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CN202216907U - Biochip fluorescence micro-spectrum detection device - Google Patents

Biochip fluorescence micro-spectrum detection device Download PDF

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CN202216907U
CN202216907U CN2011201922465U CN201120192246U CN202216907U CN 202216907 U CN202216907 U CN 202216907U CN 2011201922465 U CN2011201922465 U CN 2011201922465U CN 201120192246 U CN201120192246 U CN 201120192246U CN 202216907 U CN202216907 U CN 202216907U
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吴坚
宣胜蓝
陈涛
刘世炳
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Beijing University of Technology
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Abstract

Provided is a fluorescence micro-spectrum detection device of a biological chip. (1) is an upper cover chip, (2) is a lower carrier chip, and (11) is a micro-channel filled by biological micro-fluid to be detected. Optical excitation units (12 and 13) are arranged on the upper side and the lower side of the micro-channel (11) respectively, and optical detection units (14 and 15) are symmetrically distributed on the left and the right of the micro-channel (11). Light sent out from an excitation light source (3) is filtered at the position of an optical filter (4), and the selected excitation light is focused through an optical micro-lens (5) at the top of one of the optical excitation units, is propagated in the micro-channel (11), and irradiates the biological micro-fluid to be detected. Fluorescence of materials to be detected is excited by the excitation light and collected by an optical micro-lens (7) at the top of a unit to be detected, and the fluorescence filtered by the optical filter is received by a semiconductor photoelectric conversion device (9) and converted into electrical signals to be output. The fluorescence micro-spectrum detection device of the biological chip integrates all non-electric elements of spectrum detection, is tiny in structure, and achieves miniaturization of a chip detection device.

Description

生物芯片荧光微光谱检测装置Biochip fluorescence micro-spectrum detection device

技术领域 technical field

本发明涉及一种生物芯片荧光微光谱检测装置,主要用于生物芯片中的微流体荧光微光谱的检测,属于生物学、分析化学及医学检测领域。  The invention relates to a biochip fluorescence microspectrum detection device, which is mainly used for the detection of microfluid fluorescence microspectrum in a biochip, and belongs to the fields of biology, analytical chemistry and medical detection. the

技术背景 technical background

生物芯片是近年来在生命科学领域中迅速发展起来的一项高新技术,它在微型化基础上可以实现全部生物工程分析过程和整个化验室功能,将采样、稀释、加试剂、反应、分离和检测等功能集成于一个芯片里,因而被通俗地称为“芯片实验室”,其科学性和先进性集中体现在结构缩微和功能集成这两个方面。生物芯片技术有4个基本要点:芯片制备、样品制备、生化反应和信号检测。信号检测是生物芯片技术的重要组成部分,主要包括信号产生、信号收集与传输、信号处理及识别三部分。在各种生物芯片信号检测方法中,荧光微光谱检测法具有重复性好、选择性强、灵敏度高、非破坏性检测等优点,是目前应用最广泛的检测技术之一。如各类荧光生物医学微流控芯片微检测、各类病原生物医学微阵列微检测、各胶体金标定性定量微检测、各固相化学试纸定性定量微检测等。  Biochip is a high-tech that has developed rapidly in the field of life science in recent years. It can realize the entire bioengineering analysis process and the entire laboratory function on the basis of miniaturization. It integrates sampling, dilution, reagent addition, reaction, separation and Detection and other functions are integrated in a chip, so it is popularly called "lab-on-a-chip". Its scientific and advanced nature is concentrated in two aspects: structural miniaturization and functional integration. There are four basic points in biochip technology: chip preparation, sample preparation, biochemical reaction and signal detection. Signal detection is an important part of biochip technology, which mainly includes three parts: signal generation, signal collection and transmission, signal processing and identification. Among various biochip signal detection methods, fluorescence microspectral detection has the advantages of good repeatability, strong selectivity, high sensitivity, and non-destructive detection, and is currently one of the most widely used detection technologies. Such as micro-detection of various fluorescent biomedical microfluidic chips, micro-detection of various pathogenic biomedical microarrays, calibration and quantitative micro-detection of various colloidal gold, qualitative and quantitative micro-detection of various solid-phase chemical test papers, etc. the

