CN120253684A - Edge detection system and lighting device - Google Patents
Edge detection system and lighting device Download PDFInfo
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- CN120253684A CN120253684A CN202510756948.8A CN202510756948A CN120253684A CN 120253684 A CN120253684 A CN 120253684A CN 202510756948 A CN202510756948 A CN 202510756948A CN 120253684 A CN120253684 A CN 120253684A
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Abstract
The application relates to the technical field of optical detection, in particular to an edge detection system and an illumination device. The edge detection system comprises an illumination module and an imaging module, wherein the illumination module is provided with a concave part surrounding the edge of a detected object, an axis surrounded by a concave surface of the concave part extends in a first direction, a first luminous surface for generating bright field detection light and a second luminous surface for generating dark field detection light are both arranged on the concave surface of the concave part at intervals in the first direction, the imaging module can respectively collect signal light formed by the reflection detection light of the edge of the detected object so as to obtain a bright field image and a dark field image of the edge of the detected object, and the first luminous surface and the second luminous surface integrated on the concave surface of the concave part can be matched with the imaging module so as to realize bright field detection and dark field detection of the edge of the detected object.
Description
Technical Field
The application relates to the technical field of optical detection, in particular to an edge detection system and an illumination device.
Background
The edge of the semiconductor is easy to generate defects in the manufacturing process, and the semiconductor with the edge defects flows into the subsequent manufacturing process to have great influence on the product performance. At present, an optical principle can be adopted to detect the defects of the semiconductor edge by a bright field detection mode.
When detecting each surface of the semiconductor edge by the bright field detection method, in order to acquire an image in the whole range of the semiconductor edge, light sources with different directions need to be arranged corresponding to each surface, so that the structure of the whole detection system is complex, the detection precision of bright field detection is limited, and for small defects, the single bright field detection method is not applicable any more in order to further improve the detection precision.
Disclosure of Invention
The application provides an edge detection system and a lighting device, which are used for solving the technical problems that the existing edge detection system is complex in structure and limited in detection precision.
According to an aspect of the present application, there is provided an edge detection system including:
The illumination module is used for encircling the edge of the object to be measured to form a concave part, an axis encircled by the concave surface of the concave part extends in a first direction, the illumination module is provided with a first luminous surface and a second luminous surface, the first luminous surface is used for generating bright field detection light, the second luminous surface is used for generating dark field detection light, the first luminous surface and the second luminous surface are arranged on the concave surface of the concave part at intervals in the first direction, and an included angle between the light emergent direction of the first luminous surface and the first direction is different from an included angle between the light emergent direction of the second luminous surface and the first direction;
The imaging module is used for collecting bright field signal light formed by reflecting the bright field detection light by the edge of the detected object so as to image the edge of the detected object and obtain a bright field image of the edge of the detected object, and is also used for collecting dark field signal light formed by scattering the dark field detection light by the edge of the detected object so as to image the edge of the detected object and obtain a dark field image of the edge of the detected object.
In an alternative embodiment, the lighting module includes a first light guide coupled to the first light emitting surface, the first light guide for transmitting bright field illumination light to the first light emitting surface to form the bright field detection light, and a second light guide coupled to the second light emitting surface, the second light guide for transmitting dark field illumination light to the second light emitting surface to form the dark field detection light.
In an alternative embodiment, the illumination module comprises a first illumination source coupled to the light entrance surface of the first light guide for generating the bright field illumination light and a second illumination source coupled to the light entrance surface of the second light guide for generating the dark field illumination light.
In an alternative embodiment, the first light emitting surface is an arc surface having an axis extending in the first direction, the arc angle of the first light emitting surface being selected from the range of 180 ° to 270 °, and/or,
The second light emitting surface is an arc surface with an axis extending in the first direction, and the arc angle of the second light emitting surface is selected from a range of 180 DEG to 270 deg.
In an alternative embodiment, the angle between the light emitting direction of the first light emitting surface and the first direction is selected from the range of 50 ° to 80 °, and the angle between the light emitting direction of the second light emitting surface and the first direction is selected from the range of 30 ° to 50 °.
In an alternative embodiment, the imaging module comprises a first image acquisition unit, a second image acquisition unit and a third image acquisition unit, wherein the edge of the object to be detected is provided with an upper inclined plane, an outer side plane and a lower inclined plane;
The first image acquisition unit acquires the bright field signal light reflected by the upper inclined plane of the edge of the measured object to generate a bright field image corresponding to the upper inclined plane, or acquires the dark field signal light scattered by the upper inclined plane of the edge of the measured object to generate a dark field image corresponding to the upper inclined plane;
the second image acquisition unit acquires the bright field signal light reflected by the outer side surface of the edge of the measured object to generate a bright field image corresponding to the outer side surface, or acquires the dark field signal light scattered by the outer side surface of the edge of the measured object to generate a dark field image corresponding to the outer side surface;
the third image acquisition unit acquires the bright field signal light reflected by the lower inclined plane of the edge of the measured object to generate a bright field image corresponding to the lower inclined plane, or acquires the dark field signal light scattered by the lower inclined plane of the edge of the measured object to generate a dark field image corresponding to the lower inclined plane.
According to an aspect of the present application, there is provided an illumination device including:
a light source for generating bright field illumination light and dark field illumination light;
The illumination assembly is used for receiving the bright field illumination light and emitting bright field detection light to the edge of the detected object or receiving the dark field illumination light and emitting dark field detection light to the edge of the detected object, the illumination assembly is provided with a concave part surrounding the edge of the detected object, an axis surrounded by a concave surface of the concave part extends in a first direction, the illumination assembly is also provided with a first luminous surface and a second luminous surface, the first luminous surface is used for receiving the bright field illumination light and emitting the bright field detection light, the second luminous surface is used for receiving the dark field illumination light and emitting the dark field detection light, the first luminous surface and the second luminous surface are arranged on the concave surface of the concave part at intervals in the first direction, and an included angle between the light emitting direction of the first luminous surface and the first direction is different from an included angle between the light emitting direction of the second luminous surface and the first direction.
In an alternative embodiment, the lighting device includes a first light guide member and a second light guide member, where each of the first light guide member and the second light guide member has a light incident surface, the light incident surface of the first light guide member is configured to receive the bright field illumination light, and the light incident surface of the second light guide member is configured to receive the dark field illumination light;
The first light guide member is coupled to the first light emitting surface to transmit the bright field illumination light to the first light emitting surface, and the second light guide member is coupled to the second light emitting surface to transmit the dark field illumination light to the second light emitting surface.
