CN202187083U - Bracket support for crucible of single crystal furnace - Google Patents
Bracket support for crucible of single crystal furnace Download PDFInfo
- Publication number
- CN202187083U CN202187083U CN2011202648631U CN201120264863U CN202187083U CN 202187083 U CN202187083 U CN 202187083U CN 2011202648631 U CN2011202648631 U CN 2011202648631U CN 201120264863 U CN201120264863 U CN 201120264863U CN 202187083 U CN202187083 U CN 202187083U
- Authority
- CN
- China
- Prior art keywords
- single crystal
- crucible
- bracket support
- chuck
- support bar
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000013078 crystal Substances 0.000 title claims abstract description 14
- 238000010438 heat treatment Methods 0.000 abstract description 5
- 238000004519 manufacturing process Methods 0.000 abstract description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000005090 crystal field Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Images
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- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The utility model discloses a bracket support for a crucible of a single crystal furnace, comprising a supporting rod, wherein a tray is bracketed on the top end of the supporting rod; the upper end of the tray is provided with a concave surface; the top end of the supporting rod is provided with a chuck; the chuck is clipped with the upper end of the tray. The bracket support has a rational structure design. The bracket support reduces heat loss, and can firmly support the crucible to heat such that the heating efficiency is obviously raised, and the production cost is lowered.
Description
Technical field
The utility model relates to and utilizes polycrystalline to lift out the silicon single crystal field, specifically belongs to the crucible tray support of single crystal growing furnace.
Background technology
At present, czochralski crystal growing furnace is a most important product line in the crystal growth equipment, makes artificial lens with it, and crystalline growth velocity is the highest, realizes MC the most easily, has therefore also obtained to use the most widely.In order to grow large size and high-quality monocrystalline, human all advanced means of almost having used.Integrated material, machinery, electric, computingmachine, the many-sided high-end knowledge and technology of magnetic on single crystal growing furnace.Silicon single crystal generally is used to make unicircuit and other electronic components as a kind of semiconductor material.Most semiconductor silicon single crystal body adopts the vertical pulling method manufacturing.
The utility model content
The purpose of the utility model provides a kind of crucible tray support of single crystal growing furnace, and reasonable in design has reduced calorific loss, firmly support crucible heating, and heating efficiency obviously improves, and production cost reduces.
The technical scheme of the utility model is following:
The crucible tray support of single crystal growing furnace includes support bar, and the top rest of said support bar has pallet, and the upper end of pallet is provided with concave surface, and the top of described support bar has chuck, and chuck and pallet upper end fasten.
The bottom of body of heater is passed in the lower end of described support bar, and permanent sleeve is loaded on the bottom of body of heater.
The reasonable in design of the utility model has reduced calorific loss, firmly support crucible heating, and heating efficiency obviously improves, and production cost reduces.
Description of drawings
Fig. 1 is the structural representation of the utility model.
Embodiment
Referring to accompanying drawing, the crucible tray support of single crystal growing furnace includes support bar 1; The top rest of support bar 1 has pallet 2; The upper end of pallet 2 is provided with concave surface 3, and the top of support bar has chuck 4, and chuck 4 fastens with the pallet upper end; The bottom 5 of body of heater is passed in the lower end of support bar, and permanent sleeve is loaded on the bottom of body of heater.
Claims (2)
1. the crucible tray support of single crystal growing furnace includes support bar, it is characterized in that: the top rest of said support bar has pallet, and the upper end of pallet is provided with concave surface, and the top of described support bar has chuck, and chuck and pallet upper end fasten.
2. the crucible tray support of single crystal growing furnace according to claim 1, it is characterized in that: the bottom of body of heater is passed in the lower end of described support bar, and permanent sleeve is loaded on the bottom of body of heater.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011202648631U CN202187083U (en) | 2011-07-25 | 2011-07-25 | Bracket support for crucible of single crystal furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011202648631U CN202187083U (en) | 2011-07-25 | 2011-07-25 | Bracket support for crucible of single crystal furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202187083U true CN202187083U (en) | 2012-04-11 |
Family
ID=45918544
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011202648631U Expired - Fee Related CN202187083U (en) | 2011-07-25 | 2011-07-25 | Bracket support for crucible of single crystal furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202187083U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2015047824A1 (en) * | 2013-09-30 | 2015-04-02 | Gt Crystal Systems, Llc | Advanced crucible support and thermal distribution management |
| CN104818531A (en) * | 2015-05-21 | 2015-08-05 | 株洲佳邦难熔金属有限公司 | Method for supporting tungsten crucible in sapphire crystal growth furnace and tungsten crucible supporting device |
| US9845548B2 (en) | 2013-09-30 | 2017-12-19 | Gtat Corporation | Advanced crucible support and thermal distribution management |
-
2011
- 2011-07-25 CN CN2011202648631U patent/CN202187083U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2015047824A1 (en) * | 2013-09-30 | 2015-04-02 | Gt Crystal Systems, Llc | Advanced crucible support and thermal distribution management |
| US9845548B2 (en) | 2013-09-30 | 2017-12-19 | Gtat Corporation | Advanced crucible support and thermal distribution management |
| CN104818531A (en) * | 2015-05-21 | 2015-08-05 | 株洲佳邦难熔金属有限公司 | Method for supporting tungsten crucible in sapphire crystal growth furnace and tungsten crucible supporting device |
| CN104818531B (en) * | 2015-05-21 | 2017-07-11 | 株洲佳邦难熔金属股份有限公司 | The method for supporting of tungsten crucible and tungsten crucible support meanss in a kind of sapphire crystallization furnace |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120411 Termination date: 20140725 |
|
| EXPY | Termination of patent right or utility model |