CN202861625U

CN202861625U - Novel thin film solar cell laser etching device

Info

Publication number: CN202861625U
Application number: CN2012204392836U
Authority: CN
Inventors: 苏菁; 董德庆; 庄春泉; 汪涛; 马海文; 敬雪碧
Original assignee: SICHUAN HANERGY PHOTOVOLTAIC CO Ltd
Current assignee: Dongjun New Energy Co ltd
Priority date: 2012-08-31
Filing date: 2012-08-31
Publication date: 2013-04-10
Anticipated expiration: 2022-08-31

Abstract

The utility model discloses a novel thin-film solar battery laser etching device, which comprises a laser, a beam expander, a focusing mirror and a beam shaping device, the beam expanding mirror is installed between the laser and the focusing mirror, and the beam shaping device is installed between the laser and the beam expander. The utility model uses an approximately flat-top laser spot to mark the film layer of the solar cell. Compared with the Gaussian spot, the use of a uniform spot can fully utilize the laser energy, facilitate the effective adjustment of the laser power, and reduce the loss of edge energy; the spot The internal energy distribution is uniform, the laser energy can be adjusted effectively and accurately, the etching effect is good, the bottom film is not damaged, the residue is small, the damage to the battery other than the film to be etched is small, the etching effect is improved, the substrate is opaque, and the engraving For thin-film batteries that are difficult to etch, uniform light spots can be used to etch from the front of the film layer, which improves the laser etching effect and is more suitable for industrial applications.

Description

A kind of novel thin film solar cell laser ablation device

Technical field

The utility model relates to a kind of solar cell laser ablation device, particularly relates to a kind of novel thin film solar cell laser ablation device.

Background technology

Laser ablation is the link in the thin film solar cell manufacture process.For obtaining large-area thin film solar battery module, usually adopt the integrated mode of operation of a plurality of element cell series connection, by three road laser ablation techniques, the different retes of difference etching battery, area battery is divided into some separate unit batteries, and formation integrated morphology is together in series element cell usually use laser ablation technique realization in the industrial production.

In present thin film solar cell laser ablation, usually adopt Gauss's hot spot to see through the glass substrate etching, the laser facula of laser instrument output is rounded, and energy is Gaussian distribution, the center high rim is low, position in that central energy is concentrated is damaged to transparent conductive film easily when etching semiconductor layer (non-crystalline silicon, cadmium telluride, CIGS etc.), affect electric current collection when serious, cause battery efficiency to descend, and etching effect is unstable, and process window is narrower, bad product occurs easily.For the thin film solar cell that uses opaque substrate (such as stainless steel), need to be from the positive etching of film, higher to the uniformity requirement of Laser beam energy distribution, the laser facula of Gaussian Energy Distribution is difficult to the effect that reaches good.

The utility model content

The purpose of this utility model is to provide a kind of can adjust the Energy distribution of laser in order to address the above problem, the energy that the centre is too high slightly outwards disperses, the energy that the edge is too disperseed slightly inwardly converges, rete is carried out uniform etching, reach and reduce the damage of centre rete, reduce the heat affected area, improve the novel thin film solar cell laser ablation device of etching effect.

The utility model is achieved through the following technical solutions:

A kind of novel thin film solar cell laser ablation device, comprise laser instrument, beam expanding lens, light-beam forming unit and focus lamp, described light-beam forming unit is installed between laser instrument and the described beam expanding lens, and described beam expanding lens is installed between light-beam forming unit and the focus lamp.

Be Gaussian distribution from laser instrument light spot energy out, central energy density is high, and edge energy density is low.Gauss's hot spot is through light-beam forming unit, and spot energy distribution is adjusted to approximate flat-top rectangle, and the process beam expanding lens is to expanding multiple and beam quality adjustment again, and focus lamp converges light beam, carries out the etching of even intensity to needing the etching position.

Further, described light-beam forming unit comprises first surface mirror, the second curved mirror and shell, it is that curved surface, another side are the lens on plane that described first surface mirror and described the second curved mirror are one side, the plane of the plane of described first surface mirror and described the second curved mirror is parallel to each other, face to face, described first surface mirror and the second curved mirror are fixed in the described shell by fixed support respectively between the curved surface of the curved surface of described first surface mirror and described the second curved mirror.

