CN220166266U - Positioning and mounting tool and thin film deposition equipment - Google Patents
Positioning and mounting tool and thin film deposition equipment Download PDFInfo
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- CN220166266U CN220166266U CN202321538701.1U CN202321538701U CN220166266U CN 220166266 U CN220166266 U CN 220166266U CN 202321538701 U CN202321538701 U CN 202321538701U CN 220166266 U CN220166266 U CN 220166266U
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- positioning
- rows
- cavity
- cavity penetrating
- pipelines
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- 238000000427 thin-film deposition Methods 0.000 title claims abstract description 19
- 230000000149 penetrating effect Effects 0.000 claims abstract description 94
- 238000009434 installation Methods 0.000 description 8
- 238000000151 deposition Methods 0.000 description 3
- 230000008021 deposition Effects 0.000 description 3
- 239000010408 film Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000004696 Poly ether ether ketone Substances 0.000 description 2
- 229920002530 polyetherether ketone Polymers 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
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- Supports For Pipes And Cables (AREA)
Abstract
The embodiment of the utility model provides a positioning and mounting tool and thin film deposition equipment, and relates to the technical field of thin film deposition. The positioning and mounting tool is provided with a plurality of rows of positioning pieces, and the plurality of rows of positioning pieces are used for corresponding to the plurality of rows of cavity penetrating pipelines one by one; each row of locating pieces comprises at least one locating piece, and the locating pieces in each row of locating pieces are used for being matched with the same number of cavity penetrating holes in the corresponding row of cavity penetrating pipelines so as to locate the plurality of rows of cavity penetrating pipelines, and the locating pieces can be convenient for locating the plurality of rows of cavity penetrating pipelines.
Description
Technical Field
The utility model relates to the technical field of film deposition, in particular to a positioning and mounting tool and film deposition equipment.
Background
The thin film deposition equipment is installed at a later stage and is particularly required to be positioned when being installed with a plurality of rows of multi-hole-site cavity penetrating pipelines, if the cavity penetrating pipelines are not positioned, dislocation can occur among the plurality of rows of cavity penetrating pipelines, so that the cavity penetrating holes on the cavity penetrating pipelines are not aligned with the hole sites of the upper end connecting blocks in the thin film deposition equipment, the risk of gas leakage can be caused, and therefore, how to position the plurality of rows of cavity penetrating pipelines is a problem to be solved urgently.
Disclosure of Invention
The utility model aims at providing a positioning and mounting tool which can facilitate positioning of multiple rows of cavity penetrating pipelines.
The utility model also aims to provide a thin film deposition device which can facilitate positioning of multiple rows of cavity penetrating pipelines.
Embodiments of the utility model may be implemented as follows:
the embodiment of the utility model provides a positioning and mounting tool, wherein a plurality of rows of positioning pieces are arranged on the positioning and mounting tool, and the plurality of rows of positioning pieces are used for being in one-to-one correspondence with a plurality of rows of cavity penetrating pipelines; each row of locating pieces comprises at least one locating piece, and each row of locating pieces is used for being matched with a corresponding row of cavity penetrating holes in the cavity penetrating pipelines so as to locate the multiple rows of cavity penetrating pipelines.
Optionally, a plurality of positioning members in the plurality of rows of positioning members are arranged in a rectangular shape.
Optionally, the positioning and installing tool is provided with a first surface and a second surface which are opposite, the positioning piece is a positioning pin, and the positioning pin is arranged on the second surface.
Optionally, the length of the locating pin is 11-15mm.
Optionally, a boss is disposed on the second surface.
Optionally, the number of the boss is two, along the multirow the direction of arranging of setting element, two the boss symmetry sets up.
Optionally, the height of the boss is 4-8mm.
Optionally, a through hole is formed in the middle of the positioning and mounting tool, and the through hole penetrates through the first surface and the second surface.
Optionally, the edge of the positioning installation tool is provided with a chamfer.
The embodiment of the utility model also provides a thin film deposition device, which is provided with the positioning and mounting tool, and comprises a cavity and cavity penetrating pipelines, wherein a plurality of rows of cavity penetrating pipelines are arranged on the cavity, a plurality of rows of positioning pieces are in one-to-one correspondence with a plurality of rows of cavity penetrating pipelines, and each row of positioning pieces is used for being matched with the same number of cavity penetrating holes in a corresponding row of cavity penetrating pipelines so as to position the plurality of rows of cavity penetrating pipelines.
