DE102009054868A1 - Control pressure adjusting method for pneumatically operatable bellow that is utilized for e.g. positioning lens for manipulator of projection system, involves transmitting working pressure for actuator elements in to control pressure - Google Patents

Abstract

The method involves transmitting working pressure (p) for two actuator elements in to a control pressure (P') with a variable transmission ratio by a pressure converter so that differences between the actuator elements are compensated. The transmission ratio is adjusted to unknown boundary conditions by an adjusting device. Two working spaces (I, II) with primary and secondary surfaces (11, 12) are provided in the pressure converter. A transfer piston (10) is arranged between the working spaces. An independent claim is also included for a device for adjusting a control pressure for an actuator element of a manipulator.

Description

BACKGROUND OF THE INVENTION

Field of the invention

The The invention relates to a method and a device for adjusting a drive pressure, in particular for setting a drive pressure for an actuator of a manipulator of an optical system. The The invention further relates to a manipulator for an optical System, in particular for a projection lens of a Projection exposure system, and an optical system, in particular a projection lens.

Description of the related State of the art

Projection exposure systems for semiconductor lithography are used for photolithographic Production of semiconductor devices and other fine-structured Components. In doing so, the pattern of a mask (reticle) usually becomes one substrate coated with a photosensitive layer (wafer) projected. A projection exposure apparatus includes this Purpose a projection lens with multiple optical elements, such as lenses, mirrors, grids or plane parallel plates that over Sockets in a lens housing of the projection lens are stored. The optical elements cause a refraction and / or a reflection of one of a lighting device radiated electromagnetic radiation.

The Electromagnetic radiation is partial in the optical elements absorbed, which heat the optical elements can. This effect is also called lens warming (engl. Lens Heating). The warming takes place in the Usually inhomogeneous. Due to the heating, the imaging properties become of the optical system changes, which leads to aberrations in the optical system propagating wavefront and thus to a Deterioration of a picture quality leads.

To compensate for the aberrations, it is for example from the US 6,388,823 B1 or the WO 2008/064859 A2 It is known to provide a manipulator comprising at least one optical element and at least one actuating element, by means of which the optical element is deformable, wherein an aberration is induced due to a deformation of the optical element, which compensates a aberration of the overall system. By manipulator or manipulators aberrations of the optical system can be minimized targeted. In one embodiment, the manipulator has an inner ring or holder, through which the optical element is received, and an outer ring or a support device, wherein the inner ring is movable relative to the outer ring by the adjusting elements.

One Drive or actuation of the actuating elements by means of a adjustable, but static or quasistatic control pressure, which via lines or pressure circuits to the actuators to be led. Because of their different physical Properties, for example due to manufacturing differences, The control elements can have different stroke-to-pressure functions s (p). If several control elements with the same, quasi-static control pressure This is due to the different stroke-to-pressure functions the individual control elements to different deflections. These Differences can not be desired Cause aberrations.

When Actuators or actuators are used for example with a fluid acted upon actuators, in particular pneumatically adjustable bellows. The bellows can be used in conventional Embodiments glued to the inner ring or holder of the manipulator become. To avoid aberrations due to different physical To reduce peculiarities of the bellows are in a pressure circle preferably bellows with similar properties installed. In other words, there will be assemblies with bellows formed, which have the same or substantially the same properties exhibit. This grouping has the consequence that the received Bellows assemblies are very expensive, since only a fraction of the manufactured Bellows can be used. There is also a provision The bellows properties metrologically very complex and leads not always to the desired result. Also for this reason the metrological determination of the bellows properties is very expensive. Are the bellows groups once in a manipulator or optical Built-in system and is still a non-tolerable dynamic Picture error exists, so is the entire assembly or the manipulator to replace.

SUMMARY OF THE INVENTION

It It is an object of the invention, a method and an apparatus to provide for adjusting a driving pressure, so that a control element reliable and is controllable reproducible. It is another task of the invention, a manipulator for an optical system and to provide an optical system which is a reliable Allow correction of aberrations.

These and other objects are achieved by the subject-matter having the features of claims 1, 4, 15, 17 and 18. Further advantages of the invention will become apparent from the dependent claims. Of the The wording of all claims is incorporated herein by reference.

According to one Aspect of the invention is in a method for adjusting a Control pressure for an actuating element, in particular for adjusting a drive pressure for an actuator of a manipulator, provided that a working pressure in the control pressure with a variable gear ratio translated becomes. The gear ratio is required determined and / or varied. This makes it possible for that a gear ratio due to constraints, like physical properties of a system, the actuator and / or an environment. A translation the working pressure in the control pressure is preferably carried out by means of a pressure converter with an adjusting device, through which a gear ratio is variable.

