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CN1927705A - Method of processing carbon nano tube - Google Patents

Method of processing carbon nano tube Download PDF

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Publication number
CN1927705A
CN1927705A CNA2005100372429A CN200510037242A CN1927705A CN 1927705 A CN1927705 A CN 1927705A CN A2005100372429 A CNA2005100372429 A CN A2005100372429A CN 200510037242 A CN200510037242 A CN 200510037242A CN 1927705 A CN1927705 A CN 1927705A
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carbon nanotube
protective film
carbon nanotubes
processing
fragment
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CN100482583C (en
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何纪壮
萧博元
张庆州
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Hongfujin Precision Industry Shenzhen Co Ltd
Hon Hai Precision Industry Co Ltd
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Hongfujin Precision Industry Shenzhen Co Ltd
Hon Hai Precision Industry Co Ltd
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Priority to CNB2005100372429A priority Critical patent/CN100482583C/en
Priority to US11/309,366 priority patent/US7581645B2/en
Publication of CN1927705A publication Critical patent/CN1927705A/en
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    • D01F9/00—Artificial filaments or the like of other substances; Manufacture thereof; Apparatus specially adapted for the manufacture of carbon filaments
    • D01F9/08—Artificial filaments or the like of other substances; Manufacture thereof; Apparatus specially adapted for the manufacture of carbon filaments of inorganic material
    • D01F9/12—Carbon filaments; Apparatus specially adapted for the manufacture thereof
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    • B82—NANOTECHNOLOGY
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    • C01B32/00—Carbon; Compounds thereof
    • C01B32/15—Nano-sized carbon materials
    • C01B32/158—Carbon nanotubes
    • C01B32/16—Preparation
    • C01B32/162—Preparation characterised by catalysts
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    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
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    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00—Methods for coating glass
    • C03C2218/30—Aspects of methods for coating glass not covered above
    • C03C2218/355—Temporary coating
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    • Y10S977/00—Nanotechnology
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    • Y10S977/734—Fullerenes, i.e. graphene-based structures, such as nanohorns, nanococoons, nanoscrolls or fullerene-like structures, e.g. WS2 or MoS2 chalcogenide nanotubes, planar C3N4, etc.
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    • Y10S977/00—Nanotechnology
    • Y10S977/70—Nanostructure
    • Y10S977/734—Fullerenes, i.e. graphene-based structures, such as nanohorns, nanococoons, nanoscrolls or fullerene-like structures, e.g. WS2 or MoS2 chalcogenide nanotubes, planar C3N4, etc.
    • Y10S977/742—Carbon nanotubes, CNTs
    • Y10S977/745—Carbon nanotubes, CNTs having a modified surface
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    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
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Abstract

本发明涉及一种加工碳纳米管的方法，其包括以下步骤：提供一碳纳米管阵列；于碳纳米管阵列上形成至少一保护膜片段，该保护膜片段具有至少两条相互平行的直线对边，该平行直线对边与碳纳米管轴向方向垂直；使碳纳米管阵列上未设置保护膜片段的部位断裂；修饰处理碳纳米管的断裂部位，从而得到长度与保护膜片段的两平行直线对边的间距相同的碳纳米管片段。

Figure 200510037242

The invention relates to a method for processing carbon nanotubes, which includes the following steps: providing a carbon nanotube array; forming at least one protective film segment on the carbon nanotube array, and the protective film segment has at least two pairs of straight lines parallel to each other. The opposite side of the parallel straight line is perpendicular to the axial direction of the carbon nanotubes; the part of the carbon nanotube array that is not provided with a protective film segment is broken; the fractured part of the carbon nanotube is modified to obtain two lengths parallel Segments of carbon nanotubes with equal spacing across straight lines.

Figure 200510037242

Description

The method of processing carbon nano tube
[technical field]
The present invention relates to a kind of method of processing carbon nano tube.
