CN211846222U - Diamond Arrangement Arrangement Device for Diamond Arranger - Google Patents
Diamond Arrangement Arrangement Device for Diamond Arranger Download PDFInfo
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- CN211846222U CN211846222U CN201922214639.0U CN201922214639U CN211846222U CN 211846222 U CN211846222 U CN 211846222U CN 201922214639 U CN201922214639 U CN 201922214639U CN 211846222 U CN211846222 U CN 211846222U
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- 239000010432 diamond Substances 0.000 title claims abstract description 172
- 229910003460 diamond Inorganic materials 0.000 title claims abstract description 136
- 229910000831 Steel Inorganic materials 0.000 claims description 4
- 239000010959 steel Substances 0.000 claims description 4
- 238000013461 design Methods 0.000 abstract description 6
- 239000004065 semiconductor Substances 0.000 description 10
- 239000000758 substrate Substances 0.000 description 10
- 235000012431 wafers Nutrition 0.000 description 7
- 239000002184 metal Substances 0.000 description 6
- 239000000126 substance Substances 0.000 description 5
- 238000000034 method Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000003486 chemical etching Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000005245 sintering Methods 0.000 description 2
- 239000002002 slurry Substances 0.000 description 2
- 239000007779 soft material Substances 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000004745 nonwoven fabric Substances 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000012797 qualification Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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Abstract
Description
技术领域technical field
本实用新型涉及一种制作钻石整理器的技术,特别是一种能整理钻石整理器上布设的钻石的钻石整理器的钻石排列整理装置。The utility model relates to a technology for making a diamond organizer, in particular to a diamond arranging and arranging device for a diamond organizer capable of arranging the diamonds arranged on the diamond organizer.
背景技术Background technique
化学机械平坦化(Chemical-Mechanical Planarization,CMP),是一种常见于半导体制程中的技术,化学机械平坦化系使用机械力搭配化学腐蚀对加工过程中的晶圆或其他半导体元件的表面进行平坦化处理。Chemical-Mechanical Planarization (CMP) is a technology commonly used in semiconductor manufacturing. Chemical-mechanical planarization uses mechanical force combined with chemical etching to flatten the surface of wafers or other semiconductor components during processing. processing.
在半导体的化学机械平坦化制程中,常见的技术系利用研磨垫(Pad)接触晶圆或是其他半导体元件的表面,以对晶圆或是其他半导体元件利用机械力进行研磨,在研磨的同时一并搭配化学腐蚀的研磨液(Slurry)使用,以通过化学反应与物理机械力来移除晶圆或其他半导体元件表面的杂质或不平坦结构。In the chemical mechanical planarization process of semiconductors, a common technique is to use a polishing pad (Pad) to contact the surface of a wafer or other semiconductor components to grind the wafer or other semiconductor components with mechanical force. It is used together with chemical etching slurry (Slurry) to remove impurities or uneven structures on the surface of wafers or other semiconductor components through chemical reaction and physical mechanical force.
其中钻石整理器的切削率(cutting rate)会随着钻石排列角度及密度而有所改变,因此为提高钻石整理器的切削率,钻石整理器上的钻石排列角度及密度就显得相当重要,但过去制作钻石整理器时,对于钻石整理器上钻石的露出面并没有一个有效制作方式,导致钻石整理器的成品可能有多数钻石平面朝外的风险,此种钻石的设置方式不但影响到钻石整理器的切削率,同时钻石也容易从钻石整理器上脱落。当钻石整理器的品质不良时,更一并影响到后续研磨晶圆或其他半导体的品质,因此钻石整理器的品质是否优良,对于晶圆或其他半导体制成合格率具有相当深远的影响,相对的对于半导体产业来说也是相当重要的一环。Among them, the cutting rate of the diamond organizer will change with the diamond arrangement angle and density. Therefore, in order to improve the cutting rate of the diamond organizer, the diamond arrangement angle and density on the diamond organizer are very important, but When making diamond organizers in the past, there was no effective way to make the exposed surface of diamonds on the diamond organizer, resulting in the risk that most of the diamond planes may face outwards in the finished diamond organizer. The setting method of diamonds not only affects the diamond arrangement. The cut rate of the diamond organizer is also reduced, and the diamonds are also prone to fall off the diamond organizer. When the quality of the diamond organizer is poor, it will also affect the quality of the subsequent grinding wafers or other semiconductors. Therefore, whether the quality of the diamond organizer is good or not has a profound impact on the qualification rate of wafers or other semiconductors. It is also a very important part of the semiconductor industry.
有鉴于此,本实用新型遂针对上述现有技术的缺失,提出一种钻石整理器的钻石排列整理装置,以有效克服上述的该复数问题。In view of this, the present invention proposes a diamond arranging and arranging device for a diamond arranging device to effectively overcome the above-mentioned problems.