In In one embodiment, in a system in which the working pressure central or at least for a group is provided on adjusting elements together, with adjusting elements different properties with a suitable control pressure supplied, whereby the working pressure for the adjusting elements translated into a respective associated control pressure so that differences between the actuators are compensated. The working pressure itself is preferably not changed and is available for other elements.

Preferably is the driving pressure for the actuator or the actuating elements adapted to boundary conditions without the boundary conditions as a whole be recorded. It is possible, for example, two or more adjusting elements, in particular bellows, in one Manipulator to use a projection exposure system, wherein the control elements each have unknown properties and the adjusting elements are arranged in a common pressure circuit and from a common pressure supply, in particular a common Compressed air supply, be supplied with a working pressure. By an adaptation of the respective control pressure to the physical properties It is possible to make differences between the control elements to compensate for the control elements, without the need for this Properties of the adjusting elements, in particular the bellows, must be recorded as a whole. An inventive Method is also advantageous in other systems in which a supply of a fluid operated actuator with a varying and / or in advance not known control pressure can be achieved should. Fluid operated actuators are used, for example, in motor vehicles, in machine tools, in automation technology and other systems used. For example, boundary conditions can be used an ambient temperature and / or physical properties of the Be system.

According to one Another aspect of the invention is in a device for adjusting a drive pressure, in particular for setting a drive pressure for an actuator of a manipulator, comprising a Print converter for translating a working pressure into one Triggering pressure, provided that the pressure converter is an adjusting device wherein, by means of the adjusting device, a transmission ratio of the pressure converter is variable. This is a working pressure of a pressure circuit convertible to a definable control pressure. Through the device It is possible, the driving pressure for an actuator or the like arbitrary or at least within predeterminable limits set and a need-based adjustment of the control pressure to realize on boundary conditions.

In In one embodiment, the device is for setting a control pressure formed for at least two adjusting elements, wherein the at least two control elements of a common working pressure can be supplied and the pressure converter assigned to a control element is, so that differences between the actuators are compensated. In this case, in one embodiment, each actuator is a pressure converter assigned. In other embodiments, the number of pressure converters is possible kept low.

Preferably is the driving pressure on boundary conditions, such as physical properties a system and / or environment adaptable without them as a whole are known. For this purpose, in an embodiment by an arithmetic unit performs an adaptation method, by soft aberration of an optical system is minimized. This can be a cost-intensive detection of the boundary conditions by measuring systems or the like omitted.

In one embodiment of the invention, the pressure converter has a first working space with a primary surface and a second working space with a secondary surface, wherein the transmission ratio depends on the ratio of the primary surface to the secondary surface. In this context, a "first working space" in the context of the invention is a volume assigned to the working pressure. As a 'second working space' is correspondingly referred to in the context of the invention, a control pressure associated volume. In principle, it is conceivable to provide a change of media in the region of the pressure converter, with an actuating element being hydraulically operable, for example, and the Ar Beitsdruck provided by a compressed air supply.

In a development of the invention, the pressure converter comprises a between the work spaces arranged transfer pistons. The transfer piston has two ends, the cross section of the Primary and the secondary surface correspond. Of the Transfer piston can be any shaped cross-sectional areas exhibit. For a simple seal, for example, opposite a housing, are circular cross-sectional areas advantageous.

In An embodiment of the invention comprises the adjusting device an adjustable force element, in particular a spring element, for Applying an adjustable constraining force on the transfer piston. The constraining force is for example by means of an adjusting screw or the like adjustable. An adjustment of the adjusting screw is both manually and automatically by means of a suitable Adjustment mechanism possible. In particular, by an automatic or automatic adjustment it is possible the control pressure at boundary conditions without influences by a To adapt users.

In another embodiment of the invention, the pressure converter two diaphragms, opposite to a calibration volume conclude the work spaces fluidsch, wherein in the adjustment volume, a transfer fluid is provided. The transfer fluid may be liquid or gaseous. One in the first working space applied working pressure is by means of the transfer fluid transferred to the second working space, depending on an area ratio and a pressure of the Transfer fluids a conversion of the working pressure into a control pressure he follows.

