CN212965651U - Optical system for detecting surface of silicon substrate of solar cell panel - Google Patents
Optical system for detecting surface of silicon substrate of solar cell panel Download PDFInfo
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- CN212965651U CN212965651U CN202021482545.8U CN202021482545U CN212965651U CN 212965651 U CN212965651 U CN 212965651U CN 202021482545 U CN202021482545 U CN 202021482545U CN 212965651 U CN212965651 U CN 212965651U
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 25
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 25
- 239000010703 silicon Substances 0.000 title claims abstract description 25
- 230000003287 optical effect Effects 0.000 title claims abstract description 22
- 239000000758 substrate Substances 0.000 title claims description 24
- 238000001514 detection method Methods 0.000 claims abstract description 4
- 230000004323 axial length Effects 0.000 claims description 6
- 239000004065 semiconductor Substances 0.000 claims description 4
- 239000000835 fiber Substances 0.000 claims description 3
- 238000003491 array Methods 0.000 abstract description 7
- 235000009537 plain noodles Nutrition 0.000 abstract 4
- 238000010586 diagram Methods 0.000 description 3
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
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Abstract
The utility model discloses an optical system is used in surface detection of solar cell panel silicon chip, the play plain noodles of first spherical mirror and the income plain noodles of second spherical mirror are connected for edge contact, are equipped with the interval between the play plain noodles of second spherical mirror and the income plain noodles of third spherical mirror, and the microlens includes first microlens and second microlens, and the Y axle direction of the relative mirror surface of first microlens and second microlens all is equipped with spherical array structure. The utility model discloses a three spherical mirrors carry out the collimation to laser beam, pass through two microlens arrays again and focus at Y axle direction into linear light. The three spherical mirrors compress and collimate the divergence angle of the laser, the micro lens arrays converge the collimated light beams in the Y direction and diverge the light beams in the X direction, linear light spots with the length of 180-200mm and the width of 0.6-0.8mm are finally formed on the working surface, the overlapped light spot area between the adjacent micro lens arrays is 5mm, and the optimized overlapped light spots have the uniformity of about 90 percent.
Description
Technical Field
The utility model relates to an optics field especially relates to an optical system is used in surface detection of solar cell panel silicon substrate.
Background
The morphology of the surface of the silicon substrate of the solar cell panel is detected by irradiating the surface of the silicon substrate with 808nm semiconductor laser to excite the silicon substrate to emit light, receiving the light by an infrared camera and analyzing the image by software. In the linear light spot with large laser shaping growth degree, the adoption of a cylindrical mirror or a Powell prism can cause uneven energy distribution of the linear light spot, the whole linear light spot is in Gaussian distribution, and the central energy density is high while the edge energy density is low. In order to achieve uniformity of the whole light spot, the laser is shaped into linear light with the length of 180mm through a micro lens array.
SUMMERY OF THE UTILITY MODEL
The utility model discloses the main technical problem who solves provides an optical system for solar cell panel silicon substrate surface detection can obtain the homogeneity and require the linear light more than 90%.
In order to solve the technical problem, the utility model discloses a technical scheme be: provided is an optical system for detecting the surface of a silicon substrate of a solar cell panel, comprising: three spherical mirrors and two microlenses are sequentially arranged along the light incidence direction, the spherical mirrors respectively comprise a first spherical mirror, a second spherical mirror and a third spherical mirror, the light outgoing surface of the first spherical mirror is connected with the light incoming surface of the second spherical mirror in an edge contact manner, a distance is arranged between the light outgoing surface of the second spherical mirror and the light incoming surface of the third spherical mirror, the microlenses comprise a first microlens and a second microlens, and spherical array structures are arranged in the Y-axis direction of the relative mirror surfaces of the first microlens and the second microlens.
In a preferred embodiment of the present invention, the radius of curvature of the light incident surface and the light exiting surface of the first spherical mirror is 27.92 ± 0.01mm, the radius of curvature of the light incident surface of the second spherical mirror is 136.02 ± 0.01mm, the radius of curvature of the light exiting surface of the second spherical mirror is 28.348 ± 0.01mm, the radius of curvature of the light incident surface of the third spherical mirror is 81.8 ± 0.01mm, and the radius of curvature of the light exiting surface of the third spherical mirror is 59.7 ± 0.01 mm.