实用新型内容Utility model content
本实用新型的主要目的在提供一种钻石整理器的钻石排列整理装置,其利用特殊的钻石容置槽设计,能有效整理钻石的摆设角度,当钻石镶在钻石整理器时,所有钻石的锐利表面都能外露于钻石整理器,提升钻石整理器的切削率。The main purpose of the present utility model is to provide a diamond arrangement and arrangement device for a diamond organizer, which utilizes a special diamond accommodating groove design, which can effectively arrange the arrangement angle of the diamonds. When the diamonds are set in the diamond organizer, all diamonds are sharp The surface can be exposed to the diamond organizer to improve the cutting rate of the diamond organizer.
本实用新型的另一目的在提供一种钻石整理器的钻石排列整理装置,其能有效整理钻石的摆设角度,避免钻石设置在钻石整理器时,钻石的平面露出于钻石整理器外,而降低钻石整理器的切削率。Another object of the present utility model is to provide a diamond arranging and arranging device for a diamond organizer, which can effectively organize the arrangement angle of the diamonds, and avoid that when the diamonds are arranged in the diamond organizer, the plane of the diamonds is exposed outside the diamond organizer, thereby reducing the The cut rate of the diamond finisher.
为达上述的目的,本实用新型提供一种钻石整理器的钻石排列整理装置,包括一整理板,整理板上设有复数钻石容置槽,每一钻石容置槽可供分别容置一钻石,且每一钻石容置槽的开口大小小于钻石的直径。In order to achieve the above-mentioned purpose, the present invention provides a diamond arrangement and arrangement device for a diamond organizer, comprising an arrangement plate, and the arrangement plate is provided with a plurality of diamond accommodating grooves, and each diamond accommodating groove can respectively accommodate a diamond. , and the size of the opening of each diamond accommodating groove is smaller than the diameter of the diamond.
其中复数钻石容置槽可为圆形钻石容置槽或椭圆形钻石容置槽。The plurality of diamond accommodating grooves may be round diamond accommodating grooves or oval diamond accommodating grooves.
其中整理板为钢整理板。The finishing board is a steel finishing board.
综上所述,本实用新型利用特殊的钻石容置槽设计,能有效整理钻石的摆设角度,当钻石镶在钻石整理器时,所有钻石的锐利表面都能外露于钻石整理器,避免钻石的平面露出于钻石整理器外,以提升钻石整理器的切削率。To sum up, the utility model utilizes the special design of the diamond accommodating groove, which can effectively arrange the arrangement angles of the diamonds. When the diamonds are set in the diamond organizer, the sharp surfaces of all the diamonds can be exposed on the diamond organizer, so as to avoid the diamonds from being damaged. The flat surface is exposed outside the diamond organizer to improve the cutting rate of the diamond organizer.
兹为使对本实用新型的结构特征及所达成的功效更有进一步的了解与认识,谨佐以较佳的实施例图及配合详细的说明,说明如后。In order to further understand and recognize the structural features and the achieved effects of the present invention, preferred embodiment drawings and detailed descriptions are hereby accompanied, and the descriptions are as follows.
附图说明Description of drawings
图1是本实用新型的立体示意图。Fig. 1 is a three-dimensional schematic diagram of the present invention.
图2A至图2F是利用本实用新型制作钻石整理器的连续步骤示意图。2A to 2F are schematic diagrams of successive steps for making a diamond organizer according to the present invention.
图3A至图3C是利用本实用新型制作钻石整理器的另一实施例的连续步骤示意图。3A to 3C are schematic diagrams of successive steps of making a diamond organizer according to another embodiment of the present invention.
附图标记说明:1-钻石整理器的钻石排列整理装置;10-整理板;12-钻石容置槽;20-软性物质;22-基板;24-金属基板;26-钻石整理器;30-底座;32-金属层;34-钻石整理器;40-钻石。Explanation of reference numerals: 1-diamond arrangement and arrangement device of diamond organizer; 10-arrangement plate; 12-diamond accommodating groove; 20-soft substance; 22-substrate; 24-metal substrate; 26-diamond organizer; 30 - Base; 32 - Metal Layer; 34 - Diamond Organizer; 40 - Diamond.
具体实施方式Detailed ways
本实用新型是一种钻石整理器的钻石排列整理装置,其可供整理钻石的安装角度,令钻石镶设在钻石整理器时,所有钻石的锐利表面都可朝外,以提升钻石整理器的切削率,相对的有助于提升后续制作晶圆或其他半导体的合格率。The utility model relates to a diamond arranging and arranging device for a diamond organizer, which can arrange the installation angle of the diamonds, so that when the diamonds are set in the diamond organizer, the sharp surfaces of all the diamonds can face outward, so as to improve the diamond organizer The cutting rate is relatively helpful to improve the pass rate of subsequent wafers or other semiconductors.