[background technology]
Since the Iijima of Japanese NEC Corporation in 1991 found carbon nanotube, optics, electricity and the mechanical properties of uniqueness presented very application prospects because carbon nanotube has many excellences.Carbon nanotube has good heat conductivility and special mechanical properties, utilizes carbon nanotube to become one of important directions of research carbon nanotube application as weighting material and engineering materials compound technology.
Often need a large amount of carbon nanotubes with carbon nanotube as the matrix material of packing material, have uniform mechanics or other physical properties, require carbon nanotube to have single character, for example have uniform length and diameter for making the matrix material after the filling.In addition, another important applied field of carbon nanotube is a Field Emission Display.Generally speaking, the carbon nanotube that Field Emission Display adopted need have homogeneous length, so that the characteristic of carbon nanotube emitting electrons is more consistent, makes indicating meter produce more uniform brightness and good display effect.
A large amount of at present processing methodes of making carbon nanotube have a variety of, comprise chemical Vapor deposition process, laser evaporation method and arc discharge method etc., but the carbon nanotube that aforesaid method makes or more mixed and disorderly, or length is inhomogeneous.Along with the development of Technology, it is found that by improving chemical Vapor deposition process, control the carbon nanotube that its reaction times can obtain more even single length.But this method is controlled length by controlling reaction time, and its tolerance range is not high, and simultaneously, growth once can only be controlled a kind of size, and its research is restricted with application.
One application number is a kind of method for preparing homogeneous length carbon nanotube of TaiWan, China patent application announcement of 093114422, its detailed process is that carbon nano pipe array is infiltrated on the liquid phase Polymer Systems, make the liquid phase Polymer Systems be converted into solid phase, generation is distributed with the polymer composite of carbon nanotube, at the carbon nano pipe array predetermined height, along axially cutting this polymer composite perpendicular to carbon nano pipe array, form the uniform polymer composite thin film of thickness, remove the macromolecular material in the polymer composite thin film, obtain the carbon nanotube of a large amount of length homogeneous.This method is that the carbon nano pipe array that the length that at first will prepare differs is converted into the solid phase polymer composite, obtain the carbon nano pipe array of homogeneous length then by cutting mode, in this process, carbon nano pipe array needs the process that transforms mutually with the solid phase polymer composite through twice, conversion process can influence the productive rate of carbon nanotube, and has the hidden danger to the carbon nano pipe array performance impact.
Therefore, be necessary to provide a kind of need not that carbon nanotube is converted into other material, and can directly obtain the working method of even length carbon nanotube.
[summary of the invention]
Below, will illustrate that a kind of need not is converted into other material with carbon nanotube with embodiment, and can directly obtain the method for even length carbon nanotube.
The embodiment of the invention provides a kind of method of processing carbon nano tube, and it may further comprise the steps: a carbon nano pipe array is provided; List at carbon nano-pipe array and to be formed up to a few protective membrane fragment, this protective membrane fragment has at least two straight line opposite side that are parallel to each other, and this parallel opposite side is vertical with the carbon nanotube axial direction due; Carbon nano-pipe array is listed protective membrane segmental position fracture is not set; Modify the fracture location of handling carbon nanotube, thereby obtain the length carbon nanotube fragment identical with the spacing of the segmental two parallel lines opposite side of protective membrane.
In the foregoing description, carbon nano-pipe array is listed fracture employing chemical method in the segmental position of protective membrane is not set.
The method of embodiment of the invention processing carbon nano tube, compared with prior art have the following advantages: at first, utilize the carbon nanotube pieces segment protect of a protective membrane with required suitable length, utilize chemical method will not cover the position fracture of protective membrane, cooperate to modify and handle, remove residual side chain on the carbon nanotube fracture location, so that the carbocyclic ring structural integrity of carbon nanotube fragment and be not with side chain, thereby obtain a plurality of carbon nanotube fragments of structural integrity, unprotected side chain, and belong to same segmental carbon nanotube and have homogeneous length; Secondly, this working method can form the different protective membrane fragment of a plurality of length obtaining the carbon nanotube fragment of different lengths on carbon nanotube, and the affiliated carbon nanotube of each fragment has equal length, is applicable to processing carbon nano tube in enormous quantities; Once more, this course of processing is not converted into carbon nanotube other material, does not have the loss of conversion process, and avoids the change of carbon nanotube performance.
