CN218890898U

CN218890898U - Rolling brush assembly for cleaning wafer

Info

Publication number: CN218890898U
Application number: CN202223508089.1U
Authority: CN
Inventors: 曹自立; 李长坤
Original assignee: Huahaiqingke Co Ltd
Current assignee: Huahaiqingke Co Ltd
Priority date: 2022-12-28
Filing date: 2022-12-28
Publication date: 2023-04-21
Anticipated expiration: 2032-12-28

Abstract

The utility model provides a rolling brush assembly for cleaning a wafer, which comprises the following components: the surface of the roller is provided with a plurality of water delivery holes; a first fixing member disposed at one end of the roller and having a through hole communicating with the roller; the second fixing piece is arranged at the other end of the roller and used for enabling the roller to rotate under the action of an external driving device; the roller is internally provided with an inner core, and the outer surface of the inner core is provided with a corrugated structure which comprises a plurality of convex parts and a plurality of concave parts which are alternately arranged; the top surface of the convex part is provided with a plurality of uniform flow holes. Because the outer surface of the inner core is provided with the corrugated structure, the low valley of gravitational potential energy is formed on the outer surface of the inner core, and the cleaning liquid sprayed out of the uniform flow holes at each axial liquid outlet position can be respectively limited to drop at the bottom of each convex part, so that the number of actual liquid drop points is ensured to be consistent with the number of designed axial liquid outlet positions, and the liquid drop flow of each liquid drop point is uniform.

Description

Rolling brush assembly for cleaning wafer

Technical Field

The utility model belongs to the technical field of wafer production, and particularly relates to a rolling brush assembly for cleaning a wafer.

Background

The integrated circuit industry is the core of the information technology industry and plays a key role in the process of converting and upgrading the boosting manufacturing industry into digital and intelligent conversion. The chip is a carrier of an integrated circuit, and the chip manufacturing involves the technological processes of chip design, wafer manufacturing, wafer processing, electrical measurement, dicing packaging, testing, and the like. Wherein, the chemical mechanical polishing belongs to the wafer manufacturing procedure, and the chemical mechanical polishing is an ultra-precise surface processing technology of global planarization.

After chemical mechanical polishing, the wafer needs to be subjected to post-treatments such as cleaning, drying and the like. The purpose of wafer cleaning is to avoid pollution of trace ions and metal particles to semiconductor devices and ensure the performance and qualification rate of the semiconductor devices.

Wafer cleaning methods generally include: rolling brush cleaning, megasonic cleaning and the like, wherein the rolling brush cleaning has wider application. For a conventional rolling brush, when the required flow rate of the cleaning liquid is large, liquid flow is sprayed out of the spray holes in a liquid column mode, so that the dispersion is good; when a smaller liquid amount is used, the liquid flows out in a form of adhering to the outer wall of the pipe and is spread in an axial direction in a form of dripping, and the state has the problem of even liquid distribution failure.

Disclosure of Invention

The present utility model aims to solve at least one of the technical problems in the related art to some extent. Therefore, the utility model provides a rolling brush assembly for cleaning a wafer.

An embodiment of the present utility model provides a rolling brush assembly for wafer cleaning, including:

the surface of the roller is provided with a plurality of water delivery holes;

a first fixing member disposed at one end of the roller and having a through hole communicating with the roller;

the second fixing piece is arranged at the other end of the roller and used for enabling the roller to rotate under the action of an external driving device;

an inner core is also arranged in the roller, the inner core is of a corrugated structure, and a plurality of alternating convex parts and a plurality of concave parts are formed on the outer surface of the inner core;

the top surface of the convex part is provided with a plurality of uniform flow holes.

In some embodiments, the axial cross-section of the boss is trapezoidal with a planar top surface.

In some embodiments, the spacing of the centers of two adjacent protrusions is 3 to 50mm.

In some embodiments, the difference in height between the convex portion and the concave portion is 0.5 to 10mm.

In some embodiments, at least a portion of the top surface of the protrusion is provided with one of the flow homogenizing holes, and positions of two adjacent flow homogenizing holes in the axial direction are staggered spirally along the circumference of the inner core.

In some embodiments, at least a portion of the top surface of the boss is circumferentially configured with at least one of the flow homogenizing holes, at least a portion of the flow homogenizing holes being collinear and parallel to the axis of the inner core.

In some embodiments, the angle between two adjacent uniform flow holes and the axis of the inner core is 60 ° to 120 °.

