DE102015111369A1 - Processing arrangement and method for operating a processing arrangement - Google Patents

Abstract

According to various embodiments, a processing assembly (100) may include: a processing source (106) for processing a substrate; a generator arrangement (102) for providing supply potentials for a DC operating mode of the processing source (106) as well as for an AC operating mode of the processing source (106); and a switching network device (104) which is connected between the generator arrangement (102) and the processing source (106) and has input terminals (104e) on the generator side for connecting first supply potential cables (107e) and has output terminals (104a) on the processing source side for connecting second supply potentials. Cables (107a), wherein the switching network means (104) comprises a configuration means (108) arranged to allocate the input terminals (104e) to the output terminals (104a) depending on the respective operation mode.

Description

The invention relates to a processing arrangement and a method for operating a processing arrangement.

In general, a treatment source, also referred to as a processing source, can be used to process a substrate. Processing sources may, for example, be operated in different electrical modes of operation, e.g. in a DC operating mode (DC mode) or in an AC operating mode (AC mode), wherein conventionally a processing source is specifically adapted to either the DC mode or the AC mode, and thus generally only in one of the both operating modes is operated. Furthermore, a processing source, e.g. a plasma source, a sputtering source, an ion source, etc., to convert high electrical power (e.g., pulsed or continuous), e.g. more than one kilowatt or more than one megawatt, e.g. in a range of about 1 kW to about 1 MW. Thus, for example, a generator can not be readily connected to the processing source or disconnected from the processing source, e.g. a specially trained electrician may be necessary to make electrical rewiring or a Umpinnen.

According to various embodiments, an arrangement is provided with at least one processing source and at least one generator (also referred to as a generator arrangement) for supplying the processing source with electrical energy, wherein the processing source can be operated either in the DC operating mode or in the AC operating mode and by means of the generator as well optionally for both modes of operation, the electrical supply can be provided. In this case, if both the generator and the processing source are operated in AC mode, a first interconnection (AC interconnection) between the generator and the processing source may be necessary, and, in an analogous manner, if both the generator and the processing source are operated in DC mode, a second interconnection (DC interconnection) between the generator and the processing source be necessary. According to various embodiments, a switching network device with a configuration device is switched between the processing source and the generator, wherein the configuration device is set up in such a way that the corresponding connection mode (ie, AC connection or DC connection) can be provided for the selected operating mode of the generator and the processing source ,

For this, the configuration device, in order to enable a first electrical connection of the generator and the processing source for the AC mode, an AC configuration element and, in order to enable a second electrical connection of the generator and the processing source for the DC mode, a DC Have configuration element. In this case, the configuration elements can be configured, for example, as plugs, which merely have to be plugged in to provide the respective electrical connection variant (i.e., the AC interconnection or the DC interconnection).

For example, a sputter source (also referred to as a sputter source arrangement) can be used as the processing source, or any suitable plasma source, coating source, etc.

For example, a sputtering source may include at least one cathode, wherein for coating a substrate, the at least one cathode itself is sputtered. This is referred to as a sputtering process (or sputtering, sputter coating or sputter deposition). Illustratively, the cathode itself serves as a target, which is atomized in the sputtering process. The sputtering source may be, for example, set up as a magnetron sputtering source (or, in short, as a magnetron) using a magnet arrangement which is arranged relative to the at least one cathode and which is arranged such that the sputtering of the at least one Cathode is supported by means of a magnetic field. Magnetic field assisted sputtering is also referred to as magnetron sputtering.

A sputter source, e.g. a magnetron, may conventionally be arranged such that only a single operating mode can be implemented from a plurality of possible operating modes by means of the latter. The different operating modes of a sputtering source, singly or in combination, may include, for example, sputtering with or without magnetic field assist, controlled or unregulated reactive sputtering, non-reactive sputtering, DC sputtering (DC sputtering or unipolar sputtering), AC sputtering (AC sputtering). Sputtering or bipolar sputtering, eg MF (mid frequency) sputtering), pulsed DC sputtering (eg high power pulsed magnetron sputtering, abbreviated as HiPIMS or HPPMS). Conventionally, for example, different magnetrons specially adapted to the operating mode are provided for different operating modes of a magnetron, wherein these magnetrons can be set up to optimally implement only a specific operating mode.

According to various embodiments, a processing arrangement (eg, a sputtering arrangement or a magnetron sputtering arrangement) is provided, by means of which easily between at least two different operating modes, ie at least a DC (DC) operating mode and an AC (AC) operating mode Processing arrangement can be switched, for example, without opening an electrical wiring.

For example, a magnetron may have two cathodes, e.g. For example, a double-tube magnetron may have two substantially parallel juxtaposed tubular cathodes, or a double-planar magnetron may have two substantially parallel juxtaposed planar cathodes, which magnetron may be or may be configured to be simple in several operating modes (eg reactive or metallic DC sputtering or reactive or metallic AC sputtering) can be operated. For this purpose, the magnetron can be provided, for example, such that the gas guide and / or the anodes of the magnetron can be adapted to the respective desired operating mode by means of detachable connections. Further, the magnetron may have a terminal terminal for connecting the magnetron to the external supply devices, e.g. Power / voltage supplies (also referred to as generators), or gas supplies (working gas supplies or reactive gas supplies). In this case, the connection terminal can be set up such that the various operating modes are taken into account.

