CN206331115U - The laser radar system scanned based on MEMS micromirror - Google Patents
The laser radar system scanned based on MEMS micromirror Download PDFInfo
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- CN206331115U CN206331115U CN201621313375.4U CN201621313375U CN206331115U CN 206331115 U CN206331115 U CN 206331115U CN 201621313375 U CN201621313375 U CN 201621313375U CN 206331115 U CN206331115 U CN 206331115U
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Abstract
The utility model is related to Radar Technology field, disclose a kind of laser radar system scanned based on MEMS micromirror, the shoot laser launched using MEMS micromirror refractive lasers simultaneously carries out laser scanning according to the default specified anglec of rotation to target area, pick-up probe receives in the target area reflection laser of target reverberation and is converted into echo pulse signal, and signal processing module receives and handles the echo pulse signal to obtain the positional information of the target reverberation.Whereby, measurement frequency height of the present utility model and low cost.
Description
Technical field
The utility model is related to Radar Technology field, more particularly to a kind of laser radar system scanned based on MEMS micromirror
System.
Background technology
Current multi-line laser radar realizes multi-thread scanning, such as U.S. by multiple emitting lasers and multiple pick-up probes
The laser radar VLP-16 of verlodyne companies is, it is necessary to 16 laser transmittings and reception, 16 radiating circuits and receiving circuit
Control ratio it is more intractable, the more difficult control of timing alorithm, and this laser uses laser diode, laser power peak-peak
For 75W, when measurement distance is 200m, if target reflectivity is smaller, no echo-signal.
In summary, prior art there will naturally be inconvenience and defect in actual use, and it is therefore necessary to improved.
Utility model content
For above-mentioned defect, the purpose of this utility model is to provide a kind of laser radar scanned based on MEMS micromirror
System, its light path alignment is more easy to realization, measurement frequency height and low cost.
To achieve these goals, the utility model provides a kind of laser radar system scanned based on MEMS micromirror, extremely
Include less：
Laser, launches shoot laser；
MEMS micromirror, reflects the shoot laser and carries out laser to target area according to the default specified anglec of rotation and sweep
Retouch；
Pick-up probe, receives in the target area reflection laser of target reverberation and is converted into echo impulse letter
Number；
Believe signal processing module, the position for receiving and handling the echo pulse signal to obtain the target reverberation
Breath.
According to the laser radar system scanned based on MEMS micromirror, the signal processing module includes being sequentially connected
Transimpedance amplifier, post amplifier, moment discrimination circuit and FPGA module；The echo pulse signal is input to described
Transimpedance amplifier, the transimpedance amplifier output voltage signal is to post amplifier, and the voltage signal is after described
Put and exported after amplifier modulation amplification to the moment discrimination circuit, the voltage signal is generated through the moment discrimination circuit to swash
Light flight finish time pulse, the FPGA module receives the laser flying finish time of the moment discrimination circuit input
Pulse.
According to the laser radar system scanned based on MEMS micromirror, the FPGA module includes：
According to the laser flying finish time pulse to measure the measurement submodule at laser time of flight interval；
According to the range information of the laser time of flight interval generation target reverberation apart from submodule；
Detect the angle submodule of the laser radar system and/or the angle information of MEMS micromirror scanning rotation；
The range information and the angle information are integrally formed to the position of the positional information of the target reverberation
Put submodule.
According to the laser radar system scanned based on MEMS micromirror, the FPGA module also includes：
The control submodule of the laser pulse emission of the triggering laser is controlled according to the MEMS micromirror anglec of rotation.
According to the laser radar system scanned based on MEMS micromirror, the laser radar system also includes focusing
Reception optical module in the reflection laser to the pick-up probe, the reception optical module is by an at least optical lens
Composition.
According to the laser radar system scanned based on MEMS micromirror, effective focusing of the reception optical module is straight
Footpath is 15 millimeters, and a diameter of 3 millimeters of the photosurface of the pick-up probe, the focal length of the receiving optics is 8 millimeters.
According to the laser radar system scanned based on MEMS micromirror, the pick-up probe is photodetector,
The reflection laser is by the photodiode on the photodetector to be converted into the echo pulse signal.
The laser radar system scanned based on MEMS micromirror according to any of the above-described, includes radar main body, institute
MEMS micromirror and the off-axis symmetric packages of the pick-up probe are stated in the radar main body, the laser is located at the MEMS
The laser beam emitting head of the top of micro mirror and the pick-up probe and the laser is corresponding with the MEMS micromirror.
