CN207502929U - A kind of stacking diffraction imaging device - Google Patents
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Abstract
本实用新型公开了一种层叠衍射成像装置,属于衍射成像和全息成像领域。本方法利用分光棱镜组、光纤等分光装置将含物体信息额入射光分为多个出射光束,每个出射光束对应一个接收装置;在进入接收装置前,利用空间光调制器或者固定的模板对每个出射光束的振幅、相位或者仅对二者之一的分布进行调节,从而可获得一组相关的衍射图样,之后便利用层叠衍射算法进行重建,得到物体的振幅相位信息,即全息像。利用本装置,可以一次拍照同时获得多张物体的衍射图样,大大减少图样接收时间,而且重建样品像时无需分离光斑,装置组装好之后,其参数可固定在某一值,再次使用时无需重复调节,有利于工业化应用。
The utility model discloses a laminated diffraction imaging device, which belongs to the fields of diffraction imaging and holographic imaging. In this method, the incident light containing object information is divided into multiple outgoing beams by using a beam splitting prism group, an optical fiber and other light splitting devices, and each outgoing beam corresponds to a receiving device; before entering the receiving device, the spatial light modulator or a fixed template is used to pair The amplitude, phase, or only one of the two distributions of each outgoing beam is adjusted to obtain a set of related diffraction patterns, which are then reconstructed using the stacked diffraction algorithm to obtain the amplitude and phase information of the object, that is, the hologram. With this device, it is possible to obtain the diffraction patterns of multiple objects at the same time by taking a photo at the same time, which greatly reduces the time for pattern reception, and there is no need to separate the spot when reconstructing the sample image. After the device is assembled, its parameters can be fixed at a certain value, and there is no need to repeat it when it is used again. Adjustment is conducive to industrial applications.
Description
技术领域technical field
本发明属于衍射成像和全息成像领域,具体涉及利用分光装置将含物体信息的入射光分为多个子光束,进而对每个子光束的振幅、相位或二者之一进行调节,来获得多个相关的衍射图样;之后利用层叠衍射算法进行重建,获得物体的全息像。The invention belongs to the fields of diffraction imaging and holographic imaging, and specifically relates to dividing incident light containing object information into multiple sub-beams by using a spectroscopic device, and then adjusting the amplitude, phase or one of the two sub-beams to obtain multiple correlations. The diffraction pattern of the object is reconstructed using the stacked diffraction algorithm to obtain a holographic image of the object.
背景技术Background technique
层叠衍射(Ptychography)是近十几年来发展起来的一种新型获取物体全息图的方法,与传统的全息方法(holography)不同,该方法无需参考光,而是通过改变光波和物体的相对位置获取一系列衍射光斑,照射在物体上的光斑和其它至少一个光斑有重叠部分。衍射光斑通过CMOS、CCD等装置进行记录,之后可以利用计算机程序对这些光斑进行衍射迭代计算,来获取物体的相位、振幅信息,实现对物体的全息成像 (J. M. Rodenburg, Adv.Imag. Elect. Phys. 150, 87-184, 2008)。如果光波函数未知的话,还可以获得光波函数信息(P.Thibault et al, Ultramicroscopy, 109, 338-343, 2009)。然而,传统的层叠衍射方法需要微机械装置来移动光斑和样品,这对机械装置提出了很高的要求,为了提高测量精度,该方法需要提高各个光斑间重叠面积,这使得迭代计算时时间代价消耗较大。G.Zheng等人在传统层叠衍射方法基础上于2013年提出了Fourier空间的相干衍射成像方法,该方法无需机械装置,而是利用高能量发光二极管产生激光阵列,利用CCD接收不同二极管照射时的光斑(G. Zheng et al, Nature Photonics,7,739-745,2013);为提高测量精度该方法同样需要增加二极管个数或改变其发光阵列形态,这也在一定程度上增加了设备的复杂程度。O. Cohen等人提出提出了单曝光层叠衍射技术,其利用多孔阵列在4f系统后焦面上得到一组含物体信息的光斑,这相当于传统层叠衍射所得到的衍射光斑组;由于只需要一次曝光,因此光斑接收时间大大缩短;不过该方法需要从一次曝光的图样中分离出各个衍射光斑,这又增加了后期处理的难度(O. Cohen et al, Optica, 3, 9-14, 2016)。董昭等人在已公开的专利文件(申请号201610028448.3)中提出了一种基于相位层叠衍射的全息方法,即利用空间光调制器或者相位模板来改变入射光相位,从而实现无机械移动的层叠衍射,从而减少接收时间;该方法在相位重建时无需分离光斑,而且迭代时间较传统层叠衍射短。然而该方法依然需要调整相位模板,这依然需要一定数据采集时间。Ptychography is a new method of obtaining holograms of objects developed in the past ten years. Different from traditional holography, this method does not require reference light, but obtains holograms by changing the relative position of light waves and objects. A series of diffraction spots, the spot irradiated on the object overlaps with at least one other spot. Diffraction spots are recorded by CMOS, CCD and other devices, and then computer programs can be used to iteratively calculate the diffraction of these spots to obtain the phase and amplitude information of the object and realize the holographic imaging of the object (J. M. Rodenburg, Adv. Imag. Elect. Phys . 