustable capacitor unit 131 corresponding to the pulse, and switches off the switch unit 141 corresponding to the adjustable capacitor unit 131 corresponding to the pulse after switching while turning on all the switch units 141 not corresponding to the pulse.
The number of the adjustable capacitance units 131 in the impedance matcher 100 provided in this embodiment is the same as the number of the impedances of the load 300, and when the impedance of the load 300 changes, the switch unit 141 corresponding to the impedance of the load 300 is directly turned off. The capacitance value of the adjustable capacitance unit 131 corresponding to each impedance is adjusted according to each impedance of the load 300, so that the impedance of the load 300 can be changed, and then the impedance matching between the rf power module 200 and the load 300 can be realized immediately.
Optionally, fig. 4 is a schematic structural diagram of still another impedance matcher provided in accordance with an embodiment of the present invention when the impedance matcher is electrically connected to a radio frequency power module and a load, and referring to fig. 4, the impedance matcher 100 further includes a detection module 150, the detection module 150 includes an amplitude detection unit 151 and a phase detection unit 152, the amplitude detection unit 151 is configured to detect a voltage amplitude and a current amplitude output by the radio frequency power module 200, the phase detection unit 152 is configured to detect a voltage phase and a current phase output by the radio frequency power module 200, and the control module 120 is configured to adjust an output frequency of the radio frequency power module 200 according to the voltage amplitude, the current amplitude, the voltage phase and the current phase.
Specifically, the amplitude detection unit 151 and the phase detection unit 152 are electrically connected to the control module 120, the amplitude detection unit 151 is configured to send the detected voltage amplitude and the detected current amplitude to the control module 120, and the phase detection unit 152 is configured to send the detected voltage phase and the detected current phase to the control module 120. The control module 120 may monitor the current impedance matching condition of the rf power module 200 and the load 300 according to the voltage amplitude, the current amplitude, the voltage phase and the current phase, and send a first frequency adjustment signal to the rf power module 200 when the impedance matching of the rf power module 200 and the load 300 does not meet the set requirement, and adjust the output frequency of the rf power module 200 after the rf power module 200 receives the first frequency adjustment signal, so that the adjusted output frequency of the rf power module 200 may ensure the impedance matching of the rf power module 200 and the load 300 under the current condition, thereby improving the impedance matching precision of the rf power module 200 and the load 300.
Optionally, fig. 5 is a schematic structural diagram of still another impedance matcher provided in accordance with an embodiment of the present invention when the impedance matcher is electrically connected to a radio frequency power module and a load, and referring to fig. 5, the impedance matcher 100 provided in this embodiment further includes a directional coupling module 160, the directional coupling module 160 is configured to detect reverse power between the radio frequency power module 200 and the load 300, and the control module 120 is configured to adjust an output frequency of the radio frequency power module 200 according to the reverse power.
Specifically, the directional coupling module 160 may be a directional coupler, and the directional coupling module 160 is connected between the rf power module 200 and the load 300. The directional coupling module 160 is also electrically connected to the control module 120, and the directional coupling module 160 may transmit reverse power into the control module 120. The control module 120 may determine the current impedance matching condition of the rf power module 200 and the load 300 according to the reverse power, and send a second frequency adjustment signal to the rf power module 200 when the impedance matching of the rf power module 200 and the load 300 does not meet the set requirement, and adjust the output frequency of the rf power module 200 after the rf power module 200 receives the second frequency adjustment signal, so that the adjusted output frequency of the rf power module 200 may ensure the impedance matching of the rf power module 200 and the load 300, thereby further improving the impedance matching accuracy of the rf power module and the load.
Optionally, with continued reference to fig. 5, the impedance matcher 100 provided in this embodiment further includes an alarm module 170, the directional coupling module 160 is further configured to detect forward power between the radio frequency power module 200 and the load 300, and the control module 120 is further configured to control the alarm module 170 to send an alarm signal when the forward power is less than the set power.
Specifically, the forward power may reflect the actual output power of the rf power module 200. When the control module 120 detects that the forward power is smaller than the set power, it indicates that the actual power output by the rf power module 200 does not meet the requirement of the load 300, and at this time, the control module 120 may control the alarm module 170 to send an alarm signal, so as to prompt a worker to check the situation in time.
