CN216543227U

CN216543227U - Wafer transfer device

Info

Publication number: CN216543227U
Application number: CN202123284451.7U
Authority: CN
Inventors: 傅郁晓; 孙玉男; 孙鹏彪
Original assignee: Shanghai Weice Semiconductor Technology Co ltd
Current assignee: Shanghai Weice Semiconductor Technology Co ltd
Priority date: 2021-12-24
Filing date: 2021-12-24
Publication date: 2022-05-17
Anticipated expiration: 2031-12-24

Abstract

The utility model discloses a wafer transfer device which comprises a base, wherein a plurality of groups of moving wheels are symmetrically arranged on the base, a mounting plate is arranged on the base, an operating platform is arranged on the mounting plate, the operating platform comprises at least two placing frames, and the inner walls of the placing frames are in a slope shape. The wafer boat placing frame can be used for placing more wafer boats, improves the transferring efficiency, and is convenient for detecting the wafers in the placing frame.

Description

Wafer transfer device

Technical Field

The utility model relates to the field of semiconductor manufacturing, in particular to a wafer transfer device.

Background

Semiconductor manufacturing, which is a process used to manufacture semiconductor devices, is typically a metal-oxide-semiconductor (MOS) device used in Integrated Circuit (IC) chips used in everyday electrical and electronic equipment. It is a multi-step sequence of lithographic and chemical processing steps (e.g., surface passivation, thermal oxidation, planar diffusion and junction isolation) during which electronic circuit semiconductor material is gradually formed on a wafer made of pure silicon. The current method of operation is on a single-side ramp car.

But current shipment device transports inefficiency, leads to the transfer device not enough, and the measurement personnel can cause wafer boat draw-in groove unusual easily at the operation on the inspection table, leads to the wafer broken piece to have certain defect.

SUMMERY OF THE UTILITY MODEL

The utility model aims to provide a wafer transfer device to improve the transfer efficiency of a loading and transporting device.

In order to solve the technical problem, the utility model provides a wafer transfer device which comprises a base, wherein a plurality of groups of moving wheels are symmetrically arranged on the base, an installation plate is arranged on the base, an operation table is arranged on the installation plate and comprises at least two placing frames, and the inner walls of the placing frames are in a slope shape.

Further, a plurality of limiting grooves are formed in the placing frame.

Further, place frame outside edge and all be provided with the reservation platform.

Furthermore, the inner wall of the placing frame forms a certain included angle with the horizontal direction, and the included angle ranges from 30 degrees to 45 degrees.

Further, the mounting panel outer wall pass through elevating system with base outer wall connection, elevating system includes first lifing arm and second lifing arm, first lifing arm both ends respectively with the mounting panel outer wall and base outer wall rotates the connection, second lifing arm one end is rotated and is connected with the slider, just the slider passes through installation pole slidable mounting and is in on the mounting panel outer wall, the second lifing arm other end rotates and is connected with the movable block, the inside slidable mounting of movable block has spacing slide bar, just spacing slide bar passes through the mount pad to be installed on the base, the inside threaded connection that returns of movable block has accommodate the lead screw, accommodate the lead screw rotate to be installed on the base, the accommodate the lead screw tip is provided with the adjustment handle.

Furthermore, a positioning assembly is arranged on the outer side of the movable block, and the movable block is locked at the position under the action of the positioning assembly.

Further, the locating component is including setting up the location rack in the movable block outside, the location rack with the meshing is connected between the movable block, be provided with a plurality of movable rods on the location rack outer wall, the movable rod outer wall all through fixed plate movable mounting on the base, all overlap on the movable rod outer wall and be equipped with compression spring.

Furthermore, be provided with the flexible loop bar of multiunit on the mounting panel, flexible loop bar is kept away from mounting panel one end is all installed on the base outer wall.

Compared with the prior art, the utility model at least has the following beneficial effects: the arrangement of the at least two placing frames can place more wafer boats, the transfer efficiency is improved, and the inner walls of the placing frames are in a slope shape, so that the detection operation in the placing frames is facilitated; and the mounting plate can realize height adjustment through the lifting mechanism, so that an operator can conveniently check and test the wafer boat.

