CN202404024U - Cascade optical waveguide sensor based on passive resonant cavity and grating demultiplexer - Google Patents
Cascade optical waveguide sensor based on passive resonant cavity and grating demultiplexer Download PDFInfo
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- CN202404024U CN202404024U CN2011205416922U CN201120541692U CN202404024U CN 202404024 U CN202404024 U CN 202404024U CN 2011205416922 U CN2011205416922 U CN 2011205416922U CN 201120541692 U CN201120541692 U CN 201120541692U CN 202404024 U CN202404024 U CN 202404024U
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Abstract
本实用新型公开了一种基于无源谐振腔和光栅解复用器级联光波导传感器，它包括一个宽带光源、一个具有周期性滤波谱的无源谐振腔、一个将不同波长分开的光栅解复用器和一个探测器阵列；其中，所述光栅解复用器与探测器阵列中任意一个探测器组成一个带通滤波器；所述宽带光源、无源谐振腔和光栅解复用器依次通过波导连接，探测器阵列置于光栅解复用器的焦平面位置处本实用新型采用低成本的宽带光源作为输入光源，并且无源谐振腔、光栅解复用器和探测器阵列直接可以完成被测物质的信息获取工作，无需外加高分辨率的光谱仪或高波长稳定的单模激光器。大大降低了成本，并且更易于集成。
The utility model discloses a cascaded optical waveguide sensor based on a passive resonant cavity and a grating demultiplexer, which comprises a broadband light source, a passive resonant cavity with a periodic filter spectrum, a grating demultiplexer for separating different wavelengths A multiplexer and a detector array; wherein, the grating demultiplexer and any detector in the detector array form a bandpass filter; the broadband light source, the passive resonant cavity and the grating demultiplexer are sequentially Through the waveguide connection, the detector array is placed at the focal plane of the grating demultiplexer. The utility model uses a low-cost broadband light source as the input light source, and the passive resonant cavity, grating demultiplexer and detector array can be directly completed. The information acquisition of the measured substance does not require an additional high-resolution spectrometer or a high-wavelength stable single-mode laser. Costs are greatly reduced and integration is easier.
Description
Technical field
The utility model relates to a kind of optical waveguide sensor, relates in particular to a kind of passive resonant cavity and grating demodulation multiplexer cascade optical waveguide sensor.
Background technology
The light sensing technology has crucial application as an important branch of information science technology at aspects such as industrial process control, environmental monitoring, food security and national security.The light sensing technology can solve the sensitivity that fax sense technology exists low, be subject to disturb, the sensitive time is long, the problem that detects the uneasy congruent aspect of some chemical gas.The advantage that optical sensor has is highly sensitive, volume is little, anti-electromagnetic interference capability is strong, it is integrated to be convenient to, can online detection is occupied more and more important position at sensory field.
The ultimate principle of optical waveguide sensor spare is based on the evanescent wave that the interface/surface occurred of optical fiber or slab guide; Because evanescent wave appears the surface (contact measured material) of waveguide and can return in the waveguide; And influencing the characteristic of transmitting light in the waveguide, the variation of therefore surveying transmission light in the waveguide can realize the light sensing.
As shown in Figure 1; People such as K.De Vos propose to utilize the scheme of toroidal cavity resonator as optical waveguide sensor in document (" Silicon-on-Insulat or microring resonator for sensitive and label-free biosensing ", Optics Express 15, pp.7610-7615 (2007)); Toroidal cavity resonator is a kind of of optical cavity; Because it has more sharp-pointed filtering spectral line, higher as transducer sensitivity, therefore received extensive concern.This optical waveguide sensor comprises a single-mode laser, a passive resonant cavity and the detector with periodic filter spectrum.Be connected by waveguide between single-mode laser and the passive resonant cavity and between passive resonant cavity and the detector.
The shortcoming of people's schemes such as K.De Vos is that the wavelength that needs an expensive spectrometer to measure transmission peaks moves, and its measuring accuracy is directly related with the precision of spectrometer.If with measuring near the method that certain fixed wave length luminous energy changes the transmission peaks, the single-mode laser that then needs a narrow linewidth is as light source, and the wavelength of laser instrument will have accurate relative position with the transmission peaks of resonant ring, and highly stable.The cost that these require all to have increased greatly measurement mechanism has reduced reliability.
