CN203083699U - Ultraviolet light source light equalizing device - Google Patents

Abstract

The utility model relates to the field of the ultraviolet-vacuum ultraviolet radiation measurement, in particular to an ultraviolet light source light equalizing device. The ultraviolet light source light equalizing device comprises a plurality of diffusers and a drive unit, wherein each diffuser is used for equalizing and focusing the incoming ultraviolet light of a specific wave band; and the drive unit is used for adjusting the corresponding diffuser to be located in a light path according to the test requirement. Through the embodiment, by adopting a plurality of diffusion mirrors working in the ultraviolet wave band range of 110nm to 400nm to equalize and focus the light, not only can the spectrum illuminance alignment adopting a point light source or a surface light source as the ultraviolet light source be enabled to produce a better cosine correction effect, but also the signal-to-noise ratio of the system can be guaranteed.

Description

An ultraviolet light source uniform light device

technical field

The utility model relates to the field of measurement and testing of ultraviolet-vacuum ultraviolet radiation, in particular to an ultraviolet light source uniform light device.

Background technique

With the development of my country's lunar exploration program and other space programs, the application of ultraviolet loads and equipment is becoming more and more extensive, and its role is becoming more and more important. At the same time, domestic research on dual-mode composite guidance including ultraviolet guidance is being carried out in missile technology research. In the research work carried out in these ultraviolet fields, various ultraviolet equipment and components are needed, including light sources, detectors, vacuum ultraviolet spectrometers, vacuum ultraviolet spectroradiometers for vertical ozone detection, ultraviolet imagers, ultraviolet edge imagers, etc. , These devices and their components need to be measured and calibrated to accurately grasp the characteristics of these devices and components, and at the same time complete the value transfer to provide technical support for the application of these devices and components.

In the process of UV-VUV spectrum irradiance measurement, testing and calibration, in order to ensure the accuracy of measurement, testing and calibration, the light radiation emitted by the light source must be homogenized, and the level of uniform light radiation largely determines Accuracy of measurement, testing and calibration. Therefore, light source homogenization technology is a key technology in the UV-VUV spectral irradiance measurement system.

In the ultraviolet-vacuum ultraviolet spectral irradiance measurement and testing system, the diffuser is used for light source homogenization, and its main function is to correct the difference in the spatial radiation direction of the light source, so as to accurately measure the irradiance of the light source at a certain distance. In the traditional spectral irradiance measurement, the general diffuser mainly has the form of diffuse reflection plate, integrating sphere, diffuse transmission plate and so on. For the UV-VUV band, higher requirements are placed on the diffuser. On the one hand, it is necessary to ensure the effect of cosine correction, and on the other hand, it is necessary to ensure factors such as spectral transmission range, transmittance, and signal-to-noise ratio.

The method in the prior art is to use an integrating sphere or a diffuse reflection plate, and the material is polytetrafluoroethylene. However, the reflection band range of PTFE has been strongly attenuated at 250nm, and it cannot form a comprehensive coverage of the entire UV-VUV band; if aluminum is used as the reflective material, the oxidized aluminum can only reflect to the 160nm band, and the reflection low rate.

Utility model content

In order to solve the problems of attenuation and processing band defects in the radiometric measurement of ultraviolet light in the ultraviolet-vacuum ultraviolet range in the prior art, a uniform light device for ultraviolet light sources is provided, which can cover the entire ultraviolet-vacuum ultraviolet band (110nm~ 400nm) to homogenize the light radiation emitted by the light source to meet the measurement and test requirements of spectral radiation in this band.

The embodiment of the utility model provides an ultraviolet light source uniform light device, including:

A plurality of diffusers, drive units;

Each of the diffusers is used to homogenize and focus the incident ultraviolet light of a specific wavelength band;

The drive unit is used to adjust the corresponding diffuser to be located in the light path according to the test requirements.

According to a further aspect of the ultraviolet light source homogenizing device described in the embodiment of the present invention, the plurality of diffusers continuously cover the ultraviolet-vacuum ultraviolet band of 110nm-400nm.

According to a further aspect of the ultraviolet light source homogenizing device described in the embodiment of the present invention, the plurality of diffusers include 3 diffusers, and the wavelength bands covered by the 3 diffusers are respectively 110nm ~130nm, 130nm~200nm, and 200nm~400nm.