In some embodiments, the inner core is made of a hydrophilic material.

In some embodiments, an annular gap is left between the outer wall of the inner core and the inner wall of the roller.

In some embodiments, two ends of the inner core are respectively provided with an assembling part and a fixing part, and the assembling part is matched and butted with the first fixing piece; one end of the fixing part is provided with a fixing piece, and the inner core is fixed in the roller through the fixing piece.

Compared with the prior art, the utility model has the beneficial effects that:

the utility model designs a uniform flow structure which is matched with the existing roller for use, and solves the problem that the cleaning liquid uniformly distributed in the horizontally placed rolling brush assembly is invalid when the consumption of the cleaning liquid is low. The utility model is provided with the inner core with the corrugated structure in the conventional roller, and each axial liquid outlet position of the inner core corresponds to the convex part of the corrugated structure, namely, the cleaning liquid is sprayed out from the convex part position of the outer surface of the inner core. Because the outer surface of the inner core is provided with the corrugated structure, the low valley of gravitational potential energy is formed on the outer surface of the inner core, and the cleaning liquid sprayed out of the uniform flow holes at each axial liquid outlet position can be respectively limited to drop at the bottom of each convex part, so that the cleaning liquid is prevented from flowing, adhering and merging randomly along the outer surface of the inner core in the rotating process of the inner core, the number of actual liquid drop points is ensured to be consistent with the number of designed axial liquid outlet positions, the liquid drop flow of each liquid drop point is uniform, and the axial liquid distribution uniformity can be effectively ensured at low flow. In addition, the inner core structure provided by the embodiment has low requirement on the levelness of the inner core, and even if the fixing direction is slightly inclined, the axial uniform liquid distribution of the inner core is not affected.

Drawings

The advantages of the present utility model will become more apparent and more readily appreciated from the detailed description given in conjunction with the following drawings, which are meant to be illustrative only and not limiting of the scope of the utility model, wherein:

FIG. 1 is a schematic view of a conventional roll brush assembly;

FIG. 2 is a diagram showing the state of the discharge of a prior art core;

FIG. 3 is a schematic structural view of an inner core according to an embodiment of the present utility model;

FIG. 4 is an enlarged view of a portion of the core of FIG. 3, provided in accordance with one embodiment of the present utility model;

FIG. 5 is a cross-sectional view of the core of FIG. 3 provided by one embodiment of the present utility model;

FIG. 6 is a view of the core of FIG. 3 in a liquid out state, according to one embodiment of the present utility model;

FIG. 7 is a schematic view of another core provided in accordance with one embodiment of the present utility model;

FIG. 8 is an enlarged view of a portion of the core of FIG. 7, provided in accordance with one embodiment of the present utility model;

FIG. 9 is a schematic structural view of yet another core provided in accordance with one embodiment of the present utility model;

FIG. 10 is an enlarged view of a portion of the core of FIG. 9, provided in accordance with one embodiment of the present utility model;

FIG. 11 is a cross-sectional view of the core of FIG. 9 provided by one embodiment of the present utility model;

fig. 12 is a structural perspective view of an inner core provided in one embodiment of the present utility model.

Detailed Description

The following describes the technical scheme of the present utility model in detail with reference to specific embodiments and drawings thereof. The examples described herein are specific embodiments of the present utility model for illustrating the concept of the present utility model; the description is intended to be illustrative and exemplary in nature and should not be construed as limiting the scope of the utility model in its aspects. In addition to the embodiments described herein, those skilled in the art can adopt other obvious solutions based on the disclosure of the claims of the present application and the specification thereof, including those adopting any obvious substitutions and modifications to the embodiments described herein.

The drawings in the present specification are schematic views, which assist in explaining the concept of the present utility model, and schematically show the shapes of the respective parts and their interrelationships. It should be understood that for the purpose of clearly showing the structure of various parts of embodiments of the present utility model, the drawings are not drawn to the same scale and like reference numerals are used to designate like parts in the drawings. The technical scheme of the utility model is further described by the following specific embodiments.

In the present utility model, "chemical mechanical polishing (Chemical Mechanical Polishing, CMP)" is also referred to as "chemical mechanical planarization (Chemical Mechanical Planarization, CMP)", and Wafer (W) is also referred to as Substrate (Substrate), the meaning and actual function are equivalent.

