CN207992653U - Liquid crystal display device - Google Patents
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- CN207992653U CN207992653U CN201820399020.4U CN201820399020U CN207992653U CN 207992653 U CN207992653 U CN 207992653U CN 201820399020 U CN201820399020 U CN 201820399020U CN 207992653 U CN207992653 U CN 207992653U
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Abstract
本实用新型提供一种液晶显示装置,能够防止水分侵入到液晶显示装置内导致气泡产生。该液晶显示装置中,具有显示区域和周边区域的TFT基板(100)和对置基板(200)在所述周边区域利用密封材料(150)粘合,并在内部封入有液晶(300),其特征在于,所述TFT基板(100)具有有机钝化膜(108)和形成在其上的无机绝缘膜(110)。所述有机钝化膜(108)在所述周边区域中具有与所述TFT基板(100)的边平行形成且不存在所述有机钝化膜(108)的槽部(1081),在所述槽部(1081)的外侧以规定宽度具有框状部,所述有机钝化膜(108)的所述框状部的外侧的侧壁由所述无机绝缘膜(110)覆盖。
The utility model provides a liquid crystal display device, which can prevent water from invading into the liquid crystal display device and cause air bubbles to be generated. In this liquid crystal display device, a TFT substrate (100) having a display area and a peripheral area and an opposite substrate (200) are bonded together by a sealing material (150) in the peripheral area, and a liquid crystal (300) is sealed inside, which It is characterized in that the TFT substrate (100) has an organic passivation film (108) and an inorganic insulating film (110) formed thereon. The organic passivation film (108) has a groove portion (1081) formed parallel to the side of the TFT substrate (100) in the peripheral region and the organic passivation film (108) does not exist. The outside of the groove (1081) has a frame-shaped portion with a predetermined width, and the side wall of the organic passivation film (108) outside the frame-shaped portion is covered with the inorganic insulating film (110).
Description
技术领域technical field
本实用新型涉及显示装置,涉及能够防止在显示区域中产生的气泡的液晶显示装置。The utility model relates to a display device, in particular to a liquid crystal display device capable of preventing air bubbles generated in a display area.
背景技术Background technique
液晶显示装置构成为,配置有使具有像素电极及薄膜晶体管(TFT)等的像素以阵列状形成的TFT基板、和与TFT基板相对配置的对置基板,且在TFT基板与对置基板之间夹持有液晶。并且,通过针对每个像素控制液晶分子的光透射率而形成图像。The liquid crystal display device is configured by disposing a TFT substrate in which pixels having pixel electrodes, thin film transistors (TFTs), etc. Holds liquid crystals. And, an image is formed by controlling light transmittance of liquid crystal molecules for each pixel.
在液晶显示装置中,存在在显示区域特别是周边部产生黑斑的情况。这被认为是水分侵入液晶内造成的影响。已有对侵入到液晶显示装置内部的水分进行吸附从而即使水分侵入到液晶显示装置内也能够将对液晶的影响抑制得较小的方法。In a liquid crystal display device, dark spots may occur in a display region, particularly in a peripheral portion. This is considered to be the effect of moisture intrusion into the liquid crystal. There has been a method of absorbing moisture that has penetrated into a liquid crystal display device so that even if moisture penetrates into the liquid crystal display device, the influence on the liquid crystal can be suppressed to a small amount.
在专利文献1中记载了如下构造:通过在形成于TFT基板上的有机钝化膜的周边部设置槽并在该槽内形成水分吸收层来防止黑斑产生。Patent Document 1 describes a structure in which black spots are prevented by providing grooves in the peripheral portion of an organic passivation film formed on a TFT substrate and forming a moisture absorbing layer in the grooves.
现有技术文献prior art literature
专利文献patent documents
专利文献1:日本特开2016-38434号公报Patent Document 1: Japanese Patent Laid-Open No. 2016-38434
实用新型内容Utility model content
黑斑多在使液晶显示装置长时间动作的情况下产生。另一方面,如果水分侵入液晶显示装置内较多,则存在由于水分气化而如图1所示在液晶层中产生气泡501的情况。气泡作为黑斑被肉眼观察到,严重影响显示品质。Dark spots are often generated when the liquid crystal display device is operated for a long time. On the other hand, if much water enters into the liquid crystal display device, air bubbles 501 may be generated in the liquid crystal layer as shown in FIG. 1 due to vaporization of the water. Bubbles are observed with the naked eye as black spots, which seriously affect the display quality.
专利文献1中记载的构造也配置有对侵入到液晶显示装置内的水分进行吸附的吸附层,但作为吸附层使用液晶显示装置中通常不使用的材料。也就是说,作为其他部件使用液晶显示装置动作必需材料以外的材料。这种现有方法存在以下问题。The structure described in Patent Document 1 is also provided with an adsorption layer for adsorbing moisture intruded into the liquid crystal display device, but a material not generally used in liquid crystal display devices is used as the adsorption layer. That is, materials other than those necessary for the operation of the liquid crystal display device are used as other components. This existing method has the following problems.
(1)由于通过另外的工序配置另外的部件,因此部件成本和工序增加而导致制造成本增加。(2)由于使用液晶显示装置动作必需材料以外的材料,因此在液晶显示装置长时间动作的情况下需要确认是否影响显示性能。(1) Since separate components are disposed through separate processes, component costs and processes increase, resulting in increased manufacturing costs. (2) Since materials other than those necessary for the operation of the liquid crystal display device are used, it is necessary to check whether the display performance is affected when the liquid crystal display device is operated for a long time.
本实用新型的技术问题在于实现为了防止产生黑斑或气泡而避免水分侵入到液晶显示装置内的构造。此外,能够在不增加制造成本或降低可靠性的情况下实现这种构造。The technical problem of the present invention is to realize a structure that prevents moisture from intruding into the liquid crystal display device in order to prevent generation of black spots or air bubbles. Furthermore, such a configuration can be realized without increasing manufacturing costs or reducing reliability.
本实用新型能够解决上述问题,具体方案如下所述。The utility model can solve the above problems, and the specific solutions are as follows.
(1)一种液晶显示装置,将具有显示区域和周边区域的TFT基板和对置基板在所述周边区域利用密封材料粘合,并在内部封入有液晶,该液晶显示装置的特征在于,所述TFT基板具有有机钝化膜和在该有机钝化膜上形成的无机绝缘膜,所述有机钝化膜在所述周边区域具有槽部,该槽部与所述TFT基板的边平行形成,且不具有所述有机钝化膜,在所述槽部的外侧以规定宽度具有框状部,所述有机钝化膜的所述框状部的外侧的侧壁由所述无机绝缘膜覆盖。(1) A liquid crystal display device in which a TFT substrate having a display area and a peripheral area and a counter substrate are bonded together with a sealing material in the peripheral area, and liquid crystal is sealed inside, wherein the liquid crystal display device is characterized in that The TFT substrate has an organic passivation film and an inorganic insulating film formed on the organic passivation film, the organic passivation film has a groove in the peripheral region, and the groove is formed parallel to the sides of the TFT substrate, In addition, the organic passivation film is not provided, and a frame-shaped portion with a predetermined width is provided outside the groove portion, and a side wall outside the frame-shaped portion of the organic passivation film is covered with the inorganic insulating film.