Laser enters light-beam forming unit, disperses to periphery through first surface mirror central energy, and edge energy slightly compiles to the center, the beam projecting direction is adjusted the uniform parallel rays of output energy distributions through the second curved mirror.

The beneficial effects of the utility model are:

The utility model uses the laser facula of approximate flat-top that the rete of solar cell is delineated, and compares Gauss's hot spot, and the use uniform light spots is more abundant to the laser energy utilization, is convenient to effective adjustment of laser power, reduces the loss of edge energy; The hot spot energy distribution is even, regulates effectively, accurately laser energy, and etching effect is good, does not damage bottom film, residue is few, to wanting the cell damage beyond the etched film little, improves etching effect, widens mechanical property; At the uniform light spots edge, energy falls suddenly, and the heat affecting that produces around the etch areas is reduced, and reduces the micro-short circuit situation that is caused by laser, improves battery quality and yields; Opaque for substrate, the hull cell that the etching difficulty is larger (such as the copper indium gallium selenide cell at the bottom of the stainless steel lining) uses uniform light spots from the positive etching of rete, to improve the laser ablation effect, commercial Application preferably.

Description of drawings

Fig. 1 is the structural representation of a kind of novel thin film solar cell of the utility model laser ablation device;

Fig. 2 is the structural representation of light-beam forming unit in the utility model.

Among the figure: 1-laser instrument, 2-light-beam forming unit, 3-beam expanding lens, 4-focus lamp, 201-first surface mirror, 202-the second curved mirror, 203-shell.

The specific embodiment

The utility model is described in further detail below in conjunction with drawings and the specific embodiments:

As shown in Figure 1, a kind of novel thin film solar cell of the utility model laser ablation device, comprise laser instrument 1, light-beam forming unit 2, beam expanding lens 3 and focus lamp 4, light-beam forming unit 2 is installed between laser instrument 1 and the beam expanding lens 3, and beam expanding lens 3 is installed between light-beam forming unit 2 and the focus lamp 4.

Be Gaussian distribution from laser instrument 1 light spot energy out, central energy density is high, and edge energy density is low.Gauss's hot spot is through light-beam forming unit 2, and spot energy distribution is adjusted to approximate flat-top rectangle, expands multiple and beam quality adjustment through 3 pairs of beam expanding lens again, and last 4 pairs of light beams of focus lamp converge, and carry out the etching of even intensity to needing the etching position.

As shown in Figure 2, light-beam forming unit 2 comprises first surface mirror 201, the second curved mirror 202 and shell 203, it is that curved surface, another side are the lens on plane that first surface mirror 201 and the second curved mirror 202 are one side, the plane of the plane of described first surface mirror 201 and the second curved mirror 202 is parallel to each other, face to face, first surface mirror 201 and the second curved mirror 202 are fixed in the described shell 203 by fixed support respectively between the curved surface of the curved surface of first surface mirror 201 and the second curved mirror 202.Laser enters light-beam forming unit 2, disperses to periphery through first surface mirror 201 central energies, and edge energy slightly compiles to the center, adjusts the uniform parallel rays of output energy distributions through 202 pairs of beam projecting directions of the second curved mirror.As shown in Figure 2, a is the laser facula cross section Energy distribution without shaping, and b is the laser facula cross section Energy distribution after the shaping.

Claims

1. novel thin film solar cell laser ablation device, comprise laser instrument, beam expanding lens and focus lamp, described beam expanding lens is installed between described laser instrument and the described focus lamp, it is characterized in that: also comprise light-beam forming unit, described light-beam forming unit is installed between described laser instrument and the described beam expanding lens.

2. a kind of novel thin film solar cell laser ablation device according to claim 1, it is characterized in that: described light-beam forming unit comprises the first surface mirror, the second curved mirror and shell, it is curved surface that described first surface mirror and described the second curved mirror are one side, another side is the lens on plane, the plane of the plane of described first surface mirror and described the second curved mirror is parallel to each other, face to face, described first surface mirror and the second curved mirror are fixed in the described shell by fixed support respectively between the curved surface of the curved surface of described first surface mirror and described the second curved mirror.