CN219991709U - Substrate table and coating equipment - Google Patents

Abstract

The utility model discloses a substrate table and coating equipment, wherein the substrate table comprises: the carrier is provided with a first end part and a second end part which are oppositely arranged along the thickness direction, the first end part is provided with a bearing surface, the bearing surface is used for bearing a substrate, a first heat exchange cavity is arranged in the first end part, the first heat exchange cavity is used for introducing a fluid medium, and the fluid medium is used for cooling the bearing surface; an electric heating part arranged at the second end part; the first heat conduction part is connected to the carrying platform and penetrates through the first heat exchange cavity, and the first heat conduction part is configured to be capable of conducting heat of the electric heating part to the carrying surface; wherein, the electric heating part and the fluid medium can adjust the temperature of the bearing surface simultaneously. In the utility model, the substrate table can cool the substrate and heat the substrate. In addition, the heating component of the electric heating part can not be quickly cooled by the fluid medium while being heated, and the service life of the heating component of the electric heating part is longer.

Description

Substrate table and coating equipment

Technical Field

The utility model relates to the technical field of coating equipment, in particular to a substrate table and coating equipment.

Background

With the application of thin film materials and the development of vacuum coating equipment, in the coating process, the substrate table is required to be cooled in some cases, and is required to be heated in some cases. If the substrate table only has one function of heating or cooling, when films with different processes are required to be prepared, two substrate tables are matched in the same cavity. It is difficult for existing individual substrate tables to simultaneously meet the demands for being able to cool the substrate as well as to heat the substrate.

Disclosure of Invention

The utility model mainly aims to provide a substrate table and coating equipment, wherein the substrate table can cool and heat a substrate at the same time, and meanwhile, the service life of the substrate table can be prolonged.

To achieve the above object, the present utility model provides a substrate stage comprising:

the carrier is provided with a first end part and a second end part which are oppositely arranged along the thickness direction, the first end part is provided with a bearing surface, the bearing surface is used for bearing a substrate, a first heat exchange cavity is arranged in the first end part and is used for introducing a fluid medium, and the fluid medium is used for cooling the bearing surface;

an electric heating part provided at the second end; the method comprises the steps of,

the first heat conduction part is connected to the carrying platform and penetrates through the first heat exchange cavity, and the first heat conduction part is configured to be capable of conducting heat of the electric heating part to the carrying surface;

wherein the electric heating part and the fluid medium can regulate the temperature of the bearing surface simultaneously.

In some embodiments, the first heat conducting portion is integrally connected with the carrier, the electric heating portion is in contact with the carrier, the electric heating portion heats the carrier, and the first heat conducting portion exchanges heat with the carrier and then conducts heat to the bearing surface.

In some embodiments, the first end is provided with a first cavity having a first opening facing away from the second end, the first end includes a first cover plate, the first cover plate covers the first opening to define the first heat exchange chamber, the first heat conducting portion passes through the first cover plate, and the wall surface of the first heat conducting portion facing away from the second end is flush with the wall surface of the first cover plate facing away from the second end, and the bearing surface includes the wall surface of the first cover plate facing away from the second end and the wall surface of the first heat conducting portion facing away from the second end.

In some embodiments, the first end is provided with a first cavity having a first opening disposed away from the second end, the first end includes a first cover plate, the bearing surface includes a wall surface of the first cover plate facing away from the second end, the first cover plate covers the first opening to define the first heat exchange chamber, and an end surface of the first heat conducting portion facing away from the second end abuts against the wall surface of the first cover plate facing toward the second end.

In some embodiments, the first heat transfer portion is in the shape of a bar that divides the first heat transfer chamber into at least one first heat transfer channel.

In some embodiments, one end of the at least one first heat exchange channel is provided with a liquid inlet, the other end of the at least one first heat exchange channel is provided with a liquid outlet, the carrier is provided with a liquid inlet penetrating through the second end, the liquid inlet is communicated with the liquid inlet, the carrier is also provided with a liquid outlet penetrating through the second end, and the liquid outlet is communicated with the liquid outlet;

the substrate table further comprises a liquid inlet pipe and a liquid outlet pipe, wherein the liquid inlet pipe is inserted into the liquid inlet hole so as to guide the fluid medium into the at least one first heat exchange channel, and the liquid outlet pipe is inserted into the liquid outlet hole so as to guide the fluid medium out of the at least one first heat exchange channel.

