CN212378765U

CN212378765U - A miniature vibration gyroscope sensitive unit and gyroscope

Info

Publication number: CN212378765U
Application number: CN202022271837.3U
Authority: CN
Inventors: 薛玉
Original assignee: Huaou Xingtong Beijing Technology Co ltd
Current assignee: Ningbo CAS Huaixin Technology Co., Ltd.
Priority date: 2020-08-28
Filing date: 2020-10-13
Publication date: 2021-01-19
Anticipated expiration: 2030-10-13

Abstract

The utility model provides a miniature vibration gyroscope sensitive unit and a gyroscope, which relate to the technical field of gyroscopes and can meet the size requirements of the miniature vibration gyroscope. And it has the characteristics of high positioning accuracy and excellent vibration robustness; the gyroscope sensitive unit includes a casing, a sensitive unit base and a resonator, the casing is fixed to the sensitive unit base, and the resonator is set inside the casing; the resonator is a high-footed The shape of a wine glass, including a wine glass part with a sealed mouth and a support rod, one end of the support rod is fixed with the bottom end of the wine glass part, and the other end is fixed with the base of the sensitive unit; the vertical outer wall of the harmonic oscillator wine glass part is evenly attached with several pressures. Electric ceramics; piezoelectric ceramics are connected with binding posts through wires, and the binding posts are embedded in the base of the sensitive unit; the gyroscope includes the sensitive unit. The technical solution provided by the utility model is suitable for the design and manufacture of the gyroscope.

Description

Miniature vibration gyroscope sensitive unit and gyroscope

[ technical field ] A method for producing a semiconductor device

The utility model relates to a gyroscope technical field especially relates to a sensitive unit of miniature vibration gyroscope and gyroscope.

[ background of the invention ]

The angle of rotation or angular rate can be measured according to at least three physical phenomena, namely conservation of angular momentum, sagnac effect, and coriolis force. In its most common form, a gyroscope is a device that uses one of these phenomena to measure or maintain direction and angular velocity. The measurement of the gyroscope rotation angle or angular rate can be integrated over time to determine the change in the angular direction of the gyroscope. For example, gyroscopes may be used in applications such as Inertial Navigation Systems (INS), Inertial Measurement Units (IMU), platform stabilization, ground vehicle Attitude Control Systems (ACS), drilling and measurement instruments, aircraft, marine, spacecraft, and/or other applications.

A Coriolis Vibration Gyroscope (CVG) belongs to a type of mechanical structure (resonator) gyroscope that achieves coupling from one vibrational mode to another (or multiple) under the action of external coriolis forces. When only two resonance modes, a primary mode and a secondary mode, are involved, the CVG becomes a single axis angular rate (or angle) sensor.

CVGs represent an important inertial technology because they are suitable for miniaturization, for mass production, and in particular in a manner similar to Integrated Circuits (ICs) when the harmonic oscillators used to form vibrating gyroscopes are micro-electro-mechanical systems (MEMS) made from etched silicon or quartz wafers.

Vibratory gyroscopes have further advantages over gyroscopes that use conservation of angular momentum (i.e., rate gyroscopes, rate-integrating gyroscopes, floating gyroscopes, Dynamically Tuned Gyroscopes (DTGs)) and gyroscopes that use the Sagnac effect (i.e., fiber optic gyroscopes, ring laser gyroscopes). Because vibratory gyroscopes are easier to produce, easier to assemble at lower cost, smaller, and more stable to the operating environment (including vibration, shock, and temperature), they can provide higher reliability and longer service life.

CVGs may be designed for open-loop, force rebalancing (i.e., closed-loop), and/or full angle modes. Both the force rebalance mode and the open loop mode can directly measure the rotational speed of the sensing shaft. The full angle mode provides a measure of net rotation angle after initialization.

A wide variety of resonator shapes can be used to fabricate vibratory gyroscopes. These resonators may be macro-scale systems or micro-scale systems (MEMS), but only axisymmetric macro-scale resonators have navigation-level performance (i.e., drift error less than 0.01 °/hr).