(2)根据(1)所述的液晶显示装置,其特征在于,所述有机钝化膜的所述槽部处的所述有机钝化膜的侧壁由所述无机绝缘膜覆盖。(2) The liquid crystal display device according to (1), wherein a side wall of the organic passivation film at the groove portion of the organic passivation film is covered with the inorganic insulating film.
(3)根据(1)所述的液晶显示装置,其特征在于,所述有机钝化膜的所述框状部的外侧的所述侧壁在整周范围内由所述无机绝缘膜覆盖。(3) The liquid crystal display device according to (1), wherein the side wall outside the frame-shaped portion of the organic passivation film is covered with the inorganic insulating film over the entire circumference.
附图说明Description of drawings
图1是应用了本实用新型的液晶显示装置的俯视图。FIG. 1 is a top view of a liquid crystal display device to which the present invention is applied.
图2是液晶显示装置的显示区域的剖视图。2 is a cross-sectional view of a display region of a liquid crystal display device.
图3是图1的A-A剖视图。Fig. 3 is a sectional view along line A-A of Fig. 1 .
图4是表示本实用新型中TFT基板上的有机钝化膜和无机绝缘膜的形成范围的俯视图。4 is a plan view showing the formation range of the organic passivation film and the inorganic insulating film on the TFT substrate in the present invention.
图5是与图3的区域对应的部分的TFT基板的放大俯视图。FIG. 5 is an enlarged plan view of a part of the TFT substrate corresponding to the region in FIG. 3 .
图6是图1的B-B剖视图。Fig. 6 is a B-B sectional view of Fig. 1 .
图7是与图6的区域对应的部分的TFT基板的放大俯视图。FIG. 7 is an enlarged plan view of a part of the TFT substrate corresponding to the region in FIG. 6 .
图8是表示母基板的例子的俯视图。FIG. 8 is a plan view showing an example of a motherboard.
图9是表示图8中的单元A与单元B的边界处的有机钝化膜和无机绝缘膜的形成范围的TFT基板的俯视图。9 is a plan view of the TFT substrate showing the formation range of the organic passivation film and the inorganic insulating film at the boundary between cell A and cell B in FIG. 8 .
附图标记说明Explanation of reference signs
10…扫描线、11…影像信号线、12…像素、20…引出线、30…液晶单元、40…驱动电路用布线、100…TFT基板、101…基底膜、102…半导体层、103…栅极绝缘膜、104…栅极电极、105…层间绝缘膜、106…漏极电极、107…源极电极、108…有机钝化膜、109…公共电极、110…电容绝缘膜、111…像素电极、112…取向膜、121…通孔、122…通孔、130…通孔、150…密封材料、160…IC驱动器、170…端子部、200…对置基板、201…彩色滤光片、202…黑矩阵、203…保护膜、204…取向膜、210…主柱状间隔部、211…副柱状间隔部、220…壁状间隔部、300…液晶层、301…液晶分子、500…显示区域、501…气泡、1000…母基板、1021…漏极区域、1022…源极区域、1041…遮光膜、1081…有机钝化膜的槽部、1082…有机钝化膜除去部、2011…遮光层(彩色滤光片层叠层)、2021…黑矩阵的槽部(阻水用)、2022…黑矩阵的槽部(防带电用)10...scanning line, 11...image signal line, 12...pixel, 20...exit line, 30...liquid crystal cell, 40...wiring for driving circuit, 100...TFT substrate, 101...underlayer, 102...semiconductor layer, 103...gate Electrode insulating film, 104...gate electrode, 105...interlayer insulating film, 106...drain electrode, 107...source electrode, 108...organic passivation film, 109...common electrode, 110...capacitor insulating film, 111...pixel Electrode, 112...Orientation film, 121...Through hole, 122...Through hole, 130...Through hole, 150...Sealing material, 160...IC driver, 170...Terminal part, 200...Counter substrate, 201...Color filter, 202...black matrix, 203...protective film, 204...alignment film, 210...main columnar spacer, 211...sub-columnar spacer, 220...wall spacer, 300...liquid crystal layer, 301...liquid crystal molecules, 500...display area , 501...bubble, 1000...mother substrate, 1021...drain region, 1022...source region, 1041...light-shielding film, 1081...groove of organic passivation film, 1082...organic passivation film removal part, 2011...light-shielding layer (Color filter layer laminated), 2021...Groove of black matrix (for water blocking), 2022...Groove of black matrix (for antistatic)
具体实施方式Detailed ways
以下使用实施例说明本实用新型的内容。Below use embodiment to illustrate content of the present utility model.
【实施例1】【Example 1】
图1是应用了本实用新型的液晶显示装置的俯视图。在图1中,利用密封材料150将TFT基板100和对置基板200粘合,在TFT基板100和对置基板200之间夹持有液晶。TFT基板100形成得比对置基板200大,TFT基板100的与对置基板不重叠的部分成为端子部170。在端子部170搭载有用于驱动液晶显示面板的IC驱动器160,另外,在液晶显示面板形成有用于供给电源、影像信号、扫描信号等的与柔性布线基板连接的端子等。FIG. 1 is a top view of a liquid crystal display device to which the present invention is applied. In FIG. 1 , a TFT substrate 100 and a counter substrate 200 are bonded together with a sealing material 150 , and a liquid crystal is sandwiched between the TFT substrate 100 and the counter substrate 200 . The TFT substrate 100 is formed larger than the counter substrate 200 , and a portion of the TFT substrate 100 that does not overlap the counter substrate serves as a terminal portion 170 . The IC driver 160 for driving the liquid crystal display panel is mounted on the terminal portion 170 , and terminals connected to the flexible wiring board for supplying power, video signals, scanning signals, and the like are formed on the liquid crystal display panel.
在图1中,扫描线10在显示区域500中横向延伸并沿纵向排列。另外,影像信号线11纵向延伸并沿横向排列。由扫描线10和影像信号线11包围的区域成为像素12。在窄边框处,显示区域500的端部与液晶显示装置的端部之间的距离w小至1mm以下。由此,密封材料的宽度也减小,但如果密封材料的宽度减小,则外部的水分容易到达显示区域的液晶层。在图1中的边框的宽度w为例如600nm的情况下,密封材料的宽度只能是例如400nm左右。In FIG. 1 , scan lines 10 extend laterally in a display area 500 and are arranged vertically. In addition, the video signal lines 11 extend vertically and are arranged horizontally. Areas surrounded by the scanning lines 10 and the video signal lines 11 serve as pixels 12 . At the narrow frame, the distance w between the end of the display area 500 and the end of the liquid crystal display device is as small as 1 mm or less. Thus, the width of the sealing material is also reduced, but if the width of the sealing material is reduced, external moisture can easily reach the liquid crystal layer in the display region. When the width w of the frame in FIG. 1 is, for example, 600 nm, the width of the sealing material can only be, for example, about 400 nm.