150, 87-184, 2008). If the light wave function is unknown, the light wave function information can also be obtained (P. Thibault et al, Ultramicroscopy, 109, 338-343, 2009). However, the traditional stacked diffraction method needs a micromechanical device to move the spot and the sample, which puts high demands on the mechanical device. In order to improve the measurement accuracy, this method needs to increase the overlapping area between each spot, which makes the time cost of iterative calculation Consumption is larger. G. Zheng et al. proposed a coherent diffraction imaging method in Fourier space in 2013 on the basis of the traditional stacked diffraction method. This method does not require mechanical devices, but uses high-energy light-emitting diodes to generate laser arrays, and uses CCDs to receive images from different diodes. Spot (G. Zheng et al, Nature Photonics, 7, 739-745, 2013); in order to improve the measurement accuracy, this method also needs to increase the number of diodes or change the shape of the light-emitting array, which also increases the complexity of the device to a certain extent. O. Cohen et al. proposed a single-exposure stacked diffraction technique, which uses a porous array to obtain a group of light spots containing object information on the back focal plane of the 4f system, which is equivalent to the diffraction spot group obtained by traditional stacked diffraction; since only One exposure, so the spot receiving time is greatly shortened; however, this method needs to separate each diffraction spot from the pattern of one exposure, which increases the difficulty of post-processing (O. Cohen et al, Optica, 3, 9-14, 2016 ). In the published patent document (application number 201610028448.3), Dong Zhao and others proposed a holographic method based on phase lamination diffraction, that is, using a spatial light modulator or a phase template to change the phase of incident light, thereby achieving lamination without mechanical movement Diffraction, thereby reducing the acquisition time; this method does not need to separate the spot during phase reconstruction, and the iteration time is shorter than the traditional stacked diffraction. However, this method still needs to adjust the phase template, which still requires a certain data acquisition time.
发明内容Contents of the invention
本发明的目的在于提出一种能够同时接收经过不同调制的含物体信息的入射光的层叠衍射装置,从而在减少接收时间的同时,对物体进行快速重建。本方法利用分光棱镜组、光纤等分光装置将含物体信息的入射光分为多个出射光束,每个出射光束对应一个接收装置;在进入接收装置前,利用空间光调制器或者固定的模板对每个出射光束的振幅、相位或者仅对二者之一的分布进行调节,从而可获得一组相关的衍射图样,之后便利用层叠衍射算法进行重建,得到物体的振幅相位信息,即全息像。The purpose of the present invention is to propose a layered diffraction device capable of simultaneously receiving differently modulated incident light containing object information, so as to quickly reconstruct the object while reducing the receiving time. In this method, the incident light containing object information is divided into a plurality of outgoing light beams by using a light splitting device such as a beam splitting prism group and an optical fiber, and each outgoing light beam corresponds to a receiving device; before entering the receiving device, a spatial light modulator or a fixed template is used to pair The amplitude, phase, or only one of the distributions of each outgoing beam is adjusted to obtain a set of related diffraction patterns, which are then reconstructed using the stacked diffraction algorithm to obtain the amplitude and phase information of the object, that is, the hologram.