目前微光谱检测技术中所使用的激发光源是传统的封装半导体发光器件,如半导体发光二极管(LED)或半导体激光二极管(LD)。而荧光微光谱检测器都是直接使用传统的封装光电管,如光电倍增管(PMT)或电荷耦合元件(CCD)。例如2008年上海光谱仪器有限公司与浙江大学化学系微分析装置研究所联合研制的《激光诱导荧光检测微流控芯片生化分析仪》(分析化学仪器装置与实验技术,36(1):127~131,2008.1)、陈兴等人的“Portable Fluorescence Detection System  Integrated with Dispo sable Microfluidic Chip”(纳米技术与精密工程,7(2):127~131,2009.3)、林炳承等人的“微流控芯片分析化学实验室”(高等学校化学学报,30(3):433~445,2009.3)、杨彬等人的“线扫描准共焦荧光成像”(光学精密工程,18(5):1028~1034,2010.5)等。显然目前通用的生物芯片荧光微光谱检测装置存在如下缺点:  At present, the excitation light source used in microspectral detection technology is a traditional packaged semiconductor light emitting device, such as a semiconductor light emitting diode (LED) or a semiconductor laser diode (LD). The fluorescence micro-spectrum detectors all directly use traditional packaged photocells, such as photomultiplier tubes (PMTs) or charge-coupled devices (CCDs). For example, in 2008, Shanghai Spectrum Instrument Co., Ltd. and the Institute of Microanalysis Devices of the Department of Chemistry of Zhejiang University jointly developed the "Laser Induced Fluorescence Detection Microfluidic Chip Biochemical Analyzer" (Analytical Chemistry Instruments and Experimental Technology, 36(1): 127~ 131, 2008.1), "Portable Fluorescence Detection System Integrated with Disposable Microfluidic Chip" by Chen Xing et al. (Nanotechnology and Precision Engineering, 7(2): 127-131, 2009.3), "Microfluidic Chip Analytical Chemistry Laboratory" (Chemical Journal of Chinese Universities, 30(3): 433~445, 2009.3), "Line Scan Quasi-Confocal Fluorescence Imaging" by Yang Bin et al. (Optical Precision Engineering, 18(5): 1028~1034 , 2010.5) etc. Obviously, the current general-purpose biochip fluorescence microspectral detection device has the following shortcomings:

1、由于光电倍增管或电荷耦合元件自身的体积就很大,而且又是分体使用,需要有配套的光路装置,致使整个荧光微光谱检测装置的体积庞大,根本不可能嵌入到生物芯片中。  1. Due to the large size of the photomultiplier tube or the charge-coupled device itself, and they are used separately, a supporting optical path device is required, resulting in the bulky size of the entire fluorescence micro-spectrum detection device, which is impossible to embed into a biochip . the

2、由于光激发单元和光接收单元都没有透镜进行聚焦,同时又使用许多光纤作为光传输装置,不可避免在光纤耦合过程中存在光能量损耗,使得整个检测装置灵敏度的提高受到严重限制。  2. Since neither the light excitation unit nor the light receiving unit has a lens for focusing, and many optical fibers are used as the optical transmission device, it is inevitable that there will be loss of light energy during the fiber coupling process, which severely limits the improvement of the sensitivity of the entire detection device. the

3、由于在激发光传导和反射光采集时需要各类光学器件和光纤组成的光路进行光传输,这影响了光谱检测装置在实际使用中的稳定性。  3. Since an optical path composed of various optical devices and optical fibers is required for light transmission during excitation light transmission and reflected light collection, this affects the stability of the spectral detection device in actual use. the