In a preferred embodiment of the present invention, the distance between the light source and the center of the light incident surface of the first spherical mirror is 32.29 ± 0.1mm, the distance between the center of the light emergent surface of the second spherical mirror and the center of the light incident surface of the third spherical mirror is 4.62 ± 0.1mm, and the distance between the center of the light emergent surface of the third spherical mirror and the center of the first microlens is 12.32 ± 0.1 mm.
In a preferred embodiment of the present invention, the center thickness of the first spherical mirror is 8 ± 0.1mm, the edge thickness is 7.5 ± 0.1mm, the center thickness of the second spherical mirror is 5 ± 0.1mm, the edge thickness is 2.6 ± 0.1mm, the center thickness of the third spherical mirror is 8 ± 0.1mm, and the edge thickness is 5.7 ± 0.1 mm.
In a preferred embodiment of the present invention, the axial length of the first spherical mirror, the second spherical mirror and the third spherical mirror is 180-200 mm.
In a preferred embodiment of the present invention, the light incident surface of the first microlens is a planar structure, the Y-axis direction of the light emitting surface is a spherical array structure, the Y-axis direction of the light incident surface of the second microlens is a spherical array structure, and the light emitting surface is a planar structure; the curvature radius of the spherical array is 1.1 +/-0.01 mm.
In a preferred embodiment of the present invention, the distance between the center of the first microlens and the center of the second microlens is 6.23 ± 0.1 mm.
In a preferred embodiment of the present invention, the center thickness of the first and second microlenses is 2 ± 0.1mm, the height is 25 ± 1mm, the axial length is 180 to 200mm, and the axial direction of the first microlens is perpendicular to the light incidence direction.
In a preferred embodiment of the present invention, the light source is emitted from a semiconductor multimode laser, and the divergence angle NA is 0.22; wavelength =808 nm; fiber diameter =200 μm, connection mode SMA 905.
The utility model has the advantages that: the utility model collimates the laser beam by three spherical mirrors, and focuses the laser beam into linear light in the Y-axis direction by two micro-lens arrays; the three spherical mirrors compress and collimate the divergence angle of the laser, the micro-lens array converges the collimated light beam in the Y direction and diverges the light beam in the X direction, and finally linear light spots with the length of 180 plus of 200mm and the width of 0.6-0.8mm are formed on the working surface, and the optimized uniformity of the overlapped light spots is about 90%.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings used in the description of the embodiments are briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained without inventive work, wherein:
FIG. 1 is a schematic structural view of a preferred embodiment of an optical system for detecting the surface of a silicon substrate of a solar cell panel according to the present invention;
FIG. 2 is a schematic view of a first spherical mirror in the optical system for inspecting the surface of the silicon substrate of the solar cell panel shown in FIG. 1;
FIG. 3 is a schematic view of a second spherical mirror in the optical system for inspecting the surface of the silicon substrate of the solar cell panel shown in FIG. 1;
FIG. 4 is a schematic structural diagram of a third spherical mirror in the optical system for detecting the surface of the silicon substrate of the solar cell panel shown in FIG. 1;
FIG. 5 is a schematic view of a first microlens in the optical system for inspecting the surface of the silicon substrate of the solar cell panel shown in FIG. 1;
FIG. 6 is a distribution diagram of spots shaped by an optical system for detecting the surface of the silicon substrate of the solar cell panel shown in FIG. 1.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. The components of embodiments of the present invention, as generally described and illustrated in the figures herein, may be arranged and designed in a wide variety of different configurations.
Thus, the following detailed description of the embodiments of the present invention, presented in the accompanying drawings, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.
It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures.
In the description of the present invention, it should be noted that the directions or positional relationships indicated by the terms "front" and "rear" and the like are based on the directions or positional relationships shown in the drawings, or the directions or positional relationships that the products of the present invention are conventionally placed when used, and are only for convenience of description and simplification of the description, but do not indicate or imply that the device or element to be referred must have a specific direction, be constructed and operated in a specific direction, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and the like are used merely to distinguish one description from another, and are not to be construed as indicating or implying relative importance.
In the description of the present invention, it should also be noted that, unless otherwise explicitly specified or limited, the terms "disposed" and "connected" are to be interpreted broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.
In the present disclosure, unless otherwise expressly stated or limited, the first feature may comprise both the first and second features directly contacting each other, and also may comprise the first and second features not being directly contacting each other but being in contact with each other by means of further features between them. Also, the first feature being above, on or above the second feature includes the first feature being directly above and obliquely above the second feature, or merely means that the first feature is at a higher level than the second feature. A first feature that underlies, and underlies a second feature includes a first feature that is directly under and obliquely under a second feature, or simply means that the first feature is at a lesser level than the second feature.