In such an axially symmetric coriolis gyroscope, the harmonic oscillator is preferably a hemispherical shell, the primary mode (i.e., the first-order mode) causing the shell edge to ovalize in a plane XY perpendicular to the shell axis of symmetry (denoted Z), the four nodes being 90 ° apart from one another. The sub-modal (i.e. second order) deformation is also elliptical and can be derived from the first order modal deformation by rotation through 45 °. The wave numbers of these two modes are equal to 2. The harmonic oscillator is assumed to be completely axisymmetric, and the resonance frequencies of the two modes are the same. When the primary mode is energized, any rotation around the Z-axis Ω will generate a coriolis force that can transfer energy from the primary mode to the secondary mode, and in a closed-loop configuration, the force required to balance the secondary modes will be proportional to Ω. In the full angle mode configuration, the secondary mode is free to receive energy transferred from the primary mode to the secondary mode, and if the control system achieves maintaining the total vibrational energy at the set value, the combination of the primary and secondary modes produces a new elliptical mode, the node being rotated relative to the resonator axis XY by an angle proportional to the input rotation angle.

Hemispherical shell coriolis gyroscopes are typically made of metallized silicon dioxide (northern Grumman, Safran), with an electrode system formed between the harmonic oscillator and the electrode carrier (also made of metallized silicon dioxide) for generating, under high vacuum, electrostatic forces and capacitive detection signals for controlling the harmonic oscillator and measuring angular rate. Since the system is relatively complex, bulky and difficult to produce, its price is still high, and for applications where only tactical-level performance (1 °/hr to 10 °/hr) and low requirements for smaller size are required, an alternative design for driving and measuring vibrations using metal cylinders and piezoelectric transducers has been proposed.

The earliest used cylinder structures were the 80's START gyroscope, which used a metal cylinder with a piezoelectric ceramic attached to the cylinder wall near the top edge of the cylinder. A valve stem for fixing the cylinder is placed outside, in the center of its flat bottom. A smaller, easier to assemble alternative design was proposed in 2005, this time with the support rods placed inside the cylinder and all piezo ceramic structures bonded to the outside of the flat bottom of the harmonic oscillator, rather than to the outside curved surface of the cylinder wall. Once the resonator is connected to a mounting support base and enclosed under moderate vacuum, this structure forms a so-called CVG sensitive unit (i.e. SE). Although the cylindrical resonator is relatively small for this particular case, with an outer diameter of about 25 mm, ultimately, the SE dimensions are about 25 mm in height and 39 mm in diameter of the mounting support base. The total mass is slightly less than 80 grams.

Unfortunately, these dimensions and masses are still too large, which prevents the use of these macro-sized high precision axisymmetric cylindrical coriolis gyroscopes in many inertial measurement unit and platform stabilization applications.

Accordingly, there is a need to develop a micro-vibratory gyroscope sensing unit and gyroscope that addresses the deficiencies of the prior art to solve or mitigate one or more of the problems set forth above.

[ Utility model ] content

In view of this, the utility model provides a miniature vibratory gyroscope sensing unit and gyroscope can satisfy miniature vibratory gyroscope's dimensional requirement, and has the characteristics of high positioning accuracy, good vibration robustness.

On one hand, the utility model provides a micro vibration gyroscope sensing unit, which comprises a shell, a sensing unit base and a harmonic oscillator, wherein the shell is fixedly connected with the sensing unit base, the harmonic oscillator is arranged inside the shell,

the harmonic oscillator is in a goblet shape and comprises a goblet part and a supporting rod outside the goblet, one end of the supporting rod is fixedly connected with the bottom end of the goblet part, and the other end of the supporting rod is fixedly connected with the sensitive unit base; a plurality of piezoelectric ceramics are uniformly attached to the vertical outer wall of the harmonic oscillator wine cup part; the piezoelectric ceramics are connected with a binding post through a lead, and the binding post is embedded in the sensitive unit base in a penetrating mode.

The above aspects and any possible implementations further provide an implementation in which the inner diameter of the wine cup portion is equal in thickness from top to bottom, and the piezoelectric ceramic is uniformly surrounded on a vertical outer wall of the wine cup portion at an end near the support rod.

