CN2919209Y - Piezoelectric Resonant Membrane Sensors - Google Patents
Piezoelectric Resonant Membrane Sensors Download PDFInfo
- Publication number
- CN2919209Y CN2919209Y CN 200620096802 CN200620096802U CN2919209Y CN 2919209 Y CN2919209 Y CN 2919209Y CN 200620096802 CN200620096802 CN 200620096802 CN 200620096802 U CN200620096802 U CN 200620096802U CN 2919209 Y CN2919209 Y CN 2919209Y
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- Prior art keywords
- signal
- piezoelectric element
- piezoelectric
- electrode
- vibrating diaphragm
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- Expired - Lifetime
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- 239000012528 membrane Substances 0.000 title description 2
- 238000001514 detection method Methods 0.000 claims abstract description 15
- 229910001220 stainless steel Inorganic materials 0.000 claims abstract description 4
- 239000010935 stainless steel Substances 0.000 claims abstract description 4
- 238000005259 measurement Methods 0.000 claims description 8
- 239000000463 material Substances 0.000 claims description 6
- 230000005284 excitation Effects 0.000 claims description 5
- 238000000034 method Methods 0.000 claims description 4
- 238000005245 sintering Methods 0.000 claims description 4
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims 1
- 229910010293 ceramic material Inorganic materials 0.000 claims 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical class [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 claims 1
- 229910052709 silver Inorganic materials 0.000 claims 1
- 239000004332 silver Substances 0.000 claims 1
- 230000035945 sensitivity Effects 0.000 abstract description 2
- 230000008014 freezing Effects 0.000 description 17
- 238000007710 freezing Methods 0.000 description 17
- 238000005086 pumping Methods 0.000 description 6
- 230000000694 effects Effects 0.000 description 4
- 238000012360 testing method Methods 0.000 description 4
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 229910052746 lanthanum Inorganic materials 0.000 description 2
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 238000003466 welding Methods 0.000 description 2
- TVEXGJYMHHTVKP-UHFFFAOYSA-N 6-oxabicyclo[3.2.1]oct-3-en-7-one Chemical compound C1C2C(=O)OC1C=CC2 TVEXGJYMHHTVKP-UHFFFAOYSA-N 0.000 description 1
- 241000220317 Rosa Species 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000002269 spontaneous effect Effects 0.000 description 1
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- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
Abstract
压电谐振膜片式传感器，属于传感器，克服现有振动筒结冰传感器的局限，用于对结冰现象进行检测。本实用新型筒状不锈钢壳体一端焊接振动膜片，另一端由后盖板封闭形成密闭腔；(1)所述振动膜片上粘结有压电元件，密闭腔壁紧靠压电元件和振动膜片装有测温元件，压电元件和测温元件通过穿过密闭腔的带屏蔽层电缆与驱动和信号检测电子线路电信号连接；(2)所述压电元件组成为：压电元件体一面连接参考地电极，压电元件体另一面连接驱动电极以及为驱动电极所围绕的信号电极。本实用新型对冰层检测的灵敏度高、功耗低、尺寸小，可齐平安装于一些检测面上，如公路、飞机机翼前缘等。
A piezoelectric resonant diaphragm sensor belongs to sensors, which overcomes the limitations of existing vibrating tube icing sensors and is used for detecting icing phenomena. One end of the cylindrical stainless steel shell of the utility model is welded with a vibrating diaphragm, and the other end is closed by a rear cover to form a closed chamber; (1) the vibrating diaphragm is bonded with a piezoelectric element, and the wall of the airtight chamber is close to the piezoelectric element and The vibrating diaphragm is equipped with a temperature-measuring element, and the piezoelectric element and the temperature-measuring element are electrically connected to the drive and signal detection electronic circuit through a shielded cable passing through the closed cavity; (2) The piezoelectric element is composed of: piezoelectric One side of the element body is connected to the reference ground electrode, and the other side of the piezoelectric element body is connected to the driving electrode and the signal electrode surrounded by the driving electrode. The utility model has high sensitivity to ice layer detection, low power consumption, and small size, and can be installed flush on some detection surfaces, such as roads, leading edges of aircraft wings, and the like.