Drawings

FIG. 1 is a schematic overall structure diagram of an embodiment of the present invention;

FIG. 2 is a side view of an outer structure in one embodiment of the utility model;

FIG. 3 is a top view of an external structure of a positioning assembly in accordance with an embodiment of the present invention.

Detailed Description

The wafer transfer device of the present invention will now be described in more detail with reference to the schematic drawings, in which preferred embodiments of the utility model are shown, it being understood that a person skilled in the art may modify the utility model described herein while still achieving the advantageous effects of the utility model. Accordingly, the following description should be construed as broadly as possible to those skilled in the art and not as limiting the utility model.

The utility model is described in more detail in the following paragraphs by way of example with reference to the accompanying drawings. Advantages and features of the present invention will become apparent from the following description and from the claims. It is to be noted that the drawings are in a very simplified form and are not to precise scale, which is merely for the purpose of facilitating and distinctly claiming the embodiments of the present invention.

As shown in fig. 1, an embodiment of the present invention provides a wafer transferring apparatus, which includes a base 1, wherein a plurality of sets of moving wheels 13 are symmetrically disposed on the base 1, an installation plate 11 is disposed on the base 1, an operation table 2 is mounted on the installation plate 11, the operation table 2 includes at least two placing frames 21, and inner walls of the placing frames 21 are made into a slope shape. At least two placing frames 21 are arranged on the operating platform 2, more wafer boats can be placed, the transferring efficiency is improved, the inner walls of the placing frames 21 are in a slope shape, and the detecting operation in the placing frames 21 is facilitated.

The following is a list of preferred embodiments of the wafer transfer device to clearly illustrate the contents of the present invention, and it should be understood that the contents of the present invention are not limited to the following embodiments, and other modifications by conventional means of ordinary skill in the art are also within the scope of the idea of the present invention.

The placing frame 21 is internally provided with a plurality of limiting grooves 211. In this embodiment, the limiting grooves 211 are disposed to facilitate the wafer boat placement and prevent the wafer boats from colliding with each other.

The outer edges of the placing frames 21 are provided with reserved platforms 22. In the embodiment, the reserved platforms 22 are disposed at the outer edges of the placing frame 21, so as to facilitate the closing of the boat cover of the wafer boat.

The inner wall of the placing frame 21 forms a certain included angle with the horizontal direction, and the included angle ranges from 30 degrees to 45 degrees. In the embodiment, the included angle between the inner wall of the placing frame 21 and the horizontal direction is set to be 30-45 degrees, so that the wafer boat is prevented from being damaged due to abnormal clamping groove caused by the fact that the box cover of the wafer boat is not convenient to close due to the overlarge included angle.

Referring to fig. 2, the outer wall of the mounting plate 11 is connected to the outer wall of the base 1 via a lifting mechanism 3, the lifting mechanism 3 comprises a first lifting arm 31 and a second lifting arm 32, two ends of the first lifting arm 31 are respectively connected with the outer wall of the mounting plate 11 and the outer wall of the base 1 in a rotating way, one end of the second lifting arm 32 is connected with a sliding block 33 in a rotating way, and the sliding block 33 is slidably mounted on the outer wall of the mounting plate 11 by a mounting rod 331, the other end of the second lifting arm 32 is rotatably connected with a movable block 34, a limit slide rod 35 is slidably mounted in the movable block 34, the limiting slide rod 35 is mounted on the base 1 through a mounting seat 36, an adjusting screw rod 37 is further connected inside the movable block 34 through a thread, the adjusting screw rod 37 is rotatably installed on the base 1, and an adjusting handle 38 is arranged at the end of the adjusting screw rod 37. In this embodiment, the adjusting screw 37 is rotated by the adjusting handle 38, and the movable block 34 drives the second lifting arm 32 to displace by using the screw principle, so that the included angle between the second lifting arm 32 and the horizontal direction changes, thereby adjusting the height of the mounting plate 11.