In an alternative embodiment, the concave surface has a first arc-shaped groove, the first light guide comprises a first optical fiber bundle composed of a plurality of thin optical fibers, the first optical fiber bundle is used for transmitting the bright field illumination light, the end surfaces of the thin optical fibers in the first optical fiber bundle are uniformly arranged in the first arc-shaped groove to form the first luminous surface, and/or,
The concave surface is provided with a second arc-shaped groove, the second light guide piece comprises a second optical fiber bundle composed of a plurality of thin optical fibers, the second optical fiber bundle is used for transmitting the dark field illumination light, and the end faces of the thin optical fibers in the second optical fiber bundle are uniformly arranged in the second arc-shaped groove to form a second light emitting surface.
In an alternative embodiment, the light source comprises a first illumination light source and a second illumination light source, the first illumination light source is coupled to the light incident surface of the first light guide, the first illumination light source is used for generating the bright field illumination light, the second illumination light source is coupled to the light incident surface of the second light guide, and the second illumination light source is used for generating the dark field illumination light.
In an alternative embodiment, the first light emitting surface is an arc surface, the arc angle of the first light emitting surface is selected from the range of 180 ° to 270 °, and/or the second light emitting surface is an arc surface, the arc angle of the second light emitting surface is selected from the range of 180 ° to 270 °.
In an alternative embodiment, the angle between the light emitting direction of the first light emitting surface and the first direction is selected from the range of 50 ° to 80 °, and the angle between the light emitting direction of the second light emitting surface and the first direction is selected from the range of 30 ° to 50 °.
According to the edge detection system and the illumination device, the edge detection system comprises the illumination module and the imaging module, the illumination module is provided with a concave part surrounding the edge of the object to be detected, an axis surrounded by the concave surface of the concave part extends in a first direction, the first luminous surface and the second luminous surface are both positioned on the concave surface of the concave part and are arranged at intervals in the first direction, the first luminous surface is used for generating bright field detection light, the second luminous surface is used for generating dark field detection light, an included angle between the light emitting direction of the first luminous surface and the first direction is different from an included angle between the light emitting direction of the second luminous surface and the first direction, and the imaging module can respectively collect bright field signal light formed by reflecting the bright field detection light by the edge of the object to be detected and dark field signal light formed by scattering the dark field detection light by the edge of the object to be detected so as to obtain bright field images and dark field images of the edge of the object to be detected. The first light-emitting surface and the second light-emitting surface are integrated on the concave surface of the concave part in the lighting module, and arc-shaped surrounding bright field lighting and dark field lighting modes are formed on the edge of the detected object, so that the integrated structure avoids the situation that bright and dark field lighting components are separately arranged and the lighting components are arranged along the edge in the past in a scattered manner, and can reduce the complexity of the lighting structure to the greatest extent.
Drawings
FIG. 1 is a schematic perspective view of a portion of an illumination module in an edge detection system according to an embodiment, and also a schematic perspective view of a portion of an illumination device according to an embodiment;
FIG. 2 is a front view of a portion of an illumination module in an edge detection system, and also of an illumination device of an embodiment;
FIG. 3 is a schematic diagram showing a relative positional relationship between a first light emitting surface and a second light emitting surface according to an embodiment;
FIG. 4 is a schematic diagram of the general structures of a first light emitting surface, a second light emitting surface, an imaging module and an object to be tested according to an embodiment (solid lines and broken lines with arrows in the drawing represent transmission paths of part of light during bright field detection and dark field detection, respectively);
fig. 5 is a schematic diagram of the general structure of an edge detection system and an object to be detected according to another embodiment (the solid line with an arrow in the figure indicates a transmission path of a part of light during bright field detection or dark field detection).
In the figure, 10, an illumination module, 11, an illumination device, 100, a shell, 110, an illumination assembly, 101, a first cavity, 102, a second cavity, 103, a concave part, 104, a concave surface, 1041, a first luminous surface, 1042, a second luminous surface, 200, a first light guide member, 300, a second light guide member, 40, an imaging module, 401, a first image acquisition unit, 402, a second image acquisition unit, 403, a third image acquisition unit, 50, a measured object, 501, an upper surface, 502, a lower surface, 503, an upper inclined surface, 504, an outer side surface, 505 and a lower inclined surface are shown.
In the description of the bracketed reference numbers in the drawings, the bracketed reference numbers refer to features represented by both bracketed and bracketed numbers.
Detailed Description
The application will be described in further detail below with reference to the drawings by means of specific embodiments. Wherein like elements in different embodiments are numbered alike in association. In the following embodiments, numerous specific details are set forth in order to provide a better understanding of the present application. However, one skilled in the art will readily recognize that some of the features may be omitted, or replaced by other elements, materials, or methods in different situations. In some instances, related operations of the present application have not been shown or described in the specification in order to avoid obscuring the core portions of the present application, and may be unnecessary to persons skilled in the art from a detailed description of the related operations, which may be presented in the description and general knowledge of one skilled in the art.
Furthermore, the features, operations, or characteristics described in the specification may be combined in any suitable manner to form various embodiments, and the operational steps involved in the embodiments may be sequentially exchanged or adjusted in a manner apparent to those skilled in the art. Accordingly, the description and drawings are merely for clarity of describing certain embodiments and are not necessarily intended to imply a required composition and/or order.
The numbering of the components itself, e.g. "first", "second", etc., is used herein merely to distinguish between the described objects and does not have any sequential or technical meaning. The term "coupled" as used herein includes both direct and indirect coupling (coupling), unless otherwise indicated.
The application discloses an edge detection system which is mainly used for detecting defects on the edge of an object 50 to be detected, wherein the object 50 to be detected comprises a semiconductor, a display screen substrate or other products which need to be detected by an optical principle. According to the edge detection system, the first light emitting surface 1041 and the second light emitting surface 1042 are integrated on the concave surface 104 of the concave part 103 in the lighting module 10 and are matched with the imaging module 40 to realize bright field detection and dark field detection of the edge of the detected object 50, so that the comprehensive detection capability and detection precision of the edge defect of the detected object 50 can be improved in a mode of combining bright field detection and dark field detection while the structure of the edge detection system is simplified.