本发明技术方案如下:Technical scheme of the present invention is as follows:
一种层叠衍射成像装置,按入射光束传播的方向依次包括:A layered diffraction imaging device, which comprises in sequence according to the direction of incident light beam propagation:
(1)将入射光束分成若干出射光束的分光装置;(1) A spectroscopic device that divides the incident beam into several outgoing beams;
(2)每一条出射光束对应的光束调节装置,该装置能够调节光束的振幅相位分布,或者仅对二者之一进行调节;(2) A beam adjustment device corresponding to each outgoing beam, which can adjust the amplitude and phase distribution of the beam, or only adjust one of the two;
(3)每一条出射光束对应的图像接收装置。(3) The image receiving device corresponding to each outgoing beam.
对于分光装置而言,其可以利用棱镜组、半反射镜组或者光纤束进行分光,所分的出射光束光强尽量相等。As for the spectroscopic device, it can use a prism group, a half-reflecting mirror group or an optical fiber bundle to split the light, and the intensity of the split outgoing beams should be as equal as possible.
对于光束调节装置,此处需要该装置能够调节光束振幅或相位分布,或者同时调节二者分布,而不是对光振幅或相位整体调节;并且对每一条出射光束对应一个光束调节装置,对该光束的调节不影响其他光束;而且每一调节装置对光束的调节情况均不相同。光束调节装置可以是空间光调制器或者固定的模板,如相位板、透光率随机分布的振幅调节板等。For the beam adjustment device, it is required that the device can adjust the beam amplitude or phase distribution, or adjust both distributions at the same time, instead of adjusting the light amplitude or phase as a whole; The adjustment of the device does not affect other beams; and each adjustment device adjusts the beams differently. The beam adjustment device can be a spatial light modulator or a fixed template, such as a phase plate, an amplitude adjustment plate with randomly distributed light transmittance, and the like.
对于图像接收装置,此处也要求每一条出射光束对应一个图像接收装置。所有的图像接收装置应该同时拍摄,为达到这一目的,可以在入射光入口处(即在分光装置前)放置一快门,当快门开启时,所有图像接收装置同时接收图样。为能够更有效地重建物体的全息像,所有的图像接收装置应该和对应光束主轴垂直,并且主轴入射点在图像接收装置光敏面中心。一般图像接收装置可以是互补金属氧化物半导体(CMOS)工业相机、电荷耦合元件(CCD)相机等。For the image receiving device, it is also required that each outgoing light beam corresponds to an image receiving device. All image receiving devices should shoot at the same time. To achieve this purpose, a shutter can be placed at the entrance of incident light (that is, in front of the spectroscopic device). When the shutter is opened, all image receiving devices receive the pattern at the same time. In order to reconstruct the holographic image of the object more effectively, all image receiving devices should be perpendicular to the main axis of the corresponding light beam, and the incident point of the main axis should be at the center of the photosensitive surface of the image receiving device. The general image receiving device can be a complementary metal oxide semiconductor (CMOS) industrial camera, a charge-coupled device (CCD) camera, etc.
由于分光装置中不同光束分光不同,不同出射光束接收装置所感受到光强度可能不同,为提高重建物体全息像的精确度,在部分或全部接收装置前放置有光衰减装置(如光衰减片),来保证各个接收器接收到的光强基本一致。Due to the different light splitting of different beams in the spectroscopic device, the light intensity experienced by different outgoing beam receiving devices may be different. In order to improve the accuracy of reconstructing the holographic image of the object, a light attenuating device (such as a light attenuating sheet) is placed in front of part or all of the receiving devices. To ensure that the light intensity received by each receiver is basically the same.