A Further development of the invention provides that the adjusting device a valve element through which a pressure in the adjustment volume and / or a rear space of the transfer piston adjustable is. In an embodiment with two membranes, the adjustment volume defined by the enclosed between the two membranes volume. As adjusting volume according to the invention, however, also acts Rear space of a transfer piston, d. H. one at the workroom the primary side facing away from the transfer piston lying Room. By a pressure change, for example by a Compression or an expansion of the transfer fluid is there possible to have a gear ratio between the working pressure and the control pressure and thus the control pressure set.

In Another embodiment of the invention is the first working space and the second working space of the pressure converter by means of a bypass line connected. A pressure circuit for one actuator or more Actuators can completely fluidsch against the environment to be finished. By movement of the transfer piston and / or by change the adjustment volume, it is possible a change to achieve the driving pressure. The control pressure is constant, as long as no working fluid escapes from the actuator pressure circuit. To prevent leakage, d. H. an unwanted escape of Working fluid from the pressure circuit to compensate is a bypass line provided by the working fluid, bypassing the pressure converter can be supplied to the actuator pressure circuit. Provided a transfer pin is provided, the bypass line in dependence a position of the transfer bolt closed or opened become.

In a further embodiment is in the bypass line an actuating element, in particular a throttle provided. This is a flow through the bypass line and / or a compensation of the leakage controllable.

In In an advantageous embodiment, the actuating element is a bellows, designed in particular as a pneumatically operated bellows. A bellows is easily connected to a power supply, in particular a pressure supply can be connected. In addition, you can Bellows are designed so that the applied through them Force independent of its deflection, d. H. an adjoining one Adjustment is. Bellows can therefore be special be used advantageously in a variety of applications. For example, in a vehicle seat, in adjusting for Motor vehicles, in measuring instruments or the like.

According to yet another aspect of the invention, in a manipulator for an optical system comprising at least one fluid-controlled adjusting element for deforming and / or positioning an optical element, wherein the actuating element can be driven by means of a control pressure, it is provided that the actuating element is associated with a device as described above is, so that a drive pressure for the actuator is adjustable. In this case, a change of the spatial position of the optical element is referred to as positioning. In an advantageous embodiment, a positioning of the optical element with six degrees of freedom, three translational degrees of freedom and three rotational degrees of freedom is possible. The adjusting element comprises, for example, a bellows or a plurality of bellows and is pneumatically and / or hydraulically operable. By means of the device according to the invention, a stroke-to-pressure function of each individual control element, in particular of each bellows, of the manipulator can be adjusted. By erfindungsge According to the device, it is possible to compensate for manufacturing-related differences between the bellows, so that all bellows or a group of different bellows can be supplied by a common working pressure. According to the invention, it is possible to use different bellows in a system, the different properties of the bellows are compensated in order to achieve a homogeneous application of force to the optical element. The manipulator can be firmly integrated into the optical system. Preferably, however, a replaceable connection is provided.

Preferably the manipulator comprises a plurality of adjusting elements and supporting elements, so that a 2-wave and / or a 4-wave deformation can be generated is. The adjusting elements and the supporting elements are preferably on the circumference of an annular holder of the optical element evenly distributed, arranged alternately. In one embodiment, four support points for Support elements and four intermediate connection points provided for adjusting elements. At every connection point engage in one embodiment, two oppositely directed control elements on. In other embodiments, an actuating element of a connection point optionally supplied with negative or positive pressure. alternative or in addition, several control elements can be parallel be arranged attacking at a connection point to such a to effect targeted power amplification. The control elements can work with different control pressure.

According to one Another aspect of the invention is a system comprising at least created two manipulators, the manipulators each at least a fluid-controlled actuator for deforming and / or positioning comprise optical elements, the actuating elements by means of a drive pressure can be driven, and at least one actuator an above described Device is assigned so that a driving pressure for the Adjusting element is adjustable. The control elements are so over a centrally provided working pressure supplied, for at least one actuator of the working pressure in a suitable Control pressure is convertible. Due to a change in the spatial position and / or a deformation of the optical elements an aberration is induced which is an aberration of the entire system compensated.

According to one Another aspect of the invention is an optical system for a projection exposure apparatus is provided, comprising a manipulator with at least one actuating element and an inventive Device for changing a driving pressure for the actuator. Preferably, the manipulator comprises a plurality of adjusting elements with different properties, these properties being due to the device can be compensated.

In In another embodiment, an arithmetic unit is provided, by means of minimizing an aberration a projection exposure system a gear ratio is automatically adaptable to boundary conditions. To the boundary conditions count in one embodiment the properties of the actuator, in particular a bellows. Furthermore, it is also conceivable that Actuation pressure on properties of the projection exposure apparatus adapt.