[description of drawings]
Fig. 1 is the device synoptic diagram of embodiment of the invention carbon nano tube array grows.
Fig. 2 is the synoptic diagram of the carbon nano pipe array that grows of the embodiment of the invention.
Fig. 3 is provided with the synoptic diagram of covering tool in the substrate of the embodiment of the invention.
Fig. 4 is that the carbon nano-pipe array of the embodiment of the invention lists the synoptic diagram that forms protective membrane.
Fig. 5 is the synoptic diagram of the prepared isometric carbon nanotube fragment that has side chain of the embodiment of the invention.
Fig. 6 is the prepared isometric carbon nanotube fragment synoptic diagram of the embodiment of the invention.
[embodiment]
Further describe the method for processing carbon nano tube below in conjunction with drawings and Examples.
The method of present embodiment processing carbon nano tube may further comprise the steps: a carbon nano pipe array is provided; List at carbon nano-pipe array and to be formed up to a few protective membrane fragment, this protective membrane fragment has at least two straight line opposite side that are parallel to each other, and this parallel opposite side is vertical with the carbon nanotube axial direction due; Carbon nano-pipe array is listed protective membrane segmental position fracture is not set; Modify the fracture location of handling carbon nanotube, thereby obtain the length carbon nanotube fragment identical with the spacing of the segmental two parallel lines opposite side of protective membrane.
Below a kind of method of processing carbon nano tube will be described progressively.
At first, provide a carbon nano pipe array.
In the present embodiment, carbon nano pipe array can adopt the chemical Vapor deposition process preparation.As shown in Figure 1, form a rectangular recess 100 in a substrate 10, the length of this groove 100, width and the degree of depth can be preset as required, as set the volume of groove 100 according to the quantity of carbon nanotube to be prepared, in the present embodiment, the length of this groove 100 can be set to 1 μ m (micron).The making method of groove 100 can adopt micro electronmechanical etching, methods such as chemical milling.The material of substrate 10 can be selected semiconductor material or metal species electro-conductive materials such as insulating material such as glass, quartz, aluminum oxide, polysilicon, graphite for use.Present embodiment adopts polysilicon.Be appreciated that the groove 100 that a plurality of identical or different sizes can be set in substrate 10, to realize a large amount of carbon nanotubes of time processing.
This groove is along having one first side 110 and one second side 130 on the other side on its length direction.Evenly form a catalyst film 120 on this first side 110, the formation method of this catalyst film 120 can be selected other methods such as heat deposition, electron beam deposition or sputtering method for use.The material selection iron of this catalyst film 120 also can be selected other catalystic material that is used for carbon nano-tube for use, as gan, cobalt, nickel and alloy material thereof etc.And, on this second side 130, forming an electrode 140, it links to each other with a power supply (figure does not show), so that subsequent step forms an electric field.Certainly, also electrode 140 can be set, but directly groove 100 be placed an electric field, this direction of an electric field is vertical with first side 110.
Catalyst film 120 is carried out oxide treatment, make it oxidized and become granules of catalyst (figure do not show), the substrate 10 that will be distributed with granules of catalyst and electrode 140 again is positioned over (figure does not show) in the Reaktionsofen, and be heated under the carbon nano tube growth temperature, for example under 700～1000 ℃, feed carbon source gas, grow carbon nano pipe array 200, as shown in Figure 2, the length of chien shih carbon nano pipe array arrives till second side 130 during control growing, and this carbon source gas can be gases such as acetylene, ethene.