在构成液晶显示装置的TFT基板100上,为了使像素区域平坦化而形成由丙烯酸等有机材料形成的有机钝化膜。有机钝化膜具有作为平坦化膜的作用,因此形成为较厚的2μm至4μm。有机钝化膜由于较厚,因此如果仅形成在显示区域500,则显示区域与边框区域的厚度变得不均匀。因此需要将有机钝化膜形成至液晶显示装置的端部为止。On the TFT substrate 100 constituting the liquid crystal display device, an organic passivation film made of an organic material such as acrylic acid is formed in order to planarize the pixel region. The organic passivation film has a role as a planarizing film, so it is formed to be relatively thick at 2 μm to 4 μm. Since the organic passivation film is thick, if it is formed only in the display region 500, the thickness of the display region and the frame region will become uneven. Therefore, it is necessary to form an organic passivation film up to the edge part of a liquid crystal display device.
另一方面,构成有机钝化膜的有机材料使水分容易透过。本实用新型的发明人发现,若有机钝化膜延伸至液晶显示装置的端部为止,则水分会穿过有机钝化膜而侵入内部。若水分侵入到液晶显示装置内,则存在该水分气化而在液晶层300中产生图1所示的气泡501的情况。On the other hand, the organic material constituting the organic passivation film allows moisture to permeate easily. The inventors of the present invention found that if the organic passivation film extends to the end of the liquid crystal display device, moisture will pass through the organic passivation film and intrude into the inside. When moisture enters the liquid crystal display device, the moisture may be vaporized to generate air bubbles 501 shown in FIG. 1 in the liquid crystal layer 300 .
这样的气泡501在显示区域500中移动。另外,这样的气泡501有时会因动作中的温度等而产生或灭失。无论是哪种情况,由于存在气泡501的像素无法实现期望亮度的显示,因此显示性能显著劣化。本实用新型特别用于防止水分透过有机钝化膜而侵入液晶显示装置的内部,防止液晶显示装置内产生气泡。Such air bubbles 501 move in the display area 500 . In addition, such air bubbles 501 may be generated or lost due to temperature during operation or the like. In either case, display performance is remarkably degraded because the pixels in which the air bubbles 501 exist cannot achieve display with desired luminance. The utility model is especially used for preventing moisture from penetrating through the organic passivation film and invading the interior of the liquid crystal display device, and preventing bubbles from being generated in the liquid crystal display device.
本实用新型的特征在于密封部的构造,但密封部以与显示区域相同的工艺形成,因此首先说明显示区域500的构造。图2是显示区域500的像素部分的剖视图。图2是说明IPS(In Plane Switching:共面转换)方式(或者也称为FFS(fringe field Switching:边缘电场切换)方式)的液晶显示装置的截面构造的图。The present invention is characterized by the structure of the sealing portion, but the sealing portion is formed by the same process as that of the display area, so first, the structure of the display area 500 will be described. FIG. 2 is a cross-sectional view of a pixel portion of the display area 500 . FIG. 2 is a diagram illustrating a cross-sectional structure of a liquid crystal display device of the IPS (In Plane Switching) method (or also referred to as the FFS (fringe field Switching: fringe field switching) method).
在图2中,在由例如玻璃形成的TFT基板100上形成有基底膜101。为了使液晶显示装置能够弯曲,能够使玻璃基板形成为较薄的0.2mm以下或用聚酰亚胺等树脂形成TFT基板100。In FIG. 2 , a base film 101 is formed on a TFT substrate 100 made of, for example, glass. In order to make the liquid crystal display device bendable, the glass substrate can be formed as thin as 0.2 mm or less, or the TFT substrate 100 can be formed of resin such as polyimide.
基底膜101具有防止来自玻璃的杂质污染之后形成的半导体层102的作用。基底膜101通常由氮化硅膜(以下记为SiN膜)和氧化硅膜(以下记为SiO膜)的两层膜形成。在基底膜101上形成半导体层102。半导体层102首先通过CVD形成a-Si,然后通过照射准分子激光而转换为Poly-Si。此外,构成基底膜101的SiN、SiO、作为半导体层的a-Si通过CVD连续地形成。The base film 101 has a function of preventing contamination of the semiconductor layer 102 formed later by impurities derived from glass. Base film 101 is generally formed of two layers of a silicon nitride film (hereinafter referred to as SiN film) and a silicon oxide film (hereinafter referred to as SiO film). A semiconductor layer 102 is formed on the base film 101 . The semiconductor layer 102 is first formed of a-Si by CVD, and then converted into Poly-Si by irradiation of an excimer laser. In addition, SiN and SiO constituting the base film 101, and a-Si as a semiconductor layer are continuously formed by CVD.
在形成半导体层102图案后,覆盖该半导体层102而形成栅极绝缘膜103。栅极绝缘膜103是以TEOS(正硅酸乙酯)为原材料的SiO膜。覆盖栅极绝缘膜103而形成栅极电极104。栅极电极104是例如MoW合金。在使合金溅射等之后进行图案化而形成栅极电极104。After the semiconductor layer 102 is patterned, the gate insulating film 103 is formed to cover the semiconductor layer 102 . The gate insulating film 103 is a SiO film made of TEOS (tetraethyl silicate). A gate electrode 104 is formed covering the gate insulating film 103 . The gate electrode 104 is, for example, a MoW alloy. The gate electrode 104 is formed by patterning after sputtering the alloy or the like.
在使栅极电极104图案化之后,进行P(磷)、B(硼)等离子注入(ionimplantation),使除了由栅极电极104覆盖的区域以外的半导体层102具有导电性。由此,在半导体层102形成漏极区域1021及源极区域1022。After patterning the gate electrode 104 , P (phosphorus), B (boron) plasma implantation (ion implantation) is performed to impart conductivity to the semiconductor layer 102 except for the region covered by the gate electrode 104 . Thus, a drain region 1021 and a source region 1022 are formed in the semiconductor layer 102 .