The aspect and any possible implementation manner described above further provide an implementation manner, wherein the wall thickness of the harmonic oscillator is 0.3-1 mm, the average radius is 7-9 mm, and the resonant frequency is 6000-8000 Hz; the preferred scheme is as follows: the wall thickness of the harmonic oscillator is 0.5mm, the average radius is 7mm, and the resonance frequency is 6300 Hz.

The above aspect and any possible implementation further provide an implementation in which the sensing unit base is provided with a groove at its outer periphery, and an external damper is provided in the groove.

The above aspects and any possible implementations further provide an implementation where the sensitive unit base diameter is <30 mm and the outer diameter of the housing is <25 mm.

The above aspects and any possible implementations further provide an implementation in which the top and bottom parallel surfaces of the piezoelectric ceramic have a metal layer.

There is further provided in accordance with the above-described aspect and any possible implementation, an implementation in which the sensing unit base is a circular metal base.

The above aspects and any possible implementations further provide an implementation in which the outer surface of the support rod is provided with a metal coating.

In accordance with the foregoing aspect and any possible implementation manner, there is further provided an implementation manner, where the sensitive unit base is provided with a blind mounting hole; and a fixed connection point is arranged between the outer end of the supporting rod and the mounting blind hole, and the fixed connection point is a bonding point or a welding point.

The above-described aspect and any possible implementation manner further provide an implementation manner that the number of the piezoelectric ceramics is 8, and the piezoelectric ceramics are equally divided into the primary module piezoelectric ceramics and the secondary module piezoelectric ceramics.

The above-described aspect and any possible implementation further provide an implementation in which the external damper has an I-shaped double-conical cross-section.

In another aspect, the present invention provides a micro vibration gyroscope, where the gyroscope includes a control circuit and the sensing unit as described above, and the control circuit is connected to the sensing unit through the terminal.

Compared with the prior art, the utility model discloses can obtain including following technological effect: on the premise of meeting the rigidity requirement, the wall thickness of the harmonic oscillator is 0.3-1 mm, the average radius is 7-9 mm, the resonance frequency is 6000-8000 Hz, the size requirement of the miniature vibration gyroscope is met, and the miniature vibration gyroscope has the characteristics of high positioning precision and excellent vibration robustness.

Of course, it is not necessary for any one product in which the invention is practiced to achieve all of the above-described technical effects simultaneously.

[ description of the drawings ]

In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings needed to be used in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts.

Fig. 1 illustrates a sensing unit of a coriolis gyroscope according to an embodiment of the present invention;

fig. 2(a) and 2(b) are cross-sectional views of two types of piezoelectric ceramics for a sensing unit of a coriolis gyroscope according to the present invention;

fig. 3 is a diagram of a harmonic oscillator metalized area for facilitating a welding assembly process of the harmonic oscillator to its mounting base, and a piezoelectric ceramic for the harmonic oscillator in a coriolis gyroscope sensing unit, according to an embodiment of the present invention;

fig. 4(a) and (b) are a top view and a bottom view of a sensing unit according to an embodiment of the present invention, respectively, and illustrate the practically achievable outer diameter of a sensing unit of a coriolis gyroscope according to an embodiment of the present invention;

fig. 5 is a physical diagram of a sensing unit for a coriolis gyroscope according to an embodiment of the present invention.

Wherein, in the figure:

1. a harmonic oscillator; 2. piezoelectric ceramics; 3. a sensitive unit base; 4. a binding post; 5. a connecting wire; 6. a user mounting structure; 7. a shock absorber; 8. a front-mounted circuit board; 9. a housing; 10. a connector; 11. a temperature sensor.

[ detailed description ] embodiments

For better understanding of the technical solutions of the present invention, the following detailed descriptions of the embodiments of the present invention are provided with reference to the accompanying drawings.

It should be understood that the described embodiments are only some embodiments of the invention, and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

The terminology used in the embodiments of the invention is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used in the examples of the present invention and the appended claims, the singular forms "a," "an," and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise.