Before describing the edge detection system of the present application, the shape of the edge of the object 50 to be detected will be described generally. Referring to fig. 5, the measured object 50 is generally in a sheet structure, where the measured object 50 has an upper surface 501 and a lower surface 502, the edge of the measured object 50 generally has an upper inclined surface 503, a lower inclined surface 505 and an outer side surface 504, the upper inclined surface 503 is connected to the lower inclined surface 505 through the outer side surface 504 in the thickness direction of the measured object 50, that is, in the up-down direction, the upper inclined surface 503 is also connected to the upper surface 501 of the measured object 50, the lower inclined surface 505 is also connected to the lower surface 502 of the measured object 50, the upper inclined surface 503 is understood as a transitional connection surface between the upper surface 501 and the outer side surface 504 of the measured object 50, and the lower inclined surface 505 is understood as a transitional connection surface between the lower surface 502 and the outer side surface 504 of the measured object 50.
The edge detection system of the present application includes an illumination module 10 and an imaging module 40, wherein the illumination module 10 has a first light emitting surface 1041 and a second light emitting surface 1042, the first light emitting surface 1041 is used for providing bright field detection light to the edge of the object 50 so as to enable the bright field detection light to be reflected by the edge of the object 50 to form bright field signal light, the second light emitting surface 1042 is used for providing dark field detection light to the edge of the object 50 so as to enable the dark field detection light to be scattered by the edge of the object 50 to form dark field signal light, and the light emitting directions of the bright field detection light and the dark field detection light are different.
Specifically, please refer to fig. 1 to 5, for the lighting module 10, the lighting module 10 is configured to surround the edge of the measured object 50 to form a concave portion 103, the edge of the measured object 50 extends into the concave portion 103 upwards in the opening direction of the concave portion 103, so that the lighting module 10 is disposed around the edge of the measured object 50 in the thickness direction of the measured object 50, the axis surrounded by the concave surface 104 of the concave portion 103 extends in a first direction perpendicular to the thickness direction of the measured object 50, the first light emitting surface 1041 and the second light emitting surface 1042 are disposed on the concave surface 104 of the concave portion 103 at intervals in the first direction, the first light emitting surface 1041 and the second light emitting surface 1042 are concave surfaces disposed around the edge of the measured object 50, both the light detected by the first light emitting surface 1041 and the dark field light generated by the second light emitting surface 1042 can uniformly irradiate onto the upper inclined surface 503, the outer side surface 504 and the lower inclined surface 505 of the edge of the measured object 50, the included angle α between the light emitting direction of the first light emitting surface 1041 and the first direction is different from the first direction, the included angle α between the light emitting direction of the second light emitting surface 1041 and the first light emitting surface is different from the first direction, the first direction is different from the first direction of the first direction, the included angle between the light emitting surface 1041 and the first direction is different from the first direction of the first direction is different from the first direction, the image formed between the first direction and the first direction is different from the first direction of the image forming the first direction is different from the first direction, the first direction is different from the first direction is formed between the first direction is opposite, and the first direction is opposite.
In this way, the first light emitting surface 1041 and the second light emitting surface 1042 are both integrally disposed on the concave surface 104 of the lighting module 10, which can simplify the structure of the edge detection system and improve the comprehensive detection capability and detection accuracy of the edge defect of the object 50 by combining the bright field detection and the dark field detection.
It can be understood that when edge detection is performed on a wafer, bright field detection is generally performed on 1 pixel, the highest precision is generally 1-2 um, the optical precision is required to be synchronously improved by improving the edge detection precision in a bright field mode, the depth of field of an optical system is correspondingly and sharply reduced by improving the precision, and the requirement on the whole cost is increased under the system. In another case, edge detection is performed by a dark field mode, and on the premise of unchanged imaging precision, detection precision needs to be improved to a level below 1um by adjusting energy of a light source, but the problem of heat dissipation is also caused. The application integrates bright field illumination and dark field illumination into one component, and simultaneously shares one imaging system, can carry out component installation of an illumination light path and an imaging light path in 1 cavity under the limited space condition, reduces the space volume of a detection cavity required by bright field and dark field by a light and dark field light source fusion mode, reduces the components required by imaging, and can realize defect detection capability below 1um under the premise of not improving the complexity of an imaging detection system.
In some embodiments, referring to fig. 1 to 5, the lighting module 10 includes a housing 100, the housing 100 surrounds the object 50 to form a recess 103, a cross-sectional shape of a concave surface 104 of the recess 103 in a vertical first direction may be a C-shape, a U-shape, a circular arc shape, or a structure formed by connecting an upper base and two waist edges of an isosceles trapezoid, and the shape of the recess 103 is set to satisfy that detection light generated by a first light emitting surface 1041 and a second light emitting surface 1042 located on the concave surface 104 can be received by an upper inclined surface 503, a lower inclined surface 505, and an outer side 504 of an edge of the object 50.
In some embodiments, the concave surface 104 of the concave portion 103 is an arc surface, the first light emitting surface 1041 and the second light emitting surface 1042 are arc surfaces with axes extending in the first direction, the arc angle range corresponding to the first light emitting surface 1041 is 180 ° to 270 °, for example, the arc angle corresponding to the first light emitting surface 1041 may be 180 °, 270 ° or may also be 210 °, 235 °, etc., so as to facilitate the bright field detection light generated by the first light emitting surface 1041 to cover all areas of the edge of the object 50, and to ensure the defect detection capability and the detection accuracy of the bright field detection.
In some embodiments, the range of the arc angle corresponding to the second light emitting surface 1042 is also 180 ° to 270 °, for example, the arc angle corresponding to the second light emitting surface 1042 may be 180 °, 270 °, or may also be 215 °, 240 °, etc., so that the dark field detection light generated by the second light emitting surface 1042 is beneficial to covering all areas of the edge of the object 50, which is beneficial to ensuring the defect detection capability and detection accuracy of the dark field detection.
In some embodiments, the arc angles corresponding to the first light emitting surface 1041 and the second light emitting surface 1042 may be less than 180 °, for example, 175 °, or may be greater than 270 °, for example, 278 °, so long as the bright field illumination light and the dark field illumination light can cover all areas of the edge of the object 50 to be measured.