Carbon nano pipe array 200 in the embodiment of the invention is not limited to be arranged in the groove 100, and preparation method of carbon nano-tube also is not limited thereto.A plurality of carbon nanotubes are arranged on the substrate in parallel to each other, can carry out follow-up processing procedure equally.The growth method of relevant carbon nano pipe array 200 is comparatively ripe, specifically can consult document Science, 1999, vol.283 is p.512-414 with document J.Am.Chem.Soc, 2001, vol.123, p.11502-11503, United States Patent (USP) the 6th in addition, 350, No. 488 a kind of method of growing large-area carbon nano pipe array is also disclosed.
Secondly, on carbon nano pipe array 200, form a protective membrane fragment 400.
Can form a protective membrane fragment 400 on the carbon nano pipe array 200, or a plurality of protective membrane fragment 400, the length of each protective membrane fragment 400 can be identical, also can be different, and particular case is decided according to reality is required.Protective membrane fragment 400 has two straight line opposite side that are parallel to each other at least; and this two parallel lines limit is vertical with carbon nanotube axial direction due to be processed; the spacing of two parallel edges is the length of required carbon nanotube fragment, and the shape of protective membrane fragment 400 can be rectangle, square or other desired shape.Protective membrane fragment 400 can rule on carbon nano pipe array 200 be arranged and also can irregularly be arranged, as long as just have two parallel lines limits with carbon nanotube axial direction due to be processed is vertical can.For example, protective membrane fragment 400 can be arranged along the carbon nanotube axially spaced-apart, and adjacent protective membrane fragment 400 spacings can be identical, also can be inequality.If when forming a plurality of protective membrane fragment 400 on the carbon nano pipe array 200, two parallel lines limits of each protective membrane fragment 400 are parallel to each other in twos; The length of a plurality of protective membrane fragments 400 can be identical, also can be inequality, and for use in the carbon nanotube fragment for preparing different lengths simultaneously.
When for example a large amount of simultaneously preparation length are the carbon nanotube fragment of 200nm and 300nm, need to list the protective membrane fragment that a plurality of length of formation are respectively 200nm and 300nm at carbon nano-pipe array, the protective membrane fragment of these two kinds of length can be intervally arranged; A plurality of length 200nm protective membrane fragments also can be intervally arranged on an end of carbon nano pipe array to be processed; the protective membrane fragment of a plurality of length 300nm is intervally arranged on the other end; carry out following process like this, can obtain the carbon nanotube fragment of a large amount of length 200nm and 300nm.
Present embodiment is that the carbon nanotube fragment of 200nm is an example with the processing length, as shown in Figure 3, covering tool 300 with one is arranged in the substrate 10, this is covered and offers a plurality of through holes 310 on the tool 300, this through hole 310 has two straight lines that are parallel to each other at least, and this two parallel lines limit is parallel with carbon nanotube radial direction to be processed, and the shape of through hole 310 can be rectangle or other desired shape.The spacing of two parallel edges of these a plurality of through holes 310 is all identical, and this spacing equals the length of carbon nanotube fragment 210 to be prepared, promptly equals 200nm.In the present embodiment, through hole 310 is a rectangular opening, and this rectangle length is identical with the length of carbon nanotube fragment 210 to be prepared, is 200nm, and its width is not less than the width of groove 100.
Cover the area of the area of tool 300 more than or equal to substrate 10, preferably identical with substrate 10 areas, so that cooperate fully with substrate 10.As previously mentioned, because groove 100 length are 1 μ m, be that the prepared carbon nano pipe array length of abovementioned steps is about 1 μ m, therefore, can adopt a length be 1 μ m cover tool 300, offer a plurality of be spaced and length is the through hole 310 of 200nm on it, the quantity in this hole can be four or less than four, the spacing of adjacent through-holes 310 can be identical or different, the length of the total length of combined carbon nano-tube array 200 and carbon nanotube fragment 210 to be prepared, the spacing of through hole 310 is minimum as far as possible so that subsequent chemical reaction residual side chain lengths the shortest as far as possible, be beneficial to modify and handle.