According to various embodiments, a magnetron may be provided in the form of a magnetron lid, wherein by means of the magnetron lid, a correspondingly fitting lid opening in a vacuum process chamber can be covered gas-tight or vacuum-tight.

According to various embodiments, an electric power supply is provided for a magnetron lid, e.g. for a continuous coating installation or a film coating installation, wherein the magnetron cover has sufficient free space for configuring the magnetron cover for different operating modes, so that the magnetron cover can be used universally. The respective conversion parts can be releasably secured in the free space by means of clamping, plug and / or screw connections or be. The conversion parts may include, for example, anode structures for providing various anode shapes, or gas guide structures (e.g., gas baffles) for adjusting the gas flows that supply the magnetron cathodes with process gas (working gas and / or reactive gas), e.g. for influencing the gas flow from one or more gas inlets (one gas duct and / or multiple gas distributors) to one or more exhaust ports (pumping orifices).

For example, a magnetron may include: a first magnetron cathode having a first magnet assembly defining a first plasma region below the first magnetron cathode; a second magnetron cathode having a second magnet assembly defining a second plasma region below the second magnetron cathode; at least one anode structure associated with the two magnetron cathodes.

For example, a magnetron may include: a first magnetron cathode having a first magnet assembly defining a first plasma region below the first magnetron cathode; a second magnetron cathode having a second magnet assembly defining a second plasma region below the second magnetron cathode; a first anode support having at least one first support structure for holding and electrically supplying at least a first anode structure, wherein the first anode support is disposed above the first magnetron cathode; a second anode support having at least one second support structure for holding and electrically supplying at least one second anode structure, wherein the second anode support is disposed above the second magnetron cathode.

A method of operating the sputtering arrangement may comprise, for example: coupling a first power supply for supplying the two sputtering cathodes and / or the two anode supports with electrical energy in a DC operating mode, wherein by means of the first power supply a negative potential is provided to the two sputtering cathodes and a positive potential is applied to the anode supports; and / or coupling a second power supply for supplying the two sputtering cathodes with electrical energy in an alternating voltage operating mode, wherein an alternating voltage is applied to the two sputtering cathodes by means of the second power supply and wherein the two anode supports are connected to electrical ground (ground potential).

A method of operating the sputtering arrangement may comprise for example: coupling a power supply for supplying the two sputtering cathodes and / or the two anode supports with electrical energy in a DC operating mode and / or in an AC operating mode, wherein in the DC operating mode by means of the power supply a negative potential is provided to the two sputtering cathodes and a positive potential to the anode carriers, and wherein in the alternating voltage operating mode by means of the power supply, an alternating voltage is applied to the two sputtering cathodes and the two anode supports are connected to electrical ground (ground potential).

According to various embodiments, a processing arrangement may include: a processing source, a generator arrangement for providing supply potentials for a DC operating mode of the processing source and for an AC operating mode of the processing source; and a switching network device connected between the generator arrangement and the processing source and having input terminals for connecting first supply potential cables and processing source side terminals for connecting second supply potential cables, wherein the switching network device has configuration means arranged for assigning the input terminals to Output connections depending on the respective operating mode.

According to various embodiments, the configuration device may include a first configuration element configured to associate the input ports with the output ports according to the DC operation mode; and further, the configuration means may comprise a second configuration element arranged to associate the input ports with the output ports according to the AC operating mode.

According to various embodiments, the configuration device can have a plug-in interface (or another suitable interface), and the two configuration elements can be or are adapted to the plug-in interface such that they can be plugged into the plug-in interface for assigning the input connections to the output connections to the respective operating mode ( or coupled to the interface) are. Herein, the input terminals may be assigned to the output terminals according to the DC operation mode when the first configuration element is plugged into the plug-in interface or plugged into the plug-in interface, and the input terminals may be assigned to the output terminals according to the AC operation mode. if the second configuration element is plugged into the plug-in interface or plugged into the plug-in interface.

According to various embodiments, the configuration device can be or be set up mechanically finger-proof and / or electrically high-voltage-proof.

According to various embodiments, the processing source may include a first cathode, a second cathode, and at least one anode structure, wherein the two cathodes and the anode structure are connected to the processing source side output terminals of the switching network device via the second supply potential cables.

According to various embodiments, the processing arrangement may further comprise a controller, wherein the controller has a first signaling protocol for recognizing by the generator arrangement, which operating mode is provided, and wherein the controller is a second signaling protocol for recognizing by the configuration device, according to which operating mode the input ports to the output ports are associated.

According to various embodiments, the controller may further comprise a backup protocol for electrically isolating the generator assembly from the switch fabric device when the detected operational mode of the first signaling protocol is not equal to the recognized operational mode of the second signaling protocol. Illustratively, for example, it is compared whether both the generator arrangement and the processing source are in the same operating mode, so that reliable operation can or can be ensured despite the selectable operating modes of the various components.