由于距离物体的光程差不一致,接收器所接收到图样的衍射状况也可能不一致,这会给后期数据处理带来一定的复杂度;为提高后期物体全息像重建效率,该装置让各个图像接收装置到入射光束第一个分光处的光程差相同(实际操作中一般应保证误差不超过0.5微米),以此来保证它们到物体的光程差一致。Due to the inconsistency of the optical path difference from the object, the diffraction status of the pattern received by the receiver may also be inconsistent, which will bring some complexity to the later data processing; in order to improve the reconstruction efficiency of the holographic image of the later object, the device allows each image to receive The optical path difference from the device to the first split point of the incident beam is the same (in practice, the error should generally not exceed 0.5 microns), so as to ensure that the optical path difference between them and the object is consistent.
本发明的技术效果如下:Technical effect of the present invention is as follows:
(1)本发明对物体进行层叠衍射时,可以一次拍照同时获得多张物体的衍射图样,大大减少图样接收时间。此时图样接收时间一般只取决于接收装置曝光处理时间。(1) When the present invention performs layered diffraction on an object, it can obtain the diffraction patterns of multiple objects at the same time by taking a photo, which greatly reduces the pattern receiving time. At this time, the pattern receiving time generally only depends on the exposure processing time of the receiving device.
(2)本发明重建样品像无需分离光斑。(2) The present invention reconstructs the sample image without separating the spot.
(3)本发明装置组装好之后,其参数可固定在某一值,再次使用时无需重复调节,有利于工业化应用。(3) After the device of the present invention is assembled, its parameters can be fixed at a certain value, and there is no need for repeated adjustments when it is used again, which is conducive to industrial application.
附图说明Description of drawings
图1 一种层叠衍射成像装置图, 1为快门,2、3、4为分光棱镜,6为空间光调制器,8为CMOS工业相机,9为装置外壳,10为分光棱镜夹具。Fig. 1 A diagram of a stacked diffractive imaging device, 1 is the shutter, 2, 3, 4 are beam-splitting prisms, 6 is a spatial light modulator, 8 is a CMOS industrial camera, 9 is the device casing, and 10 is a beam-splitting prism fixture.
图2 空间光调制器6典型的加载图。Fig. 2 Typical loading diagram of spatial light modulator 6.
图3 (a) 振幅型样品,(b)加载有其信息的光通过空间光调制器后典型衍射,(c)图样重建强度像;图a中刻度尺为最小单位为毫米,图b、c中标尺长度为2毫米。Figure 3 (a) Amplitude type sample, (b) typical diffraction of the light loaded with its information after passing through the spatial light modulator, (c) pattern reconstruction intensity image; the scale bar in figure a is the smallest unit is millimeter, figure b, c The middle scale length is 2 mm.
图4 另一种层叠衍射成像装置图,1为快门,2、3、4、5为分光棱镜,61-65为棋盘网格状振幅模板,7为衰减片,81-85为CMOS工业相机,9为装置外壳。Figure 4 Another layered diffraction imaging device diagram, 1 is the shutter, 2, 3, 4, 5 are beam splitters, 61-65 are checkerboard grid-like amplitude templates, 7 is the attenuation film, 81-85 are CMOS industrial cameras, 9 is the device shell.
图5 (a) 一种典型的网格状振幅模板,(b) 该模板互补模板。Fig. 5 (a) A typical grid-like amplitude template, (b) the complementary template of this template.
图6 (a) 模拟样品的振幅分布,(b) 重建振幅像,(c) 模拟样品相位分布,(d) 重建相位像。Fig. 6 (a) The amplitude distribution of the simulated sample, (b) the reconstructed amplitude image, (c) the phase distribution of the simulated sample, (d) the reconstructed phase image.