之后,覆盖栅极电极而利用SiN或SiO形成层间绝缘膜105。层间绝缘膜105能够通过CVD形成。在层间绝缘膜105及栅极绝缘膜103上形成通孔121、122,能够实现半导体层102的漏极区域1021与漏极电极106之间的连接及半导体层的源极区域1022与源极电极107之间的连接。漏极电极106与影像信号线11连接,源极电极107经由之后形成的通孔130与像素电极111连接。Thereafter, an interlayer insulating film 105 is formed of SiN or SiO to cover the gate electrode. The interlayer insulating film 105 can be formed by CVD. Through holes 121 and 122 are formed on the interlayer insulating film 105 and the gate insulating film 103 to realize the connection between the drain region 1021 and the drain electrode 106 of the semiconductor layer 102 and the connection between the source region 1022 and the source electrode 102 of the semiconductor layer. connection between electrodes 107 . The drain electrode 106 is connected to the video signal line 11 , and the source electrode 107 is connected to the pixel electrode 111 through a via hole 130 formed later.
利用丙烯酸树脂等覆盖漏极电极106及源极电极107而形成有机钝化膜108。有机钝化膜108具有平坦化膜的作用,因此形成为较厚的2μm至4μm。也就是说,可以说与膜厚大相应地,水分也越容易在与主面平行的方向上透过。The organic passivation film 108 is formed by covering the drain electrode 106 and the source electrode 107 with acrylic resin or the like. The organic passivation film 108 has a role of a planarizing film, and thus is formed thicker by 2 μm to 4 μm. That is, it can be said that the greater the thickness of the film, the easier it is for water to permeate in the direction parallel to the main surface.
有机钝化膜108由感光性树脂形成,因此通孔130的形成不需要另外形成抗蚀剂。有机钝化膜材料是正型感光性树脂,在光照射到的部分形成通孔130。此外,有机钝化膜108除了丙烯酸之外也能够使用硅树脂或聚酰亚胺等形成。The organic passivation film 108 is formed of a photosensitive resin, so the formation of the via hole 130 does not require additional formation of a resist. The material of the organic passivation film is a positive photosensitive resin, and a through hole 130 is formed in the portion where the light is irradiated. In addition, the organic passivation film 108 can also be formed using silicone resin, polyimide, etc. other than acrylic.
在有机钝化膜108上利用ITO(Indium Tin Oxide:氧化铟锡)等氧化物透明导电膜以平面状形成公共电极109。公共电极109形成为由各像素共用,但并未形成在通孔130内。在使公共电极109图案化之后,覆盖公共电极109而利用SiN形成电容绝缘膜110。电容绝缘膜110通过CVD形成。电容绝缘膜110在形成了有机钝化膜108之后形成,因此无法在高温下形成,而通过200℃左右的低温CVD形成。The common electrode 109 is formed planarly on the organic passivation film 108 using an oxide transparent conductive film such as ITO (Indium Tin Oxide: indium tin oxide). The common electrode 109 is formed to be shared by each pixel, but is not formed in the through hole 130 . After the common electrode 109 is patterned, a capacitive insulating film 110 is formed of SiN to cover the common electrode 109 . Capacitive insulating film 110 is formed by CVD. The capacitive insulating film 110 is formed after the organic passivation film 108 is formed, so it cannot be formed at a high temperature, but is formed by low-temperature CVD at about 200°C.
在电容绝缘膜110上利用ITO等氧化物透明导电膜以梳齿状、或条带状形成像素电极111。公共电极109与像素电极111之间的绝缘膜110形成像素电极与公共电极之间的保持电容,因此被称为电容绝缘膜110。On the capacitive insulating film 110, the pixel electrodes 111 are formed in a comb shape or a stripe shape by using an oxide transparent conductive film such as ITO. The insulating film 110 between the common electrode 109 and the pixel electrode 111 forms a holding capacitance between the pixel electrode and the common electrode, and thus is called a capacitive insulating film 110 .
在电容绝缘膜110上,在形成于有机钝化膜108的通孔130内形成通孔,使像素电极111与源极电极107连接。On the capacitive insulating film 110 , a via hole is formed in the via hole 130 formed in the organic passivation film 108 to connect the pixel electrode 111 to the source electrode 107 .
覆盖像素电极111及电容绝缘膜110而形成取向膜112。取向膜112决定液晶的初始取向,取向处理通过摩擦处理或光取向处理实现。在IPS方式中,采用光取向的取向处理。当向像素电极111施加影像信号时,在与公共电极109之间产生如箭头所示的电力线,使液晶分子301旋转,针对每个像素控制液晶层300的透射率而形成图像。An alignment film 112 is formed to cover the pixel electrode 111 and the capacitive insulating film 110 . The orientation film 112 determines the initial orientation of the liquid crystal, and the orientation treatment is realized by rubbing treatment or photo-alignment treatment. In the IPS method, an alignment process of photo-alignment is employed. When a video signal is applied to the pixel electrode 111 , lines of electric force shown by arrows are generated between the common electrode 109 and the liquid crystal molecules 301 to rotate, and the transmittance of the liquid crystal layer 300 is controlled for each pixel to form an image.
在图2中,隔着液晶层300配置有对置基板200。在想要设置为柔性显示装置的情况下,能够用聚酰亚胺等树脂形成对置基板200。在对置基板200的内侧形成彩色滤光片201和黑矩阵202。在期望对来自背光源的光进行控制来形成图像的部分配置彩色滤光片201,实现彩色显示。另一方面,在难以控制来自背光源的光的例如形成有通孔130等的部分等形成黑矩阵202,防止漏光。In FIG. 2 , a counter substrate 200 is arranged with a liquid crystal layer 300 interposed therebetween. When it is desired to provide a flexible display device, the counter substrate 200 can be formed of a resin such as polyimide. A color filter 201 and a black matrix 202 are formed inside the counter substrate 200 . A color filter 201 is arranged in a portion where it is desired to control light from a backlight to form an image, thereby realizing color display. On the other hand, the black matrix 202 is formed in the portion where it is difficult to control the light from the backlight, for example, where the through hole 130 is formed, so as to prevent light leakage.
覆盖彩色滤光片201及黑矩阵202而利用丙烯酸等透明有机材料形成保护膜203。为了使液晶层300的厚度均匀,在保护膜203上形成柱状间隔部210。柱状间隔部包括主柱状间隔部和副柱状间隔部。主柱状间隔部是规定了液晶层300的层厚的部分,图2的柱状间隔部210是主柱状间隔部。A protective film 203 is formed of a transparent organic material such as acrylic to cover the color filter 201 and the black matrix 202 . In order to make the thickness of the liquid crystal layer 300 uniform, columnar spacers 210 are formed on the protective film 203 . The columnar spacers include main columnar spacers and sub columnar spacers. The main columnar spacer is a portion that defines the layer thickness of the liquid crystal layer 300 , and the columnar spacer 210 in FIG. 2 is the main columnar spacer.