The positioning and mounting tool and the thin film deposition equipment have the beneficial effects that: in order to facilitate positioning of the multiple rows of cavity penetrating pipelines, a positioning and mounting tool is designed, multiple rows of positioning pieces are arranged on the positioning and mounting tool, and the multiple rows of positioning pieces correspond to the multiple rows of cavity penetrating pipelines one by one; the locating piece in every row of locating pieces is matched with the cavity penetrating holes of the same quantity in a row of corresponding cavity penetrating pipelines, so that the cavity penetrating holes in the cavity penetrating pipelines are located, the cavity penetrating holes in the cavity penetrating pipelines can be aligned with the hole positions of the upper connecting blocks in the film deposition equipment, and the risk of gas leakage is reduced.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present utility model, the drawings that are needed in the embodiments will be briefly described below, it being understood that the following drawings only illustrate some embodiments of the present utility model and therefore should not be considered as limiting the scope, and other related drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a front view of a positioning and mounting tool in an embodiment of the utility model;
FIG. 2 is a side view of a positioning and mounting fixture in an embodiment of the present utility model;
FIG. 3 is a schematic diagram for showing the matching relationship between a positioning and installing tool and a cavity penetrating pipeline in an embodiment of the utility model;
fig. 4 is a schematic structural view for showing a lumen passing pipeline according to an embodiment of the present utility model.
Icon: 100-positioning and installing a tool; 110-a first surface; 120-a second surface; 121-a positioning piece; 122-boss; 130-a through hole; 140-chamfering; 200-cavity; 300-a cavity penetrating pipeline; 310-through-lumen holes.
Detailed Description
For the purpose of making the objects, technical solutions and advantages of the embodiments of the present utility model more apparent, the technical solutions of the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present utility model, and it is apparent that the described embodiments are some embodiments of the present utility model, but not all embodiments of the present utility model. The components of the embodiments of the present utility model generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations.
Thus, the following detailed description of the embodiments of the utility model, as presented in the figures, is not intended to limit the scope of the utility model, as claimed, but is merely representative of selected embodiments of the utility model. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
It should be noted that: like reference numerals and letters denote like items in the following figures, and thus once an item is defined in one figure, no further definition or explanation thereof is necessary in the following figures.
In the description of the present utility model, it should be noted that, if the terms "upper", "lower", "inner", "outer", and the like indicate an azimuth or a positional relationship based on the azimuth or the positional relationship shown in the drawings, or the azimuth or the positional relationship in which the inventive product is conventionally put in use, it is merely for convenience of describing the present utility model and simplifying the description, and it is not indicated or implied that the apparatus or element referred to must have a specific azimuth, be configured and operated in a specific azimuth, and thus it should not be construed as limiting the present utility model.
Furthermore, the terms "first," "second," and the like, if any, are used merely for distinguishing between descriptions and not for indicating or implying a relative importance.
It should be noted that the features of the embodiments of the present utility model may be combined with each other without conflict.
The inventor of the present utility model found that when the cavity penetrating pipeline, especially the cavity penetrating pipelines with multiple rows of multiple holes, is installed at the later stage of the thin film deposition equipment, the cavity penetrating pipeline needs to be positioned, if the cavity penetrating pipeline is not positioned, the multiple rows of cavity penetrating pipelines can be dislocated, so that the cavity penetrating holes on the cavity penetrating pipeline are not aligned with the holes of the upper connecting block in the thin film deposition equipment, and the risk of gas leakage may exist, so how to position the multiple rows of cavity penetrating pipelines becomes a problem to be solved urgently. The embodiment of the utility model provides a positioning and installing tool which is at least used for solving the technical problem.
Referring to fig. 1-4, an embodiment of the present utility model provides a positioning and mounting tool 100, which is applied to a thin film deposition apparatus, wherein the thin film deposition apparatus includes a cavity 200 and a cavity penetrating pipe 300, a plurality of rows of cavity penetrating pipes 300 are disposed on the cavity 200, and a plurality of cavity penetrating holes 310 are disposed on each row of cavity penetrating pipes 300.