具体实施方式Detailed ways
下面通过实例对本发明做进一步说明。需要注意的是,公布实施例的目的在于帮助进一步理解本发明,但是本领域的技术人员可以理解:在不脱离本发明及所附权利要求精神和范围内,各种替换和修改都是可能的。因此,本发明不应局限于实施例所公开的内容,本发明要求保护的范围以权利要求书界定的范围为准。The present invention will be further described below by example. It should be noted that the purpose of the published embodiments is to help further understand the present invention, but those skilled in the art can understand that various replacements and modifications are possible without departing from the spirit and scope of the present invention and the appended claims . Therefore, the present invention should not be limited to the content disclosed in the embodiments, and the protection scope of the present invention is subject to the scope defined in the claims.
实施例一:一种使用相位型空间光调制器的层叠衍射成像装置Embodiment 1: A stacked diffractive imaging device using a phase-type spatial light modulator
一种层叠衍射成像装置,其主要结构如图1所示,其光束调节装置使用透射式空间光调制器6,该空间光调制器固定在装置内部(夹具未显示),空间光调制器6入射光和出射光部分均自带已调节好角度的偏振片(图中未显示)来保证它们工作在纯相位模式。A laminated diffraction imaging device, the main structure of which is shown in Figure 1. The beam adjustment device uses a transmission-type spatial light modulator 6, which is fixed inside the device (the fixture is not shown), and the incident spatial light modulator 6 Both the light and exit light sections have their own angled polarizers (not shown) to ensure that they operate in phase-only mode.
以下按入射光束的传播方向详细介绍本装置其它部分。本装置包括快门1,快门1按下时,所有接收装置电荷耦合元件(CCD)工业相机8同时拍照。相机8的曝光时间可调,最低为0.005秒。The other parts of the device are described in detail below according to the propagating direction of the incident light beam. The device includes a shutter 1, and when the shutter 1 is pressed, all receiving devices charge-coupled device (CCD) industrial cameras 8 take pictures at the same time. The exposure time of the camera 8 is adjustable, and the minimum is 0.005 seconds.
本装置分光装置由3块分光棱镜组成的棱镜组构成,这些分光棱镜可将入射光分成光强相同的两束光,即透射光和反射光,它们被相应的夹具10固定。入射光束在分光棱镜2处首先分光。如图1所示,反射光经棱镜2向上传播,又经棱镜3再次分为两束光,其中一束经棱镜3反射后水平向右传播,另一束则透射继续向上传播;这两束光均经过其对应的空间光调制器6到达对应的接收装置CCD工业相机8。另一束光经棱镜2透射,和经棱镜2反射的那束光类似,其经棱镜4再次分为两束光,而后这两束光经过对应的空间光调制器6,也到达对应的CCD工业相机8。,由于每一条出射光束均相当于分光两次的产物,因此这些出射光束光强相同,故本装置没有采用光衰减装置。The spectroscopic device of the device is composed of a prism group composed of 3 beam-splitting prisms. These beam-splitting prisms can divide the incident light into two beams of light with the same light intensity, that is, transmitted light and reflected light. They are fixed by corresponding fixtures 10 . The incident light beam is firstly split at the dichroic prism 2. As shown in Figure 1, the reflected light propagates upwards through the prism 2, and is divided into two beams of light again by the prism 3, one of which is reflected by the prism 3 and spreads horizontally to the right, and the other beam is transmitted and continues to propagate upward; these two beams The light passes through its corresponding spatial light modulator 6 and reaches the corresponding receiving device CCD industrial camera 8 . Another beam of light is transmitted through the prism 2, similar to the beam of light reflected by the prism 2, it is divided into two beams of light again by the prism 4, and then the two beams of light pass through the corresponding spatial light modulator 6 and reach the corresponding CCD Industrial camera8. , because each outgoing beam is equivalent to the product of light splitting twice, so the light intensity of these outgoing beams is the same, so this device does not use an optical attenuation device.