Fig. 1 is a conventional rolling brush assembly, which comprises a roller 100 and a sponge 500 coated on the surface of the roller 100, wherein a plurality of infusion holes 110 are formed in the surface of the roller 100, a first fixing piece 600 and a second fixing piece 700 are respectively arranged at two ends of the roller 100, through holes communicated with the inner cavity of the roller 100 are formed in the first fixing piece 600 along the axial direction, and cleaning liquid is injected from the through holes of the first fixing piece 600 and permeates into the sponge 500 through the infusion holes 110. In order to improve the uniform flow and uniform distribution effect of the cleaning solution in the inner cavity of the roller 100, so that the outer periphery of the sponge 500 uniformly discharges, an inner core 200 can be inserted into the roller 100 along the axial direction, an annular cavity is formed between the outer wall of the inner core 200 and the inner wall of the roller 100, the surface of the inner core 200 is provided with a uniform flow hole 210, the cleaning solution firstly enters the inner core 200, the first uniform flow and uniform distribution is carried out along with the rotation of the inner core 200, the cleaning solution is discharged from the uniform flow hole 210 and then enters the annular cavity, the second uniform flow and uniform distribution is carried out along with the rotation of the roller 100, and finally the cleaning solution is permeated into the sponge 500 through the infusion hole 110 of the roller 100.

When the inner core 200 with the equal-diameter tubular structure is adopted to uniformly distribute the wafer W, when a large flow of cleaning liquid is introduced, the cleaning liquid is sprayed out of the uniform flow holes 210 of the inner core 200 in a liquid column mode, so that the uniform flow distribution type wafer W has good dispersibility; however, when a small flow of the cleaning liquid is introduced, the cleaning liquid adheres to the outer wall of the inner core 200 after being ejected from the uniform flow holes 210 of the inner core 200, and droplets are collected on the outer wall of the inner core 200 and spread in the axial direction in the form of droplets (as shown in fig. 2). Therefore, in the ejection state of a small flow rate, there is a problem that the following uniform liquid distribution fails:

(1) The cleaning solution flowing out of the plurality of adjacent uniform flow holes 210 is adhered, combined and aggregated on the outer wall of the inner core 200, and drops from a certain position on the outer wall of the inner core 200 under the action of gravity after being aggregated into a stream of large liquid drops, so that the number of drop points of the cleaning solution is far smaller than the number of distribution of the uniform flow holes 210 in the axial direction, and the spreading effect of the cleaning solution is seriously reduced;

(2) The dripping positions of the cleaning liquid strands on the outer wall of the inner core 200 are random and uncontrollable, and are not dripping with equal intervals and equal flow, so that the uniform liquid distribution of the cleaning liquid is further hindered;

(3) The requirement on the levelness of the fixing of the inner core 200 is high, and the fixing direction is slightly deviated from the level, so that the cleaning solution drops can slide to the inclined side, and the distribution state of the drops at the outer wall of the inner core 200 is affected.

Once the cleaning fluid is not uniformly distributed at the outer wall of the inner core 200, the uniform distribution of the cleaning fluid in the drum 100 is further affected, and finally the sponge 500 cannot uniformly discharge.

At least to solve the above technical problems, this embodiment provides a rolling brush assembly for cleaning a wafer, including:

the roller 100 and the sponge 500 coated on the surface of the roller 100 are provided with a plurality of water delivery holes on the surface;

a first fixing member 600 disposed at one end of the drum 100 and having a through hole communicating with the drum 100;

a second fixing member 700 disposed at the other end of the drum 100 for rotating the drum 100 under the action of an external driving device;

the roll 100 is further provided with an inner core 200 therein, and the outer surface of the inner core 200 is formed with a corrugated structure including a plurality of protrusions 220 and a plurality of recesses 230 alternately;

the top surface of the protrusion 220 is provided with a plurality of uniform flow holes 210.