The The foregoing and other features are excluded from the claims also from the description and the drawings, the individual Characteristics in each case alone or in several form sub-combinations in embodiments of the invention and be realized and advantageous in other fields as well represent protectable versions can. For the same or similar components In the drawings, the same reference numbers are used.

BRIEF DESCRIPTION OF THE DRAWINGS

The Drawings show schematically:

1 a circuit diagram of a device for adjusting a driving pressure;

2 a first embodiment of a device according to 1 in a side cross-section;

3 a second embodiment of a device according to 1 in a side cross-section;

4 a third embodiment of a device according to 1 in a side cross-section;

5 : the embodiment according to 4 in a second state representation;

6 an optical imaging device and

7 FIG. 2: a schematic partially sectioned section of the imaging device according to FIG 6 ,

DETAILED DESCRIPTION THE PREFERRED EMBODIMENTS

1 schematically shows a shaft image of a device 1 for adjusting or adjusting a Control pressure p *. Through the device 1 a working pressure p is converted into the control pressure p *, where p * = mD * p, with the adjustable transmission ratio mD.

The working pressure p for an actuator 3 is from an unspecified source 2 provided. The actuator 3 is a fluidically controllable actuator with a stroke-to-pressure function s (p). The stroke-to-pressure function s (p) of the actuator 3 can for example be approximated by a linear equation s (p) = m * p, where s is a stroke or a travel path of the actuating element 3 , p is the working pressure and m is a slope of the stroke-to-pressure function. The stroke-to-pressure function s (p) is linear in this example, in other embodiments, a non-linear or a quasi-linear function is assumed. Through the device 1 becomes the working pressure p for the actuator 3 converted, so that the actuator 3 is driven with the control pressure p *. Thus, the stroke-to-pressure function s (p) for the actuator becomes 3 with respect to the working pressure p, so that s (p) = mD · m · p *.

2 schematically shows a first embodiment of a device according to the invention 1 for setting a control pressure p * for an in 2 not shown actuating element.

The device 1 according to 2 comprises a housing having a first working space I with a primary surface 11 and a second working space II with a secondary surface 12 between which a transfer piston 10 is arranged. As a primary surface 11 or secondary surface 12 In this case, a cross-section of the first and the second working space I, II is referred to. The transfer piston 10 has two ends 10A . 10B on, whose cross sections substantially the primary and the secondary surface 11 . 12 correspond. A gear ratio mD of the device 1 depends on the ratio of the primary area 11 to the secondary surface 12 from. In the area of the ends 10A . 10B of the transferring flask 10 are seals 13 provided, which the transfer piston 10 relative to a housing or the work spaces I, II seal, so that one on the primary surface 11 applied working pressure p from one at the secondary surface 12 adjacent control pressure p * is fluidically isolated.

The device 1 serves, for example, to compensate for unknown, manufacturing-related differences between two control elements, for example, between two bellows, which are to be controlled by the same working pressure p. The illustrated device 1 includes two adjustment elements 14 . 17 by which a transmission ratio mD can be influenced. In other embodiments, only one adjustment element 14 . 17 intended.

In the in 2 shown first embodiment is a valve element as a first adjusting element 14 provided by which a pressure in a back room 15 of the transferring flask 10 is adjustable. In the back room 15 there is a compressible fluid. By changing the pressure in the back room 15 it is possible to change the transmission ratio mD between the working pressure p and the control pressure p *. In the in 2 shown first embodiment is further as a spring 16 trained force element provided which a forced force on the transfer piston 10 exercises. A spring constant of the spring element 16 is by means of a second adjusting element, in the embodiment by means of an adjusting screw 17 adjustable bar. By changing the spring constant, therefore, the transmission ratio mD can also be changed. The first working space I and the second working space II are fluidly separated from one another. In one embodiment, correspondingly different fluids can be used in the work spaces I, II.

3 schematically shows a second embodiment of a device according to the invention 101 for converting a working pressure p into a control pressure p * for an in 3 not shown actuating element. The device 101 includes an adjustment volume 110 , which at the primary surface and at the secondary surface in each case by a membrane 111 . 112 compared with the workspaces I, II. In the adjustment volume 110 a transfer fluid is provided. The transfer fluid may be, for example, liquid or gaseous. Through a valve element 14 is a pressure q in the adjustment volume 110 variable. A gear ratio mD between the working pressure p and the control pressure p * depends on the pressure q in the adjustment volume 110 , as well as the ratio of primary area to secondary area. In addition, properties of the transfer fluid used can influence a transmission ratio MD. Preferably, an incompressible transfer fluid is used to achieve linear gear ratios. Non-linear ratios can be achieved with a compressible fluid. In an embodiment, not shown, werter force elements such as springs or the like may be provided, which on one or both membranes 111 . 112 act and thus influence the pressure q of the transfer fluid.

