CN206292198U - Multi-substrate integrated structure of electronic biosensor and microfluid device - Google Patents

Abstract

The utility model provides a multi-substrate integration structure of electronic formula biosensor and microfluid device, include: a first substrate, an electronic biosensor, an adhesive layer, a second substrate, a channel layer and a covering part; therefore, at least one fluid can flow in from the covering part, flows through the second substrate through the flow channel layer and contacts the electronic biosensor for sensing. The electronic biosensor is respectively fixed with the first substrate and the second substrate through the adhesion layer, and is electrically connected with the conductive pad, the bump, the second conductive circuit and the first conductive circuit through the conductive pad, so as to transmit a sensing result to the conductive pad arranged on the first substrate and connected to the outside.

Description

Multi-substrate integrated structure of electronic biosensor and microfluidic device

technical field

The utility model relates to a multi-substrate integrated structure of an electronic biosensor and a microfluidic device.

Background technique

A biosensor (Biosensor) refers to an analysis device that uses a biosensing component to convert the change of chemical substances in the system into electronic or optical signals. In the rapidly developing field of biological or medical technology, the emergence of electronic biosensors is nothing less than a major breakthrough in modern biological related technology. The main components of a biosensor include sensing components, transducers, and electronics.

Since the organism itself has a variety of chemical receptors, the uniqueness of biosensors comes from the high sensitivity, high specificity or high selectivity of biosensing components and biomolecules on them, which also creates electronic biosensors. Can meet the needs of many important measurements. In other words, the organism itself is actually a collection of chemoreceptors, and these chemoreceptors have a high degree of specificity or selectivity and sensitivity.

Furthermore, through artificial or mechanical operations in traditional biochemical analysis, microfluidic components such as micropumps, microvalves, microfilters, micromixers, micropipes, microsensors, and microreactors are concentrated in microfluidic devices. In order to perform procedures such as sample pretreatment, mixing, transmission, separation and detection, it is actively applied to biosensors.

However, the existing integrated structure of electronic biosensors and microfluidic devices is often unable to provide the quality consistency, structural integrity and high mass production of the detection module due to the limitations of applications and existing integrated processes. Therefore, how to provide an effective and flexible integrated structure of electronic biosensors and microfluidic devices is an important topic in the industry at present.

Utility model content

The embodiment of the present utility model discloses a multi-substrate integrated structure of an electronic biosensor and a microfluidic device, including: a first substrate with a receiving window, a first wire circuit, and a plurality of first via holes , wherein the accommodating window is arranged in the middle part of the first substrate, a conductive material is filled in the plurality of first via holes, and a conductive pad, and connecting the first wire line to the upper end of the plurality of first via holes, the first wire line and the conductive pad are electrically connected to the conductive material filled in the plurality of first via holes; an electronic A type biosensor, which is arranged in the accommodation window of the first substrate through a fixing material, has a biosensing layer and a plurality of conductive pads, wherein the biosensing layer is arranged upwards and exposed to the first substrate In the accommodating window, the plurality of conductive pads are arranged upwards to provide electrical connection of the electronic biosensor; an adhesive layer, combined on the first substrate, has a first hollow window and a plurality of conductive bumps block, wherein the first hollow window is correspondingly arranged above the biosensing layer of the electronic biosensor to expose the biosensing layer, and the plurality of conductive bumps are respectively arranged corresponding to the plurality of conductive bumps of the electronic biosensor. pads and the first wire lines of the first substrate, and are respectively electrically connected to the plurality of conductive pads and the first wire lines of the first substrate, and close the conductive pads and the first wire lines on the electronic biosensor. The first wire circuit on the substrate; a second substrate, combined and arranged above the adhesive layer, has a second hollow window and a second wire circuit, wherein the second hollow window is correspondingly arranged on the adhesive layer Above the first hollow window and the biosensing layer of the electronic biosensor to expose the biosensing layer, the second wire line is arranged on the downward facing surface of the second substrate, and the plurality of adhesive layers The conductive bumps are electrically connected, and the surface of the second substrate is modified into a hydrophilic or hydrophobic surface; a channel layer is arranged on the second substrate and has at least one channel for at least one fluid to flow, and A covering member is arranged above the channel layer and has at least one first fluid inlet and at least one first fluid outlet for the inflow and outflow of the at least one fluid, the at least one fluid inlet and the at least one fluid outlet It is connected with the at least one flow channel of the flow channel layer, wherein the at least one fluid flows in from the at least one first fluid inlet, and flows through the second hollow window of the second substrate and the adhesive layer through the at least one flow channel The first hollow window is used to contact the biosensing layer of the electronic biosensor for sensing, and then flows out from the at least one fluid outlet.

Preferably, the first substrate further includes a first circuit composed of active and/or passive components, and the first circuit is electrically communicated with the first wire.