In some embodiments, the shapes of the first light emitting surface 1041 and the second light emitting surface 1042 may match the concave surface 104 of the concave portion 103, such as a C-shape, a U-shape, or a structure formed by connecting an upper base and two waist edges of an isosceles trapezoid, which are disposed around an axis extending in the first direction, so long as the bright field detection light and the dark field detection light can cover all areas of the edge of the object 50 to be measured.
The included angle α between the light emitting direction of the first light emitting surface 1041 and the first direction and the included angle β between the light emitting direction of the second light emitting surface 1042 and the first direction are acute angles, and as described above, the included angle α between the light emitting direction of the first light emitting surface 1041 and the first direction is greater than the included angle β between the light emitting direction of the second light emitting surface 1042 and the first direction. In some embodiments, the included angle α between the light emitting direction of the first light emitting surface 1041 and the first direction is selected from a range from 50 ° to 80 °, for example, the included angle α between the light emitting direction of the first light emitting surface 1041 and the first direction may be 50 °, 80 °, or may also be 55 °, 60 °, or the like, and the light emitting direction of the first light emitting surface 1041 set at such an angle is helpful to improve defect detection capability and detection accuracy in the bright field detection process. Of course, in an embodiment with low requirements for detection accuracy, the included angle α between the light emitting direction of the first light emitting surface 1041 and the first direction may be smaller than 50 ° or larger than 80 °, for example, may be 48 ° or 83 °.
In some embodiments, the angle β between the light emitting direction of the second light emitting surface 1042 and the first direction is selected from the range of 30 ° to 50 °, for example, the angle β between the light emitting direction of the second light emitting surface 1042 and the first direction may be 30 °, 50 ° or 40 °. Of course, in an embodiment where the accuracy of the mounting position is not required, the included angle β between the light emitting direction of the second light emitting surface 1042 and the first direction may be smaller than 30 ° or larger than 50 °, for example, may be 25 ° or 55 °.
In the edge detection system of the present application, the imaging module 40 is configured to collect bright field signal light to image the edge of the object 50 to be detected and obtain a bright field image of the edge of the object 50 to be detected, and the imaging module 40 is also configured to collect dark field signal light to image the edge of the object 50 to be detected and obtain a dark field image of the edge of the object 50 to be detected, so that the bright field signal light collected by the imaging module 40 in bright field detection and the dark field signal light collected in dark field detection share a light path, thereby simplifying the overall structure of the edge detection system and reducing the cost of the edge detection system.
In some embodiments, referring to fig. 5, the imaging module 40 includes a first image capturing unit 401, a second image capturing unit 402, and a third image capturing unit 403, where each of the three image capturing units includes a lens and a detector, the lens is used for receiving bright field signal light and dark field signal light, the detector is connected to the lens, and the detector can obtain a bright field image of the edge of the object 50 according to the received bright field signal light, and can also obtain a dark field image of the edge of the object 50 according to the received dark field signal light.
Specifically, referring to fig. 5, the first image capturing unit 401 is located at a light-emitting side of bright field signal light reflected by an upper slope 503 of a border of the measured object 50, the first image capturing unit 401 is configured to capture bright field signal light formed by reflection of the upper slope 503 of the border of the measured object 50 to generate bright field images corresponding to the upper slope 503 of the border of the measured object 50, or the first image capturing unit 401 is configured to capture dark field signal light formed by scattering of the upper slope 503 of the border of the measured object 50 to generate dark field images corresponding to the upper slope 503 of the border of the measured object 50, the second image capturing unit 402 is located at a light-emitting side of bright field signal light reflected by reflection of the outer slope 504 of the border of the measured object 50 to generate bright field images corresponding to the outer slope 504 of the border of the measured object 50, or the second image capturing unit 402 is configured to capture dark field signal light formed by scattering of the outer slope 504 of the border of the measured object 50 to generate dark field signal light corresponding to the outer slope 503 of the border of the measured object 50 to generate dark field images corresponding to the border of the measured object 50, the third image capturing unit 403 is configured to capture dark field signal light corresponding to the dark field signal light generated by reflection of the lower slope 505 of the border of the measured object 50 to generate dark field signal light corresponding to the outer slope of the border of the measured object 50. The three image acquisition units are arranged in a scattered manner to respectively acquire bright field images and dark field images corresponding to the upper inclined plane 503, the outer side plane 504 and the lower inclined plane 505 of the edge of the object 50, so that the defect detection capability of the edge detection system can be improved and the detection precision of the edge of the object 50 can be improved while the integral structure of the edge detection system is simplified.
In some embodiments, referring to fig. 1 and 2, for the lighting module 10, the lighting module 10 further includes a first light guide 200 and a second light guide 300, the first light guide 200 is coupled to the first light emitting surface 1041, the first light guide 200 is used for transmitting bright field illumination light to the first light emitting surface 1041 to form bright field detection light, the second light guide 300 is coupled to the second light emitting surface 1042, the second light guide 300 is used for transmitting dark field illumination light to the second light emitting surface 1042 to form dark field detection light, and thus the bright field illumination light and the dark field illumination light are transmitted through the first light guide 200 and the second light guide 300 respectively, which is helpful for reducing loss during transmission of the bright field illumination light and the dark field illumination light, and improving anti-interference performance during transmission of the bright field illumination light and the dark field illumination light.
Referring to fig. 3, in the lighting module 10, the housing 100 surrounds the edge of the object 50 to be measured to form a recess 103, a concave surface 104 of the recess 103 is a part of an outer side surface of the housing 100, the housing 100 has a first cavity 101 and a second cavity 102 which are relatively independent, the housing 100 has a first arc-shaped groove corresponding to the first light emitting surface 1041 on the concave surface 104 of the recess 103, the first arc-shaped groove is communicated with the first cavity 101, the housing 100 has a second arc-shaped groove corresponding to the second light emitting surface 1042 on the concave surface 104 of the recess 103, and the second arc-shaped groove is communicated with the second cavity 102.