According to another further aspect of the ultraviolet light source homogenizing device described in the embodiment of the present invention, one side of the diffuser is a plane diffusing surface, and the other side is a polished convex surface; or the plane is a polished surface , the convex surface is a diffuse surface; or both the plane and the convex surface are diffuse surfaces.

According to another further aspect of the ultraviolet light source homogenizing device described in the embodiment of the present invention, the first diffuser among the three diffusers has a working wavelength range of 110nm to 130nm, and the material is lithium fluoride crystal, the curvature radius of its convex surface is 81.56mm, the overall thickness is 4±0.1mm, the aperture is 26mm, and the focal length is 9;

The working band of the second diffuser is 130nm-200nm, the material is calcium fluoride single crystal, the curvature radius of its convex surface is 77.35mm, the overall thickness is 4±0.1mm, the aperture is 26mm, and the F number is 9;

The working band of the third diffuser is 200nm-400nm, the material is calcium fluoride single crystal, the curvature radius of its convex surface is 168.31mm, the overall thickness is 6±0.1mm, the aperture is 64mm, and the F-number is 9.

Through the embodiment of the utility model, due to the use of a plurality of diffuse mirrors working in the range of 110nm-400nm ultraviolet light for uniform light and focusing, it is ensured that the spectral irradiance calibration can be done when the point light source or surface light source is used as the ultraviolet light source. It produces a good cosine correction effect and can ensure the signal-to-noise ratio of the system.

Description of drawings

The above-mentioned features and advantages of the present invention, as well as additional features and advantages, will become clearer when reading the detailed description of the embodiments in conjunction with the following drawings.

Fig. 1 has provided the structural representation of a kind of ultraviolet light source homogenizing device according to an embodiment of the present utility model;

Fig. 2 shows the structural representation of the first diffuser of the utility model embodiment;

Fig. 3 is a schematic structural diagram of a second diffuser according to an embodiment of the present invention;

Fig. 4 is a schematic structural view of a third diffuser according to an embodiment of the present invention;

Fig. 5 shows the system structure diagram when the spectral irradiance calibration of the point light source is carried out in the embodiment of the utility model;

Fig. 6 is a system structure diagram for calibrating the spectral irradiance of a surface light source according to an embodiment of the present invention.

Detailed ways

The following description can make any person skilled in the art utilize the utility model. The descriptions provided in the specific embodiments and applications are examples only. Various extensions and combinations of the embodiments described herein will be apparent to those skilled in the art. Without departing from the spirit and scope of the present invention, the general principles defined in the present invention can be applied to other embodiments and in application. Thus, the invention is not limited to the embodiments shown, but the invention covers the widest scope consistent with the principles and features shown herein.

Fig. 1 shows a schematic structural view of an ultraviolet light source homogenizing device according to an embodiment of the present invention.

It includes a plurality of diffusers 101 and a driving unit 102 .

Each of the diffusers 101 is used to homogenize and focus the incident ultraviolet light of a specific wavelength band.

The driving unit 102 is used to adjust the corresponding diffuser 102 to be located in the light path according to the test requirements.

As an embodiment of the present invention, the plurality of diffusers 101 continuously cover the ultraviolet-vacuum ultraviolet band of 110nm-400nm, so as to meet the requirement of spectral radiometric measurement.

As an embodiment of the present invention, the plurality of diffusers 101 includes three diffusers, and the wavelength bands covered by the three diffusers are 110nm-130nm, 130nm-200nm and 200nm-400nm respectively.

As an embodiment of the present invention, one side of the diffuser is a plane diffusing surface, and the other side is a polished convex surface; or the plane is a polished surface, and the convex surface is a diffusing surface; or both the plane and the convex surface are for the diffuse surface.

As an embodiment of the present invention, the working band of the first diffuser among the three diffusers is 110nm-130nm, and the material is lithium fluoride single crystal, the radius of curvature of its convex surface is 81.56mm, and the overall thickness is 4±0.1mm, the clear aperture is 26mm, and the focal length (F) number is 9.

The working band of the second diffuser is 130nm-200nm, the material is calcium fluoride single crystal, the curvature radius of its convex surface is 77.35mm, the overall thickness is 4±0.1mm, the aperture is 26mm, and the F-number is 9.

The working band of the third diffuser is 200nm-400nm, the material is calcium fluoride single crystal, the curvature radius of its convex surface is 168.31mm, the overall thickness is 6±0.1mm, the aperture is 64mm, and the F-number is 9.