The utility model designs a uniform flow structure based on an inner core, which is matched with the existing roller 100 to be used, and solves the problem that the cleaning liquid uniformly distributed is invalid when the consumption of the cleaning liquid is low when the rolling brush assembly is horizontally placed. The present utility model provides the inner core 200 of the corrugated structure in the conventional roll 100, and each axial liquid outlet position of the inner core 200 corresponds to the convex part 220 of the corrugated structure, that is, the cleaning liquid is sprayed out from the convex part 220 of the outer surface of the inner core 200. Because the outer surface of the inner core 200 has a corrugated structure, low valleys of gravitational potential energy are formed on the outer surface of the inner core 200, and the cleaning liquid sprayed out of the uniform flow holes 210 at each axial liquid outlet position is limited to drop down at the bottom of each convex part 220 (as shown in fig. 6), so that the cleaning liquid is prevented from flowing, adhering, combining and gathering along the outer surface of the inner core 200 at will in the rotating process of the inner core 200, the number of actual liquid drop points is ensured to be consistent with the designed number of axial liquid outlet positions, the liquid drop flow of each liquid drop point is uniform, and the axial liquid distribution uniformity can be effectively ensured at low flow. In addition, the requirement on the levelness of the inner core 200 is not high by adopting the inner core 200 structure provided by the embodiment, and even if the fixing direction is slightly inclined, the axial uniform liquid distribution of the inner core 200 is not affected.

In this embodiment, the inner core 200 is coaxially disposed with the roller 100, the cleaning solution is injected into the inner core 200 through the liquid inlet in the first fixing member 600, and along with the synchronous rotation of the inner core 200 and the roller 100, the cleaning solution is uniformly distributed in the inner core 200 for the first time, the cleaning solution is thrown into the roller 100 through the uniform flow holes 210 of the inner core 200 under the action of centrifugal force, the cleaning solution is uniformly distributed in the second time through the rotation of the roller 100, and the cleaning solution is uniformly distributed to the infusion holes at all positions of the roller 100 in axial direction and is thrown out to the sponge 500 through the infusion holes under the action of centrifugal force. The inner core 200 is additionally arranged to effectively adjust the flow velocity distribution of the cleaning liquid in the roller 100, so that the cleaning liquid can be uniformly discharged along the axial direction of the roller 100, and the phenomenon of drift of a dry pipe is avoided.

Alternatively, the inner core 200 may be combined with the roll 100 to form an integral structure, i.e., a double-layered sleeve structure composed of the inner core 200 and the roll 100 nested with each other, the inner core 200 performs an axial uniform flow function, and the outer layer roll 100 distributes the uniform flow cleaning liquid into the circumferential sponge 500.

It should be noted that, the inner core 200 provided in this embodiment has a corrugated structure on only the outer surface thereof, and has an equal diameter structure on the inner surface thereof.

In the embodiment shown in fig. 4, the axial cross section of the protrusion 220 is trapezoidal, and the top surface thereof is planar. The distance between the centers of two adjacent convex portions 220 is 3 to 50mm, and the height difference between the convex portions 220 and the concave portions 230 is 0.5 to 10mm.

In the embodiment shown in fig. 3 and fig. 4, at least a part of the top surfaces of the protrusions 220 are configured with one uniform flow hole 210, and the positions of two adjacent uniform flow holes 210 in the axial direction are staggered spirally along the circumference of the inner core 200; in the second embodiment, as shown in fig. 7, 8, 9 and 10, at least a part of the top surface of the protrusion 220 is circumferentially provided with at least one uniform flow hole 210, and at least a part of the uniform flow holes 210 are collinear and parallel to the axis of the core 200.

Specifically, in the first distribution manner of the uniform flow holes 210, each uniform flow hole 210 is spirally distributed, at least a part of the top surface of the convex part 220 is provided with one uniform flow hole 210, and the uniform flow holes are spirally pushed to be staggered one by one clockwise or anticlockwise along the axial direction, so that the connection line of each uniform flow hole 210 forms a spiral line around the outer wall of the inner core 200; the angle between the uniform flow holes 210 on the adjacent two protrusions 220 and the axial center of the core 200 is 60 ° to 120 °, preferably 90 °.

As shown in fig. 4, the included angle between the uniform flow holes 210 on two adjacent convex parts 220 and the axis of the inner core 200 is 90 °, and each adjacent four uniform flow holes 210 form a group to form a spiral periodic arrangement; taking the view angle shown in fig. 5 as an example, in fig. 5, a first protrusion 221, a second protrusion 222, a third protrusion 223 and a fourth protrusion 224 are sequentially formed from left to right, and the top surfaces of the first protrusion 221, the second protrusion 212, the third protrusion 213 and the fourth protrusion 214 are respectively formed, wherein the first protrusion 221 is located right in front of the first protrusion 221 in the view angle of fig. 5, and the included angle of the projection of the connecting line of the first protrusion 211 and the second protrusion 212 with the axis of the core 200 in the vertical plane is 90 °, that is, the second protrusion 222 is located right above the second protrusion 222 in the view angle of fig. 5; the included angle of the projection of the connecting line of the second uniform flow holes 212 and the third uniform flow holes 213 and the axis of the inner core 200 in the vertical plane is 90 degrees, that is, the third uniform flow holes 213 are positioned right behind the third convex parts 223 in the view of fig. 5; the included angle of the projection of the connecting line of the third and fourth uniform flow holes 213 and 214 and the axis of the core 200 in the vertical plane is 90 °, that is, the fourth uniform flow hole 214 is located right below the fourth convex portion 224 in the view of fig. 5. The uniform flow holes 210 on the next convex part 220 adjacent to the fourth convex part 224 are positioned at the same positions as the first uniform flow holes 211 and are circulated again according to the arrangement rules of the first uniform flow holes 211, the second uniform flow holes 212, the third uniform flow holes 213 and the fourth uniform flow holes 214, thereby forming a periodic spiral arrangement.