The embodiment of the utility model provides an include:
as shown in fig. 1, an optical system for detecting the surface of a silicon substrate of a solar cell panel includes: three spherical mirrors and two micro-lenses are sequentially arranged along the incident direction of light.
The light source is emitted by a semiconductor multimode laser, and the divergence angle NA is 0.22; wavelength =808 nm; fiber diameter =200 μm, connection mode SMA 905.
The spherical mirrors respectively comprise a first spherical mirror 1, a second spherical mirror 2 and a third spherical mirror 3, the light-emitting surface of the first spherical mirror 1 is connected with the light-in surface of the second spherical mirror 2 in an edge contact manner, and a distance is arranged between the light-emitting surface of the second spherical mirror 2 and the light-in surface of the third spherical mirror 3.
The micro-lens comprises a first micro-lens 4 and a second micro-lens 5, and the Y-axis directions of the opposite mirror surfaces of the first micro-lens 4 and the second micro-lens 5 are both provided with a spherical array structure.
As shown in fig. 2, the curvature radius of the light incident surface and the light emergent surface of the first spherical mirror 1 of the present invention is 27.92 ± 0.01mm, the center thickness of the first spherical mirror 1 is 8 ± 0.1mm, the edge thickness is 7.5 ± 0.1mm, and the height is 25 ± 1 mm.
As shown in fig. 3, the radius of curvature of the light incident surface of the second spherical mirror 2 is 136.02 ± 0.01mm, the radius of curvature of the light emergent surface of the second spherical mirror is 28.348 ± 0.01mm, the center thickness of the second spherical mirror 2 is 5 ± 0.1mm, the edge thickness is 2.6 ± 0.1mm, and the height is 25 ± 1 mm.
As shown in fig. 4, the radius of curvature of the light incident surface of the third spherical mirror 3 is 81.8 ± 0.01mm, and the radius of curvature of the light emitting surface of the third spherical mirror 3 is 59.7 ± 0.01 mm. The third spherical mirror 3 has a center thickness of 8 + -0.1, an edge thickness of 5.7 + -0.1 mm, and a height of 25 + -1 mm.
As shown in fig. 1, the distance from the light source 6 to the center of the light incident surface of the first spherical mirror 1 is 32.29 ± 0.1mm, the distance between the center of the light emitting surface of the second spherical mirror 2 and the center of the light incident surface of the third spherical mirror 3 is 4.62 ± 0.1mm, and the distance between the center of the light emitting surface of the third spherical mirror 3 and the center of the first microlens 4 is 12.32 ± 0.1 mm. The distance between the center of the first micro lens 4 and the center of the second micro lens 5 is 6.23 +/-0.1 mm.
The axial lengths of the first spherical mirror 1, the second spherical mirror 2 and the third spherical mirror 3 are all 180-200 mm.
As shown in fig. 5, the light incident surface of the first microlens 4 is a planar structure, the Y-axis direction of the light emergent surface is a spherical array structure, the Y-axis direction of the light incident surface of the second microlens 5 is a spherical array structure, and the light emergent surface is a planar structure. The curvature radius of the spherical array is 1.1 +/-0.01 mm.
The central thickness of the first micro lens 4 and the second micro lens 5 is 2 +/-0.1 mm, the height of the first micro lens is 25 +/-1 mm, the axial length of the first micro lens is 180-200mm, and the axial direction of the first micro lens 4 is perpendicular to the incident direction of light rays.
The utility model discloses a three spherical mirrors carry out the collimation to laser beam, pass through two microlens arrays again and focus at Y axle direction into linear light. The three spherical mirrors compress and collimate the divergence angle of the laser, the micro lens arrays converge the collimated light beams in the Y direction, the light beams in the X direction diverge, linear light spots with the length of 180-200mm and the width of 0.6-0.8mm are finally formed on the working surface, the light spot area is overlapped by 5mm between the adjacent micro lens arrays, and the light spot distribution diagram with the optimized overlapping light spots and the optimized uniformity degree of about 90 percent is shown in figure 6.
The above only is the embodiment of the present invention, not limiting the patent scope of the present invention, all of which utilize the equivalent structure or equivalent flow transformation made by the content of the specification of the present invention, or directly or indirectly applied to other related technical fields, all included in the same way in the patent protection scope of the present invention.