4、由于检测并未达到零距离接触的测量方式,使得微光谱检测受到非检测对象物质,如组成微通道壁物质的干扰,造成测量误差。  4. Since the detection has not achieved the zero-distance contact measurement method, the microspectral detection is interfered by non-detection objects, such as the substances that make up the microchannel wall, resulting in measurement errors. the

目前的生物芯片荧光微光谱检测现状,是在PC机主机大小的外围设备中,去检测指甲大小的芯片,其仪器制造的科学意义与生物芯片理念的科学先进性是背道而驰的,这种状况大大地阻碍了生物芯片集成化的提高,成为生物芯片发展的瓶颈。2007年Bambang Kuswandi等人在“Optical sensing systems for micro-fluidic devices:A review”中综述概括了从上世纪九十年代到2007年期间各国在生物芯片微流体光学检测装置研究领域中的106篇文献,指出基于MEMS(Micro Electro Mechanical System)微细加工技术的光谱学检测装置微型化集成回路的研究,是生物芯片微流体光学检测装置的发展方向,研制体积小到可嵌入芯片和灵敏度高到能达到生物技术要求的微光谱检测装置已成为当前各国研究的热点之一。  The current status of biochip fluorescence microspectral detection is to detect chips the size of a fingernail in a peripheral device the size of a PC host. The scientific significance of the instrument manufacturing runs counter to the scientific advancement of the biochip concept. This situation greatly This hinders the improvement of biochip integration and becomes a bottleneck in the development of biochips. In 2007, Bambang Kuswandi et al. reviewed 106 documents in the field of biochip microfluidic optical detection devices from various countries from the 1990s to 2007 in "Optical sensing systems for micro-fluidic devices: A review" , pointed out that based on MEMS (Micro Electro Mechanical System) microfabrication technology, the study of miniaturized integrated circuits of spectroscopy detection devices is the development direction of biochip microfluidic optical detection devices. The micro-spectral detection device required by biotechnology has become one of the hotspots of current research in various countries. the

发明内容 Contents of the invention

本发明的目的在于通过提供一种生物芯片荧光微光谱检测装置,将信号检测中的信号产生、信号收集与传输、信号处理及识别这三个部分集成,实现芯片集成化。  The object of the present invention is to realize chip integration by providing a biochip fluorescence micro-spectrum detection device, which integrates three parts of signal detection, signal generation, signal collection and transmission, signal processing and identification. the

本发明是采用以下技术手段实现的:  The present invention is realized by adopting the following technical means:

一种生物芯片荧光微光谱检测装置,1为上部的盖芯片,2为下部的载芯片;11为充有待检测的生物微流体的微通道;在微通道11的上下侧设有有光激发单元12、13,在微通道11的左右对称分布有光检测单元14、15;光激发单元为管状,由激发光源3、激发光滤光片4、激发单元的光学微透镜5和将整个激发单元的四周包围起来的多层薄膜6组成;光检测单元为管状,由检测单元的光学微透镜7、检测光滤光片8、光电转换器件9和将整个检测单元的四周包围起来的多层薄膜10组成;从激发光源3发出的光在滤光片4处被滤光,选出的激发光通过激发单元顶部的光学微透镜5聚焦,传播到微通道11里,照射待检测对象生物微流体;待检测物质由激发光激发出荧光,被检测单元顶部的光学微透镜7采集,通过滤光片8后,滤出的荧光被半导体光电转换器件9所接收,变成电信号输出。  A biochip fluorescence micro-spectrum detection device, 1 is the upper cover chip, 2 is the lower chip carrier; 11 is a microchannel filled with biological microfluids to be detected; on the upper and lower sides of the microchannel 11, there are light excitation units 12 and 13, photodetection units 14 and 15 are distributed symmetrically around the microchannel 11; the photoexcitation unit is tubular, and consists of an excitation light source 3, an excitation light filter 4, an optical microlens 5 of the excitation unit and the entire excitation unit It consists of a multi-layer film 6 surrounded by four sides; the light detection unit is tubular, and consists of an optical microlens 7 of the detection unit, a detection light filter 8, a photoelectric conversion device 9 and a multi-layer film surrounded by the entire detection unit 10 components; the light emitted from the excitation light source 3 is filtered at the filter 4, and the selected excitation light is focused through the optical microlens 5 on the top of the excitation unit, and propagates into the microchannel 11 to irradiate the biological microfluid of the object to be detected The substance to be detected is excited by the excitation light to generate fluorescence, which is collected by the optical microlens 7 at the top of the detection unit. After passing through the filter 8, the filtered fluorescence is received by the semiconductor photoelectric conversion device 9 and becomes an electrical signal output. the