In some embodiments, the first heat transfer portion is helical and divides the first heat transfer chamber into a first heat transfer channel that is helical.

In some embodiments, the first heat conducting portion includes a first heat conducting strip and a second heat conducting strip, the first heat conducting strip and the second heat conducting strip each extend along a curve, the first heat conducting strip is located at an outer periphery of the second heat conducting strip, and the first heat conducting strip and the second heat conducting strip jointly divide the first heat exchange chamber into a plurality of first heat exchange channels.

In some embodiments, the first heat conducting part includes a plurality of heat conducting protrusions, and each of the heat conducting protrusions is arranged in a rectangular array or a circular array.

In some embodiments, the second end is provided with a second cavity having a second opening disposed away from the first end, the second end including a second cover plate covering the second opening to define a second heat exchange chamber, the electrical heating portion being disposed in the second heat exchange chamber.

In some embodiments, a second heat conduction part is arranged in the second heat exchange cavity and integrally connected with the carrier, and the second heat conduction part divides the second heat exchange cavity into a second heat exchange channel in a spiral shape;

the electric heating part comprises a heating wire, and the heating wire is spirally wound on the second heat exchange channel along the extending direction of the second heat exchange channel.

In some embodiments, the substrate stage further comprises a temperature sensor, the carrier stage is provided with a temperature monitoring hole, the temperature sensor is inserted into the temperature monitoring hole, and the temperature sensor is used for monitoring the temperature of the electric heating part.

An embodiment of a second aspect of the utility model provides a coating apparatus comprising a substrate table as claimed in any one of the preceding claims.

Compared with the prior art, the utility model has the beneficial effects that:

in the technical scheme of the utility model, the substrate table comprises a carrying table, an electric heating part and a first heat conducting part. The carrier is provided with a first end part and a second end part, a first heat exchange cavity is arranged in the first end part, and fluid medium can be introduced into the first heat exchange cavity so as to cool the bearing surface. And the electric heating part is arranged at the second end part of the carrying platform, and the heat of the electric heating part can be conducted to the carrying surface through the first heat conducting part, so that the substrate can be heated. Therefore, after the substrate is loaded on the bearing surface, the substrate table can cool the substrate and heat the substrate.

Further, in this embodiment, the electric heating portion and the fluid medium can adjust the temperature of the bearing wall surface at the same time, and the electric heating portion is used for raising the temperature, and the fluid medium is used for lowering the raised temperature to the target temperature, so that the temperature control accuracy of the substrate is higher, and meanwhile, the substrate can be protected, so that the substrate can be prevented from overheating.

Further, in this embodiment, the electric heating portion and the fluid medium are respectively located at two opposite sides of the carrier, and the heating element of the electric heating portion is far away from the fluid medium, so when the electric heating portion and the fluid medium perform temperature control simultaneously, the low temperature of the fluid medium is unlikely to affect the electric heating portion, and compared with a structure in which the electric heating portion and the fluid medium are located at the same plane and are in direct contact with each other, the heating element of the electric heating portion is not rapidly cooled by the fluid medium while being heated, so that the temperature difference of each part of the heating element of the electric heating portion is small, and the service life of the heating element of the electric heating portion is longer.

Drawings

In order to more clearly illustrate the embodiments of the present utility model or the technical solutions in the prior art, the drawings that are required in the embodiments or the description of the prior art will be briefly described, and it is obvious that the drawings in the following description are only some embodiments of the present utility model, and other drawings may be obtained according to the structures shown in these drawings without inventive effort for a person skilled in the art.