The present invention relates to a design for a miniature coriolis gyroscope having high measurement accuracy that substantially obviates one or more of the disadvantages of the prior art.

The object of the present invention is to eliminate or alleviate the drawbacks associated with known vibratory gyroscopes and to propose a cylindrical design with CVG sensitive unit (i.e. SE) base diameter <30 mm, outer diameter of the housing 9 <25 mm; preferably, the diameter of the base of the sensing unit is less than or equal to 20mm, and the outer diameter of the SE shell is less than or equal to 16 mm.

A coriolis gyroscope sensing unit comprising:

the harmonic oscillator 1 is a goblet shape and comprises a goblet part and a supporting rod, wherein the cup opening and the cup bottom of the goblet part are equally thick, namely the goblet part is cylindrical except the cup bottom; the cup mouth of the wine cup part is sealed by a bottom plate, the outer surface of the bottom end of the wine cup part is connected with one end of a supporting rod, and the other end of the supporting rod is fixedly connected with a round metal base; the goblet shape can be without base or with base; the wine cup part is of a hollow structure, and the supporting rod is of a solid structure;

a plurality of piezoelectric ceramics 2 which are attached to the vertical outer wall of the wine glass part and are uniformly arranged in a circle shape, at equal intervals and at equal angles;

the sensitive unit comprises a sensitive unit base 3, a plurality of glass-coated metal sealing pieces and a plurality of conductive through pins (namely binding posts 4), wherein the center of the sensitive unit base is provided with a mounting blind hole for mounting a harmonic oscillator (particularly the outer end of a supporting rod) on the base;

the external vibration absorber is arranged on the groove of the sensitive unit base, and when the sensitive unit base is clamped and fixed on the user mounting plate by a user, the vibration absorber is positioned between the sensitive unit base and the user mounting plate to play a role in vibration absorption;

the connecting wire 5 is used for connecting the wiring terminal 4 with the corresponding piezoelectric ceramic 2;

and the circuit board (namely, the circuit board is arranged on the outer surface of the sensitive unit base and is connected with the binding post) welded on the pins and used for connecting the CVG sensitive unit and the electronic control equipment thereof.

The number of the piezoelectric ceramics 2 is 2 or a multiple of 2, preferably 8, and the piezoelectric ceramics are divided into 2 groups with the same number, and the two groups of piezoelectric ceramics are respectively used for realizing the driving and the measurement of the main mode and the secondary mode.

The harmonic oscillator support rod and the mounting surface for mounting the piezoelectric ceramics are selectively metalized (namely provided with metal films), but the cup opening end surface of the harmonic oscillator wine cup and the side wall of the non-piezoelectric ceramic mounting area are not provided with the metal films.

The harmonic oscillator mounting surface for precisely positioning and assembling the piezoelectric ceramics is cut to have a mounting plane for mounting the piezoelectric ceramics, which may be a plane or a bottom surface of the recess.

The posts 4 are evenly distributed, and each post 4 and the corresponding piezoelectric ceramic 2 are positioned in the same parallel plane.

The harmonic oscillator is made of high Q factor nickel alloy; the piezoceramic is made of a medium-high quality factor PZT ceramic material with electrodes (i.e., conductive metal layers) deposited on the parallel surfaces of the top and bottom thereof.

The outer circular damper 7 has an I-shaped double-cone cross section. The external diameter of the SE base (namely the sensitive unit base) is provided with a plurality of mounting grooves, and the cross sections of the grooves are also in I-shaped biconical shapes and are matched with the cross section of the shock absorber 7.

The sensitive unit base 3 is provided with a temperature sensor 11; the temperature sensor 11 may be mounted in a recess in the base of the sensing unit.

