CN202423240U - Assembling-type equipment support device - Google Patents
Assembling-type equipment support device Download PDFInfo
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- CN202423240U CN202423240U CN2011205538154U CN201120553815U CN202423240U CN 202423240 U CN202423240 U CN 202423240U CN 2011205538154 U CN2011205538154 U CN 2011205538154U CN 201120553815 U CN201120553815 U CN 201120553815U CN 202423240 U CN202423240 U CN 202423240U
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- 230000000694 effects Effects 0.000 claims description 30
- 239000000463 material Substances 0.000 abstract description 2
- 230000037431 insertion Effects 0.000 abstract 2
- 238000003780 insertion Methods 0.000 abstract 2
- 238000000034 method Methods 0.000 description 9
- 239000013078 crystal Substances 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- 238000009434 installation Methods 0.000 description 3
- 210000003141 lower extremity Anatomy 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 238000004381 surface treatment Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 230000002787 reinforcement Effects 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000002699 waste material Substances 0.000 description 2
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- 239000012467 final product Substances 0.000 description 1
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Abstract
The utility model discloses an assembling-type equipment support device, comprising a plurality of vertical rods, a plurality of first transverse rods, a plurality of second transverse rods and a plurality of lateral insertion boards, wherein a cuboid frame is composed of the vertical rods, the first transverse rods and the second transverse rods; the vertical sides of the cuboid frame are formed by the vertical rods; the first transverse sides of the cuboid frame are formed by the first transverse rods; the second transverse sides of the cuboid frame are formed by the second transverse rods; each transverse rod is extended outwardly and forms an extension part which is beyond the outer lateral face of one vertical rod connected with the transverse rod; one face of the extension part of each transverse rod faced to other extension part of the other corresponding transverse rod is provided with a groove which passes through the transverse rod; the lateral insertion boards are inserted into the grooves of the extension parts of two opposite first transverse rods and/or the grooves of the extension parts of two opposite second transverse rods; according to functions of the support device provided by tthe utility model, demands on a support frame and a frame completely can be satisfied, a structure is assembled and detached easily, and most of materials can be recycled, etc.
Description
[technical field]
The utility model relates to the device support field, relates in particular to a kind of assembly type device support device.
[background technology]
Wafer is to produce the used carrier of integrated circuit.In actual production, need the wafer of preparation to have smooth, ultra clean Surface; And the existing method that is used to prepare ultra clean wafer surface can be divided into two kinds: such as the wet treatment process of submergence and spraying technique, and such as the dry process process based on chemical gaseous phase and plasma technology.Wherein wet treatment process is that prior art adopts method comparatively widely, and the wet treatment process generally includes a succession of step groups that adopts suitable chemical solution submergence or spray wafer and becomes.The general structure of equipment of the general ultra clean wafer surface of existing preparation is all very complicated, volume is very huge.Usually, what bracing frame and the framework that carries said equipment all need be according to the special customization of layout of the environment of factory and production line, manufacturing cost is very high.In addition, the bracing frame of most of equipment and framework can not reuse.Along with constantly dwindling of dimensions of semiconductor devices, to make the used wafer size of semiconductor device and constantly increase, production process of semiconductor need be updated, and device therefor also and then needs to change.The equipment that changes often just can only fall as waste disposal, also can add very big burden to environment in the time of the waste resource.
Therefore, be necessary to propose a solution and solve the problems referred to above.
[utility model content]
The technical problem that the utility model will solve is to provide a kind of assembly type device support device, and it has the requirement that can satisfy bracing frame and framework on the function fully, is easy to assembly and disassembly on the structure, characteristics such as the recyclable utilization of most materials.
In order to address the above problem; An aspect according to the utility model; The utility model provides a kind of device support device; It comprises a plurality of montants, a plurality of first cross bar, a plurality of second cross bar and a plurality of sides plate, and said montant, said first cross bar and said second cross bar constitute a cuboid framework, and said montant forms the vertical edge of said cuboid framework; Said first cross bar forms first horizontal edge of said cuboid framework, and said second cross bar forms second horizontal edge of said cuboid framework.Each cross bar stretches out and forms the epitaxy part of the lateral surface that exceeds the montant that is connected with this cross bar; The one side towards the epitaxy part of its another corresponding cross bar of the epitaxy part of each cross bar is provided with a raceway groove that runs through this cross bar, and said side plate is plugged between the raceway groove of epitaxy part of two first relative cross bars and/or two second cross bars.