具体应用时,为方便使用,装置内部件被放置、固定在外壳9内。所有的CCD工业相机8到分光棱镜2中心位置(也即入射光分光处)的光程差相同,并且它们到对应空间光调制器的距离也一样。本例中棱镜2到棱镜3、4的距离分别为50毫米,棱镜3、4到它们对应的工业相机8的距离也均为50毫米,空间光调制器到对应工业相机8光敏面的距离均为20毫米。应用时,所有的空间光调制器加载不同的随机相位,典型的加载图如图2所示In specific applications, for the convenience of use, the internal components of the device are placed and fixed in the shell 9 . All CCD industrial cameras 8 have the same optical path difference to the central position of the beam splitter 2 (that is, where the incident light is split), and their distances to the corresponding spatial light modulators are also the same. In this example, the distances from prism 2 to prisms 3 and 4 are 50 millimeters respectively, the distances from prisms 3 and 4 to their corresponding industrial cameras 8 are also 50 millimeters, and the distances from the spatial light modulator to the photosensitive surface of corresponding industrial cameras 8 are all 50 millimeters. is 20mm. When applied, all spatial light modulators are loaded with different random phases, and a typical loading diagram is shown in Figure 2
采用中间半透明振幅型样品(如图3a所示)来展示该装置应用。该样品中心半透明区域大体呈正方形,边长为3毫米,四周则不透明,波长为532纳米平行激光束经过该样品后进入到层叠衍射装置。调节光束让其垂直入射到分光棱镜2的中心,这样可以保证所有的工业相机8均能在其中心区域接收到样品的像。打开快门,则这些相机同时拍摄到样品的像,并且这些像均经过空间光调制器调制。采集时间取决于曝光处理时间,此处为0.005秒。An intermediate translucent amplitude-type sample (shown in Figure 3a) is employed to demonstrate the device application. The semi-transparent area in the center of the sample is roughly square, with a side length of 3 mm, and the surrounding area is opaque. The parallel laser beam with a wavelength of 532 nm passes through the sample and enters the stacked diffraction device. The light beam is adjusted so that it is vertically incident on the center of the splitter prism 2, so that all industrial cameras 8 can receive images of the sample in their central area. When the shutter is opened, these cameras simultaneously capture images of the sample, and these images are modulated by a spatial light modulator. The acquisition time depends on the exposure processing time, here 0.005 sec.
CCD工业相机通过有线或无线连接装置(图中未显示),将其接收到的图样传送到计算机中进行处理,此时可直接按照传统的层叠衍射迭代算法进行处理,而无需分离光斑。图3b、c子图显示的是分别是其典型衍射图以及层叠衍射算法获得的强度分布,计算时间为6秒。由此可见,该装置能够对物体进行快速层叠衍射成像。The CCD industrial camera transmits the received pattern to the computer for processing through a wired or wireless connection device (not shown in the figure). At this time, it can be directly processed according to the traditional stacked diffraction iterative algorithm without separating the spot. Figure 3b and c subfigures show the typical diffraction pattern and the intensity distribution obtained by the stacked diffraction algorithm, respectively, and the calculation time is 6 seconds. It can be seen that the device can perform fast lamination diffraction imaging of objects.