请参照图1,以详细说明钻石整理器的钻石排列整理装置1的结构,如图所示,钻石整理器的钻石排列整理装置1的结构包括一整理板10,整理板10可为钢整理板,整理板10上设有复数钻石容置槽12,以供分别容置钻石(图中未示),每一钻石容置槽12的开口大小,都小于钻石的直径,且复数钻石容置槽12为圆形钻石容置槽或椭圆形钻石容置槽,钻石容置槽12的边缘都为圆弧,没有任何直角的钻石容置槽12。Please refer to FIG. 1 to describe in detail the structure of the diamond arranging and arranging
钻石容置槽12的结构能使钻石锐利表面朝外,除了因开口的大小小于钻石的直径,可令钻石可卡合在钻石容置槽12的开口之外,更因为钻石容置槽12为圆形钻石容置槽或椭圆形钻石容置槽,其边缘都为圆弧,没有直角的设计。由于镶在钻石整理器的钻石通常为六面体、八面体或十四面体的钻石的,因此搭配钻石容置槽12为没有边角的设计,能避免六面体、八面体或十四面体的钻石锐利部分刚好落入钻石容置槽12边角的位置,而露出平面的部分。The structure of the
在说明完本实用新型钻石整理器的钻石排列整理装置1的结构后,接下来请参照图2A至图2F,以详细说明钻石整理器的钻石排列整理装置1的使用状态,首先请参图2A,将复数钻石40撒在整理板10。由于钻石容置槽12的开口大小系小于钻石40的直径,以及钻石容置槽12为圆形钻石容置槽或椭圆形钻石容置槽,没有边角的设计,因此复数钻石40掉入钻石容置槽12时,所有钻石40的锐利表面都可朝外。After explaining the structure of the
接着请参图2B,将软性物质20,如不织布或纸类等软性物质服贴于整理板10上,令钻石容置槽12上的钻石40可镶入软性物20质中。接着请配合参照图3C,移除整理板10,并将镶有钻石40的软性物质20铺设在一基板22上,该基板22可为釉基板或陶瓷基板,接着以800℃~1000℃的高温进行烧结,经过高温烧结后,软性物质20已变形或破碎,此时可以水柱冲洗基板22表面,将基板22上的软性物质20冲洗干净,如图2D所示,钻石40镶设在基板22上。最后请参照图2E以及图2F,将镶有钻石40的基板22安装在一金属底座24上,以完成钻石整理器26。Next, referring to FIG. 2B , a
接下来请参照图3A至图3C说明利用本实用新型的钻石整理器的钻石排列整理装置1,制作钻石整理器的另一实施例,首先请参照图3A,其与上述实施例步骤相同,先将复数钻石撒在整理板10,令所有钻石40落入钻石容置槽12时,钻石40的锐利表面都可朝外。Next, please refer to FIG. 3A to FIG. 3C to describe the diamond arrangement and
接着请参图3B,提供一底座30,底座30可为钢底座,底座30上布涂有金属层32,并将布涂有金属层32的一面与钻石40黏接。接着请参图3C,将整理板10移除,并进行电镀,令钻石40可稳固的镶入金属层32内,即可完成钻石整理器34。Next, referring to FIG. 3B , a
综上所述,本实用新型利用特殊的钻石容置槽设计,能有效整理钻石的摆设角度,当钻石镶在钻石整理器时,所有钻石的锐利表面都能外露于钻石整理器,避免钻石的平面露出于钻石整理器外,以提升钻石整理器的切削率。To sum up, the utility model utilizes the special design of the diamond accommodating groove, which can effectively arrange the arrangement angles of the diamonds. When the diamonds are set in the diamond organizer, the sharp surfaces of all the diamonds can be exposed on the diamond organizer, so as to avoid the diamonds from being damaged. The flat surface is exposed outside the diamond organizer to improve the cutting rate of the diamond organizer.
以上说明对本实用新型而言只是说明性的,而非限制性的,本领域普通技术人员理解,在不脱离权利要求所限定的精神和范围的情况下,可作出许多修改、变化或等效,但都将落入本实用新型的保护范围之内。The above description is only illustrative rather than restrictive for the present invention, and those of ordinary skill in the art will understand that many modifications, changes or equivalents can be made without departing from the spirit and scope defined by the claims. But all will fall within the protection scope of the present invention.
Claims (4)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW108214768U TWM595562U (en) | 2019-11-07 | 2019-11-07 | Diamond arranging device of diamond conditioner |
| TW108214768 | 2019-11-07 |
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| Publication Number | Publication Date |
|---|---|
| CN211846222U true CN211846222U (en) | 2020-11-03 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201922214639.0U Active CN211846222U (en) | 2019-11-07 | 2019-12-11 | Diamond Arrangement Arrangement Device for Diamond Arranger |
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| CN (1) | CN211846222U (en) |
| TW (1) | TWM595562U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113470020A (en) * | 2021-09-01 | 2021-10-01 | 南通市计量检定测试所 | Intelligent generation method and system for diamond line arrangement based on image processing |
-
2019
- 2019-11-07 TW TW108214768U patent/TWM595562U/en unknown
- 2019-12-11 CN CN201922214639.0U patent/CN211846222U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113470020A (en) * | 2021-09-01 | 2021-10-01 | 南通市计量检定测试所 | Intelligent generation method and system for diamond line arrangement based on image processing |
| CN113470020B (en) * | 2021-09-01 | 2021-11-09 | 南通市计量检定测试所 | Intelligent generation method and system for diamond line arrangement based on image processing |
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| Publication number | Publication date |
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| TWM595562U (en) | 2020-05-21 |
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