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DE10029167B8 - Verfahren und Vorrichtung zur Temperaturstabilisierung optischer Bauteile - Google Patents

Verfahren und Vorrichtung zur Temperaturstabilisierung optischer Bauteile Download PDF

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Publication number
DE10029167B8
DE10029167B8 DE10029167.8A DE10029167A DE10029167B8 DE 10029167 B8 DE10029167 B8 DE 10029167B8 DE 10029167 A DE10029167 A DE 10029167A DE 10029167 B8 DE10029167 B8 DE 10029167B8
Authority
DE
Germany
Prior art keywords
optical components
temperature stabilization
stabilization
temperature
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE10029167.8A
Other languages
English (en)
Other versions
DE10029167B4 (de
DE10029167A1 (de
Inventor
Johann Engelhardt
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leica Microsystems CMS GmbH
Original Assignee
Leica Microsystems CMS GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leica Microsystems CMS GmbH filed Critical Leica Microsystems CMS GmbH
Priority to DE10029167.8A priority Critical patent/DE10029167B8/de
Priority to GB0113360A priority patent/GB2368656B/en
Priority to US09/878,842 priority patent/US6888118B2/en
Priority to JP2001184471A priority patent/JP4564206B2/ja
Publication of DE10029167A1 publication Critical patent/DE10029167A1/de
Publication of DE10029167B4 publication Critical patent/DE10029167B4/de
Application granted granted Critical
Publication of DE10029167B8 publication Critical patent/DE10029167B8/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0052—Optical details of the image generation
    • G02B21/0064—Optical details of the image generation multi-spectral or wavelength-selective arrangements, e.g. wavelength fan-out, chromatic profiling
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0032—Optical details of illumination, e.g. light-sources, pinholes, beam splitters, slits, fibers
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0052—Optical details of the image generation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/008—Mountings, adjusting means, or light-tight connections, for optical elements with means for compensating for changes in temperature or for controlling the temperature; thermal stabilisation
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/11—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on acousto-optical elements, e.g. using variable diffraction by sound or like mechanical waves
    • G02F1/113—Circuit or control arrangements
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D23/00—Control of temperature
    • G05D23/19—Control of temperature characterised by the use of electric means
    • G05D23/1919—Control of temperature characterised by the use of electric means characterised by the type of controller
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/11—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on acousto-optical elements, e.g. using variable diffraction by sound or like mechanical waves
    • G02F1/116—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on acousto-optical elements, e.g. using variable diffraction by sound or like mechanical waves using an optically anisotropic medium, wherein the incident and the diffracted light waves have different polarizations, e.g. acousto-optic tunable filter [AOTF]

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Nonlinear Science (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Microscoopes, Condenser (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
DE10029167.8A 2000-06-19 2000-06-19 Verfahren und Vorrichtung zur Temperaturstabilisierung optischer Bauteile Expired - Fee Related DE10029167B8 (de)

Priority Applications (4)

Application Number Priority Date Filing Date Title
DE10029167.8A DE10029167B8 (de) 2000-06-19 2000-06-19 Verfahren und Vorrichtung zur Temperaturstabilisierung optischer Bauteile
GB0113360A GB2368656B (en) 2000-06-19 2001-06-01 Method of and apparatus and scanning microscope with means for stabilising the temperature of an optical component
US09/878,842 US6888118B2 (en) 2000-06-19 2001-06-11 Method, apparatus and scanning microscope with means for stabilizing the temperature of optical components
JP2001184471A JP4564206B2 (ja) 2000-06-19 2001-06-19 光学部品の温度を安定化するための方法、装置および安定化手段を備えた走査型顕微鏡

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE10029167.8A DE10029167B8 (de) 2000-06-19 2000-06-19 Verfahren und Vorrichtung zur Temperaturstabilisierung optischer Bauteile

Publications (3)

Publication Number Publication Date
DE10029167A1 DE10029167A1 (de) 2002-01-03
DE10029167B4 DE10029167B4 (de) 2015-04-30
DE10029167B8 true DE10029167B8 (de) 2015-07-02

Family

ID=7645613

Family Applications (1)

Application Number Title Priority Date Filing Date
DE10029167.8A Expired - Fee Related DE10029167B8 (de) 2000-06-19 2000-06-19 Verfahren und Vorrichtung zur Temperaturstabilisierung optischer Bauteile

Country Status (4)

