CN202134793U - A semiconductor laser - Google Patents
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Abstract
本实用新型揭示了一种半导体激光器,包括主光源、温度控制系统、光学整形系统和功率控制系统;光纤耦合半导体激光器固定在半导体制冷器的冷面上,半导体制冷器的热面与底座连接;光纤耦合半导体激光器的光纤输出端装有端帽;端帽与准直透镜连接;准直透镜固定在一V型槽上,在准直透镜的输出光路上设有分光镜,在分光镜的分光光路上装光电二极管,光电二极管的光生电流作为控制信号,接入反馈控制系统。本实用新型的半导体激光器具有高光束质量、高稳定性、长寿命,体积小、重量轻和成本低。
The utility model discloses a semiconductor laser, which includes a main light source, a temperature control system, an optical shaping system and a power control system; the fiber-coupled semiconductor laser is fixed on the cold surface of a semiconductor refrigerator, and the hot surface of the semiconductor refrigerator is connected to a base; The fiber output end of the fiber-coupled semiconductor laser is equipped with an end cap; the end cap is connected with the collimator lens; the collimator lens is fixed on a V-shaped groove, and a beam splitter is arranged on the output optical path of the collimator lens, and the beam splitter of the beam splitter A photodiode is installed on the optical path, and the photogenerated current of the photodiode is used as a control signal and connected to a feedback control system. The semiconductor laser of the utility model has high beam quality, high stability, long life, small volume, light weight and low cost.
Description
技术领域 technical field
本实用新型涉及半导体激光器领域,尤其涉及一种自由空间输出的半导体激光器。 The utility model relates to the field of semiconductor lasers, in particular to a free space output semiconductor laser.
背景技术 Background technique
近年来,随着光电子技术的发展,半导体激光器得到了越来越广泛的应用,其具有光电转换效率高、覆盖波长范围广、使用寿命长、能高速调制、体积小、重量轻、价格便宜等特点。但半导体激光器由于其发光机理,光束质量较差,其输出往往伴有较强的杂散光;两个方向的发光点不同,造成相散;横模特性也不尽理想。这些缺点严重限制了半导体激光器的应用,尤其是在细胞分析、病毒检测和半导体检测等领域。 In recent years, with the development of optoelectronic technology, semiconductor lasers have been used more and more widely. They have high photoelectric conversion efficiency, wide coverage wavelength range, long service life, high-speed modulation, small size, light weight, and cheap price. features. However, due to its light-emitting mechanism, the beam quality of semiconductor lasers is poor, and its output is often accompanied by strong stray light; the light-emitting points in the two directions are different, resulting in phase dispersion; the transverse mode characteristics are not ideal. These shortcomings severely limit the application of semiconductor lasers, especially in the fields of cell analysis, virus detection, and semiconductor detection.
为了解决半导体激光器光束质量不好的问题,人们开发了光纤耦合半导体激光器。将半导体激光器输出光束利用透镜耦合进光纤,从光纤端得到光束质量很好的输出。但随着半导体激光器输出功率的增加,光纤输出端的能量密度增加很多,很容易使光纤接头的端面被烧坏,导致输出功率降低,光束质量变差。同时,近年来,绿光和蓝光等短波长半导体激光器得到很大发展,光纤材料由于对短波长的吸收效率高,也容易使这类半光纤耦合导体激光器的光纤接头损坏。同时由于光纤耦合半导体激光器无法在输出端直接取光进行闭环功率控制,所以只能运行在电流模式,或者利用半导体激光器的内部光电二极管进行控制。但半导体激光器的内部光电二极管只能反映光源的功率变化而无法反映光纤输出端的功率变化,所以功率稳定性较差。 In order to solve the problem of poor beam quality of semiconductor lasers, fiber-coupled semiconductor lasers have been developed. The output beam of the semiconductor laser is coupled into the optical fiber with a lens, and the output with good beam quality is obtained from the end of the optical fiber. However, with the increase of the output power of the semiconductor laser, the energy density at the output end of the fiber increases a lot, and it is easy to burn out the end face of the fiber connector, resulting in a decrease in output power and poor beam quality. At the same time, in recent years, short-wavelength semiconductor lasers such as green light and blue light have been greatly developed. Due to the high absorption efficiency of optical fiber materials for short wavelengths, it is also easy to damage the fiber joints of such semi-fiber-coupled semiconductor lasers. At the same time, since the fiber-coupled semiconductor laser cannot directly take light at the output end for closed-loop power control, it can only operate in the current mode, or use the internal photodiode of the semiconductor laser for control. However, the internal photodiode of the semiconductor laser can only reflect the power change of the light source and cannot reflect the power change of the fiber output end, so the power stability is poor.