In the embodiment of the utility model, three rows of cavity penetrating pipelines 300 are arranged, the three rows of cavity penetrating pipelines 300 are placed in the grooves of the cavity 200, three cavity penetrating holes 310 are arranged on the middle row of cavity penetrating pipelines 300, and five cavity penetrating holes 310 are arranged on the other two rows of cavity penetrating pipelines 300; the cavity penetrating pipeline 300 is provided with a threaded hole, after the cavity penetrating pipeline 300 is positioned by the positioning and mounting tool 100, the cavity penetrating pipeline 300 is fixed on the cavity 200 through bolts, and at the moment, the position of the cavity penetrating pipeline 300 cannot deviate.
In other embodiments, the number of rows of the transluminal tube 300 may be two or four, and the number of transluminal holes 310 on each row of the transluminal tube 300 may be two, four or six. It is understood that the number of rows of the through-lumen tubing 300 and the number of through-lumen holes 310 on each row of the through-lumen tubing 300 may depend on the actual conditions.
The positioning and mounting tool 100 is provided with a plurality of rows of positioning pieces 121, and the plurality of rows of positioning pieces 121 are used for corresponding to the plurality of rows of cavity penetrating pipelines 300 one by one; each row of positioning members 121 includes at least one positioning member 121, and the positioning members 121 in each row of positioning members 121 are configured to cooperate with an equal number of cavity-penetrating holes 310 in a corresponding row of cavity-penetrating pipes 300 to position multiple rows of cavity-penetrating pipes 300.
For example, when each row of positioning members 121 includes one positioning member 121, the one positioning member 121 is configured to cooperate with one cavity-penetrating hole 310 in a corresponding row of cavity-penetrating pipes 300; when each row of positioning members 121 includes a plurality of positioning members 121, the plurality of positioning members 121 are configured to mate with a plurality of cavity-penetrating holes 310 in a corresponding row of cavity-penetrating pipes 300.
In order to facilitate positioning of the multiple rows of cavity penetrating pipelines 300, a positioning and mounting tool 100 is designed, multiple rows of positioning pieces 121 are arranged on the positioning and mounting tool 100, and the multiple rows of positioning pieces 121 correspond to the multiple rows of cavity penetrating pipelines 300 one by one; the locating pieces 121 in each row of locating pieces 121 are matched with the same number of cavity penetrating holes 310 in the corresponding row of cavity penetrating pipelines 300, so that the plurality of rows of cavity penetrating pipelines 300 are located, then the cavity penetrating pipelines 300 are fixed through bolts, after the locating installation tool 100 is taken down, the cavity penetrating holes 310 in the cavity penetrating pipelines 300 can be aligned with the hole sites of the upper connecting blocks in the thin film deposition equipment, and the risk of gas leakage is reduced.
In the embodiment of the present utility model, the number of the positioning members 121 in each row of the positioning members 121 is two, and the plurality of positioning members 121 in the plurality of rows of the positioning members 121 are arranged in a rectangular shape.
It should be noted that, the number of rows of the positioning members 121 is three, which is consistent with the number of rows of the cavity penetrating pipes 300; six positioning pieces 121 of the three rows of positioning pieces 121 are arranged in a rectangular shape, and in the arrangement direction of the three rows of positioning pieces 121, the connecting line direction of the three positioning pieces 121 is identical to the arrangement direction of the three rows of positioning pieces 121.
In fact, when the three positioning members 121 are matched with the three-row cavity-penetrating pipe 300, three positioning members 121 are matched with three cavity-penetrating holes 310 on the upper side of the three-row cavity-penetrating pipe 300 in the arrangement direction of the three-row positioning members 121, and the other three positioning members 121 are matched with three cavity-penetrating holes 310 on the lower side of the three-row cavity-penetrating pipe 300, so that dislocation of the cavity-penetrating holes 310 on the three-row cavity-penetrating pipe 300 is unlikely to occur.