Further; Said device support device also includes a plurality of reference columns; Each reference column lays respectively between the epitaxy part of the first adjacent cross bar and second cross bar, and two adjacent reference columns position the side plate between the raceway groove of the epitaxy part that is plugged in two first cross bars and/or two second cross bars.
Further, what have in the said reference column is the activity orientation post, and what have is the stationary positioned post, and said stationary positioned post is fixedly connected with adjacent cross bar, and said activity orientation post and adjacent cross bar flexibly connect.
Further, said activity orientation post moves between an enable possition and off-position, when said activity orientation post moves to the enable possition, inserts or unload said side plate from said activity orientation post position.
Further; Said first cross bar comprises two top first cross bars and two bottom first cross bars; Said second cross bar comprises two top second cross bars and two bottom second cross bars; Said montant is four, the two ends of each top first cross bar respectively with the top end face of two montants against and is connected, the two ends of each top second cross bar respectively with the side of an end of two top first cross bars against also being connected; The two ends of each bottom first cross bar respectively with the bottom face of two montants against and is connected, the two ends of each bottom second cross bar respectively with the side of an end of two bottom first cross bars against also being connected.
Further again; Said device support device also comprises two first parallel support bars and one second support bar; Each first support bar is between two bottom first cross bars; The two ends of each first support bar are connected with an end of two bottom first cross bars respectively, and the two ends of said second support bar are connected on two first support bars.
Further, said device support device also comprises two the 3rd parallel support bars, and two the 3rd support bars lay respectively at the inboard of two top second cross bars, and the two ends of each the 3rd support bar are connected on the side of two top first cross bars.
Further, said montant, said first cross bar, said second cross bar and/or said reference column are processed by section bar.
Further, said montant and/or said reference column are processed by first kind of section bar, and the cross section of first kind of section bar is roughly square; The height of its cross section is H1; Length is L1, and wherein L1 equals H1, all is provided with the raceway groove that runs through this side on each side of first kind of section bar.Said first cross bar and said second cross bar are processed by second kind of section bar; The cross section of second kind of section bar is roughly rectangle, and the height of its cross section is H2, and length is L2; Wherein L2 is greater than H2; All be provided with two raceway grooves that run through the parallel to each other of this side and keep at a certain distance away in the bigger side of two width of second kind of section bar each, all be provided with raceway groove, wherein a H2=H1 who runs through this side on each in two width smaller lateral of second kind of section bar.
Compared with prior art, assembly type device support device in the utility model uses common or special section bar to assemble, and has simple in structurely, is easy to make, assembling, dismounting, and support strength is high, afterwards advantage such as recyclable utilization.
About other purposes of the utility model, characteristic and advantage will combine accompanying drawing in embodiment, to describe in detail below.
[description of drawings]
In conjunction with reference to accompanying drawing and ensuing detailed description, the utility model will be more readily understood, the structure member that wherein same Reference numeral is corresponding same, wherein:
Figure 1A is the device support device perspective view in one embodiment in the utility model;
Figure 1B looks master map for the plane of the device support device among Figure 1A;
Fig. 1 C is the plane left view of the device support device among Figure 1A;
Fig. 2 is the device support device assembling perspective view in another embodiment in the utility model;
Fig. 3 A is the perspective view of a kind of section bar of the device support device use in the utility model;
Fig. 3 B is the cross section structure sketch map of the section bar shown in Fig. 3 A;
Fig. 4 A is the perspective view of the another kind of section bar of the device support device use in the utility model;
Fig. 4 B is the cross section structure sketch map of the section bar shown in Fig. 4 A;
Fig. 5 is the sketch map that two section bars adopt outer connector to connect;
Fig. 6 is the sketch map that two section bars adopt interconnecting piece to connect.
[embodiment]
For above-mentioned purpose, the feature and advantage that make the utility model can be more obviously understandable, the utility model is done further detailed explanation below in conjunction with accompanying drawing and embodiment.
Alleged here " embodiment " or " embodiment " are meant that special characteristic, structure or the characteristic relevant with said embodiment can be contained at least one implementation of the utility model at least.Different local in this manual " in one embodiment " that occur and nonessential all refer to same embodiment, must not be yet with other embodiment mutually exclusive separately or select embodiment." a plurality of ", " some " in the utility model represent two or more.In the utility model " and/or " expression " with " perhaps " or ".