实用新型内容 Utility model content
鉴于上述现有技术存在的缺陷,本实用新型的目的是提出一种具有高光束质量、高稳定性和长寿命的自由空间输出的半导体激光器。 In view of the above-mentioned defects in the prior art, the purpose of this utility model is to propose a free space output semiconductor laser with high beam quality, high stability and long life.
本实用新型的目的将通过以下技术方案得以实现: The purpose of this utility model will be achieved through the following technical solutions:
一种半导体激光器,包括一底座,所述底座上设有主光源、温度控制系统、光学整形系统和功率控制系统;所述主光源为光纤耦合半导体激光器;所述温度控制系统包括半导体制冷器、温度传感器、温度控制电路和热沉散热系统,保持半导体激光器元件在设定的温度范围工作。所述光学整形系统为准直透镜,光纤耦合半导体激光器通过准直透镜,使光纤输出转换为自由空间输出,并得到设计的光束质量。所述功率控制系统包括分光镜、光电二极管和反馈控制系统,所述光纤耦合半导体激光器固定在所述半导体制冷器的冷面上,所述半导体制冷器的热面与所述底座连接;所述光纤耦合半导体激光器的光纤输出端装有端帽;所述端帽与所述准直透镜连接;所述准直透镜固定在一V型槽上,在所述准直透镜的输出光路上设有所述分光镜,在所述分光镜的分光光路上装光电二极管,所述光电二极管的光生电流作为控制信号,接入所述反馈控制系统。分光镜按固定比例从主光束中分光,通过取光系统将光束衰减到满足光电二极管的线性输入范围并输入到光电二极管中,光电二极管将光信号转换为电信号,该电信号作为控制信号控制驱动电路板的驱动电流,从而控制半导体激光器的输出功率稳定。 A semiconductor laser, comprising a base, the base is provided with a main light source, a temperature control system, an optical shaping system and a power control system; the main light source is a fiber-coupled semiconductor laser; the temperature control system includes a semiconductor refrigerator, The temperature sensor, temperature control circuit and heat sink cooling system keep the semiconductor laser element working within the set temperature range. The optical shaping system is a collimating lens, through which the fiber-coupled semiconductor laser converts the output of the fiber into a free-space output, and obtains the designed beam quality. The power control system includes a beam splitter, a photodiode and a feedback control system, the fiber-coupled semiconductor laser is fixed on the cold surface of the semiconductor refrigerator, and the hot surface of the semiconductor refrigerator is connected to the base; the The fiber output end of the fiber-coupled semiconductor laser is equipped with an end cap; the end cap is connected with the collimating lens; the collimating lens is fixed on a V-shaped groove, and the output optical path of the collimating lens is provided with The beam splitter is equipped with a photodiode on the beam splitting optical path of the beam splitter, and the photogenerated current of the photodiode is used as a control signal and connected to the feedback control system. The beam splitter divides light from the main beam according to a fixed ratio, and the beam is attenuated to meet the linear input range of the photodiode through the light-taking system and input into the photodiode. The photodiode converts the optical signal into an electrical signal, and the electrical signal is used as a control signal. Drive the driving current of the circuit board, thereby controlling the output power of the semiconductor laser to be stable.
优选的,上述的半导体激光器,其中:所述端帽长度为0.5mm,所述端帽的接触面与光纤熔接,所述端帽的外包层与光纤相同,所述端帽的纤芯的直径为0.105mm。光在端帽传输过程中,其光束会发散,当到达端帽输出端时,在端面上光功率密度会被降低,从而保证光纤的输出端不被烧坏,延长激光器的使用寿命。 Preferably, the above-mentioned semiconductor laser, wherein: the length of the end cap is 0.5 mm, the contact surface of the end cap is welded to the optical fiber, the outer cladding of the end cap is the same as that of the optical fiber, and the diameter of the core of the end cap is is 0.105mm. When the light is transmitted through the end cap, its beam will diverge. When it reaches the output end of the end cap, the optical power density on the end face will be reduced, so as to ensure that the output end of the fiber will not be burned out and prolong the service life of the laser.
优选的,上述的半导体激光器,其中:所述光纤耦合半导体激光器包括半导体激光器元件,所述半导体激光器元件固定在一机械件中,并在所述机械件的后部装有耦合透镜,将半导体激光器元件输出的自由空间输出耦合进光纤。所述机械件具有一定的热容,并固定在半导体制冷器的冷面上。 Preferably, the above-mentioned semiconductor laser, wherein: the fiber-coupled semiconductor laser includes a semiconductor laser element, the semiconductor laser element is fixed in a mechanical part, and a coupling lens is installed at the rear of the mechanical part, and the semiconductor laser The free-space output of the component output is coupled into an optical fiber. The mechanical parts have a certain heat capacity and are fixed on the cold surface of the semiconductor refrigerator.