FIG. 1 is a schematic cross-sectional view of a substrate table in a first embodiment of the utility model;

FIG. 2 is an enlarged schematic view of a portion of FIG. 1 at A;

FIG. 3 is a schematic perspective view of the stage with the first cover plate removed according to the first embodiment of the present utility model;

FIG. 4 is a schematic side view of the stage with the first cover plate removed according to the first embodiment of the present utility model;

FIG. 5 is an exploded view of a stage according to a second embodiment of the present utility model;

FIG. 6 is an exploded view of a stage according to a third embodiment of the present utility model;

FIG. 7 is a schematic view of a part of a stage according to a third embodiment of the present utility model;

FIG. 8 is an exploded view of a stage according to a fourth embodiment of the present utility model;

FIG. 9 is a schematic side view of a substrate table in a first embodiment of the utility model; wherein a partial cross-section is performed;

FIG. 10 is a schematic side view of the stage with the second cover plate removed in accordance with the first embodiment of the present utility model;

fig. 11 is a schematic side view of one heating wire in the first embodiment of the present utility model;

fig. 12 is a schematic side view of another heating wire in the first embodiment of the utility model

Fig. 13 is a schematic side view of the second cover plate in the first embodiment of the utility model.

Reference numerals illustrate:

a substrate stage 10;

a stage 100; a first end 110; a first cavity 111; a first cover plate 112; a first heat exchange passage 113; a second end 120; a second cavity 121; a second cover plate 122; a wire outlet hole 1221; a second heat exchange passage 123; a liquid inlet 130; a liquid outlet 140; a liquid inlet 150; a liquid outlet hole 160; a temperature monitoring hole 170;

an electric heating section 200; a heating wire 210;

a first heat conduction part 300; a first heat conductive strip 310; a second heat conductive strip 320; a heat conductive protrusion 330;

a second heat conduction part 400;

a liquid outlet pipe 600;

a temperature sensor 700.

The achievement of the objects, functional features and advantages of the present utility model will be further described with reference to the accompanying drawings, in conjunction with the embodiments.

Detailed Description

The following description of the embodiments of the present utility model will be made clearly and fully with reference to the accompanying drawings, in which it is evident that the embodiments described are only some, but not all embodiments of the utility model. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

It should be noted that, if a directional indication (such as up, down, left, right, front, and rear … …) is included in the embodiment of the present utility model, the directional indication is merely used to explain a relative positional relationship, a movement condition, and the like between the components in a specific posture, and if the specific posture is changed, the directional indication is correspondingly changed.

In addition, if there is a description of "first", "second", etc. in the embodiments of the present utility model, the description of "first", "second", etc. is for descriptive purposes only and is not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include at least one such feature. In addition, if "and/or", "and/or" and/or "are used throughout, the meaning includes three parallel schemes, for example," a and/or B ", including a scheme, or B scheme, or a scheme where a and B meet simultaneously. In addition, the technical solutions of the embodiments may be combined with each other, but it is necessary to base that the technical solutions can be realized by those skilled in the art, and when the technical solutions are contradictory or cannot be realized, the combination of the technical solutions should be considered to be absent and not within the scope of protection claimed in the present utility model.

With the application of thin film materials and the development of vacuum coating equipment, in the coating process, the substrate table is required to be cooled in some cases, and is required to be heated in some cases. If the substrate table only has one function of heating or cooling, when films with different processes are required to be prepared, two substrate tables are matched in the same cavity. It is difficult for existing individual substrate tables to simultaneously meet the demands for being able to cool the substrate as well as to heat the substrate.

The inventor sets up cooling structure and heating structure simultaneously in the substrate stage at the initial stage, specifically, utilizes the fluidic medium to cool down, utilizes the heater strip to heat to the different temperature regulating demands of substrate stage in different situations have been realized. In the subsequent process, the temperature reduction amplitude of the substrate is found to be smaller, generally between a few degrees and tens of degrees celsius, but the heating amplitude is larger, in some cases, the heating amplitude may exceed one thousand degrees celsius, and when the temperature of the heated substrate is too high, fine control is difficult to perform, so that the error in heating is larger. Therefore, the temperature regulating structure of the substrate table is further improved, so that the substrate table is heated and simultaneously subjected to cooling treatment by using a fluid medium. Specifically, when the substrate needs to be heated to the target temperature, the bearing surface bearing the substrate is heated to a temperature higher than the target temperature by the heating wire, and then the temperature of the bearing surface is reduced to the target temperature by using the fluid medium (of course, the heating and the cooling can be performed simultaneously), and the temperature of the substrate can be controlled more accurately by the temperature regulating mode.

