CN206992061U - A kind of ceramic substrate locating calibration device - Google Patents

Abstract

The utility model discloses a positioning and calibrating device for ceramic substrates. The positioning mounting plate is arranged horizontally, the bottom surface is used for positioning and fixing, and the top surface is provided with guiding inclined blocks. At least one guiding inclined block is correspondingly arranged at the side of each ceramic substrate; A longitudinally inclined guide surface is set on the inclined block, and the guide surface faces the ceramic substrate. The distance between every two opposite guide surfaces is gradually reduced from top to bottom. When the ceramic substrate is grasped by the mechanical arm and When placed on the bottom, the size of the upper part is larger, and a larger error can be tolerated. When the mechanical arm is released, the ceramic substrate slides downward under the action of gravity. Because the guide surface is relatively inclined, it finally falls to the bottom with the smallest distance between the bottom The size of the ceramic substrate is the same as that of the ceramic substrate, so the position of the ceramic substrate on the positioning mounting plate is uniquely determined. At this time, the accuracy of the robot grabbing the ceramic substrate is improved. Compared with the grabbing method of directly grabbing the ceramic substrate, it can be Greatly reduce the error of robotic arm grabbing.

Description

A ceramic substrate positioning calibration device

technical field

The utility model relates to the technical field of semiconductor manufacturing, and further relates to a ceramic substrate positioning calibration device.

Background technique

Ceramic substrates have excellent thermal conductivity and air tightness, and are widely used in power electronics, electronic packaging, hybrid microelectronics and multi-chip modules and other fields. The width of the loading box of the ceramic substrate is slightly larger than the width of the ceramic substrate. During the process of using the wafer robot arm to carry the ceramic substrate, the random storage of the ceramic substrate in the material box will have a unilateral position of 2-4 mm in the horizontal direction. The deviation causes the relative position of the gripping position of the wafer robot arm to be inconsistent with the relative position of the ceramic substrate. If these deviations are not compensated, the positional accuracy of the ceramic substrate cannot be guaranteed in the next processing process.

In the prior art, there are only calibration devices for circular wafers. These devices generally use sensors and negative pressure adsorption devices to calibrate the wafers. There is no device for positioning and calibrating ceramic substrates. Therefore, a device for ceramic substrates is designed. The device for positioning and calibrating the substrate is a technical problem that those skilled in the art need to solve.

Utility model content

The utility model provides a ceramic substrate positioning calibration device, which is used for accurate positioning of the ceramic substrate, and can greatly reduce the error of the mechanical arm grabbing. The specific scheme is as follows:

A ceramic substrate positioning calibration device, comprising:

The positioning mounting plate is set horizontally, and the bottom surface is used for positioning and fixing;

The inclined guide block is arranged on the top surface of the positioning mounting plate, and at least one inclined guide block is arranged on the side of each ceramic substrate; each inclined guide block is provided with a longitudinally inclined guide surface, so The guide surfaces face the ceramic substrate; the distance between each two opposite guide surfaces is tapered from top to bottom, and the minimum distance between the bottoms is the same as the size of the ceramic substrate.

Optionally, the guide ramp includes a vertical plate and a horizontal plate, the guide surface is arranged on the vertical plate, bolt holes are opened on the horizontal plate, and are fixed to the positioning mounting plate by bolts.

Optionally, waist-shaped positioning holes are provided on the horizontal plate, and the length direction of the waist-shaped positioning holes is the same as the inclination direction of the guide surface.

Optionally, multiple rows of bolt holes are provided on the positioning mounting plate according to the size of the ceramic substrate, and each of the guide ramps corresponds to one row, so as to adjust the distance between two opposite guide ramps.

Optionally, the included angle between the guide surface and the top surface of the positioning mounting plate is 60-80 degrees.

Optionally, a stepped surface is provided on the inclined guide block, and the level of the stepped surface on each of the inclined guide blocks is the same for supporting the ceramic substrate; the guide surface is close to the stepped surface The sections are arranged vertically.