Example 1:

the preferred embodiment of the present invention comprises a cylindrical cavity having a flat bottom, wherein the outside of the flat bottom is provided with a cavity similar to a wine glass, the wine glass cavity and the cylindrical cavity together form a wine glass portion (i.e. a cup shape with a thick inner diameter, the upper and lower sides of the inner diameter), the outside of the bottom end of the wine glass portion is provided with a solid support rod, and the support rod is located outside the wine glass type structure. A plurality of piezoelectric ceramics are attached to the vertical cylinder wall at the bottom of the wine glass part. The number of piezoelectric ceramics is a multiple of 2, preferably 8, and is divided into 2 groups, the number of piezoelectric ceramics in each group being the same. One set is responsible for the driving and measurement of the primary mode and the other set is responsible for the driving and measurement of the secondary mode. The harmonic oscillator 1 is mounted on a circular sensitive unit base 3, and a groove is formed in the outer diameter of the harmonic oscillator and used for accommodating and mounting a vibration absorber 7 (damper). The shock absorber 7 (damper) is of I-shaped cross-section and is clamped in the CVG sensitive unit (SE) allowing the whole structure to be clamped (fixed) to the user mounting structure 6.

Fig. 1 depicts a preferred embodiment of the present invention. The coriolis gyroscope sensing unit includes a wine glass shaped cavity (i.e., a wine glass portion) having a flat bottom, and a support rod is disposed outside the cavity and is disposed at the center of the bottom thereof. Such an arrangement leaves a large free space inside the resonator to facilitate the machining operation, in particular the machining of its inner diameter. Since the resonator has a reduced outer dimension and a smaller size, the resonator cannot be machined to have an inner diameter if the support rod is provided in the resonator.

The frequency f of the first and second order resonance modes (wave number equal to 2) of the goblet-shaped resonator 1 is proportional to the cylinder wall thickness, denoted e, and inversely proportional to the square of the cylinder radius, denoted R. Therefore, if a micro coriolis gyro is to be manufactured, R needs to be reduced, and the resonance frequency can be adjusted to a desired value by adjusting the value of the wall thickness e. The thickness of the harmonic oscillator is 0.3-1 mm, the average radius is 7-9 mm, and the resonance frequency is 6000-8000 Hz. For example, considering a nickel alloy steel material, a harmonic oscillator with a wall thickness of 0.5mm and an average radius of 7mm has a resonant frequency of about 6300Hz, which is close to the state of the art, but this time with a much smaller form factor, the wall thickness is still sufficient to provide stiffness during machining.

A plurality of piezoelectric ceramics 2 are attached to the outer wall of the harmonic oscillator 1 at a circumference and an equal angle, and are close to the bottom of the wine cup (i.e. on the vertical outer wall of the wine cup near the end of the support rod). This configuration is particularly advantageous in avoiding degradation of the quality factor of the resonator and improving performance. These piezoelectric ceramics 2 are used to drive and measure the first and second order resonance modes of the resonator 1. To this end, the top and bottom parallel surfaces of the piezoelectric ceramics 2 are metallized to make these surfaces electrically conductive and to allow electrical connection, for example using wire bonding (i.e. connecting wires 5).

The number of the piezoelectric ceramics 2 is a multiple of 2, and is divided into two groups, the number of the piezoelectric ceramics in each group being the same. One set is responsible for the primary modality and the other set is responsible for the secondary modality. The piezoelectric ceramics are uniformly distributed at 45 degrees, namely when the number of the piezoelectric ceramics is 8, the included angle between any two adjacent piezoelectric ceramics and the circle center is 45 degrees.

The preferred arrangement is based on 8 piezoceramics, the piezoceramics 2 being made of PZT ceramic material with a medium to high quality factor to maintain the quality factor of the harmonic oscillator.

In order to facilitate assembly and improve the positioning accuracy of the piezoelectric ceramics 2, a plurality of planar mounting surfaces are prepared on the outer surface of the resonator for mounting the piezoelectric ceramics, so as to ensure flat mounting of the piezoelectric ceramics and reduce mechanical stress, as shown in fig. 2(a) below. Of course, these planar mounting surfaces will be machined in a single clamp positioning process without moving the workpiece from the machining center to maintain positioning and concentricity accuracy. As shown in fig. 2(b), in order to improve the positioning accuracy, it is also conceivable to use a groove instead of the flat mounting surface of the piezoelectric ceramic.