According to various embodiments, a method for operating a processing arrangement may comprise: converting a generator arrangement from a first operating mode, in which supply potentials are provided for a first operating mode of a processing source, to a second operating mode, in which supply potentials are provided for a second operating mode of the processing source, wherein a switching network device is connected between the generator arrangement and the processing source, which has input terminals for connecting first supply potential cables and processing source side for connecting second supply potential cables, and wherein the switching network device has a configuration device for assigning the input terminals to the output terminals dependent from the respective operating mode; and switching the configuration device from a first configuration in which the input ports are connected to the output ports in accordance with assigned to the first operating mode, to a second configuration in which the input terminals are assigned to the output terminals according to the second operating mode.

According to various embodiments, a method of operating a sputtering arrangement may include: selecting from an AC mode of operation and a DC mode of operation of a generator assembly, wherein in the AC mode of operation of the generator assembly supply potentials are provided for an AC mode of operation of a sputtering source and wherein in the DC mode of operation the generator arrangement supply potentials are provided for a DC operating mode of the sputtering source; Plugging an AC configuration element or DC configuration element into a configuration device corresponding to the selected operating mode of the generator arrangement, thereby supplying the sputter source with the supply potentials for the corresponding operating mode. In other words, when the AC operation mode is selected, the method may include: inserting an AC configuration element into a configuration device of a switching device connected between the generator device and the sputter source, thereby supplying the sputter source with the supply potentials for the AC operation mode; or if the DC mode of operation is selected, the method may include: inserting a DC configuration element into the configuration device of the switching network device connected between the generator device and the sputter source, thereby supplying the sputter source with the supply potentials for the DC mode of operation.

According to various embodiments, a method for operating a sputtering arrangement may include: inserting an AC configuration element into a configuration device of a switching device connected between a generator device and a sputter source, thereby connecting generator side input terminals of the switching device to sputtering-side output terminals of the switching device according to an AC operation mode of a sputtering source become; or inserting a DC configuration element into the configuration device of the switching network device connected between the generator device and the sputtering source, thereby connecting the generator side input terminals of the switching network device to the sputtering source side terminals of the switching network device according to a DC operation mode of the sputtering source; Selecting from an AC operating mode and a DC operating mode of the generator arrangement according to the inserted configuration element. In other words, when the AC configuration element is plugged into the configuration device, the method may include: selecting the AC mode of operation of the generator assembly; or if the DC configuration element is plugged into the configuration device, the method may include: selecting the DC operating mode of the generator arrangement.

Embodiments of the invention are illustrated in the figures and are explained in more detail below.

Show it

1A and 1B each a processing arrangement in a schematic view, according to various embodiments;

2 a processing arrangement in a schematic view, according to various embodiments;

3 a perspective view of a switching network device, according to various embodiments;

4 and 5 each a processing arrangement in different operating modes in a schematic view, according to various embodiments;

6 a control of a processing arrangement in a schematic view, according to various embodiments;

7 a control of a processing arrangement in a schematic view, according to various embodiments;

8th a schematic flowchart for a method of operating a processing arrangement, according to various embodiments;

9 a schematic flowchart for a method of operating a sputtering arrangement, according to various embodiments; and

10 a schematic flow diagram for a method of operating a sputtering arrangement, according to various embodiments.

In the following detailed description, reference is made to the accompanying drawings, which form a part hereof, and in which is shown by way of illustration specific embodiments in which the invention may be practiced. In this regard, directional terminology such as "top", "bottom", "front", "back", "front", "rear", etc. used with respect to the orientation of the figure (s) described. Because components of embodiments can be positioned in a number of different orientations, the directional terminology is illustrative and is in no way limiting. It should be understood that other embodiments may be utilized and structural or logical changes may be made without departing from the scope of the present invention. It should be understood that the features of the various exemplary embodiments described herein may be combined with each other unless specifically stated otherwise. The following detailed description is therefore not to be taken in a limiting sense, and the scope of the present invention is defined by the appended claims.

As used herein, the terms "connected," "connected," and "coupled" are used to describe both direct and indirect connection, direct or indirect connection, and direct or indirect coupling. In the figures, identical or similar elements are provided with identical reference numerals, as appropriate.

According to various embodiments, a multi-mode magnetron is provided which allows the operating mode of the magnetron to be switched from AC operation to DC operation, and vice versa. In this case, a person-safe switching of lines carrying high voltage (for example, more than 200 V, for example, 200 V to 500 V) is ensured on mutually usable terminals of a consumer.

By means of a high voltage high current source (also referred to as a generator) optionally AC or DC voltages are generated. In one embodiment, these modes are supplied to plasma sources. A plasma can be generated in both AC and DC modes. In AC mode, this is done in vacuum this by means of an alternating current (AC) between, for example, two cathodes (for example tube cathodes, planar cathodes, etc.) or in DC mode by means of direct current (DC) between a cathode and anode (for example, between each tube cathode and an anode structure associated with the tube cathode).