Summary of the invention
The purpose of the utility model is the deficiency to prior art; Provide a kind of based on passive resonant cavity and grating demodulation multiplexer cascade optical waveguide sensor; Low-cost devices such as the utility model use wideband light source are as the input light source; Survey measured matter through passive resonant cavity and integrated with it grating demodulation multiplexer demodulation multiplexer and detector array, accomplish measurement simultaneously its variation.
The technical scheme that its technical matters that solves the utility model adopts is: a kind of based on passive resonant cavity and grating demodulation multiplexer cascade optical waveguide sensor, it comprises a wideband light source, passive resonant cavity, a grating demodulation multiplexer and the detector array that different wave length is separated with periodic filter spectrum; Wherein, any detector is formed a BPF. in said grating demodulation multiplexer and the detector array; Said wideband light source, passive resonant cavity and grating demodulation multiplexer are connected through waveguide successively, and detector array places the focal plane position place of grating demodulation multiplexer.
Further, also comprise an array waveguide, arbitrary detector of said detector array links to each other with the grating demodulation multiplexer through a waveguide of Waveguide array.
Further, said passive resonant cavity is ring resonator or Fabry pool sieve chamber.
Further, said grating demodulation multiplexer is echelon grating or array waveguide grating.
The beneficial effect that the utlity model has is:
Adopt cheaply wideband light source as the input light source, and the information that passive resonant cavity, grating demodulation multiplexer and detector array directly can be accomplished measured matter obtains work, need not to add high-resolution spectrometer or high Wavelength stabilized single-mode laser.Greatly reduce cost, and be easier to integrated.
Description of drawings
Fig. 1 is the optical waveguide sensor synoptic diagram based on the single passive resonator cavity;
Fig. 2 is based on the structural representation of passive resonant cavity and grating demodulation multiplexer cascade optical waveguide sensor in the utility model;
Fig. 3 is the band-pass filter spectrogram of passive resonant cavity spectrogram and grating demodulation multiplexer and each detector composition; Among the figure; (a) be that measured matter is put into into the filtering spectrogram before the sensing unit 21; (b) being that measured matter is put into sensing unit 21 filtering spectrogram afterwards, is that measured matter is put into before the sensing unit 21 power profile of each passage of detector array 4 (c); (d) be that measured matter is put into after the sensing unit 21 power profile of each passage of detector array 4; Solid line is the transmitted spectrum synoptic diagram of passive resonant cavity, and dotted line is the stack spectrum synoptic diagram that grating demodulation multiplexer and detector array are formed each passage;
Fig. 4 is that adjacent two channel powers with it of current channel number concern than with sensing unit 21 variations in refractive index;
Fig. 5 is the structural representation of second embodiment in the utility model;
Fig. 6 is the structural representation of the 3rd embodiment in the utility model;
Fig. 7 is the structural representation of the 4th embodiment in the utility model;
Fig. 8 is the structural representation of the 5th embodiment in the utility model;
Fig. 9 is the structural representation of the 6th embodiment in the utility model;
Among the figure, wideband light source 1, passive resonant cavity 2, grating demodulation multiplexer 3, detector array 4, Waveguide array 6, waveguide 7, single-mode laser 8, sensing unit 21, detector 41, BPF. 51.
Embodiment
Below in conjunction with accompanying drawing and embodiment the utility model is further described.
Fig. 2 is first embodiment synoptic diagram of the utility model.It comprises that a wideband light source 1, one have the passive resonant cavity 2 of periodic filter spectrum, a grating demodulation multiplexer 3 and the detector array 4 that different wave length is separated.Any detector 41 is formed a BPF. 51 in grating demodulation multiplexer 3 and the detector array 4.Wherein, wideband light source 1, passive resonant cavity 2 and grating demodulation multiplexer 3 are connected by waveguide 7 successively, and detector array 4 places the focal plane position place of grating demodulation multiplexer 3.
Shown in Fig. 3 a, the difference of the centre frequency of adjacent two detector 41 pairing BPF.s 51 equates arbitrarily, is made as f
Sp, passive resonant cavity 2 has certain optical length makes the difference f of BPF. 51 centre frequencies that spacing (being called Free Spectral Range (Free Spectral Range or FSR) again) and the adjacent detector 41 of its resonance frequencies at different levels that produce is corresponding
SpCertain difference is arranged.
Shown in Fig. 3 c, when certain one-level resonance frequency of passive resonant cavity 2 just in time equates with the centre frequency of some BPF.s 51, because f
Sp≠ FSR, the centre frequency of the corresponding passage that the inferior resonance frequency of other grades of passive resonant cavity 2 will depart from, thus the luminous power that causes rest channels to receive is lower than this passage.We claim to receive the maximum passage of luminous power and are called and work as prepass.