Present embodiment is covered and is offered the through hole 310 that four length are 200nm on the tool 300, and the spacing of adjacent through-holes is identical.To cover tool 300 is arranged in the substrate 10, make the length direction of through hole 310 parallel with the length direction of carbon nano pipe array 200, this moment, the part carbon nano pipe array 200, be that carbon nanotube fragment 210 is exposed from through hole 310, because through hole 310 length are 200nm, so be 200nm from carbon nanotube fragment 210 length of wherein exposing.
As shown in Figure 4; one protective membrane fragment 400 is formed on the carbon nanotube fragment of exposing from through hole 310 210; its formation method can adopt any proper method that comprises spin coating method or dip process; the material of protective membrane fragment 400 is selected for use and is difficult to oxidized material, as polysilicon, silicon nitride, metal silicide etc.Present embodiment adopts spin coating method to form protective membrane fragment 400, and these protective membrane fragment 400 materials are polysilicon.For example adopt following method to form protective membrane fragment 400: will be provided with the substrate 10 of covering tool 300 and be positioned on the rotation coating machine; Polysilicon solution is formed on the carbon nanotube fragment of exposing from through hole 310 210; High speed rotating substrate 10 makes polysilicon solution form gel, and certainly, the controls revolution time is to obtain the polysilicon gel of desired thickness as required; Carrying out anneal at a certain temperature makes gel solidification obtain polysilicon protection membrane-bound fragment 400.
Once more, make the position fracture that protective membrane is not set on the carbon nano pipe array 200.
Make the method for the position fracture that protective membrane fragment 400 is not set on the carbon nano pipe array 200; be to utilize chemical method that the carbocyclic ring in the carbon nanotube structure is ruptured; this chemical process generally comprises oxidation style, two key addition reaction method or free radical addition reaction method, and the side chain that adopts above-mentioned several method to form comprises-COOH (carboxyl) ,-NH 2(amino), chain alkyl, acyl group, hydroxyl, aldehyde radical etc.
In the present embodiment, adopt oxidation style to make carbon nano-pipe array list 200 positions that protective membrane fragment 400 is not set and rupture, wherein oxygenant is an ozone.Detailed process is: remove and cover tool 300; substrate 10 is placed a reactor; in this reactor, feed ozone; carry out reacting by heating; the position that protective membrane is not set on the carbon nano pipe array 200 will oxidizedly make carbocyclic ring rupture; forming some side chains 211 is connected on the adjacent six-membered carbon ring that does not react; control reaction temperature and time; make carbon nano pipe array 200 complete reactions as far as possible; the basic all disconnections in position of protective membrane are not set on the carbon nano pipe array 200; obtaining having side chain 211 and length is the carbon nanotube fragment 210 of 200nm substantially, as shown in Figure 5.
At last, the fracture location of carbon nano pipe array 200 is modified processing, thereby obtain the carbon nanotube fragment 210 of suitable length.
According to above-mentioned steps, still be covered with protective membrane fragment 400 on the above-mentioned carbon nanotube fragment 210 that has a side chain 211, modifying needs to remove in advance protective membrane fragment 400 before handling.Because the composition of protective membrane fragment 400 is a polysilicon in the present embodiment, can adopt potassium hydroxide or hydroxide four potassium ammonium ((CH 3) 4NOH) solution is removed.The carbon nanotube fragment 210 that is about to be covered with protective membrane fragment 400 and have side chain 211 is mixed with the excessive hydrogen potassium oxide solution, fully dissolves protective membrane fragment 400, and will have 210 cleanings of carbon nanotube fragment, the oven dry of side chain 211.