However, it was subsequently found that the heating wires of the substrate table are often susceptible to damage. The inventors of the present utility model considered that the quality of the heating wire itself was poor in the early stage, and therefore replaced the heating wire with a better material, but found that the life of the heating wire was still unsatisfactory even if the quality of the heating wire was improved. Finally, the inventors have found that, in order to rapidly temperature-adjust the substrate by the heating structure and the cooling structure, both the heating structure and the cooling structure are uniformly distributed at the end position close to the carrying surface in the substrate table. In particular, the heating wire is spirally wound on one side of the bearing surface, and the channel for conducting the fluid medium is directly defined by the heating wire, which enables the fluid medium to be in close proximity or direct contact with the heating wire. In this scheme, when heater strip and fluid medium simultaneous working, the inside higher temperature that has of heater strip, thereby the outer wall of heater strip receives the lower fluid medium's of temperature cooling temperature lower relatively, and the temperature of heater strip outer wall and inside temperature exist higher temperature difference promptly. When the heating wire is in the environment for a long time, the service life of the heating wire is greatly shortened.

In view of this, and referring to fig. 1-13, an embodiment of the present utility model provides a substrate table 10, the substrate table 10 comprising a bearing surface for bearing and positioning a substrate. In particular, the substrate table 10 may be directly connected to the substrate or may be indirectly connected to the substrate. For convenience of description, in the following embodiments, the direct connection tab of the carrying surface of the substrate stage 10 is taken as an example. Specifically, the substrate stage 10 includes a stage 100, an electric heating portion 200, and a first heat conduction portion 300.

The stage 100 has a first end 110 and a second end 120 arranged opposite in the thickness direction. The first end 110 is a part of one end of the stage 100 in the thickness direction, and the second end 120 is a part of the other end of the stage 100 in the thickness direction. In some embodiments, the stage 100 may be composed of a first end 110 and a second end 120, where the first end 110 is connected to the second end 120. In other embodiments, the first end 110 and the second end 120 of the carrier 100 may be spaced apart, and other portions of the carrier 100 are connected between the first end 110 and the second end 120. The first end 110 has the aforementioned bearing surface (i.e., the first end 110 is configured to bear a positioning substrate). A first heat exchange chamber is provided in the first end 110, the first heat exchange chamber being for introducing a fluid medium for cooling the bearing surface.

The specific materials of the fluid medium are determined according to actual requirements, and only the fluid medium is required to have a cooling effect. For ease of understanding, in this embodiment, the fluid medium is exemplified by water.

In some embodiments, the fluid medium in the first heat exchange chamber is circulated only internally, and the purpose of cooling is achieved by the internal circulation of the fluid medium. In other embodiments, the fluid medium in the first heat exchange chamber can be circulated externally, i.e., the fluid medium can be externally introduced into the first heat exchange chamber of the substrate table 10, and the fluid medium in the first heat exchange chamber can be externally introduced out of the substrate table 10.

Referring to fig. 1-3, the electric heating portion 200 is disposed at the second end 120, and the electric heating portion 200 and the fluid medium can simultaneously regulate the temperature of the bearing surface. Specifically, the "the electric heating portion 200 is disposed at the second end 120" includes that the electric heating portion 200 is disposed inside the second end 120, and also includes that the electric heating portion 200 is disposed outside the second end 120 and in contact with the second end 120. For convenience of description, in this embodiment, the electric heating portion 200 includes a heating wire 210, and after the heating wire 210 is energized, electric energy is converted into heat energy, so as to achieve the purpose of heating the substrate.

The first heat conducting portion 300 is connected to the carrier 100, and the first heat conducting portion 300 penetrates through the first heat exchanging chamber, and the first heat conducting portion 300 is configured to be capable of conducting heat of the electric heating portion 200 to the carrying surface. That is, the electric heating unit 200 can heat the first heat conduction unit 300, and after the electric heating unit 200 heats the first heat conduction unit 300, the first heat conduction unit 300 can heat the bearing surface.