实施例二:一种使用棋盘网格状振幅模板的层叠衍射成像装置Embodiment 2: A stacked diffraction imaging device using a checkerboard grid-like amplitude template
一种层叠衍射成像装置,其主要结构如图4所示,其光束调节装置使用振幅型格状模板61-65,该模板固定在装置内部(夹具未显示),其工作部分由若干个网格组成,网格分为全透明和半透明或不透明两类,前者透光率接近于1,后者透光率小于0.8,甚至为0,本例中后者透光率为0。这两种网格随机分布,使用时为防止光束某一部分对应的网格常为0或常为1,我们把相邻两个出射光束的模板作为互补的,即,一个模板透光率为0的网格在另一个模板对应的网格透光率为1,一个典型的模板及其互补模板如图5所示。对于图4所显示的成像装置,其出射光束数量为5,我们将模板61、62和64、65设置为互补模板,而将模板63所有网格设计为透光率为1。A stacked diffraction imaging device, the main structure of which is shown in Figure 4. The beam adjustment device uses amplitude-type lattice templates 61-65, which are fixed inside the device (fixtures are not shown), and its working part consists of several grids Composition, the grid is divided into two types: fully transparent and translucent or opaque. The transmittance of the former is close to 1, and the transmittance of the latter is less than 0.8, or even 0. In this example, the transmittance of the latter is 0. These two grids are randomly distributed. In order to prevent the grid corresponding to a certain part of the beam from being 0 or 1, we use the templates of two adjacent outgoing beams as complementary, that is, the transmittance of a template is 0 The grid in another template corresponds to a grid with a light transmittance of 1. A typical template and its complementary template are shown in Figure 5. For the imaging device shown in FIG. 4 , the number of outgoing beams is 5, we set the templates 61 , 62 and 64 , 65 as complementary templates, and design all the grids of the template 63 to have a light transmittance of 1.
以下按入射光束的传播方向详细介绍本装置其它部分。本装置包括快门1,快门1按下时,所有接收装置CMOS工业相机81-85同时拍照。工业相机81-85的曝光时间可调,最低为0.005秒。The other parts of the device are described in detail below according to the propagating direction of the incident light beam. The device includes a shutter 1, and when the shutter 1 is pressed, all receiving devices CMOS industrial cameras 81-85 take pictures simultaneously. The exposure time of the industrial camera 81-85 is adjustable, the minimum is 0.005 seconds.
本装置分光装置由4块分光棱镜组成的棱镜组构成,这些分光棱镜可将入射光分成光强相同的两束光,即透射光和反射光,它们被相应的夹具10固定。入射光束在分光棱镜2处首先分光。如图4所示,反射光经棱镜2向上传播,又经棱镜3再次分为两束光,其中一束经棱镜3反射后水平向右传播,经过模板63到达工业相机83;另一束则透射继续向上传播,经棱镜5再次分为两束光,这两束光均经过其对应的模板61、62到达对应的接收装置CMOS工业相机81、82。另一束光经棱镜2透射,其经棱镜4再次分为两束光,而后这两束光经过对应64、65,也到达对应的CMOS工业相机84、85。注意到棱镜5所分得的两条出射出射光束相当于分光三次的产物,而其它出射光束则相当于分光两次的产物,因此若无模板的影响,工业相机81、82所对应的光强是工业相机83、84、85接收光强的1/2。为消除此影响,我们在模板63、64、65前加装光衰减装置(如图4所示),具体做法是在模板63、64、65前的外壳9上分别开出一条可以放置衰减片的狭缝,然后将衰减片7插入狭缝即可,通过调整衰减片7,让通过其的光强整体减小为原来的1/2。The spectroscopic device of the device is composed of a prism group composed of 4 spectroscopic prisms. These spectroscopic prisms can divide the incident light into two beams of light with the same light intensity, that is, transmitted light and reflected light. They are fixed by corresponding fixtures 10 . The incident light beam is firstly split at the dichroic prism 2. As shown in Figure 4, the reflected light propagates upwards through the prism 2, and is divided into two beams of light again through the prism 3, wherein one beam is reflected by the prism 3 and propagates horizontally to the right, and reaches the industrial camera 83 through the template 63; The transmission continues to propagate upwards, and is divided into two beams of light by the prism 5 again, and the two beams of light both pass through their corresponding templates 61, 62 and reach the corresponding receiving devices CMOS industrial cameras 81, 82. Another beam of light is transmitted through the prism 2, which is divided into two beams of light again by the prism 4, and then the two beams of light pass through the corresponding 64, 65 and also reach the corresponding CMOS industrial cameras 84, 85. Note that the two outgoing beams obtained by the prism 5 are equivalent to the product of three times of light splitting, while the other outgoing beams are equivalent to the product of two times of light splitting, so if there is no influence of the template, the light corresponding to the industrial cameras 81 and 82 The intensity is 1/2 of the light intensity received by the industrial cameras 83, 84, and 85. In order to eliminate this effect, we install light attenuation devices in front of the templates 63, 64, and 65 (as shown in Figure 4). slit, and then insert the attenuation sheet 7 into the slit. By adjusting the attenuation sheet 7, the overall light intensity passing through it is reduced to 1/2 of the original.