前述的半导体光电转换器件9为光电二极管或硅蓝光电池。  The aforementioned semiconductor photoelectric conversion device 9 is a photodiode or a silicon blue light cell. the

前述的激发光的透射峰值波长为525nm。  The transmission peak wavelength of the aforementioned excitation light is 525 nm. the

本发明的荧光微光谱检测装置与现有技术相比,具有以下明显的优势和有益效果:  Compared with the prior art, the fluorescence micro-spectrum detection device of the present invention has the following obvious advantages and beneficial effects:

本发明集成了光谱检测的全部非电要素,如激发光源、分光装置、光的聚集、传输、光匀束、光采集、光检测等。由于取代了无法嵌入芯片的光电倍增管PMT或电荷耦合元件CCD,使得整个装置的特征尺寸缩小到只有毫米数量级,甚至还可以再进一步微缩至微米量级。  The invention integrates all non-electrical elements of spectrum detection, such as excitation light source, spectroscopic device, light gathering, transmission, light uniform beam, light collection, light detection and so on. By replacing the photomultiplier tube PMT or charge-coupled device CCD that cannot be embedded in the chip, the feature size of the entire device is reduced to the order of millimeters, and can even be further reduced to the order of microns. the

附图说明 Description of drawings

图1为荧光微光谱检测装置沿前后方向的径向截面图;  Fig. 1 is a radial cross-sectional view of the fluorescence micro-spectrum detection device along the front-to-back direction;

图2为荧光微光谱检测装置沿左右方向的径向截面图;  Fig. 2 is a radial cross-sectional view of the fluorescence micro-spectrum detection device along the left and right directions;

图3为整体芯片结构示意图。  Figure 3 is a schematic diagram of the overall chip structure. the

图中:1为盖芯片,2为载芯片,3为激发光源,4为激发光滤光片,5为激发单元的光学微透镜,6为激发单元的多层薄膜,7为检测单元的光学微透镜,8为检测光滤光片,9为光电转换器件,10为检测单元的多层薄膜,11为微通道,12、13为光激发单元,14、15为光检测单元。  In the figure: 1 is the cover chip, 2 is the carrier chip, 3 is the excitation light source, 4 is the excitation light filter, 5 is the optical microlens of the excitation unit, 6 is the multi-layer film of the excitation unit, 7 is the optical lens of the detection unit Micro lens, 8 is a detection optical filter, 9 is a photoelectric conversion device, 10 is a multi-layer film of a detection unit, 11 is a microchannel, 12, 13 are light excitation units, 14, 15 are light detection units. the

具体实施方式 Detailed ways

下面结合附图1~3详细说明本实施例。  This embodiment will be described in detail below in conjunction with accompanying drawings 1 to 3 . the