The utility model should also include different numbers of diffusers that can cover the range of ultraviolet-vacuum ultraviolet bands, such as two diffusers, four diffusers, etc., which are slightly different for different numbers of diffusers, and The arrangement of the diffusers can also have different forms. For example, a plurality of diffusers can be arranged side by side and perpendicular to the light path. For different wavelengths of ultraviolet light sources, the diffuser can be changed by moving perpendicular to the light path, but All should be understood as the protection scope of the present utility model.

The arrangement form of the diffuser 101 and the driving unit 102 of the ultraviolet light source homogenizing device as shown in Figure 1 is an embodiment, and can also be other forms, as long as it makes a plurality of diffusers covering the 110nm-400nm ultraviolet band range The devices can be located in the optical path one by one, and other arrangements are also within the protection scope of the present utility model.

Through the above-mentioned embodiment, due to the use of a plurality of diffuse mirrors working in the 110nm-400nm ultraviolet wavelength range for uniform light and focusing, it is ensured that the spectral irradiance calibration when using a point light source or a surface light source as an ultraviolet light source can produce a lot of light. Good cosine correction effect can ensure the signal-to-noise ratio of the system.

FIG. 2 is a schematic structural diagram of the first diffuser according to the embodiment of the present invention.

表示为粗糙度是0.05。The working band of the first diffuser is 110nm-130nm, and the material is lithium fluoride single crystal. There are two working surfaces, one working surface is a plane, which is processed into a diffuse transmission surface, and the glass surface on the side of the plane has fine scratches. The other working surface is a spherical surface with a radius of curvature of 81.56mm, processed into a polished surface, with an overall thickness of 4±0.1mm, a clear aperture of 26mm, and an F number of 9. in, It means that the angle of the chamfer is 45 degrees, the length of one side is 0.3, the tolerance is +0.2, R∞ means that the radius of curvature is infinite,

Expressed as roughness is 0.05.

FIG. 3 is a schematic structural diagram of the second diffuser according to the embodiment of the present invention.

The working waveband of the second diffuser is 130nm-200nm, and the material is calcium fluoride single crystal. The other working surface is a spherical surface with a radius of curvature of 77.35mm, processed into a polished surface, with an overall thickness of 4±0.1mm, a clear aperture of 26mm, and an F number of 9.

FIG. 4 is a schematic structural diagram of a third diffuser according to an embodiment of the present invention.

The working band of the third diffuser is from 200nm to 400nm, and the material is calcium fluoride single crystal. The other working surface is a spherical surface with a radius of curvature of 168.31mm, processed into a polished surface, with an overall thickness of 6±0.1mm, a clear aperture of 64mm, and an F number of 9.

As shown in FIG. 5 , it is a system structure diagram when the spectral irradiance calibration of the point light source is carried out in the embodiment of the utility model.

It includes a point light source 501, an ultraviolet light source homogenizing device 502, and a detector 503.

The point light source 501 is used to provide an ultraviolet light source, and is placed on the focal point of the diffuser of the ultraviolet light source homogenizing device 502 .

The ultraviolet light source homogenizing device 502 uses the three diffusers in the ultraviolet light source homogenizing device of the above embodiment to homogenize and focus the ultraviolet light emitted by the point light source 501, and the three diffusers are respectively responsible for Different wavelengths of ultraviolet light.

The detector 503 acquires the ultraviolet light radiation transmitted through the ultraviolet light source homogenizing device 502, and detects all the ultraviolet light radiation in the 110nm-400nm band range.

The point light source in this embodiment may also be an approximate point light source.

The design in the utility model ensures that when the spectral irradiance is calibrated, it can not only produce a good cosine correction effect, but also ensure the signal-to-noise ratio of the system. The detection device can detect uniform light radiation, and can detect the ultraviolet light source. Or detect devices for measurement, testing and calibration.

As shown in FIG. 6 , it is a system structure diagram when performing spectral irradiance calibration on a surface light source according to an embodiment of the present invention.

It includes a surface light source 601 , an ultraviolet light source uniform light device 602 , a target and collimator 603 , and a detector 604 .

The surface light source 601 is used to provide an ultraviolet light source, and is placed at a relatively long distance from the ultraviolet light source homogenizing device 602 to ensure the cosine correction effect.