具体应用时,为方便使用,装置内部件被放置、固定在外壳9内。所有的CMOS工业相机81-85到分光棱镜2中心位置(也即入射光分光处)的光程差相同,并且它们到对应空间光调制器的距离也一样。本例中棱镜2到棱镜3的距离为25毫米,到棱镜4的距离里为50毫米,棱镜3到棱镜5的距离为25毫米,棱镜3到工业相机83的距离为50毫米,棱镜4、5到它所对应工业相机84、85及81、82的距离也为50毫米,模板到对应工业相机8光敏面的距离均为20毫米,模板中每一个网格的边长为0.025毫米。In specific applications, for the convenience of use, the internal components of the device are placed and fixed in the shell 9 . All the CMOS industrial cameras 81-85 have the same optical path difference to the central position of the beam splitter 2 (that is, where the incident light is split), and their distances to the corresponding spatial light modulators are also the same. In this example, the distance from prism 2 to prism 3 is 25 millimeters, the distance to prism 4 is 50 millimeters, the distance from prism 3 to prism 5 is 25 millimeters, the distance from prism 3 to industrial camera 83 is 50 millimeters, prism 4, The distance from 5 to its corresponding industrial cameras 84, 85 and 81, 82 is also 50 millimeters, the distance from the template to the photosensitive surface of the corresponding industrial camera 8 is 20 millimeters, and the side length of each grid in the template is 0.025 millimeters.
采用模拟样品来显示其应用,图6中a、c子图分别是其振幅和相位分布。该样品呈正方形,设定边长为3毫米,四周则不透明,波长为532纳米平行激光束经过该样品后进入到层叠衍射装置。调节光束让其垂直入射到分光棱镜2的中心,这样可以保证所有的工业相机81-85均能在其中心区域接收到样品的像。打开快门,则这些相机同时拍摄到样品的像,并且这些像均经过模板调制。The simulated sample is used to show its application, and the sub-figures a and c in Fig. 6 are the amplitude and phase distributions respectively. The sample is in the shape of a square, with a set side length of 3 millimeters and opaque surroundings. The parallel laser beam with a wavelength of 532 nanometers passes through the sample and then enters the stacked diffraction device. The light beam is adjusted so that it is vertically incident on the center of the splitter prism 2, so that all industrial cameras 81-85 can receive images of the sample in their central areas. When the shutter is opened, these cameras take images of the sample at the same time, and these images are all modulated by the template.
CMOS工业相机通过有线或无线连接装置(图中未显示),将其接收到的图样传送到计算机中进行处理,按照传统的层叠衍射迭代算法获得其相位、强度分布,无需分离光斑。图6b、d子图显示的是分别是经层叠衍射算法获得的强度、相位分布,其和原样品非常吻合。复原计算时间为4秒。由此可见,该装置能够对物体进行快速层叠衍射成像。The CMOS industrial camera transmits the received pattern to the computer for processing through a wired or wireless connection device (not shown in the figure), and obtains its phase and intensity distribution according to the traditional stacked diffraction iterative algorithm without separating the spot. Figure 6b and d subgraphs show the intensity and phase distributions obtained by the stacked diffraction algorithm, respectively, which are very consistent with the original sample. The recovery calculation time is 4 seconds. It can be seen that the device can perform fast lamination diffraction imaging of objects.
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