Preferably, the second substrate further includes a second circuit composed of active and/or passive components, and the second circuit is electrically communicated with the second wire line.

Preferably, the first substrate is a stack structure of multi-layer substrates.

Preferably, the second substrate is a stack structure of multi-layer substrates.

Preferably, the flow channel layer further includes at least one pump component, at least one valve component, at least one liquid mixing component, other microfluidic components or any combination thereof, so as to carry out the flow and pretreatment of the at least one fluid.

Preferably, the channel layer is a multi-layered structure with multiple layers, and the surface of the channel layer is modified to be hydrophilic or hydrophobic.

Preferably, the channel layer further includes a third circuit, the third circuit is electrically connected to the second circuit on the second substrate, and the connection between the third circuit and the second circuit is connected to the At least one fluid isolating.

Preferably, the cover is integrated with the flow channel layer, or the flow channel layer is integrated with the second substrate, or the cover, the flow channel layer is integrated with the second substrate, or the The cover, the channel layer, the second substrate and the adhesive layer are integrated into one.

Preferably, on the flow channel layer, other substrates and other flow channel layers are arranged in sequence to form a more layered substrate structure, and the structure and combination of the other substrate and other flow channel layers are similar to those of the second substrate and the second substrate The structure of the channel layer is the same as the combination method.

In the embodiment of the present invention, the electronic biosensor is respectively electrically connected to the first substrate and the second substrate through the adhesive layer, so as to transmit the sensing result to the conductive pad disposed on the first substrate and connected to the outside.

Description of drawings

Fig. 1 is a schematic diagram of an embodiment of a multi-substrate integrated structure of an electronic biosensor and a microfluidic device of the present invention;

FIG. 2 is a cross-sectional view of an embodiment of a multi-substrate integrated structure of an electronic biosensor and a microfluidic device according to the present invention.

Explanation of reference signs

110 first substrate

111 storage window

112 First conductor line

113 First via hole

114 conductive pad

120 electronic biosensors

121 fixing material

122 Bio-sensing layer

123 conductive pad

130 Adhesive layer

131 The first hollow window

132 conductive bump

140 Second substrate

141 second hollow window

142 Second conductor line

150 runner layer

160 covers

161 First fluid inlet

162 First Fluid Outlet

detailed description

The following is a description of the implementation of the utility model through specific specific examples. Those skilled in the art can easily understand other advantages and effects of the utility model from the content disclosed in this specification. The utility model can also be implemented or applied through other different specific examples, and various modifications and changes can be made to the details in the description of the utility model based on different viewpoints and applications without departing from the spirit of the utility model.

It should be noted that the structures, proportions, sizes, etc. shown in the drawings attached to this specification are only used to match the content disclosed in the specification, for those who are familiar with this technology to understand and read, and are not used to limit the implementation of the utility model. Limiting conditions, so there is no technical substantive meaning, any modification of structure, change of proportional relationship or adjustment of size, without affecting the effect and the purpose of this utility model, should fall within the scope of this utility model. The technical content disclosed by the new model must be within the scope covered.

1 and 2 are a schematic diagram and a cross-sectional view of an embodiment of an integrated multi-substrate structure of an electronic biosensor and a microfluidic device of the present invention, respectively. The integrated structure of electronic biosensor and microfluidic device is applied to the integrated packaging of an electronic biosensor and a microfluidic device. As shown in Figures 1 and 2, the integrated structure of the electronic biosensor and the microfluidic device includes from bottom to top: a first substrate 110, an electronic biosensor 120, an adhesive layer 130, and a second substrate 140 , a channel layer 150 , and a cover 160 .

The first substrate 110 has an accommodating window 111, a first wire line 112, and a plurality of first via holes 113, wherein the accommodating window 111 is hollowed out in the middle part of the first substrate 110, and the plurality of first A conductive material is filled in the via hole 113, and a conductive pad 114 is arranged at the lower end of the plurality of first via holes 113 respectively, and the upper end thereof is connected to the first wire line 112, and the first wire line 112, the conductive pad 114 and the plurality of wire lines are connected to each other. The conductive material filled in the first via holes 113 is electrically connected.

The first substrate 110 further includes a first circuit (not shown in the figure) composed of active and/or passive components, and the first circuit is electrically connected with the first wire line 112 . Moreover, the first substrate 110 may also be a stacked structure of multi-layer substrates, so as to allow the first circuit with a more complex structure and more functions to be provided.

The electronic biosensor 120 is combined and arranged in the accommodating window 111 of the first substrate 110 through a fixing material 121, and has a biosensing layer 122 and a plurality of conductive pads 123, wherein the biosensing layer 122 is arranged upwards , exposed in the accommodating window 111 of the first substrate 110 , and a plurality of conductive pads 123 are arranged upward to provide electrical connection of the electronic biosensor 120 .