In this embodiment, the fluid medium in the first heat exchange chamber can cool the carrying surface, and the electric heating portion 200 can heat the carrying surface, so that the substrate table 10 can cool the substrate and heat the substrate, thereby meeting different temperature adjustment requirements of the substrate. Further, in the present embodiment, the electric heating portion 200 and the fluid medium can adjust the temperature of the bearing wall surface at the same time, the electric heating portion 200 is used for raising the temperature, and the fluid medium is used for lowering the raised temperature to the target temperature, so that the temperature control accuracy for the substrate is higher, and the substrate can be protected to prevent overheating of the substrate. Still further, in the present embodiment, the electric heating portion 200 and the fluid medium are respectively located at two opposite sides of the stage 100, and the heating element of the electric heating portion 200 is far away from the fluid medium, so when the electric heating portion 200 and the fluid medium perform temperature control simultaneously, the low temperature of the fluid medium is unlikely to affect the electric heating portion 200, and compared with a structure in which the electric heating portion 200 and the fluid medium are located at the same plane and are in direct contact with each other, the heating element of the electric heating portion 200 is not rapidly cooled by the fluid medium while being heated, so that the temperature difference of the heating element of the electric heating portion 200 is small, and the service life of the heating element of the electric heating portion 200 is longer.

The first heat conduction part 300 may be directly in contact with the electric heating part 200, or the first heat conduction part 300 may be indirectly in contact with the electric heating part 200. When the first heat conductive part 300 is directly in contact with the electric heating part 200, the first heat conductive part 300 may be penetrated to the second end 120 of the stage 100 so as to be conveniently in direct contact with the electric heating part 200. Referring to fig. 1 to 3, in the present embodiment, the first heat conducting portion 300 is indirectly in contact with the electric heating portion 200. Specifically, the first heat conducting portion 300 and the electric heating portion 200 are respectively located at two opposite sides of the carrier 100 and are in contact with the carrier 100, the electric heating portion 200 heats the carrier 100, and the first heat conducting portion 300 exchanges heat with the carrier 100 and then conducts heat to the bearing surface.

In some embodiments, the first heat conducting portion 300 and the carrier 100 may be two separate components, and the two components are assembled and connected (welded, clamped, glued, etc.). In other embodiments. Referring to fig. 3 to 6, the first heat conductive part 300 is integrally connected with the carrier 100 (in other words, the first heat conductive part 300 is integrally formed with the carrier 100), the electric heating part 200 contacts with the carrier 100, the electric heating part 200 heats the carrier 100, and the first heat conductive part 300 exchanges heat with the carrier 100 and then conducts heat to the bearing surface. In this solution, the processing of the first heat conduction portion 300 can be simplified, and the assembling step of the first heat conduction portion 300 and the carrier 100 is omitted, so that the processing cost is reduced.

Referring to fig. 3-6, in some embodiments, the first end 110 is provided with a first cavity 111, the first cavity 111 having a first opening disposed away from the second end 120. The first end 110 includes a first cover plate 112, the first cover plate 112 covering the first opening to define a first heat exchange chamber. The first heat conducting portion 300 passes through the first cover plate 112, and a wall surface of the first heat conducting portion 300 facing away from the second end portion 120 is flush with a wall surface of the first cover plate 112 facing away from the second end portion 120, and the bearing surface comprises a wall surface of the first cover plate 112 facing away from the second end portion 120 and a wall surface of the first heat conducting portion 300 facing away from the second end portion 120. In other words, the first cover plate 112 is provided with through holes corresponding to the positions of the first heat conducting parts 300, and when the first cover plate 112 is covered on the first opening, the first heat conducting parts 300 pass through the corresponding through holes on the first cover plate 112, so that the end walls of the first heat conducting parts 300 are exposed to be in direct contact with the substrate. In this embodiment, when the substrate is attached to the supporting surface, a portion of the substrate contacts the wall surface of the first cover plate 112, and another portion contacts the wall surface of the first heat conducting portion 300. The first heat conduction part 300 can be enabled to conduct heat to the substrate more directly, and heating efficiency is higher.