Claims (9)
1. The utility model provides an optical system is used in detection of solar cell panel silicon substrate surface which characterized in that includes: three spherical mirrors and two microlenses are sequentially arranged along the light incidence direction, the spherical mirrors respectively comprise a first spherical mirror, a second spherical mirror and a third spherical mirror, the light outgoing surface of the first spherical mirror is connected with the light incoming surface of the second spherical mirror in an edge contact manner, a distance is arranged between the light outgoing surface of the second spherical mirror and the light incoming surface of the third spherical mirror, the microlenses comprise a first microlens and a second microlens, and spherical array structures are arranged in the Y-axis direction of the relative mirror surfaces of the first microlens and the second microlens.
2. The optical system for detecting the surface of the silicon substrate of the solar cell panel as claimed in claim 1, wherein the radius of curvature of the light incident surface and the light emergent surface of the first spherical mirror is 27.92 ± 0.01mm, the radius of curvature of the light incident surface of the second spherical mirror is 136.02 ± 0.01mm, the radius of curvature of the light emergent surface of the second spherical mirror is 28.348 ± 0.01mm, the radius of curvature of the light incident surface of the third spherical mirror is 81.8 ± 0.01mm, and the radius of curvature of the light emergent surface of the third spherical mirror is 59.7 ± 0.01 mm.
3. The optical system for detecting the surface of the silicon substrate of the solar cell panel as claimed in claim 1, wherein the distance from the light source to the center of the light incident surface of the first spherical mirror is 32.29 ± 0.1mm, the distance between the center of the light emergent surface of the second spherical mirror and the center of the light incident surface of the third spherical mirror is 4.62 ± 0.1mm, and the distance between the center of the light emergent surface of the third spherical mirror and the center of the first micro lens is 12.32 ± 0.1 mm.
4. The optical system for inspecting the surface of the silicon substrate of the solar cell panel according to claim 1, wherein the first spherical mirror has a center thickness of 8 ± 0.1mm and an edge thickness of 7.5 ± 0.1mm, the second spherical mirror has a center thickness of 5 ± 0.1mm and an edge thickness of 2.6 ± 0.1mm, and the third spherical mirror has a center thickness of 8 ± 0.1 and an edge thickness of 5.7 ± 0.1 mm.
5. The optical system for detecting the surface of the silicon substrate of the solar cell panel according to claim 1, wherein the axial lengths of the first spherical mirror, the second spherical mirror and the third spherical mirror are 180 to 200 mm.
6. The optical system for detecting the surface of the silicon substrate of the solar cell panel as claimed in claim 1, wherein the light incident surface of the first micro lens is of a planar structure, the Y-axis direction of the light incident surface of the first micro lens is of a spherical array structure, the Y-axis direction of the light incident surface of the second micro lens is of a spherical array structure, and the light incident surface is of a planar structure; the curvature radius of the spherical array is 1.1 +/-0.01 mm.
7. The optical system for inspecting the surface of the silicon substrate of the solar panel according to claim 1, wherein the distance between the center of the first microlens and the center of the second microlens is 6.23 ± 0.1 mm.
8. The optical system for detecting the surface of the silicon substrate of the solar cell panel as claimed in claim 1, wherein the first micro lens and the second micro lens have a central thickness of 2 ± 0.1mm, a height of 25 ± 1mm, an axial length of 180 to 200mm, and an axial direction of the first micro lens is perpendicular to a light incidence direction.
9. The optical system for detecting the surface of the silicon substrate of the solar cell panel according to claim 1, wherein a light source is emitted by a semiconductor multimode laser, and the divergence angle NA is 0.22; wavelength =808 nm; fiber diameter =200 μm, connection mode SMA 905.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202021482545.8U CN212965651U (en) | 2020-07-24 | 2020-07-24 | Optical system for detecting surface of silicon substrate of solar cell panel |
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| CN202021482545.8U CN212965651U (en) | 2020-07-24 | 2020-07-24 | Optical system for detecting surface of silicon substrate of solar cell panel |
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| CN212965651U true CN212965651U (en) | 2021-04-13 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111983814A (en) * | 2020-07-24 | 2020-11-24 | 常州市奥普泰克光电科技有限公司 | Optical system for detecting surface of silicon substrate of solar cell panel |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111983814A (en) * | 2020-07-24 | 2020-11-24 | 常州市奥普泰克光电科技有限公司 | Optical system for detecting surface of silicon substrate of solar cell panel |
| CN111983814B (en) * | 2020-07-24 | 2024-06-18 | 常州市奥普泰克光电科技有限公司 | Optical system for detecting surface of silicon substrate of solar cell panel |
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