Referring to fig. 3, a positioning assembly 4 is disposed outside the movable block 34, and the movable block 34 is locked in position by the positioning assembly 4. In the present embodiment, the positioning unit 4 is provided to lock the position of the movable block 34, and after the height adjustment of the mounting plate 11 is performed, the position of the mounting plate 11 is locked.

Locating component 4 is including setting up the location rack 41 in the movable block 34 outside, location rack 41 with the meshing is connected between the movable block 34, be provided with a plurality of movable rods 42 on the 41 outer wall of location rack, the movable rod 42 outer wall all through fixed plate 43 movable mounting on the base 1, it is equipped with compression spring 44 all to overlap on the movable rod 42 outer wall. In the present embodiment, the positioning rack 41 is engaged with the movable block 34 under the action of the compression spring 44, so as to lock the position of the movable block 34 and prevent the height of the mounting plate 11 from changing.

Be provided with the flexible loop bar 12 of multiunit on the mounting panel 11, flexible loop bar 12 is kept away from 11 one end of mounting panel is all installed on the 1 outer wall of base. In this embodiment, the telescopic rods 12 are provided to achieve the function of balance support, and have a limiting function to prevent the mounting plate 11 from deviating.

In summary, the arrangement of the at least two placing frames 21 can place more wafer boats, so as to improve the transferring efficiency, and the inner walls of the placing frames 21 are made into slope shapes, so as to facilitate the detection operation in the placing frames 21; and the mounting plate 11 can realize height adjustment through the lifting mechanism 3, so that an operator can conveniently check and test the wafer boat.

It will be apparent to those skilled in the art that various changes and modifications may be made in the present invention without departing from the spirit and scope of the utility model. Thus, if such modifications and variations of the present invention fall within the scope of the claims of the present invention and their equivalents, the present invention is also intended to include such modifications and variations.

Claims

1. The utility model provides a wafer transfer device, its characterized in that, includes the base, the symmetry is provided with the multiunit on the base and removes the wheel, be provided with the mounting panel on the base, install the operation panel on the mounting panel, the operation panel includes that at least two place the frame, it establishes to slope form to place the frame inner wall.

2. The wafer transfer device of claim 1, wherein a plurality of retaining grooves are disposed within the placement frame.

3. The wafer transfer device of claim 1, wherein a reserved platform is disposed at an outer edge of the placement frame.

4. The wafer transfer device of claim 1, wherein the inner wall of the placement frame is at an angle with respect to horizontal, the angle being in the range of 30 ° to 45 °.

5. The wafer transfer device of claim 1, wherein the mounting plate outer wall is connected with the base outer wall through an elevating mechanism, the elevating mechanism comprises a first elevating arm and a second elevating arm, two ends of the first elevating arm are respectively connected with the mounting plate outer wall and the base outer wall in a rotating manner, one end of the second elevating arm is connected with a sliding block in a rotating manner, the sliding block is slidably mounted on the mounting plate outer wall through a mounting rod, the other end of the second elevating arm is connected with a movable block in a rotating manner, a limit sliding rod is slidably mounted inside the movable block, the limit sliding rod is mounted on the base through a mounting seat, an adjusting screw rod is further connected inside the movable block in a threaded manner, the adjusting screw rod is rotatably mounted on the base, and an adjusting handle is arranged at the end of the adjusting screw rod.

6. The wafer transfer device of claim 5, wherein a positioning assembly is disposed outside the movable block, and the movable block is locked in position by the positioning assembly.

7. The wafer transfer device according to claim 6, wherein the positioning assembly comprises a positioning rack arranged outside the movable block, the positioning rack is engaged with the movable block, a plurality of movable rods are arranged on the outer wall of the positioning rack, the outer walls of the movable rods are movably mounted on the base through fixed plates, and compression springs are sleeved on the outer walls of the movable rods.

8. The wafer transfer device of claim 1, wherein a plurality of sets of telescopic rods are disposed on the mounting plate, and the ends of the telescopic rods, which are far away from the mounting plate, are mounted on the outer wall of the base.