Remove on the carbon nanotube fragment 210 residual side chain 211, can adopt the wet ball-milling polishing, as the above-mentioned carbon nanotube fragment 210 that has side chain 211 is positioned in the container, dispersion liquid, carbon nanotube and ball milling particle are housed in this container, the ball milling particle can adopt zirconia ball, cerium oxide ball, alumina balls, Stainless Steel Ball or urethane ball etc., the ball milling particle dia is greater than the carbon nanotube size, and dispersion liquid can be selected lower boiling high volatile volatile organic solvent for use, as methyl alcohol, ethanol etc.It is dispersion liquid that present embodiment adopts ethanol, the micron order zirconia ball is the ball milling particle, in the process of lapping, can clash into grinding between carbon nanotube and the zirconia ball or between the carbon nanotube, because carbon nanotube is six circular ring structures substantially, itself has intensity and toughness preferably, and bonding force is less between the side chain 211 of carbon nanotube and the carbon atom on six annulus, under certain grinding condition, this side chain grinds through bump repeatedly and will stress rupture take place and rupture, the control milling time is removed the side chain 211 on the carbon nanotube fragment 210 as far as possible fully.
Carbon nanotube fragment 210 after the grinding is mixed in ethanol and zirconia ball, the three should be separated, because zirconia ball is a micron order, differ greatly with the carbon nanotube fragment 210 of length 200nm, and carbon nanotube fragment 210 length homogeneous, can select an aperture for use is the screen cloth of 200nm, and carbon nanotube fragment 210 and alcoholic acid mixture are separated with zirconia ball.Again, because of ethanol is lower boiling high volatile volatile organic solvent, can it be removed from carbon nanotube fragment 210 by heating vaporization or distillation under vacuum, be that the homogeneous carbon nanotube fragment 210 of 200nm is contained in the container 20, as shown in Figure 6 thereby obtain length.
The method of embodiment of the invention processing carbon nano tube, compared with prior art have the following advantages: at first, utilize the carbon nanotube pieces segment protect of a protective membrane with required suitable length, utilize chemical method will not cover the position fracture of protective membrane, cooperate to modify and handle, remove residual side chain on the carbon nanotube fracture location, so that the carbocyclic ring structural integrity of carbon nanotube and be not with side chain, thereby a plurality of carbon nanotube fragments of structural integrity, unprotected side chain obtained; Secondly, this working method forms the different protective membrane of plural length obtaining the carbon nanotube fragment of different lengths on carbon nanotube, and the affiliated carbon nanotube of each fragment has equal length, is applicable to processing carbon nano tube in enormous quantities; Once more, this course of processing is not converted into carbon nanotube other material, does not have the loss of conversion process, and avoids the change of carbon nanotube performance.

Claims (13)