That is, in a mode switching of the high voltage high current source, a simultaneous switching of the terminals on the plasma source is required. For example, it would be possible to switch the operating mode by means of manual, time-consuming re-spinning or by means of adapter cables. This work would then have to be carried out by specially trained professionals (i.e.

Therefore, according to various embodiments, switching with a switch box (also referred to as a patch box or configuration device) is realized. Between the generator and the switch box, as well as between the switch box and the plasma source, the power cables are firmly connected to the switch box.

The switching box can be integrated into a switching network device (for example a correspondingly suitably designed switching cabinet), whereby a coupling point for both the generator-side cables and the plasma-source-side cables can be led to the outside.

Alternatively, for example, a switch box (e.g., a suitably configured switch) may be integrated into a magnetron (or the processing source used). For example, the magnetron can be designed as a so-called magnetron cover, wherein the magnetron cover can be placed on a correspondingly matching chamber opening of a vacuum processing chamber, in which case the switching box can be integrated in the magnetron cover or can be.

By means of a suitable configuration of the plug pin bridging in the plug pin assignment, the DC operating mode can be contacted by means of a plug, and the AC operating mode can be contacted by means of another plug. Other configurations would be possible if the processing source required or would be helpful. Both connectors are also referred to herein as patch blocks. These patch blocks can be integrated into the safety circuit, for example.

Alternatively to the switching of the operating modes by means of the appropriately configured patch blocks, the switching can take place by means of electrical switches, e.g. using at least one power contactor. In this case, the driving of the switching operation, i. the appropriately configured control of the generator and the electrical switches used for switching are effected from a user interface or a control panel (i.e., remotely by means of the plant control).

The plug (or other suitable connection elements) are protected by means of a safety circuit (also referred to as a backup protocol), so that by releasing a plug, the connection is switched safely de-energized.

Furthermore, the patch blocks can be set up in such a way that a miscarriage can be avoided. This realizes a person-safe change of the operating mode of the processing source (eg a double-cathode magnetron).

According to various embodiments, an electronics (also referred to as a controller) is provided which is configured such that a processing source (e.g., plasma source), e.g. if the electronics are at least partially integrated into it, it is able to recognize which type of patch block is plugged into the switch box. In this case, the electronics can be set up such that by means of a data-networked system, the generator can also be switched to the respective corresponding operating mode. For example, it is also ensured that the generator, the switch box and, for example, the magnetron are always configured in the same operating mode.

According to various embodiments, for example, a change of the patch blocks for changing the operating mode can take place by means of a mechatronic / electrical system. Thus, for example, no immediate operator intervention is required.

1A and 1B each illustrate a processing arrangement 100 in a schematic view, according to various embodiments. The processing arrangement 100 has, for example, a generator arrangement 102 on, wherein the generator assembly 102 is set up such that these supply potentials for a DC operating mode of a processing source 106 and for an AC operating mode of the processing source 106 can provide. Clearly, a generator can be used which can deliver either DC high voltage / high current or AC high voltage / high current, eg for supplying a plasma source, a sputtering source, or a magnetron.

According to various embodiments, the means of the generator assembly 102 DC high voltage generated may be in a range of about 200V to about 500V, or may be greater than 500V, and the DC high current may be in a range of about 10A to about 10kA, or even greater than 10kA be. The same applies, for example, to the RMS value of the AC high voltage and to the RMS value of the AC high current.

According to various embodiments, only a single generator may be used. Alternatively, multiple generators may be used, e.g. in each case a separate generator for each cathode of a sputtering source to be supplied, so that, for example, the sputtering power for the DC operating mode can be regulated separately for each cathode of the sputtering source, wherein in the AC operating mode a symmetrical operation takes place respectively of at least one cathode pair, wherein one cathode of the cathode pair is at zero and the other is at the phase.

As described above, the processing arrangement 100 a processing source 106 may be arranged as a magnetron with, for example, at least two cathodes. Alternatively, any other processing source may be used which has, for example, a DC and an AC operating mode and needs a corresponding power supply. According to various embodiments, the processing arrangement 100 also several (eg two or more than two) processing sources 106 exhibit.

According to various embodiments, the processing arrangement 100 one between the generator assembly 102 and the processing source 106 switched switching network device 104 on. The switching network device 104 For example, there may be several input connections on the generator side 104e for connecting several first supply potential cables 107e and processing source side (where the terms processing source side, generator side, etc. refer to the functional arrangement and not explicitly due to spatial arrangement) multiple output terminals 104a for connecting several second supply potential cables 107a exhibit.

For example, to supply a magnetron with two cathodes, three (see FIG 1B ) or six (see 4 and 5 ) first supply potential cable 107e be used, which each have two wires and a shield. In doing so, the number of first supply potential cables 107e correlate with the power to be transmitted, if larger power is required, more than six first supply potential cables 107e be used and, if lower Performances may also require less than three supply potential cables 107a be used.

For example, to supply a magnetron with two cathodes, four (see FIG 1B ) or eight (see 4 and 5 ) second supply potential cable 107a be used, which each have two wires and a shield. The number of supply potential cables can be 107a Correlate with the power to be transmitted, if larger power is required, more than eight supply potential cables 107a can be used and, if lower power levels are required, less than four supply potential cables 107a be used.