Referring to fig. 3, in some embodiments, a step surface is disposed on a side of the first heat conducting portion 300, and after the first cover plate 112 is covered on the first opening, the first cover plate 112 abuts against the step surface of the first heat conducting portion 300, so as to achieve positioning of the first cover plate 112.

Referring to fig. 3-6, in other embodiments, the first end 110 is provided with a first cavity 111, the first cavity 111 having a first opening disposed away from the second end 120. The first end 110 includes a first cover 112, and the bearing surface includes a wall surface of the first cover 112 facing away from the second end 120, where the first cover 112 covers the first opening to define a first heat exchange chamber. An end surface of the first heat conducting portion 300 facing away from the second end portion 120 abuts against a wall surface of the first cover plate 112 facing the second end portion 120. In this embodiment, the first heat conducting portion 300 transfers heat to the first cover plate 112, and then the first cover plate 112 transfers heat to the substrate. In this scheme, on the one hand, the structure of first apron 112 is simpler, has reduced the processing degree of difficulty of first apron 112. Meanwhile, after the heat of the first heat conductive part 300 is transferred to the first cover plate 112, the heat can be more uniformly distributed on the first cover plate 112, so that the substrate is heated more uniformly everywhere.

The specific structure of the first heat conducting portion 300 depends on the actual requirement, referring to fig. 3-6, in some embodiments, the first heat conducting portion 300 is in a strip shape, and the first heat conducting portion 300 divides the first heat exchange chamber into at least one first heat exchange channel 113. In this embodiment, the channels through which the fluid medium flows are separated by the first heat conducting portion 300, so that the first heat conducting portion 300 has a stronger functionality, and meanwhile, the contact area between the first heat conducting portion 300 and the fluid medium can be increased, thereby being more beneficial to temperature adjustment of the substrate.

In particular, referring to fig. 5-6, in some embodiments, the first thermally conductive section 300 is helical and the first thermally conductive section 300 divides the first heat exchange chamber into the first heat exchange channels 113 that are helical. Similarly, when the first heat conducting portion 300 is spiral, referring to fig. 6 to 7, in one embodiment, a spiral through hole may be correspondingly disposed on the first cover plate 112, and the first heat conducting portion 300 may pass through the through hole of the first cover plate 112. Referring to fig. 6, in another embodiment, the first heat conducting portion 300 may abut against a wall surface of the first cover plate 112 facing the first heat exchange chamber.

Referring to fig. 3-4, in some embodiments, the first heat conducting portion 300 includes a first heat conducting strip 310 and a second heat conducting strip 320, the first heat conducting strip 310 and the second heat conducting strip 320 both extend along a curve, the first heat conducting strip 310 is located at the periphery of the second heat conducting strip 320, and the first heat conducting strip 310 and the second heat conducting strip 320 together divide the first heat exchanging chamber into a plurality of first heat exchanging channels 113. In this solution, the first heat conducting portion 300 may divide the first heat exchange chamber into a plurality of first heat exchange channels 113, so that the fluid medium has more flow paths, and the cooling of the carrier 100 is more uniform.

Referring to fig. 8, in some embodiments, the first heat conductive part 300 includes a plurality of heat conductive protrusions 330, and each heat conductive protrusion 330 is arranged in a rectangular array or a circular array.

When the fluid medium in the first heat exchange chamber is circulated, referring to fig. 3, 9 and 10, in some embodiments, at least one first heat exchange channel 113 has a liquid inlet 130 at one end and a liquid outlet 140 at the other end. The stage 100 is provided with a liquid inlet 150 penetrating the second end 120, the liquid inlet 150 is communicated with the liquid inlet 130, the stage 100 is further provided with a liquid outlet 160 penetrating the second end 120, and the liquid outlet 160 is communicated with the liquid outlet 140. The substrate stage 10 further includes a liquid inlet pipe and a liquid outlet pipe 600, the liquid inlet pipe is inserted into the liquid inlet hole 150 to introduce the fluid medium into the at least one first heat exchange channel 113, and the liquid outlet pipe 600 is inserted into the liquid outlet hole 160 to guide out the fluid medium in the at least one first heat exchange channel 113. In this solution, the fluid medium can conduct the heat of the bearing surface out of the carrier 100, so that the cooling efficiency is higher.