Description
Technical field
The utility model belongs to a kind of sensor, is used for the phenomenon of freezing is detected.
Background technology
Freezing is a kind of spontaneous phenomenon that may work the mischief, and can hinder normally taking off of aircraft and lands as icing on the aircraft runway; It is out of control that icing meeting on the highway is skidded automobile, causes traffic hazard; Can produce at some position of body (as the leading edge of a wing) when aircraft aloft flies and freeze the safe flight of serious threat aircraft.
Freezing sensor is to survey a kind of information acquisition device or the device that the do not freeze generation and the icing order of severity being arranged.Existing freezing sensor is based on vibration tube principle, to vibrate tube and make the rod-type detector bar, the vibration tube is made flexible harmonic moving under electromagnetic force drives, when having icing phenomenon to take place on the detector bar, the resonance frequency of vibration tube can descend, and the bright icing degree of speaking more more of descending is serious more.The application of this freezing sensor is restricted, as is used for aircraft, then can not flush surfaces such as being installed on wing, can only stretch in the air outward.This sensor can not be applied to the icing detection of airfield runway and highway.
Summary of the invention
The utility model proposes a kind of piezoelectric resonant diaphragm type sensor, overcome the limitation of existing vibration tube freezing sensor, be used for the phenomenon of freezing is detected.
A kind of piezoelectric resonant diaphragm type sensor of the present utility model, tubular Stainless Steel Shell one end welding vibrating diaphragm, the other end forms closed chamber by the back shroud sealing; It is characterized in that: be bonded with piezoelectric element on (1) described vibrating diaphragm, the closed chamber wall is equipped with temperature element near piezoelectric element and vibrating diaphragm, and piezoelectric element is connected with input electronic circuit electric signal with driving by the band screen layer cable that passes closed chamber with temperature element; (2) described piezoelectric element consists of: the piezoelectric element body simultaneously connects with reference to ground electrode, and piezoelectric element body another side connects drive electrode and is the signal electrode that drive electrode centered on.
Described piezoelectric resonant diaphragm type sensor, it is characterized in that: described piezoelectric element body is made by the lead lanthanum zirconate titanate (PLZT) electrooptical ceramics material through modification, describedly is created on the piezoelectric element body based on ag material and with sintering process with reference to ground electrode, drive electrode and signal electrode; Described closed chamber inside is provided with back up pad, is used for closed cavity and transfers piezoelectric element and temperature element signal extension line.
Described piezoelectric resonant diaphragm type sensor, it is characterized in that: the constituting of described driving and input electronic circuit: the signal of signal electrode amplifies by signal amplifier, produce drive signal through driving amplifier again and act on drive electrode, constitute the self-excited oscillator of positive feedback, its frequency of operation is the resonance frequency of piezoelectric element and vibrating diaphragm; The frequency signal of drive electrode is delivered to the frequency counting line by signal detection line through switch, delivers to TT﹠C system again and carries out frequency measurement.
Described piezoelectric resonant diaphragm type sensor, it is characterized in that: described driving and input electronic circuit comprise excitation chain again: TT﹠C system encourages after testing selects signal wire to send switch controlling signal, make signal detection line be connected to the pumping signal line, TT﹠C system is sent the train of impulses pumping signal through pumping signal alignment drive electrode again, makes piezoelectric element vibrate work again.
By the character of piezoelectric element as can be known, apply the alternating voltage signal between reference ground electrode and drive electrode, then the piezoelectric element body produces the radial expansion distortion, and this is the inverse piezoelectric effect of piezoelectric element.When piezoelectric element in some way, for example bonding by powerful conducting resinl and vibrating diaphragm, then vibrating diaphragm is because of the radial expansion distortion of the piezoelectric element vibration that can occur bending and deformation.Utilize the direct piezo electric effect of piezoelectric element can on signal electrode, obtain the flexural deformation vibration signal again.The utility model promptly is to adopt such mode of operation, makes the Round Membranes sheet do flexural vibrations, and the vibration frequency working point is the single order tuning-points of vibrating diaphragm.The one side of vibrating diaphragm is as the test surface that freezes, and when there not being when freezing on it, working sensor is on a certain original frequency; When the generation of freezing is arranged on the test surface, layers of ice has increased the rigidity of vibrating diaphragm greatly, thereby cause the increase of freezing sensor resonance frequency, in resonant circuit, obtain frequency signal and increment thereof, just can learn whether the phenomenon of freezing takes place, and learn what of the thickness that freezes from the size of frequency increment.