Country Link
US (1) US6888118B2 (de)
JP (1) JP4564206B2 (de)
DE (1) DE10029167B8 (de)
GB (1) GB2368656B (de)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4585684B2 (ja) * 2000-12-04 2010-11-24 株式会社オーク製作所 レーザビーム描画装置における音響光学素子定常化システム
DE10140208C2 (de) 2001-08-16 2003-11-06 Zeiss Carl Optische Anordnung
US20040105485A1 (en) * 2002-07-29 2004-06-03 Unaxis Usa, Inc. Temperature compensation for acousto-optc devices
WO2005109083A2 (en) * 2004-05-06 2005-11-17 Esko-Graphics A/S Optical image exposing method and apparatus
GB0617945D0 (en) 2006-09-12 2006-10-18 Ucl Business Plc Imaging apparatus and methods
CA2696833A1 (en) 2007-07-15 2009-01-22 Yitzchak Hillman Disease treatment via antimicrobial peptides or their inhibitors
EP2139191B1 (de) 2008-06-25 2018-02-21 Nokia Solutions and Networks Oy Verfahren und Vorrichtung zur Bearbeitung von Daten und System mit einer derartigen Vorrichtung
GB201006679D0 (en) 2010-04-21 2010-06-09 Ucl Business Plc Methods and apparatus to control acousto-optic deflectors
DE102010047826A1 (de) * 2010-10-04 2012-04-05 Eppendorf Ag Elektronische Pipette
CN103189778B (zh) 2010-10-14 2016-05-11 株式会社尼康 结构化照明装置、结构化照明显微镜装置以及面形状测定装置
GB201106787D0 (en) 2011-04-20 2011-06-01 Ucl Business Plc Methods and apparatus to control acousto-optic deflectors
DE112012002844T5 (de) * 2011-07-05 2014-04-24 Electronic Scientific Industries, Inc. Verfahren zur Laserbearbeitung mit einem thermisch stabilisierten akustooptischen Strahlablenker und thermisch stabilisiertes Hochgeschwindigkeits-Laserbearbeitungssystem
DE102014009142A1 (de) 2014-06-20 2015-12-24 Carl Zeiss Microscopy Gmbh Verfahren und Vorrichtung zur Ansteuerung eines akustooptischen Bauteils
DE102017117851B3 (de) 2017-08-07 2018-10-31 Leica Microsystems Cms Gmbh Elektrische Schaltung und Verfahren zur Ansteuerung eines akusto-optischen Kristalls

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4422154A (en) * 1979-05-21 1983-12-20 Lansing Research Corporation Temperature compensation of tunable acoustic optical filters
US5712722A (en) * 1996-09-09 1998-01-27 Crystal Technology, Inc. Driver circuit for stabilizing optical outputs of acoustooptic devices
DE19827140A1 (de) * 1998-06-18 1999-12-23 Zeiss Carl Jena Gmbh Laser-Scanning-Mikroskop mit AOTF

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4890539A (de) * 1972-03-01 1973-11-26
JPS561923A (en) * 1979-06-20 1981-01-10 Dainippon Screen Mfg Co Ltd Stabilizing method for quantity of light in optical system using light deflecting element
US5742425A (en) 1996-09-09 1998-04-21 Crystal Technology, Inc. Technique for electronically stabilizing the ouputs of acoustooptic devices
US6167173A (en) * 1997-01-27 2000-12-26 Carl Zeiss Jena Gmbh Laser scanning microscope
US6295157B1 (en) * 1999-08-23 2001-09-25 Etec Systems, Inc. Thermally balanced acousto-optic modulator

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4422154A (en) * 1979-05-21 1983-12-20 Lansing Research Corporation Temperature compensation of tunable acoustic optical filters
US5712722A (en) * 1996-09-09 1998-01-27 Crystal Technology, Inc. Driver circuit for stabilizing optical outputs of acoustooptic devices
DE19827140A1 (de) * 1998-06-18 1999-12-23 Zeiss Carl Jena Gmbh Laser-Scanning-Mikroskop mit AOTF

Also Published As

Publication number Publication date
US6888118B2 (en) 2005-05-03
DE10029167B4 (de) 2015-04-30
JP4564206B2 (ja) 2010-10-20
JP2002072160A (ja) 2002-03-12
GB0113360D0 (en) 2001-07-25
GB2368656B (en) 2003-02-19
US20020000507A1 (en) 2002-01-03
DE10029167A1 (de) 2002-01-03
GB2368656A (en) 2002-05-08

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Legal Events

Date Code Title Description
OP8 Request for examination as to paragraph 44 patent law
8127 New person/name/address of the applicant

Owner name: LEICA MICROSYSTEMS HEIDELBERG GMBH, 68165 MANNHEIM

8127 New person/name/address of the applicant

Owner name: LEICA MICROSYSTEMS CMS GMBH, 35578 WETZLAR, DE

R016 Response to examination communication
R016 Response to examination communication
R018 Grant decision by examination section/examining division
R020 Patent grant now final
R119 Application deemed withdrawn, or ip right lapsed, due to non-payment of renewal fee