When only one heat exchange channel is provided in the first heat exchange chamber, the liquid inlet 130 and the liquid outlet 140 may be respectively disposed at two opposite ends of the heat exchange channel. When a plurality of heat exchange channels are arranged in the first heat exchange chamber, the liquid inlet 130 can be formed at one end of the junction position of each heat exchange channel, and the liquid outlet 140 can be formed at the other end of the junction position of each heat exchange channel, so that the fluid medium led into the first heat exchange chamber by the liquid inlet pipe can flow through each position in the first heat exchange chamber and then be led out of the first heat exchange chamber, and the cooling effect is improved.

Referring to fig. 1, 10-13, in some embodiments, an electrical heating portion 200 is disposed within the second end 120, and the electrical heating portion 200 is in contact with the carrier 100. Specifically, the second end 120 is provided with a second cavity 121, the second cavity 121 having a second opening arranged away from the first end 110. The second end 120 includes a second cover 122, where the second cover 122 covers the second opening to define a second heat exchange chamber, and the electric heating portion 200 is disposed in the second heat exchange chamber. Compared with the structure that the electric heating portion 200 is connected to the wall surface of the second end portion 120 facing away from the first end portion 110, the structure that the electric heating portion 200 is disposed in the second end portion 120 enables the heat generated by the electric heating portion 200 to be well absorbed by the carrier 100, so that the heat is not easy to escape.

The specific arrangement of the electric heating portion 200 in the second heat exchange chamber depends on the actual requirement, referring to fig. 1, 10-13, in some embodiments, a second heat conducting portion 400 is disposed in the second heat exchange chamber, the second heat conducting portion 400 is integrally connected with the carrier 100, and the second heat conducting portion 400 separates the second heat exchange chamber into the second heat exchange channels 123 with spiral shape. The electric heating part 200 includes a heating wire 210, and the heating wire 210 is spirally wound around the second heat exchanging channel 123 along the extending direction of the second heat exchanging channel 123. In this scheme, the electric heating portion 200 is the state of being partly wrapped up for the heat of electric heating portion 200 can be better absorbed by the microscope carrier 100, has promoted heat exchange efficiency.

In particular, referring to fig. 1, 10-13, in some embodiments, the heating wires 210 have two, and the two heating wires 210 are arranged side by side and simultaneously in a spiral-surrounding arrangement. The second cover body is provided with a wire outlet 1221, and the electric heating wire 210 is led out of the second heat exchange chamber through the wire outlet 1221, so that electric power is obtained from the outside.

To monitor whether the temperature of the electric heating part 200 is within the target range, referring to fig. 1, in some embodiments, the substrate stage 10 further includes a temperature sensor 700, the stage 100 is provided with a temperature monitoring hole 170, the temperature sensor 700 is inserted into the temperature monitoring hole 170, and the temperature sensor 700 is used to monitor the temperature of the electric heating part 200.

Embodiments of the second aspect of the present utility model provide a coating apparatus comprising the substrate table 10 of any of the embodiments described above.

The foregoing description of the preferred embodiments of the present utility model should not be construed as limiting the scope of the utility model, but rather should be understood to cover all modifications, equivalents, and alternatives falling within the spirit and scope of the utility model as defined by the following description and drawings or any application directly or indirectly to other relevant art(s).

Claims (10)

1. A substrate table, comprising:

the carrier is provided with a first end part and a second end part which are oppositely arranged along the thickness direction, the first end part is provided with a bearing surface, the bearing surface is used for bearing a substrate, a first heat exchange cavity is arranged in the first end part and is used for introducing a fluid medium, and the fluid medium is used for cooling the bearing surface;

an electric heating part provided at the second end; the method comprises the steps of,

the first heat conduction part is connected to the carrying platform and penetrates through the first heat exchange cavity, and the first heat conduction part is configured to be capable of conducting heat of the electric heating part to the carrying surface;

wherein the electric heating part and the fluid medium can regulate the temperature of the bearing surface simultaneously.