Optionally, the bottom surface of the positioning mounting plate is fixedly connected to the top end of the support rod, and the bottom end of the support rod is provided with a support base, and the support base has a horizontal component and is fixed by bolts.

Optionally, the positioning mounting plate and the support rod are fixed by bolts, a bolt hole is set in the center of the positioning mounting plate, and a circular arc-shaped waist shape is set on the positioning mounting plate with the central bolt hole as the center of the circle. holes, fine-tuning the angle of the positioning mounting plate by adjusting the position of the bolts in the waist-shaped holes.

Optionally, the angle of the arc of the waist hole is 45 degrees.

The utility model provides a positioning and calibrating device for a ceramic substrate, which comprises a positioning installation plate and a guide inclined block. At least one inclined guide block is set correspondingly to guide and limit the position of each side of the ceramic substrate; the inclined guide block is provided with a longitudinally inclined guide surface, the guide surface faces the ceramic substrate, and is used to guide the ceramic substrate. Guide, adjust the horizontal position of the ceramic substrate, the distance between every two oppositely set guide surfaces is tapered from top to bottom, when the ceramic substrate is grabbed by the mechanical arm and placed from top to bottom, it will first reach the guide slope The top of the block, the size of the top is larger, and a larger error can be tolerated. When the mechanical arm is released, the ceramic substrate slides downward under the action of gravity. Because the guide surface is relatively inclined, it finally falls to the bottom, and the distance between the bottom and the bottom is the smallest The size of the ceramic substrate is the same as that of the ceramic substrate, so the position of the ceramic substrate on the positioning mounting plate is uniquely determined, and because the bottom surface of the positioning mounting plate is fixed, the positions of the positioning mounting plate and the robot arm are uniquely determined. The accuracy of picking up the ceramic substrate is improved. Compared with the grabbing method of taking out the ceramic substrate directly from the packaging box, the error of grabbing by the robotic arm can be greatly reduced.

Description of drawings

In order to more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the following will briefly introduce the accompanying drawings that need to be used in the description of the embodiments or the prior art. Obviously, the accompanying drawings in the following description These are only some embodiments of the utility model, and those skilled in the art can also obtain other drawings based on these drawings without creative work.

Fig. 1 is a structural diagram of a specific embodiment of the ceramic substrate positioning calibration device provided by the utility model;

Figure 2 is an axonometric view of the exploded structure of each part;

Figure 3 is an exploded structure diagram in the front view direction;

Figure 4 is a structural diagram of the guide ramp.

These include:

Positioning mounting plate 1, waist-shaped hole 11, guide inclined block 2, vertical plate 21, horizontal plate 22, step surface 23, support rod 3, support base 4.

Detailed ways

The core of the utility model is to provide a ceramic substrate positioning and calibration device, which is used for accurate positioning of the ceramic substrate, and can greatly reduce the error of the mechanical arm grabbing.

In order to enable those skilled in the art to better understand the technical solutions of the present invention, the ceramic substrate positioning and calibration device of the present invention will be described in detail below in conjunction with the accompanying drawings and specific implementation methods.

As shown in Figure 1, it is a structural diagram of a specific embodiment of the ceramic substrate positioning and calibration device provided by the utility model, Figure 2 is an exploded structure axonometric view of each part, and Figure 3 is an exploded structure diagram in the front direction. It mainly includes a positioning mounting plate 1 and a guide inclined block 2. The positioning mounting plate 1 is arranged horizontally. The bottom surface is used for positioning and fixing. , remain stationary. The guide ramps 2 are arranged on the top surface of the positioning mounting plate 1, and at least one guide ramp 2 is provided on the side of each ceramic substrate. The ceramic substrate is supported by a plurality of guide ramps 2 to keep the ceramic substrate placed horizontally. Each guide ramp 2 is provided with a longitudinally inclined guide surface, and the guide surface faces the ceramic substrate. If the ceramic substrate is pressed against the guide surface, it will slide to the other side under the action of gravity; The distance between the surfaces tapers from top to bottom. For ceramic substrates, it is generally rectangular. That is to say, at least two sets of opposite guide ramps 2 should be provided. A set of opposite guide surfaces defines its length, and the minimum spacing at the bottom is the same as the size of the ceramic substrate, that is to say, when the ceramic substrate slides to the bottom, it is just clamped by the guide ramp 2, completely defining its position. There is very little error.