Accordingly, the number of cores of the respective supply potential cable 107a . 107e be varied.

Accordingly, the number of generator-side input terminals 104e and the number of processing-source-side output terminals 104a provided.

According to various embodiments, the first supply potential cables 107e fixed (eg not pluggable but firmly screwed and / or soldered) with the generator-side input terminals 104e be connected. According to various embodiments, the second supply potential cables 107a fixed (eg not pluggable but firmly screwed and / or soldered) with the processing source side output terminals 104a be connected. This ensures safety for the power-conducting components.

According to various embodiments, the processing arrangement 100 a switching network device 104 on, wherein the switching network device 104 a configuration device 108 has, for example, with a configuration device 108 is electrically coupled. The configuration device 108 is for example arranged such that the input terminals 104e the switching network device 104 to the output terminals 104a the switching network device 104 depending on the respective operating mode (for AC or for DC). Clearly, at least two different interconnections (AC and DC) by means of the configuration device 108 provided, wherein the supply potential cable 107a . 107e when changing the operating mode (eg from DC to AC or from AC to DC) with the respective input connections 104e and output terminals 104a stay connected.

As in 1B is illustrated, the configuration device 108 a first configuration element 108d , eg a DC configuration element 108d , which, for example, the input terminals 104e to the output terminals 104a according to the DC operating mode of the generator arrangement 102 and the processing source 106 assigns. Furthermore, the configuration device 108 a second configuration element 108a , eg an AC configuration element 108a , which, for example, the input terminals 104e to the output terminals 104a according to the AC operating mode of the generator arrangement 102 and the processing source 106 assigns.

This can be done by the configuration device 108 According to various embodiments, a plug-in interface 108s have, wherein the two configuration elements 108a . 108d so matching the plug-in interface 108s are arranged to assign the input terminals to the output terminals to the respective operating mode to the plug-in interface 108s are pluggable. Depending on the respective inserted configuration element 108a . 108d The input terminals are assigned to the output terminals according to the DC operation mode or the AC operation mode.

Due to the mechanical operation of the plugging a security is generated because, for example, unintentional switching can be mechanically excluded. Also, no manual rewiring (also referred to as re-spinning) is necessary so that a safety-relevant source of error (e.g., incorrect assignment of high voltage / high current cables) can be avoided.

The configuration device 108 ie, the configured as a plug configuration items 108a . 108d , can be mechanically finger-safe and / or electrically high voltage safe set up or be, so that accidental contact of a person with high voltage / high current leading cables or elements can be excluded.

In 2 is, analogous to the previously described, a processing arrangement 100 shown in a schematic view. In this case, by way of example, a first interconnection (AC interconnection) between the generator 102 and the processing source 106 (eg plasma source) by means of the AC configuration element 108a (also referred to as AC patch block), wherein each of the AC potential (in other words, the phase) and the reference potential (in other words, the zero) from the generator 102 (or the generator assembly 102 ) to the processing source 106 are guided. Furthermore, by way of example, a second interconnection (DC interconnection) between the generator 102 and the processing source 106 by means of the DC configuration element 108d (also referred to as DC patch block), wherein in each case two cathode potentials and one anode potential from the generator 102 to the processing source 106 are guided. For example, in the illustrated embodiment, two first supply potential cables and three second supply potential cables are used.

In 3 is, analogous to the previously described, the switching network device 104 exemplified. This can, for example, as a control cabinet 104 be configured, wherein the configuration device 108 , eg the plug-in interface 108s the configuration device 108 and the respectively inserted configuration element 108a . 108d by means of a cover 304 is covered. Thus, the configuration device 108 not accessible for security. The tight with the connections 104e . 104a Connected supply potential cables are also designed such that from the outside no electrical contact is accessible.

4 illustrates a processing arrangement 100 , analogous to the above, wherein this by means of a DC configuration element 108d is switched to DC mode and 5 illustrates the processing arrangement 100 , analogous to the previously described, wherein this by means of an AC configuration element 108a is switched to the AC (eg MF) mode.

According to various embodiments, the processing source 106 a first cathode T1, a second cathode T2 and at least one anode structure A. In other words, the processing source 106 For example, as a magnetron with two tubular cathodes T1, T2 (also referred to as tube targets) and at least one anode structure A, which is associated with the two cathodes T1, T2, be configured.

In an analogous manner, however, two planar cathodes (also referred to as planar targets) can be used. In an analogous manner, sputtering cathodes without a magnet arrangement can be used.

Furthermore, the processing source 106 several input connections 106e have, wherein the output terminals 104a the switching network device 104 and the input terminals 106e the processing source 106 by means of the second supply potential cable 107a electrically connected to each other. Between the output terminals 104a the switching network device 104 and the input terminals 106e the processing source 106 takes place at a change of the operating mode, according to various embodiments, no re-spinning or no rewiring. In other words, the input terminals 106e the processing source 106 (for both modes of operation) stuck to the output terminals 104a the switching network device 104 assigned.