Referring to fig. 1 and 2, the first light guide member 200 includes a first optical fiber bundle composed of a plurality of fine optical fibers, the second light guide member 300 includes a second optical fiber bundle composed of a plurality of fine optical fibers, the first optical fiber bundle is used for transmitting bright field illumination light, the second optical fiber bundle is used for transmitting dark field illumination light, the first optical fiber bundle is connected to the housing 100, the plurality of fine optical fibers in the first optical fiber bundle extend into the first cavity 101, end surfaces of the plurality of fine optical fibers in the first optical fiber bundle are uniformly arranged in the first arc-shaped groove to form a first light emitting surface 1041 at the first arc-shaped groove, the second optical fiber bundle is also connected to the housing 100, the plurality of fine optical fibers in the second optical fiber bundle extend into the second cavity 102, and the end surfaces of the plurality of fine optical fibers in the second optical fiber bundle are uniformly arranged in the second arc-shaped groove to form a second light emitting surface 1042 at the second arc-shaped groove. The first light emitting surface 1041 may be understood as being formed by uniformly arranging end surfaces of a plurality of thin optical fibers in the first optical fiber bundle in the first arc-shaped groove, the second light emitting surface 1042 may be understood as being formed by uniformly arranging end surfaces of a plurality of thin optical fibers in the second optical fiber bundle in the second arc-shaped groove, and the thin optical fibers are uniformly arranged in the arc-shaped groove, so that the first light emitting surface 1041 and the second light emitting surface 1042 have a light homogenizing effect, which can improve transmission efficiency of bright field illumination light and dark field illumination light, is beneficial to reducing loss in the light transmission process, and can make bright field signal light and dark field signal light entering the imaging module 40 uniform.
In some embodiments, the first light guide 200 and/or the second light guide 300 may further include a lens barrel and a plurality of lens groups, the lens barrel is fixedly connected with the housing 100, the inner space of the lens barrel in the first light guide 200 is communicated with the first cavity 101, the inner space of the lens barrel in the second light guide 300 is communicated with the second cavity 102, the plurality of lens groups are arranged in the corresponding lens barrel at specific positions and directions, the plurality of lens groups in the first light guide 200 are matched to transmit bright field illumination light to the first cavity 101, bright field detection light is emitted from the corresponding first arc-shaped groove of the first cavity 101, the plurality of lens groups in the second light guide 300 are matched to transmit dark field illumination light to the second cavity 102, dark field detection light is emitted from the corresponding second arc-shaped groove of the second cavity 102, wherein the outer hole on the first arc-shaped groove far from the first cavity 101 forms a first light emitting surface 1041 along the enclosed formed region, and the outer hole on the second arc-shaped groove far from the second cavity 102 forms a second light emitting surface 1042 along the enclosed region.
In some embodiments, the lighting module 10 further includes a first lighting source (not shown) and a second lighting source (not shown), the first lighting source is used for generating bright field lighting, the first lighting source is coupled to the light incident surface of the first light guide 200, the second lighting source is used for generating dark field lighting, the second lighting source is coupled to the light incident surface of the second light guide 300, and the first lighting source and the second lighting source are separately arranged, so that the brightness, wavelength and color of the light sources can be conveniently selected or adjusted to adapt to different requirements of bright field detection and dark field detection, thereby improving the defect detection capability and detection precision of the edge of the object 50.
The first illumination light source comprises a bright field light box, the second illumination light source comprises a dark field light box, the luminous bodies in the bright field light box and the dark field light box can be LED luminous bodies, the first optical fiber bundle is provided with a first end connected with the first illumination light source, the end face of the first end is a light inlet face of the first optical fiber bundle, the first optical fiber bundle is also provided with a second end connected with the shell 100, the end face of the second end can form a first light emitting face 1041, one end of the second optical fiber bundle in the extending direction is connected with the second illumination light source, the end face of the second optical fiber bundle used for being connected with the second illumination light source is the light inlet face of the second optical fiber bundle, the other end of the second optical fiber bundle in the extending direction is connected with the shell 100, and the end face of the other end can form a second light emitting face 1042.
In some embodiments, the lighting module 10 includes a lighting source (not shown in the drawings), which may be an LED light source, where the lighting source is capable of generating bright field lighting light during bright field detection, and is also capable of generating dark field lighting light during dark field detection, the light incident surface of the first light guide 200 and the light incident surface of the second light guide 300 are both connected to the lighting source, the light incident surface of the first light guide 200 is capable of receiving the lighting light generated by the lighting source during bright field detection to form bright field lighting light, and the light incident surface of the second light guide 300 is capable of receiving the lighting light generated by the lighting source during dark field detection to form dark field lighting light.
The brightness, color and wavelength of the bright field illumination light and the dark field illumination light can be the same, or the brightness, color or wavelength of the corresponding illumination light can be changed in the dark field or bright field detection process by arranging a filter on the light emitting side of the illumination light source so as to enable the bright field illumination light to be different from the dark field illumination light.
In some embodiments, the lighting module 10 includes a first lighting source and a second lighting source, the lighting module 10 may not include the first light guide 200 and the second light guide 300, the first lighting source may be disposed in the first cavity 101 of the housing 100, bright field lighting generated by the first lighting source emits light from the first arc-shaped groove to form bright field detection light, the second lighting source may be disposed in the second cavity 102 of the housing 100, dark field lighting generated by the second lighting source emits light from the second arc-shaped groove to form dark field detection light, wherein the first light emitting surface 1041 and the second light emitting surface 1042 are virtual planes, the first arc-shaped groove forms a first light emitting surface 1041 along a region surrounded by the outer hole far from the first cavity 101, and the second arc-shaped groove forms a second light emitting surface 1042 along a region surrounded by the outer hole far from the second cavity 102.
The embodiment of the application also discloses a lighting device 11, and the lighting device 11 is applied to a system for detecting the edge defects of the detected object 50, for example, the system can be applied to the edge detection system, and the system can be matched with an image acquisition device to detect the edge defects of the detected object 50. The measured object 50 in the embodiment of the lighting device 11 may be the same as the measured object 50 in the edge detection system, and will not be described herein.