It will be appreciated that for a 90 ° included angle of the uniform flow holes 210, four adjacent uniform flow holes 210 form a set of circulation periods, and so on, for a 60 ° included angle of the uniform flow holes 210, 6 adjacent uniform flow holes 210 form a set of circulation periods; for a 120 ° included angle of the swirl holes 210, then 3 adjacent swirl holes 210 form a set of circulation cycles. As the angle varies, the specific arrangement position of the uniform flow holes 210 on the corresponding convex portions 220 also varies adaptively. Of course, in consideration of the processing difficulty and the uniform flow effect, it is preferable to open the uniform flow hole 210 by using a 90 ° angle.

Further extension can be made on this basis, that is, at least a part of the top surface of the convex portion 220 is provided with a plurality of uniform flow holes 210 along the circumferential direction, and the uniform flow holes are staggered one by one along the axial direction of the inner core 200 to form double-spiral or multi-spiral arrangement.

In the second distribution manner of the uniform flow holes 210, each uniform flow hole 210 is linearly distributed, at least one uniform flow hole 210 is uniformly formed on the top surface of at least part of the convex portion 220 along the circumferential direction, and the included angle between two adjacent uniform flow holes 210 on the same convex portion 220 is 60 ° to 120 °. The corresponding positions of the adjacent convex parts 220 are provided with a plurality of uniform flow holes 210 with the same quantity, and the plurality of uniform flow holes 210 corresponding to the positions of the adjacent convex parts 220 are positioned on the same straight line and are parallel to the axis of the inner core 200. For example, the embodiment shown in fig. 7 and 8 provides that the top surface of the protrusion 220 is provided with one uniform flow hole 210, and the pair Ji Gongxian of uniform flow holes 210 on each protrusion 220; the top surface of the protrusion 220 provided in the embodiment shown in fig. 9 and fig. 10 is provided with 4 uniform flow holes 210 along the circumferential direction, the included angle between two adjacent uniform flow holes 210 is 90 °, and the uniform flow holes 210 on each protrusion 220 are correspondingly aligned in rows to form four rows of uniform flow holes 210 around the periphery of the inner core 200.

It can be understood that, in the linear perforation mode, the included angle between the uniform flow holes 210 is related to the number of uniform flow holes 210 on the same protrusion 220, so that in order to ensure that the liquid can be uniformly sprayed in all directions around the inner core 200, the uniform flow holes 210 on the same protrusion 220 are required to be equidistantly distributed, and therefore, when 3 uniform flow holes 210 are formed on the same protrusion 220, the included angle between two adjacent uniform flow holes 210 is 120 °; when 4 uniform flow holes 210 are formed on the same protrusion 220, the included angle between two adjacent uniform flow holes 210 is 90 °; when 6 uniform flow holes 210 are formed on the same protrusion 220, the included angle between two adjacent uniform flow holes 210 is 60 °. Preferably, as shown in fig. 11, four uniform flow holes 210 are uniformly formed on the top surface of each protrusion 220 along the circumferential direction, and the circumferential liquid is discharged in four rows along the axial direction of the inner core 200, so that the cleaning liquid is sprayed out from four directions around the inner core 200.

In this embodiment, an annular gap is left between the outer wall of the inner core 200 and the inner wall of the roll 100. After the cleaning solution is injected from the end of the inner core 200, the cleaning solution rotates along with the inner core 200 to perform first uniform flow distribution, and is thrown out into an annular cavity between the inner core 200 and the roller 100 through the uniform flow holes 210, and the cleaning solution rotates along with the roller 100 in the annular cavity to realize second uniform flow distribution. Alternatively, the width of the annular gap between the inner core 200 and the roll 100 is 1 to 1.5 times the inner diameter of the inner core 200.