According to the laser radar system scanned based on MEMS micromirror, the MEMS micromirror and the pick-up probe
Centre is provided with motor；The motor is provided with least one pair of magnet ring, and the motor wirelessly drives the radar by the magnet ring
Main body and/or MEMS micromirror rotation.
According to the laser radar system scanned based on MEMS micromirror, it is used in the radar main body provided with least one
Adjust the MEMS micromirror and reflect the light path of the shoot laser and/or adjust the pick-up probe reception reflection and swash
The speculum of the light path of light；And/or
The laser radar system is additionally provided with the data-interface for obtaining electric energy and/or data transfer；And/or
The laser is optical fiber laser.
It is described in the utility model that MEMS micromirror refractive lasers are used based on the laser radar system that MEMS micromirror is scanned
The shoot laser of transmitting simultaneously carries out laser scanning to target area according to the default specified anglec of rotation, and pick-up probe receives described
The reflection laser of target reverberation and echo pulse signal is converted into target area, signal processing module receives and handles described
Echo pulse signal is to obtain the positional information of the target reverberation.Whereby, the utility model measurement frequency height and low cost.
Brief description of the drawings
Fig. 1 is the signal of the laser radar system scanned based on MEMS micromirror described in the utility model preferred embodiment
Figure；
Fig. 2 is that the vertical view of the laser radar system scanned based on MEMS micromirror described in the utility model preferred embodiment is cutd open
Analysis figure；
Fig. 3 is that the facing for laser radar system scanned based on MEMS micromirror described in the utility model preferred embodiment is cutd open
Analysis figure；
Fig. 4 is to be connect described in the laser radar system scanned based on MEMS micromirror described in the utility model preferred embodiment
Receive the structural representation of optical module；
Fig. 5 is the echo letter of the laser radar system scanned based on MEMS micromirror described in the utility model preferred embodiment
Number process chart；
Fig. 6 is described in the laser radar system scanned based on MEMS micromirror described in the utility model preferred embodiment
The structure chart of FPGA module；
Fig. 7 is that the scanning of the laser radar system scanned based on MEMS micromirror described in the utility model preferred embodiment is visited
Flow gauge figure.
Embodiment
In order that the purpose of this utility model, technical scheme and advantage are more clearly understood, below in conjunction with accompanying drawing and implementation
Example, the utility model is further elaborated.It should be appreciated that specific embodiment described herein is only to explain
The utility model, is not used to limit the utility model.
The utility model preferred embodiment as shown in Figures 1 to 3, at least includes：Laser 10, launches shoot laser 101；
MEMS (Micro-Electro-Mechanical System, MEMS) micro mirror 20, reflects the shoot laser 101 simultaneously
Laser scanning is carried out to target area according to the default specified anglec of rotation；Pick-up probe 30, receives mesh in the target area
Mark the reflection laser 102 of reverberation and be converted into echo pulse signal；Signal processing module, receives and handles the echo impulse
Signal is to obtain the positional information of target reverberation.
With the fast development of information technology, optical communication technique, the another field of MEMS development is combined with optics, is claimed
For MOEMS (MOEMS).MOEMS is the microoptical electromechanical device and system realized using micro-processing technology, in system
Micro optical element (such as lens, speculum, grating) can converge in the presence of microelectronics and micro-mechanical device to light beam
The control actions such as poly-, reflection, diffraction, so as to realize the functions such as the switch of light, decay, scanning and imaging.MOMES scanning mirrors are usual
Refer to micro-mirror surface to deflect under driving force effect, so as to change the shooting angle of light beam, with traditional optical scan mode
Compare, advantage of the MOMES scanning mirrors in terms of volume, weight, power consumption and dynamic response is especially prominent, and MEMS is also equipped with addition
Low cost common to device, the advantage for being easily achieved batch micro operations.The MEMS micromirror that i.e. the utility model is used is MOEMS
Scanning mirror, its rotation process of controllable setting, therefore its minute surface reflect the shoot laser 101 that the laser 10 is launched by rotating
Target area can be scanned；The present embodiment is preferred to use one-dimensional MEMS micromirror, can be One-dimensional Vertical direction rotation sweep
It can also be one-dimensional horizontal direction rotation sweep；If using One-dimensional Vertical direction rotation sweep, then can correspondingly it control
Whole 360 degree of rotations of radar system horizontal direction, so that laser scanning can reach maximum scan angle, vice versa.
Because the size of MEMS micromirror 20 is small, resonant frequency is high, therefore its one-dimensional scan frequency can replace existing radar system
16 laser line generator scan frequencies in system, i.e., receive detector 30 using a laser 10, a MEMS micromirror and one
Achieve that 16 lines are scanned, from the sequence circuit without considering 16 lasers so that radar is more easily implemented batch micro operations.