In terms of assembly process, the piezoelectric ceramics 2 and the resonator support rods can be assembled to the SE base 3 by using an adhesive or welding process. In the case of soldering, it is advisable to apply a suitable surface coating to increase the wettability of the assembly surface. For example, the surface coating may be a thin layer of NiAu of 1 to 2 microns. Because the harmonic oscillator supporting rod and the piezoelectric ceramic are arranged on the same side, a simple electroplating process can be adopted, only interested surfaces are covered, and meanwhile, the edges of the harmonic oscillator are not influenced by the coating, which can generate adverse effect on the damping coefficient of a primary mode and a secondary mode.

The sensitive unit base 3 is made of CTE (coefficient of thermal expansion) and metal CTE-matched to the harmonic oscillator. Preferably in the shape of a circular disc.

The sensing unit base 3 is provided with a plurality of metal binding posts 4 in a penetrating mode, an insulating glass sealing piece is arranged between the binding posts 4 and the sensing unit base 3, and the number of the binding posts 4 is the same as that of the piezoelectric ceramics 2 attached to the harmonic oscillators.

Posts 4 are evenly distributed and positionally aligned with piezoceramic 2 to reduce the length of wire bonds 5 that electrically connect them to each piezoceramic and allow the use of automated wire bonding machines like the IC industry.

The sensitive unit base 3 comprises a plurality of grooves annularly arranged on the outer diameter thereof for mounting an external shock absorber 7 with an I-shaped cross section, wherein the external shock absorber is made of silicon-based or non-conductive damping materials, provides cut-off frequency far lower than first-order and second-order modal frequency and is higher than the measurement bandwidth obtained when SE is connected with a control loop electronic device of the SE.

The cross-section of the annular recess of the sensing unit base 3 and the outer I-shaped damper 7 is preferably biconical to enhance the robustness of shock and vibration along the Z-axis.

In a preferred arrangement, the cut-off frequency of the damper 7 is between 600Hz and 1 kHz.

The I-shaped damper 7 is held fixed to the user mounting structure 6. When clamped, the sensing unit base 3 is secured to the user mounting structure 6 by an I-shaped damper 7 and the position and alignment of the sensing axis of the damper 7 can be maintained under any operating mechanical and thermal conditions. This system has significant cost reduction and small size advantages over the state-of-the-art cylindrical coriolis gyroscopes, since the SE base double conical recess can be easily machined into a circular SE base that does not extend radially to include a triangular flange with mounting through holes.

Fig. 4 shows a top view of the SE design (fig. 4(a)) where the resonator is encapsulated under vacuum using a circular housing 9, which housing 9 can be soldered or welded to a circular metal base, and a bottom view showing its attachment to the SE base (e.g., with 8 posts) adjacent the board.

The front-end circuit board 8 appropriately (e.g., in pairs) connects the pin signals, converts the high-impedance sensed voltage signals into low-impedance signals that are transmitted to external control electronics via the connector 10, and also receives control signals from the control electronics via the connector. The connector is also used for transmitting other signals, such as electrical measurement ground signals, and signals from a temperature sensor 11 connected to the SE base or the cavity of the SE base. The temperature sensor is used for temperature monitoring and temperature calibration of bias, scale factor and misalignment errors of a Coriolis gyro formed by the SE and its control electronics.

Assuming an average outer diameter of 14mm and a wall thickness of 0.5mm for one resonator cylinder, we can expect a SE base outer diameter of 20mm and a housing outer diameter of 16 mm. Under these assumptions, the expected resonance frequency of the first and second order modes will be 6300Hz, and the SE (sensing element) can be mounted in a tubular structure with an outer diameter of 27 mm.

The above provides a detailed description of the sensing unit of the micro vibration gyroscope and the gyroscope provided by the embodiment of the present application. The above description of the embodiments is only for the purpose of helping to understand the method of the present application and its core ideas; meanwhile, for a person skilled in the art, according to the idea of the present application, there may be variations in the specific embodiments and the application scope, and in summary, the content of the present specification should not be construed as a limitation to the present application.