The utility model also comprises a minute sized Pt100 temperature element, the acting as of this temperature element: the temperature of (1) survey sensor itself, temperature signal are as the usefulness of sensor temperature compensation, to guarantee the stability of sensor frequency to temperature; (2) when sensor temperature is higher than 20 ℃, electronic measurement system will cut away the frequency signal of sensor, reduces false alarm rate, so that the warning of freezing is more reliable.
The principal feature of the utility model sensor is: (1) utilizes the inverse piezoelectric effect of piezoelectric element to make and surveys vibrating diaphragm generation flexural vibrations distortion, utilize the direct piezo electric effect of piezoelectric element to pick up the vibration signal of diaphragm simultaneously, by the driving of electronic circuit, make working sensor on resonance frequency.Therefore working stability is high to the sensitivity that ice sheet detects; (2) owing to use piezoelectric element, the power consumption of sensor is very low; (3) built-in miniature temperature element can carry out intelligent compensation to the frequency temperature variation of sensor, has improved the reliability of system greatly; (4) size sensor is little, can flush to be installed on the surface of detecting that needs to freeze, and as highway, aircraft wing leading edge etc., this existing freezing sensor is difficult to realize.
Description of drawings
Figure 1A is the piezoelectric element structural drawing in the utility model;
Figure 1B is the vertical view of Figure 1A;
Fig. 2 is the structural representation of an embodiment of the utility model;
Driving and input electronic line structure synoptic diagram that Fig. 3 adopts for the utility model.
Embodiment
Now embodiment of the present utility model is illustrated in conjunction with Figure 1A, Figure 1B, Fig. 2, Fig. 3.
Figure 1A, Figure 1B are a kind of wafer-type piezoelectric element of three electrode radial expansion deformation vibrations, with reference to ground electrode 1 is circle and the one side that covers piezoelectric element body 2, the another side of piezoelectric element body 2 is a drive electrode 4, is partitioned into a small pieces signal electrode 3 in the drive electrode 4.Each electrode all is ag materials and is created on the piezoelectric element body with sintering process.
Figure 2 shows that an embodiment of the present utility model, tubular Stainless Steel Shell 7 one ends welding vibrating diaphragm 6, the other end forms closed chamber by back shroud 9 sealings; The piezoelectric element that bonds on the vibrating diaphragm 6, piezoelectric element is to make through the lead lanthanum zirconate titanate (PLZT) electrooptical ceramics material of modification, and piezoelectric element is by reference ground electrode 1, piezoelectric element body 2, and a small pieces signal electrode 3 that is partitioned in drive electrode 4 and the drive electrode 4 is formed.Each electrode is to be created on the piezoelectric element body 2 based on ag material and with sintering process.Temperature element 12, it is near piezoelectric element and vibrating diaphragm, thereby can record the temperature of piezoelectric element and vibrating diaphragm with fast speeds.Sensor internal back up pad 10, its function are closed cavity and tandem signal extension line.Band screen layer cable 8 is drawn piezoelectric element and each signal wire of temperature element.In addition, also be evenly distributed with 4 mounting holes 11 around the sensor.
A microsize Pt100 temperature element 12 in the utility model act as: the temperature of (1) survey sensor itself, temperature signal are as the usefulness of sensor temperature compensation, to guarantee the stability of sensor frequency to temperature; (2) when sensor temperature is higher than 20 ℃, electronic measurement system will cut away the frequency signal of sensor, reduces false alarm rate, so that the warning of freezing is more reliable.