4 and 5 schematically show a third embodiment of a device according to the invention 201 , wherein the device 201 according to 4 and 5 essentially the device 1 according to 2 equivalent. In the embodiment according to 4 . 5 is a bypass line 18 provided by which the first Ar beitsraum I is connected to the second working space II.

Preferably, the working space II and an adjoining line system of the actuating element is a closed system, ie a due to the device 201 adjusting control pressure p * is essentially constant. However, due to leakage, losses or the like, there may be a change in the control pressure p *. It is provided in one embodiment, by readjusting the device 201 to keep a drive pressure p * substantially constant.

In order to compensate for a volume loss of the fluid due to leakage in the working space II of the control pressure p * is in the embodiment according to 4 the bypass line 18 intended. As in 5 shown, the bypass line 18 be arranged so that in certain working positions of the transfer bolt 10 no volume compensation via the bypass line 18 is possible because the transfer piston 10 the bypass line 18 closes. Regardless of a position of the transfer piston 10 To be able to control a volume compensation needs, is in the illustrated embodiment further a shut-off 19 provided, for example, a throttle through which a fluid flow through the bypass line 18 is reduced or blocked.

6 schematically shows a projection exposure system 5 , The projection exposure apparatus comprises a lighting device 50 , by which an illumination radiation is generated, and a projection lens 51 , Between the projection lens 51 and the lighting device 50 is a mask 52 arranged with a pattern, the pattern of the mask 52 on a below the projection lens 51 arranged substrate 53 is projected. The projection lens 51 includes various optical elements 54 such as lenses, mirrors, gratings or the like. To compensate for aberrations due to heating or the like, in the illustrated embodiment further is a manipulator 6 or more manipulators 6 intended. A manipulator 6 is in detail in 7 shown.

The schematic in 7 illustrated manipulator 6 includes an optical element 60 , For example, a lens or a plane plate, which by a support structure 61 is held. The support structure 61 includes an inner ring or holder 62 , which is designed substantially annular and the optical element 60 contacted. The holder 62 is by an outer ring or a support device 63 stored, which in a housing of in 6 shown projection lens 51 is included. The support device 63 is, for example, exchangeable received in the housing. In the illustrated embodiment, the holder 62 over four support elements 64 , which over the circumference of the optical element 60 evenly distributed, supported. The support elements 64 are designed as passive elements. In other embodiments, active elements may be provided. To support the holder 62 at the support device 63 are further control elements 3 provided, wherein in the illustrated embodiment, four control elements 3 are provided, of which in 7 only three are visible. The four control elements 3 are also about the circumference of the holder 62 evenly distributed, with the support elements 64 and the control elements 3 are arranged alternately. The illustrated control elements 3 allow adjustment in the z-direction, which can be applied for adjusting a negative pressure or an overpressure. In an advantageous embodiment, the control elements 3 be controlled such that a positioning of the optical element 60 ie changing the position of the optical element 60 in space, with six degrees of freedom, three translational degrees of freedom in the x-, y- and z-direction and three rotational degrees of freedom, is possible.

The control elements 3 , which are formed in the illustrated embodiment as a bellows, know different physical properties and thus different stroke-to-pressure functions s (p).

To a desired deformation and / or displacement of the optical element 60 to achieve the control elements 3 , driven by a control pressure p *. This is the actuator 3 as in 7 shown a device 1 , for example, according to the 1 to 5 , assigned, by which a predetermined working pressure p in a control pressure p * for the actuator 3 can be converted. As a result, the most diverse properties of the actuating elements 3 balanced.

As in 6 can represent an aberration by a sensor 7 be recorded. The detected aberration is determined by an evaluation and / or arithmetic unit 8th evaluated. The arithmetic unit 8th determined by means of the sensor unit 7 detected aberrations an actuating signal for the device 1 , so that the transmission ratio mD and thus the control pressure p * for the actuators 3 can be adjusted. This makes it possible to apply the control pressure p * to existing boundary conditions, for example to production-related properties of a control element 3 used to adapt bellows without these boundary conditions are detected directly. In other embodiments, setting the transmission ratio is done for example by a Measurement system.