Shown in Fig. 3 b, refractive index of existence can be by the sensing unit 21 of measured matter change in the passive resonant cavity 2, and sensing unit 21 change of refractive that have measured matter to cause can cause the variation of passive resonant cavity 2 optical lengths.The spectrum that makes passive resonant cavity 2 produce is moved.This will make the resonance frequency of aiming at originally depart from the centre frequency of corresponding with it passage, thereby causes changing when prepass, shown in Fig. 3 d.
Fig. 4 has provided the relation of current channel number along with sensing unit 21 variations in refractive index, in this example, and the Free Spectral Range FSR=125GHz of passive resonant cavity 2, f
Sp=121.875GHz, grating demodulation multiplexer have 40 passages.Therefore,, just can judge the optical length of passive resonant cavity 2, thereby obtain the refractive index information of sensing unit 21, and then know the information of measured matter by inference through judging the current channel number that receives peak power.In this example, the sensitivity of refractometry is 5 * 10
-5
Be further to improve the sensitivity of sensor, can also through relatively with when prepass adjacent about the sensitivity that recently further improves sensor of the power of two passages.Suppose that current channel number is j, then the power ratio of its adjacent two passages can be expressed as
.Fig. 4 has also provided the relation of this function along with the variations in refractive index of sensing unit 21, is 0.1 if suppose minimum distinguishable power ratio, and the resolution characteristic of refractive index just can improve 5 times so, reaches 1 * 10
-5
Fig. 5 has provided second embodiment synoptic diagram of the utility model respectively.This embodiment and first kind of embodiment difference are: in second embodiment; Link to each other by a Waveguide array 6 between grating demodulation multiplexer 3 and the detector array 4; The advantage of doing like this is, adds after the waveguide, and filtering channel is made up of a waveguide 61 in detector 41 in grating demodulation multiplexer 3, the detector array 4 and the Waveguide array 6 jointly; Help obtaining narrower filtering spectral line like this, improve the sensitivity of system.
Fig. 6-9 has provided the 3rd to the 6th the embodiment synoptic diagram of the utility model respectively.These embodiments and first kind of embodiment difference are: in third and fourth embodiment; Passive resonant cavity 2 is respectively Fabry pool sieve chamber 201 and ring resonator 202; In the 5th and the 6th embodiment, grating demodulation multiplexer 3 is respectively echelon grating 301 and array waveguide grating 302.
The foregoing description is used for the utility model of explaining, rather than the utility model is limited.In the protection domain of the spirit of the utility model and claim,, all fall into the protection domain of the utility model to any modification and the change that the utility model is made.For example passive resonant cavity can change and do the optical texture that any other can produce the periodic filter spectral line, moors sieve etalon etc. like Fabry.
Claims (4)
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102419312A (en) * | 2011-12-22 | 2012-04-18 | 浙江大学 | Cascade optical waveguide sensor based on passive resonant cavity and grating demultiplexer |
| CN104048943A (en) * | 2014-06-09 | 2014-09-17 | 大连理工大学 | Integrated waveguide optical biochemical sensor with integration of sensation and demodulation |
| CN106441573A (en) * | 2016-09-09 | 2017-02-22 | 电子科技大学 | Small spectrometer based on multimode optical waveguide |
-
2011
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102419312A (en) * | 2011-12-22 | 2012-04-18 | 浙江大学 | Cascade optical waveguide sensor based on passive resonant cavity and grating demultiplexer |
| CN102419312B (en) * | 2011-12-22 | 2015-06-17 | 浙江大学 | Cascade optical waveguide sensor based on passive resonant cavity and grating demultiplexer |
| CN104048943A (en) * | 2014-06-09 | 2014-09-17 | 大连理工大学 | Integrated waveguide optical biochemical sensor with integration of sensation and demodulation |
| CN104048943B (en) * | 2014-06-09 | 2016-07-06 | 大连理工大学 | The integrated waveguide optical biochemical sensor of sensing and demodulating integration |
| CN106441573A (en) * | 2016-09-09 | 2017-02-22 | 电子科技大学 | Small spectrometer based on multimode optical waveguide |
| CN106441573B (en) * | 2016-09-09 | 2018-03-27 | 电子科技大学 | A kind of miniature spectrometer based on multimode lightguide |
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