Figure 1A shows device support device 100 perspective view in one embodiment in the utility model, and Figure 1B looks master map for the plane of the device support device 100 among Figure 1A, and Fig. 1 C is the plane left view of the device support device 100 among Figure 1A.
Please combine referring to figs. 1A to shown in Fig. 1 C, said device support device 100 comprises four montants 110, two tops first cross bar 120, two tops second cross bar 130, two bottom first cross bars 140 and two bottom second cross bars 150.
Said four montant 110 vertical spacings are placed and are parallel to each other.Said two tops first cross bar 120 is vertical and parallel to each other with said montant 110, the two ends of each top first cross bar 120 respectively with the top end face of two montants 110 against and be connected.Said two tops second cross bar 130 and said montant 110 and said top first cross bar 120 are vertical and parallel to each other, the two ends of each top second cross bar 130 respectively with the side of an end of two tops, first cross bar 120 against and be connected.Said two bottoms first cross bar 140 is vertical and parallel with top first cross bar 120 with said montant 110, the two ends of each bottom first cross bar 140 respectively with the bottom face of two montants 110 against and be connected.Said two bottoms second cross bar 150 is parallel with said montant 110 and said top second cross bar 130, the two ends of each bottom second cross bar 150 respectively with the side of an end of two bottoms, first cross bar 140 against and be connected.
Like this; Said device support device 100 has just formed a cuboid framework (or being called the cuboid framework); Four montants 110 form the vertical edge of said cuboid framework; Four first cross bars 120 and 140 form first horizontal edge of said cuboid framework, second horizontal edge of four second cross bars 130 and the said cuboid framework of 150 formation.Be positioned at the side that a top first cross bar 120 of the same side of said cuboid framework, two montants 110 and bottom first cross bar 140 form said cuboid framework; Be positioned at the side that a top second cross bar 130 of the same side of said cuboid framework, two montants 110 and bottom second cross bar 150 form said cuboid framework; The end face of two top first cross bars 120 and two said cuboid frameworks of top second cross bar, 130 formation, the bottom surface of two bottom first cross bars 130 and two said cuboid frameworks of bottom second cross bar, 150 formation.
For said cuboid framework; Said montant 110 in the vertical directions can provide strong support with top second cross bar 130 to top first cross bar 120, make can place the part parts in the heavier crystal column surface treatment facility on the end face of said cuboid framework.Also can place the part parts in the crystal column surface treatment facility in the said cuboid framework.
Said device support device 100 also comprises two parallel first support bars 160, second support bar 170, three support bar 180 parallel with two.Each first support bar 160 is connected between first cross bar 140 of two bottoms and with an end of two bottoms, first cross bar 140.The two ends of said second support bar 170 are connected on two first support bars 160.Two the 3rd support bars 180 lay respectively at the inboard of two top second cross bars 130, and the two ends of each the 3rd support bar 180 are connected on the side of two top first cross bars 120.
The common inside bottom surface that forms said cuboid framework of the upper side of first support bar 160, second support bar 170 and bottom first cross bar 140 can be placed said crystal column surface processing device component on this inside bottom surface.Simultaneously, first support bar, 160 second support bars 170 also can play certain reinforcement effect to entire equipment bracing or strutting arrangement 100.The upper side of the 3rd support bar 180 and top second cross bar 130 forms the end face of said cuboid framework jointly, can on this end face, place the part parts of said crystal column surface treatment facility.The position of the 3rd support bar 180 can be adjusted according to the size of the equipment unit of putting on it; Simultaneously, the 3rd support bar 180 also can play certain reinforcement effect to entire equipment bracing or strutting arrangement 100.
Please consult shown in Figure 1B and Fig. 1 C by emphasis; Each cross bar stretches out and forms the epitaxy part of the lateral surface that exceeds the montant that is connected with this cross bar; The one side towards the epitaxy part of its another corresponding cross bar of the epitaxy part of each cross bar is provided with a raceway groove that runs through this cross bar, and the raceway groove of two cross bars that the epitaxy part forward surface is right is oppositely arranged.