2. The substrate table of claim 1 wherein,

the first heat conduction part is integrally connected with the carrying platform, the electric heating part is in contact with the carrying platform, the electric heating part heats the carrying platform, and the first heat conduction part conducts heat to the carrying surface after exchanging heat with the carrying platform.

3. The substrate table of claim 2 wherein,

the first end is provided with a first concave cavity, the first concave cavity is provided with a first opening which is arranged away from the second end, the first end comprises a first cover plate, the first cover plate is covered on the first opening to define the first heat exchange cavity, the first heat conduction part penetrates through the first cover plate, the wall surface of the first heat conduction part which is away from the second end is flush with the wall surface of the first cover plate which is away from the second end, and the bearing surface comprises the wall surface of the first cover plate which is away from the second end and the wall surface of the first heat conduction part which is away from the second end;

or,

the first end is provided with a first concave cavity, the first concave cavity is provided with a first opening deviating from the second end, the first end comprises a first cover plate, the bearing surface comprises a wall surface deviating from the second end, the first cover plate covers the first opening to define a first heat exchange cavity, and the end face of the first heat conducting part deviating from the second end is abutted against the wall surface of the first cover plate facing the second end.

4. The substrate table of claim 2 wherein,

the first heat conduction part is in a strip shape, and divides the first heat exchange cavity into at least one first heat exchange channel.

5. The substrate table of claim 4 wherein,

one end of the at least one first heat exchange channel is provided with a liquid inlet, the other end of the at least one first heat exchange channel is provided with a liquid outlet, the carrying platform is provided with a liquid inlet penetrating through the second end, the liquid inlet is communicated with the liquid inlet, the carrying platform is also provided with a liquid outlet penetrating through the second end, and the liquid outlet is communicated with the liquid outlet;

the substrate table further comprises a liquid inlet pipe and a liquid outlet pipe, wherein the liquid inlet pipe is inserted into the liquid inlet hole so as to guide the fluid medium into the at least one first heat exchange channel, and the liquid outlet pipe is inserted into the liquid outlet hole so as to guide the fluid medium out of the at least one first heat exchange channel.

6. The substrate table of claim 2 wherein,

the first heat conduction part is spiral, and divides the first heat exchange chamber into a first heat exchange channel which is spiral;

or,

the first heat conduction part comprises a first heat conduction strip and a second heat conduction strip, the first heat conduction strip and the second heat conduction strip extend along curves, the first heat conduction strip is positioned at the periphery of the second heat conduction strip, and the first heat conduction strip and the second heat conduction strip jointly divide the first heat exchange chamber into a plurality of first heat exchange channels;

or,

the first heat conduction part comprises a plurality of heat conduction bulges, and each heat conduction bulge is arranged in a rectangular array or a circular array.

7. The substrate table of claim 1 wherein,

the second end is provided with a second cavity, the second cavity is provided with a second opening which is away from the first end, the second end comprises a second cover plate, the second cover plate covers the second opening to define a second heat exchange chamber, and the electric heating part is arranged in the second heat exchange chamber.

8. The substrate table of claim 7 wherein,

a second heat conduction part is arranged in the second heat exchange cavity and is integrally connected with the carrying platform, and the second heat conduction part divides the second heat exchange cavity into a second heat exchange channel which is spiral;

the electric heating part comprises a heating wire, and the heating wire is spirally wound on the second heat exchange channel along the extending direction of the second heat exchange channel.

9. The substrate table of claim 1 wherein,

the substrate stage further comprises a temperature sensor, the carrying stage is provided with a temperature monitoring hole, the temperature sensor is inserted into the temperature monitoring hole, and the temperature sensor is used for monitoring the temperature of the electric heating part.

10. A coating apparatus comprising a substrate table according to any one of claims 1 to 9.