因此,主柱状间隔部210的顶端如图2所示,通常与TFT基板100侧接触。另一方面,副柱状间隔部配置为,在对置基板200受到按压的情况下,避免TFT基板100与对置基板200之间的间隙过小。因此,副柱状间隔部通常不与TFT基板100侧接触,而在对置基板200受到来自外部的压力的情况下与TFT基板100侧接触,避免液晶层300变得过薄。Therefore, as shown in FIG. 2 , the tip of the main columnar spacer 210 is usually in contact with the TFT substrate 100 side. On the other hand, the sub-columnar spacers are configured to prevent the gap between the TFT substrate 100 and the opposing substrate 200 from being too small when the opposing substrate 200 is pressed. Therefore, the sub-columnar spacer does not normally contact the TFT substrate 100 side, but contacts the TFT substrate 100 side when the counter substrate 200 receives external pressure, preventing the liquid crystal layer 300 from becoming too thin.
图3是图1的A-A剖视图,示出本实用新型的特征。在图3中,TFT基板100和对置基板200利用密封材料150粘合,在与密封材料150相比的内侧封入有液晶300。在TFT基板100上形成有基底膜101、栅极绝缘膜103、和层间绝缘膜105。在层间绝缘膜105上形成有用于栅极线驱动电路等的布线40,覆盖这些层而形成有机钝化膜108。Fig. 3 is a sectional view of A-A of Fig. 1, showing the features of the present invention. In FIG. 3 , the TFT substrate 100 and the counter substrate 200 are bonded together by a sealing material 150 , and a liquid crystal 300 is sealed inside the sealing material 150 . A base film 101 , a gate insulating film 103 , and an interlayer insulating film 105 are formed on the TFT substrate 100 . Wiring 40 for a gate line driver circuit and the like is formed on the interlayer insulating film 105, and an organic passivation film 108 is formed to cover these layers.
在近年来的液晶显示装置中,也在推进着窄边框化,使有机钝化膜108形成在TFT基板100整面。因此,如后详述,在液晶显示装置与母基板分离时,特别是在非端子部的边上,如专利文献1也示出那样,有机钝化膜108直接作为端面露出。因此,在TFT基板100的周边,为了阻断水分侵入路径而形成槽部1081,有机钝化膜108具有被去除而呈框状的部分。因此,经由有机钝化膜108的内部而浸透的水分能够被该槽部1081阻断,但水分侵入路径并不仅如此。水分还会从有机钝化膜108和其上层的膜之间的界面侵入。因此,在本实用新型中,除了槽部1081以外,有机钝化膜108在TFT基板100的端部处也被去除。并且,对于有机钝化膜108,包含其侧面在内用由SiN形成的电容绝缘膜110覆盖。In liquid crystal display devices in recent years, frame narrowing is advancing, and the organic passivation film 108 is formed on the entire surface of the TFT substrate 100 . Therefore, as will be described in detail later, when the liquid crystal display device is separated from the mother substrate, the organic passivation film 108 is directly exposed as an end surface, especially on the side of the non-terminal portion, as also shown in Patent Document 1. Therefore, in the periphery of the TFT substrate 100 , grooves 1081 are formed in order to block the moisture intrusion path, and the organic passivation film 108 has a frame-shaped portion that is removed. Therefore, the groove portion 1081 can block the water penetrating through the organic passivation film 108 , but the water intrusion path is not limited to this. Moisture also intrudes from the interface between the organic passivation film 108 and the film above it. Therefore, in the present invention, in addition to the groove portion 1081 , the organic passivation film 108 is also removed at the end portion of the TFT substrate 100 . Further, the organic passivation film 108 is covered with a capacitive insulating film 110 made of SiN including its side surface.
无机绝缘膜特别是SiN具有优异的锁水性能。也就是说,通过将有机钝化膜108包含其侧面在内利用SiN等无机绝缘膜110覆盖,能够防止水分从有机钝化膜108的端面侵入。有机钝化膜108的膜厚为较厚的2μm至4μm,因此能够高可靠性地确保防止水分侵入有机钝化膜108的侧面。此外,有机钝化膜108和形成在该有机钝化膜108上的层之间的界面也不会在端部露出,因此还能够防止在有机钝化膜108的界面传递来的水分的侵入。Inorganic insulating films, especially SiN, have excellent water-locking properties. That is, by covering the organic passivation film 108 including its side surface with the inorganic insulating film 110 such as SiN, it is possible to prevent the intrusion of moisture from the end face of the organic passivation film 108 . Since the film thickness of the organic passivation film 108 is relatively thick, 2 μm to 4 μm, it is possible to securely prevent the intrusion of moisture into the side surface of the organic passivation film 108 with high reliability. In addition, since the interface between the organic passivation film 108 and the layer formed on the organic passivation film 108 is not exposed at the end, the intrusion of moisture transferred from the interface of the organic passivation film 108 can also be prevented.
图4是表示TFT基板100中的有机钝化膜108和由无机绝缘膜形成的电容绝缘膜110的构造的俯视图。图4为了便于理解本实用新型,将TFT基板100的周边放大示出。在图4中,在显示区域500整个面形成有机钝化膜108。在TFT基板100的周边部中,有机钝化膜108以槽状被去除。从而在槽的外侧有机钝化膜108呈框状地形成。4 is a plan view showing the structures of the organic passivation film 108 and the capacitive insulating film 110 formed of an inorganic insulating film in the TFT substrate 100 . In FIG. 4 , the periphery of the TFT substrate 100 is shown enlarged in order to facilitate understanding of the present invention. In FIG. 4 , an organic passivation film 108 is formed on the entire surface of a display region 500 . In the peripheral portion of the TFT substrate 100, the organic passivation film 108 is removed in a groove shape. Accordingly, the organic passivation film 108 is formed in a frame shape outside the groove.
在图4中,形成为框状的有机钝化膜108的外侧端部与TFT基板100的端部不在同一面内,在有机钝化膜108的外侧端部与TFT基板100的端部之间存在规定的距离dd。即,具有有机钝化膜108的除去部1082。优选在整周范围内具有有机钝化膜108的除去部1082。In FIG. 4 , the outer end portion of the frame-shaped organic passivation film 108 and the end portion of the TFT substrate 100 are not in the same plane, and between the outer end portion of the organic passivation film 108 and the end portion of the TFT substrate 100 There is a defined distance dd. That is, there is a removed portion 1082 of the organic passivation film 108 . It is preferable to have the removed portion 1082 of the organic passivation film 108 over the entire circumference.
在图4中,有机钝化膜108在显示区域500和周边的框状部分均由作为无机绝缘膜的电容绝缘膜110覆盖。即,有机钝化膜108包含其侧面在内被电容绝缘膜110覆盖。该状态也如图3所示。由此,能够可靠地防止水分侵入有机钝化膜108内。In FIG. 4 , the organic passivation film 108 is covered with a capacitive insulating film 110 which is an inorganic insulating film in a display region 500 and a frame-shaped portion around it. That is, the organic passivation film 108 is covered with the capacitive insulating film 110 including its side surface. This state is also shown in FIG. 3 . Accordingly, it is possible to reliably prevent moisture from entering the organic passivation film 108 .