Specifically; Each top first cross bar 120 stretches out and forms the epitaxy part 121 of the lateral surface 111 that exceeds the montant 110 that is connected with this top first cross bar 120; Each bottom first cross bar 140 stretches out and forms the epitaxy part 141 of the lateral surface 111 that exceeds the montant 110 that is connected with this bottom first cross bar 140; Each top second cross bar 130 stretches out and forms the epitaxy part 131 of the lateral surface 111 that exceeds the montant 110 that is connected with this top second cross bar 130, and each bottom second cross bar 150 stretches out and forms the epitaxy part 151 of the lateral surface 111 that exceeds the montant 110 that is connected with this bottom second cross bar 150.The one side towards the epitaxy part 141 of its corresponding bottom first cross bar 140 of the epitaxy part 121 of each top first cross bar 120 is provided with a raceway groove 122 that runs through this top first cross bar 120; Same, the one side towards the epitaxy part 121 of its corresponding top first cross bar 120 of the epitaxy part 141 of each bottom first cross bar 140 is provided with a raceway groove 142 that runs through this bottom first cross bar 140.The one side towards the epitaxy part 151 of its corresponding bottom second cross bar 150 of the epitaxy part 131 of each top second cross bar 130 is provided with a raceway groove 132 that runs through this top second cross bar 130; Same, the one side towards the epitaxy part 131 of its corresponding top second cross bar 130 of the epitaxy part 151 of each bottom second cross bar 150 is provided with a raceway groove 152 that runs through this bottom second cross bar 150.
Fig. 2 is the assembling perspective view of device support device 100 in a further embodiment in the utility model.Device support device shown in Figure 2 is compared with the device support device shown in Figure 1A, and it also includes four side plates 210.In conjunction with reference to shown in Figure 1B and Fig. 1 C; Each side plate 210 is dismountable to be plugged between the raceway groove of epitaxy part of epitaxy part and a bottom bar of a corresponding top cross bar; The top edge of each side plate 210 is contained in the raceway groove of epitaxy part of said top cross bar, and the lower limb of each side plate 210 is contained in the raceway groove of epitaxy part of said bottom bar.
Concrete; There are two side plates 210 to be plugged in respectively between the epitaxy part 141 of epitaxy part 121 and bottom first cross bar 140 of corresponding top first cross bar 120; The top edge of these two side plates 210 is contained in the raceway groove 122 of epitaxy part 121 of said top first cross bar 120, and its lower limb is contained in the raceway groove 142 of epitaxy part 141 of said bottom first cross bar 140.There are two side plates 210 to be plugged in respectively between the epitaxy part 151 of epitaxy part 131 and bottom second cross bar 150 of corresponding top second cross bar 130; The top edge of these two side plates 210 is contained in the raceway groove 132 of epitaxy part 131 of said top second cross bar 130, and its lower limb is contained in the raceway groove 152 of epitaxy part 151 of said bottom second cross bar 150.
Said side plate 210 provides certain semienclosed spatial accommodation can for the crystal column surface processing device component in the said device support device 100.Like this, both can protect the crystal column surface processing device component in it, (such as unexpected leak of liquid or sprinkling occurring) has influence on external environment condition afterwards can to prevent also that the crystal column surface processing device component in it from breaking down.In addition, said side plate makes that also the outward appearance of entire equipment bracing or strutting arrangement is more attractive in appearance.
For said side plate 210 is better fixed, device support device 100 shown in Figure 2 also includes four reference columns 220 parallel with said montant 110.The top of each reference column 220 is between adjacent top first cross bar 120 and top second cross bar 130, and the bottom of each reference column 220 is between adjacent bottom first cross bar 140 and bottom second cross bar 140.Two adjacent reference columns 220 can be positioned the side plate 210 that is plugged between top cross bar and the bottom bar between the two.
There are two to be activity orientation post 220A in the said reference column 220, have two to be stationary positioned post 220B in the said reference column 220.Said stationary positioned post 220B is fixedly connected with adjacent cross bar.Said activity orientation post 220A and adjacent cross bar flexibly connect.When an activity orientation post 220A moves to the enable possition; Two the side plates 210 adjacent with this activity orientation post 220A can insert corresponding position from this activity orientation post 220A position; When this activity orientation post 220A moved to off-position, 210 of the side plates that has inserted were positioned on its position.When needs take off said side plate 210, can said activity orientation post 210 be moved to the enable possition equally, thereby can take off corresponding side plate 210 from this activity orientation post 220A.If two activity orientation post 220A are provided with at interval, can realize the random installation and removal of 4 side plates 210 like this.If the adjacent setting of two activity orientation post 220A can realize the wherein random installation and removal of 3 side plates 210 like this.If have only an activity orientation post 220A, 3 stationary positioned post 220B are arranged, at this moment have only 2 the side plate 210 arbitrarily installation and removal adjacent with this activity orientation post 220A.Can decide as required.