Referring to fig. 1 to 3, the lighting device 11 includes a light source (not shown) for generating bright field illumination light and dark field illumination light, and an illumination assembly 110, the illumination assembly 110 is for receiving the bright field illumination light and emitting bright field detection light toward the edge of the object 50, or the illumination assembly 110 is for receiving dark field illumination light and emitting dark field detection light toward the edge of the object, the illumination assembly 110 has a concave portion 103 surrounding the edge of the object 50, an axis surrounded by a concave surface 104 of the concave portion 103 extends in a first direction, the illumination assembly 110 further has a first light emitting surface 1041 and a second light emitting surface 1042, the first light emitting surface 1041 is for receiving the bright field illumination light and emitting the bright field detection light, the second light emitting surface 1042 is for receiving the dark field illumination light and emitting the dark field detection light, the first light emitting surface 1041 and the second light emitting surface 1042 are arranged on the concave surface 104 of the concave portion 103 at intervals in the first direction, the included angle α between the light emitting direction of the first light emitting surface 1041 and the first direction is different from the included angle β between the light emitting direction of the second light emitting surface 1042 and the first direction, for example, the included angle α between the light emitting direction of the first light emitting surface 1041 and the first direction is larger than the included angle β between the light emitting direction of the second light emitting surface 1042 and the first direction, so as to satisfy that the bright field signal light reflected by the non-defective area at the edge of the measured object 50 can be received by the image acquisition device, and the dark field signal light reflected by the defective area at the edge of the measured object 50 can be received by the image acquisition device, or the included angle α between the light emitting direction of the first light emitting surface 1041 and the first direction can be smaller than the included angle β between the light emitting direction of the second light emitting surface 1042 and the first direction, so as to realize the detection of different types of defects at the edge of the measured object 50.
Thus, the first light emitting surface 1041 and the second light emitting surface 1042 are integrally disposed on the concave surface 104 of the concave portion 103 of the illumination assembly 110, so that bright field detection and dark field detection on the edge of the object 50 to be detected can be realized on the premise of simplifying the structure of the illumination device, and the defect detection capability and detection precision of the detection system where the illumination device 11 is located can be improved.
In some embodiments, for the illumination assembly 110, please continue to refer to fig. 1 to 3, the illumination assembly 110 includes a housing 100, the housing 100 surrounds the measured object 50 to form a recess 103, a cross-sectional shape of a concave surface 104 of the recess 103 in a vertical first direction may be a C-shape, a U-shape, a circular arc shape, or a structure formed by connecting an upper base and two waist edges of an isosceles trapezoid, and the shape of the recess 103 is set to satisfy that detection light generated by a first light emitting surface 1041 and a second light emitting surface 1042 located on the concave surface 104 can be received by an upper inclined surface 503, a lower inclined surface 505 and an outer side 504 of an edge of the measured object 50.
In some embodiments, the concave surface 104 of the concave portion 103 is an arc surface, the first light emitting surface 1041 and the second light emitting surface 1042 are arc surfaces with axes extending in the first direction, the arc angle range corresponding to the first light emitting surface 1041 is 180 ° to 270 °, for example, the arc angle corresponding to the first light emitting surface 1041 may be 180 °, 270 ° or may also be 210 °, 235 °, etc., so as to facilitate the bright field detection light generated by the first light emitting surface 1041 to cover all areas of the edge of the object 50, and to ensure the defect detection capability and the detection accuracy of the bright field detection.
In some embodiments, the range of the arc angle corresponding to the second light emitting surface 1042 is also 180 ° to 270 °, for example, the arc angle corresponding to the second light emitting surface 1042 may be 180 °, 270 °, or may also be 215 °, 240 °, etc., so that the dark field detection light generated by the second light emitting surface 1042 is beneficial to covering all areas of the edge of the object 50, which is beneficial to ensuring the defect detection capability and detection accuracy of the dark field detection.
In some embodiments, the arc angles corresponding to the first light emitting surface 1041 and the second light emitting surface 1042 may be less than 180 °, for example, 175 °, or may be greater than 270 °, for example, 278 °, so long as the bright field illumination light and the dark field illumination light can cover all areas of the edge of the object 50 to be measured.
In some embodiments, the shapes of the first light emitting surface 1041 and the second light emitting surface 1042 may match the concave surface 104 of the concave portion 103, such as a C-shape, a U-shape, or a structure formed by connecting an upper base and two waist edges of an isosceles trapezoid, which are disposed around the first direction axis, so long as the light field detection light and the dark field detection light can cover all areas of the edge of the object 50 to be measured.
The included angle α between the light emitting direction of the first light emitting surface 1041 and the first direction and the included angle β between the light emitting direction of the second light emitting surface 1042 and the first direction are acute angles, and as described above, the included angle α between the light emitting direction of the first light emitting surface 1041 and the first direction is greater than the included angle β between the light emitting direction of the second light emitting surface 1042 and the first direction. In some embodiments, the included angle α between the light emitting direction of the first light emitting surface 1041 and the first direction is selected from a range from 50 ° to 80 °, for example, the included angle α between the light emitting direction of the first light emitting surface 1041 and the first direction may be 50 °, 80 °, or may also be 55 °, 60 °, or the like, and the light emitting direction of the first light emitting surface 1041 set at such an angle is helpful to improve defect detection capability and detection accuracy in the bright field detection process. Of course, in an embodiment with low requirements for detection accuracy, the included angle α between the light emitting direction of the first light emitting surface 1041 and the first direction may be smaller than 50 ° or larger than 80 °, for example, may be 48 ° or 83 °.
In some embodiments, the angle β between the light emitting direction of the second light emitting surface 1042 and the first direction is selected from the range of 30 ° to 50 °, for example, the angle β between the light emitting direction of the second light emitting surface 1042 and the first direction may be 30 °, 50 ° or 40 °. Of course, in an embodiment where the accuracy of the mounting position is not required, the included angle β between the light emitting direction of the second light emitting surface 1042 and the first direction may be smaller than 30 ° or larger than 50 °, for example, may be 25 ° or 55 °.
In some embodiments, referring to fig. 1 and 2, the lighting device 11 further includes a first light guide 200 and a second light guide 300, each of the first light guide 200 and the second light guide 300 has a light incident surface, the light incident surface 201 of the first light guide 200 is used for coupling with a light source to receive bright field illumination light generated by the light source, the light incident surface 301 of the second light guide 300 is used for coupling with the light source to receive dark field illumination light generated by the light source, the first light guide 200 is coupled to the first light emitting surface 1041 to transmit the bright field illumination light to the first light emitting surface 1041, and the second light guide 300 is coupled to the second light emitting surface 1042 to transmit the dark field illumination light to the second light emitting surface 1042. The bright field illumination light and the dark field illumination light are transmitted through the first light guide 200 and the second light guide 300, respectively, which is helpful to reduce loss in the transmission process of the bright field illumination light and the dark field illumination light, and improve interference resistance in the transmission process of the bright field illumination light and the dark field illumination light.