In the embodiment shown in fig. 12, the two ends of the inner core 200 are respectively provided with the fitting portion 300 and the fixing portion 400, and the fitting portion 300 is matched and butted with the first fixing member 600; one end of the fixing part 400 is provided with a fixing member, through which the inner core 200 is fixed in the drum 100.

In this embodiment, the assembly part 300 is mainly used for assembling and fixing with the end of the roller 100, and the assembly part 300 is in butt joint with the first fixing member 600 to realize the conduction of the cleaning fluid flow channel. The fixing part 400 is fixed inside the drum 100 in cooperation with the fixing member, thereby supporting and positioning the core 200. The inner core 200 mainly plays a uniform flow distribution role, the cleaning solution entering the inner core 200 is uniformly dispersed in the roller 100 along the axial direction, and then the cleaning solution is supplied to the sponge 500 portion through the liquid outlet holes on the side surface of the roller 100, so that the sponge 500 uniformly discharges along the axial direction of the rolling brush assembly, a continuous and complete liquid film is formed on the surface of the sponge 500, and the contaminants adhered on the rolling brush assembly are prevented from being re-adhered to the surface of the wafer W.

In particular, the structure of the fixing member is not particularly limited and the fixing member may be a tensioning buckle, which includes a circular base and a finger formed by extending the edge of the base vertically. The diameter of the fixing portion 400 is slightly larger than that of the base, and after the inner core 200 is inserted into the tensioning buckle, the fixing portion 400 promotes outward expansion of the clamping fingers at the periphery of the base to a certain extent so as to abut against the inner wall of the roller 100. In addition, the gap between the fixing part 400 and the roller 100 is slightly smaller than the thickness of the clamping finger, so that after the clamping finger expands, the inner side surface and the outer side surface of the clamping finger are respectively extruded by the outer wall of the fixing part 400 and the inner wall of the roller 100, and interference fit is formed among the inner core 200, the clamping finger and the roller 100, so that the inner core 200 is supported and fixed.

The applicant declares that the above is only a specific embodiment of the present utility model, but the scope of the present utility model is not limited thereto, and it should be apparent to those skilled in the art that any changes or substitutions that are easily conceivable within the technical scope of the present utility model disclosed by the present utility model fall within the scope of the present utility model and the disclosure.

Claims

1. A roll brush assembly for wafer cleaning, comprising:

the surface of the roller is provided with a plurality of water delivery holes;

the roller is internally provided with an inner core, and the outer surface of the inner core is provided with a corrugated structure which comprises a plurality of convex parts and a plurality of concave parts which are alternately arranged;

2. The roll brush assembly for wafer cleaning according to claim 1, wherein the axial cross section of the protrusion is trapezoidal and the top surface thereof is planar.

3. The roll brush assembly for wafer cleaning according to claim 1 or 2, wherein the distance between centers of two adjacent protrusions is 3 to 50mm.

4. The roll brush assembly for wafer cleaning according to claim 1 or 2, wherein a height difference between the convex portion and the concave portion is 0.5 to 10mm.

5. The roll brush assembly for wafer cleaning according to claim 1, wherein at least a part of the top surface of the projection is provided with one of the flow homogenizing holes, and positions of two adjacent flow homogenizing holes in the axial direction are spirally staggered along the circumference of the inner core.

6. The roll brush assembly for wafer cleaning according to claim 1, wherein at least a portion of the top surface of the boss is circumferentially provided with at least one of the flow homogenizing holes, at least a portion of the flow homogenizing holes being collinear and parallel to the axis of the inner core.

7. The roller brush assembly for wafer cleaning according to claim 5 or 6, wherein an angle between adjacent two of the uniform flow holes and an axis of the inner core is 60 ° to 120 °.

8. The roll brush assembly for wafer cleaning of claim 1, wherein the inner core is made of a hydrophilic material.

9. The roll brush assembly for wafer cleaning of claim 1, wherein an annular gap is left between an outer wall of the inner core and an inner wall of the bowl.

10. The roll brush assembly for wafer cleaning according to claim 1, wherein both ends of the inner core are respectively provided with an assembling portion and a fixing portion, and the assembling portion is matched and butted with the first fixing member; one end of the fixing part is provided with a fixing piece, and the inner core is fixed in the roller through the fixing piece.