In one embodiment; Said activity orientation post 220A is articulated on first cross bar 120 and 140 or second cross bar 130 and 140 through pivot (not shown) is rotating; Said activity orientation post 220A can turn to off-position afterwards again along the said enable possition that pivots to.In said activity orientation post 220A last time in the closed position, said activity orientation post 220A and adjacent cross bar link together, such as being attached together through magnet.
In one embodiment, the montant 110 in the device support device 100 in the utility model, cross bar 120,130,140 and 150, support bar 160,170 and 180, and reference column 220 can adopt normally used standard sections.
Fig. 3 A is the perspective view that can use a kind of section bar 300 of the device support device in the utility model, and Fig. 3 B is the cross section structure sketch map of the section bar 300 shown in Fig. 3 A.Said section bar 300 is roughly cuboid, and its length can be set as required, and its cross section is roughly square, and the height of its cross section is H1, and length is L1, and wherein L1 equals H1.Four raceway grooves 310 that all are provided with on each side of said section bar 300 on 310, four sides of raceway groove of running through this side are divided into connecting portion 330 that is positioned at the center and the terminal part 320 that is positioned at four corners with said section bar 300.Said terminal part 320 all is the structure of hollow with said connecting portion 330.In other embodiments, it is inconsistent that the size of H1 and L1 also can design, and can design the value of H1 and L1 as required.
Fig. 4 A is the perspective view that can use the another kind of section bar 400 of the device support device in the utility model, and Fig. 4 B is the cross section structure sketch map of the section bar 400 shown in Fig. 4 A.Said section bar 400 is roughly cuboid, and its length can be set as required, and its cross section is roughly rectangle, and the height of its cross section is H2, and length is L2, and wherein L2 is greater than H2.All be provided with two raceway grooves 410 that run through the parallel to each other of this side and keep at a certain distance away in the side 401 of two width of said section bar 400 big (wide L2) each, all be provided with a raceway groove 410 that runs through this side on each in the side 403 of two width less (wide H2) of said section bar 400.Raceway groove 410 on four sides is divided into connecting portion 430 that is positioned at the center and the terminal part 420 that is positioned at four corners with said section bar 400.Said terminal part 420 all is the structure of hollow with said connecting portion 430.In other embodiments, the size of H2 and L2 also can be set as required.
In this embodiment, the height of the cross section of the section bar shown in Fig. 4 B 400 is the height H 1 that H2 equals the cross section of the section bar 300 shown in Fig. 3 B.Certainly, in other embodiments, also can design H2 and be not equal to H1, and can design both size relationships as required.
Fig. 5 is the sketch map that two section bars adopt outer connector to connect, and promptly first profiled bars 510 and second profiled bars 520 interconnect through outer connector 530, and what wherein first profiled bars 510 and second profiled bars 520 can adopt is the section bar 300 shown in Fig. 3 A.First profiled bars 510 comprises that raceway groove 511, the second profiled bars 520 that run through its side comprise the raceway groove 521 that runs through its side.First profiled bars 510 is connected through said outer connector 530 with second profiled bars 520; Said outer connector 530 has two mutually perpendicular extensions; Has a perforation on each extension; Can use the parts that are spirally connected by the raceway groove 511 of perforation on the said outer connector 530 and said profiled bars or 521 with outer connector 530 and profiled bars 510 or 520 relative fixed, and then with first profiled bars 510 and second profiled bars, 520 relative fixed.Can first profiled bars 510 be connected with second profiled bars 520 at an arbitrary position as required.
Fig. 6 is the sketch map that two section bars adopt interconnecting piece to connect; Promptly the 3rd profiled bars 610 and the 4th profiled bars 620 interconnect through interconnecting piece 630; Wherein the 3rd profiled bars 610 can adopt section bar 300, the four profiled bars 620 shown in Fig. 3 A can adopt the section bar 400 shown in Fig. 4 A.The 3rd profiled bars 610 comprises that raceway groove 611, the four profiled bars 620 that run through its side comprise the raceway groove 621 that runs through its side.The 3rd profiled bars 610 is connected through said interconnecting piece 630 with the 4th profiled bars 620; Said interconnecting piece 630 has two mutually perpendicular extensions; Have one or more perforation on each extension; Can use the parts that are spirally connected by the raceway groove 611 of perforation on the said outer connector 630 and said profiled bars or 621 with interconnecting piece 630 and profiled bars 610 or 620 relative fixed, and then with the 3rd profiled bars 610 and the 4th profiled bars 620 relative fixed.Can the 3rd profiled bars 610 be connected with the 4th profiled bars 620 at an arbitrary position as required.