The pick-up probe 30 of the present embodiment is photodetector, and the reflection laser passes through the photodetector
Photodiode on 30 is to be converted into the echo pulse signal, and the echo pulse signal is pulse current.Such as Fig. 5 institutes
Show, transimpedance amplifier 201 that the preferred signal processing module of the present embodiment includes being sequentially connected, post amplifier 202,
Moment discrimination circuit 203 and FPGA module 204；The pick-up probe 30 sends echo pulse signal to the signal transacting
Module, the echo pulse signal is input to transimpedance amplifier 201, and the transimpedance amplifier 201 is by the echo impulse
Signal is converted into voltage signal and is output to post amplifier 202, and the voltage signal is after the modulation amplification of post amplifier 202
Moment discrimination circuit 203 is output to, the voltage signal generates laser flying finish time arteries and veins through the moment discrimination circuit 203
Punching, the laser flying finish time pulse that 204 time of reception of the FPGA module discriminator circuit 203 is inputted.Surveyed actual
During amount, because of the change of the factors such as distance, target reflectivity, the amplitude of echo pulse signal can be varied widely, that is, be moved
State scope is larger, and waveform can also be affected, so as to produce influence to detection accuracy；In view of above practical factor
On the basis of, discriminator circuit 203 can reach the drift error that measurement result is reduced or eliminated and time at the time of this programme is used
Shake, it is ensured that the accuracy of measurement result.
As shown in fig. 6, the FPGA module 204 includes：
According to the laser flying finish time pulse to measure the measurement submodule 2041 at laser time of flight interval；
According to the range information of the laser time of flight interval generation target reverberation apart from submodule 2042；
Detect the angle submodule of the angle information of the radar system and/or the scanning rotation of the MEMS micromirror 20
2043；
The range information and angle information are integrally formed to position of the positional information of the target reverberation
Module 2044.
The FPGA module also includes：
The control submodule of the laser pulse emission of triggering laser 10 is controlled according to the anglec of rotation of MEMS micromirror 20
2045。
FPGA is a kind of integrated circuit of field programmable gate array, and the utility model is by the TDC in existing radar system
The measurement function of (Time-to-Digital Converter, time figure converter) circuit is written in FPGA module 204
Measurement submodule 2041 is replaced；The control submodule 2045 of the FPGA module of the present embodiment can also control laser simultaneously
The synchronous triggering of device 10, its angle submodule 2043 can be coding disk 301, and angle information is obtained by coding disk 301, and by angle
Degree information combines the range information obtained apart from submodule 2042 can obtain the institute of target reverberation on position submodule 2044
State positional information.Current FPGA transmission speed is 30M/s, therefore its measurement is faster more efficient with calculating speed.
Fig. 4 shows that the present embodiment is preferably used in the focusing reflection laser 102 to the reception light on pick-up probe 30
Module 50 is learned, the reception optical module 50 is made up of an at least optical lens.The present embodiment include the first optical lens 51,
Second optical lens 52, the 3rd optical lens 53 and the 4th optical lens 54, wherein the first optical lens 51 and the 3rd optics
Lens 53 are spherical lens, and the second optical lens 52 and the 4th optical lens 54 are non-spherical lens；Reflection laser 102 passes through
It is refracted to the second optical lens 52 after one optical lens 51, the plane of incidence of the second optical lens 52 and the 4th optical lens 54 is all
Concave curved surface and exit facet are plane, and reflection laser 102 is incident and collimate and be injected into the 3rd from the concave curved surface of the second optical lens 52
Optical lens 53, the 3rd optical lens 53 reflects its reflection laser 102 and focused on the concave curved surface of the 4th optical lens 54, most
Shone eventually by the 4th optical lens 54 collimation on pick-up probe 20, its structure optimization design of receiving light path.
Certainly, the optical module 50 that receives can also be formed using the optical lens of various combination structure.
Particularly, the effective focal diameter for receiving optical module 50 is 15 millimeters, i.e. the first optical lens 51
A diameter of 15 millimeters of the plane of incidence, a diameter of 3 millimeters of the photosurface of the pick-up probe 30, by other optical lenses
Parameter optimization cause the receiving optics focal length be 8 millimeters；And then the measurement of the radar system is determined into 200m
Range and the angle of visual field are that can meet hot spot in the range of 20 degree always in detector photosurface.