With continued reference to fig. 1to 3, the housing 100 in the illumination assembly 110 surrounds the edge of the object 50 to form a recess 103, the concave surface 104 of the recess 103 is a part of the outer side 504 of the housing 100, the housing 100 has a first cavity 101 and a second cavity 102 that are relatively independent, the housing 100 has a first arc-shaped groove corresponding to the first light emitting surface 1041 on the concave surface 104 of the recess 103, the first arc-shaped groove is in communication with the first cavity 101, the housing 100 has a second arc-shaped groove corresponding to the second light emitting surface 1042 on the concave surface 104 of the recess 103, and the second arc-shaped groove is in communication with the second cavity 102.
Referring to fig. 1 and 2, the first light guide member 200 includes a first optical fiber bundle composed of a plurality of fine optical fibers, the second light guide member 300 includes a second optical fiber bundle composed of a plurality of fine optical fibers, the first optical fiber bundle is used for transmitting bright field illumination light, the second optical fiber bundle is used for transmitting dark field illumination light, the first optical fiber bundle is connected to the housing 100, the plurality of fine optical fibers in the first optical fiber bundle extend into the first cavity 101, end surfaces of the plurality of fine optical fibers in the first optical fiber bundle are uniformly arranged in the first arc-shaped groove to form a first light emitting surface 1041 at the first arc-shaped groove, the second optical fiber bundle is also connected to the housing 100, the plurality of fine optical fibers in the second optical fiber bundle extend into the second cavity 102, and the end surfaces of the plurality of fine optical fibers in the second optical fiber bundle are uniformly arranged in the second arc-shaped groove to form a second light emitting surface 1042 at the second arc-shaped groove. The first light emitting surface 1041 may be understood as being formed by uniformly arranging end surfaces of a plurality of thin optical fibers in the first optical fiber bundle in the first arc-shaped groove, the second light emitting surface 1042 may be understood as being formed by uniformly arranging end surfaces of a plurality of thin optical fibers in the second optical fiber bundle in the second arc-shaped groove, and the thin optical fibers are uniformly arranged in the arc-shaped groove, so that the first light emitting surface 1041 and the second light emitting surface 1042 have a light homogenizing effect, which can improve transmission efficiency of bright field illumination light and dark field illumination light, is beneficial to reducing loss in the light transmission process, and can make bright field signal light and dark field signal light entering into the image acquisition device relatively uniform.
In some embodiments, the first light guide 200 and/or the second light guide 300 may further include a lens barrel and a plurality of lens groups, the lens barrel is fixedly connected with the housing 100, the inner space of the lens barrel in the first light guide 200 is communicated with the first cavity 101, the inner space of the lens barrel in the second light guide 300 is communicated with the second cavity 102, the plurality of lens groups are arranged in the corresponding lens barrel at specific positions and directions, the plurality of lens groups in the first light guide 200 are matched to transmit bright field illumination light to the first cavity 101, bright field detection light is emitted from the corresponding first arc-shaped groove of the first cavity 101, the plurality of lens groups in the second light guide 300 are matched to transmit dark field illumination light to the second cavity 102, dark field detection light is emitted from the corresponding second arc-shaped groove of the second cavity 102, wherein the outer hole on the first arc-shaped groove far from the first cavity 101 forms a first light emitting surface 1041 along the enclosed formed region, and the outer hole on the second arc-shaped groove far from the second cavity 102 forms a second light emitting surface 1042 along the enclosed region.
In some embodiments, the light source includes a first illumination light source and a second illumination light source, the first illumination light source is coupled to the light incident surface of the first light guide 200, the first illumination light source is used for generating bright field illumination light, the second illumination light source is coupled to the light incident surface of the second light guide 300, the second illumination light source is used for generating dark field illumination light, and the first illumination light source and the second illumination light source are separately arranged, so that the brightness, wavelength and color of the light source can be conveniently selected or adjusted to adapt to different requirements of bright field detection and dark field detection, thereby improving the defect detection capability and detection accuracy of the detection system in which the lighting device 11 is located.
The first illumination light source comprises a bright field light box, the second illumination light source comprises a dark field light box, the luminous bodies in the bright field light box and the dark field light box can be LED luminous bodies, the first optical fiber bundle is provided with a first end connected with the first illumination light source, the end face of the first end is a light inlet face of the first optical fiber bundle, the first optical fiber bundle is also provided with a second end connected with the shell 100, the end face of the second end can form a first light emitting face 1041, one end of the second optical fiber bundle in the extending direction is connected with the second illumination light source, the end face of the second optical fiber bundle used for being connected with the second illumination light source is the light inlet face of the second optical fiber bundle, the other end of the second optical fiber bundle in the extending direction is connected with the shell 100, and the end face of the other end can form a second light emitting face 1042.
In some embodiments, only one light source may be an LED light source, the light source may generate bright field illumination light during bright field detection, and may also generate dark field illumination light during dark field detection, where the light incident surface of the first light guide 200 and the light incident surface of the second light guide 300 are both connected to the light source, the light incident surface of the first light guide 200 may receive illumination light generated by the light source during bright field detection to form bright field illumination light, and the light incident surface of the second light guide 300 may receive illumination light generated by the light source during dark field detection to form dark field illumination light.
The brightness, color and wavelength of the bright field illumination light and the dark field illumination light can be the same, or the brightness, color or wavelength of the corresponding illumination light can be changed in the dark field or bright field detection process by arranging a filter on the light emitting side of the light source so as to enable the bright field illumination light to be different from the dark field illumination light.
In some embodiments, the light source includes a first illumination light source and a second illumination light source, the illumination device 11 may not include the first light guide 200 and the second light guide 300, the first illumination light source may be disposed in the first cavity 101 of the housing 100, bright field illumination light generated by the first illumination light source emits from the first arc-shaped groove to form bright field detection light, the second illumination light source may be disposed in the second cavity 102 of the housing 100, dark field illumination light generated by the second illumination light source emits from the second arc-shaped groove to form dark field detection light, wherein the first light emitting surface 1041 and the second light emitting surface 1042 are virtual planes, an area along the enclosed area on the first arc-shaped groove away from the outer hole of the first cavity 101 forms a first light emitting surface 1041, and an area along the enclosed area on the second arc-shaped groove away from the outer hole of the second cavity 102 forms a second light emitting surface 1042.