The generator arrangement 102 may comprise a generator or a plurality of generators, wherein by means of the generator arrangement 102 for example, those for the DC operating mode of the processing source 106 necessary DC supply potentials can be provided. For this purpose, the generator assembly 102 be in a DC operating mode or be switched. Accordingly, the processing source 106 be configured in a DC mode of operation, for example, the anode structure A may be configured accordingly, so that a DC operation of the processing source 106 is possible.

The generator arrangement 102 may have a plurality of output terminals (not shown), wherein the output terminals of the generator assembly 102 and the input terminals 104e the switching network device 104 by means of the first supply potential cable 107e electrically connected to each other. Between the output terminals of the generator assembly 102 and the input terminals 104e the switching network device 104 takes place at a change of the operating mode, according to various embodiments, no re-spinning or no rewiring. In other words, the input terminals 104e the switching network device 104 (for both modes of operation) fixed to the output terminals of the generator assembly 102 assigned.

The means of the generator assembly 102 for the DC operating mode of the processing source 106 provided DC supply potentials are in the switching network device 104 by means of the configuration device 108 according to the DC operation mode to the processing source 106 directed. It is clear in the in 4 illustrated embodiment, the DC configuration element 108d into the plug-in interface of the configuration device 108 plugged in. In this case, a negative DC supply potential G1, G2- is provided at each of the cathodes T1, T2 and a common positive anode potential at the anode A, respectively. Depending on the power requirement of the processing source 106 For example, in each case three separate lines per negative DC supply potential G1, G2- be used. The used supply potential cables 107e . 107a For example, two-wire can be configured with an additional shielding. In the DC operating mode, for example, the two cathodes T1, T2 can be or will be driven separately, ie they do not have to be operated simultaneously (illustratively not symmetrically) with the same negative DC supply potential G1, G2-.

As in 5 can be illustrated by means of the generator assembly 102 (eg, having one generator or multiple generators), for example, those for the AC operating mode of the processing source 106 necessary AC supply potentials are provided. For this purpose, the generator assembly 102 be in an AC operating mode or be switched. Accordingly, the Prozessierquelle 106 be configured in an AC mode of operation, for example, the anode structure A may be set up accordingly, for example, dismantled or shielded (eg electrically floating), so that an AC operation of the processing source 106 is possible.

The means of the generator assembly 102 for the AC operating mode of the processing source 106 provided AC supply potentials are in the switching network device 104 by means of the configuration device 108 according to the AC operation mode to the processing source 106 directed. It is clear in the in 5 illustrated embodiment, the AC configuration element 108a into the plug-in interface of the configuration device 108 plugged in. This may be the only change required when changing the operating mode. In this case, the two cathodes T1, T2 operate against each other, wherein at one cathode, the power-carrying phase and the other cathode, the corresponding counter-potential (the zero) is applied, and the anode A can be placed on electrical ground, for example. The electrical ground can by means of the respective shielding of the supply potential cable 107a . 107e be or be provided.

Depending on the power requirement of the processing source 106 For example, each of three or six separate lines may be used to provide the power-carrying phase and zero at the respective cathode T1, T2.

According to various embodiments, the configuration of the electrical wiring is outside the configuration device 108 the same in the AC operating mode and the DC operating mode, so that no rewiring or rewiring of the supply potential cable 107e . 107a is necessary when changing from one to the other operating mode.

According to various embodiments, the processing arrangement 100 a controller 600 such as in 6 is illustrated. Illustratively, the generator assembly 102 (eg in the form of a generator cabinet), the configuration device 108 (referred to as patchbox) and the processing source 106 (For example, an RMM magnetron, rotating multi-mode magnetron) by means of a suitably designed plant control 606 operate. It goes without saying that control loops can also be used.

According to various embodiments, a general power supply (PCC, Power Control Center) may be provided. 602 be provided or, for example, a 400 V power supply 611 provides. The generator arrangement 102 can with the general energy supply 602 be coupled, wherein the generator assembly 102 according to the process performance 613 for the processing source 106 provides as described above.

Furthermore, another power supply 614 for operating the processing source 106 , eg for electric drives, measuring technology, etc., by means of a compartment supply 604 be or be provided.

The plant control 606 (Eg in the form of a programmable logic controller, PLC) can optionally also partially in the generator assembly 102 , in the processing source 106 and / or in the compartment supply 604 be housed.

By means of a first signaling protocol 621 , eg integrated in the system control 606 , it can be determined in which operating mode the generator arrangement 102 located.

By means of a second signaling protocol 623 . 625 , eg integrated in the system control 606 , in the power supply 614 and / or in the processing source 106 , it can be determined in which operating mode the configuration device 108 located. Furthermore, by means of the second or a further signaling protocol 623 , eg integrated in the system control 606 , in the power supply 614 and / or in the processing source 106 , in which operating mode the processing source 106 located.