The device 1 has been described above in connection with a manipulator. However, numerous other applications are conceivable in which such a device is advantageous.

QUOTES INCLUDE IN THE DESCRIPTION

This list The documents listed by the applicant have been automated generated and is solely for better information recorded by the reader. The list is not part of the German Patent or utility model application. The DPMA takes over no liability for any errors or omissions.

Cited patent literature

• US 6388823 B1 [0004]
• - WO 2008/064859 A2 [0004]

Claims (19)

Method for setting a control pressure (p *) for an actuating element ( 3 ), in particular for an actuating element ( 3 ) of a manipulator ( 5 ), characterized in that a working pressure (p) is translated into the driving pressure (p *) with a variable transmission ratio (mD). A method according to claim 1, characterized in that the working pressure (p) for at least two control elements ( 3 ) is translated into a respective associated control pressure (p *), so that differences between the control elements ( 3 ). Method according to claim 1 or 2, characterized that the gear ratio (mD) at least partially unknown boundary conditions are adapted. Device for setting a control pressure for at least one actuating element, in particular for an actuating element ( 3 ) of a manipulator ( 6 ), comprising at least one pressure converter for translating a working pressure (p) into a control pressure (p *), characterized in that the pressure converter has an adjusting device, wherein a transmission ratio (mD) of the pressure converter can be varied by means of the adjusting device. Apparatus according to claim 4 for setting a control pressure for at least two control elements ( 3 ), characterized in that the at least two adjusting elements ( 3 ) can be supplied by a common working pressure (p) and the pressure converter is an actuating element ( 3 ), so that differences between the actuators ( 3 ) are compensable. Apparatus according to claim 4 or 5, characterized that by means of the adjusting device, the transmission ratio (mD) adaptable to at least partially unknown boundary conditions is. Device according to one of claims 4, 5 or 6, characterized in that the pressure converter has a first working space (I) with a primary surface ( 11 ) and a second working space (II) with a secondary surface ( 12 ), wherein the transmission ratio (mD) of the ratio of the primary surface ( 11 ) to the secondary surface ( 12 ) is dependent. Apparatus according to claim 7, characterized in that the pressure converter arranged between the working spaces (I, II) transfer piston ( 10 ). Apparatus according to claim 8, characterized in that the adjusting device an adjustable force element, in particular a spring element ( 16 ), for applying an adjustable constraining force on the transfer piston ( 10 ). Apparatus according to claim 7, characterized in that the pressure converter two membranes ( 111 . 112 ), which has an adjustment volume ( 110 ) in fluid communication with the work spaces (I, II), wherein in the adjustment volume ( 110 ) a transfer fluid is provided. Device according to one of claims 7 to 10, characterized in that the adjusting device is a valve element ( 14 ), by which a pressure in the adjustment volume ( 110 ) and / or a backspace ( 15 ) of the transfer piston ( 10 ) is adjustable. Device according to one of claims 7 to 11, characterized in that the first working space (I) and the second working space (II) of the pressure converter by means of a bypass line ( 18 ) are fluidly connected. Apparatus according to claim 12, characterized in that in the bypass line ( 18 ) a shut-off element ( 19 ), in particular a throttle, is provided. Device according to one of claims 4 to 13, characterized in that the actuating element ( 3 ) is designed as a bellows, in particular as a pneumatically operated bellows. Manipulator for an optical system, comprising at least one fluid-controlled actuating element ( 3 ) for deforming and / or positioning an optical element ( 60 ), wherein the actuating element ( 3 ) is drivable by means of a control pressure (p *), characterized in that the actuating element ( 3 ) a device ( 1 ) is assigned according to one of claims 4 to 14. Manipulator according to claim 15, characterized in that the manipulator ( 6 ) several control elements ( 3 ) and supporting elements ( 64 ), so that a 2-wave and / or a 4-wave deformation can be generated. System comprising at least two manipulators each having at least one fluid-controlled actuating element ( 3 ) for deforming and / or positioning optical elements ( 60 ), wherein the control elements ( 3 ) are drivable by means of a control pressure (p *), characterized in that at least one actuating element ( 3 ) a device ( 1 ) is assigned according to one of claims 4 to 14. Optical system, in particular a micro lithography system and / or a projection system and / or an illumination system of a microlithography system, comprising a manipulator ( 5 ) according to one of claims 15 or 16. Optical system according to claim 18, characterized in that a computing unit ( 8th ) is provided, by which an adaptation of the transmission ratio to minimize a aberration is controllable.