本实施例的结构示意图如图1和2。图1为其沿前后方向的径向截面图,由上下两个光激发单元、左右两个光检测单元和中央的微道组成。图中1、2分别为上部的盖芯片1和下部的载芯片2,使用有机玻璃(PMMA)制作,上部盖芯片大约厚2mm,下部载芯片大约厚3.5mm。3、4、5、6组成光激发单元,其中3为激发光源,可以使用半导体发光二极管(LED)或半导体激光二极管(LD),所发光的峰值波长为475nm;4为激发光滤光片,透射的峰值波长也为475nm;5为激发单元的光学微透镜,将激发光源所发光聚焦到被测生物微流体上;6为多层薄膜,将整个激发单元的四周包围起来,形成管状,起到对管内光波高反射和对管外光波完全阻隔的作用。7、8、9、10组成光检测单元,其中7为检测单元的光学微透镜,对被测生物微流体所产生波长为525nm的荧光进行聚焦;8为检测光滤光片,透射峰值波长为525nm;9为光电转换器件,可以是光电二极管(PIN)或硅蓝光电池,光电转换的峰值波长为525nm;10为多层薄膜,将整个检测单元的四周包围起来,形成管状,所起作用同上。11为截面呈方形的微通道,截面积大约为0.8mm×0.8mm,里面充满待检测的生物微流体。一般情况下,光电检测器件的光敏面积比激发光源的发光面积大,故光检测单元的直径比光激发单元要大些。整个微光谱检测装置的工作过程是,从激发 光源3发出的光在滤光片4处被滤光,选出的475nm激发光通过激发单元顶部的光学微透镜5聚焦,传播到微通道11里,照射待检测对象生物微流体。待检测物质由激发光激发出荧光,被检测单元顶部的光学微透镜7采集,通过滤光片8后,滤出525nm的荧光被半导体光电转换器件9所接收,变成电信号输出。  The schematic diagram of the structure of this embodiment is shown in Figures 1 and 2. Fig. 1 is a radial cross-sectional view along the front-to-back direction, which consists of two light excitation units, two light detection units on the left and right, and a central microchannel. 1 and 2 in the figure are the upper cover chip 1 and the lower chip carrier 2, which are made of organic glass (PMMA). The upper cover chip is about 2mm thick, and the lower chip carrier is about 3.5mm thick. 3, 4, 5, and 6 form a light excitation unit, wherein 3 is an excitation light source, which can use a semiconductor light-emitting diode (LED) or a semiconductor laser diode (LD), and the peak wavelength of the light emitted is 475nm; 4 is an excitation light filter, The peak wavelength of transmission is also 475nm; 5 is the optical microlens of the excitation unit, which focuses the light emitted by the excitation light source onto the measured biological microfluid; It can highly reflect the light waves inside the tube and completely block the light waves outside the tube. 7, 8, 9, and 10 form a light detection unit, wherein 7 is the optical microlens of the detection unit, which focuses the fluorescence with a wavelength of 525nm produced by the measured biological microfluid; 8 is a detection light filter, and the transmission peak wavelength is 525nm; 9 is a photoelectric conversion device, which can be a photodiode (PIN) or a silicon blue light battery, and the peak wavelength of photoelectric conversion is 525nm; 10 is a multi-layer film, which surrounds the entire detection unit to form a tube, and its function is the same as above . 11 is a square microchannel with a cross-sectional area of about 0.8mm×0.8mm, which is filled with biological microfluids to be detected. Generally, the photosensitive area of the photodetection device is larger than the light emitting area of the excitation light source, so the diameter of the photodetection unit is larger than that of the photoexcitation unit. The working process of the entire micro-spectrum detection device is that the light emitted from the excitation light source 3 is filtered at the filter 4, and the selected 475nm excitation light is focused by the optical microlens 5 on the top of the excitation unit and propagated into the microchannel 11. , to irradiate the biological microfluid of the object to be detected. The substance to be detected emits fluorescence by the excitation light, which is collected by the optical microlens 7 on the top of the detection unit. After passing through the optical filter 8, the filtered 525nm fluorescence is received by the semiconductor photoelectric conversion device 9 and becomes an electrical signal output. the