Optionally, fig. 6 is a schematic structural diagram of still another impedance matcher electrically connected to a radio frequency power module and a load according to an embodiment of the present invention, referring to fig. 6, the impedance matching module 110 includes at least one fixed inductance LT and at least one fixed capacitance CT, the fixed inductance LT and the fixed capacitance CT are connected in series, and the adjustable capacitance unit 131 includes at least one adjustable capacitance CL.
Specifically, the impedance matching module 110 includes a fixed inductance LT and a fixed capacitance CT connected in series, and it can be seen that, in order to ensure impedance matching between the rf power module 200 and the load 300, the impedance matching module 110 provided in this embodiment only needs to adjust the capacitance value of the adjustable capacitance CL corresponding to the switch unit 141 that is disconnected, thereby avoiding increasing the adjustment complexity by adjusting a plurality of adjustable capacitances CL.
Fig. 7 is a schematic flow chart of an impedance matching method according to an embodiment of the present invention, where the impedance matching method provided in the embodiment is applied to an impedance matcher provided in any embodiment of the present invention.
Referring to fig. 7, the impedance matching method provided in the present embodiment includes the following steps:
And S110, when the load is in the current impedance, the control module controls at least one switch unit to be disconnected and at least one switch unit to be conducted, and adjusts the capacitance value of the adjustable capacitance unit corresponding to the at least one conducted switch unit according to the next impedance of the load, so that the total capacitance value formed by the adjustable capacitance unit with the adjusted capacitance value is matched with the next impedance.
And S120, when the impedance of the load is changed from the current impedance to the next impedance, the control module controls the switching units corresponding to the next impedance to be disconnected and controls the switching units except the switching units corresponding to the next impedance to be conducted in all the switching units, wherein the switching units corresponding to the next impedance are the switching units corresponding to the adjustable capacitance units corresponding to the switching units of which the load is in the current impedance and the control module adjusts and conducts.
The impedance matching method provided by the embodiment of the present invention has the same technical effects as the impedance matcher provided by any embodiment of the present invention, and details of the impedance matching method provided by the embodiment of the present invention are not described in detail, please refer to the content of the impedance matcher provided by any embodiment of the present invention.
The radio frequency power supply system provided by the embodiment comprises a radio frequency power supply module and the impedance matcher provided by any embodiment of the invention. Therefore, the radio frequency power supply system includes the beneficial effects of the impedance matcher according to any embodiment of the present invention, and will not be described herein.
The embodiment also provides a plasma source system, which comprises a reaction chamber and the radio frequency power supply system provided by any embodiment of the invention. Therefore, the radio frequency power supply system includes the beneficial effects of the impedance matcher according to any embodiment of the present invention, and will not be described herein.
It should be appreciated that various forms of the flows shown above may be used to reorder, add, or delete steps. For example, the steps described in the present invention may be performed in parallel, sequentially, or in a different order, so long as the desired results of the technical solution of the present invention are achieved, and the present invention is not limited herein.
The above embodiments do not limit the scope of the present invention. It will be apparent to those skilled in the art that various modifications, combinations, sub-combinations and alternatives are possible, depending on design requirements and other factors. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the scope of the present invention.
Claims (10)
1. The impedance matcher is characterized by comprising an impedance matching module, a control module, an adjustable capacitance module and a switch module;
the first end of the impedance matching module is electrically connected with the output end of the radio frequency power supply module, and the second end of the impedance matching module is electrically connected with the input end of the load;
the first end of the adjustable capacitance module is electrically connected with the first end of the impedance matching module, and the second end of the adjustable capacitance module is grounded;
The adjustable capacitance module comprises a plurality of adjustable capacitance units which are connected in series;
The switch module comprises switch units with the same quantity as the adjustable capacitance units;
The adjustable capacitance units are in one-to-one correspondence with the switch units, and are connected in parallel with the switch units corresponding to the adjustable capacitance units;
The control module is used for controlling at least one switch unit to be disconnected and at least one switch unit to be connected when the load is in the current impedance, adjusting the capacitance value of an adjustable capacitance unit corresponding to at least one connected switch unit according to the next impedance of the load so that the total capacitance value formed by the adjustable capacitance units after the capacitance value is adjusted is matched with the next impedance, and controlling the switch units corresponding to the next impedance to be disconnected and controlling the switch units corresponding to all the switch units except the switch units corresponding to the next impedance to be connected when the impedance of the load is changed from the current impedance to the next impedance, wherein the switch units corresponding to the next impedance are the switch units corresponding to the adjustable capacitance units corresponding to the switch units which are adjusted to be connected by the control module when the load is in the current impedance.