In other embodiments, three positioning members 121 in the arrangement direction of the three rows of positioning members 121 are matched with three cavity penetrating holes 310 on the upper side or the lower side of the three rows of cavity penetrating pipelines 300, and the other three positioning members 121 are matched with three cavity penetrating holes 310 in the middle of the three rows of cavity penetrating pipelines 300, so that the cavity penetrating holes 310 on the three rows of cavity penetrating pipelines 300 are not easy to be misplaced.
In the embodiment of the utility model, the positioning and mounting tool 100 has a first surface 110 and a second surface 120 opposite to each other, and the positioning element 121 is a positioning pin and the positioning pin is disposed on the second surface 120.
It should be noted that, when the positioning installation tool 100 is used to position the cavity penetrating pipe 300, the second surface 120 is used to face the cavity 200, and the front end of the positioning pin is rounded, so that the positioning pin is convenient to insert into the cavity penetrating hole 310.
Wherein the distance between the first surface 110 and the second surface 120 is 18-22mm, e.g., the distance between the first surface 110 and the second surface 120 is 18mm, 20mm or 22mm. It is appreciated that the distance between the first surface 110 and the second surface 120 may be selected within the above range depending on the actual conditions.
In the embodiment of the utility model, the length of the locating pin is 11-15mm.
It should be noted that the length direction of the positioning pin is consistent with the connecting line direction of the first surface 110 and the second surface 120, and the length of the positioning pin may be 11mm, 13mm or 15mm. It will be appreciated that the length of the locating pin may be selected within the above range depending on the actual operating conditions.
In an embodiment of the present utility model, the second surface 120 is provided with a boss 122.
It should be noted that, the boss 122 is protruding on the second surface 120, the boss 122 is used for being abutted against the surface of the cavity 200, when the boss 122 is abutted against the surface of the cavity 200, a gap is formed between the second surface 120 and the surface of the cavity 200, and the matching condition of the positioning pin and the cavity penetrating hole 310 on the cavity penetrating pipeline 300 can be conveniently observed through the gap.
In the embodiment of the present utility model, the number of the bosses 122 is two, and the two bosses 122 are symmetrically arranged along the arrangement direction of the multiple rows of positioning members 121.
Through the symmetry setting two boss 122, utilize the surface butt of these two boss 122 and cavity 200 can make location installation frock 100 comparatively steady, promote the stability and the validity of location installation frock 100.
In other embodiments, the number of bosses 122 may be three, four, or more, it being understood that the number of bosses 122 may be selected based on actual conditions.
In an embodiment of the present utility model, the height of the boss 122 is 4-8mm.
It should be noted that the height direction of the boss 122 is the protruding direction of the boss 122, and the height of the boss 122 may be 4mm, 6mm, or 8mm. It is appreciated that the height of the boss 122 may be selected within the above range depending on the actual operating conditions.
In the embodiment of the present utility model, the cross-sectional shape of the boss 122 parallel to the second surface 120 is rectangular, and in other embodiments, the cross-sectional shape of the boss 122 parallel to the second surface 120 may be circular or polygonal, and it is understood that the cross-sectional shape of the boss 122 parallel to the second surface 120 may be selected according to practical conditions.
In addition, a through hole 130 is formed in the middle of the positioning and mounting tool 100, and the through hole 130 penetrates through the first surface 110 and the second surface 120.
Through set up through-hole 130 at the middle part of location installation frock 100, can alleviate the weight of location installation frock 100 and save material cost, in addition, also can observe the cooperation condition of locating pin and the cavity hole 310 of wearing on the cavity pipeline 300 through this through-hole 130.
In addition, the edges of the positioning and mounting fixture 100 are provided with chamfers 140.
It should be noted that, the upper side edge of the positioning and mounting tool 100 is symmetrically provided with two chamfers 140, and the two chamfers 140 can better avoid the interference between the positioning and mounting tool 100 and the circular ring on the cavity 200.
In the embodiment of the utility model, the positioning and mounting tool 100 is integrally manufactured by adopting polyether-ether-ketone materials, and the polyether-ether-ketone materials have moderate hardness, so that the requirements of hardness and no damage to the surface of the cavity penetrating pipeline can be met.