The foregoing description of the invention has been presented for purposes of illustration and description, and is not intended to be limiting. Several simple deductions, modifications or substitutions may also be made by a person skilled in the art to which the invention pertains, based on the idea of the invention.
Claims (12)
1. An edge detection system, comprising:
The illumination module is used for encircling the edge of the object to be measured to form a concave part, an axis encircled by the concave surface of the concave part extends in a first direction, the illumination module is provided with a first luminous surface and a second luminous surface, the first luminous surface is used for generating bright field detection light, the second luminous surface is used for generating dark field detection light, the first luminous surface and the second luminous surface are arranged on the concave surface of the concave part at intervals in the first direction, and an included angle between the light emergent direction of the first luminous surface and the first direction is different from an included angle between the light emergent direction of the second luminous surface and the first direction;
The imaging module is used for collecting bright field signal light formed by reflecting the bright field detection light by the edge of the detected object so as to image the edge of the detected object and obtain a bright field image of the edge of the detected object, and is also used for collecting dark field signal light formed by scattering the dark field detection light by the edge of the detected object so as to image the edge of the detected object and obtain a dark field image of the edge of the detected object.
2. The edge detection system of claim 1, wherein the illumination module comprises a first light guide coupled to the first light emitting surface, the first light guide for transmitting bright field illumination light to the first light emitting surface to form the bright field detection light, and a second light guide coupled to the second light emitting surface, the second light guide for transmitting dark field illumination light to the second light emitting surface to form the dark field detection light.
3. The edge detection system of claim 2, wherein the illumination module comprises a first illumination source coupled to the light entrance surface of the first light guide for generating the bright field illumination light and a second illumination source coupled to the light entrance surface of the second light guide for generating the dark field illumination light.
4. The edge detection system of claim 1, wherein the first light emitting surface is an arcuate surface having an axis extending in the first direction, the arcuate angle of the first light emitting surface being selected from the range of 180 degrees to 270 degrees, and/or,
The second light emitting surface is an arc surface with an axis extending in the first direction, and the arc angle of the second light emitting surface is selected from a range of 180 DEG to 270 deg.
5. The edge detection system of claim 1, wherein an angle between the light-emitting direction of the first light-emitting surface and the first direction is selected from a range of from 50 ° to 80 °, and an angle between the light-emitting direction of the second light-emitting surface and the first direction is selected from a range of from 30 ° to 50 °.
6. The edge detection system of claim 1, wherein the imaging module comprises a first image acquisition unit, a second image acquisition unit and a third image acquisition unit, wherein the edge of the object to be detected has an upper slope, an outer side and a lower slope;
The first image acquisition unit acquires the bright field signal light reflected by the upper inclined plane of the edge of the measured object to generate a bright field image corresponding to the upper inclined plane, or acquires the dark field signal light scattered by the upper inclined plane of the edge of the measured object to generate a dark field image corresponding to the upper inclined plane;
the second image acquisition unit acquires the bright field signal light reflected by the outer side surface of the edge of the measured object to generate a bright field image corresponding to the outer side surface, or acquires the dark field signal light scattered by the outer side surface of the edge of the measured object to generate a dark field image corresponding to the outer side surface;
the third image acquisition unit acquires the bright field signal light reflected by the lower inclined plane of the edge of the measured object to generate a bright field image corresponding to the lower inclined plane, or acquires the dark field signal light scattered by the lower inclined plane of the edge of the measured object to generate a dark field image corresponding to the lower inclined plane.
7. A lighting device, comprising:
a light source for generating bright field illumination light and dark field illumination light;
The illumination assembly is used for receiving the bright field illumination light and emitting bright field detection light to the edge of the detected object or receiving the dark field illumination light and emitting dark field detection light to the edge of the detected object, the illumination assembly is provided with a concave part surrounding the edge of the detected object, an axis surrounded by a concave surface of the concave part extends in a first direction, the illumination assembly is also provided with a first luminous surface and a second luminous surface, the first luminous surface is used for receiving the bright field illumination light and emitting the bright field detection light, the second luminous surface is used for receiving the dark field illumination light and emitting the dark field detection light, the first luminous surface and the second luminous surface are arranged on the concave surface of the concave part at intervals in the first direction, and an included angle between the light emitting direction of the first luminous surface and the first direction is different from an included angle between the light emitting direction of the second luminous surface and the first direction.
8. The illumination device of claim 7, wherein the illumination device comprises a first light guide and a second light guide, each of the first light guide and the second light guide having a light entrance surface, the light entrance surface of the first light guide being configured to receive the brightfield illumination light, the light entrance surface of the second light guide being configured to receive the darkfield illumination light;
The first light guide member is coupled to the first light emitting surface to transmit the bright field illumination light to the first light emitting surface, and the second light guide member is coupled to the second light emitting surface to transmit the dark field illumination light to the second light emitting surface.
9. A lighting device as recited in claim 8, wherein said concave surface has a first arc-shaped groove, said first light guide comprises a first fiber bundle composed of a plurality of thin fibers for transmitting said bright-field illumination light, end surfaces of the plurality of thin fibers in said first fiber bundle are uniformly arranged in said first arc-shaped groove to form said first light emitting surface, and/or,
The concave surface is provided with a second arc-shaped groove, the second light guide piece comprises a second optical fiber bundle composed of a plurality of thin optical fibers, the second optical fiber bundle is used for transmitting the dark field illumination light, and the end faces of the thin optical fibers in the second optical fiber bundle are uniformly arranged in the second arc-shaped groove to form a second light emitting surface.
10. The illumination device of claim 8, wherein the light source comprises a first illumination light source coupled to the light entrance surface of the first light guide for generating the bright field illumination light and a second illumination light source coupled to the light entrance surface of the second light guide for generating the dark field illumination light.
11. A lighting device as recited in claim 7, wherein said first light-emitting surface is an arc surface, wherein an arc angle of said first light-emitting surface is selected from a range of from 180 ° to 270 °, and/or wherein said second light-emitting surface is an arc surface, and wherein an arc angle of said second light-emitting surface is selected from a range of from 180 ° to 270 °.
12. A lighting device as recited in claim 7, wherein an angle between a direction of light exiting said first light-emitting surface and said first direction is selected from a range of from 50 ° to 80 °, and an angle between a direction of light exiting said second light-emitting surface and said first direction is selected from a range of from 30 ° to 50 °.
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