The adhesive layer 130 is combined and arranged on the first substrate 110, and has a first hollow window 131 and a plurality of conductive bumps 132, wherein the first hollow window 131 is correspondingly arranged on the bio-sensing layer 122 of the electronic biosensor 120, To expose the bio-sensing layer 122, a plurality of conductive bumps 132 are respectively arranged on the plurality of conductive pads 123 of the electronic biosensor 120 and the first wire line 112 of the first substrate 110, and are respectively connected to the plurality of conductive pads. 123 is electrically connected to the first wire line 112 of the first substrate 110 and closes the conductive pad 123 on the electronic biosensor 120 and the first wire line 112 on the first substrate 110 .

The second substrate 140 is arranged on the top of the adhesive layer 130 in combination, and has a second hollow window 141 and a second wire circuit 142, wherein the second hollow window 141 is correspondingly arranged on the first hollow window 131 of the adhesive layer 130 and the electronic circuit. Above the biosensing layer 122 of the biosensor 120 to expose the biosensing layer 122, the second wiring 142 is arranged on the downward facing surface of the second substrate 140 and is electrically connected to a plurality of conductive bumps 132 of the adhesive layer 130 , the surface of the second substrate 140 can be modified into a hydrophilic or hydrophobic surface according to application requirements.

Likewise, the second substrate 140 further includes a second circuit (not shown in the figure) composed of active and/or passive components, and the second circuit is electrically connected to the second wire line 142 . In addition, the second substrate 140 can also be a stacked structure of multi-layer substrates, so as to allow the configuration of the first circuit with a more complex structure and more functions.

The channel layer 150 is disposed above the second substrate 140 and has at least one channel for at least one fluid to flow.

It is worth noting that the flow channel layer 150 further includes at least one pump component, at least one valve component, at least one liquid mixing component, other microfluidic components or any combination thereof for the flow and pretreatment of at least one fluid. The channel layer 150 can also be a multi-layered structure with multiple layers for different fluids to flow, and its surface is modified to be hydrophilic or hydrophobic. The channel layer 150 can be made of a transparent material or an opaque material, such as polymer material, plastic, ceramic, metal, silicon wafer, glass, or other composite materials.

Furthermore, the channel layer may further include a third circuit (not shown in the figure), the third circuit is electrically connected to the second circuit on the second substrate 140, and the third circuit and its connection are connected to at least one fluid. isolated. It should be noted that in the overall structure of the present invention, except for the flow channel, the joints of other components should be isolated from fluid to avoid fluid leakage; for example, the aforementioned first circuit and second circuit should also be isolated from at least one fluid.

The cover 160 is disposed above the channel layer 150 and has at least one first fluid inlet 161 and at least one first fluid outlet 162 for the inflow and outflow of at least one fluid, at least one fluid inlet 161 and at least one fluid outlet 162 It is connected with at least one channel of the channel layer 150; wherein at least one fluid flows in from at least one first fluid inlet 161, and flows through the second hollow window 141 of the second substrate 140 and the first of the adhesive layer 130 through at least one channel. The hollow window 131 is used to contact the biosensing layer 122 of the electronic biosensor 120 for sensing, and then flows out from at least one fluid outlet 162 .

The cover 160 can be made of a transparent material or an opaque material, such as polymer material, plastic, ceramic, metal, silicon wafer, glass, or other composite materials.

It is worth noting that, in order to simplify the assembly procedure, the above-mentioned components can be manufactured in an integrated manner, so as to reduce the number of components and reduce the complexity of assembly. For example, the cover 160 is integrated with the channel layer 150, or the channel layer 150 is integrated with the second substrate 140, or the cover 160, the channel layer 150 and the second substrate 140 are integrated, or the cover 160 , the channel layer 150 , the second substrate 140 and the adhesive layer 130 are integrated into one.

Among them, other substrates and other flow channel layers can be arranged in sequence on the flow channel layer 150 to form a substrate structure with more layers. same.

In summary, the embodiment of the present invention discloses a multi-substrate integrated structure of an electronic biosensor and a microfluidic device. By combining the electronic biosensor and the microfluidic device, the electronic biosensor can detect The electronic signal, and its overall structure, except for the flow channel, can isolate the fluid and avoid leakage at the connection of other components, which is suitable for integrating various forms of electronic biosensors and microfluidic devices.

However, the above-mentioned embodiments are only illustrative of the effects of the present utility model, and are not intended to limit the present utility model. Retouch and change. In addition, the number of components in the above-mentioned embodiments is only for illustrative purposes, and is not intended to limit the present invention. Therefore, the scope of protection of the rights of the utility model should be as listed in the scope of patent application below.