Fig. 3 is basic driving and input electronic line structure synoptic diagram.The signal that obtains from signal electrode 3 amplifies by signal amplifier 20, produce drive signal through driving amplifier 19 again and act on drive electrode 4, so just, constituted the self-excited oscillator of positive feedback, its frequency of operation is exactly the resonance frequency of the vibrational system that constituted of piezoelectric element and vibrating diaphragm 6.The frequency signal of drive electrode 4 is delivered to frequency counting line 17 by signal detection line 14 through switch 15, delivers to the TT﹠C system 21 that is made of single-chip microcomputer again and carries out frequency measurement.When vibrating diaphragm 6 outside surfaces do not have when icing, working sensor is in an original frequency; When the generation of freezing was arranged on it, then the frequency of operation of sensor rose, and in certain ice layer thickness scope, the frequency of operation of sensor has good corresponding one by one linear relationship with the thickness that freezes.Therefore, measuring frequency values and variable quantity thereof just can realize whether detection with the ice layer thickness signal is taken place the phenomenon of freezing.
When ice layer thickness reached certain value, sensor can stop vibration, this moment need be after melt freezing again to the sensor exciting so that its resume work.Again exciting is achieved in that singlechip computer system encourages selection signal wire 16 to send switch controlling signal after testing, make signal detection line 14 be connected to pumping signal line 18, TT﹠C system 21 is sent the train of impulses pumping signal through pumping signal line 18 to piezoelectric sensor again, makes piezoelectric element vibrate work again.
Claims (4)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200620096802 CN2919209Y (en) | 2006-05-22 | 2006-05-22 | Piezoelectric Resonant Membrane Sensors |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200620096802 CN2919209Y (en) | 2006-05-22 | 2006-05-22 | Piezoelectric Resonant Membrane Sensors |
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| Publication Number | Publication Date |
|---|---|
| CN2919209Y true CN2919209Y (en) | 2007-07-04 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN 200620096802 Expired - Lifetime CN2919209Y (en) | 2006-05-22 | 2006-05-22 | Piezoelectric Resonant Membrane Sensors |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104880142A (en) * | 2014-04-08 | 2015-09-02 | 李午 | Road icing detection device |
| WO2017031375A1 (en) | 2015-08-18 | 2017-02-23 | Fujifilm Sonosite, Inc. | Membrane hydrophone for high frequency ultrasound and method of manufacture |
| CN107248258A (en) * | 2017-07-28 | 2017-10-13 | 湖北国创高新材料股份有限公司 | A kind of icy road safety early warning device and method for early warning |
| US11579011B2 (en) | 2016-02-19 | 2023-02-14 | Fujifilm Sonosite, Inc. | Membrane hydrophone for high frequency ultrasound and method of manufacture |
-
2006
- 2006-05-22 CN CN 200620096802 patent/CN2919209Y/en not_active Expired - Lifetime
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104880142A (en) * | 2014-04-08 | 2015-09-02 | 李午 | Road icing detection device |
| WO2017031375A1 (en) | 2015-08-18 | 2017-02-23 | Fujifilm Sonosite, Inc. | Membrane hydrophone for high frequency ultrasound and method of manufacture |
| CN107923788A (en) * | 2015-08-18 | 2018-04-17 | 富士胶片索诺声公司 | Membrane hydrophone for high frequency ultrasound and method of manufacture |
| EP3338068A4 (en) * | 2015-08-18 | 2019-05-22 | Fujifilm Sonosite, Inc. | MEMBRANE HYDROPHONE FOR HIGH FREQUENCY ULTRASONIC AND MANUFACTURING METHOD |
| US10451476B2 (en) | 2015-08-18 | 2019-10-22 | Fujifilm Sonosite, Inc. | Membrane hydrophone for high frequency ultrasound and method of manufacture |
| US11579011B2 (en) | 2016-02-19 | 2023-02-14 | Fujifilm Sonosite, Inc. | Membrane hydrophone for high frequency ultrasound and method of manufacture |
| CN107248258A (en) * | 2017-07-28 | 2017-10-13 | 湖北国创高新材料股份有限公司 | A kind of icy road safety early warning device and method for early warning |
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| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term |
Granted publication date: 20070704 |
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| EXPY | Termination of patent right or utility model |