The laser 10 is optical fiber laser, and optical fiber laser beam quality is better than laser diode beam quality, hair
Dissipate angle small；That is launch spot launch spot energy at farthest range is still relatively concentrated, then required Laser emission energy is just smaller, and
By receiving optical module 50, converge light spot received it is very small, therefore optimization light source use and light path design can be effective
Laser power needed for reduction.MEMS micromirror 20 is off-axis with receiving light path, and the laser of optical fiber laser transmitting enters the micro- reflections of MEMS
Eyeglass, MEMS scan frequencies are 20KHz, and mechanical scanning angle is +/- 5 degree, and optical scan angle is +/- 10 degree, that is, realizes one
20 degree of visual field vertical scanning are tieed up, while the 360 degree of horizontal rotations of whole mechanism, realize the horizontal sweep of light beam, light beam is completed with this
Scanned while vertically and horizontally.If the vertical scan direction of MEMS micromirror 20 is once, the control submodule of FPGA module 204
Block 2045 launches 16 laser pulses by controlling optical fiber laser, that is, completes the scanning of 16 line lasers.When transmitting laser is in sky
Between capture target, produce rear orientation light, the rear orientation light from target enters single base optical receiving system, thus complete
Into the transmitting and reception of single base off-axis system.
Such as Fig. 2~3, the radar system of the present embodiment includes radar main body, and the MEMS micromirror 20 and reception are visited
The off-axis symmetric packages of device 30 are surveyed in radar main body, the laser 10 is located at the top of MEMS micromirror 20 and pick-up probe 30
And the laser beam emitting head 111 of the laser 10 is corresponding with MEMS micromirror.Its middle part is provided with electric machine assembly 40, includes and is located at
Motor 41 in the middle of MEMS micromirror 20 and pick-up probe 30；The motor 41 is provided with least one pair of magnet ring 42, the motor
41 bottom supports provided with bearing 43 and fixed, and the motor 41 wirelessly drives radar main body and/or MEMS by the magnet ring 42
Micro mirror 20 rotates.Specifically, whole radar system carries out 360 degree by motor 41 and horizontally rotated, and avoids and use slip ring, whole
The frictional dissipation part of slip ring etc is not present in individual structure, top, which powers with signal transmission, to be connected by a pair of magnet rings, significantly
Improve product service life.Its structure design innovated, realizes three-dimensional distance and angle, ash in the case of without using slip ring
Spend information measurement.
First is additionally provided with the radar main body it is wirelessly transferred control panel 302 and second and is wirelessly transferred control panel 303, it is described
First is wirelessly transferred the top that control panel 302 is located at coding disk 301, and described second, which is wirelessly transferred control panel 303, is located at optical fiber and swashs
The bottom of light device 10.Specific running is as follows：Described second control for being wirelessly transferred the reception control submodule 2045 of control panel 303 refers to
Order is outwards reflected with controlling laser 10 to launch shoot laser 101 to MEMS micromirror 20, and laser runs into anti-after target reverberation
It is emitted back towards the received optical module 50 of reflection laser 102 come to converge on pick-up probe 30, re-sends to second and be wirelessly transferred
Carry out by the time difference of Laser emission, reflection calculating the range information for obtaining target reverberation on control panel 303, then by distance
Information, which is sent to first and is wirelessly transferred the angle information that is obtained on control panel 302 with coding disk 301, integrate that to obtain target anti-
The positional information of thing is penetrated, its positional information is calculated according to range information and angle information.The laser radar system
The data-interface 304 for obtaining electric energy and/or data transfer is additionally provided with, electric energy can be obtained from outside by this interface equipment,
And instruction and data is transmitted by communication interface.It is, of course, also possible to using the method for phase ranging or range of triangle.
It is preferred that provided with least one for adjusting the refraction of MEMS micromirror 20 shoot laser in the radar main body
101 light path and/or the adjustment pick-up probe 30 receive the speculum 13 of the light path of reflection laser 102.
As Fig. 7 shows that the utility model scanning step flow is as follows：
Step S101：Radar main body described in electric drive rotates with the MEMS micromirror 20 on the motor 41；
Step S102：The laser 10 launches shoot laser 101；
Step S103：The rotation of MEMS micromirror 20 refraction shoot laser 101 carries out laser to the target area
Scanning；
Step S104：The pick-up probe 30 receives the reflection laser 102 of the target reverberation；
Step S105：Described information processing module calculates the positional information of the target reverberation；
Step S106：Described information processing module controls the transmitting of laser 10 laser.