The ultraviolet light source homogenizing device 602 uses the three diffusers in the ultraviolet light source homogenizing device of the above embodiment to homogenize and focus the ultraviolet light emitted by the surface light source 601, and the three diffusers are respectively responsible for responding to different band ultraviolet light.

The target and collimator 603 are used to change non-parallel light into parallel light, and can cooperate with surface light source and diffuser to provide uniform ultraviolet radiation, which can be used for measurement testing and calibration of detection devices or light sources .

The detector 604 acquires the ultraviolet light radiation transmitted through the ultraviolet light source homogenizing device 602, and detects all the ultraviolet light radiation in the 110nm-400nm band range.

Due to the strong irradiance of the surface light source, the signal-to-noise ratio of the system can be guaranteed. Cooperating with the subsequent optical-mechanical components (in this case, the target and collimator), it can provide uniform light radiation for the detection device, which can be used for detection. Devices or light sources are measured, tested and calibrated.

Through the embodiment of the utility model, on the basis of the above ultraviolet-vacuum ultraviolet diffuser, a diffused ultraviolet light source uniform light device is formed, and the form of the diffuser is flexibly selected according to the form of the light source to be calibrated. For point light sources or approximate point light sources, a new type of ultraviolet-vacuum ultraviolet plano-convex diffuser lens is used as a diffuser, and the center of the point light source is placed on the focal point of the diffuser. One side of the plano-convex diffuser is in the form of a diffuser surface The other side is a polished convex surface. This design ensures that when the spectral irradiance is calibrated, a good cosine correction effect can be produced, and the signal-to-noise ratio of the system can be guaranteed; For high-degree calibration, frosted glass can be used as one side plane of the diffuser, and the light source to be calibrated is placed at a relatively long distance to ensure the cosine correction effect. At the same time, due to the strong irradiance of the surface light source, the signal-to-noise ratio of the system can also be guaranteed.

Those skilled in the relevant art will recognize that there are many possible modifications and combinations of the embodiments of the present invention, albeit in slightly different forms, still employing the same basic mechanisms and methods. The foregoing description, for purposes of explanation, has referred to a few specific embodiments. However, the illustrative discussions above are not intended to be exhaustive or to limit the precise forms of the inventions disclosed herein. As indicated above, many modifications and variations are possible. The selected and described embodiments are used to explain the principle of the utility model and its practical application, so as to enable those skilled in the art to make the best use of the utility model and the modifications and variations for specific applications of each embodiment.

Claims (5)

1. An ultraviolet light source light equalizing device, comprising:

a plurality of diffusers, a driving unit;

each diffuser is used for homogenizing and focusing incident ultraviolet light with a specific waveband;

the driving unit is used for adjusting the corresponding diffuser to be positioned in the light path according to the test requirement.

2. The uv light source equalizing device of claim 1, wherein said plurality of diffusers continuously cover the uv-vacuum uv range from 110nm to 400 nm.

3. The uv light source equalizing device of claim 2, wherein said plurality of diffusers comprises 3 diffusers, and said 3 diffusers cover wavelength bands of 110nm to 130nm, 130nm to 200nm, and 200nm to 400nm, respectively.

4. The uv light source homogenizing device of claim 3, wherein the diffuser is a planar diffusing surface and a polished convex surface; or the plane is a polished surface and the convex surface is a diffusion surface; or both the flat and convex surfaces may be diffusing surfaces.

5. The ultraviolet light source light equalizing device according to claim 3, wherein a first diffuser of the 3 diffusers has an operating band of 110nm to 130nm, is made of a lithium fluoride single crystal, has a convex surface with a radius of curvature of 81.56mm, an overall thickness of 4 ± 0.1mm, a light passing aperture of 26mm, and a focal length of 9;

the working waveband of the second diffuser is 130 nm-200 nm, the material is calcium fluoride monocrystal, the curvature radius of a convex surface of the second diffuser is 77.35mm, the overall thickness is 4 +/-0.1 mm, the light-transmitting aperture is 26mm, and the F number is 9;

the working waveband of the third diffuser is 200 nm-400nm, the third diffuser is made of calcium fluoride single crystal, the curvature radius of a convex surface of the third diffuser is 168.31mm, the overall thickness of the third diffuser is 6 +/-0.1 mm, the light-transmitting aperture of the third diffuser is 64mm, and the F number of the third diffuser is 9.

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