回到图3,在密封部中,在电容绝缘膜110上形成有ITO111,在该ITO111上形成有用于使液晶层300形成初始取向的取向膜112。取向膜112原本在密封部中是无用的,但在窄边框的情况下密封部的宽度变窄,因此难以从密封部去除取向膜,因此在密封部也存在取向膜。在密封部中,在电容绝缘膜110和取向膜112之间形成有ITO111。即,这是因为,与取向膜112和电容绝缘膜110直接粘合相比,二者之间经由ITO111粘合的情况下能够提高粘合力。Returning to FIG. 3 , in the sealing portion, ITO 111 is formed on the capacitive insulating film 110 , and an alignment film 112 for forming an initial alignment of the liquid crystal layer 300 is formed on the ITO 111 . The alignment film 112 is originally useless in the sealing portion, but since the width of the sealing portion becomes narrow in the case of a narrow frame, it is difficult to remove the alignment film from the sealing portion, so the alignment film also exists in the sealing portion. In the sealing portion, ITO 111 is formed between the capacitive insulating film 110 and the alignment film 112 . That is, this is because, compared with direct bonding between the alignment film 112 and the capacitive insulating film 110 , the adhesive force can be improved when the two are bonded via the ITO 111 .
此外,ITO111虽然与像素电极111形成为同一层,但并不被施加像素电位,通常是被施加公共电压。也就是说,在其他部位,图3的密封部处的ITO111被供给公共电压。如图3所示,密封部的ITO111与显示区域侧的ITO111没有电连接。In addition, although the ITO 111 is formed in the same layer as the pixel electrode 111 , the pixel potential is not applied, but a common voltage is usually applied. That is, at other locations, the common voltage is supplied to the ITO 111 at the sealing portion in FIG. 3 . As shown in FIG. 3 , the ITO 111 on the sealing portion is not electrically connected to the ITO 111 on the display region side.
在图3中,对置基板200利用密封材料150粘合于TFT基板200。在对置基板200的密封部及其附近形成有用于遮光的黑矩阵202。在黑矩阵202形成有槽部2021。该槽部2021沿对置基板的边形成在整周范围内。黑矩阵202也是由有机材料形成,因此水分会透过黑矩阵202而侵入,利用黑矩阵槽部2021防止水分侵入到内部。In FIG. 3 , the counter substrate 200 is bonded to the TFT substrate 200 with the sealing material 150 . A black matrix 202 for shielding light is formed on the sealing portion of the counter substrate 200 and its vicinity. Groove portions 2021 are formed in the black matrix 202 . The groove portion 2021 is formed over the entire circumference along the side of the counter substrate. The black matrix 202 is also made of organic materials, so moisture will penetrate through the black matrix 202 and intrude, and the black matrix groove 2021 prevents moisture from intruding into the inside.
黑矩阵202的槽部2021会发生来自背光源的漏光,为了防止这一情况,在对应的TFT基板100侧形成有遮光膜1041。遮光膜1041以与栅极电极或扫描线相同的层形成。在该情况下,由MoW(钼-钨)形成。The groove portion 2021 of the black matrix 202 may leak light from the backlight. In order to prevent this, a light shielding film 1041 is formed on the corresponding TFT substrate 100 side. The light shielding film 1041 is formed in the same layer as the gate electrode or the scanning line. In this case, it is formed of MoW (molybdenum-tungsten).
此外,在黑矩阵202的显示区域侧也形成有槽部2022。这是因为,黑矩阵202具有导电性,因此防止在密封部产生的电荷向显示区域500侧移动而对显示造成影响。此外,黑矩阵的槽部2022中填充有多个荧光体层叠而成的遮光层2011来防止漏光。Moreover, the groove part 2022 is formed also in the display area side of the black matrix 202. As shown in FIG. This is because the black matrix 202 has conductivity, so that charges generated in the sealing portion are prevented from moving toward the display region 500 and affecting the display. In addition, the groove portion 2022 of the black matrix is filled with a light-shielding layer 2011 formed by stacking a plurality of phosphors to prevent light leakage.
覆盖黑矩阵202而形成有保护膜203。在黑矩阵202和保护膜203之间,在主柱状间隔部210和壁状间隔部220的部分形成有彩色滤光片201。该彩色滤光片201成为主柱状间隔部210和壁状间隔部220的部分的基座,用于调整间隔部的高度。此外,壁状间隔部220沿对置基板200的边形成在整周范围内,用于在通过划刻将每个液晶单元与母基板分离时防止对置基板200的破损。A protective film 203 is formed to cover the black matrix 202 . Between the black matrix 202 and the protective film 203 , the color filter 201 is formed at the portion of the main column spacer 210 and the wall spacer 220 . The color filter 201 serves as a base for the main columnar spacer 210 and the wall-shaped spacer 220 and is used to adjust the height of the spacer. In addition, wall-shaped spacers 220 are formed over the entire circumference along the sides of the opposite substrate 200 for preventing damage of the opposite substrate 200 when separating each liquid crystal cell from the mother substrate by scribing.
如图3所示,在副柱状间隔部211的部分,在黑矩阵202和保护膜203之间没有形成彩色滤光片。因此,副柱状间隔部211的顶端与彩色滤光片的厚度相应地在与TFT基板100之间存在间隔。在对置基板200承受压力的情况下,副柱状间隔部211与TFT基板侧接触。As shown in FIG. 3 , no color filter is formed between the black matrix 202 and the protective film 203 in the portion of the sub-columnar spacer 211 . Therefore, there is a space between the tip of the sub-columnar spacer 211 and the TFT substrate 100 according to the thickness of the color filter. When the opposing substrate 200 is under pressure, the sub-columnar spacer 211 is in contact with the TFT substrate side.
此外,主柱状间隔部210和副柱状间隔部211的直径均为柱状间隔部的直径是在距离基部95%高度的部分测得。在图3中,主柱状间隔部210形成在密封材料150中。另一方面,副柱状间隔部211形成在与密封材料150不重叠的部分。当然,主柱状间隔部210也形成在显示区域500。In addition, the diameters of the main columnar spacers 210 and the auxiliary columnar spacers 211 are both The diameter of the columnar spacer is measured at 95% of the height from the base. In FIG. 3 , the main column spacer 210 is formed in the sealing material 150 . On the other hand, the sub-columnar spacer 211 is formed at a portion not overlapping the sealing material 150 . Of course, the main columnar spacers 210 are also formed in the display area 500 .