During operation, the mechanical arm takes out the ceramic substrate from the material box, and places the ceramic substrate in the space surrounded by the guide ramp 2. There is a large error in the position of the ceramic substrate in the material box, but it will not exceed the guide ramp. The topmost spacing of the block 2 will reach the bottom position under the limit of the guide ramp block 2 after the ceramic substrate is loosened, reducing the existing error. At this time, the ceramic substrate is taken out vertically by the mechanical arm, and the precision is greatly improved.

Specifically, the inclined guide block 2 in the utility model includes a vertical plate 21 and a horizontal plate 22, the vertical plate 21 and the horizontal plate 22 are perpendicular to each other, the guide surface is arranged on the vertical plate 21, and the upper half of the vertical plate 21 Parts are approximately trapezoidal or triangular. Bolt holes are provided on the horizontal plate 22, which are fixed on the positioning mounting plate 1 by bolts. The bottom surface of the horizontal plate 22 is attached to the positioning mounting plate 1, and its position is fixed by bolts.

In order to be able to adjust the position of the inclined guide block 2 on the positioning mounting plate 1, a waist-shaped positioning hole is set on the horizontal plate 22, and the length direction of the waist-shaped positioning hole is the same as the inclination direction of the guide surface, so that a group of opposite guide inclined blocks 2 The distance can be adjusted. As shown in Fig. 1, the utility model is provided with three sets of six guiding slanting blocks 2, which enclose a rectangular space and can limit the position of the rectangular ceramic substrate. The position of the guide ramp 2 needs to be set according to the specific shape of the ceramic substrate, and the situation of odd-numbered sides should also be included in the protection scope of the present invention.

Multiple rows of bolt holes are set on the positioning mounting plate 1 according to the size of the ceramic substrate, and each slanting guide block 2 corresponds to a row, so as to adjust the distance between the two slanting guide blocks set oppositely, by fixing the slanting guide block 2 Different bolt holes are used to match ceramic substrates of different sizes.

Preferably, the included angle between the guide surface of the present invention and the top surface of the positioning mounting plate 1 is 60-80 degrees, including both ends. If the angle is too large, the ceramic substrate will fall too fast, the impact will be greater, and it will be easily damaged. If the angle is too small, the friction will increase, and the ceramic substrate may be stuck on the guide surface.

In order to support the ceramic substrate, the utility model sets a step surface 23 on the inclined guide block 2, as shown in Figure 4, which is a structural diagram of the inclined guide block 2, and the horizontal height of the step surface 23 on each inclined guide block 2 Similarly, the ceramic substrate is limited on the horizontal plane, the step surface is horizontal, intersects with the guide, and is supported by the step surface when the ceramic substrate falls to the bottom; the part of the guide surface close to the step surface 23 is vertically arranged, and this section is vertical Part is where the distance between the guide surfaces is the smallest, the height of the vertical section should be greater than the thickness of the ceramic substrate, and the ceramic substrate is completely limited by the vertical section, so the positioning is more accurate.

On the basis of any of the above-mentioned technical solutions and their mutual combination, the bottom surface of the positioning installation plate 1 in the utility model is fixedly connected to the top of the support rod 3, the support rod 3 is arranged vertically, the top end is connected to the positioning installation plate 1, and the bottom end is arranged The supporting base 4 has a horizontal component, and the bottom surface is a horizontal plane, which can be fixed on the ground or other horizontal planes by bolts. Keep the positioning mounting plate 1 level.