In summary, it is described in the utility model to be rolled over based on the laser radar system that MEMS micromirror is scanned using MEMS micromirror
Penetrate the shoot laser of laser transmitting and laser scanning, pick-up probe are carried out to target area according to the default specified anglec of rotation
Receive in the target area reflection laser of target reverberation and be converted into echo pulse signal, signal processing module is received simultaneously
The echo pulse signal is handled to obtain the positional information of the target reverberation.Whereby, the utility model is using optimization
Circuit, light path and product structure design can be measured in the range of 200 meters, the three-dimensional distance and angle of the angle of visual field ± 10 °, gray scale
Information, measurement frequency reaches 320000 times per second.
Certainly, the utility model can also have other various embodiments, spiritual and its essence without departing substantially from the utility model
In the case of, those of ordinary skill in the art work as can make various corresponding changes and deformation, but these according to the utility model
Corresponding change and deformation should all belong to the scope of the claims appended by the utility model.
Claims (10)
1. a kind of laser radar system scanned based on MEMS micromirror, it is characterised in that at least include：
Laser, launches shoot laser；
MEMS micromirror, reflects the shoot laser and carries out laser scanning to target area according to the default specified anglec of rotation；
Pick-up probe, receives in the target area reflection laser of target reverberation and is converted into echo pulse signal；
Signal processing module, receives and handles the echo pulse signal to obtain the positional information of the target reverberation.
2. the laser radar system according to claim 1 scanned based on MEMS micromirror, it is characterised in that at the signal
Reason module includes transimpedance amplifier, post amplifier, moment discrimination circuit and the FPGA module being sequentially connected；The echo
Pulse signal is input to the transimpedance amplifier, and the transimpedance amplifier output voltage signal is described to post amplifier
Voltage signal is exported to the moment discrimination circuit after post amplifier modulation amplification, and the voltage signal is through described
Moment discrimination circuit generates laser flying finish time pulse, and the FPGA module receives the institute of the moment discrimination circuit input
State laser flying finish time pulse.
3. the laser radar system according to claim 2 scanned based on MEMS micromirror, it is characterised in that the FPGA moulds
Block includes：
According to the laser flying finish time pulse to measure the measurement submodule at laser time of flight interval；
According to the range information of the laser time of flight interval generation target reverberation apart from submodule；
Detect the angle submodule of the laser radar system and/or the angle information of MEMS micromirror scanning rotation；
The range information and the angle information are integrally formed to position of the positional information of the target reverberation
Module.
4. the laser radar system according to claim 3 scanned based on MEMS micromirror, it is characterised in that the FPGA moulds
Block also includes：
The control submodule of the laser pulse emission of the triggering laser is controlled according to the MEMS micromirror anglec of rotation.
5. the laser radar system according to claim 1 scanned based on MEMS micromirror, it is characterised in that the laser thunder
Also include the focusing reflection laser up to system to the reception optical module on the pick-up probe, the reception optical mode
Block is made up of an at least optical lens.
6. the laser radar system according to claim 5 scanned based on MEMS micromirror, it is characterised in that the reception light
The effective focal diameter for learning module is 15 millimeters, a diameter of 3 millimeters of the photosurface of the pick-up probe, the reception optics
The focal length of module is 8 millimeters.
7. the laser radar system according to claim 1 scanned based on MEMS micromirror, it is characterised in that the reception is visited
Survey device is photodetector, and the reflection laser is by the photodiode on the photodetector to be converted into the echo
Pulse signal.
8. the laser radar system scanned based on MEMS micromirror according to any one of claim 1~7, it is characterised in that
Include radar main body, the MEMS micromirror and the off-axis symmetric packages of the pick-up probe are described in the radar main body
Laser be located at the top of the MEMS micromirror and the pick-up probe and the laser beam emitting head of the laser with it is described
MEMS micromirror is corresponding.
9. the laser radar system according to claim 8 scanned based on MEMS micromirror, it is characterised in that the MEMS is micro-
Motor is provided with the middle of mirror and the pick-up probe；The motor is provided with least one pair of magnet ring, and the motor passes through the magnetic
Ring wirelessly drives the radar main body and/or the MEMS micromirror to rotate.
10. the laser radar system according to claim 8 scanned based on MEMS micromirror, it is characterised in that the radar
It is used to adjust the light path of the MEMS micromirror refraction shoot laser provided with least one in main body and/or adjusts described receive
Detector receives the speculum of the light path of the reflection laser；And/or
The laser radar system is additionally provided with the data-interface for obtaining electric energy and/or data transfer；And/or
The laser is optical fiber laser.
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| US12050288B2 (en) | 2017-01-05 | 2024-07-30 | Seyond, Inc. | High resolution LiDAR using high frequency pulse firing |
| CN107153196A (en) * | 2017-03-06 | 2017-09-12 | 深圳市速腾聚创科技有限公司 | Laser radar and laser radar control method |
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