在图3中,覆盖有机钝化膜108的电容绝缘膜110的端部与TFT基板100的端子相比距离为de的内侧。这是为了,在通过划刻将液晶单元与母基板分离时,避免电容绝缘膜110产生裂纹等导致电容绝缘膜110对水分的阻隔效果降低。但是,根据划刻条件存在不会损伤电容绝缘膜110的情况,因此在这样的情况下,也可以使电容绝缘膜110与TFT基板100的端部一致。In FIG. 3 , the end of the capacitive insulating film 110 covering the organic passivation film 108 is inside the distance de from the terminal of the TFT substrate 100 . This is to prevent the capacitive insulating film 110 from cracking when the liquid crystal cell is separated from the mother substrate by scribing so as to prevent the capacitive insulating film 110 from reducing the moisture barrier effect. However, depending on the scribing conditions, there may be cases where the capacitive insulating film 110 is not damaged. Therefore, in such a case, the capacitive insulating film 110 may be aligned with the end of the TFT substrate 100 .
在图3中,电容绝缘膜110的厚度为70nm至120nm左右。如果是高清晰画面,则像素电极111的面积减小。在该情况下,为了确保保持电容,电容绝缘膜110的厚度减小为70nm左右。有机钝化膜的槽部1081的宽度wd为例如90μm,在有机钝化膜的槽部1081的外侧形成的框状的有机钝化膜108的宽度wf为例如40μm,密封材料的宽度ws为例如400μm。In FIG. 3 , the capacitive insulating film 110 has a thickness of about 70 nm to 120 nm. If it is a high-definition picture, the area of the pixel electrode 111 is reduced. In this case, the thickness of the capacitive insulating film 110 is reduced to about 70 nm in order to secure the holding capacity. The width wd of the groove portion 1081 of the organic passivation film is, for example, 90 μm, the width wf of the frame-shaped organic passivation film 108 formed outside the groove portion 1081 of the organic passivation film is, for example, 40 μm, and the width ws of the sealing material is, for example, 400 μm.
图5是与图3的TFT基板100对应部分的放大俯视图。如图5所示,覆盖有机钝化膜108的与槽部1081相对的侧壁、框状的有机钝化膜108的外侧的侧壁而形成有电容绝缘膜110。FIG. 5 is an enlarged plan view of a portion corresponding to the TFT substrate 100 of FIG. 3 . As shown in FIG. 5 , the capacitive insulating film 110 is formed to cover the side wall of the organic passivation film 108 facing the groove portion 1081 and the outer side wall of the frame-shaped organic passivation film 108 .
形成为框状的有机钝化膜108的外侧的端部与TFT基板100的端部相比形成在距离为dd的内侧。优选dd为50μm以上。该部分成为有机钝化膜108的除去部1082。这是为了防止由于划刻而导致有机钝化膜108的端部及覆盖有机钝化膜108的电容绝缘膜110损坏。The outer end of the frame-shaped organic passivation film 108 is formed on the inner side by a distance dd than the end of the TFT substrate 100 . Preferably, dd is 50 μm or more. This part becomes the removed part 1082 of the organic passivation film 108 . This is to prevent damage to the end of the organic passivation film 108 and the capacitive insulating film 110 covering the organic passivation film 108 due to scribing.
另外,电容绝缘膜110的外侧端部位于与TFT基板100的端部相比距离为de的内侧。优选de也为50μm以上。这是为了防止由于划刻而损坏电容绝缘膜端部。此外,即使在电容绝缘膜上产生裂纹,只要具有阻隔水分侵入有机钝化膜的作为阻隔部的作用即可,因此根据划刻条件,也可以将电容绝缘膜110形成至TFT基板100的端部为止。In addition, the outer end portion of the capacitive insulating film 110 is positioned on the inner side by a distance de from the end portion of the TFT substrate 100 . It is also preferable that de is 50 μm or more. This is to prevent damage to the capacitive insulating film end due to scratching. In addition, even if a crack occurs on the capacitive insulating film, it only needs to function as a barrier part to block moisture intrusion into the organic passivation film. Therefore, depending on the scribing conditions, the capacitive insulating film 110 can also be formed to the end of the TFT substrate 100. until.
在图5中,主柱状间隔部210和副柱状间隔部211的对应位置以虚线示出。主柱状间隔部210与密封材料重叠形成,也形成在显示区域侧。In FIG. 5 , the corresponding positions of the main columnar spacers 210 and the secondary columnar spacers 211 are shown by dotted lines. The main columnar spacer 210 is formed overlapping the sealing material, and is also formed on the display region side.
图6是与图1的B-B剖面相当的剖视图。也就是说,图6是与端子部170邻接的密封部的剖视图。图6的构造与图3基本相同。在端子部170侧,由于能够使边框宽度比其余三边的边框宽度大,因此也能够增大密封材料150的宽度,从而在构造方面与其余三边相比存在余裕。Fig. 6 is a cross-sectional view corresponding to the B-B cross-section in Fig. 1 . That is, FIG. 6 is a cross-sectional view of the sealing portion adjacent to the terminal portion 170 . The configuration of FIG. 6 is basically the same as that of FIG. 3 . On the terminal portion 170 side, since the frame width can be made larger than the frame widths of the other three sides, the width of the sealing material 150 can also be increased, and there is a margin in terms of structure compared with the other three sides.
在端子部170,划刻引起的断裂仅在对置基板200侧。因此,TFT基板100向外侧延伸超过密封部。在TFT基板100侧,在栅极绝缘膜103和层间绝缘膜105之间,引出线20从显示区域500侧延伸至端子部170侧。因此,在图6中没有特别形成图3中的遮光膜1041。In the terminal portion 170 , cracks due to scribing are only on the counter substrate 200 side. Therefore, the TFT substrate 100 extends outward beyond the sealing portion. On the TFT substrate 100 side, the lead line 20 extends from the display region 500 side to the terminal portion 170 side between the gate insulating film 103 and the interlayer insulating film 105 . Therefore, the light shielding film 1041 in FIG. 3 is not particularly formed in FIG. 6 .
另外,在端子部170侧的密封部能够增大边框的宽度,因此能够使取向膜112形成为不与密封材料150重叠。因此,密封材料150能够不隔着取向膜112地直接与电容绝缘膜110接触,从而ITO111不再是必需的。规定取向膜112的形成范围的方法有多种,在图6中没有特别地记载该方法。其他与使用图3说明的内容相同。In addition, since the width of the frame can be increased in the sealing portion on the side of the terminal portion 170 , the alignment film 112 can be formed so as not to overlap the sealing material 150 . Therefore, the sealing material 150 can directly contact the capacitive insulating film 110 without interposing the alignment film 112 , so that the ITO 111 is no longer necessary. There are various methods for specifying the formation range of the alignment film 112, and this method is not particularly shown in FIG. 6 . Others are the same as those described using FIG. 3 .