The positioning mounting plate 1 and the support rod 3 are fixed by bolts. The center of the positioning mounting plate 1 is provided with a bolt hole, and the central bolt hole is the center of the circle. On the positioning mounting plate 1, an arc-shaped waist-shaped hole 11 is arranged, and the waist-shaped hole 11 and the The bolt holes in the center are respectively fixed and connected by bolts. If you need to adjust the angle of the positioning mounting plate 1, you only need to loosen the bolts in the central bolt hole and the waist-shaped hole 11, and rotate the positioning mounting plate 1 around the central bolt hole until it is in place. Finally, fix the bolt again, the position of the bolt and the support rod 3 in the waist-shaped hole 11 remains unchanged, and the angle of the positioning mounting plate 1 is fine-tuned by adjusting the position of the bolt in the waist-shaped hole 11.

Preferably, the angle of the arc of the waist-shaped hole 11 in the present invention is 45 degrees. Of course, other angles can also be set, and the present invention does not make specific limitations here.

The above description of the disclosed embodiments enables those skilled in the art to realize or use the utility model. Various modifications to these embodiments will be obvious to those skilled in the art, and the general principles defined herein can be implemented in other embodiments without departing from the spirit or scope of the present utility model . Therefore, the present invention will not be limited to these embodiments shown herein, but will conform to the widest scope consistent with the principles and novel features disclosed herein.

Claims (9)

1. A kind of 1. ceramic substrate locating calibration device, it is characterised in that including：

   Location and installation plate (1), in being horizontally disposed with, bottom surface is used to position fixation；

   Skewback (2) is oriented to, is arranged at the top surface of the location and installation plate (1), the side edge of each ceramic substrate is at least corresponding to be set Put a guiding skewback (2)；Spigot surface in fore-and-aft tilt, the spigot surface are set on each guiding skewback (2) Towards ceramic substrate；The direction of the distance between described spigot surface that each two is oppositely arranged from top to bottom is tapered, bottom spacing It is identical with the size of ceramic substrate at minimum.
2. 2. ceramic substrate locating calibration device according to claim 1, it is characterised in that the guiding skewback (2) includes Vertical plate (21) and level board (22), the spigot surface are arranged on the vertical plate (21), are opened up on the level board (22) Bolt hole, it is secured by bolts on the location and installation plate (1).
3. 3. ceramic substrate locating calibration device according to claim 2, it is characterised in that set on the level board (22) Kidney-shaped positioning hole, the length direction of the kidney-shaped positioning hole are identical with the incline direction of spigot surface.
4. 4. ceramic substrate locating calibration device according to claim 2, it is characterised in that on the location and installation plate (1) By the size of ceramic substrate, multiple rows of bolt hole, each corresponding row of guiding skewback (2), to adjust be oppositely arranged two are set The distance between individual described guiding skewback.
5. 5. ceramic substrate locating calibration device according to claim 1, it is characterised in that the spigot surface and the positioning Angle between installing plate (1) top surface is 60~80 degree.
6. 6. ceramic substrate locating calibration device according to claim 1, it is characterised in that set on the guiding skewback (2) Step surface (23) is put, the step surface (23) level height on each guiding skewback (2) is identical, for support ceramic base Plate；The spigot surface is in be vertically arranged close to the part of the step surface (23).
7. 7. the ceramic substrate locating calibration device according to any one of claim 1 to 6, it is characterised in that the positioning peace The bottom surface of loading board (1) is fixedly connected with the top of support bar (3), and the bottom of the support bar (3) sets support base (4), described Support base (4) has horizontal component, is bolted.
8. 8. ceramic substrate locating calibration device according to claim 7, it is characterised in that the location and installation plate (1) with The support bar (3) is bolted, the centrally disposed bolt hole of the location and installation plate (1), using the bolt hole at center as The mounting hole (11) of arc-shaped is set on the center of circle, the location and installation plate (1), by adjustment bolt in the mounting hole (11) Fine position described in location and installation plate (1) angle.
9. 9. ceramic substrate locating calibration device according to claim 8, it is characterised in that mounting hole (11) circular arc Angle is 45 degree.