In summary, the embodiment of the utility model provides a positioning and mounting tool 100 and a thin film deposition apparatus, wherein a plurality of rows of positioning members 121 are disposed on the positioning and mounting tool 100, and the plurality of rows of positioning members 121 are in one-to-one correspondence with a plurality of rows of cavity penetrating pipelines 300; the locating pieces 121 in each row of locating pieces 121 are matched with the same number of cavity penetrating holes 310 in the corresponding row of cavity penetrating pipelines 300, so that the plurality of rows of cavity penetrating pipelines 300 are located, then the cavity penetrating pipelines 300 are fixed through bolts, after the locating installation tool 100 is taken down, the cavity penetrating holes 310 in the cavity penetrating pipelines 300 can be aligned with the hole sites of the upper connecting blocks in the thin film deposition equipment, and the risk of gas leakage is reduced.
The foregoing is merely illustrative of the present utility model, and the present utility model is not limited thereto, and any changes or substitutions easily contemplated by those skilled in the art within the scope of the present utility model should be included in the present utility model. Therefore, the protection scope of the present utility model shall be subject to the protection scope of the claims.
Claims (10)
1. The positioning and mounting tool is applied to thin film deposition equipment and is characterized in that a plurality of rows of positioning pieces (121) are arranged on the positioning and mounting tool (100), and the plurality of rows of positioning pieces (121) are used for being in one-to-one correspondence with the plurality of rows of cavity penetrating pipelines (300); each row of positioning pieces (121) comprises at least one positioning piece (121), and each row of positioning pieces (121) is used for being matched with a cavity penetrating hole (310) in a corresponding row of cavity penetrating pipelines (300) so as to position multiple rows of cavity penetrating pipelines (300).
2. The positioning and mounting fixture according to claim 1, wherein a plurality of positioning members (121) among the plurality of rows of positioning members (121) are arranged in a rectangular shape.
3. The positioning and mounting fixture according to claim 1, wherein the positioning and mounting fixture (100) has a first surface (110) and a second surface (120) opposite to each other, and the positioning member (121) is a positioning pin, and the positioning pin is disposed on the second surface (120).
4. A positioning and mounting fixture according to claim 3, wherein the length of the positioning pin is 11-15mm.
5. A positioning and mounting fixture according to claim 3, characterized in that the second surface (120) is provided with a boss (122).
6. The positioning and mounting fixture according to claim 5, wherein the number of the bosses (122) is two, and the two bosses (122) are symmetrically arranged along the arrangement direction of the positioning members (121) in a plurality of rows.
7. The positioning and mounting fixture according to claim 5, characterized in that the height of the boss (122) is 4-8mm.
8. A positioning and mounting fixture according to claim 3, characterized in that a through hole (130) is provided in the middle of the positioning and mounting fixture (100), the through hole (130) penetrating the first surface (110) and the second surface (120).
9. The positioning and mounting fixture according to claim 1, characterized in that the edges of the positioning and mounting fixture (100) are provided with chamfers (140).
10. A thin film deposition apparatus, wherein the positioning and mounting tool (100) according to any one of claims 1 to 9 is applied, the thin film deposition apparatus comprises a cavity (200) and a cavity penetrating pipeline (300), a plurality of rows of cavity penetrating pipelines (300) are arranged on the cavity (200), a plurality of rows of positioning pieces (121) are used for being in one-to-one correspondence with a plurality of rows of cavity penetrating pipelines (300), and each row of positioning pieces (121) is used for being matched with an equal number of cavity penetrating holes (310) in a corresponding row of cavity penetrating pipelines (300) so as to position a plurality of rows of cavity penetrating pipelines (300).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321538701.1U CN220166266U (en) | 2023-06-15 | 2023-06-15 | Positioning and mounting tool and thin film deposition equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321538701.1U CN220166266U (en) | 2023-06-15 | 2023-06-15 | Positioning and mounting tool and thin film deposition equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220166266U true CN220166266U (en) | 2023-12-12 |
Family
ID=89062889
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321538701.1U Active CN220166266U (en) | 2023-06-15 | 2023-06-15 | Positioning and mounting tool and thin film deposition equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220166266U (en) |
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2023
- 2023-06-15 CN CN202321538701.1U patent/CN220166266U/en active Active
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