As used in the specification and claims, certain terms are used to refer to particular components. As one skilled in the art will appreciate, manufacturers may refer to a component by different names. This specification and claims do not intend to distinguish between components that differ in name but not function. In the following description and in the claims, the terms "include" and "comprise" are used in an open-ended fashion, and thus should be interpreted to mean "include, but not limited to. "substantially" means within an acceptable error range, and a person skilled in the art can solve the technical problem within a certain error range to substantially achieve the technical effect. The description which follows is a preferred embodiment of the present application, but is made for the purpose of illustrating the general principles of the application and not for the purpose of limiting the scope of the application. The protection scope of the present application shall be subject to the definitions of the appended claims.

It is also noted that the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a good or system that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such good or system. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of other like elements in a commodity or system that includes the element.

It should be understood that the term "and/or" as used herein is merely one type of association that describes an associated object, meaning that three relationships may exist, e.g., a and/or B may mean: a exists alone, A and B exist simultaneously, and B exists alone. In addition, the character "/" herein generally indicates that the former and latter related objects are in an "or" relationship.

The foregoing description shows and describes several preferred embodiments of the present application, but as aforementioned, it is to be understood that the application is not limited to the forms disclosed herein, but is not to be construed as excluding other embodiments and is capable of use in various other combinations, modifications, and environments and is capable of changes within the scope of the application as described herein, commensurate with the above teachings, or the skill or knowledge of the relevant art. And that modifications and variations may be effected by those skilled in the art without departing from the spirit and scope of the application, which is to be protected by the claims appended hereto.

Claims

1. a miniature vibrating gyroscope sensitive unit, comprising a housing, a sensitive unit base and a resonator, the housing is fixedly connected to the sensitive unit base, and the resonator is located inside the housing, it is characterized in that,

The resonator is in the shape of a goblet, including a wine glass part and an external support rod, one end of the support rod is fixedly connected with the bottom end of the wine glass part, and the other end is fixedly connected with the base of the sensitive unit; the resonance Several piezoelectric ceramics are uniformly attached to the vertical outer wall of the wine glass part; the piezoelectric ceramics are connected with the connecting posts through wires, and the connecting posts are embedded in the base of the sensitive unit through type.

2. The micro-vibration gyroscope sensitive unit according to claim 1, wherein the inner diameter of the wine glass portion is equally thick up and down, and the piezoelectric ceramic is evenly surrounded by the vertical outer wall of the wine glass portion near one end of the support rod superior.

3 . The micro vibrating gyroscope sensitive unit according to claim 2 , wherein the resonator has a wall thickness of 0.3-1 mm, an average radius of 7-9 mm, and a resonance frequency of 6000-8000 Hz. 4 .

4 . The micro vibrating gyroscope sensitive unit according to claim 1 , wherein a plurality of grooves are arranged on the outer periphery of the base of the sensitive unit, and an external shock absorber is arranged in the grooves. 5 .

5 . The micro vibrating gyroscope sensitive unit according to claim 1 , wherein the diameter of the base of the sensitive unit is less than 30 mm, and the outer diameter of the housing is less than 25 mm. 6 .

6 . The micro vibrating gyroscope sensitive unit according to claim 1 , wherein the parallel surfaces of the top and bottom of the piezoelectric ceramic have metal layers. 7 .

7 . The micro vibrating gyroscope sensitive unit according to claim 1 , wherein the sensitive unit base is a circular metal base; and the outer surface of the support rod is provided with a metal coating. 8 .

8 . The micro vibrating gyroscope sensitive unit according to claim 4 , wherein the external shock absorber has an I-shaped biconical section. 9 .

9 . The micro vibrating gyroscope sensitive unit according to claim 1 , wherein a blind installation hole is provided on the base of the sensitive unit; and a blind installation hole is provided between the outer end of the support rod and the blind installation hole. 10 . The fixed connection point, the fixed connection point is a bonding point or a welding point.

10. A miniature vibrating gyroscope, characterized in that the gyroscope comprises a control circuit and the sensitive unit according to any one of claims 1-9, and the control circuit is connected to the sensitive unit through the connecting post .