图2为该检测装置沿左右方向的径向截面图,图中只能画出下部载芯片2、微通道11、以及光激发单元3、4、5、6和光检测单元中的微透镜7。而检测装置的横向截面图上将只能画出下部载芯片2、微通道11、以及光检测单元7、8、9、10和光激发单元中的微透镜5。使用两组光激发单元和两组光检测单元的目的是可以进一步提高检测灵敏度。  Fig. 2 is the radial sectional view of the detection device along the left and right direction, in which only the bottom chip 2, the microchannel 11, and the microlens 7 in the light excitation unit 3, 4, 5, 6 and the light detection unit can be drawn. On the transverse cross-sectional view of the detection device, only the lower chip 2, the microchannel 11, and the microlens 5 in the light detection units 7, 8, 9, 10 and the light excitation unit can be drawn. The purpose of using two sets of light excitation units and two sets of light detection units is to further improve the detection sensitivity. the

本发明的荧光微光谱检测装置具有以下特点:集成了光谱检测的全部非电要素,如激发光源、分光装置、光的聚集、传输、光匀束、光采集、光检测等。由于取代了无法嵌入芯片的光电倍增管PMT或电荷耦合元件CCD,使得整个装置的特征尺寸缩小到只有毫米数量级,甚至还可以再进一步微缩至微米量级。  The fluorescence micro-spectrum detection device of the present invention has the following characteristics: it integrates all non-electrical elements of spectrum detection, such as excitation light source, spectroscopic device, light aggregation, transmission, light uniformity, light collection, light detection, etc. By replacing the photomultiplier tube PMT or charge-coupled device CCD that cannot be embedded in the chip, the feature size of the entire device is reduced to the order of millimeters, and can even be further reduced to the order of microns. the

在具体实施例中,分别制作光激发单元和光检测单元,光激发单元的制作过程是,首先将激发光源与激发光滤光片用多层薄膜包围成管状,然后在滤光片上用原位成型法制作微光学透镜,即将紫外光学固化胶液滴从一定高度垂直释放,滴落到滤光片上,并自上而下向四周扩散流淌,适时地用紫外激光对液滴进行照射,使其固化,形成微光学透镜。光检测单元的制作方法与光激发单元相似,首先将光电转换器件与检测光滤光片用多层薄膜包围成管状,然后在滤光片上用原位成型法制作微光学透镜。在上部盖芯片1上打一个孔,将光激发单元12置于其中,微透镜朝下,如图3所示。在下部芯片2上用激光刻蚀出方形沟槽11,作为待检测生物微流体的微通道,然后在微通道的底部及两侧打三个孔,将光激发单元13置于底部孔内,微透镜朝上。将光检测单元14和15分别置于两侧的孔内,光检测单元14的微透镜 朝右、光检测单元15的微透镜朝左,如图3所示。最后将上部盖芯片1与下部载芯片2粘合在一起,便组装成生物芯片荧光微光谱检测装置,此时4个微透镜都是朝向流有待测物的微通道。  In a specific embodiment, the photoexcitation unit and the photodetection unit are fabricated respectively. The fabrication process of the photoexcitation unit is that firstly the excitation light source and the excitation light filter are surrounded into a tubular shape with a multi-layer film, and then an in-situ The micro-optical lens is made by forming method, that is, the liquid droplet of UV-curable glue is released vertically from a certain height, drops onto the filter, and spreads and flows from top to bottom, and irradiates the droplet with ultraviolet laser in time, so that It cures, forming micro-optical lenses. The fabrication method of the light detection unit is similar to that of the light excitation unit. First, the photoelectric conversion device and the detection light filter are surrounded by multi-layer films to form a tube, and then the micro-optical lens is fabricated on the filter by in-situ molding. A hole is punched on the upper cover chip 1 , and the photoexcitation unit 12 is placed in it with the microlens facing down, as shown in FIG. 3 . On the lower chip 2, a square groove 11 is etched with a laser as a microchannel for the biological microfluid to be detected, and then three holes are punched at the bottom and both sides of the microchannel, and the light excitation unit 13 is placed in the bottom hole, Microlens facing upwards. Photodetection units 14 and 15 are respectively placed in the holes on both sides, the microlens of photodetection unit 14 is to the right, and the microlens of photodetection unit 15 is to the left, as shown in Figure 3. Finally, the upper cover chip 1 and the lower carrier chip 2 are bonded together to assemble a biochip fluorescence micro-spectrum detection device. At this time, the four micro-lenses are all facing the micro-channel flowing with the analyte. the