According to various embodiments, a PROFIBUS (Process Field Bus) or any other suitable fieldbus for fieldbus communication may be used for process control, eg for communication between plant control 606 , Generator arrangement 102 , Power supply 614 , and / or processing source 106 ,

If the operating mode of the configuration device 108 by means of the processing source 106 is determined, a simple signal transmission between processing source 106 and configuration device 108 take place, see for example 7 ,

Furthermore, the processing arrangement 100 a safety circuit 631 which is set up such that the processing source 106 from the generator assembly 102 and / or that the switching network device 104 from the generator assembly 102 can be separated, that is vivid that the processing source 106 or the switching network device 104 can be switched off, if provided by the plant control 606 a Malfunction or a corresponding triggering event is determined.

By means of a backup protocol, eg integrated in the plant control 606 , Thus, the generator assembly 102 from the central power supply (as a general power supply 602 ) are electrically separated, for example, if the detected operating mode of the first signaling protocol does not correspond to the detected operating mode of the second signaling protocol. Thus, it can be prevented that various components of the processing arrangement 100 be operated in different operating modes. According to various embodiments, each of the operating mode of the switching network device 104 , eg defined by the respectively in the plug-in interface of the configuration device 108 inserted configuration element, the operating mode of the generator assembly 102 and, if necessary, the operating mode of the processing source 106 be matched with each other, wherein the switching network device 104 and the processing source 106 only be supplied with electrical energy when all components involved are in the same operating mode.

In 7 is the communication 700 between the plant control 606 , the processing source 106 (eg a magnetron 106 ) and the configuration device 108 exemplified.

For example, a programmable logic controller PLC in the plant control 606 and into the processing source 106 be integrated or be, being for communication a suitable bus system 723 , For example, a suitable fieldbus, such as PROFIBUS, can be used.

Furthermore, a visualization 770 (Visu) as interface for the plant control 606 be used.

By means of the programmable logic controller PLC, eg in the processing source 106 , can be a signal 725 be evaluated, which is the inserted configuration element 108a . 108d (eg in the form of an inserted configuration plug) clearly identified. In the simplest case, this can be a simple electrical signal for identifying two different plug states.

In 8th is a schematic flow diagram for a method 800 for operating a processing arrangement, eg for operating the processing arrangement described herein 100 , exemplified. The process can be 800 Have: in 810 , Changing a generator arrangement 102 from a first operating mode in which supply potentials for a first operating mode of a processing source 106 be provided to a second operating mode, in which supply potentials for a second operating mode of the processing source 106 be provided, wherein between the generator assembly 102 and the processing source 106 a switching network device 104 is switched, which generator side input terminals 104e has for connecting first supply potential cables 107e and process source side output terminals 104a has for connecting second supply potential cables 107a , and wherein the switching network device 104 a configuration device 108 has for assigning the input terminals 104e to the output terminals 104a depending on the respective operating mode; and in 820 , Changing the configuration device 108 from a first configuration in which the input terminals 104e to the output terminals 104a assigned to the first operating mode, to a second configuration in which the input terminals 104e to the output terminals 104a associated with the second operating mode. Furthermore, the method can 800 be designed in an analogous manner, as it is in accordance with the processing arrangement described herein 100 results.

In 9 is a schematic flow diagram for a method 900 for operating a sputtering arrangement, eg for operating the magnetron described herein, exemplified. The process can be 900 Have: in 910 , Selecting from an AC operating mode and a DC operating mode of a generator arrangement 102 , wherein in the AC operating mode of the generator arrangement 102 Supply potentials for an AC operating mode of a sputtering source 106 be provided and wherein in the DC operating mode of the generator assembly 102 Supply potentials for a DC operating mode of the sputtering source 106 to be provided; and in 920 , Inserting an AC Configuration Item 108a or DC configuration item 108d in a configuration device 108 according to the selected operating mode of the generator arrangement 102 , thereby the sputtering source 106 the supply potentials are supplied for the corresponding operating mode. Furthermore, the method can 900 be designed in an analogous manner, as it is in accordance with the processing arrangement described herein 100 results.

In 10 is a schematic flow diagram for a method 1000 for operating a sputtering arrangement, eg for operating the magnetron described herein, exemplified. The process can be 1000 Have: in 1010 , Inserting an AC Configuration Item 108a in a configuration device 108 one between a generator assembly 102 and a sputtering source 106 switched switching network device 104 , whereby thereby generator-side input terminals 104e the switching network device 104 with sputter-source-side output terminals 104a the switching network device 104 according to an AC operating mode of a sputtering source 106 or plugging in a DC configuration item 108d into the configuration device 108 the between the generator assembly 102 and the sputtering source 106 switched switching network device 104 , whereby thereby the generator-side input terminals 104e the switching network device 104 with the sputter-source-side output terminals 104a the switching network device 104 according to a DC operation mode of the sputtering source 106 get connected; and in 1020 , Selecting from an AC operating mode and a DC operating mode of the generator assembly 102 according to the inserted configuration element 108a . 108d , Furthermore, the method can 1000 be designed in an analogous manner, as it is in accordance with the processing arrangement described herein 100 results.