Fig. 5 and two kinds of section bar connected modes shown in Figure 6 all belong to popular section bar and method of attachment commonly used.Certainly, can also the section bar shown in two Fig. 4 A or Fig. 3 A be connected through special interconnecting piece or outer connector.Further again, in order to reach special intensity or fixed effect, available welding or other method are come connection profile.
Please refer again to Figure 1A and shown in Figure 2; In this embodiment; Said montant 110, support bar 160,170 and 180 and reference column 220 adopts is the section bar shown in Fig. 3 A, the 3B, first cross bar 120 and 140 and second cross bar 130 and 150 employings be the section bar shown in Fig. 4 A, the 4B; The connection of each profiled bars can also can be adopted other connected modes referring to Fig. 5 and shown in Figure 6.A side of each support bar 180 is provided with two breach.Can find out that what said device support device 100 adopted all is basic section bar, just can assemble through simple assembling, very convenient equally during dismounting, the section bar after the dismounting can also reuse once more, saves resource, reduces rubbish, helps environmental protection.
Those of ordinary skill in the affiliated field should be appreciated that; The description about device support device 100 among the embodiment only is exemplary, under the prerequisite of true spirit that does not depart from the utility model and scope, make change and all should belong to the protection range of the utility model.As space is limited, just list below and to have lifted the embodiment that partly changes.
In certain embodiments; The pattern of the said section bar that the device support device 100 shown in Figure 1A is adopted is not limited to two kinds of section bars shown in Fig. 4 A and Fig. 3 A; So long as can being built into the structure shown in Figure 1A, this section bar gets final product; Have only 1 or 2 sides to have the raceway groove that runs through this side such as this section bar, the roomy bigger side of the section bar among Fig. 4 A is provided with three raceway grooves etc. for another example.
In certain embodiments; First cross bar 120 and 140 can be positioned at the outside of second cross bar 130 and 150; That is to say that second cross bar 130 directly leans with the terminal surface of montant with 150 and is connected, and first cross bar 120 leans with 150 side with second cross bar 130 respectively with 140 and is connected.Certainly, can also change the position relation between first cross bar 120 and second cross bar 130 as required, also can change the position relation between first cross bar 140 and second cross bar 150 as required.
In one embodiment, all reference columns can be set to the activity orientation post.In further embodiments, reference column can be set locate side plate 210, and adopt other locate modes that the side plate is positioned, such as being fixed in bolt on the corresponding cross bar.
" top " and " end " is relative among this paper, if one of them is " top ", its relative is exactly " end " so.
Above-mentioned explanation has fully disclosed the embodiment of the utility model.It is pointed out that any change that the technical staff that is familiar with this field does the embodiment of the utility model does not all break away from the scope of claims of the utility model.Correspondingly, the scope of the claim of the utility model also is not limited only to previous embodiment.
Claims (10)
1. device support device; It is characterized in that it comprises a plurality of montants, a plurality of first cross bar, a plurality of second cross bar and a plurality of sides plate, said montant, first cross bar and second cross bar constitute a cuboid framework; Said montant forms the vertical edge of said cuboid framework; Said first cross bar forms first horizontal edge of said cuboid framework, and said second cross bar forms second horizontal edge of said cuboid framework
Each cross bar stretches out and forms the epitaxy part of the lateral surface that exceeds the montant that is connected with this cross bar; The one side towards the epitaxy part of its another corresponding cross bar of the epitaxy part of each cross bar is provided with a raceway groove that runs through this cross bar, and said side plate is plugged between the raceway groove of epitaxy part of two first relative cross bars and/or two second cross bars.
2. device support device according to claim 1; It is characterized in that; It also includes a plurality of reference columns; Each reference column is between the epitaxy part of the first adjacent cross bar and second cross bar, and two adjacent reference columns position the side plate between the raceway groove of the epitaxy part that is plugged in two first cross bars and/or two second cross bars.
3. device support device according to claim 2; It is characterized in that what have in the said reference column is the activity orientation post, what have is the stationary positioned post; Said stationary positioned post is fixedly connected with adjacent cross bar, and said activity orientation post and adjacent cross bar flexibly connect.