Claims (4)

1. fluorescence biosensor chip low-light spectrum detection device comprises: the cover core sheet (1) on top, the bottom carry chip (2), be filled with the microchannel (11) of biological microfluid to be detected; It is characterized in that: the upper and lower sides in the microchannel is provided with optical excitation unit (12) (13), and the left-right symmetric of (11) is distributed with optical detecting unit (14) (15) in the microchannel;
Described optical excitation unit is a tubulose, by excitation source (3), exciting light optical filter (4), excite the unit optical microlens (5) and with whole excite the unit around the multilayer film (6) that are surrounded form;
Described optical detecting unit is a tubulose, by the optical microlens (7) of detecting unit, detect light optical filter (8), electrooptical device (9) and the multilayer film (10) that are surrounded around the whole detecting unit are formed;
The light that sends from excitation source (3) is filtered at optical filter (4), and the exciting light of selecting focuses on through the optical microlens (5) that excites the top, unit, propagates into lining, microchannel (11), shines object organisms microfluid to be detected; Material to be detected goes out fluorescence by excitation, and the optical microlens (7) at top, unit to be detected is gathered, and behind optical filter (8), the fluorescence that leaches is received by semiconductor light power conversion device (9), becomes electric signal output.
2. fluorescence biosensor chip low-light spectrum detection device according to claim 1 is characterized in that: described semiconductor light power conversion device (9) is photodiode or silicon blue cell.
3. fluorescence biosensor chip low-light spectrum detection device according to claim 1 is characterized in that: the transmission peak value wavelength of described exciting light is 525nm.
4. the method for making of a kind of fluorescence biosensor chip low-light spectrum detection device according to claim 1 is characterized in that: described microchannel (11) are square trench.
CN2011201922465U 2011-06-09 2011-06-09 Biochip fluorescence micro-spectrum detection device Expired - Lifetime CN202216907U (en)

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102353659A (en) * 2011-06-09 2012-02-15 北京工业大学 Detector for biochip fluorescent microspectrum and manufacture method thereof
CN103308502A (en) * 2013-06-01 2013-09-18 浙江大学 Handheld general microfluidic chip real-time detection device and application
CN103323439A (en) * 2013-06-09 2013-09-25 华侨大学 Micro-fluidic chip fluorescence excitation device, micro-fluidic chip and preparation method thereof
CN106215209A (en) * 2016-07-28 2016-12-14 北京瑞禾四方科技有限公司 A kind of the sterilization effect method of inspection, Apparatus and system

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102353659A (en) * 2011-06-09 2012-02-15 北京工业大学 Detector for biochip fluorescent microspectrum and manufacture method thereof
CN103308502A (en) * 2013-06-01 2013-09-18 浙江大学 Handheld general microfluidic chip real-time detection device and application
CN103323439A (en) * 2013-06-09 2013-09-25 华侨大学 Micro-fluidic chip fluorescence excitation device, micro-fluidic chip and preparation method thereof
CN103323439B (en) * 2013-06-09 2016-03-30 华侨大学 A kind of micro-fluidic chip fluorescence excitation device, micro-fluidic chip and preparation method thereof
CN106215209A (en) * 2016-07-28 2016-12-14 北京瑞禾四方科技有限公司 A kind of the sterilization effect method of inspection, Apparatus and system

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