优选的,上述的半导体激光器,其中:所述光纤耦合半导体激光器的输出端镀有防反射增透膜。防反射增透膜可以增加光纤到输出端的输出效率,减少反射,同时可使光纤纤芯输出端面到光纤接头的能量密度降低,从而保护光纤纤芯不被烧坏。 Preferably, the above-mentioned semiconductor laser, wherein: the output end of the fiber-coupled semiconductor laser is coated with an antireflection and anti-reflection coating. The anti-reflection anti-reflection coating can increase the output efficiency of the fiber to the output end, reduce reflection, and at the same time reduce the energy density from the output end face of the fiber core to the fiber connector, thereby protecting the fiber core from being burned.
优选的,上述的半导体激光器,其中:所述光电二极管加装有衰减片,以保证光电二极管的光电响应在线性范围。 Preferably, the above-mentioned semiconductor laser, wherein: the photodiode is equipped with an attenuation sheet to ensure that the photoelectric response of the photodiode is in a linear range.
优选的,上述的半导体激光器,其中:所述光纤盘绕在所述底座上。 Preferably, the above-mentioned semiconductor laser, wherein: the optical fiber is coiled on the base.
本实用新型的突出效果为:本实用新型提供了高光束质量、高稳定性、长寿命的自由空间输出半导体激光器,由温度控制系统、主光源、光学整形系统和功率控制系统组成,使主光源的半导体激光器元件在设定温度下输出激光,经过耦合形成光纤耦合半导体激光器,通过光学整形系统,将二极管激光器较差的光束整形成高质量的光束输出,利用分光镜生成采样信号,检测输出功率的变化,并与主驱动板的驱动电流构成闭环负反馈控制系统,使激光器输出功率达到高稳定性,在光纤输出端装有端帽,可以保护光纤头不被烧坏,延长了激光器的使用寿命。本实用新型同时具有体积小、重量轻和成本低的特点。 The outstanding effects of the utility model are: the utility model provides a free-space output semiconductor laser with high beam quality, high stability, and long life, which is composed of a temperature control system, a main light source, an optical shaping system and a power control system, so that the main light source The semiconductor laser component outputs laser light at the set temperature, and forms a fiber-coupled semiconductor laser through coupling. Through the optical shaping system, the poor beam of the diode laser is shaped into a high-quality beam output, and the sampling signal is generated by a spectroscope to detect the output power. Changes, and form a closed-loop negative feedback control system with the drive current of the main drive board, so that the output power of the laser can reach high stability. An end cap is installed at the output end of the fiber, which can protect the fiber head from being burned out and prolong the use of the laser. life. The utility model has the characteristics of small size, light weight and low cost at the same time.
以下便结合实施例附图,对本实用新型的具体实施方式作进一步的详述,以使本实用新型技术方案更易于理解、掌握。 The specific implementation of the utility model will be described in further detail below in conjunction with the accompanying drawings of the embodiments, so as to make the technical solution of the utility model easier to understand and grasp.
附图说明 Description of drawings
图1是本实用新型实施例1半导体激光器的结构示意图;
Fig. 1 is the structural representation of the semiconductor laser of the
图2是本实用新型实施例1半导体激光器的端帽的结构示意图;
Fig. 2 is the schematic structural view of the end cap of the semiconductor laser of the
图3是本实用新型实施例1半导体激光器的功率控制系统的工作示意图。
Fig. 3 is a working schematic diagram of the power control system of the semiconductor laser in
具体实施方式 Detailed ways
实施例1 Example 1