2. The impedance matcher of claim 1 wherein the tunable capacitance module comprises two series-connected tunable capacitance units;
The control module is used for controlling the switching unit corresponding to one adjustable capacitance unit to be switched off when the load is in the current impedance, controlling the switching unit corresponding to the other adjustable capacitance unit to be switched on at the same time, adjusting the capacitance value of the adjustable capacitance unit corresponding to the switched-on switching unit according to the next impedance of the load so that the adjusted capacitance value of the adjustable capacitance unit is matched with the next impedance, and controlling the switching unit to be switched on when the impedance of the load changes from the current impedance to the next impedance.
3. The impedance matcher of claim 1 wherein the plurality of series-connected tunable capacitive units includes a number of tunable capacitive units equal to the impedance of the load;
each impedance of the load corresponds to one adjustable capacitance unit;
The control module is used for adjusting the capacitance value of the adjustable capacitance unit corresponding to each impedance of the load before each impedance of the load is formed, so that the capacitance value of each adjusted adjustable capacitance unit is matched with the impedance of the load corresponding to the adjusted capacitance value.
4. The impedance matcher of claim 1 further comprising a detection module, the detection module comprising an amplitude detection unit and a phase detection unit;
the amplitude detection unit is used for detecting the voltage amplitude and the current amplitude output by the radio frequency power supply module;
The phase detection unit is used for detecting the voltage phase and the current phase output by the radio frequency power supply module;
The control module is used for adjusting the output frequency of the radio frequency power supply module according to the voltage amplitude, the current amplitude, the voltage phase and the current phase.
5. The impedance matcher of claim 1 further comprising a directional coupling module;
the directional coupling module is used for detecting reverse power between the radio frequency power supply module and the load;
The control module is used for adjusting the output frequency of the radio frequency power supply module according to the reverse power.
6. The impedance matcher of claim 5 further comprising an alarm module;
the directional coupling module is also used for detecting forward power between the radio frequency power supply module and the load;
the control module is also used for controlling the alarm module to send out an alarm signal when the forward power is smaller than the set power.
7. The impedance matcher of any of claims 1-6 wherein the impedance matching module comprises at least one fixed inductance and at least one fixed capacitance;
the fixed inductor and the fixed capacitor are connected in series;
the adjustable capacitance unit comprises at least one adjustable capacitance.
8. An impedance matching method, characterized in that the impedance matching method is applied to the impedance matcher according to any one of claims 1 to 7;
the impedance matching method comprises the following steps:
When the load is in the current impedance, the control module controls at least one switch unit to be disconnected and at least one switch unit to be conducted, and adjusts the capacitance value of an adjustable capacitance unit corresponding to at least one conducted switch unit according to the next impedance of the load, so that the total capacitance value formed by the adjustable capacitance unit with the adjusted capacitance value is matched with the next impedance;
When the impedance of the load changes from the current impedance to the next impedance, the control module controls the switching units corresponding to the next impedance to be disconnected and controls the switching units except the switching units corresponding to the next impedance to be conducted in all the switching units, wherein the switching units corresponding to the next impedance are the switching units corresponding to the adjustable capacitance units corresponding to the switching units, which are conducted by the control module when the load is in the current impedance.
9. A radio frequency power supply system comprising a radio frequency power supply module and an impedance matcher according to any one of claims 1-7.
10. A plasma source system comprising a reaction chamber and the rf power system of claim 9.
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| CN116800243A (en) * | 2023-06-28 | 2023-09-22 | 武汉大学 | Millimeter wave switch circuit based on impedance matching and impedance adjusting method |
| CN119254172A (en) * | 2024-09-30 | 2025-01-03 | 深圳市瀚强科技股份有限公司 | Impedance matching box and RF power supply system |
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| KR102057446B1 (en) * | 2015-10-02 | 2019-12-19 | 주식회사 원익아이피에스 | Impedance matching apparatus to plasma process chamber |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN116800243A (en) * | 2023-06-28 | 2023-09-22 | 武汉大学 | Millimeter wave switch circuit based on impedance matching and impedance adjusting method |
| CN119254172A (en) * | 2024-09-30 | 2025-01-03 | 深圳市瀚强科技股份有限公司 | Impedance matching box and RF power supply system |
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