4. device support device according to claim 3; It is characterized in that; Said activity orientation post moves between enable possition and off-position, when said activity orientation post moves to the enable possition, inserts or unload said side plate from said activity orientation post position.
5. device support device according to claim 1; It is characterized in that; Said first cross bar comprises two top first cross bars and two bottom first cross bars; Said second cross bar comprises two top second cross bars and two bottom second cross bars; Said montant is four, the two ends of each top first cross bar respectively with the top end face of two montants against and is connected, the two ends of each top second cross bar respectively with the side of an end of two top first cross bars against also being connected; The two ends of each bottom first cross bar respectively with the bottom face of two montants against and is connected, the two ends of each bottom second cross bar respectively with the side of an end of two bottom first cross bars against also being connected.
6. device support device according to claim 5; It is characterized in that; Said device support device also comprises two first parallel support bars and one second support bar; Each first support bar is between two bottom first cross bars, and the two ends of each first support bar are connected with an end of two bottom first cross bars respectively, and the two ends of said second support bar are connected on two first support bars.
7. device support device according to claim 6; It is characterized in that; Said device support device also comprises two the 3rd parallel support bars; Two the 3rd support bars lay respectively at the inboard of two top second cross bars, and the two ends of each the 3rd support bar are connected on the side of two top first cross bars.
8. according to the arbitrary described device support device of claim 1-7, it is characterized in that said montant, said first cross bar, said second cross bar and/or said reference column are processed by section bar.
9. device support device according to claim 8 is characterized in that, said montant and/or said reference column are processed by first kind of section bar,
The cross section of first kind of section bar is roughly square, and the height of its cross section is H1, and length is L1, and wherein L1 equals H1, all is provided with the raceway groove that runs through this side on each side of first kind of section bar.
10. device support device according to claim 9 is characterized in that, said first cross bar and said second cross bar are processed by second kind of section bar,
The cross section of second kind of section bar is roughly rectangle; The height of its cross section is H2; Length is L2, and wherein L2 is greater than H2, and each width of second kind of section bar all is provided with two raceway grooves that run through the parallel to each other of this side and keep at a certain distance away on the bigger side; All be provided with raceway groove, wherein a H2=H1 who runs through this side on each width smaller lateral of second kind of section bar.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011205538154U CN202423240U (en) | 2011-12-27 | 2011-12-27 | Assembling-type equipment support device |
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| CN2011205538154U CN202423240U (en) | 2011-12-27 | 2011-12-27 | Assembling-type equipment support device |
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| CN202423240U true CN202423240U (en) | 2012-09-05 |
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| CN2011205538154U Withdrawn - After Issue CN202423240U (en) | 2011-12-27 | 2011-12-27 | Assembling-type equipment support device |
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| Country | Link |
|---|---|
| CN (1) | CN202423240U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103187334A (en) * | 2011-12-27 | 2013-07-03 | 无锡华瑛微电子技术有限公司 | Assembled equipment support device |
| WO2015103441A1 (en) * | 2013-12-31 | 2015-07-09 | Sophia Wen | Semiconductor wafer cleaning system |
-
2011
- 2011-12-27 CN CN2011205538154U patent/CN202423240U/en not_active Withdrawn - After Issue
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103187334A (en) * | 2011-12-27 | 2013-07-03 | 无锡华瑛微电子技术有限公司 | Assembled equipment support device |
| CN103187334B (en) * | 2011-12-27 | 2015-08-19 | 无锡华瑛微电子技术有限公司 | Assembly type device support device |
| WO2015103441A1 (en) * | 2013-12-31 | 2015-07-09 | Sophia Wen | Semiconductor wafer cleaning system |
| TWI550757B (en) * | 2013-12-31 | 2016-09-21 | 無錫華瑛微電子技術有限公司 | Semiconductor wafer cleaning system |
| EP3072151A4 (en) * | 2013-12-31 | 2016-12-07 | Sophia Wen | SYSTEM FOR CLEANING SEMICONDUCTOR WAFERS |
| JP2017513207A (en) * | 2013-12-31 | 2017-05-25 | ウェン、ソフィアWEN, Sophia | Semiconductor wafer cleaning equipment |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20120905 Effective date of abandoning: 20150819 |
|
| RGAV | Abandon patent right to avoid regrant |