本实施例的一种半导体激光器,如图1和图2所示,包括一底座1,底座1上设有主光源、温度控制系统、光学整形系统和功率控制系统;主光源为光纤耦合半导体激光器,光纤耦合半导体激光器包括半导体激光器元件2,半导体激光器元件2固定在一机械件3中,并在机械件3的后部装有耦合透镜,将半导体激光器元件2输出的自由空间输出耦合进光纤。温度控制系统包括半导体制冷器4、温度传感器、温度控制电路和热沉散热系统,保持半导体激光器元件2在设定的温度范围工作。光学整形系统为准直透镜5,光纤耦合半导体激光器通过准直透镜5,使光纤输出转换为自由空间输出,并得到设计的光束质量。功率控制系统包括分光镜6、光电二极管7和反馈控制系统8。机械件3具有一定的热容,并固定在半导体制冷器4的冷面上,半导体制冷器4的热面与底座1连接;光纤盘绕在底座1上。光纤耦合半导体激光器的光纤输出端装有端帽9;端帽9长度为0.5mm,端帽9的接触面91与光纤92熔接,端帽9的外包层93与光纤相同,端帽的纤芯的直径为0.105mm。光在端帽9传输过程中,其光束会发散,当到达端帽9输出端94时,在端面上光功率密度会被降低,从而保证光纤的输出端不被烧坏,延长激光器的使用寿命。光纤耦合半导体激光器的输出端镀有防反射增透膜。防反射增透膜可以增加光纤到输出端的输出效率,减少反射,同时可使光纤纤芯输出端面到光纤接头的能量密度降低,从而保护光纤纤芯不被烧坏。端帽9与准直透镜5连接;准直透镜5固定在一V型槽上,在准直透镜5的输出光路上设有分光镜6,在分光镜6的分光光路上装光电二极管7,光电二极管7的光生电流作为控制信号,接入反馈控制系统8。分光镜6按固定比例从主光束中分光,通过取光系统将光束衰减到满足光电二极管7的线性输入范围并输入到光电二极管7中,光电二极管7将光信号转换为电信号,该电信号作为控制信号控制驱动电路板的驱动电流,从而控制半导体激光器的输出功率稳定。光电二极管7加装有衰减片,以保证光电二极管7的光电响应在线性范围。
A kind of semiconductor laser of the present embodiment, as shown in Figure 1 and Figure 2, comprises a
本实施例的工作原理是:半导体激光器元件2通电后,半导体制冷器4工作,通过控制半导体制冷器4的电流流向,控制半导体激光器元件2的工作温度,从而保证半导体激光器元件2在稳定的温度下工作,同时将半导体激光器元件2工作时产生的热量通过热沉散热系统由激光器底板1导向外部热沉。当温度传感器检测到温度到达工作温度时,温度控制电路向半导体激光器元件2提供工作电流。半导体激光器元件2输出激光,通过耦合透镜,将自由空间输出耦合进光纤。在光纤的输出端,通过准直透镜5,将光纤输出的光束整形成需要的光束质量。在输出光路上的分光镜6,会按比例反射光进光电二极管7。根据输出功率的强度,调节光电二极管7前的衰减片,使光电二极管7的光电响应在线性范围:输入光不能太强使光电二极管7的响应进入饱和区,也不能太弱使光生电流与光电二极管7的暗电流无法区别。光生电流做为控制信号,与主电路板的驱动电流组成闭环负反馈控制系统。其工作过程如图3所示,分光镜6按比例反射输出光,并入射进光电二极管7,光电二极管7将反馈的光信号,转换为电流信号,该信号作为反馈控制信号,主驱动电流与其相减,形成净控制电流,控制输出功率:当输出功率大于设定功率时,其反馈电流增大,被主驱动电流相减后,净控制电流变小,输出功率变小;但输出功率小于设定功率时,其反馈电流减小,被主驱动电流相减后,净控制电流变大,输出功率变大。该闭环负反馈系统使输出功率保持在动态平衡中,达到高稳定性的输出。
The working principle of this embodiment is: after the
本实施例提供了高光束质量、高稳定性、长寿命的自由空间输出半导体激光器,具有体积小、重量轻和成本低的特点。 This embodiment provides a free-space output semiconductor laser with high beam quality, high stability, and long life, and has the characteristics of small size, light weight, and low cost.
本实用新型尚有多种实施方式,凡采用等同变换或者等效变换而形成的所有技术方案,均落在本实用新型的保护范围之内。 The utility model still has multiple implementation modes, and all technical solutions formed by equivalent transformation or equivalent transformation all fall within the protection scope of the utility model. the
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| CN103490267A (en) * | 2013-09-27 | 2014-01-01 | 深圳极光世纪科技有限公司 | Laser module |
| CN104298278A (en) * | 2014-10-27 | 2015-01-21 | 北京航空航天大学 | A Laser Temperature Control System Based on PD |
| CN106602390A (en) * | 2016-12-30 | 2017-04-26 | 珠海光库科技股份有限公司 | Laser protection device, laser system, and method of using laser protection device and laser system |
| CN108344804A (en) * | 2018-02-28 | 2018-07-31 | 中国人民武装警察部队工程大学 | A kind of large-scale component non-destructive testing laser ultrasonic detection device and detection method |
| CN108414618A (en) * | 2018-02-28 | 2018-08-17 | 中国人民武装警察部队工程大学 | Laser ultrasonic detection device and detection method suitable for large-scale component non-destructive testing |
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| CN112332214A (en) * | 2019-08-02 | 2021-02-05 | 苏州旭创科技有限公司 | Tunable laser and optical module |
| CN115411595A (en) * | 2022-09-28 | 2022-11-29 | 珠海光库科技股份有限公司 | Stable and accurate fiber laser who monitors output |
| CN116581636A (en) * | 2023-06-28 | 2023-08-11 | 深圳市星汉激光科技股份有限公司 | Multi-optical-path laser based on polarization beam combination, control method and equipment |
| CN117254332A (en) * | 2023-11-17 | 2023-12-19 | 北京中石正旗技术有限公司 | Heat radiation structure and gas laser |
| CN117254332B (en) * | 2023-11-17 | 2024-02-02 | 北京中石正旗技术有限公司 | Heat radiation structure and gas laser |
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