1.一种加工碳纳米管的方法，其包括以下步骤：1. A method for processing carbon nanotubes, comprising the following steps: 提供一碳纳米管阵列；providing a carbon nanotube array; 在碳纳米管阵列上形成至少一保护膜片段，该保护膜片段具有至少两条相互平行的直线对边，该平行对边与碳纳米管轴向方向垂直；At least one protective film segment is formed on the carbon nanotube array, the protective film segment has at least two parallel straight-line opposite sides, and the parallel opposite sides are perpendicular to the axial direction of the carbon nanotubes; 使碳纳米管阵列上未设置保护膜片段的部位断裂；Fracture the parts of the carbon nanotube array that are not provided with protective film segments; 修饰处理碳纳米管的断裂部位，从而得到长度与保护膜片段的两平行直线对边的间距相同的碳纳米管片段。modifying and treating the broken part of the carbon nanotube, so as to obtain the carbon nanotube segment whose length is the same as the distance between two parallel straight-line opposite sides of the protective film segment. 2.如权利要求1所述的加工碳纳米管的方法，其特征在于，该碳纳米管阵列上形成多个保护膜片段。2. The method for processing carbon nanotubes according to claim 1, wherein a plurality of protective film segments are formed on the carbon nanotube array. 3.如权利要求2所述的加工碳纳米管的方法，其特征在于，该多个保护膜片段的两条平行直线对边两两相互平行。3. The method for processing carbon nanotubes according to claim 2, wherein two parallel straight lines opposite sides of the plurality of protective film segments are parallel to each other. 4.如权利要求2所述的加工碳纳米管的方法，其特征在于，该多个保护膜片段的两条平行直线对边的间距相同。4 . The method for processing carbon nanotubes according to claim 2 , wherein the spacing between two parallel straight lines of the plurality of protective film segments is the same. 5.如权利要求2所述的加工碳纳米管的方法，其特征在于，该多个保护膜片段的两条平行直线对边的间距不同。5 . The method for processing carbon nanotubes according to claim 2 , wherein the distances between two parallel straight lines and opposite sides of the plurality of protective film segments are different. 6 . 6.如权利要求1所述的加工碳纳米管的方法，其特征在于，在碳纳米管阵列上形成保护膜片段的方法包括旋转涂覆法或沉浸法。6. The method for processing carbon nanotubes according to claim 1, characterized in that, the method for forming protective film segments on the carbon nanotube arrays comprises a spin coating method or an immersion method. 7.如权利要求1所述的加工碳纳米管的方法，其特征在于，该保护膜片段的材质包括多晶硅或氮化硅。7. The method for processing carbon nanotubes as claimed in claim 1, wherein the material of the protective film segment comprises polysilicon or silicon nitride. 8.如权利要求1所述的加工碳纳米管的方法，其特征在于，使未设置保护膜片段的部位断裂的方法采用化学法。8. The method for processing carbon nanotubes according to claim 1, characterized in that the method of breaking the parts where no protective film segments are provided is a chemical method. 9.如权利要求8所述的加工碳纳米管的方法，其特征在于，该化学法包括氧化法、双键加成反应法或自由基加成反应法。9. The method for processing carbon nanotubes according to claim 8, wherein the chemical method comprises an oxidation method, a double bond addition reaction method or a free radical addition reaction method. 10.如权利要求9所述的加工碳纳米管的方法，其特征在于，该氧化法采用臭氧为氧化剂。10. The method for processing carbon nanotubes according to claim 9, characterized in that the oxidation method uses ozone as an oxidizing agent. 11.如权利要求1所述的加工碳纳米管的方法，其特征在于，该修饰断裂的碳纳米管片段的方法采用湿式球磨研磨法。11. The method for processing carbon nanotubes according to claim 1, characterized in that, the method for modifying broken carbon nanotube segments adopts a wet ball milling method. 12.如权利要求1所述的加工碳纳米管的方法，其特征在于，该修饰处理断裂的碳纳米管片段之前预先将保护膜片段除去。12 . The method for processing carbon nanotubes according to claim 1 , characterized in that, before the modification treatment of the broken carbon nanotube fragments, the protective film fragments are removed in advance. 13 . 13.如权利要求1所述的加工碳纳米管的方法，其特征在于，在碳纳米管阵列上形成保护膜片段的方法包括步骤：13. the method for processing carbon nanotube as claimed in claim 1, is characterized in that, the method for forming protective film segment on carbon nanotube array comprises the steps: 提供一掩具，其上设置有至少一开口，该开口具有至少两条相互平行的直线对边；providing a mask, on which at least one opening is provided, the opening has at least two straight opposite sides parallel to each other; 将该掩具设置于碳纳米管阵列上，使开口的两条平行直线对边与碳纳米管轴向方向垂直，部分碳纳米管阵列从开口中裸露出；The mask is arranged on the carbon nanotube array, so that the opposite sides of the two parallel straight lines of the opening are perpendicular to the axial direction of the carbon nanotube, and part of the carbon nanotube array is exposed from the opening; 在裸露的碳纳米管阵列上形成保护膜片段。Formation of protective film fragments on bare carbon nanotube arrays.
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