图7是图6的TFT基板100侧的俯视图。在图7中,TFT基板100延伸至图面左侧即端子部侧而超过密封部。并且,信号线的引出线20从显示区域500延伸至端子部170侧。该引出线20与图1中示出的IC驱动器160等连接。FIG. 7 is a plan view of the TFT substrate 100 side of FIG. 6 . In FIG. 7 , the TFT substrate 100 extends to the left side of the drawing, that is, to the terminal portion side, beyond the sealing portion. Furthermore, the lead-out line 20 of the signal line extends from the display area 500 to the terminal portion 170 side. The lead line 20 is connected to the IC driver 160 and the like shown in FIG. 1 .
在图7中,由双点划线包夹的区域是密封部,形成有密封材料150。主柱状间隔部210以与密封材料150重叠的方式形成。另外,副柱状间隔部211形成在与密封材料150不同的部位,这一点与图5相同。In FIG. 7 , a region enclosed by two-dot chain lines is a sealing portion, and a sealing material 150 is formed therein. The main columnar spacer 210 is formed to overlap the sealing material 150 . In addition, the point that the sub-columnar spacer 211 is formed at a location different from that of the sealing material 150 is the same as in FIG. 5 .
在图7中,有机钝化膜108的形成范围和电容绝缘膜110的形成范围与图5中说明的情况相同。也就是说,有机钝化膜108包含其侧面在内均由电容绝缘膜110覆盖。因此,在全部的边中,有机钝化膜108包含其侧面在内均被电容绝缘膜110覆盖。In FIG. 7 , the formation range of the organic passivation film 108 and the formation range of the capacitive insulating film 110 are the same as those described in FIG. 5 . That is to say, the organic passivation film 108 is covered by the capacitive insulating film 110 including its side. Therefore, the organic passivation film 108 is covered with the capacitive insulating film 110 on all sides including its side surfaces.
若一个一个地制造液晶显示装置则效率低下,因此在母基板上形成大量液晶单元,在母基板完成后分离成各个液晶单元即液晶显示装置。图8是在母基板1000上形成多个液晶单元30的例子。在图8中,在一个母基板1000上形成有40个液晶单元30。It is inefficient to manufacture liquid crystal display devices one by one, so a large number of liquid crystal cells are formed on a mother substrate, and after the mother substrate is completed, they are separated into individual liquid crystal cells, that is, liquid crystal display devices. FIG. 8 is an example of forming a plurality of liquid crystal cells 30 on a mother substrate 1000 . In FIG. 8 , forty liquid crystal cells 30 are formed on one mother substrate 1000 .
有机钝化膜108、电容绝缘膜110等以该母基板1000的状态形成。也就是说,制作形成有多个TFT基板100的TFT基板用母基板和形成有多个对置基板200的对置基板用母基板。然后,例如在通过滴下法向对置基板用母基板上形成的各对置基板200填充液晶之后,利用密封材料将TFT基板用母基板和对置基板用母基板粘合起来。The organic passivation film 108 , the capacitor insulating film 110 , and the like are formed in the state of the mother substrate 1000 . That is, a mother substrate for a TFT substrate on which a plurality of TFT substrates 100 is formed and a mother substrate for an opposing substrate on which a plurality of opposing substrates 200 are formed are fabricated. Then, for example, liquid crystal is filled into each counter substrate 200 formed on the counter substrate mother substrate by a dropping method, and then the TFT substrate mother substrate and the counter substrate mother substrate are bonded together with a sealing material.
图9是示出在TFT基板用母基板中与图8的C部对应的部分处的、有机钝化膜108和电容绝缘膜110的形成范围的俯视图。在图9中,双点划线的左侧是单元A,右侧是单元B。单元A和单元B在由双点划线表示的分离线处通过划刻而分离。FIG. 9 is a plan view showing the formation range of the organic passivation film 108 and the capacitive insulating film 110 at a portion corresponding to the portion C in FIG. 8 in the mother substrate for a TFT substrate. In FIG. 9 , the left side of the dashed-two dotted line is unit A, and the right side is unit B. Unit A and unit B are separated by scoring at the separation line indicated by the two-dot chain line.
如基于图5所说明的,有机钝化膜108包含其侧面在内由电容绝缘膜110覆盖。因此,来自外部的水分不会侵入到有机钝化膜108内。电容绝缘膜110覆盖各单元的整个面,但没有覆盖液晶单元30与液晶单元30的边界部分即划刻线部分。这是为了防止划刻处的开裂等扩展到电容绝缘膜110。但是,根据划刻条件也可以覆盖在由双点划线所示的分离线上。在这种情况下,母基板1000的整个面被电容绝缘膜110覆盖。As explained based on FIG. 5 , the organic passivation film 108 is covered with the capacitive insulating film 110 including its side surfaces. Therefore, moisture from the outside does not penetrate into the organic passivation film 108 . The capacitive insulating film 110 covers the entire surface of each cell, but does not cover the scribe line portion which is the boundary between the liquid crystal cell 30 and the liquid crystal cell 30 . This is to prevent cracks or the like at the scribed portion from spreading to the capacitive insulating film 110 . However, depending on the scribing conditions, it may also be overlaid on the parting line shown by the dashed-two dotted line. In this case, the entire surface of the motherboard 1000 is covered with the capacitive insulating film 110 .
本实用新型的特征在于,用例如由SiN等形成的无机绝缘膜110覆盖有机钝化膜108的最外周侧壁。SiN也可以通过CVD形成在有机钝化膜108的侧壁,因此不会相对于以往工序增加工序负担。能够通过改变有机钝化膜108的图案化的掩膜获得本实用新型的构造。The present invention is characterized in that the outermost peripheral side wall of the organic passivation film 108 is covered with an inorganic insulating film 110 formed of, for example, SiN or the like. SiN can also be formed on the sidewall of the organic passivation film 108 by CVD, so that the process load is not increased compared to the conventional process. The configuration of the present invention can be obtained by changing the patterned mask of the organic passivation film 108 .
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| CN109523912A (en) * | 2018-12-13 | 2019-03-26 | 厦门天马微电子有限公司 | Display panel and display device |
| TWI708983B (en) * | 2019-05-13 | 2020-11-01 | 大陸商友達光電(昆山)有限公司 | Display panel |
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| CN111474756B (en) * | 2020-05-27 | 2022-11-08 | 成都中电熊猫显示科技有限公司 | Display panel and method for manufacturing the same |
| WO2024214168A1 (en) * | 2023-04-11 | 2024-10-17 | シャープディスプレイテクノロジー株式会社 | Display device |
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| CN109523912A (en) * | 2018-12-13 | 2019-03-26 | 厦门天马微电子有限公司 | Display panel and display device |
| CN109358457A (en) * | 2018-12-18 | 2019-02-19 | 张家港康得新光电材料有限公司 | The production method of mould group can be switched in support column and 2D/3D, mould group can be switched in 2D/3D |
| TWI708983B (en) * | 2019-05-13 | 2020-11-01 | 大陸商友達光電(昆山)有限公司 | Display panel |
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