Claims (9)

Processing arrangement ( 100 ), comprising: • a processing source ( 106 ) for processing a substrate; A generator arrangement ( 102 ) for providing supply potentials for a DC operating mode of the processing source ( 106 ) and for an AC operating mode of the processing source ( 106 ); and • one between the generator arrangement ( 102 ) and the processing source ( 106 ) connected switching network device ( 104 ), the generator side input terminals ( 104e ) for connecting first supply potential cables ( 107e ) and processing source side output terminals ( 104a ) for connecting second supply potential cables ( 107a ), Wherein the switching network device ( 104 ) a configuration device ( 108 ) arranged to associate the input ports ( 104e ) to the output terminals ( 104a ) depending on the respective operating mode. Processing arrangement according to claim 1, wherein the configuration device ( 108 ) a first configuration element ( 108d ) which is arranged to assign the input terminals ( 104e ) to the output terminals ( 104a ) according to the DC operation mode; and wherein the configuration device ( 108 ) a second configuration element ( 108a ) which is arranged to assign the input terminals ( 104e ) to the output terminals ( 104a ) according to the AC operation mode. Processing arrangement according to claim 2, wherein • the configuration device ( 108 ) a plug-in interface ( 108s ), and wherein the two configuration elements ( 108a . 108d ) is suitable for the plug-in interface ( 108s ) are arranged to be used for assigning the input terminals ( 104e ) to the output terminals ( 104a ) to the respective operating mode to the plug-in interface ( 108s ) are pluggable. Processing arrangement according to one of claims 1 to 3, wherein the configuration device ( 108 ) is mechanically finger-proof and / or electrically high voltage safe. Processing arrangement according to one of claims 1 to 4, • wherein the processing source ( 106 ) has a first cathode (T1), a second cathode (T2) and at least one anode structure (A), and • wherein the two cathodes (T1, T2) and the anode structure (A) by means of the second supply potential cable ( 107a ) with the processing-source-side output terminals ( 104a ) of the switching network device ( 104 ) are electrically connected. Processing device according to one of claims 1 to 5, further comprising: a controller ( 600 ) comprising: • a first signaling protocol for recognizing by the generator arrangement ( 102 ), which operating mode is provided, and • a second signaling protocol for recognition by the configuration device ( 108 ), according to which operating mode the input connections ( 104e ) to the output terminals ( 104a ) assigned. Processing arrangement according to claim 6, wherein the controller ( 600 ) a fuse protocol for electrically separating the generator arrangement ( 102 ) from the switchgear device ( 104 ), if the detected operating mode of the first signaling protocol does not correspond to the recognized operating mode of the second signaling protocol. A method of operating a processing arrangement, the method comprising: • converting a generator arrangement ( 102 ) of a first operating mode in which supply potentials for a first operating mode of a processing source ( 106 ) to a second operating mode in which supply potentials for a second operating mode of the processing source ( 106 ), wherein between the generator arrangement ( 102 ) and the processing source ( 106 ) a switching network device ( 104 ), which has generator side input terminals ( 104e ) for connecting first supply potential cables ( 107e ) and process source side output terminals ( 104a ) for connecting second supply potential cables ( 107a ), and wherein the switching network device ( 104 ) a configuration device ( 108 ) for assigning the input terminals ( 104e ) to the output terminals ( 104a ) depending on the respective operating mode; and • changing the configuration device ( 108 ) of a first configuration in which the input terminals ( 104e ) to the output terminals ( 104a ) are allocated according to the first operating mode, to a second configuration in which the input terminals ( 104e ) to the output terminals ( 104a ) are assigned according to the second operating mode. A method of operating a sputtering assembly, the method comprising: selecting from an AC mode of operation and a DC mode of operation of a generator assembly ( 102 ), wherein in the AC operating mode of the generator arrangement ( 102 ) Supply potentials for an AC operating mode of a sputtering source ( 106 ) and wherein in the DC operating mode of the generator arrangement ( 102 ) Supply potentials for a DC operating mode of the sputtering source ( 106 ) to be provided; and • inserting an AC configuration element ( 108a ) or DC configuration element ( 108d ) into a configuration device ( 108 ) according to the selected operating mode of the generator arrangement ( 102 ), whereby the sputtering source ( 106 ) the supply potentials are supplied for the corresponding operating mode. A method of operating a sputtering assembly, the method comprising: • inserting an AC configuration element ( 108a ) into a configuration device ( 108 ) one between a generator arrangement ( 102 ) and a sputtering source ( 106 ) connected switching network device ( 104 ), whereby thereby generator-side input connections ( 104e ) of the switching network device ( 104 ) with sputter-source-side output terminals ( 104a ) of the switching network device ( 104 ) according to an AC operating mode of a sputtering source ( 106 ), or • Inserting a DC configuration element ( 108d ) into the configuration device ( 108 ) between the generator arrangement ( 102 ) and the sputtering source ( 106 ) connected switching network device ( 104 ), whereby the generator-side input terminals ( 104e ) of the switching network device ( 104 ) with the sputter-source-side output terminals ( 104a ) of the switching network device ( 104 ) according to a DC operating mode of the sputtering source ( 106 ) get connected; and selecting from an AC operating mode and a DC operating mode of the generator arrangement ( 102 ) according to the inserted configuration element ( 108a . 108d ).

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