Claims (10)

1. many substrate integrated structures of a kind of electronic type biology sensor and microfluidic device, it is characterised in that including：

One first substrate, with accommodating window, one first wire line and multiple first vias, the wherein accommodating window One conductive material of filling in the center section of the first substrate, the plurality of first via is disposed on, and it is many at this respectively The lower end of individual first via is provided with a conductive pad and connects first wire in the upper end of the plurality of first via Road, first wire line, the conductive pad are electrical connected with the conductive material of filling in the plurality of first via；

One electronic type biology sensor, is combined by a set material and is arranged in the accommodating window of the first substrate, with one Biological sensing layer and multiple conductive pads, wherein biological sensing layer is to set upward, exposed to the accommodating window of the first substrate Intraoral, the plurality of conductive pad is set upward, there is provided the electric connection of the electronic type biology sensor；

One adhesion layer, with reference to being arranged on the first substrate, with one first hollow out window and multiple conductive projections, wherein should First hollow out window is correspondingly arranged in the biological sensing layer top of the electronic type biology sensor, to expose biological sensing layer, The plurality of conductive projection be correspondingly arranged in respectively the electronic type biology sensor multiple conductive pads and the first substrate first On wire line, and it is electrically connected with the plurality of conductive pad and the first substrate respectively, and closes the electronic type biology sensor On conductive pad and first wire line on the first substrate；

One second substrate, is bonded to first substrate top, with one second hollow out window and one second by the adhesion layer Wire line, wherein the second hollow out window are correspondingly arranged in the first hollow out window and the biological biography of the electronic type of the adhesion layer The biological sensing layer top of sensor, to expose biological sensing layer, second wire line is disposed on the court of the second substrate Lower surface, the plurality of conductive projection with the adhesion layer is electrical connected, and the surface of the second substrate is to be modified to hydrophily or dredge Aqueous surface；

One flow channel layer, is arranged at second substrate top, and with an at least runner, for an at least flow of fluid；And

One covering, is arranged at flow channel layer top, and is exported with an at least first fluid entrance and an at least first fluid, For the stream into and out of an at least fluid, an at least fluid intake and an at least fluid issuing should with the flow channel layer At least a runner is connected,

Wherein, an at least fluid is flowed into from an at least first fluid entrance, and second base is flowed through by an at least runner The second hollow out window of plate and the first hollow out window of the adhesion layer, use the life for contacting the electronic type biology sensor Thing sensed layer, to be sensed, then flows out from an at least fluid issuing.

2. many substrate integrated structures of electronic type biology sensor as claimed in claim 1 and microfluidic device, its feature exists In the first substrate also includes first circuit being made up of actively and/or passively component, first circuit and first wire Circuit is electrically communicated.

3. many substrate integrated structures of electronic type biology sensor as claimed in claim 1 and microfluidic device, its feature exists In the second substrate also includes a second circuit being made up of actively and/or passively component, the second circuit and second wire Circuit is electrically communicated.

4. many substrate integrated structures of electronic type biology sensor as claimed in claim 1 and microfluidic device, its feature exists In the first substrate is the stack architecture of a multilager base plate.

5. many substrate integrated structures of electronic type biology sensor as claimed in claim 1 and microfluidic device, its feature exists In the second substrate is the stack architecture of a multilager base plate.

6. many substrate integrated structures of electronic type biology sensor as claimed in claim 1 and microfluidic device, its feature exists In the flow channel layer also includes at least a gang of Pu component, at least a valve member, at least one mixed liquid component, other microfluid components Or its any combination, to carry out the flowing and pretreatment of an at least fluid.

7. many substrate integrated structures of electronic type biology sensor as claimed in claim 1 and microfluidic device, its feature exists In the flow channel layer is a multilayered structure, and with many numbers of plies, and the runner layer surface is to be modified to hydrophily or hydrophobic table Face.

8. many substrate integrated structures of electronic type biology sensor as claimed in claim 3 and microfluidic device, its feature exists In, the flow channel layer also includes a tertiary circuit, and the tertiary circuit is electrical connected with the second circuit on the second substrate, and The tertiary circuit and the second circuit junction are and an at least fluid isolation.

9. many substrate integrated structures of electronic type biology sensor as claimed in claim 1 and microfluidic device, its feature exists In, the covering is integrated with the flow channel layer, or the flow channel layer is integrated with the second substrate, or the covering, The flow channel layer is integrated with the second substrate, or the covering, the flow channel layer, the second substrate and the adhesion layer are integrated into Integrally.

10. many substrate integrated structures of electronic type biology sensor as claimed in claim 1 and microfluidic device, its feature exists In, other substrates and other flow channel layers are also set gradually on the flow channel layer, to form the board structure of more layers, other substrates Structure with other flow channel layers is identical with combination with the structure of the flow channel layer with the second substrate with combination.